Device for recycling grinding agent in grinding fluid

Abstract

The invention discloses a device for recycling a grinding agent in grinding fluid, and belongs to the technical field of semiconductor manufacturing, the device comprises a tank body, the tank body is internally provided with a filtering chamber, a communicating chamber and a sewage chamber from top to bottom in sequence, the communicating chamber is communicated with the filtering chamber and the sewage chamber, and the filtering chamber is communicated with the sewage chamber; a recycling and recycling cavity is formed in the position, located on the outer side of the communicating cavity, in the tank body, and four filtering mechanisms are assembled in the filtering cavity in the circumferential direction at equal intervals. The movable driving mechanism drives the four fixed plates to move in the direction of the discharging port, the four movable plates, the four magnetic plates and the four surrounding plates are driven to move in the direction of the discharging port, the four movable plates and the four magnetic plates can be turned downwards under the driving action of the four electric cylinders when moving out of the discharging port, and the discharging port is opened. Compared with the prior art, the non-magnetic solid grinding agent and the magnetic solid grinding agent are automatically collected into the collecting box, and the magnetic solid grinding agent is more convenient and faster to collect.

Description

Technical Field

[0001] The present invention belongs to the technical field of semiconductor manufacturing, and particularly relates to a device for recycling abrasive in abrasive liquid. Background Art

[0002] A semiconductor refers to a class of materials whose electrical conductivity at room temperature is between that of conductors including metals such as gold, silver, and copper and insulators including glass and rubber.

[0003] In the process of semiconductor manufacturing, specifically in the process of wafer grinding and polishing, abrasive liquid is required for grinding. The abrasive liquid mainly consists of solid abrasive, dispersant, oxidant, pH regulator, etc. Among them, the solid abrasive plays a key role in grinding. It can remove the material on the surface of the wafer through physical action to achieve the purpose of planarization.

[0004] Current solid abrasives generally include oxide solid abrasives, carbide solid abrasives, nitride solid abrasives, and magnetic solid abrasives. Among them, magnetic solid abrasives are widely used in the grinding of high-hardness and high-brittle semiconductor materials due to their ability to generate controllable grinding force under the action of a magnetic field and achieve high-precision and low-damage grinding. Moreover, magnetic solid abrasives still have the function of being reused after grinding. Therefore, the recycling of magnetic solid abrasives in semiconductor abrasive liquid is particularly important.

[0005] Chinese Patent Application No. 201821963934.5 discloses a device for recycling abrasive liquid, including a waste liquid storage tank, a circulating liquid supply pump, and a magnetic adsorption mechanism. The inlet of the circulating liquid supply pump is connected to the outlet of the waste liquid storage tank, and the outlet is respectively connected to the inlet of the waste liquid storage tank and the magnetic adsorption mechanism. The outlet of the magnetic adsorption mechanism is connected to the inlet of the waste liquid storage tank. The waste liquid storage tank is provided with a waste liquid discharge pipeline. The abrasive liquid enters the magnetic adsorption mechanism through the circulating liquid supply pump for adsorption, and after adsorption, it is discharged into the waste liquid storage tank, and this process is repeated until it is discharged through the waste liquid discharge pipeline after processing. Among them, the magnetic adsorption mechanism includes a filter element barrel, an electromagnetic induction coil is arranged outside the filter element barrel, and a filter element is arranged inside. A soft iron core is arranged inside the filter element, and after being filtered by the filter element, it is adsorbed by the soft iron core.

[0006] For the recovery of magnetic grinding particles in the above device, the soft iron core is taken out, and then the magnetic grinding particles on the soft iron core are peeled off, and the collection is relatively complicated and cumbersome.

[0007] In view of this, a device for recycling abrasive in abrasive liquid is designed to solve the above problems. Summary of the Invention

[0008] To solve the problems raised in the above background art, the present invention provides a device for recycling abrasive in abrasive liquid, which has the characteristics of more convenient and faster collection of magnetic solid abrasives.

[0009] To achieve the above object, the present invention provides the following technical solution: A device for recycling abrasive in abrasive liquid, comprising: a tank body, in which a filtering chamber, a communicating chamber and a sewage chamber are sequentially arranged from top to bottom, the communicating chamber connects the filtering chamber and the sewage chamber, and a recycling chamber is arranged outside the communicating chamber inside the tank body. Four filtering mechanisms are equidistantly assembled along the circumferential direction inside the filtering chamber. Sealing plates are respectively arranged above the four filtering mechanisms at the outlet positions inside the recycling chamber. A first rotation driving mechanism is assembled between the four sealing plates and the tank body. Magnetic separation mechanisms are respectively assembled below the four sealing plates at the lower part inside the recycling chamber. A moving driving mechanism is assembled between the four magnetic separation mechanisms and the tank body. The side wall of the tank body is provided with a discharge port corresponding to the movement direction of the four magnetic separation mechanisms, and a sewage discharge port is arranged at the bottom end of the sewage chamber on the side wall of the tank body. A programmable controller is fixedly connected to the outer side wall of the tank body; The magnetic separation mechanism includes a support plate fixedly connected inside the recycling chamber, the top end of the support plate is parallel to the bottom end of the discharge port. Fixing plates and movable plates are respectively arranged on the top end of the support plate from far to near the discharge port side. The four fixing plates and movable plates are spliced into a ring shape. The moving driving mechanism is assembled between the four fixing plates, the support plate and the tank body. Connecting rotating shafts are rotatably connected to the side walls of the fixing plate and the movable plate close to each other. A magnetic plate is fixedly connected to the top end of the movable plate. A surrounding plate is arranged at the top ends of the fixing plate and the magnetic plate. The bottom end of the surrounding plate is fixedly connected to the top end of the fixing plate and only abuts against the top end of the magnetic plate. The movable plate, the magnetic plate and the surrounding plate partially extend into the discharge port. An installation groove is arranged inside the surrounding plate extending into the discharge port. An electric cylinder is hinged inside the installation groove, and the driving end of the electric cylinder is hinged to the movable plate; The first rotation driving mechanism, the magnetic plate, the electric cylinder and the moving driving mechanism are electrically connected to the programmable controller.

