Precise substrate air flotation conveying system and method

Abstract

The invention relates to the technical field of air flotation conveying, and discloses a precise substrate air flotation conveying system and method.The precise substrate air flotation conveying system comprises customized air flotation strips, a stainless steel cover plate, a non-contact strength transmission device, a double-receiving-table module transmission device, a FREE ROLLER supporting device and an equipment control system. According to the precise substrate air floatation conveying system and method, an upper-layer sampling inspection station facilitates personnel inspection, lower-layer product conveying utilizes the LIFTPIN and air floatation principle, only transmission wheels on the two sides make contact with glass for conveying, scratching is avoided, the equipment control system automatically adjusts the position and transmission parameters of a double-receiving-table module, rapid and accurate size compatibility is achieved, and the production efficiency is improved. The universality and the production efficiency of the equipment are improved, the size can be switched by one key, the compatibility of 8.5-8.7 generations of glass substrates is realized, the replacement requirements of different products are met, the high-degree automatic operation is realized in the whole process, the production efficiency and the operation accuracy are improved, the quality problem can be found in time, the quality guarantee is provided for the subsequent processing or packaging link, and the production cost is reduced. And the defective rate is reduced.

Description

Technical Field

[0001] The present invention relates to the technical field of air-floating transportation, and specifically to a precision substrate air-floating transportation system and method. Background Art

[0002] Inkjet printing technology has been widely applied in many traditional fields. In recent years, it has gradually been applied in the fields of flexible devices such as OLED, RFID, and thin-film solar cells. The flexible electronic manufacturing process combining flexible electronics and inkjet printing is attracting more attention. When performing inkjet printing on a flexible panel, the use of air-floating transportation technology to perform non-contact handling and transportation of glass can effectively avoid the problem of panel scratching, so as to reduce defects caused by printing and processing.

[0003] A precision substrate air-floating transportation system and method with the application publication number of CN117622882A. The system includes: an adsorption and transportation component, and the adsorption and transportation component includes an adsorption end moving along the transportation direction; an air-floating support component, and the air-floating support component includes an air-floating table. The air-floating surface of the air-floating table successively includes a first transportation area, a precision area, and a second transportation area along the transportation direction. The precision area is divided into multiple precision segments in the transportation direction. In this application, through the segmented design in the first transportation area, the precision area, and the second transportation area, at the junction of the first transportation area and the second transportation area and the precision area, by adaptively changing the air pressure and flow rate of each segment, the flexible panel gradually transitions at the junction, avoiding sudden rises or drops of the flexible panel, reducing the height fluctuation range of the flexible panel in the precision area, and improving the processing quality.

[0004] However, the prior art still has the following deficiencies: In actual operation, the stability of the transportation itself is poor, and it is impossible to ensure that the glass substrate can be transported under uniform buoyancy on both sides. Therefore, there is an urgent need for a precision substrate air-floating transportation system and method. Summary of the Invention

[0005] The purpose of the present invention is to provide a precision substrate air-floating transportation system and method to solve the problems raised in the above background art.

[0006] To solve the above technical problems, the present invention provides the following technical solution: A precision substrate air-floating transportation system includes a customized air-floating strip, a stainless-steel cover plate, a non-contact power transmission device, a double-receiving platform module transmission device, a FREE ROLLER support device, and an equipment control system; The customized air-floating strip has inclined-hole air vents. The inclined design, diameter, and spacing of the air vents are optimized according to the size, weight, thickness, and material of the glass substrate to generate uniform and stable airflows; The stainless-steel cover plate is arranged between the air-floating strips. The stainless-steel cover plate has two forms: perforated and sealed. The perforated cover plate is provided with small holes at specific positions for gas circulation and turbulence, and the sealed cover plate realizes gas flow through the air flow channels at the edges to increase gas turbulence. The non-contact power transmission device is arranged on both sides of the glass substrate transmission, adopts a non-contact transmission method, and transmits power with the glass substrate. The non-contact power transmission device adopts magnetic drive, and high-performance permanent magnets are embedded inside the transmission wheels, and the transmission with the glass substrate is realized through magnetic force. The double receiving platform module transmission device is arranged at the transmission wheels on the left and right sides, and is used to accommodate glass substrates of different sizes. The double receiving platform module is composed of two independent transmission units, and each transmission unit can independently adjust the position and transmission parameters. The FREE ROLLER support device is arranged at the gaps between the side guide wheels and the air-floating strips. The equipment control system is used to coordinately control the above-mentioned various devices.

[0007] Preferably, when installing the customized air-floating strips, high-precision measuring tools are used to measure and adjust the position and angle of the air-floating strips to ensure that the contact surface between the air-floating strips and the glass substrate is parallel. After installation, the air-floating strips are debugged to check the air ventilation of the air holes and the air-floating effect, and the air pressure and flow rate of the air holes are adjusted according to the actual situation.

