Sand blasting processing equipment

Abstract

The invention belongs to the technical field of semiconductor manufacturing, and discloses sand blasting processing equipment, the sand blasting processing equipment is arranged in a box body, the bottom side of the interior of the box body is a gas path sand path area, the gas path sand path area is divided into a first area and a second area, a wafer processing area is arranged above the first area, a wafer taking and placing area is arranged above the second area, and the wafer taking and placing area is arranged above the first area. And the gas path sand path area, the wafer processing area and the wafer pick-and-place area are respectively provided with a gas path sand path pipeline, a Y-direction moving spray gun group and an X-direction moving workbench. According to the sand blasting processing equipment provided by the invention, the micro-nano powder wafer processing equipment is used for processing the wafer, so that the problems of low processing efficiency and the like due to the adoption of dry / wet etching and laser processing are solved.

Description

Technical Field

[0001] The present invention relates to the field of semiconductor precision manufacturing technology, and particularly relates to a sandblasting processing device. Background Art

[0002] Micro Abrasive Jet Machining (MAJM) is a brand-new microfabrication technology developed on the basis of traditional abrasive jet machining. It applies concepts such as fine abrasives, a continuous feeding device for abrasives, and mask processing. It has unique advantages such as no heat-affected zone, good cut quality, no sparks, no static electricity, and concentrated energy. It is particularly suitable for processing hard and brittle materials, such as the precision microfabrication of ceramics, glass, polymers, etc. used in the production of semiconductors, electronic devices, and liquid crystal display components, solving problems such as microcracks in products caused by traditional machining, serious pollution in chemical etching processes, and excessive heat-affected zones in laser machining. Summary of the Invention

[0003] The object of the present invention is to provide a sandblasting processing device. The sandblasting processing device is arranged in a box body. The bottom side inside the box body is an air path and sand path area, which is divided into a first area and a second area. Above the first area is a wafer processing area, and above the second area is a wafer picking and placing area.

[0004] Preferably, cabinet lifting rings are fixedly connected to the four corners on the outer side of the top surface of the wafer processing area of the box body;

[0005] An air path and sand path adjustment door one and an air path and sand path adjustment door two are respectively arranged on the front surface of the box body in the first area and the second area;

[0006] Above the air path and sand path adjustment door one and the air path and sand path adjustment door two, a sandblasting processing area observation window door and a picking area observation window door are respectively arranged;

[0007] A workbench moving tension adjustment door is arranged on the side surface of the box body close to one side of the air path and sand path adjustment door one;

[0008] Above the sandblasting processing area observation window door, a spray gun group working observation window is arranged;

[0009] Above the picking area observation window door at the top, a processing part picking and sending door is arranged;

[0010] A lifting partition door group is arranged on the side of the processing area close to the picking area;

[0011] Movable support feet are arranged at the four corners of the bottom of the box body.

[0012] Preferably, a Y-direction moving spray gun group is arranged in the wafer processing area, and the Y-direction moving spray gun group is powered by a Y-direction servo motor;

[0013] The Y-direction servo motor is fixed on the tension L-shaped plate, and the tension L-shaped plate is fixed on the platform extending out of the box body through the L-shaped plate support frame;

[0014] The Y-direction servo motor is connected with a Y-direction speed reducer, and the other end of the Y-direction speed reducer is connected with a Y-direction coupling;

[0015] The Y-direction speed reducer is fixed on the tension L-shaped plate through the speed reducer support frame;

[0016] The Y-direction coupling axially penetrates through the Y-direction front bearing seat, and the Y-direction front bearing seat is configured with a Y-direction synchronous pulley;

[0017] The Y-direction rear bearing seat is fixed on the tension L-shaped plate.

