Method and system for dynamically creating temporary production process and computer readable storage medium
Dynamically create temporary production processes through stack technology, solving the complex problems of temporary process flow and main process flow management in semiconductor production, realizing flexible temporary production processes nesting and automatic recycling, simplifying business logic and product structure.
Patent Information
- Application Number
- CN202510397919.7
- Authority / Receiving Office
- CN · China
- Patent Type
- Applications(China)
- Current Assignee / Owner
- Filing Date
- 2025-03-28
- Publication Date
- 2025-07-22
AI Technical Summary
In the prior art, the management of temporary process flow and main process flow in semiconductor production is complex, and it is difficult to achieve a nested relationship between multiple experimental processes, and the business logic is complex and the product structure is bloated, making it difficult to achieve arbitrary combination of multiple temporary production processes.
The stack technology is used to dynamically create temporary production processes, integrate temporary experimental steps into fixed production processes through unified path management, and automatically recycle them after completion, without affecting the original fixed production process, and support unlimited nested temporary processes.
It realizes the flexibility of dynamically creating temporary production processes in semiconductor production, supports users to temporarily specify generation steps, automatically recycle temporary processes, does not affect fixed processes, supports infinite nested temporary processes, and simplifies business logic and product structure.
Smart Images
Figure CN120355211A_ABST
Abstract
Description
Technical Field
[0001] The present invention relates to semiconductor production, and in particular to a method, system and computer-readable storage medium for dynamically creating a temporary production process. Background Art
[0002] In semiconductor production, there are mainly two production methods. As Figure 1 shown, it is a fixed production process scenario: the Process Integration Engineer (PIE) sets the product production process (ProcessPlan) in the MES system for the product that has completed the experiment, including the definition of process steps (Step) and the definition of process paths (the order between each Step, Path). Among them, in each Step, the production resources required for production (data such as Recipe, Reticle, EQPs, EDCPlan, etc.) will be defined; the process path supports sequential execution relationships (Pass), rework relationships (Rework), multi-path relationships (multi-path), etc.
[0003] As Figure 2 shown is the temporary process flow scenario: under certain specific production requirements, users may temporarily adjust the production resources (Recipe, Reticle, EQPs...) of some products, may also add Steps, or adjust the Path order; the main scenarios include experimental temporary process flows; dynamic Rework requirements; early volume addition / sweeping process requirements during production; machine production anomalies, product dynamic recovery production processes, etc. However, in the prior art, because the temporary process flow is different from the main production process, the system needs to first stop the product in the main process (special treatment, no action can be taken), and then jump the product into the new temporary process flow. Since the temporary production process and the main process production process are controlled by different systems, all functions of the MES system need to consider these two production processes at the same time, the business logic is complex, and the product structure is bloated; because the temporary production process is customized and developed by the system according to different business scenarios, it is very difficult to implement the nested relationship of multiple experimental processes. For example, in the RunCard process, if it is necessary to add an additional "volume addition / sweeping process", it is necessary to customize the relevant business additionally, and the implementation difficulty will increase a lot; in actual semiconductor production, random combinations of multiple temporary production processes are required, and this kind of flexible method is basically impossible to achieve.
[0004] Therefore, there is a lack of a method for dynamically creating a production process in the prior art.
[0005] It should be noted that the information disclosed in the above background art section is only used for understanding the background of the present application, and therefore may include information that does not constitute the prior art known to those of ordinary skill in the art. Summary of the Invention
[0006] The present invention provides a method, a system and a computer-readable storage medium for dynamically creating a temporary production process, which can solve at least one problem in the background art.
[0007] To achieve the above object, the present invention adopts the following technical solutions:
[0008] A method for dynamically creating a temporary production process includes the following steps: S1: In response to a user instruction, create a temporary production process flow; S2: Integrate the temporary production process flow into a fixed production process node to complete the production process of the product; S3: After completing the production process, automatically recycle the temporary process flow to restore the fixed production process.
[0009] Preferably, creating the temporary production process flow includes the following steps: Check whether there is a temporary experiment step in the production process; if so, dynamically create a temporary production process flow with the temporary experiment step; if not, complete the production process.
[0010] Preferably, dynamically creating the temporary production process flow with the temporary experiment step includes: Entering the temporary production process flow from the fixed production process node through a unified path management method.