[0008] Preferably, the stainless-steel cover plate is made of high-strength and corrosion-resistant stainless-steel material, and the surface is polished to ensure that no scratches are caused when contacting the glass substrate. The size and shape of the cover plate are customized according to the layout of the air-floating strips and the size of the glass substrate.

[0009] Preferably, when it is necessary to change the product size, the operator inputs the corresponding product size parameters through the human-machine interface (HMI), and the equipment control system automatically adjusts the position and transmission parameters of the double receiving platform module.

[0010] Preferably, the FREE ROLLER in the FREE ROLLER support device is made of engineering plastic, and the surface is subjected to special anti-slip treatment. The installation position and quantity of the FREE ROLLER are reasonably designed according to the layout of the air-floating strips and the size of the glass substrate.

[0011] Preferably, the equipment control system includes a robot and equipment coordination control module, a sensor and detection system module, and a human-machine interface (HMI) module. The collaborative control module of the robot and the equipment adopts an advanced industrial robot control system to achieve the collaborative control of the robot and the equipment. The robot can automatically adjust the actions and positions of grasping and placing the glass substrate according to the operating state of the equipment and the product requirements. The equipment control system and the robot control system communicate through an industrial Ethernet to achieve high-speed data transmission and real-time sharing; The sensor and detection system module installs various sensors at key parts of the equipment, such as position sensors, pressure sensors, speed sensors, etc., to monitor the operating state of the equipment and the transmission situation of the glass substrate in real time. The data collected by the sensors is transmitted to the equipment control system through a data acquisition card, and the control system adjusts and optimizes the operating parameters of the equipment according to the sensor data; The human-machine interface (HMI) module adopts a simple and intuitive human-machine interface, which is convenient for operators to operate and monitor the equipment. The human-machine interface has a fault diagnosis and alarm function. When the equipment fails or an abnormal situation occurs, it can send an alarm signal in time and display the fault information and handling suggestions on the human-machine interface.

[0012] Preferably, it further includes a precise substrate air-floating conveying method, which includes the following steps: Robot loading preparation: Ensure that the robot is in a standby state, the communication with the equipment control system is normal, check whether the grasping tool of the robot is installed correctly and whether the grasping force is appropriate, so as to stably grasp the glass substrate without causing damage; Glass substrate placement: The operator places the glass substrate to be transported at the designated loading position of the robot, ensuring that the glass substrate is placed smoothly and neatly. The robot automatically moves to the loading position according to the instructions of the equipment control system, grasps the glass substrate, and accurately and stably places it on the air-floating strip of the equipment; Start transmission: Click the start button on the HMI, and the equipment starts to transport the glass substrate according to the set parameters. Observe the state of the glass substrate during the transmission process to ensure that the glass substrate is smoothly blown up by the air-floating strip, and there is no contact between the two side driving wheels and the glass substrate. The FREE ROLLER provides stable support for the glass substrate; Real-time monitoring: Through the real-time monitoring screen on the HMI, observe information such as the operating state of the equipment, the data of each sensor, and the transmission position of the glass substrate. Pay attention to whether parameters such as air-floating pressure and transmission speed are within the normal range. If there are abnormal fluctuations, adjust them in time. Check whether the glass substrate has any offset, shaking, deformation, etc. during the transmission process. If there is any abnormality, immediately stop the operation of the equipment and conduct fault troubleshooting and handling; Glass substrate blanking: When the glass substrate is transported to the specified position, the equipment control system sends a blanking instruction to the robot. The robot moves to the blanking position, adjusts the position and posture of the grasping tool, prepares to grasp the glass substrate, accurately grasps the glass substrate, and moves it to the specified blanking area for stable placement. The operator checks the glass substrate after blanking. After confirming that there are no quality problems such as scratches and deformations, subsequent processing or packaging is carried out.

[0013] Preferably, in the robot loading preparation step, the communication link between the robot and the equipment control system is detected through a communication test program to ensure the stability and reliability of data transmission. The performance of the grasping tool is tested through a simulated grasping experiment, and the grasping force and grasping position are adjusted to ensure the accuracy and stability of grasping.

[0014] Preferably, in the glass substrate placement step, a positioning device is used to position the glass substrate to ensure the accuracy of the glass substrate placement position. The position of the glass substrate is accurately identified through a vision positioning system to guide the robot to accurately grasp and place the glass substrate. In the start transmission step, the transmission process of the glass substrate is observed in real time through a video monitoring system to promptly detect abnormal situations. In the real-time monitoring step, the PID control algorithm is used to adjust the air-floating pressure and transmission speed in real time to ensure the stability of the parameters. A quality detection system is used to automatically detect the glass substrate after blanking to improve the detection efficiency and accuracy.

