Plasma-based surface modification treatment equipment

Abstract

The plasma-based surface modification treatment equipment comprises a roller, a driving mechanism, a plasma source device and a flow guide part, the roller is configured to contain materials to be treated, a taking and placing door capable of being opened and closed is arranged on the roller, and when the taking and placing door is in an open state, an opening used for feeding or discharging is exposed out of the roller; when the pick-and-place door is in a closed state, the opening for feeding or discharging is closed; the driving mechanism is configured to directly drive or indirectly drive the roller to rotate; the plasma source device is arranged outside the roller and is configured to generate plasma substances; the flow guide piece is configured to communicate the plasma source device with the roller, and the flow guide piece is in dynamic sealing connection with the roller; and the roller is provided with a vacuum pumping interface connected with a vacuum pump. The plasma excitation area and the material processing area are designed in a separated mode, a vacuum cavity is replaced by the roller inner cavity, the size of the roller can be larger, and more materials can be processed at a time.

Description

Technical Field

[0001] The present invention relates to the field of plasma modification, and particularly to a surface modification treatment device based on plasma. Background Art

[0002] Plasma powder modification utilizes the high temperature, high speed, and high energy characteristics of the plasma jet to excite and modify the surface of the powder, which can improve the surface hardness, wear resistance, corrosion resistance, and hydrophobicity of the material, enhance the functionality and reliability of the material, and has the advantages of safety, environmental protection, high efficiency, and low cost. It is widely applied in various material fields, such as metal materials, ceramic materials, polymer materials, etc.

[0003] Currently, the plasma surface modification equipment generally has the structure disclosed in the Chinese patent with the application number 202223356839.8: a drum for loading materials and an electrode member for exciting plasma are arranged in a vacuum chamber. The existing equipment has the following deficiencies:

[0004] (1) Both the plasma excitation area and the material treatment area are in the vacuum chamber. The plasma excitation process is easily affected by the moving materials, resulting in unstable discharge and thus affecting the material treatment quality.

[0005] (2) The drum for treating materials is arranged in the vacuum chamber, which makes it impossible to design the drum to be too large. The amount of materials processed at one time is relatively small, and the feeding and discharging are inconvenient.

[0006] The disclosure of the above background art content is only for assisting in understanding the inventive concept and technical solution of the present invention. It does not necessarily belong to the prior art of this patent application, nor will it necessarily give technical guidance. Without clear evidence indicating that the above content was publicly available before the filing date of this patent application, the above background art should not be used to evaluate the novelty and creativity of this application. Summary of the Invention

[0007] The purpose of the present invention is to provide a surface modification treatment device based on plasma, which abandons the conventional design of arranging a drum in a vacuum chamber and proposes an improved surface modification treatment device.

[0008] To achieve the above purpose, the technical solution adopted by the present invention is as follows:

[0009] A surface modification treatment device based on plasma, comprising:

[0010] A drum, which is configured to accommodate the material to be treated. The drum is provided with an openable access door. When the access door is in the open state, an opening for feeding or discharging is exposed on the drum; when the access door is in the closed state, the opening for feeding or discharging is sealed.

[0011] A driving mechanism configured to directly or indirectly drive the drum to rotate;

[0012] A plasma source device disposed outside the drum and configured to generate plasma substances;

[0013] A flow guide member configured to connect the plasma source device and the drum, and the flow guide member is in dynamic sealing connection with the drum;

[0014] The drum is provided with a vacuum pumping interface for connecting to a vacuum pump.

[0015] Further, based on any one of the foregoing technical solutions or a combination of multiple technical solutions, both end faces of the drum are provided with extension portions extending outward along the axial center line. The extension portions are in communication with the drum and are respectively connected to bearing seats;

[0016] The driving mechanism drives at least one extension portion to rotate through a transmission assembly.

[0017] Further, based on any one of the foregoing technical solutions or a combination of multiple technical solutions, the pick-and-place door is disposed on the circumferential wall of the drum;

[0018] And / or, the drum is one of a cylindrical drum, a triangular drum, a polygonal drum, an elliptical drum, and an irregularly shaped drum;

[0019] And / or, the two extension portions of the drum are coaxially arranged, and the two extension portions are centrally arranged or eccentrically arranged on the end face of the drum.