[0011] Preferably, dynamically creating the temporary production process flow with the temporary experiment step includes: Using stack technology, storing the current site and multiple production process association information in the stack, and adopting the first-in-first-out method.
[0012] Preferably, dynamically creating the temporary production process flow with the temporary experiment step includes: Pushing the fixed production process node into the stack and setting the node to an inactive state; Pushing the information of the temporary production process node into the stack and setting the node state to an active state, and associating the current site to the temporary production process through the information in the active state.
[0013] Preferably, after the temporary production process is completed, it returns to the fixed production process through a unified path management method.
[0014] Preferably, it further includes: Finding the site before entry by popping the stack and orderly returning the current station node to the fixed production process node.
[0015] Preferably, there is at least one temporary production process and they are randomly combined and embedded in the fixed production process node.
[0016] The present invention also provides a system for dynamically creating a temporary production process, which is used to implement any of the above methods.
[0017] The present invention further provides a non-transitory computer-readable storage medium, on which computer-readable instructions are stored. When the instructions are executed by a processor, the processor is caused to execute any one of the methods described above.
[0018] The present invention has beneficial effects:
[0019] In the preferred technical solution, it supports that when actually needed, the product can dynamically create a temporary production process flow according to the generation steps temporarily specified by the user, integrate it into the original fixed production process nodes, and after the experiment is completed, the system automatically recovers the temporary process flow without affecting the original fixed production process; it supports creating a new temporary process within the temporary process, and theoretically, the temporary processes can be nested without limit. BRIEF DESCRIPTION OF THE DRAWINGS
[0020] Figure 1 It is a schematic diagram of the fixed production process scenario of the embodiment of the present invention.
[0021] Figure 2 It is a schematic diagram of the temporary process flow of the embodiment of the present invention.
[0022] Figure 3 It is a schematic diagram of a process flow modeling of the embodiment of the present invention.
[0023] Figure 4 It is a schematic diagram of a product entering the temporary process of the embodiment of the present invention.
[0024] Figure 5 It is a schematic diagram of another process flow modeling of the embodiment of the present invention.
[0025] Figure 6 It is a schematic diagram of another product entering the temporary process of the embodiment of the present invention.
[0026] Figure 7 It is a schematic diagram of the method for dynamically creating a temporary production process of the embodiment of the present invention.
[0027] Figure 8 It is a schematic diagram of another method for dynamically creating a temporary production process of the embodiment of the present invention.
[0028] Figure 9 It is a schematic diagram of the implementation manner of the temporary process flow of the embodiment of the present invention.
[0029] FIG. 10(a) is a schematic diagram of the temporary process flow nested into the experimental process of the embodiment of the present invention.
[0030] FIG. 10(b) is a schematic diagram of adopting the stack technology of the embodiment of the present invention.
[0031] Figure 11Schematic diagram of the key Exit function of the embodiments of the present invention.
[0032] Figure 12 Schematic diagram of the nested ability of the temporary process flow of the embodiments of the present invention.
[0033] Figure 13 Schematic diagram of associating a Lot into a new temporary experimental process of the embodiments of the present invention.
[0034] Figure 14 Schematic diagram of another key Exit function of the embodiments of the present invention. Detailed implementation manners
[0035] The following makes a detailed description of the implementation manners of the present invention. It should be emphasized that the following description is merely exemplary and not intended to limit the scope of the present invention and its applications. Without conflict, the embodiments in the present application and the features in the embodiments may be combined with each other.
[0036] It should be noted that when an element is referred to as being "fixed to" or "disposed on" another element, it can be directly on the other element or indirectly on the other element. When an element is referred to as being "connected to" another element, it can be directly connected to the other element or indirectly connected to the other element. In addition, the connection can be for a fixing function or for a coupling or communicating function.
[0037] It should be understood that the orientation or positional relationships indicated by the terms "length", "width", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", etc. are based on the orientation or positional relationships shown in the drawings, and are only for the convenience of describing the embodiments of the present invention and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and thus cannot be construed as a limitation of the present invention.
[0038] In addition, the terms "first" and "second" are only used for descriptive purposes and cannot be construed as indicating or implying relative importance or implicitly indicating the quantity of the indicated technical features. Thus, the features defined with "first" and "second" may explicitly or implicitly include one or more of such features. In the description of the embodiments of the present invention, "a plurality" means two or more unless otherwise specifically defined.