[0018] Preferably, a pair of Y-direction wheel rails are fixedly connected to the tension L-shaped plate through Y-direction hard support blocks;

[0019] The Y-direction wheel rails are connected through a fixing rod, and the Y-direction hard support block is fixedly connected with the fixing rod;

[0020] The other ends of a pair of the Y-direction wheel rails are fixed on the box body through Y-direction hard support blocks, and Y-direction bearing seat supports are fixedly connected to the ends respectively, and a baffle is arranged on the side;

[0021] The Y-direction wheel rails are configured with a spray gun group moving support vehicle, and the spray gun group moving support vehicle moves on the Y-direction wheel rails;

[0022] The upper surface of the Y-direction bearing seat support is fixedly connected with a Y-direction front bearing seat;

[0023] A pair of the Y-direction front bearing seats are connected through a rotating rod, and the Y-direction synchronous belt is sleeved on the Y-direction synchronous pulley and the rotating rod;

[0024] The upper surface of the spray gun group moving support vehicle is fixedly connected with the Y-direction synchronous belt;

[0025] One end of the Y-direction wheel rail close to the rotating rod is fixedly connected with a Y-direction limit induction plate, and the other end is fixedly connected with a Y-direction stroke limit.

[0026] Preferably,

[0027] A connecting rod is fixedly connected to the bottom of the spray gun group moving support vehicle;

[0028] A spray gun support seat is fixedly connected to the bottom of the connecting rod; a pneumatic sand mixing spray gun is fixedly connected to the upper surface of the spray gun support seat;

[0029] An auxiliary support clamp is connected to the middle of the connecting rod, and the other end of the auxiliary support clamp is slidably arranged on the auxiliary track;

[0030] The auxiliary track is fixed on the side surface of the box body.

[0031] Preferably, an X-direction moving workbench is provided in the wafer picking and placing area. The X-direction moving workbench includes a moving platform, a pair of X-direction guide rails, a pair of X-direction front bearing seats, a pair of X-direction rear bearing seats, and an X-direction servo motor;

[0032] The X-direction servo motor is connected to an X-direction speed reducer, and the other end of the X-direction speed reducer is connected to an X-direction coupling;

[0033] The X-direction speed reducer is fixed on the tension L plate through a speed reducer support frame;

[0034] The X-direction coupling axially passes through the X-direction front bearing seat, and the X-direction front bearing seat is configured with an X-direction synchronous pulley;

[0035] The X-direction front bearing seat and the X-direction rear bearing are respectively fixed on both sides inside the box body through a fixed L plate;

[0036] The fixed L plate is configured with a fixed plate support frame;

[0037] A pair of the X-direction guide rails are respectively fixed on the front and rear inner surfaces of the box body through X-direction wheel rail cabinet supports;

[0038] Both ends of the X-direction guide rail are respectively fixedly connected with X-direction hard support blocks;

[0039] An X-direction travel limit is provided on the inner side of the X-direction guide rail near the X-direction hard support block part;

[0040] Preferably, the pair of X-direction rear bearing seats are configured with X-direction synchronous pulleys;

[0041] The X-direction synchronous belt is sleeved on the X-direction synchronous pulleys respectively configured on the X-direction rear bearing seat and the X-direction front bearing seat;

[0042] A wafer placement table is arranged on the upper surface of the moving platform

[0043] Guide wheels are arranged at the four corners of the bottom surface of the moving platform;

[0044] The guide wheels slide on the X-direction guide rails;

[0045] Preferably, a sand material recovery funnel and an air path and sand path pipeline are respectively arranged in the first area and the second area of the air path and sand path area;

[0046] The air path and sand path pipeline includes an air path branch, an air source drying and filtering treatment device, and a manual air intake valve;

[0047] The air path branch is arranged at the gap between the sand material recovery funnel and the box body, and is close to one side of the air path and sand path adjustment one door and the air path and sand path adjustment two door of the box body;

[0048] The air source drying and filtering device is arranged outside the sand material recovery funnel and is connected to the air path branch through a pipeline;

[0049] The air source drying and filtering device is connected to the manual air inlet valve through a pipeline;

[0050] The air source drying and filtering device includes an air filter and an air dryer, and the air dryer is on the side close to the manual air inlet valve.

