Industrial cleaning machine suitable for blowing dust removal of precise instrument

Abstract

The invention belongs to the technical field of industrial cleaning equipment, and relates to an industrial cleaning machine suitable for blowing and dust removal of precise instruments. The cleaning machine comprises a cleaning machine body, and the cleaning machine body is internally provided with a net rack used for containing a to-be-cleaned instrument and a driving piece used for driving the net rack to do horizontal linear motion. In the using process, the built-in dust removal bin is linked with the cleaning machine, surface cleaning and dust collection are synchronously completed, secondary pollution is reduced, double-fan cooperative control is achieved, power is distributed according to needs, energy consumption optimization is achieved, and the multi-mode blowing and adjusting functions are achieved; the device can deal with complex equipment structures, high dust dead angle areas, drawer type filter screen replacement design and an intelligent monitoring system, and the downtime and the labor cost are greatly reduced.

Description

Technical Field

[0001] The present invention belongs to the technical field of industrial cleaning equipment, and relates to an industrial cleaning machine suitable for purging and dust removal of precision instruments. Background Art

[0002] In the cleaning industry, after the instruments are used, a large amount of stains, dust and other chemical residues will remain on the surface. Therefore, before the instruments are used, they all need to be cleaned. With the development of the country and the progress of science and technology, cleaning equipment has been applied in all walks of life. Especially in the field of precision instrument cleaning, existing cleaning machines mostly focus on the high-pressure flushing function, which results in the muddy water mixture generated after cleaning being prone to carry dust and deposit again, lacking an independent dust removal module, resulting in serious dust residues. Moreover, the cleaning and dust removal are separated operations, which requires additional dust removal equipment, occupying space and being cumbersome to operate. In addition, the filter screen of the traditional cleaning machine needs to disassemble the shell for replacement, which is time-consuming and laborious, affecting the continuity of the operation. Therefore, there is an urgent need to design an industrial cleaning machine suitable for purging and dust removal of precision instruments that can overcome the above defects.

[0003] In order to overcome the deficiencies of the prior art, people have continuously explored and proposed various solutions. For example, a Chinese patent discloses an industrial oil stain cleaning machine [Application No.: 202210658136.6], which includes a base plate, a cleaning device, and a main power supply. The front and rear ends of both sides of the bottom of the base plate are fixedly connected with moving devices, the center of the top of the base plate is fixedly connected with a storage device, a protective plate is fixedly connected to the left side of the storage device, and a first liquid delivery device is fixedly connected to the rear end of the left side of the top of the base plate. By using the first liquid delivery device, the cleaning agent in the storage cavity can be conveyed to the drain groove opened on the cleaning plate, and then the cleaning agent is discharged from the inside of the drain groove to the lower part of the drain groove. Then, when the cleaning plate drives the scrubbing cloth to move, the scrubbing cloth can clean the oil stain through the cleaning agent, and the use of the second liquid delivery device can perform the pumping work on the liquid extraction groove. However, in the process of using this solution, it is still difficult to effectively clean precision instruments, the muddy water mixture generated after cleaning is still prone to carry dust and deposit again, lacking an independent dust removal module, resulting in serious dust residues, and having the defect of poor cleaning effect. Summary of the Invention

[0004] The purpose of the present invention is to solve the above problems, and provide an industrial cleaning machine suitable for purging and dust removal of precision instruments. The device realizes a system of efficient dust removal and cleaning linkage through the collaborative work of double fans, multi-mode adjustment and rapid filter screen replacement technology, and improves the cleaning efficiency of precision instruments.

[0005] To achieve the above purpose, the present invention adopts the following technical solutions:

[0006] An industrial cleaning machine suitable for purging and dust removal of precision instruments, including a cleaning machine main body. Inside the cleaning machine main body, there is a grid for placing the instruments to be cleaned and a driving member for driving the grid to perform horizontal linear motion. The cleaning machine main body is composed of a steam degreasing and cleaning chamber, a drying chamber, and a dust removal chamber. A detachable seal is installed between the steam degreasing and cleaning chamber and the drying chamber. The drying chamber and the dust removal chamber are connected. Inside the dust removal chamber, there is a purging cavity box, and an adjustable multi-mode purging and dust removal mechanism is arranged inside the purging cavity box. The position of the grid corresponds to that of the adjustable multi-mode purging and dust removal mechanism.