[0039] Experimental temporary process flow: RunCard flow, adjusting the production conditions of some products to optimize the product yield;
[0040] Dynamic Rework Requirements: Under certain specific conditions (e.g., over QTime limit), the product needs to undergo a temporary Rework process to clean the manufacturing processes that affect the quality on the wafer surface;
[0041] Increasing Volume / Scanning Process Requirements: After certain unknown and potentially risky manufacturing processes, the user needs to pass the product through the YE machine in advance to scan whether there are any abnormalities in the product;
[0042] Abnormal Machine Production, Product Dynamic Recovery Production Process: Recovery RunCard. When the machine breaks down during actual production, the products in the machine need to undergo a recovery process;
[0043] For the industry semiconductor MES system to handle temporary process flows, there are mainly two alternative methods. First, the following describes the first alternative method, as Figure 3 and Figure 4 shown:
[0044] 1. Newly create multiple temporary process flows in advance. These temporary process flows correspond to different system functions (experimental temporary process flows; dynamic Rework requirements, etc.). Here, take the "experimental temporary process flow" as an example to introduce in detail the user configuration and the system implementation method.
[0045] 2. User Configuration:
[0046] (1) Newly create temporary process steps (Step) in advance, without specifying production parameters. The process path only supports a single path (Pass), and these temporary process flows are independent of the product process flows;
[0047] (2) The user formulates temporary production data according to the required usage scenarios: 1). Select different temporary process flows (e.g., experimental function - RunCard); 2). Specify the process steps of the experiment, the sequence of each process step, and the production parameters of each process step; 3). Specify the starting station of the experiment and the information of the station to which it returns after the experiment is completed.
[0048] 3. System Implementation:
[0049] (1) The system implements the temporary process flow according to the user's settings. 1). When the experimental product reaches the designated experimental station, the product will be jumped into the temporary process flow; 2). The system replaces the process steps and production parameters in the temporary process flow according to the user configuration data;
[0050] (2) When the product completes the experiment, the experimental product will be jumped into the designated station.
[0051] The disadvantages of the above method are:
[0052] 1. Create multiple temporary process flows. For each temporary service, a new temporary process flow needs to be created, and each service requires a customized special processing function.
[0053] 2. Creating each temporary process flow in advance makes it difficult to determine the process steps, and special system processing is required.
[0054] 3. When the product enters the temporary experimental process, if an abnormality occurs in the temporary process, the product requires special processing to return to the main production process.
[0055] 4. Since the temporary production processes are all customized and developed by the system according to different business scenarios, it is difficult to implement the nested relationship of multiple experimental processes. For example, in the RunCard process, if it is necessary to add a "quantity increase / scanning increase process", it is necessary to customize the relevant business additionally, and the implementation difficulty will increase a lot; in actual semiconductor production, random combinations of multiple temporary production processes are required, and this kind of workaround is basically impossible to achieve.
[0056] The following describes another workaround, as Figure 5 and Figure 6 shown:
[0057] Use the dynamic plug-in method. The system dynamically generates a plug-in temporary process flow according to the user's process steps and production parameters. The following takes the "experimental temporary process flow" as an example to introduce the user configuration and the system implementation method in detail.
[0058] 1. User configuration:
[0059] (1) The user formulates temporary production data according to the required usage scenarios: 1). Select different temporary process flows (for example, experimental function - RunCard); 2). Specify the process steps of the experiment, the order of each process step, and the production parameters of each process step; 3). Specify the starting station of the experiment and the information of the station to which it returns after the experiment is completed.
[0060] (2) These temporary production process data are independent of the main production process in the form of an external plug-in system.
[0061] 2. System implementation:
[0062] (1) The system implements the temporary process flow according to the user's settings. 1). When the experimental product reaches the specified experimental station, the product is stopped in the main process flow (special processing, no action can be taken); 2). The product will be jumped into the temporary process flow; 3). The product is produced in the temporary system.
[0063] (2) When the product completes the experiment, the experimental product will be jumped to the specified station, and the stop function in the main process flow will be released.