[0010] Further, the filtering mechanism includes an upper fixing seat, a sealing cylinder, a filtering cylinder and a lower hollow fixing seat which are sequentially arranged from top to bottom. The upper fixing seat is fixedly connected to the top end of the tank body. A grinding waste liquid inlet pipe is fixedly connected to the top end of the upper fixing seat. The sealing cylinder and the filtering cylinder are arranged inside the filtering chamber. The top end of the sealing cylinder is connected to the bottom end of the upper fixing seat through a bearing. The top end of the filtering cylinder is fixedly connected to the bottom end of the sealing cylinder. The lower hollow fixing seat is fixedly connected inside the tank body between the filtering chamber and the recycling chamber. The bottom end of the filtering cylinder is connected to the top end of the lower hollow fixing seat through a bearing. The bottom end of the lower hollow fixing seat abuts against the sealing plate.

[0011] Further, the first rotation driving mechanism includes a first motor fixedly connected to the top end of the tank body, a first driving chamber opened inside the tank body at the top end outside the communication chamber and inside the reuse and recycling chamber, and four rotation openings opened inside the tank body on one side of the four sealing plates. A first external gear ring is connected to the outside of the communication chamber inside the first driving chamber through a bearing. Four first driving shafts are respectively arranged on one side of the four sealing plates inside the first driving chamber. The top end of one first driving shaft penetrates through the tank body and extends into the filtering chamber and is connected to the output end of the first motor through a coupling. The penetrating section and the bottom end are connected to the tank body through bearings. The two ends of the other three first driving shafts are connected to the tank body through bearings. A first gear is fixedly sleeved outside the first driving shaft. The first gear is meshed and connected with the first external gear ring. One side of the sealing plate extends through the rotation opening into the first driving chamber and is fixedly sleeved outside the first driving shaft. The first motor is electrically connected to the programmable controller.

[0012] Further, the moving driving mechanism includes a second motor fixedly connected to the outer wall of the tank body, a conical gear ring movably sleeved outside the bottom end of the communication chamber through a bearing and inside the reuse and recycling chamber, four screw rods movably connected inside the reuse and recycling chamber between the support plate and the conical gear ring through bearings, and four movable through grooves opened inside the support plate below the four fixing plates. The output end of the second motor extends into the reuse and recycling chamber and is connected to a second driving shaft through a coupling. A driving bevel gear is fixedly sleeved at the other end of the second driving shaft. The driving bevel gear is meshed and connected with the conical gear ring. The screw threads of the screw rods are arranged to move in the same direction simultaneously. A follower bevel gear is fixedly sleeved outside the screw rod near the communication chamber side. The follower bevel gear is meshed and connected with the conical gear ring. A movable seat is connected to the outside of the screw rod far from the follower bevel gear side through a transmission nut. The top end of the movable seat penetrates through the movable through groove and is fixedly connected to the bottom end of the fixing plate. The second motor is electrically connected to the programmable controller.

[0013] Further, a second rotation driving mechanism is assembled between the four sealing cylinders and the tank body; The second rotation driving mechanism includes a third motor fixedly connected to the top end of the tank body and a second driving chamber opened at the top end inside the filtering chamber. The output end of the third motor extends into the second driving chamber and is connected to a third driving shaft through a coupling. A circular gear is fixedly sleeved at the other end of the third driving shaft. A second external gear ring is fixedly sleeved outside the sealing cylinder inside the second driving chamber. The circular gear is meshed and connected with one second external gear ring. An internal gear ring is connected to the inner wall of the second driving chamber through a bearing. The second external gear ring is meshed and connected with the internal gear ring. An installation opening is opened at the bottom end of the second driving chamber at the position of the sealing cylinder and is connected to the sealing cylinder through a bearing. The third motor is electrically connected to the programmable controller.