[0020] Further, based on any one of the foregoing technical solutions or a combination of multiple technical solutions, one end face of the drum is provided with an extension portion extending outward along the axial center line. The extension portion is in communication with the drum and is connected to a bearing seat;

[0021] The device further includes two rotating rollers configured to jointly support the drum;

[0022] The driving mechanism drives the extension portion to rotate through a transmission assembly, and / or the driving mechanism drives the rotating rollers to rotate.

[0023] Further, based on any one of the foregoing technical solutions or a combination of multiple technical solutions, at least one first gear is circumferentially arranged on the drum, and second gears corresponding to the first gears one by one are respectively sleeved on the two rotating rollers, and the first gear meshes with the second gear;

[0024] Alternatively, a limiting member is disposed on the rotating roller or adjacent to the rotating roller, and the limiting member is configured to prevent the drum from moving along the axial center line.

[0025] Further, based on any one of the above-described technical solutions or a combination of multiple technical solutions, the device further includes two rotating rollers configured to jointly support the drum;

[0026] At least one of the rotating rollers is driven by the driving mechanism to drive the drum to rotate, including: the rotating roller is in frictional contact with the drum, or at least two first gears are circumferentially arranged on the drum, and second gears corresponding to the first gears one by one are respectively sleeved on the two rotating rollers, and the first gears are meshed with the second gears.

[0027] Further, based on any one of the above-described technical solutions or a combination of multiple technical solutions, the manner in which the driving mechanism drives the extension to rotate through the transmission assembly is:

[0028] A third gear is arranged on the extension, and a fourth gear meshing with the third gear is arranged, and the fourth gear is connected to the output shaft of the driving mechanism.

[0029] Further, based on any one of the above-described technical solutions or a combination of multiple technical solutions, the drum is hermetically connected to the flow guide member by using a magnetic fluid sealed bearing or a fluoroplastics gasket sealed bearing.

[0030] Further, based on any one of the above-described technical solutions or a combination of multiple technical solutions, the flow guide member extends into the drum, and the flow guide member has a straight pipe portion and / or a bent pipe portion;

[0031] The portion of the flow guide member located inside the drum has a plurality of branch ends, or the pipe wall of the flow guide member located inside the drum is provided with spray nozzles.

[0032] Further, based on any one of the above-described technical solutions or a combination of multiple technical solutions, the vacuum pumping interface on the drum is arranged on the side end cover of the drum, and the side end cover is fixedly or detachably installed on the drum;

[0033] and / or, the vacuum pumping interface is a universal joint;

[0034] and / or, a ridge extending along the axial center line direction is provided on the inner surface of the side wall of the drum;

[0035] and / or, a vacuum-breaking air inlet for air intake is provided on the drum;

[0036] and / or, an auxiliary vacuum pumping port is provided on the drum.

[0037] Further, based on any one of the above-described technical solutions or a combination of multiple technical solutions, the flow guiding member is configured with a first air inlet, and the first air inlet is configured to input working gas and carrier gas into the plasma source device so that the plasma source device generates plasma;

[0038] And / or, the flow guiding member is further configured with one or more second air inlets, and the second air inlets are configured to input working gas or gaseous precursor;

[0039] And / or, the material of the roller is metal, quartz, ceramic or sapphire; and / or, the material of the flow guiding member is quartz, ceramic or sapphire;

[0040] And / or, the excitation power frequency of the plasma source device is between 1 kHz and 6 GHz, its power is between 10 W and 30 kW, and its working mode is continuous wave working mode or pulse working mode with a frequency between 5 Hz and 1 MHz.

[0041] The beneficial effects brought by the technical solutions provided by the present invention are as follows:

[0042] The surface modification treatment equipment based on plasma provided by the present invention is different from the prior art in which the plasma excitation cavity and the material treatment cavity are integrated. By separating the plasma excitation area and the material treatment area, stable discharge can be achieved, a lower material plasma treatment temperature can be obtained, and thus the material treatment quality can be improved; in addition, in the surface modification treatment equipment provided by the present invention, only the roller is used and the vacuum chamber is removed, so that the roller for processing materials can be made very large, more objects to be processed can be processed at one time, and it is also more convenient to feed and take materials. BRIEF DESCRIPTION OF THE DRAWINGS

[0043] In order to more clearly illustrate the technical solutions in the embodiments of the present application or the prior art, the following will briefly introduce the drawings required for the description of the embodiments or the prior art. Obviously, the drawings in the following description are only some embodiments recorded in the present application. For those of ordinary skill in the art, without creative efforts, other drawings can also be obtained based on these drawings.