[0064] The disadvantages of the above method are as follows:
[0065] 1. The temporary process flow is different from the main production process. The system needs to first stop the product in the main process flow (special treatment, no action can be taken), and then jump the product into the new temporary process flow;
[0066] 2. Since the temporary production process flow and the main process production process are controlled by different systems, all functions of the MES system need to consider these two production processes at the same time, with complex business logic and bloated product structure;
[0067] 3. Because the temporary production process flow is customized and developed by the system according to different business scenarios, it is very difficult to implement the nested relationship of multiple experimental process flows. For example, in the RunCard process, if it is necessary to add a "quantity increase / scanning increase process", it is necessary to customize the relevant business additionally, and the implementation difficulty will increase a lot; in actual semiconductor production, random combinations of multiple temporary production process flows are required, and this kind of flexible method is basically impossible to achieve.
[0068] As Figure 7 and Figure 8 shown, the present invention provides a method for dynamically creating a temporary production process flow, which is characterized by including the following steps:
[0069] S1: Respond to a user instruction to create a temporary production process flow;
[0070] S2: Integrate the temporary production process flow in a fixed production process node to complete the production process of the product;
[0071] S3: After completing the production process, automatically recycle the temporary process flow to restore the fixed production process.
[0072] The method for dynamically creating a temporary production process flow of the present invention supports the system to dynamically create a temporary production process flow according to the generation steps temporarily specified by the user when the product is actually needed, integrate it in the original fixed production process node, and after the experiment is completed, the system automatically recycles the temporary process flow without affecting the original fixed production process; it supports creating a new temporary process flow nested in the temporary process flow, and theoretically, the temporary process flow can be nested without limit.
[0073] In a specific embodiment, generate a temporary production process flow, provide an interface for displaying the fixed process flow, then allow the user to select the process stations temporarily needed, adjust the process flow sequence, and finally the system generates a temporary process flow (this process flow does not depend on a certain fixed business scenario).
[0074] In an embodiment of the present invention, creating the temporary production process flow includes the following steps:
[0075] Check whether there are any temporary experimental steps in the production process;
[0076] If there are, dynamically create a temporary production process flow from the temporary experimental steps; if not, complete the production process.
[0077] In an embodiment of the present invention, dynamically creating a temporary production process flow from the temporary experimental steps includes:
[0078] Enter the temporary production process flow from the fixed production process node through a unified path management method.
[0079] In a specific embodiment, dynamically creating a temporary production process flow from the temporary experimental steps includes:
[0080] Using stack technology, store the current site and multiple production process association information in the stack, and adopt the first-in-first-out method.
[0081] In a specific embodiment, dynamically creating a temporary production process flow from the temporary experimental steps includes:
[0082] Push the fixed production process node into the stack and set the node to an inactive state;
[0083] Push the information of the temporary production process flow node into the stack, set the node state to an active state, and associate the current site to the temporary production process through the information of the active state.
[0084] In an embodiment of the present invention, after the temporary production process is completed, it returns to the fixed production process through a unified path management method. Specifically, the site before entry can be found by popping the stack, and the current station node can be orderly returned to the fixed production process node.
[0085] As Figures 9 - 14 shown, the following provides a specific embodiment for further illustrating the method of the present invention.
[0086] Background description: In the production process of a product, a temporary experimental process is dynamically generated as follows:
[0087] First-level service: Lot1: Start the experiment at Step n+1, return to Step m after the experiment is completed, and the experimental content:
[0088] Experimental 1 process: #01~#05: step1->step2
[0089] Experimental 2 process: #06~#10: step10->step11->step 12
[0090] The implementation method of the above process flow is as follows:
[0091] For the method of dynamically generating an experimental process, two functions, Adhoc Enter&Adhoc Exit, are provided inside the platform, which are only exemplary here;
[0092] First, the key Enter function is introduced as follows:
[0093] (1) Create a temporary experimental process
[0094] The system checks whether this Lot has temporary experimental steps. If so, a section of experimental process is dynamically and temporarily created through the platform PRP module with the experimental steps prepared by the user; if not, the Lot enters the Adhoc Exit function;
[0095] (2) Associate the Lot into the temporary experimental process
[0096] The system uses stack technology to store the association information between the current site of the product and multiple production processes into the stack in the order of first in first out (main process & multiple experimental processes). The specific steps are as follows:
[0097] First, the original production process node is pushed into the stack, and the node is in an inactive state;
[0098] Then, the node information of the temporary experimental process is pushed into the stack, and the node state is in an active state, so that the Lot is associated with the temporary production process through the information in the active state.