[0015] Compared with the prior art, the beneficial effects achieved by the present invention are: First, in the present invention, the customized air floating strip has inclined-angle air holes. The inclined-angle design, diameter, and spacing of the air holes are optimized to generate uniform and stable airflows according to the size, weight, thickness, and material of the glass substrate, providing stable support for the glass substrate, reducing the contact friction with the conveying surface, ensuring the smoothness of conveying. When installing, high-precision measuring tools are required to measure and adjust the position and angle to ensure parallelism with the contact surface of the glass substrate. After installation, debugging is also required to check the air ventilation of the air holes and the air floating effect, and adjust the air pressure and flow rate of the air holes according to the actual situation to ensure that the air floating performance reaches the best. The stainless-steel cover plate has two forms: perforated and sealed. The perforated cover plate is provided with small holes at specific positions for gas circulation and turbulence, and the sealed cover plate realizes gas flow through the air flow channels at the edges, increasing gas turbulence. The size and shape of the cover plate are customized according to the layout of the air floating strip and the size of the glass substrate to better adapt to the system requirements, improve the gas turbulence effect and system stability. Designs such as the customized air floating strip and the non-contact magnetic force transmission device ensure the stability and accuracy of the glass substrate conveying, reduce the errors caused by friction and contact, and improve the product quality. The FREE ROLLER is made of engineering plastic and its surface is treated with special anti-slip treatment, which not only ensures the stability of support but also reduces the risk of damage to the glass substrate. The reasonable design of the double receiving platform module transmission device and the FREE ROLLER support device enables the system to be compatible with glass substrates of different sizes, improving the versatility and production flexibility of the equipment. The upper-layer sampling station is convenient for personnel inspection, and the lower-layer product transmission uses the LIFTPIN and air floating principle, with only the two-side driving wheels contacting the glass for transmission, avoiding scratches.

[0016] Second, in the present invention, the two-side transmission adopts non-contact magnetic force transmission, specifically magnetic force transmission. High-performance permanent magnets are embedded inside the driving wheels, and the transmission with the glass substrate is realized through the magnetic force, avoiding the wear and pollution problems that may be brought by traditional contact transmission, improving the transmission accuracy and reliability, and preventing particle pollution of the product due to friction. The left and right driving wheels adopt a double receiving platform module transmission for compatible different-sized glass substrates. It consists of two independent transmission units, and each transmission unit can independently adjust the position and transmission parameters. When the product size needs to be changed, the operator inputs the corresponding product size parameters through the human-machine interface (HMI), and the equipment control system automatically adjusts the position and transmission parameters of the double receiving platform module to achieve fast and accurate size compatibility, improving the versatility and production efficiency of the equipment. It can switch sizes with one key to achieve compatibility with 8.5-8.7 generation glass substrates and meet the replacement requirements of different products.

[0017] Thirdly, for the present invention, robot loading preparation: A communication test program is used to detect the communication link between the robot and the equipment control system, so as to avoid damaging the glass substrate while stably grasping it, ensure the integrity of the glass substrate in the subsequent process, ensure that the robot is in the standby state and communicates normally with the equipment control system, and precisely adjust the grasping force and position through a simulated grasping experiment; Glass substrate placement: The operator places the glass substrate to be transferred at the designated loading position of the robot, and uses a positioning device to position the glass substrate, effectively ensuring the accuracy of the glass substrate placement position and reducing grasping errors or transmission abnormalities caused by placement deviations; Start transmission: The operator clicks the start button on the HMI, and the equipment starts to transfer the glass substrate according to the set parameters. The video monitoring system is used to observe the transmission process of the glass substrate in real time, enabling the operator to intuitively master the transmission situation; Real-time monitoring: The operator observes the operation status of the equipment through the real-time monitoring screen on the HMI, focusing on whether the air floating pressure and transmission speed are within the normal range. If there are abnormal fluctuations, adjustments need to be made in a timely manner to ensure the stability of the equipment operation parameters. At the same time, carefully check whether the glass substrate has any offset, shaking, deformation, etc. during the transmission process. Once an abnormality is found, immediately stop the equipment operation, conduct fault troubleshooting and handling, and prevent the problem from expanding and affecting the product quality; Glass substrate unloading: Unloading operation: When the glass substrate is transferred to the designated position, the equipment control system sends an unloading instruction to the robot. The robot moves to the unloading position, adjusts the position and posture of the grasping tool, accurately grasps the glass substrate, and moves it to the designated unloading area and places it smoothly, completing the entire transmission process. The quality detection system is used to automatically detect the glass substrate after unloading, and can quickly and accurately detect whether there are quality problems such as scratches and deformation on the glass substrate, improve the detection efficiency and accuracy, reduce the errors and missed detections that may be brought by manual detection, and ensure that only qualified products enter the subsequent processing or packaging links. Through five steps, from robot loading preparation to glass substrate unloading, the whole process realizes a high degree of automated operation, reduces manual intervention, reduces labor costs and labor intensity, improves production efficiency and operation accuracy at the same time, can timely detect quality problems, provides quality assurance for the subsequent processing or packaging links, and reduces the defective rate. Description of the Drawings

[0018] Figure 1 It is a schematic diagram of the working process of the structure of the present invention; Figure 2 It is a schematic diagram of the screen connection method of the structure of the present invention; Detailed Embodiments Next, the technical solutions in the embodiments of the present invention will be clearly and completely described in conjunction with the accompanying drawings in the embodiments of the present invention. Obviously, the described embodiments are only a part of the embodiments of the present invention, rather than all the embodiments. All other embodiments obtained by those of ordinary skill in the art based on the embodiments of the present invention without creative efforts shall fall within the protection scope of the present invention.