[0044] Figure 1 A schematic diagram of the structure of the surface modification treatment equipment provided for an exemplary embodiment of the present invention;

[0045] Figure 2 A schematic diagram of the structure provided for an exemplary embodiment of the present invention, in which one end drives the roller by a gear and the other end is supported by a bearing seat;

[0046] Figure 3 A schematic diagram of the structure provided for an exemplary embodiment of the present invention, in which both ends drive and support the roller by gears;

[0047] Figure 4 Schematic structural diagram of a structure for driving and supporting a drum at one end by a gear and supporting it in the middle by a roller, provided for an exemplary embodiment of the present invention;

[0048] Figure 5 Schematic structural diagram of a structure for supporting a drum at both ends by bearing seats and driving the drum by a gear at one end, provided for an exemplary embodiment of the present invention;

[0049] Figure 6 (a)-(b) Schematic structural diagrams of two different drums provided for an exemplary embodiment of the present invention;

[0050] Figure 7 Schematic structural diagram of a connection between a flow guide member and a drum provided for an exemplary embodiment of the present invention;

[0051] Figure 8 Schematic structural diagram of a connection between a flow guide member and a drum through a magneto - fluid sealed bearing provided for an exemplary embodiment of the present invention;

[0052] Figure 9 (a)-(d) Schematic structural diagrams of four different drum end faces provided for an exemplary embodiment of the present invention;

[0053] Figure 10 (a)-(e) Schematic structural diagrams of five different flow guide members provided for an exemplary embodiment of the present invention.

[0054] Among them, the reference numerals include: 1 - plasma source device, 2 - motor, 3 - first bearing seat, 4 - roller, 5 - second gear, 6 - air pipe, 7 - joint, 8 - side end cover, 9 - drum, 91 - extension part, 92 - cylinder body access door, 10 - first gear, 11 - flow guide member, 12 - third gear, 13 - fourth gear, 14 - first air inlet, 15 - second air inlet, 16 - dynamic seal flange, 17 - second bearing seat, 18 - discharge chamber. Detailed implementation manners

[0055] In order to enable those skilled in the art of the present technology to better understand the solution of the present invention, the technical solutions in the embodiments of the present invention will be clearly and completely described below in conjunction with the accompanying drawings in the embodiments of the present invention. Obviously, the described embodiments are only a part of the embodiments of the present invention, rather than all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those of ordinary skill in the art without creative efforts shall fall within the protection scope of the present invention.

[0056] It should be noted that the terms "first", "second", etc. in the description, claims and the above-mentioned drawings of the present invention are used to distinguish similar objects, and do not necessarily have to be used to describe a specific order or sequence. It should be understood that such data can be interchanged under appropriate circumstances so that the embodiments of the present invention described herein can be implemented in an order other than those illustrated or described herein. In addition, the terms "comprising" and "having" and any variations thereof are intended to cover non-exclusive inclusion. For example, a process, method, device, product or equipment comprising a series of steps or units does not necessarily have to be limited to those steps or units clearly listed, but may include other steps or units not clearly listed or inherent to these processes, methods, products or equipment.

[0057] In one embodiment of the present invention, a plasma-based surface modification treatment device is provided. Refer to Figures 1 to 5 , the surface modification treatment device includes:

[0058] A drum 9, which is configured to accommodate the material to be processed. The drum 9 is provided with an openable and closable access door. When the access door is in the open state, an opening for feeding or discharging is exposed on the drum 9; when the access door is in the closed state, the opening for feeding or discharging is sealed.

[0059] A driving mechanism, which is configured to directly drive or indirectly drive the drum 9 to rotate.

[0060] A plasma source device 1, which is arranged outside the drum 9 and is configured to generate plasma substances.

[0061] A flow guiding member 11, which is configured to connect the plasma source device 1 and the drum 9, and the flow guiding member 11 is in dynamic sealing connection with the drum 9.

[0062] The drum 9 is provided with a vacuum pumping interface for connecting to a vacuum pump.

[0063] Wherein, when the access door is in the closed state, the drum 9 is a sealed cavity, and the plasma generated by the plasma source device 1 is input into the drum 9 through the flow guiding member 11. By connecting the vacuum pump to the vacuum pumping port and starting the vacuum pump, the gas in the drum 9 is pumped out by the vacuum pump to form a vacuum. In other words, the drum 9 and external devices should all be in sealed connection, that is, all the plasma flowing through the flow guiding member 11 should enter the drum 9.