[0007] In the above-mentioned industrial cleaning machine suitable for purging and dust removal of precision instruments, the adjustable multi-mode purging and dust removal mechanism includes a first fan and a second fan arranged inside the purging cavity box. The first fan and the second fan are arranged opposite to each other. A detachable filter element is arranged between the first fan and the second fan. The first fan and the second fan are respectively fixed to the purging cavity box by pins.

[0008] In the above-mentioned industrial cleaning machine suitable for purging and dust removal of precision instruments, an inlet and outlet passage penetrating from left to right is opened inside the purging cavity box, and the grid can perform horizontal linear motion along the inlet and outlet passage.

[0009] In the above-mentioned industrial cleaning machine suitable for purging and dust removal of precision instruments, the detachable filter element includes a left filter screen and a right filter screen arranged inside the purging cavity box. The left filter screen and the right filter screen are respectively fixed to the purging cavity box by pins.

[0010] In the above-mentioned industrial cleaning machine suitable for purging and dust removal of precision instruments, inside the purging cavity box, there are a fan placement cavity and a filter screen placement cavity with openings facing upwards. The first fan and the second fan are embedded in the fan placement cavity, and the left filter screen and the right filter screen are embedded in the filter screen placement cavity.

[0011] In the above-mentioned industrial cleaning machine suitable for purging and dust removal of precision instruments, the detachable seal includes a sealing plate arranged between the steam degreasing and cleaning chamber and the drying chamber. A sealing rubber cushion is arranged at the bottom of the sealing plate, and the sealing rubber cushion abuts against the lower wall of the cleaning machine main body.

[0012] In the above-mentioned industrial cleaning machine suitable for purging and dust removal of precision instruments, a sealing plate slot is opened on the top cover of the cleaning machine main body, and the sealing plate is slidably matched with the sealing plate slot.

[0013] In the above-mentioned industrial cleaning machine suitable for purging and dust removal of precision instruments, a pressure sensor and a dust concentration detection module are installed inside the purging cavity box.

[0014] In the above-mentioned industrial cleaning machine applicable to purging and dust removal of precision instruments, the driving member includes a telescopic robotic arm disposed inside the cleaning machine main body. The front end of the telescopic robotic arm is fixed to the wire frame, and the telescopic robotic arm is driven by a linear driver.

[0015] In the above-mentioned industrial cleaning machine applicable to purging and dust removal of precision instruments, a control module is installed inside the cleaning machine main body. The first blower, the second blower, and the telescopic robotic arm are respectively electrically connected to the control module.

[0016] Compared with the existing technology, the advantages of the present invention are as follows:

[0017] 1. The present invention integrates a steam degreasing cleaning chamber, a drying chamber, and a dust removal chamber into the cleaning machine main body, and realizes the linkage cooperation between the chambers through a driving member and a detachable seal. It can complete the full-process operations of cleaning, drying, and dust removal of precision instruments in one device, reducing the floor area of the device and the complexity of the cleaning process, greatly improving the cleaning efficiency, and at the same time avoiding the secondary pollution that may be introduced during the transfer of the instrument between different devices.

[0018] 2. The present invention adopts the coordinated control of the first blower and the second blower, which can allocate power as needed according to different cleaning, drying, and dust removal requirements. While ensuring the cleaning effect, it reduces energy consumption. Compared with traditional devices with a single blower or fixed power operation, it has significant energy-saving advantages.

[0019] 3. The adjustable multi-mode purging and dust removal mechanism in the present invention has three purging modes, which can flexibly cope with the complex equipment structure and high-dust dead corners of precision instruments. Whether it is the conventional purging of the instrument surface or the deep cleaning of the dead corner area, an ideal cleaning effect can be achieved by selecting the appropriate purging mode, improving the applicability and cleaning quality of the device.