[0014] Further, a leveling mechanism is respectively assembled inside the reuse and recycling chamber within the four enclosing plates; The leveling mechanism includes a mounting rod fixed inside the tank body above the discharge port. A main scraper is fixedly sleeved on the side end of the mounting rod away from the discharge port. The main scraper is located inside the enclosing plate. Two telescopic grooves are symmetrically formed inside the main scraper. A secondary scraper is arranged inside the telescopic groove. A telescopic spring is elastically connected between the telescopic groove and the side wall of the secondary scraper close to each other. The other end wall of the secondary scraper abuts against the inner wall of the enclosing plate.

[0015] Compared with the prior art, the beneficial effects of the present invention are as follows: 1. In the present invention, the four fixing plates are driven by the moving drive mechanism to move towards the discharge port, driving the four movable plates, the four magnetic plates and the four enclosing plates to move towards the discharge port. When the four movable plates and the four magnetic plates move outside the discharge port, they can be turned down under the driving action of the four electric cylinders, so that the non-magnetic solid abrasive and the magnetic solid abrasive are automatically collected into the collection box. Compared with the prior art, the collection of the magnetic solid abrasive is more convenient and fast.

[0016] 2. In the present invention, the four sealing cylinders are driven by the second rotation drive mechanism to rotate, driving the four filter cylinders to rotate, and filtering the semiconductor grinding fluid in a centrifugal manner, reducing the semiconductor grinding fluid left in the filter residue, and improving the adsorption and recovery effect of the magnetic plate on the magnetic abrasive in the filter residue.

[0017] 3. In the present invention, the leveling mechanism automatically levels the filter residue during the movement of the magnetic plate, further improving the adsorption and recovery effect of the magnetic plate on the magnetic abrasive in the filter residue. Description of the Drawings

[0018] Figure 1 is a perspective view of the present invention; Figure 2 is a vertical sectional view of the present invention; Figure 3 is of the present invention Figure 2 enlarged view at A in; Figure 4 is of the present invention Figure 2 enlarged view at B in; Figure 5 is a top view of the partial structure of the present invention; Figure 6 is of the present invention Figure 2 enlarged view at C in; Figure 7 is of the present invention Figure 2 enlarged view at D in; Figure 8 is a top view of the partial structure of the present invention; Figure 9 is of the present invention Figure 2 enlarged view at E in; Figure 10Top view of the partial structure of the present invention; Figure 11 Cross-sectional view of the partial structure of the present invention; In the figure: 1, tank body; 2, filtration chamber; 3, sealing plate; 4, reuse and recovery chamber; 5, communication chamber; 6, sewage chamber; 7, sewage discharge port; 8, discharge port; 9, programmable logic controller; 101, movable plate; 102, magnetic plate; 103, enclosing plate; 104, installation groove; 105, electric cylinder; 106, support plate; 107, connecting rotating shaft; 108, fixing plate; 201, upper fixing seat; 202, grinding waste liquid inlet pipe; 203, sealing cylinder; 204, filter cylinder; 205, lower hollow fixing seat; 301, first driving chamber; 302, first motor; 303, first driving shaft; 304, first external gear ring; 305, first gear; 306, rotating opening; 401, second motor; 402, movable through groove; 403, follower bevel gear; 404, screw; 405, bevel gear ring; 406, movable seat; 407, driving bevel gear; 408, second driving shaft; 501, second driving chamber; 502, third motor; 503, third driving shaft; 504, circular gear; 505, internal gear ring; 506, second external gear ring; 601, installation rod; 602, main scraper; 603, auxiliary scraper; 604, telescopic groove; 605, telescopic spring. Detailed implementation manners

[0019] Next, the technical solutions in the embodiments of the present invention will be clearly and completely described in conjunction with the accompanying drawings in the embodiments of the present invention. Obviously, the described embodiments are only a part of the embodiments of the present invention, rather than all the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those of ordinary skill in the art without creative efforts shall fall within the protection scope of the present invention.