[0019] Embodiment 1 As Figure 1 , Figure 2 shown, the present invention provides a technical solution: a precision substrate air-floating conveying system, including a customized air-floating strip, a stainless-steel cover plate, a non-contact power transmission device, a double-receiving platform module transmission device, a FREE ROLLER support device, and an equipment control system; The customized air-floating strip has inclined-angle air holes. The inclined-angle design, diameter, and spacing of the air holes are optimized according to the size, weight, thickness, and material of the glass substrate to generate uniform and stable airflows; The stainless-steel cover plate is arranged between the air-floating strips. The stainless-steel cover plate has two forms: perforated and sealed. The perforated cover plate is provided with small holes at specific positions for gas circulation and turbulence, and the sealed cover plate realizes gas flow through the air channels at the edges to increase gas turbulence; The non-contact power transmission device is arranged on both sides of the glass substrate transmission. It adopts a non-contact transmission method to drive the glass substrate. The non-contact power transmission device uses magnetic transmission. High-performance permanent magnets are embedded inside the transmission wheel, and the transmission with the glass substrate is realized through magnetic force; The double-receiving platform module transmission device is arranged at the transmission wheels on the left and right sides and is used to be compatible with glass substrates of different sizes. The double-receiving platform module consists of two independent transmission units, and each transmission unit can independently adjust the position and transmission parameters; The FREE ROLLER support device is arranged at the gaps between the side guide wheels and the air-floating strips; The equipment control system is used to coordinately control the above-mentioned devices.

[0020] When installing the customized air-floating strip, use high-precision measuring tools to measure and adjust the position and angle of the air-floating strip to ensure that the contact surface between the air-floating strip and the glass substrate is parallel. After installation, debug the air-floating strip, check the air ventilation of the air holes and the air-floating effect, and adjust the air pressure and flow rate of the air holes according to the actual situation.

[0021] The stainless-steel cover plate is made of high-strength and corrosion-resistant stainless-steel material, and its surface is polished to ensure that it will not cause scratches when contacting the glass substrate. The size and shape of the cover plate are customized according to the layout of the air-floating strips and the size of the glass substrate.

[0022] When it is necessary to change the product size, the operator inputs the corresponding product size parameters through the human-machine interface (HMI), and the equipment control system automatically adjusts the position and transmission parameters of the double receiving table module.

[0023] The FREE ROLLER in the FREE ROLLER support device is made of engineering plastics and its surface is treated with special anti-slip treatment. The installation position and quantity of the FREE ROLLER are reasonably designed according to the layout of the air float bars and the size of the glass substrate.

[0024] The equipment control system includes a robot and equipment collaborative control module, a sensor and detection system module, and a human-machine interface (HMI) module; The robot and equipment collaborative control module adopts an advanced industrial robot control system to achieve the collaborative control of the robot and the equipment. The robot can automatically adjust the actions and positions of grasping and placing the glass substrate according to the operating state of the equipment and the product requirements. Communication between the equipment control system and the robot control system is carried out through industrial Ethernet to achieve high-speed data transmission and real-time sharing; The sensor and detection system module installs various sensors at key parts of the equipment, such as position sensors, pressure sensors, speed sensors, etc., to monitor the operating state of the equipment and the transmission situation of the glass substrate in real time. The data collected by the sensors is transmitted to the equipment control system through a data acquisition card, and the control system adjusts and optimizes the operating parameters of the equipment in real time according to the sensor data; The human-machine interface (HMI) module adopts a human-machine interface with a simple and intuitive design, which is convenient for the operator to operate and monitor the equipment. The human-machine interface has a fault diagnosis and alarm function. When the equipment fails or an abnormal situation occurs, it can send out an alarm signal in time and display the fault information and treatment suggestions on the human-machine interface.