[0020] 4. The detachable filter element in the present invention is convenient for disassembly and replacement. When the filter screen accumulates a large amount of dust, the purging cavity box can be directly opened for convenient replacement, ensuring the continuity of the purging and dust removal effect. At the same time, the inside of the purging cavity box is sealed and filled with supercritical CO2, which can achieve nano-level decontamination and ensure the deep cleaning of precision instruments.

[0021] Other advantages, objectives, and features of the present invention will be partially reflected by the following description, and partially will also be understood by those skilled in the art through the research and practice of the present invention. BRIEF DESCRIPTION OF THE DRAWINGS

[0022] Figure 1 is a schematic structural diagram of the present invention.

[0023] Figure 2 is a schematic internal structural diagram of the present invention.

[0024] Figure 3 It is a schematic structural diagram of the purging cavity box.

[0025] Figure 4 It is a schematic internal structure diagram in another direction of the present invention.

[0026] Figure 5 It is an operation diagram of Mode 1 of the present invention.

[0027] Figure 6 It is an operation diagram of Mode 2 of the present invention.

[0028] Figure 7 It is an operation diagram of Mode 3 of the present invention.

[0029] In the figure: the main body of the cleaning machine 1, the wire rack 2, the driving member 33, the steam degreasing cleaning chamber 3, the drying chamber 4, the dust removal chamber 5, the detachable seal 6, the purging cavity box 7, the adjustable multi-mode purging and dust removal mechanism 8, the first fan 9, the second fan 10, the detachable filter element 11, the access channel 12, the left filter screen 13, the right filter screen 14, the fan placement cavity 15, the filter screen placement cavity 16, the sealing plate 17, the sealing plate slot 18, the telescopic robotic arm 19. Specific embodiments

[0030] The present invention will be further described below with reference to the accompanying drawings.

[0031] As Figures 1-7 shown, an industrial cleaning machine applicable to purging and dust removal of precision instruments includes the main body of the cleaning machine 1, and a wire rack 2 for placing the instrument to be cleaned and a driving member 33 for driving the wire rack 2 to perform horizontal linear motion are provided inside the main body of the cleaning machine 1. The main body of the cleaning machine 1 is composed of a steam degreasing cleaning chamber 3, a drying chamber 4 and a dust removal chamber 5. A detachable seal 6 is installed between the steam degreasing cleaning chamber 3 and the drying chamber 4. The drying chamber 4 is communicated with the dust removal chamber 5. A purging cavity box 7 is installed in the dust removal chamber 5. An adjustable multi-mode purging and dust removal mechanism 8 is provided in the purging cavity box 7. The position of the wire rack 2 corresponds to that of the adjustable multi-mode purging and dust removal mechanism 8.

[0032] In this embodiment, the interior of the cleaning machine main body 1 is functionally partitioned to form a steam degreasing and cleaning chamber 3, a drying chamber 4, and a dust removal chamber 5. The three chambers are arranged in sequence along the horizontal direction. A detachable seal 6 (sealing plate 17) is used to achieve sealed isolation between the steam degreasing and cleaning chamber 3 and the drying chamber 4. The drying chamber 4 and the dust removal chamber 5 are directly connected through an internal communication structure. The grid 2 bears the instrument to be cleaned. The driving member 33 (retractable robotic arm 19, see claim 9) is fixed to the inner wall of the cleaning machine main body 1, and its front end is bolted to the bottom of the grid 2, which can drive the grid 2 to move horizontally in a straight line between the three chambers. The purging cavity box 7 is embedded inside the dust removal chamber 5, and its inlet and outlet channels 12 (see claim 3) are completely aligned with the movement trajectory of the grid 2 to ensure that the grid 2 can smoothly enter the purging cavity box 7 to receive purging and dust removal;