[0020] Embodiment 1 The present invention provides the following technical solution: A device for recycling abrasive in abrasive liquid, comprising: a tank body 1, in which a filtering chamber 2, a communicating chamber 5 and a sewage chamber 6 are successively arranged from top to bottom. The communicating chamber 5 connects the filtering chamber 2 and the sewage chamber 6. A recycling chamber 4 is arranged outside the communicating chamber 5 inside the tank body 1. Four filtering mechanisms are equidistantly assembled along the circumference inside the filtering chamber 2. Sealing plates 3 are respectively arranged at the positions of the outlets of the four filtering mechanisms above in the recycling chamber 4. A first rotation driving mechanism is assembled between the four sealing plates 3 and the tank body 1. Magnetic separation mechanisms are respectively assembled below the four sealing plates 3 in the lower part of the recycling chamber 4. A moving driving mechanism is assembled between the four magnetic separation mechanisms and the tank body 1. The side wall of the tank body 1 is provided with a discharge port 8 corresponding to the moving direction of the four magnetic separation mechanisms. The side wall of the tank body 1 is provided with a sewage discharge port 7 at the bottom end of the sewage chamber 6. A programmable controller 9 is fixedly connected to the outer side wall of the tank body 1; The magnetic separation mechanism includes a support plate 106 fixedly connected inside the recycling chamber 4. The top end of the support plate 106 is parallel to the bottom end of the discharge port 8. A fixed plate 108 and a movable plate 101 are respectively arranged on the top end of the support plate 106 from the side far away from the discharge port 8 to the side close to the discharge port 8. The four fixed plates 108 and the movable plate 101 are spliced into a ring shape. The moving driving mechanism is assembled between the four fixed plates 108, the support plate 106 and the tank body 1. A connecting rotating shaft 107 is rotatably connected to the side walls of the fixed plate 108 and the movable plate 101 close to each other. A magnetic plate 102 is fixedly connected to the top end of the movable plate 101. A surrounding plate 103 is arranged at the top ends of the fixed plate 108 and the magnetic plate 102. The bottom end of the surrounding plate 103 is fixedly connected to the top end of the fixed plate 108 and only abuts against the top end of the magnetic plate 102. The movable plate 101, the magnetic plate 102 and the surrounding plate 103 partially extend into the discharge port 8. An installation groove 104 is opened inside the surrounding plate 103 extending into the discharge port 8. An electric cylinder 105 is hinged inside the installation groove 104. The driving end of the electric cylinder 105 is hinged to the movable plate 101; The first rotation driving mechanism, the magnetic plate 102, the electric cylinder 105 and the moving driving mechanism are electrically connected to the programmable controller 9.

[0021] In this embodiment, refer to the attached Figure 2 、 6When the device reuses and recovers the magnetic solid abrasive in the semiconductor grinding waste liquid, the semiconductor grinding waste liquid is filtered through four filtering mechanisms. The filtered semiconductor grinding waste liquid is discharged through the filter chamber 2, the communication chamber 5, the sewage chamber 6 and the sewage discharge port 7. The programmable controller 9 is used to control the first rotation drive mechanism to start. The first rotation drive mechanism drives the four sealing plates 3 to rotate and open. The filtered filter falls into the four magnetic separation mechanisms in the reuse and recovery chamber 4. The programmable controller 9 is used to control the four magnetic separation mechanisms to be powered on. The four magnetic separation mechanisms adsorb the magnetic solid abrasive in the filter. The programmable controller 9 is used to control the mobile drive mechanism to start. The mobile drive mechanism drives the four magnetic separation mechanisms to move towards the direction close to the discharge port 8 until it stops at the set drive time. At this time, part of the four magnetic separation mechanisms is located outside the tank body 1. The programmable controller 9 is used to control the four magnetic separation mechanisms to start. The four magnetic separation mechanisms respectively drop the non-magnetic solid abrasive and the magnetic solid abrasive in the filter into different collection boxes, realizing separation, recovery and reuse; The principle of the above magnetic separation mechanism adsorbing the magnetic solid abrasive in the filter is as follows: The programmable controller 9 controls the magnetic plate 102 to be powered on, and the magnetic plate 102 adsorbs the magnetic solid abrasive in the filter; The moving principle of the above magnetic separation mechanism is as follows: The mobile drive mechanism drives the four fixing plates 108 to move towards the direction close to the discharge port 8. The four fixing plates 108 drive the four movable plates 101 to move in the same direction. The four movable plates 101 drive the four magnetic plates 102 to move in the same direction. The four fixing plates 108 and the four magnetic plates 102 drive the four enclosing plates 103 to move in the same direction until the set drive time is reached. At this time, the four movable plates 101 extend out of the discharge port 8; The principle of material dropping and collection of the above magnetic separation mechanism is as follows: The four movable plates 101 extend out of the discharge port 8. The programmable controller 9 controls the four electric cylinders 105 to start. The four electric cylinders 105 drive the output ends to extend. The four electric cylinders 105 have two driving times. The first stage drives the four movable plates 101 to rotate and turn down along the four connecting rotating shafts 107 to the position of the outer collection box. The four movable plates 101 drive the four magnetic plates 102 to turn down to the position of the outer collection box. The unadsorbed non-magnetic solid abrasive in the filter drops into the outer collection box. The second stage drives the four movable plates 101 to rotate and turn down along the four connecting rotating shafts 107 to the position of the inner collection box. The four movable plates 101 drive the four magnetic plates 102 to turn down to the position of the inner collection box. The programmable controller 9 controls the four magnetic plates 102 to be powered off, and the adsorbed magnetic solid abrasive in the filter drops into the inner collection box.

[0022] Specifically, the filtering mechanism includes an upper fixed seat 201, a sealing cylinder 203, a filtering cylinder 204, and a lower hollow fixed seat 205 that are arranged in sequence from top to bottom. The upper fixed seat 201 is fixedly connected to the top end of the tank body 1. A grinding waste liquid inlet pipe 202 is fixedly connected to the top end of the upper fixed seat 201. The sealing cylinder 203 and the filtering cylinder 204 are arranged in the filtering chamber 2. The top end of the sealing cylinder 203 is connected to the bottom end of the upper fixed seat 201 through a bearing. The top end of the filtering cylinder 204 is fixedly connected to the bottom end of the sealing cylinder 203. The lower hollow fixed seat 205 is fixedly connected inside the tank body 1 between the filtering chamber 2 and the reuse and recovery chamber 4. The bottom end of the filtering cylinder 204 is connected to the top end of the lower hollow fixed seat 205 through a bearing. The bottom end of the lower hollow fixed seat 205 abuts against the sealing plate 3.