[0064] Different from the way of integrating the plasma excitation chamber and the material processing chamber in the prior art, in this embodiment, the plasma source device 1 is arranged outside the drum 9. After the plasma is excited in the flow guiding member 11 by the plasma source device 1, the plasma is then transported into the drum 9 and reacts with the surface of the material to be processed in the drum 9. By separating the plasma excitation area and the material processing area, the excitation of the plasma is not affected by the object to be processed and the movement of the object to be processed, and stable discharge can be achieved. In addition, the present invention provides a surface modification treatment device. Since there is no discharge process in the drum 9 for surface treatment of materials, the material processing is not affected by the heat generated by the electrodes and the plasma excitation chamber wall, and a lower material plasma treatment temperature can be obtained, thereby improving the material processing quality.

[0065] In the surface modification treatment device provided by the present invention, the inner cavity of the drum is configured to be in a vacuum state, replacing the traditional vacuum chamber arranged outside the drum, so that the size of the drum can be made large enough to process more materials at one time. Especially when processing materials exceeding 50 kg, there is no vacuum chamber arranged outside the drum, which is very convenient for feeding and discharging, and the overall device is also more convenient for maintenance and repair.

[0066] In the surface modification treatment device provided by the present invention, the drum 9 is configured to rotate around its axis or rotate centrifugally around a parallel line of the axis. There are various ways to support and rotate the drum 9. The following will elaborate on its specific implementation methods in detail through several preferred embodiments that can make the drum support stable and rotate more smoothly.

[0067] In an embodiment of the present invention, refer to Figure 5 , extension parts 91 extending outward along the axis direction are provided on both end faces of the drum 9, and the two extension parts 91 are arranged centrally or eccentrically on the end face of the drum 9. Preferably, the two extension parts 91 of the drum 9 are coaxially arranged. The extension part 91 communicates with the drum 9 and is respectively rotatably connected to the second bearing seat 17, and the second bearing seat 17 is fixed; the driving mechanism drives at least one extension part 91 to rotate through a transmission component.

[0068] Among them, the way that the driving mechanism drives the extension part 91 to rotate through the transmission component is as follows:

[0069] A third gear 12 is arranged on one extension part 91, and a fourth gear 13 meshing with the third gear 12 is arranged, and the fourth gear 13 is connected to the output shaft of the driving mechanism, and the driving mechanism is a motor 2. The motor drives the fourth gear 13 to rotate, and then drives the third gear 12 and the extension part 91 of the drum 9 to rotate. Other ways to drive the drum to rotate will be described in detail below.

[0070] In this embodiment, the drum 9 can be a cylindrical drum, a triangular drum, a polygonal drum, an elliptical drum (see Figure 6 shown in (b) therein), or an irregularly shaped drum. In this embodiment, the cylindrical drum 9 has a structure with a large middle cylinder and extension parts 91 provided at both ends respectively, as Figure 9 shown in (a) therein.

[0071] The inner cavity of the drum 9 can be a cylindrical structure without ridges on the side wall, or a cylindrical structure with ridges. The ridges can be arranged parallel to the central axis of the drum, or not parallel to the central axis of the drum, for example, arranged at a certain angle to the central axis of the drum; the ridges can be evenly distributed or unevenly distributed inside the drum. Preferably, the inner surface of the side wall of the drum 9 is provided with ridges extending along the axial direction. Preferably, a plurality of ridges are distributed circumferentially along the side wall. Each ridge can be a continuous or discontinuous structure. It can penetrate through the inside of the drum 9, or only be distributed locally inside the drum 9. The ridges play a role in stirring the materials when the drum rolls, making the plasma material treatment more uniform.

[0072] Since the drum in this embodiment is supported by the second bearing seats 17 at both ends, a pick-and-place door can be provided on the peripheral wall of the drum 9. In this way, when discharging, the treated materials can automatically fall out of the pick-and-place door by the action of gravity: as Figure 6 shown in (a) therein, the drum has a structure with a middle cylinder and tapered ends, and a body pick-and-place door 92 is provided on its peripheral wall; as Figure 6 shown in (b) therein, the drum can also be an irregularly shaped structure similar to an ellipse. Similarly, a body pick-and-place door 92 is provided on its peripheral wall; as Figure 5 shown, a body pick-and-place door 92 is provided at each of the upper and lower positions of the peripheral wall of the drum body. In actual use, a pick-and-place door that is convenient for operation can be selected according to needs for taking or adding materials.