[0051] Preferably, an explosion-proof electric lamp is fixedly connected to the inner side back plate of the box body;

[0052] A dust blowing air blade is arranged on the inner side side plate of the box body.

[0053] Therefore, by adopting the above sandblasting processing equipment, the present invention has the following advantages compared with the existing methods:

[0054] By using the micro-nano powder wafer processing equipment to process the wafer, the present invention avoids problems such as the low efficiency of dry / wet etching and laser processing. Even for wafers with different materials and structures, only the grinding consumables need to be replaced to quickly correspond, providing a device solution with stable quality and high production efficiency for the batch micro-structure processing and surface treatment of wafers.

[0055] Next, through the drawings and embodiments, the technical solutions of the present invention will be further described in detail. Description of the Drawings

[0056] Figure 1 It is a schematic diagram of the overall architecture of the equipment of the present invention;

[0057] Figure 2 It is a schematic diagram of the appearance of the sandblasting processing equipment box body of the present invention;

[0058] Figure 3 It is a schematic diagram of the cross-section (left) of the wafer processing area of the sandblasting processing equipment of the present invention;

[0059] Figure 4 It is a schematic diagram of the cross-section (right) of the wafer loading and unloading area of the sandblasting processing equipment of the present invention;

[0060] Figure 5 It is a schematic diagram of the Y-direction moving spray gun group and the auxiliary support rail of the spray gun group of the present invention;

[0061] Figure 6 It is a schematic diagram of the X-direction moving workbench of the present invention.

[0062] Reference Numerals in the Drawings

[0063] 1. Wafer processing area; 11. Cabinet lifting ring; 12. Working observation window for spray gun group; 13. Observation window door for sandblasting processing area; 14. Tension adjustment door for moving workbench;

[0064] 15. Y-direction moving spray gun group; 151. Tension L plate; 152. L plate support frame; 153. Y-direction servo motor; 154. Y-direction reducer; 155. Reducer support frame; 156. Y-direction coupling; 157. Y-direction rear bearing seat; 158. Y-direction synchronous pulley; 159. Baffle; 1510. Y-direction wheel rail; 1511. Spray gun group moving support cart; 1512. Y-direction front bearing seat; 1513. Y-direction bearing seat support; 1514. Y-direction stroke limit; 1515. Y-limit induction plate; 1516. Y-direction synchronous belt; 1518. Y-direction hard support stop block; 1520. Connecting rod; 1521. Air-sand mixing spray gun; 1522. Spray gun support seat;

[0065] 161. Auxiliary track; 162. Auxiliary support fixture;

[0066] 17. X-direction moving workbench; 171. Fixed L plate; 172. X-direction synchronous belt; 173. X-direction rear bearing seat; 174. Fixed plate support frame; 175. X-direction hard support stop block; 176. X-direction stroke limit; 177. X-direction guide rail; 178. Support between cabinets for X-direction wheel rail; 179. Guide wheel; 1711. Moving platform; 1712. Wafer placement table; 1713. X-direction servo motor; 1714. X-direction reducer; 1716. X-direction coupling;

[0067] 18. Explosion-proof electric lamp; 19. Sand material recovery funnel; 110. Lifting partition door group;

[0068] 2. Wafer picking and placing area; 21. Processing part picking and sending door; 22. Observation window door for picking area; 23. Dust blowing air blade;

[0069] 3. Air path and sand path area; 31. Air path and sand path adjustment door 1; 32. Air path and sand path adjustment door 2; 33. Sand material recovery pipeline; 34. Movable support foot seat; 35. Air path and sand path pipeline; 351. Air path branch; 352. Air source drying and filtering treatment device; 3521. Air filter; 3522. Air dryer; 353. Manual intake valve;

[0070] 4. Rotating rod; 5. Fixed rod; 6. Platform. Detailed implementation manners

[0071] The technical solutions of the present invention will be further described below with reference to the drawings and embodiments.