[0023] In this embodiment, referring to the attached Figure 2-4 , the filtering principle of the filtering mechanism is as follows: The semiconductor grinding waste liquid is introduced through four grinding waste liquid inlet pipes 202 and filtered in the four filtering cylinders 204. The filtered semiconductor grinding waste liquid is discharged to the filtering chamber 2 through the filter holes of the filtering cylinder 204, and then discharged through the communication chamber 5, the sewage chamber 6, and the sewage discharge port 7. When the four sealing plates 3 are rotated and opened, the filtered filter residues are discharged to the reuse and recovery chamber 4 through the hollow cavities of the four lower hollow fixed seats 205.

[0024] Specifically, the first rotation driving mechanism includes a first motor 302 fixedly connected to the top end of the tank body 1, a first driving chamber 301 opened inside the tank body 1 at the outer top end of the communication chamber 5 and inside the reuse and recovery chamber 4, and four rotation openings 306 opened inside the tank body 1 on one side of the four sealing plates 3. A first external gear ring 304 is connected to the inside of the first driving chamber 301 outside the communication chamber 5 through a bearing. First driving shafts 303 are respectively arranged on one side of the four sealing plates 3 inside the first driving chamber 301. The top end of one first driving shaft 303 penetrates through the tank body 1 and extends into the filtering chamber 2 and is connected to the output end of the first motor 302 through a coupling. The penetrating section and the bottom end are connected to the tank body 1 through bearings. The two ends of the other three first driving shafts 303 are connected to the tank body 1 through bearings. A first gear 305 is fixedly sleeved outside the first driving shaft 303. The first gear 305 is meshed and connected to the first external gear ring 304. One side of the sealing plate 3 penetrates through the rotation opening 306 and extends into the first driving chamber 301 and is fixedly sleeved outside the first driving shaft 303. The first motor 302 is electrically connected to the programmable controller 9.

[0025] In this embodiment, referring to the attached Figure 2-5, The principle of the first rotation drive mechanism is as follows: The programmable logic controller 9 controls the first motor 302 to start. The first motor 302 drives the rotation of its output end. The output end of the first motor 302 drives the connected first drive shaft 303 to rotate. The connected first drive shaft 303 drives the connected first gear 305 to rotate. The connected first gear 305 drives the meshing-connected first outer tooth ring 304 to rotate. The first outer tooth ring 304 drives the other three first gears 305 to rotate. The other three first gears 305 drive the connected first drive shafts 303 to rotate. The four first drive shafts 303 drive the four sealing plates 3 to rotate, and the four sealing plates 3 open during the rotation process.

[0026] Specifically, the moving drive mechanism includes a second motor 401 fixedly connected to the outer wall of the tank body 1, a conical tooth ring 405 movably sleeved outside the bottom end of the communication chamber 5 through a bearing and located inside the reuse and recovery chamber 4, four screw rods 404 movably connected inside the reuse and recovery chamber 4 through bearings and located between the support plate 106 and the conical tooth ring 405, and four movable through slots 402 opened inside the support plate 106 and located below the four fixing plates 108. The output end of the second motor 401 extends into the reuse and recovery chamber 4 and is connected to a second drive shaft 408 through a coupling. The other end of the second drive shaft 408 is fixedly sleeved with a driving conical gear 407. The driving conical gear 407 is meshing-connected with the conical tooth ring 405. A follower conical gear 403 is fixedly sleeved on the screw rod 404 near the communication chamber 5 side. The follower conical gear 403 is meshing-connected with the conical tooth ring 405. The thread direction of the screw rod 404 satisfies simultaneous and same-direction movement. The movable seat 406 is transmission-connected to the screw rod 404 far from the follower conical gear 403 side through a transmission nut. The top end of the movable seat 406 passes through the movable through slot 402 and is fixedly connected to the bottom end of the fixing plate 108. The second motor 401 is electrically connected to the programmable logic controller 9.

[0027] In this embodiment, refer to the attached Figure 1 , 2 , 7 and 8. The principle of the moving drive mechanism is as follows: The programmable logic controller 9 controls the second motor 401 to start. The second motor 401 drives the rotation of its output end. The output end of the second motor 401 drives the second drive shaft 408 to rotate. The second drive shaft 408 drives the driving conical gear 407 to rotate. The driving conical gear 407 drives the meshing-connected conical tooth ring 405 to rotate. The conical tooth ring 405 drives the four follower conical gears 403 to rotate. The four follower conical gears 403 drive the four screw rods 404 to rotate. During the rotation of the four screw rods 404, the four movable seats 406 move in the four movable through slots 402 and on the four screw rods 404 in the direction close to the discharge port 8, and the four movable seats 406 drive the four fixing plates 108 to move in the same direction.