[0025] Through the above technical solutions, the customized air floating strip has beveled air holes. The bevel design, diameter, and spacing of the air holes are optimized to generate uniform and stable airflows according to the size, weight, thickness, and material of the glass substrate, providing stable support for the glass substrate, reducing the contact friction with the conveying surface, ensuring the smoothness of conveying. When installing, high-precision measuring tools are required to measure and adjust the position and angle to ensure parallelism with the contact surface of the glass substrate. After installation, debugging is also required to check the air passage of the air holes and the air floating effect, and adjust the air pressure and flow rate of the air holes according to the actual situation to ensure that the air floating performance reaches the best. The stainless-steel cover plate has two forms: perforated and sealed. The perforated cover plate is provided with small holes at specific positions for gas circulation and turbulence, and the sealed cover plate realizes gas flow through the air passage at the edge, increasing gas turbulence. The size and shape of the cover plate are customized according to the layout of the air floating strip and the size of the glass substrate to better adapt to the system requirements, improve the gas turbulence effect and system stability. Designs such as the customized air floating strip and the non-contact power transmission device ensure the stability and accuracy of the glass substrate conveying, reduce errors caused by friction and contact, and improve product quality. The FREE ROLLER is made of engineering plastics and its surface is treated with special anti-slip treatment, which not only ensures the stability of support but also reduces the risk of damage to the glass substrate. The reasonable design of the double receiving table module transmission device and the FREE ROLLER support device enables the system to be compatible with glass substrates of different sizes, improving the versatility and production flexibility of the equipment. The upper-layer sampling station is convenient for personnel inspection, and the lower-layer product transmission utilizes the LIFTPIN and air floating principle, with only the two-side driving wheels contacting the glass for transmission, avoiding scratches. The two-side transmission adopts non-contact magnetic drive, specifically magnetic drive. High-performance permanent magnets are embedded inside the driving wheels, and the transmission with the glass substrate is achieved through magnetic force, avoiding the wear and pollution problems that may be brought by traditional contact drives, improving the transmission accuracy and reliability, and preventing particle pollution of the product due to friction. The left and right driving wheels adopt double receiving table module transmission to be compatible with glass substrates of different sizes. It consists of two independent transmission units, and each transmission unit can independently adjust the position and transmission parameters. When the product size needs to be changed, the operator inputs the corresponding product size parameters through the human-machine interface (HMI), and the equipment control system automatically adjusts the position and transmission parameters of the double receiving table module to achieve fast and accurate size compatibility, improving the versatility and production efficiency of the equipment. It can switch sizes with one key to achieve compatibility of 8.5-8.7 generation glass substrates and meet the replacement requirements of different products.

[0026] Embodiment 2 As Figure 1 , Figure 2 shown, the present invention provides a technical solution: a precise substrate air floating conveying method, including the following steps: Robot Loading Preparation: Ensure that the robot is in standby mode, the communication with the equipment control system is normal, check whether the grasping tool of the robot is correctly installed and the grasping force is appropriate, so that the glass substrate can be stably grasped without damage; Glass Substrate Placement: The operator places the glass substrate to be transferred at the designated loading position of the robot, ensuring that the glass substrate is placed smoothly and neatly. The robot automatically moves to the loading position according to the instructions of the equipment control system, grasps the glass substrate, and accurately and stably places it on the air float bar of the equipment; Start Transmission: Click the start button on the HMI, and the equipment starts to transfer the glass substrate according to the set parameters. Observe the state of the glass substrate during the transfer process to ensure that the glass substrate is smoothly blown up by the air float bar, there is no contact between the two side drive wheels and the glass substrate, and the FREE ROLLER provides stable support for the glass substrate; Real-time Monitoring: Through the real-time monitoring screen on the HMI, observe information such as the operating state of the equipment, the data of each sensor, and the transfer position of the glass substrate. Pay attention to whether parameters such as air float pressure and transmission speed are within the normal range. If there are abnormal fluctuations, adjust them in time. Check whether the glass substrate has offset, sway, deformation, etc. during the transfer process. If there are abnormalities, immediately stop the equipment operation and conduct fault troubleshooting and handling; Glass Substrate Unloading: When the glass substrate is transferred to the designated position, the equipment control system sends an unloading instruction to the robot. The robot moves to the unloading position, adjusts the position and posture of the grasping tool, prepares to grasp the glass substrate, accurately grasps the glass substrate, and moves it to the designated unloading area and places it smoothly. The operator checks the glass substrate after unloading. After confirming that there are no quality problems such as scratches and deformation, carry out subsequent processing or packaging;

[0027] In the robot loading preparation step, the communication link between the robot and the equipment control system is detected through a communication test program to ensure the stability and reliability of data transmission. The performance of the grasping tool is tested through a simulated grasping experiment, and the grasping force and grasping position are adjusted to ensure the accuracy and stability of grasping.

[0028] In the glass substrate placement step, a positioning device is used to position the glass substrate to ensure the accuracy of the glass substrate placement position. The position of the glass substrate is accurately identified through a vision positioning system to guide the robot to accurately grasp and place the glass substrate. In the start transmission step, the transmission process of the glass substrate is observed in real time through a video monitoring system to promptly discover abnormal situations. In the real-time monitoring step, the PID control algorithm is used to adjust the air float pressure and transmission speed in real time to ensure the stability of the parameters. A quality inspection system is used to automatically inspect the glass substrate after unloading to improve the inspection efficiency and accuracy.