[0073] In this embodiment, the vacuum pumping interface on the drum 9 is provided on the side surface of the drum 9. The vacuum pumping interface is preferably connected to an external vacuum pump through a universal joint 7 and an air pipe 6. The universal joint 7 prevents the air pipe 6 from rotating when the drum 9 rotates. More preferably, the drum 9 is also provided with an auxiliary vacuum pumping port for pre-pumping the inside of the drum or assisting in vacuum pumping during the material treatment process to prevent the powder materials to be treated from flying due to vacuum pumping.

[0074] Preferably, at least one pressure sensor is provided inside the drum 9, and the pressure sensor is configured to monitor the pressure value inside the drum in real time. If it detects that the air pressure value inside the drum is higher than the preset value, the vacuum pump is started to pump air from the inner cavity of the drum, so that the air pressure value inside the drum does not exceed the target vacuum pressure value during the entire material processing process. Preferably, the cavity 1 is also provided with a vacuum-breaking air inlet for air intake to prevent the processed material from escaping from the drum 9 due to backpressure during vacuum breaking. The present invention does not limit the setting of the vacuum-breaking air inlet on the housing of the drum 9. For example, the air inlet of the plasma source can be used as the vacuum-breaking air inlet.

[0075] See Figure 7 and Figure 8 , the drum 9 is connected to the flow guiding member through a dynamic sealing flange 16. Preferably, it is hermetically connected to the flow guiding member 11 by using a magnetic fluid sealing bearing or a fluoroplastic gasket sealing bearing. Preferably, the axis of the flow guiding member 11 and the axis of the drum 9 are on the same straight line. See Figure 7 , the flow guiding member 11 is configured with a first air inlet 14, and the first air inlet 14 is configured to input working gas and carrier gas into the plasma source device 1, so that the plasma source device 1 generates plasma. Preferably, the flow guiding member 11 is further configured with one or more second air inlets 15, and the second air inlets 15 are configured to input working gas or gaseous precursor. The first air inlet 14 and the second air inlets 15 can meet the processing requirements for improving the surface hydrophobicity of the material.

[0076] In this embodiment, the flow guiding member 11 extends into the drum 9, and the flow guiding member 11 has a straight pipe portion and / or a bent pipe portion. Preferably, the pipe wall of the flow guiding member 11 located inside the drum 9 is provided with spray nozzles. See Figure 10 , the flow guiding member 11 extending into the drum 9 can have various structures such as a bent pipe, a straight pipe, or a pipe wall provided with slots / spray holes. For example, the flow guiding member 11 is a stepped thickening and spray pipe structure with spray holes as shown in Figure 10 (a), or a spray pipe structure with circumferential or circumferential partial spray holes as shown in Figure 10 (b) and Figure 10 (d), or a tubular structure with a slot at the lower end and a baffle as shown in Figure 10 (c), or a tubular structure with a slot at the lower end and no baffle at the end face relative to the slot position as shown in Figure 10 (e). The pipe wall of the flow guiding member 11 located inside the drum 9 is provided with spray nozzles or a spray port structure with slots, which can form a uniform and reasonable plasma distribution inside the drum, facilitating the improvement of the material processing quality.

[0077] In yet another embodiment of the present invention, the portion of the flow guide member 11 located inside the drum 9 further has a plurality of branch ends, and plasma is filled into various target positions inside the drum 9 through the plurality of branch ends, so that a more uniform and sufficient plasma gas can be obtained inside the drum 9.

[0078] In any of the above embodiments, the excitation power frequency of the plasma source device 1 ranges from 1 kHz to 6 GHz, and it can be single-frequency output or multi-frequency simultaneous output. Its power ranges from 10 W to 30 kW, and its working mode is continuous wave working mode or pulse working mode with a frequency ranging from 5 Hz to 1 MHz, and the duty cycle ranges from 1% to 100%.

[0079] In any of the above embodiments, the material of the drum 9 is metal, quartz, ceramic or sapphire; and / or, the material of the flow guide member 11 is quartz, ceramic or sapphire, and the plurality of branch ends of the flow guide member 11 are one or more of quartz, ceramic, sapphire, metal, Teflon, and organic materials with a temperature resistance exceeding 100 degrees Celsius. The surface modification treatment equipment provided by the present invention can be commonly used for the modification treatment of various particle / powder materials, such as conductive materials, inorganic salt materials (ceramic powder), organic materials, and temperature-sensitive or electrically sensitive materials.