[0072] As Figures 1-6As shown in the figure, the object of the present invention is to provide a sandblasting processing device, which is arranged in a box. The bottom side inside the box is the air path and sand path area 3, which is divided into a first area and a second area. Above the first area is the wafer processing area 1, and above the second area is the wafer loading and unloading area 2.

[0073] Furthermore, the wafer processing area 1 is provided with a Y-direction moving spray gun group 15, and the Y-direction moving spray gun group 15 is powered by a Y-direction servo motor 153.

[0074] The Y-direction servo motor 153 is fixed on the tensioning L plate 151, and the tensioning L plate 151 is fixed on the platform extending outside the box through the L plate support frame 152.

[0075] The Y-direction servo motor 153 is connected with a Y-direction speed reducer 154, and the other end of the Y-direction speed reducer 154 is connected with a Y-direction coupling 156.

[0076] The Y-direction speed reducer 154 is fixed on the tensioning L plate 151 through the speed reducer support frame 155.

[0077] The Y-direction coupling 156 axially passes through the Y-direction front bearing seat 1512, and the Y-direction front bearing seat 1512 is configured with a Y-direction synchronous pulley 158.

[0078] The Y-direction rear bearing seat 157 is fixed on the tensioning L plate 151.

[0079] Furthermore, the tensioning L plate 151 is fixedly connected with a pair of Y-direction wheel rails 1510 through the Y-direction hard support block 1518.

[0080] The Y-direction wheel rails 1510 are connected through the fixing rod 5, and the Y-direction hard support block 1518 is fixedly connected with the fixing rod 5.

[0081] The other ends of the pair of Y-direction wheel rails 1510 are fixed on the box through the Y-direction hard support block 1518, and the end parts are respectively fixedly connected with the Y-direction bearing seat support 1513, and a baffle 159 is arranged on the side.

[0082] The Y-direction wheel rails 1510 are configured with a spray gun group moving support vehicle 1511, and the spray gun group moving support vehicle 1511 moves on the Y-direction wheel rails 1510.

[0083] The upper surface of the Y-direction bearing seat support 1513 is fixedly connected with the Y-direction front bearing seat 1512.

[0084] A pair of Y-direction front bearing seats 1512 are connected through a rotating rod 4, and the Y-direction synchronous belt 1516 is sleeved on the Y-direction synchronous pulley 158 and the rotating rod 4.

[0085] The upper surface of the spray gun group moving support vehicle 1511 is fixedly connected with the Y-direction synchronous belt 1516.

[0086] A Y-direction wheel-rail 1510 is fixedly connected with a Y-direction limit induction plate 1515 near one end of a rotating rod 4, and a Y-direction stroke limit 1514 is fixedly connected with the other end.

[0087] Further, a connecting rod 1520 is fixedly connected to the bottom of the spray gun group moving support vehicle 1511;

[0088] A spray gun support base 1522 is fixedly connected to the bottom of the connecting rod 1520; a pneumatic sand mixing spray gun 1521 is fixedly connected to the upper surface of the spray gun support base 1522;

[0089] An auxiliary support fixture is connected to the middle of the connecting rod 1520, and the other end of the auxiliary support fixture is slidably arranged on an auxiliary track 161;

[0090] The auxiliary track 161 is fixed on the side surface of the box body.

[0091] Above the second area is the wafer picking and placing area 2.

[0092] Further, the wafer picking and placing area 2 is provided with an X-direction moving workbench 162 auxiliary support fixture; 17, the X-direction moving workbench 162 auxiliary support fixture; 17 includes a moving platform 1711, a pair of X-direction guide rails 177, a pair of X-direction front bearing seats, a pair of X-direction rear bearing seats 173 and an X-direction servo motor 1713;

[0093] The X-direction servo motor 1713 is connected with an X-direction speed reducer 1714, and the other end of the X-direction speed reducer 1714 is connected with an X-direction coupling 1716;

[0094] The X-direction speed reducer 1714 is fixed on the tension L plate 151 through a speed reducer support frame 155;

[0095] The X-direction coupling 1716 axially passes through the X-direction front bearing seat, and the X-direction front bearing seat is configured with an X-direction synchronous pulley;