[0029] Through the above technical solutions, the robot loading preparation is as follows: A communication test program is used to detect the communication link between the robot and the equipment control system to avoid damaging the glass substrate while stably grasping it, ensuring the integrity of the glass substrate in subsequent processes, ensuring that the robot is in a standby state and communicating normally with the equipment control system, and precisely adjusting the grasping force and position through simulated grasping experiments; Glass substrate placement: The operator places the glass substrate to be transported at the designated loading position of the robot, and uses a positioning device to position the glass substrate, effectively ensuring the accuracy of the glass substrate placement position and reducing grasping errors or transmission abnormalities caused by placement deviations; Start transmission: The operator clicks the start button on the HMI, and the equipment starts to transport the glass substrate according to the set parameters. The video monitoring system is used to observe the transportation process of the glass substrate in real time, enabling the operator to intuitively grasp the transportation situation; Real-time monitoring: The operator comprehensively observes the operating status of the equipment through the real-time monitoring screen on the HMI, focusing on whether the air-floating pressure and transmission speed are within the normal range. If there are abnormal fluctuations, adjustments need to be made in a timely manner to ensure the stability of the equipment operating parameters. At the same time, carefully check whether the glass substrate has any offset, shaking, deformation, etc. during the transportation process. Once an abnormality is found, immediately stop the equipment operation, conduct fault troubleshooting and handling to prevent the problem from expanding and affecting product quality; Glass substrate unloading: Unloading operation: When the glass substrate is transported to the designated position, the equipment control system sends an unloading instruction to the robot. The robot moves to the unloading position, adjusts the position and posture of the grasping tool, accurately grasps the glass substrate, and moves it to the designated unloading area and places it stably, completing the entire transportation process. An automatic detection is carried out on the glass substrate after unloading using a quality detection system, which can quickly and accurately detect whether there are quality problems such as scratches and deformations on the glass substrate, improve the detection efficiency and accuracy, reduce errors and missed detections that may be caused by manual detection, and ensure that only qualified products enter the subsequent processing or packaging links. Through five steps, from robot loading preparation to glass substrate unloading, the entire process realizes a high degree of automated operation, reduces manual intervention, reduces labor costs and labor intensity, improves production efficiency and operation accuracy at the same time, can timely detect quality problems, provides quality assurance for the subsequent processing or packaging links, and reduces the defective rate.