[0033] The integrated design of the three chambers realizes the fully automated transfer of the entire process of "cleaning → drying → dust removal", eliminating the need for manual transfer of instruments and avoiding the introduction of external pollution. The cooperation between the grid 2 and the driving member 33 ensures the accurate positioning of the instrument in each chamber, improves the coherence of the process, and realizes integrated and linked cleaning;

[0034] The detachable seal 6 isolates the steam degreasing and cleaning chamber 3 during cleaning to prevent solvent vapor from leaking into the drying chamber 4; after cleaning is completed, the seal is removed (the sealing plate 17 rises), and the driving member 33 can directly send the grid 2 into the drying chamber 4, realizing the independent function of the chamber and the connection of the process, and realizing the coordination of sealing and connection;

[0035] Integrating steam degreasing and cleaning, hot air drying, and multi-mode purging and dust removal into a single device, through the linkage design of the driving member 33 and the detachable seal 6, breaking the limitation of the traditional cleaning equipment of "independent operation of single-function modules", constructing a fully automated closed-loop of the entire process of "cleaning - drying - dust removal", and solving the industry problems of low multi-process coordination efficiency and high risk of secondary pollution from the structural design.

[0036] Combined with Figures 1-7 As shown, the adjustable multi-mode purging and dust removal mechanism 8 includes a first fan 9 and a second fan 10 arranged inside the purging cavity box 7. The first fan 9 and the second fan 10 are arranged opposite to each other. A detachable filter element 11 is provided between the first fan 9 and the second fan 10. The first fan 9 and the second fan 10 are respectively fixed to the purging cavity box 7 by pins. The purging cavity box 7 is provided with an inlet and outlet channel 12 that penetrates horizontally from left to right, and the grid 2 can move horizontally in a straight line along the inlet and outlet channel 12.

[0037] In this embodiment, a first blower 9 and a second blower 10 are symmetrically arranged on the left and right sides inside the purging cavity box 7. The two are fixed to the blower placement cavity 15 (see claim 5) by pins. The air outlets are arranged facing each other (the left blower blows to the right and the right blower blows to the left). The inlet and outlet passage 12 penetrates through the left and right walls of the purging cavity box 7, and its width matches the size of the grid 2. The grid 2 can be horizontally moved along the inlet and outlet passage 12 to between the two blowers. Removable filter elements 11 (left filter net 13 and right filter net 14, see claim 4) are respectively located on the left side of the first blower 9 and the right side of the second blower 10, forming a "blower-filter net" combined structure with the blowers. The filter nets are fixed to the filter net placement cavity 16 (see claim 5) by pins, and are vertically offset from the blower placement cavity 15 to avoid air flow interference;

[0038] Mode 1 (leftward purging): The control module (see claim 10) sends an instruction, and the first blower 9 and the second blower 10 rotate clockwise synchronously. The left blower blows air to the right, and the right blower blows air to the left (the actual air outlet direction is to the left), forming a unified leftward air flow to blow the dust on the surface of the instrument towards the left filter net 13;

[0039] Mode 2 (rightward purging): The two blowers rotate counterclockwise, and the air outlet direction is to the right, and the dust is blown towards the right filter net 14;

[0040] Mode 3 (opposing purging): The first blower 9 rotates clockwise and the second blower 10 rotates counterclockwise (or vice versa), forming a left-right opposing air flow, generating a turbulent flow on the surface of the instrument to strengthen the dust peeling in the dead corner area, and the dust is respectively captured by the two side filter nets;

[0041] The three purging modes cover different cleaning requirements. Modes 1 / 2 are applicable to flat surfaces or complex structures on one side, and Mode 3 is for dead corner areas such as deep holes and grooves. By opposing the air flow, the dust peeling efficiency is improved, realizing multi-mode adaptability. The pin-fixed structure enables the filter nets to be independently disassembled. When the dust concentration detection module (see claim 8) feedbacks that the filter nets are blocked, they can be quickly replaced without disassembling the blowers, reducing the downtime;

[0042] By controlling the rotation direction of the two blowers, a three-mode purging system of "leftward - rightward - opposing" is constructed. Combined with the detachable filter net design, it realizes the full-surface coverage cleaning of the complex structure of precision instruments. The powers of the two blowers can be independently adjusted (through the control module). In Modes 1 / 2, the power can be distributed as needed (such as high power for the left blower and low power for the right blower), reducing energy consumption while ensuring the purging effect, and saving more than 30% energy compared with traditional fixed-power blowers.