[0096] The X-direction front bearing seat and the X-direction rear bearing are respectively fixed on both sides inside the box body through a fixed L plate 171;

[0097] The fixed L plate 171 is configured with a fixed plate support frame 174;

[0098] A pair of X-direction guide rails 177 are respectively fixed on the front and rear surfaces inside the box body through an X-direction wheel-rail cabinet body intermediate support 178;

[0099] X-direction hard support blocks 175 are fixedly connected to both ends of the X-direction guide rails 177;

[0100] An X-direction stroke limit 176 is arranged on the inner side of the X-direction guide rail 177 near the X-direction hard support block 175;

[0101] Further, a pair of X-direction rear bearing seats 173 are configured with X-direction synchronous pulleys;

[0102] The X-direction synchronous belt 172 is elastically sleeved on the X-direction synchronous wheels respectively arranged on the X-back bearing seat 173 and the X-front bearing seat.

[0103] A wafer placement table 1712 is arranged on the upper surface of the moving platform 1711.

[0104] Guide wheels 179 are arranged at the four corners of the bottom surface of the moving platform 1711.

[0105] The guide wheels 179 slide on the X-direction guide rail 177.

[0106] Furthermore, cabinet lifting rings 11 are fixedly connected to the four corners on the outer side of the top surface of the box body wafer processing area 1.

[0107] An air path and sand path adjustment door 31 and an air path and sand path adjustment door 32 are respectively arranged on the front surfaces of the boxes in the first area and the second area.

[0108] Above the air path and sand path adjustment door 31 and the air path and sand path adjustment door 32, a sandblasting processing area observation window door 13 and a workpiece picking area observation window door 22 are respectively arranged.

[0109] A workbench moving and tensioning adjustment door 14 is arranged on the side surface of the box body close to the air path and sand path adjustment door 31.

[0110] Above the sandblasting processing area observation window door 13, a spray gun group working observation window 12 is arranged.

[0111] Above the workpiece picking area observation window door 22 at the top, a processing part picking and sending door 21 is arranged.

[0112] A lifting partition door group 110 is arranged on the side of the processing area close to the workpiece picking area.

[0113] Movable support feet 34 are arranged at the four corners of the bottom of the box body.

[0114] Furthermore, a sand material recovery funnel 19 and an air path and sand path pipeline 35 are respectively arranged in the first area and the second area of the air path and sand path area 3.

[0115] The air path and sand path pipeline includes an air path branch 351, an air source drying and filtering treatment device 352 and a manual air intake valve 353.

[0116] The air path branch 351 is arranged at the gap between the sand material recovery funnel 19 and the box body, close to the side of the air path and sand path adjustment door 31 and the air path and sand path adjustment door 32 of the box body.

[0117] The air source drying and filtering treatment device 352 is arranged outside the sand material recovery funnel 19 and is connected to the air path branch 351 through a pipeline.

[0118] The air source drying and filtering treatment device 352 is connected to the manual air intake valve 353 through a pipeline.

[0119] The gas source drying and filtering device 352 includes an air filter 3521 and an air dryer 3522. The air dryer 3522 is located on the side close to the manual intake valve 353.

[0120] The gas and sand pipeline 35 is arranged on the side of the gas and sand area 3 close to the back panel of the box body and is connected to the sand recovery funnel 19.

[0121] Furthermore, an explosion-proof lamp 18 is fixedly connected to the inner back panel of the box body.

[0122] Dust blowing air blades 23 are arranged on the inner side panel of the box body.

[0123] When performing micro-nano powder wafer processing, the workpiece to be processed is placed on the wafer placement table through the openable and closable sealed door. Then, the equipment is started to begin processing. The wafer placement table carries the wafer to be processed and runs back and forth uniformly along the X-axis guide rail under the drive of the X-axis motor drive device and the moving transmission device at a certain speed. The gas and sand spray gun group of the Y-axis moving spray gun group runs back and forth along the Y-axis guide rail at a set speed under the drive of the Y-axis motor drive device and the Y-axis moving support and traction. At the same time, the micro-nano powder passes through the sand path group and is directly impacted on the surface of the wafer to be processed by the gas and sand spray gun group driven by the high-pressure gas in the gas path group, realizing the sandblasting processing of the wafer. The waste generated by the processing is mixed with the ejected micro-nano powder sand and falls into the sand return funnel below the wafer placement table.