[0080] The following describes other different driving methods:

[0081] The driving method of this embodiment is different from that of the above embodiment. Refer to Figure 4 , one end face of the drum 9 is provided with an extension portion 91 extending outward along the axial center line, and the extension portion 91 is centrally arranged on the end face of the drum 9. The extension portion 91 is communicated with the drum 9 and is rotatably connected to the second bearing seat 17, and the second bearing seat 17 is fixed. The equipment further includes two rotating rollers 4, and the two rotating rollers 4 are configured to jointly support the drum 9. Each rotating roller 4 is connected to at least two first bearing seats 3, and the first bearing seats 3 are configured to support the rotating roller 4. A third gear 12 is arranged on the extension portion 91, and a fourth gear 13 meshing with the third gear 12 is arranged, and the fourth gear 13 is connected to the output shaft of the motor 2. The motor drives the fourth gear 13 to rotate, and further drives the third gear 12 and the drum 9 to rotate. As shown in (d) of Figure 9 , the cylinder 9 is a structure in which an extension portion 91 is added outside the closing structure of the cylinder shown in (c) of Figure 9 .

[0082] In another embodiment of the present invention, refer to Figure 2, one end face of the drum 9 is provided with an extension part 91 extending outward along the axial line direction. The extension part 91 is communicated with the drum 9 and is connected to the second bearing seat 17, and the second bearing seat 17 is fixed. In this embodiment, the device further includes two rotating rollers 4. Each rotating roller 4 is connected to at least two first bearing seats 3, and the first bearing seats 3 are configured to carry the rotating roller 4. At least one first gear 10 is circumferentially arranged on the drum 9. Second gears 5 corresponding to the first gears 10 one by one are respectively sleeved on the two rotating rollers 4, and the first gears 10 are meshed with the second gears 5. The drum 9 is jointly carried by the second gears 5 on the two rotating rollers 4 and the second bearing seat 17. At least one rotating roller 4 is driven by a motor to rotate, and the second gears 5 on the rotating roller 4 rotate synchronously, thereby driving the first gear 10 and the drum 9 to rotate.

[0083] Preferably, a limiting member is arranged on or adjacent to the rotating roller 4, and the limiting member is configured to prevent the drum 9 from moving along the axial line direction.

[0084] In another embodiment of the present invention, the device further includes two rotating rollers 4. The two rotating rollers 4 are configured to jointly carry the drum 9. Each rotating roller 4 is connected to at least two first bearing seats 3, and the first bearing seats 3 are configured to carry the rotating roller. The rotating roller 4 is in frictional contact with the drum 9, and at least one rotating roller 4 is driven by the driving mechanism (motor) to drive the drum 9 to rotate.

[0085] In another embodiment of the present invention, see Figure 3 , the device further includes two rotating rollers 4. The two rotating rollers 4 are configured to jointly carry the drum 9. Each rotating roller 4 is connected to at least two first bearing seats 3, and the first bearing seats 3 are configured to carry the rotating roller. At least two first gears 10 are circumferentially arranged on the drum 9. Second gears 5 corresponding to the first gears 10 one by one are respectively sleeved on the two rotating rollers 4, and the first gears 10 are meshed with the second gears 5. At least one rotating roller 4 is driven by a motor to rotate, and the second gears 5 on the rotating roller 4 rotate synchronously, thereby driving the first gear 10 and the drum 9 to rotate. In this embodiment, the drum 9 is towed and driven to rotate by the second gears 5 on the rotating roller 4. As shown in (b) of Figure 9 , the cylinder 9 is a standard cylinder structure; or as shown in (c) of Figure 9 , the cylinder 9 is a cylinder structure with an outwardly flared opening at one end. The present invention does not limit the specific structure of the drum 9. A sealed vacuum cavity can be formed inside the drum 9, and it can drive the object to be processed to rotate.

[0086] In the embodiment where the roller 4 supports the drum 9, openings are provided at both ends of the drum 9 along the axial center line direction. The opening at one end is configured to be connected to the side end cover 8, and the opening at the other end is configured to be in dynamic sealing connection with the flow guiding member 11. As Figure 1 shown, the drum 9 is of a cylindrical structure, and an end cover 8 is provided at one end thereof away from the plasma source device 1. The access door on the drum 9 can be provided on the side end cover 8, or the side end cover 8 is detachably installed at one end of the drum 9, that is, the side end cover 8 serves as the access door. Further, an observation window can be provided on the side end cover 8 to observe the material treatment process and whether the treatment process end point is reached.