[0043] The detachable filter element 11 includes a left filter screen 13 and a right filter screen 14 disposed in the purging cavity box 7. The left filter screen 13 and the right filter screen 14 are respectively fixed to the purging cavity box 7 by pins. An air blower placement cavity 15 and a filter screen placement cavity 16 with upward openings are provided in the purging cavity box 7. The first air blower 9 and the second air blower 10 are embedded in the air blower placement cavity 15, and the left filter screen 13 and the right filter screen 14 are embedded in the filter screen placement cavity 16.

[0044] In this embodiment, both the air blower placement cavity 15 and the filter screen placement cavity 16 are groove structures with openings at the top, and are respectively located on both sides of the middle of the purging cavity box 7. After the first air blower 9 and the second air blower 10 are embedded in the air blower placement cavity 15, their air outlets are aligned with the central axis of the inlet and outlet channel 12; after the left filter screen 13 and the right filter screen 14 are embedded in the filter screen placement cavity 16, the filter screen plane is perpendicular to the air outlet of the air blower, forming a complete path of "air flow blown by the air blower → passing through the instrument → hitting the filter screen". A diversion slope is provided at the bottom of the filter screen placement cavity 16 to guide the trapped dust to slide down to the dust collection box (not shown) at the bottom of the cavity, avoiding secondary dust generation;

[0045] The inner wall of the purging cavity box 7 is coated with a polytetrafluoroethylene coating. When the purging cavity box 7 is in a sealed state, it supports the internal filling of supercritical CO2 (temperature 31.1 °C, pressure 7.38 MPa) to deeply clean nano-scale pollutants (such as metal ion residues on the surface of semiconductor wafers). The waste gas recovery system recovers HFE solvent vapor and supercritical CO2 through an activated carbon adsorption device (located at the top of the cleaning machine main body 1, not shown in the figure), and the recovery rate > 95%, meeting the SEMI S23 environmental protection standard, reducing the solvent loss by 80% compared with traditional open cleaning equipment.

[0046] The detachable seal 6 includes a sealing plate 17 disposed between the steam degreasing cleaning chamber 3 and the drying chamber 4. A sealing rubber cushion plate is provided at the bottom of the sealing plate 17, and the sealing rubber cushion plate abuts against the lower wall of the cleaning machine main body 1. A sealing plate slot 18 is provided on the top cover of the cleaning machine main body 1, and the sealing plate 17 is slidably engaged with the sealing plate slot 18.

[0047] In this embodiment, a sealing plate slot 18 is provided on the top cover of the cleaning machine main body 1. The width of the slot is the same as the thickness of the sealing plate 17 (tolerance ±0.1 mm). A guiding slide rail is provided on the inner wall of the slot to ensure that the sealing plate 17 can slide vertically. When the sealing plate 17 descends, the rubber cushion plate is embedded in the sealing groove, and the upper and lower double seals are achieved in cooperation with the slot, and the steam leakage rate < 0.01 m 3 / h.

[0048] Combined Figure 2 As shown, a pressure sensor and a dust concentration detection module are installed in the purging cavity box 7.

[0049] In this embodiment, a pressure sensor (model: MPM480) is installed on the inner wall of the purging cavity box 7 to monitor the air pressure in the cavity in real time; a dust concentration detection module (model: DSM501A) is located above the inlet and outlet passage 12, and uses the laser scattering principle to detect the dust particle concentration in the air flow. The two modules are connected to the control module (PLC controller) through the RS485 bus. The control module dynamically adjusts the fan speed and mode according to the detection data (such as automatically switching to mode 3 when the dust concentration > 50mg / m 3 ), and the closed-loop feedback control realizes the adaptive adjustment of the purging process, avoiding the decrease of the purging efficiency caused by dust clogging the filter screen, and ensuring that instruments with different pollution degrees can reach the ISO 14644-1 Class 5 cleanliness level.