[0099] As Figures 10(a) - 10(b) shown, when the Lot enters the nested experimental process from Step 300, first, the Lot main site information Step300 is pushed into the stack, and the node state is updated to backup (unavailable state); second, the first site Step10 in the temporary production process is pushed into the stack, and the node state is updated to active (in use state); finally, the current site of the Lot is associated with the temporary production process according to the stack information, so as to dynamically enter the temporary production process.
[0100] As Figure 11 shown, for the key Exit function: when the Lot completes the nested experimental process, the Lot returns to the Exit site in the nested experimental process; the system checks the stack information of the Lot Adhoc, and finds the site (Step 11) before entry through the way of popping the stack (last in first out), and returns the Lot current station node to Step 11 in an orderly manner.
[0101] Next, another embodiment is introduced to illustrate that the temporary process flow in the present invention has the ability of nesting.
[0102] As Figure 12 shown, background description: A temporary process is nested within a temporary process business, specifically as follows:
[0103] First-layer business: Lot1: Start the experiment at Step n+1, and return to Step m after the experiment is completed. The experiment content is:
[0104] Experiment 1: #01 to #05: step1 -> step2
[0105] Experiment 2: #06 to #10: step10 -> step11 -> step 12
[0106] Second-layer business: A temporary experiment is added for Experiment 2, starting from step 11, and returning to Step12 after the experiment is completed
[0107] Experiment 2.1: #06, #07: step20 -> step21
[0108] The specific implementation method is the same as the previous embodiment, Enter key function
[0109] (1) Create a new temporary experiment process
[0110] The system checks whether there are any temporary experiment steps for this Lot. If there are, the experiment steps prepared by the user are temporarily and dynamically created into an experiment process through the platform PRP module; if not, the Lot enters the Adhoc Exit function;
[0111] (2) Associate the Lot into the new temporary experiment process
[0112] As Figure 13 shown, the system uses stack technology to store the current site of the product and the associated information of multiple production processes in the stack, and in the first-in-first-out manner (main process & multiple experiment processes), specifically including the following steps:
[0113] First, push the original production process node into the stack, and this node is in an inactive state;
[0114] Then, push the temporary experiment process node information into the stack, and the node state is active, so that the Lot is associated with the temporary production process through the active state information;
[0115] As Figure 14 shown, the system theoretically supports infinite nesting ability. Push the upper-layer node information into the stack to achieve the nesting ability. Exit key function:
[0116] When the Lot completes the nested experiment process, the Lot returns to the Exit site in the nested experiment process;
[0117] The system views the stack information of Lot Adhoc, and through the way of popping the stack (last in, first out), finds the station before entry (Step 11), and returns the Lot in-station nodes to Step 11 in order.
[0118] The present invention also provides a system for implementing any of the above-mentioned methods.
[0119] It should be understood that the above embodiments are merely illustrative, and the methods disclosed in the present invention can also be implemented in other ways. For example, the division of the units / modules described in the above embodiments is only a logical function division, and there can be other division methods in actual implementation. For example, multiple units, modules or components can be combined, or can be integrated into another system, or some features can be ignored or not executed.
[0120] In addition, without special instructions, in each embodiment of the present invention, the functional units / modules can be integrated in one unit / module, or each unit / module can exist physically alone, or two or more units / modules can be integrated together. The above integrated unit / module can be implemented in the form of hardware or in the form of a software program module.
[0121] When the above integrated unit / module is implemented in the form of hardware, the hardware can be a digital circuit, an analog circuit, etc. The physical implementation of the hardware structure includes but is not limited to transistors, memristors, etc. Without special instructions, the processor or chip can be any suitable hardware processor, such as CPU, GPU, FPGA, DSP, and ASIC, etc. Without special instructions, the on-chip cache, off-chip memory, and memory can be any suitable magnetic storage medium or magneto-optical storage medium, such as resistive random access memory RRAM (Resistive Random Access Memory), dynamic random access memory DRAM (Dynamic Random Access Memory), static random access memory SRAM (Static Random-Access Memory), enhanced dynamic random access memory EDRAM (Enhanced Dynamic Random Access Memory), high-bandwidth memory HBM (High-Bandwidth Memory), hybrid memory cube HMC (Hybrid Memory Cube), etc.