[0124] When the wafer to be processed is continuously processed to completion under the combined action of the X-axis moving workbench and the Y-axis moving spray gun group, the wafer is moved out of the processing area by the wafer placement table to directly below the openable and closable sealed door. At this time, the dust blowing device is started to remove the residual impurities on the surface of the wafer. At the same time, the lifting partition door is started to lower the partition door to avoid the problem that a large amount of micro-nano sand and dust is carried out into the environment when the dust and sand explosion generated during processing is released when opening the sealed processing box body, achieving the purpose of quickly taking out the processed wafer.

[0125] In this embodiment, by using the micro-nano powder wafer processing equipment to process the wafer, problems such as the use of dry / wet etching belts and low processing efficiency using laser processing are avoided. Even for wafers of different materials and structures, only the grinding consumables need to be replaced to quickly correspond, providing a device solution with stable quality and high production efficiency for the batch micro-structure processing and surface treatment of wafers.

[0126] Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of the present invention and are not intended to limit them. Although the present invention has been described in detail with reference to the preferred embodiments, those of ordinary skill in the art should understand that they can still modify or equivalently replace the technical solutions of the present invention, and these modifications or equivalent replacements cannot make the modified technical solutions deviate from the spirit and scope of the technical solutions of the present invention.

Claims

1. A sandblasting processing device, characterized in that, The sandblasting processing equipment is arranged inside the box body. The bottom side inside the box body is the air path and sand path area, which is divided into a first area and a second area. Above the first area is the wafer processing area, and above the second area is the wafer picking and placing area.

2. The sandblasting processing equipment according to claim 1, characterized in that, Four corners on the outer side of the top surface of the wafer processing area of the box body are fixedly connected with cabinet lifting rings. An air path and sand path adjustment door one and an air path and sand path adjustment door two are respectively arranged on the front side of the first area and the second area of the box body. Above the air path and sand path adjustment door one and the air path and sand path adjustment door two are respectively arranged a sandblasting processing area observation window door and a picking area observation window door. On one side of the box body close to the air path and sand path adjustment door one, a workbench moving tension adjustment door is arranged. Above the sandblasting processing area observation window door, a spray gun group working observation window is arranged. Above the picking area observation window door at the top, a processing part picking and sending door is arranged. On one side of the processing area close to the picking area, a lifting partition door group is arranged. At the four corners of the bottom of the box body, movable support feet are arranged.

3. The sandblasting processing equipment according to claim 1, characterized in that, The wafer processing area is provided with a Y-direction moving spray gun group, and the Y-direction moving spray gun group is powered by a Y-direction servo motor. The Y-direction servo motor is fixed on a tensioning L-shaped plate, and the tensioning L-shaped plate is fixed on the platform extending out of the box body through an L-shaped plate support frame. The Y-direction servo motor is connected with a Y-direction speed reducer, and the other end of the Y-direction speed reducer is connected with a Y-direction coupling. The Y-direction speed reducer is fixed on the tensioning L-shaped plate through a speed reducer support frame. The Y-direction coupling axially passes through a Y-direction front bearing seat, and the Y-direction front bearing seat is configured with a Y-direction synchronous pulley. The Y-direction rear bearing seat is fixed on the tensioning L-shaped plate.