[0087] It should be noted that this application is not limited to only using two rollers 4 to support or drive the drum 9. By using three or even more rollers 4 and distributing the rollers 4 around the drum 9, as long as the multiple rollers are reasonably arranged and at least one of the rollers is driven to rotate by a motor and the other rollers rotate passively, the drum can also be stably supported and smoothly driven.

[0088] In an embodiment of the present invention, a method for surface modification treatment of a material using the surface modification treatment device described in any of the above embodiments is provided, including the following steps:

[0089] Open the access door of the drum, place the powder material to be treated in the drum, and lock the access door; specifically, for a drum provided with a side end cover, remove the side end cover of the drum, place the material to be treated in the drum, and then lock the side end cover; for a drum provided with an access door on the side peripheral wall, rotate the access door to the upper side manually or by a driving mechanism, place the material to be treated in the drum, and then lock the access door;

[0090] Start the vacuum pump to evacuate the drum until the vacuum degree in the drum is pumped to the set value;

[0091] Start the driving mechanism to drive the drum to rotate to stir the powder material to be treated;

[0092] Introduce the working gas into the plasma source device, and turn on the plasma source device to ionize the working gas into remote plasma in the flow guiding member and transmit it to the drum through the flow guiding member, so that the material to be treated in the drum is surface-treated during the rotation and stirring process;

[0093] Until the plasma treatment of the material to be treated is completed, turn off the plasma source device, the driving mechanism, and the vacuum pump;

[0094] Break the vacuum of the drum, open the access door of the drum, and take out the materials inside the drum. Specifically, for a drum with a side end cover, after placing the receiving tray or installing the customized powder collecting pipe, remove the side end cover of the drum and collect the processed materials. For a drum with an access door provided on the side wall, drive the access door to rotate downward manually or by a driving mechanism. After placing the receiving tray or installing the customized powder collecting pipe, open the access door and collect the processed materials.

[0095] In a specific application of the present invention, taking the improvement of the hydrophobicity of silica powder as an example, put the silica powder to be processed into the drum. After setting the process parameters, evacuate the drum, start the driving mechanism, introduce argon through the first air inlet and start the Remote Plasma Source (RPS), and then introduce hexamethyldisilazane vapor through the second air inlet. After the preset treatment time, hydrophobic (CHx) groups are deposited on the surface of the powder. For the remote plasma source, the flow guide member may be provided with multiple end branches or may not be provided with end branches. For a non-remote plasma source, the flow guide member may be a conduit that is not provided with multiple end branches.

[0096] Applying the surface modification treatment equipment provided by the present invention to perform surface modification treatment on materials can obtain better surface treatment quality, and can process more materials at one time, improving production capacity and efficiency. Using plasma to perform surface modification treatment on materials includes, but is not limited to, one or more of hydrophilic treatment, hydrophobic treatment, grafting, and film coating of materials.

[0097] It should be noted that in this article, relational terms such as first and second are only used to distinguish one entity or operation from another entity or operation, and do not necessarily require or imply any actual relationship or order between these entities or operations. Moreover, the term "comprising", "including" or any other variant thereof is intended to cover non-exclusive inclusion, so that a process, method, article or device including a series of elements not only includes those elements, but also includes other elements not expressly listed, or also includes elements inherent to such process, method, article or device. Without further limitation, an element defined by the statement "including a..." does not exclude the existence of additional identical elements in the process, method, article or device including the element.

[0098] The above are only specific embodiments of the present application. It should be pointed out that for those of ordinary skill in the art, without departing from the principle of the present application, several improvements and refinements can be made, and these improvements and refinements should also be regarded as the protection scope of the present application.

Claims

1. A plasma-based surface modification treatment device, characterized in that, Comprising: A drum (9) configured to accommodate materials to be processed, the drum (9) being provided with an openable and closable access door. When the access door is in an open state, an opening for feeding or discharging materials is exposed on the drum (9); when the access door is in a closed state, the opening for feeding or discharging materials is sealed. A driving mechanism configured to directly or indirectly drive the drum (9) to rotate. A plasma source device (1) arranged outside the drum (9) and configured to generate plasma substances. A flow guide member (11) configured to connect the plasma source device (1) and the drum (9), and the flow guide member (11) is in dynamic seal connection with the drum (9). The drum (9) is provided with a vacuum pumping interface for connecting to a vacuum pump.