[0028] Embodiment 2 The difference between this embodiment and Embodiment 1 is as follows: Specifically, a second rotary drive mechanism is assembled between the four sealing cylinders 203 and the tank body 1; The second rotary drive mechanism includes a third motor 502 fixedly connected to the top end of the tank body 1 and a second drive chamber 501 opened at the inner top end of the filtration chamber 2. The output end of the third motor 502 extends into the second drive chamber 501 and is connected to a third drive shaft 503 through a coupling. The other end of the third drive shaft 503 is fixedly sleeved with a circular gear 504. A second outer tooth ring 506 is fixedly sleeved outside the sealing cylinder 203 inside the second drive chamber 501. The circular gear 504 is meshed and connected with one second outer tooth ring 506. The inner wall of the second drive chamber 501 is connected with an inner tooth ring 505 through a bearing. The second outer tooth ring 506 is meshed and connected with the inner tooth ring 505. An installation opening is formed at the bottom end of the second drive chamber 501 at the position of the sealing cylinder 203 and is connected with the sealing cylinder 203 through a bearing. The third motor 502 is electrically connected to the programmable controller 9.

[0029] In this embodiment, referring to Att Figure 2 、 9 and 10, the principle of the second rotary drive mechanism is as follows: The programmable controller 9 controls the third motor 502 to start. The third motor 502 drives the output end to rotate. The output end of the third motor 502 drives the third drive shaft 503 to rotate. The third drive shaft 503 drives the circular gear 504 to rotate. The circular gear 504 drives the engaged second outer tooth ring 506 to rotate. The engaged second outer tooth ring 506 drives the engaged inner tooth ring 505 to rotate. The inner tooth ring 505 drives the other three engaged second outer tooth rings 506 to rotate. The four second outer tooth rings 506 drive the four sealing cylinders 203 to rotate. The four sealing cylinders 203 drive the four filter cylinders 204 to rotate, so as to realize rotary filtration and reduce the semiconductor grinding waste liquid contained in the filtrate.

[0030] Embodiment Three The difference between this embodiment and Embodiment Two is as follows: Specifically, a scraping mechanism is further assembled inside the recovery chamber 4 and respectively located inside the four enclosing plates 103; The scraping mechanism includes a mounting rod 601 fixedly connected to the inside of the tank body 1 above the discharge port 8. The side end of the mounting rod 601 away from the discharge port 8 is fixedly sleeved with a main scraper 602. The main scraper 602 is located inside the enclosing plate 103. Two telescopic grooves 604 are symmetrically formed inside the main scraper 602. A sub-scraper 603 is arranged inside the telescopic groove 604. A telescopic spring 605 is elastically connected between the mutually approaching side walls of the telescopic groove 604 and the sub-scraper 603. The other end wall of the sub-scraper 603 abuts against the inner wall of the enclosing plate 103.

[0031] In this embodiment, referring to Att Figure 2 、 6With respect to 11, the principle of the scraping mechanism is as follows: during the movement of the magnetic plate 102, the filter material accumulated on the magnetic plate 102 continuously contacts the main scraper 602 and the auxiliary scraper 603, and the main scraper 602 and the auxiliary scraper 603 scrape the filter material flat to facilitate better adsorption of the magnetic solid abrasive in the filter material; As the magnetic plate 102 drives the surrounding plate 103 to move, the surrounding plate 103 squeezes the two auxiliary scrapers 603, and the two auxiliary scrapers 603 squeeze the two telescopic springs 605 to contract into the two telescopic grooves 604 to avoid affecting the movement.