[0050] Combined with Figure 3 、 Figure 4 As shown, the driving member 33 includes a telescopic robotic arm 19 disposed in the cleaning machine main body 1. The front end of the telescopic robotic arm 19 is fixed to the grid frame 2. The telescopic robotic arm 19 is driven by a linear driver. A control module is installed in the cleaning machine main body 1. The first fan 9, the second fan 10 and the telescopic robotic arm 19 are respectively electrically connected to the control module.

[0051] In this embodiment, the telescopic robotic arm 19 has a four-degree-of-freedom structure and is driven by a linear driver (servo motor + ball screw). The positioning accuracy is ±0.2mm. The front end of the robotic arm is bolted to the grid frame 2 through an L-shaped bracket, and a shock pad is provided at the bottom of the bracket to prevent the instrument from vibrating during movement. The control module is integrated into the control cabinet of the cleaning machine main body 1 and is electrically connected to the first fan 9, the second fan 10 and the telescopic robotic arm 19 through a relay. The built-in preset program can automatically execute the entire process of "cleaning → drying → dust removal", and supports the switching between manual mode (touch screen input) and automatic mode.

[0052] The working principle of the present invention is:

[0053] The grid frame 2 carries the instrument into the steam degreasing cleaning chamber 3, the sealing plate 17 descends for sealing, the HFE solvent is sprayed into the chamber by an atomizing nozzle (not shown), and is heated to 50°C to form steam, which dissolves the grease on the surface of the instrument (cooperating with an ultrasonic vibration device, not shown). The sealing plate 17 cooperates with the sealing rubber gasket to ensure that the steam does not leak out, improving the cleaning efficiency (the solvent consumption is reduced by 20%).

[0054] The robotic arm 19 sends the grid frame 2 into the drying chamber 4. At this time, the drying chamber 4 is connected to the dust removal chamber 5. The first fan 9 and the second fan 10 start in mode 1 (rotate clockwise), and the leftward blowing air flow passes through the surface of the instrument, accelerating the evaporation of moisture (the drying time is shortened by 50% compared with the traditional static drying). At the same time, the surface dust is blown onto the left filter screen 13. When switching to mode 2, the two fans rotate counterclockwise to blow and remove the dust on the back and dead corners of the instrument to the right; in mode 3, through the impact air flow, a vortex is formed inside the deep hole structure to peel off stubborn dust (the dust removal rate in holes with a diameter of less than 0.5 mm reaches 98%). When the dust concentration detection module detects that one side of the filter screen is blocked (for example, the concentration on the left side > 2 times that on the right side), the control module automatically extends the blowing time on that side or switches to mode 3 to strengthen the cleaning;

[0055] During maintenance, open the purge cavity box 7 and directly pull out the pin to replace the left / right filter screen 13 / 14 (the single filter screen replacement time < 2 minutes), without shutting down and powering off, improving the availability of the equipment.

[0056] The specific embodiments described herein are merely illustrative of the spirit of the present invention. Those skilled in the art to which the present invention pertains can make various modifications or supplements to the described specific embodiments or use similar methods for substitution, but will not deviate from the spirit of the present invention.

[0057] Although terms such as the cleaning machine main body 1, grid frame 2, driving member 33, steam degreasing cleaning chamber 3, drying chamber 4, dust removal chamber 5, detachable seal 6, purge cavity box 7, adjustable multi-mode purge and dust removal mechanism 8, first fan 9, second fan 10, detachable filter element 11, inlet and outlet passage 12, left filter screen 13, right filter screen 14, fan placement cavity 15, filter screen placement cavity 16, sealing plate 17, sealing plate slot 18, telescopic robotic arm 19 are used more frequently in this article, the possibility of using other terms is not excluded. The use of these terms is only to more conveniently describe and explain the essence of the present invention, and interpreting them as any additional limitation is contrary to the spirit of the present invention.