2. The surface modification treatment device according to claim 1, wherein, Both end faces of the drum (9) are provided with extension parts (91) extending outward along the axial center line. The extension parts (91) communicate with the drum (9) and are respectively connected to bearing seats. The driving mechanism drives at least one extension part (91) to rotate through a transmission assembly.

3. The surface modification treatment device according to claim 2, wherein, The access door is arranged on the circumferential wall of the drum (9). And / or, the drum is one of a cylindrical drum, a triangular drum, a polygonal drum, an elliptical drum, and an irregularly shaped drum. And / or, the two extension parts (91) of the drum are coaxially arranged, and the two extension parts (91) are centrally arranged or eccentrically arranged on the end face of the drum (9).

4. The surface modification treatment device according to claim 1, wherein One end face of the drum (9) is provided with an extension part (91) extending outward along the axial center line. The extension part (91) communicates with the drum (9) and is connected to a bearing seat. The device further includes two rotating rollers (4) configured to jointly support the drum (9). The driving mechanism drives the extension part (91) to rotate through a transmission assembly, and / or the driving mechanism drives the rotating rollers (4) to rotate.

5. The surface modification treatment device according to claim 4, characterized in that, At least one first gear (10) is circumferentially arranged on the drum (9). Second gears (5) corresponding to the first gears (10) one by one are respectively sleeved on the two rotating rollers (4), and the first gears (10) are meshed with the second gears (5). Alternatively, a limiting member is arranged on or adjacent to the rotating roller (4), and the limiting member is configured to prevent the drum (9) from moving along the axial center line.

6. The surface modification treatment device according to claim 1, characterized in that, The device further includes two rotating rollers (4) configured to jointly support the drum (9). At least one of the rotating rollers (4) is driven by the driving mechanism to drive the drum (9) to rotate, including: the rotating roller (4) is in frictional contact with the drum (9), or at least two first gears (10) are circumferentially arranged on the drum (9), and second gears (5) corresponding to the first gears (10) one by one are respectively sleeved on the two rotating rollers (4), and the first gears (10) are meshed with the second gears (5).

7. The surface modification treatment device according to any one of claims 2 to 5, characterized in that, The manner in which the driving mechanism drives the extension part (91) to rotate through a transmission assembly is: A third gear (12) is arranged on the extension part (91), and a fourth gear (13) meshing with the third gear (12) is arranged, and the fourth gear (13) is connected to the output shaft of the driving mechanism.

8. The surface modification treatment device according to any one of claims 1 to 6, characterized in that, The drum (9) is hermetically connected to the flow guide member (11) by using a magneto - fluid sealed bearing or a fluoroplastics gasket sealed bearing.

9. The surface modification treatment device according to any one of claims 1 to 6, characterized in that The flow guide member (11) extends into the drum (9), and the flow guide member (11) has a straight pipe portion and / or a bent pipe portion. The part of the flow guide member (11) located inside the drum (9) has a plurality of branch ends, or the pipe wall of the flow guide member (11) located inside the drum (9) is provided with spray ports.

10. The surface modification treatment device according to any one of claims 1 to 6, characterized in that, The vacuum pumping interface on the drum (9) is arranged on the side end cover (8) of the drum (9), and the side end cover (8) is fixedly or detachably mounted on the drum (9). And / or, the vacuum pumping interface is a universal joint. And / or, the inner surface of the side wall of the drum (9) is provided with ridges extending along the axial line direction. And / or, the drum (9) is provided with a vacuum breaking air inlet for air intake. And / or, the drum (9) is provided with an auxiliary vacuum pumping port.

11. The surface modification treatment device according to any one of claims 1 to 6, characterized in that, The flow guide member (11) is configured with a first air inlet (14), and the first air inlet (14) is configured to input working gas and carrier gas into the plasma source device (1) so that the plasma source device (1) generates plasma. And / or, the flow guide member (11) is further configured with one or more second air inlets (15), and the second air inlets (15) are configured to input working gas or gaseous precursor. And / or, the material of the drum (9) is metal, quartz, ceramic or sapphire; and / or, the material of the flow guide member (11) is quartz, ceramic or sapphire. And / or, the excitation power frequency of the plasma source device (1) ranges from 1 kHz to 6 GHz, its power ranges from 10 W to 30 kW, and its working mode is a continuous wave working mode or a pulse working mode with a frequency ranging from 5 Hz to 1 MHz.

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