[0032] The working principle of the present invention: Before the device reuses and recovers the magnetic solid abrasive in the semiconductor grinding waste liquid, the programmable controller 9 controls the third motor 502 to start. The third motor 502 drives the output end to rotate. The output end of the third motor 502 drives the third drive shaft 503 to rotate. The third drive shaft 503 drives the circular gear 504 to rotate. The circular gear 504 drives the engaged second outer tooth ring 506 to rotate. The engaged second outer tooth ring 506 drives the engaged inner tooth ring 505 to rotate. The inner tooth ring 505 drives the other three engaged second outer tooth rings 506 to rotate. The four second outer tooth rings 506 drive the four sealing cylinders 203 to rotate. The four sealing cylinders 203 drive the four filter cylinders 204 to rotate; When the device reuses and recovers the magnetic solid abrasive in the semiconductor grinding waste liquid, the filtered semiconductor grinding waste liquid is introduced through the four grinding waste liquid inlet pipes 202 and filtered in the four rotating filter cylinders 204. The filtered semiconductor grinding waste liquid is discharged through the filter holes of the filter cylinder 204 to the filter cavity 2, and then discharged through the communication cavity 5, the sewage cavity 6 and the sewage discharge port 7. The filtered filter material remains in the four filter cylinders 204; The programmable controller 9 controls the first motor 302 to start. The first motor 302 drives the output end to rotate. The output end of the first motor 302 drives the connected first drive shaft 303 to rotate. The connected first drive shaft 303 drives the connected first gear 305 to rotate. The connected first gear 305 drives the engaged first outer tooth ring 304 to rotate. The first outer tooth ring 304 drives the other three first gears 305 to rotate. The other three first gears 305 drive the connected first drive shaft 303 to rotate. The four first drive shafts 303 drive the four sealing plates 3 to rotate. During the rotation of the four sealing plates 3, they open, and the filter material is discharged from the hollow cavity of the four lower hollow fixed seats 205 to the reuse and recovery cavity 4 and falls onto the four magnetic plates 102; The programmable controller 9 controls the four magnetic plates 102 to be energized, and the four magnetic plates 102 adsorb the magnetic solid abrasive in the filter material; The programmable logic controller 9 controls the start of the second motor 401. The second motor 401 drives the rotation of the output end. The output end of the second motor 401 drives the rotation of the second drive shaft 408. The second drive shaft 408 drives the rotation of the driving bevel gear 407. The driving bevel gear 407 drives the rotation of the engaged bevel gear ring 405. The bevel gear ring 405 drives the rotation of the four follower bevel gears 403. The four follower bevel gears 403 drive the rotation of the four screws 404. During the rotation of the four screws 404, the four movable seats 406 move in the four movable through grooves 402 and on the four screws 404 in the direction close to the discharge port 8. The four movable seats 406 drive the four fixing plates 108 to move in the same direction. The four fixing plates 108 drive the four movable plates 101 to move in the same direction. The four movable plates 101 drive the four magnetic plates 102 to move in the same direction. The four fixing plates 108 and the four magnetic plates 102 drive the four enclosing plates 103 to move in the same direction until the set driving time ends and stops. At this time, the four movable plates 101 extend out of the discharge port 8; During the movement of the four magnetic plates 102, the filter substances accumulated on the magnetic plates 102 continuously contact the main scraper 602 and the auxiliary scraper 603. The main scraper 602 and the auxiliary scraper 603 scrape the filter substances flat to facilitate better adsorption of the magnetic solid abrasive in the filter substances; After the four movable plates 101 extend out of the discharge port 8, the programmable logic controller 9 controls the start of the four electric cylinders 105. The four electric cylinders 105 drive the extension of the output ends. The four electric cylinders 105 have two driving times. The first stage drives the four movable plates 101 to rotate and turn down along the four connecting rotating shafts 107 to the position of the outer collecting box. The four movable plates 101 drive the four magnetic plates 102 to turn down to the position of the outer collecting box. The non-magnetic solid abrasive in the filter substances that is not adsorbed drops into the outer collecting box. The second stage drives the four movable plates 101 to rotate and turn down along the four connecting rotating shafts 107 to the position of the inner collecting box. The four movable plates 101 drive the four magnetic plates 102 to turn down to the position of the inner collecting box. The programmable logic controller 9 controls the four magnetic plates 102 to cut off the power, and the magnetic solid abrasive adsorbed in the filter substances drops into the inner collecting box.

[0033] Although the embodiments of the present invention have been shown and described, for those of ordinary skill in the art, it can be understood that various changes, modifications, substitutions, and variations can be made to these embodiments without departing from the principles and spirit of the present invention. The scope of the present invention is defined by the appended claims and their equivalents.

Claims

1. A device for recycling abrasives in a grinding fluid, characterized in that, Comprising: A tank body, in which a filtering chamber, a communicating chamber and a sewage chamber are successively arranged from top to bottom inside the tank body. The communicating chamber connects the filtering chamber and the sewage chamber. A reuse and recovery chamber is arranged outside the communicating chamber inside the tank body. Four filtering mechanisms are equidistantly assembled along the circumferential direction inside the filtering chamber. Sealing plates are respectively arranged at the positions of the outlets of the four filtering mechanisms above in the reuse and recovery chamber. A first rotation driving mechanism is assembled between the four sealing plates and the tank body. Magnetic separation mechanisms are respectively assembled below the four sealing plates in the reuse and recovery chamber. A moving driving mechanism is assembled between the four magnetic separation mechanisms and the tank body. A discharge port is arranged on the side wall of the tank body corresponding to the moving direction of the four magnetic separation mechanisms. A sewage discharge port is arranged at the bottom end of the sewage chamber on the side wall of the tank body. A programmable controller is fixedly connected to the outer side wall of the tank body; The magnetic separation mechanism includes a support plate fixedly connected inside the reuse and recovery chamber. The top end of the support plate is parallel to the bottom end of the discharge port. A fixed plate and a movable plate are respectively arranged on the top end of the support plate from far to near the discharge port side. The four fixed plates and the movable plate are spliced into a ring shape. The moving driving mechanism is assembled between the four fixed plates, the support plate and the tank body. A connecting rotating shaft is rotatably connected to the side walls of the fixed plate and the movable plate close to each other. A magnetic plate is fixedly connected to the top end of the movable plate. A surrounding plate is arranged at the top ends of the fixed plate and the magnetic plate. The bottom end of the surrounding plate is fixedly connected to the top end of the fixed plate and only abuts against the top end of the magnetic plate. The movable plate, the magnetic plate and the surrounding plate partially extend into the discharge port. An installation groove is arranged inside the surrounding plate extending into the discharge port. An electric cylinder is hinged inside the installation groove. The driving end of the electric cylinder is hinged to the movable plate; The first rotation driving mechanism, the magnetic plate, the electric cylinder and the moving driving mechanism are electrically connected to the programmable controller.