Claims

1. An industrial cleaning machine applicable to purging and dust removal of precision instruments, comprising a cleaning machine main body (1), characterized in that, Inside the main body (1) of the cleaning machine, there is a wire rack (2) for placing the instrument to be cleaned and a driving member (33) for driving the wire rack (2) to perform horizontal linear motion. The main body (1) of the cleaning machine is composed of a steam degreasing cleaning chamber (3), a drying chamber (4) and a dust removal chamber (5). A detachable seal (6) is installed between the steam degreasing cleaning chamber (3) and the drying chamber (4). The drying chamber (4) is communicated with the dust removal chamber (5). A blowing cavity box (7) is installed in the dust removal chamber (5). An adjustable multi-mode blowing and dust removal mechanism (8) is arranged in the blowing cavity box (7). The position of the wire rack (2) corresponds to that of the adjustable multi-mode blowing and dust removal mechanism (8).

2. The industrial cleaning machine applicable to purging and dust removal of precision instruments according to claim 1, wherein The adjustable multi-mode blowing and dust removal mechanism (8) includes a first blower (9) and a second blower (10) arranged in the blowing cavity box (7). The first blower (9) and the second blower (10) are arranged opposite to each other. A detachable filter element (11) is arranged between the first blower (9) and the second blower (10). The first blower (9) and the second blower (10) are respectively fixed to the blowing cavity box (7) by pins.

3. An industrial cleaning machine applicable to purging and dust removal of precision instruments according to claim 2, characterized in that, An inlet and outlet channel (12) penetrating left and right is opened in the blowing cavity box (7). The wire rack (2) can perform horizontal linear motion along the inlet and outlet channel (12).

4. An industrial cleaning machine applicable to purging and dust removal of precision instruments according to claim 2, wherein, The detachable filter element (11) includes a left filter screen (13) and a right filter screen (14) arranged in the blowing cavity box (7). The left filter screen (13) and the right filter screen (14) are respectively fixed to the blowing cavity box (7) by pins.

5. An industrial cleaning machine applicable to purging and dust removal of precision instruments according to claim 4, characterized in that, There are a blower placement cavity (15) and a filter screen placement cavity (16) with openings facing upwards in the blowing cavity box (7). The first blower (9) and the second blower (10) are embedded in the blower placement cavity (15). The left filter screen (13) and the right filter screen (14) are embedded in the filter screen placement cavity (16).

6. An industrial cleaning machine applicable to purging and dust removal of precision instruments according to claim 1, characterized in that, The detachable seal (6) includes a sealing plate (17) arranged between the steam degreasing cleaning chamber (3) and the drying chamber (4). A sealing rubber cushion plate is arranged at the bottom of the sealing plate (17). The sealing rubber cushion plate abuts against the lower wall of the main body (1) of the cleaning machine.

7. An industrial cleaning machine applicable to purging and dust removal of precision instruments according to claim 6, wherein, A sealing plate slot (18) is opened on the top cover of the main body (1) of the cleaning machine. The sealing plate (17) is slidably matched with the sealing plate slot (18).

8. An industrial cleaning machine applicable to purging and dust removal of precision instruments according to claim 1, characterized in that, A pressure sensor and a dust concentration detection module are installed in the blowing cavity box (7).

9. An industrial cleaning machine applicable to purging and dust removal of precision instruments according to claim 2, characterized in that, The driving member (33) includes a telescopic robotic arm (19) arranged in the main body (1) of the cleaning machine. The front end of the telescopic robotic arm (19) is fixed to the wire rack (2). The telescopic robotic arm (19) is driven by a linear driver.

10. An industrial cleaning machine applicable to purging and dust removal of precision instruments according to claim 9, characterized in that, A control module is installed in the main body (1) of the cleaning machine. The first blower (9), the second blower (10) and the telescopic robotic arm (19) are respectively electrically connected to the control module.

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