Preparation method of silicon nitride ceramic substrate and silicon nitride ceramic substrate

By using magnesium oxide sol and rare earth oxide sol as sintering aids, the problem of uneven dispersion of the slurry of the silicon nitride ceramic substrate was solved, and a silicon nitride ceramic substrate with good strength consistency was prepared, with high bending strength and uniform distribution.

CN120349192APending Publication Date: 2025-07-22CHANGSHA YAOXI SEMICONDUCTOR TECHNOLOGY CO LTD
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Patent Information

Application Number
CN202510549377.0
Authority / Receiving Office
CN · China
Patent Type
Applications(China)
Current Assignee / Owner
Filing Date
2025-04-28
Publication Date
2025-07-22

AI Technical Summary

Technical Problem

In the traditional preparation method, the silicon raw material powder and sintering aid particles in the slurry of the silicon nitride ceramic substrate are difficult to disperse evenly, and easily agglomerate, resulting in uneven green sheets, which in turn makes the strength consistency and dispersion of different areas of the silicon nitride ceramic substrate less severe.

Method used

Magnesium oxide sol and rare earth oxide sol are used as sintering aids, mixed with silicon-based powder and dispersion medium, and then cast the slurry to obtain green sheets and sintering treatment under a nitrogen atmosphere to ensure uniform dispersion of silicon nitride powder and sintering aid particles.

Benefits of technology

The strength consistency and discreteness of different regions of the silicon nitride ceramic substrate are achieved, with a flexural strength of 600MPa~950MPa, and the Weble distribution shape factor m>20, which improves the strength uniformity and reliability of the substrate.

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Abstract

The invention relates to a preparation method of a silicon nitride ceramic substrate and the silicon nitride ceramic substrate. The preparation method of the silicon nitride ceramic substrate comprises the following steps: preparing slurry by using silicon-based powder, a sintering aid and a dispersion medium; wherein the sintering aid comprises magnesium oxide sol, and the sintering aid further comprises at least one of rare earth oxide sol; carrying out tape casting on the slurry to obtain a green sheet; and sintering the green blank sheet in a nitrogen atmosphere. According to the preparation method of the silicon nitride ceramic substrate, the slurry is prepared by using the sintering aid comprising the magnesium oxide sol and the rare earth oxide sol, the silicon-based powder and the dispersion medium, silicon nitride powder and sintering aid particles in the slurry are relatively uniformly dispersed and are not easy to agglomerate, and a relatively uniformly dispersed green sheet can be obtained through tape casting; therefore, the strength consistency of different areas of the prepared silicon nitride ceramic substrate is relatively good, and the discreteness is relatively small.
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