[0030] During use, the customized air float bar has beveled air holes. The bevel design, diameter, and spacing of the air holes are optimized to generate uniform and stable airflows according to the size, weight, thickness, and material of the glass substrate, providing stable support for the glass substrate, reducing contact friction with the conveying surface, ensuring the smoothness of conveying. When installing, high-precision measuring tools are required to measure and adjust the position and angle to ensure parallelism with the contact surface of the glass substrate. After installation, debugging is also required to check the air passage of the air holes and the air float effect, and adjust the air pressure and flow rate of the air holes according to the actual situation to ensure that the air float performance reaches the best. The stainless-steel cover plate has two forms: perforated and sealed. The perforated cover plate is provided with small holes at specific positions for gas circulation and turbulence, and the sealed cover plate realizes gas flow through the air passage at the edge to increase gas turbulence. The size and shape of the cover plate are customized according to the layout of the air float bar and the size of the glass substrate to better adapt to the system requirements and improve the gas turbulence effect and system stability. Designs such as the customized air float bar and the non-contact power transmission device ensure the stability and accuracy of the glass substrate conveying, reduce errors caused by friction and contact, and improve product quality. The FREE ROLLER is made of engineering plastic and its surface is specially treated with anti-slip, which not only ensures the stability of support but also reduces the risk of damage to the glass substrate. The reasonable design of the double-receiving platform module transmission device and the FREE ROLLER support device enables the system to be compatible with glass substrates of different sizes, improving the versatility and production flexibility of the equipment. The upper-layer sampling station is convenient for personnel inspection, and the lower-layer product transmission uses the LIFTPIN and air float principle, with only the two-side driving wheels in contact with the glass for conveying, avoiding scratches. The two-side driving adopts non-contact magnetic drive, specifically magnetic drive. High-performance permanent magnets are embedded inside the driving wheels, and the transmission with the glass substrate is realized through magnetic force, avoiding the wear and pollution problems that may be caused by traditional contact drive, improving the transmission accuracy and reliability, and preventing particle pollution of the product due to friction. The left and right driving wheels adopt double-receiving platform module transmission to be compatible with glass substrates of different sizes. It consists of two independent transmission units, and each transmission unit can independently adjust the position and transmission parameters. When the product size needs to be changed, the operator inputs the corresponding product size parameters through the human-machine interface (HMI), and the equipment control system automatically adjusts the position and transmission parameters of the double-receiving platform module to achieve fast and accurate size compatibility, improving the versatility and production efficiency of the equipment. It can switch sizes with one key to achieve compatibility with 8.5-8.7 generation glass substrates and meet the replacement requirements of different products.Robot Loading Preparation: Use a communication test program to detect the communication link between the robot and the equipment control system, so as to avoid damaging the glass substrate while stably grasping it, ensure the integrity of the glass substrate in the subsequent process, ensure that the robot is in a standby state and communicates normally with the equipment control system, and precisely adjust the grasping force and position through a simulated grasping experiment; Glass Substrate Placement: The operator places the glass substrate to be transported at the designated loading position of the robot and uses a positioning device to position the glass substrate, effectively ensuring the accuracy of the placement position of the glass substrate and reducing grasping errors or transmission abnormalities caused by placement deviations; Start Transmission: The operator clicks the start button on the HMI, and the equipment starts to transport the glass substrate according to the set parameters. The operator can visually monitor the transportation process of the glass substrate through the video monitoring system; Real-time Monitoring: The operator comprehensively observes the operating state of the equipment through the real-time monitoring screen on the HMI, focusing on whether the air-floating pressure and transmission speed are within the normal range. If there are abnormal fluctuations, adjustments need to be made in a timely manner to ensure the stability of the equipment operating parameters. At the same time, carefully check whether the glass substrate has any offset, shaking, deformation, etc. during the transportation process. Once an abnormality is found, immediately stop the equipment operation, conduct fault troubleshooting and handling to prevent the problem from expanding and affecting the product quality; Glass Substrate Unloading: Unloading Operation: When the glass substrate is transported to the designated position, the equipment control system sends an unloading instruction to the robot. The robot moves to the unloading position, adjusts the position and posture of the grasping tool, accurately grasps the glass substrate, and moves it to the designated unloading area for stable placement, completing the entire transportation process. Use a quality inspection system to automatically inspect the glass substrate after unloading, which can quickly and accurately detect whether there are quality problems such as scratches and deformations on the glass substrate, improve the inspection efficiency and accuracy, reduce errors and missed inspections that may be caused by manual inspection, and ensure that only qualified products enter the subsequent processing or packaging link. Through five steps, from robot loading preparation to glass substrate unloading, the entire process realizes a high degree of automated operation, reduces manual intervention, reduces labor costs and labor intensity, improves production efficiency and operation accuracy at the same time, can timely detect quality problems, provides quality assurance for the subsequent processing or packaging link, and reduces the defective rate.

[0031] Although the embodiments of the present invention have been shown and described, it will be understood by those of ordinary skill in the art that various changes, modifications, substitutions and variations can be made therein without departing from the principles and spirit of the invention, and the scope of the invention is defined by the appended claims and their equivalents.

Claims

1. A precision substrate air-floating conveying system, characterized in that: It includes a customized air floating bar, a stainless - steel cover plate, a non - contact power transmission device, a double receiving - table module transmission device, a FREE ROLLER support device, and an equipment control system; The customized air floating bar has inclined - angle air holes. The inclined - angle design, diameter, and spacing of the air holes are optimized according to the size, weight, thickness, and material of the glass substrate, generating uniform and stable airflows; The stainless - steel cover plate is arranged between the air floating bars. The stainless - steel cover plate has two forms: perforated and sealed. The perforated cover plate is provided with small holes at specific positions for gas circulation and turbulence, and the sealed cover plate realizes gas flow through the air - flow channels at the edges, increasing gas turbulence; The non - contact power transmission device is arranged on both sides of the glass - substrate transmission. It adopts a non - contact transmission method to drive the glass substrate. The non - contact power transmission device uses magnetic drive, and high - performance permanent magnets are embedded inside the transmission wheels, achieving transmission with the glass substrate through magnetic force; The double receiving - table module transmission device is arranged at the transmission wheels on the left and right sides, used to be compatible with glass substrates of different sizes. The double receiving - table module consists of two independent transmission units, and each transmission unit can independently adjust its position and transmission parameters; The FREE ROLLER support device is arranged at the gaps between the side guide wheels and the air floating bars; The equipment control system is used to coordinately control the above - mentioned various devices.

2. The precision substrate air-floating conveying system according to claim 1, wherein: When installing the customized air floating bar, high - precision measuring tools are used to measure and adjust the position and angle of the air floating bar to ensure that the contact surface between the air floating bar and the glass substrate is parallel. After installation, the air floating bar is debugged to check the air - passing condition of the air holes and the air - floating effect, and the air pressure and flow rate of the air holes are adjusted according to the actual situation.

3. The precision substrate air-floating conveying system according to claim 1, characterized in that: The stainless - steel cover plate is made of high - strength and corrosion - resistant stainless - steel material, and its surface is polished to ensure that it will not cause scratches when contacting the glass substrate. The size and shape of the cover plate are customized according to the layout of the air floating bars and the size of the glass substrate.