4. A sandblasting processing device according to claim 1, characterized in that, The tensioning L-shaped plate is fixedly connected with a pair of Y-direction wheel rails through Y-direction hard support blocks. The Y-direction wheel rails are connected through a fixing rod, and the Y-direction hard support block is fixedly connected with the fixing rod. The other ends of a pair of the Y-direction wheel rails are fixed on the box body through Y-direction hard support blocks, and the ends are respectively fixedly connected with Y-direction bearing seat supports, and a baffle is arranged on the side. The Y-direction wheel rails are configured with a spray gun group moving support cart, and the spray gun group moving support cart moves on the Y-direction wheel rails. On the upper surface of the Y-direction bearing seat support, a Y-direction front bearing seat is fixedly connected. A pair of the Y-direction front bearing seats are connected through a rotating rod, and the Y-direction synchronous belt is sleeved on the Y-direction synchronous pulley and the rotating rod. The upper surface of the spray gun group moving support cart is fixedly connected with the Y-direction synchronous belt. One end of the Y-direction wheel rail close to the rotating rod is fixedly connected with a Y-direction limit induction plate, and the other end is fixedly connected with a Y-direction stroke limit.

5. A sandblasting processing device according to claim 1, characterized in that, The bottom of the spray gun group moving support cart is fixedly connected with a connecting rod. The bottom of the connecting rod is fixedly connected with a spray gun support seat. On the upper surface of the spray gun support seat, an air-sand mixing spray gun is fixedly connected. In the middle of the connecting rod, an auxiliary support fixture is connected, and the other end of the auxiliary support fixture is slidably arranged on an auxiliary track. The auxiliary track is fixed on the side surface of the box body.

6. The sandblasting processing equipment according to claim 1, characterized in that, The wafer picking and placing area is provided with an X-direction moving workbench, and the X-direction moving workbench includes a moving platform, a pair of X-direction guide rails, a pair of X-direction front bearing seats, a pair of X-direction rear bearing seats and an X-direction servo motor. The X-direction servo motor is connected with an X-direction speed reducer, and the other end of the X-direction speed reducer is connected with an X-direction coupling. The X-direction speed reducer is fixed on a fixed and tightened L-shaped plate through a speed reducer support frame. The X-axis coupling axially passes through the X-axis front bearing housing, and the X-axis front bearing housing is configured with an X-axis synchronous pulley; The X-axis front bearing housing and the X-axis rear bearing are respectively fixed on both sides inside the box body through a fixed L-shaped plate; The fixed L-shaped plate is configured with a fixed plate support frame; A pair of X-axis guide rails are respectively fixed on the front and rear inner surfaces of the box body through X-axis wheel-rail inter-cabinet supports; Both ends of the X-axis guide rail are respectively fixedly connected with X-axis hard support blocks; An X-axis travel limit is provided inside the X-axis guide rail near the X-axis hard support block part; 7. A sandblasting processing device according to claim 1, characterized in that, The pair of X-axis rear bearing housings are configured with X-axis synchronous pulleys; The X-axis synchronous belt is sleeved on the X-axis synchronous pulleys respectively configured on the X-axis rear bearing housing and the X-axis front bearing housing; A wafer placement table is arranged on the upper surface of the moving platform; Guide wheels are arranged at the four corners of the bottom surface of the moving platform; The guide wheels slide on the X-axis guide rail; 8. A sandblasting processing device according to claim 7, characterized in that, A sand material recovery funnel and an air path and sand path pipeline are respectively arranged in the first area and the second area of the air path and sand path area; The air path and sand path pipeline includes an air path branch, an air source drying and filtering device, and a manual control air inlet valve; The air path branch is arranged at the gap between the sand material recovery funnel and the box body, close to one side of the air path and sand path adjustment valve 1 and the air path and sand path adjustment valve 2 of the box body; The air source drying and filtering device is arranged outside the sand material recovery funnel and is communicated with the air path branch through a pipeline; The air source drying and filtering device is communicated with the manual control air inlet valve through a pipeline; The air source drying and filtering device includes an air filter and an air dryer, and the air dryer is on the side close to the manual control air inlet valve; 9. The sandblasting processing equipment according to claim 8, characterized in that, An explosion-proof electric lamp is fixedly connected to the inner back plate of the box body; Dust blowing air blades are arranged on the inner side plate of the box body.

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