2. The abrasive recycling and reuse device in the abrasive liquid according to claim 1, characterized in that: The filtering mechanism includes an upper fixed seat, a sealing cylinder, a filtering cylinder and a lower hollow fixed seat which are successively arranged from top to bottom. The upper fixed seat is fixedly connected to the top end of the tank body. A grinding waste liquid inlet pipe is fixedly connected to the top end of the upper fixed seat. The sealing cylinder and the filtering cylinder are arranged inside the filtering chamber. The top end of the sealing cylinder is connected to the bottom end of the upper fixed seat through a bearing. The top end of the filtering cylinder is fixedly connected to the bottom end of the sealing cylinder. The lower hollow fixed seat is fixedly connected inside the tank body between the filtering chamber and the reuse and recovery chamber. The bottom end of the filtering cylinder is connected to the top end of the lower hollow fixed seat through a bearing. The bottom end of the lower hollow fixed seat abuts against the sealing plate.

3. The abrasive recycling and reuse device in the abrasive liquid according to claim 1, characterized in that: The first rotation drive mechanism includes a first motor fixedly connected to the top end of the tank body, a first drive chamber opened inside the tank body at the top end outside the communication chamber and inside the reuse and recycling chamber, and four rotation openings opened inside the tank body on one side of the four sealing plates. A first external toothed ring is connected by a bearing inside the first drive chamber outside the communication chamber. Inside the first drive chamber on one side of the four sealing plates, first drive shafts are respectively arranged. The top end of one first drive shaft penetrates the tank body and extends into the filtration chamber and is connected to the output end of the first motor through a coupling. The penetrating section and the bottom end are connected to the tank body through bearings. The two ends of the other three first drive shafts are connected to the tank body through bearings. A first gear is fixedly sleeved outside the first drive shaft. The first gear is meshed and connected with the first external toothed ring. One side of the sealing plate penetrates the rotation opening and extends into the first drive chamber and is fixedly sleeved outside the first drive shaft. The first motor is electrically connected to the programmable controller.

4. A device for recycling abrasive in a grinding fluid according to claim 1, characterized in that: The moving drive mechanism includes a second motor fixedly connected to the outer wall of the tank body, a conical toothed ring movably sleeved outside the bottom end of the communication chamber through a bearing and inside the reuse and recycling chamber, four screw rods movably connected inside the reuse and recycling chamber between the support plate and the conical toothed ring, and four moving through slots opened inside the support plate below the four fixing plates. The output end of the second motor extends into the reuse and recycling chamber and is connected to a second drive shaft through a coupling. The other end of the second drive shaft is fixedly sleeved with a driving conical gear. The driving conical gear is meshed and connected with the conical toothed ring. The screw thread directions of the screw rods are such that they move in the same direction simultaneously. A follower conical gear is fixedly sleeved outside the screw rod near the communication chamber side. The follower conical gear is meshed and connected with the conical toothed ring. A movable seat is connected to the outside of the screw rod far from the follower conical gear through a transmission nut. The top end of the movable seat penetrates the moving through slot and is fixedly connected to the bottom end of the fixing plate. The second motor is electrically connected to the programmable controller.

5. The abrasive recycling and reuse device in a grinding fluid according to claim 2, characterized in that: A second rotation drive mechanism is assembled between the four sealing cylinders and the tank body; The second rotation drive mechanism includes a third motor fixedly connected to the top end of the tank body and a second drive chamber opened at the top end inside the filtration chamber. The output end of the third motor extends into the second drive chamber and is connected to a third drive shaft through a coupling. The other end of the third drive shaft is fixedly sleeved with a circular gear. A second external toothed ring is fixedly sleeved inside the second drive chamber outside the sealing cylinder. The circular gear is meshed and connected with one second external toothed ring. An internal toothed ring is connected to the inner wall of the second drive chamber through a bearing. The second external toothed ring is meshed and connected with the internal toothed ring. An installation opening is opened at the bottom end of the second drive chamber at the position of the sealing cylinder and is connected to the sealing cylinder through a bearing. The third motor is electrically connected to the programmable controller.

6. The abrasive recycling and reuse device in the abrasive liquid according to claim 1, characterized in that: A leveling mechanism is respectively assembled inside the reuse and recycling chamber within the four enclosing plates; The leveling mechanism includes a mounting rod fixedly connected inside the tank body above the discharge port. The end of the mounting rod far from the discharge port is fixedly sleeved with a main scraping plate. The main scraping plate is located inside the enclosing plate. Two telescopic grooves are symmetrically opened inside the main scraping plate. A secondary scraping plate is arranged inside the telescopic groove. A telescopic spring is elastically connected between the mutually approaching side walls of the telescopic groove and the secondary scraping plate. The other end wall of the secondary scraping plate abuts against the inner wall of the enclosing plate.

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