4. A precision substrate air-floating conveying system according to claim 1, characterized in that: When it is necessary to change the product size, the operator inputs the corresponding product - size parameters through the human - machine interface (HMI), and the equipment control system automatically adjusts the position and transmission parameters of the double receiving - table module.

5. The precision substrate air-floating conveying system according to claim 1, wherein: The FREE ROLLER in the FREE ROLLER support device is made of engineering plastic, and its surface is treated with special anti - slip treatment. The installation position and quantity of the FREE ROLLER are reasonably designed according to the layout of the air floating bars and the size of the glass substrate.

6. The precision substrate air-floating conveying system according to claim 1, wherein: The equipment control system includes a robot - equipment collaborative control module, a sensor - detection system module, and a human - machine interface (HMI) module; The robot - equipment collaborative control module adopts an advanced industrial - robot control system to realize the collaborative control of the robot and the equipment. The robot can automatically adjust the actions and positions of grasping and placing the glass substrate according to the operating state of the equipment and the product requirements. Communication between the equipment control system and the robot control system is carried out through the industrial Ethernet to achieve high - speed data transmission and real - time sharing; The sensor and detection system module installs various sensors at key parts of the equipment, such as position sensors, pressure sensors, speed sensors, etc., to monitor the operating state of the equipment and the transmission of glass substrates in real time. The data collected by the sensors is transmitted to the equipment control system through a data acquisition card, and the control system adjusts and optimizes the operating parameters of the equipment in real time according to the sensor data; The human-machine interface (HMI) module adopts a simple and intuitive human-machine interface, which is convenient for operators to operate and monitor the equipment. The human-machine interface has a fault diagnosis and alarm function. When the equipment fails or an abnormal situation occurs, it can send an alarm signal in time and display the fault information and handling suggestions on the human-machine interface.

7. A precise substrate air-floating conveying method, based on a precise substrate air-floating conveying system according to any one of claims 1-6, characterized in that: It includes the following steps: Robot loading preparation: Ensure that the robot is in the standby state, the communication with the equipment control system is normal, check whether the grasping tool of the robot is installed correctly and whether the grasping force is appropriate, so as to stably grasp the glass substrate without causing damage; Glass substrate placement: The operator places the glass substrate to be transmitted at the designated loading position of the robot, ensuring that the glass substrate is placed smoothly and neatly. The robot automatically moves to the loading position according to the instructions of the equipment control system, grasps the glass substrate, and places it accurately and stably on the air float bar of the equipment; Start transmission: Click the start button on the HMI, and the equipment starts to transmit the glass substrate according to the set parameters. Observe the state of the glass substrate during the transmission process to ensure that the glass substrate is smoothly blown up by the air float bar, and there is no contact between the two side driving wheels and the glass substrate. The FREE ROLLER provides stable support for the glass substrate; Real-time monitoring: Through the real-time monitoring screen on the HMI, observe information such as the operating state of the equipment, the data of each sensor, and the transmission position of the glass substrate. Pay attention to whether parameters such as air float pressure and transmission speed are within the normal range. If there are abnormal fluctuations, adjust them in time. Check whether the glass substrate has deviations, shakes, deformations, etc. during the transmission process. If there are abnormalities, immediately stop the equipment operation and conduct fault troubleshooting and handling; Glass substrate unloading: When the glass substrate is transmitted to the designated position, the equipment control system sends an unloading instruction to the robot. The robot moves to the unloading position, adjusts the position and posture of the grasping tool, and prepares to grasp the glass substrate. The robot accurately grasps the glass substrate and moves it to the designated unloading area, and places it smoothly. The operator checks the glass substrate after unloading. After confirming that there are no quality problems such as scratches and deformations, carry out subsequent processing or packaging; 8. A precision substrate air-floating conveying method according to claim 7, characterized in that: In the robot loading preparation step, the communication link between the robot and the equipment control system is detected through a communication test program to ensure the stability and reliability of data transmission. The performance of the grasping tool is tested through a simulated grasping experiment, and the grasping force and grasping position are adjusted to ensure the accuracy and stability of grasping.

9. A precision substrate air-floating conveying method according to claim 7, characterized in that: In the step of placing the glass substrate, a positioning device is used to position the glass substrate to ensure the accuracy of the placement position of the glass substrate. The position of the glass substrate is accurately identified through a vision positioning system to guide the robot to accurately grasp and place the glass substrate. In the step of starting the transmission, the transmission process of the glass substrate is observed in real time through a video monitoring system to timely detect abnormal situations. In the step of real-time monitoring, the PID control algorithm is used to adjust the air-floating pressure and transmission speed in real time to ensure the stability of the parameters. A quality inspection system is used to automatically inspect the glass substrate after blanking to improve the inspection efficiency and accuracy.

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