[0122] If the integrated unit / module is implemented in the form of a software program module and sold or used as an independent product, it can be stored in a computer-readable memory. Based on this understanding, the technical solution of the present invention, in essence, or the part that contributes to the prior art, or all or part of this technical solution, can be embodied in the form of a software product. This computer software product is stored in a memory and includes several instructions for causing a computer device (which can be a personal computer, a server, or a network device, etc.) to execute all or part of the steps of the methods described in various embodiments of this disclosure. The aforementioned memory includes: various media such as USB flash drives, read-only memories (ROMs), random access memories (RAMs), external hard drives, magnetic disks, or optical discs that can store program codes.
[0123] Embodiments of the present invention also provide a non-transitory computer storage medium storing a computer program, which, when executed by multiple processors, causes the processors to execute the methods and refinement solutions as shown above.
[0124] The above content is a further detailed description of the present invention in combination with specific / preferred embodiments. It cannot be determined that the specific implementation of the present invention is limited only to these descriptions. For those of ordinary skill in the technical field to which the present invention pertains, without departing from the inventive concept, they can make several substitutions or modifications to these described embodiments, and these substitution or modification methods should all be regarded as belonging to the protection scope of the present invention. In the description of this specification, the description with reference to terms such as "one embodiment", "some embodiments", "preferred embodiments", "examples", "specific examples", or "some examples" means that the specific features, structures, materials, or characteristics described in connection with the embodiment or example are included in at least one embodiment or example of the present invention. In this specification, the schematic representations of the above terms do not necessarily refer to the same embodiment or example. Moreover, the specific features, structures, materials, or characteristics described can be combined in a suitable manner in any one or more embodiments or examples. Without contradiction, those skilled in the art can combine and combine the different embodiments or examples described in this specification and the features of different embodiments or examples. Although the embodiments of the present invention and their advantages have been described in detail, it should be understood that various changes, substitutions, and alterations can be made herein without departing from the scope of protection of the patent application.
Claims
1. A method for dynamically creating a temporary production process, characterized in that It includes the following steps: S1: In response to a user instruction, create a temporary production process flow; S2: Integrate the temporary production process flow into a fixed production process node to complete the production process of the product; S3: After completing the production process, automatically recycle the temporary process flow to restore the fixed production process.
2. The method for dynamically creating a temporary production process according to claim 1, characterized in that Creating the temporary production process flow includes the following steps: Check whether there are temporary experimental steps in the production process; If so, dynamically create the temporary experimental steps to create a temporary production process flow; if not, complete the production process.
3. The method for dynamically creating a temporary production process according to claim 2, characterized in that, Dynamically creating the temporary experimental steps to create a temporary production process flow includes: Enter the temporary production process flow from the fixed production process node through a unified path management method.
4. The method for dynamically creating a temporary production process according to claim 3, wherein Dynamically creating the temporary experimental steps to create a temporary production process flow includes: Using stack technology, store the current site and multiple production process association information in the stack, and adopt the first-in, first-out method.
5. The method for dynamically creating a temporary production process according to claim 3, wherein, Dynamically creating the temporary experimental steps to create a temporary production process flow includes: Push the fixed production process node into the stack and set the node to an inactive state; Push the information of the temporary production process flow node into the stack, and set the node status to an active state. Associate the current site to the temporary production process through the information of the active state.
6. The method for dynamically creating a temporary production process according to claim 5, wherein After the temporary production process is completed, return to the fixed production process through a unified path management method.
7. The method for dynamically creating a temporary production process according to claim 6, wherein It also includes: Find the site before entry by popping the stack and orderly return the current station node to the fixed production process node.
8. The method for dynamically creating a temporary production process according to any one of claims 1-7, characterized in that, The temporary production process is at least one and is randomly combined and embedded in the fixed production process node.
9. A system for dynamically creating a temporary production process, characterized in that, It is used to implement the method according to any one of claims 1-8.
10. A non-transitory computer-readable storage medium, characterized in that, It stores computer-readable instructions. When the instructions are executed by a processor, the processor executes the method according to any one of claims 1-8.