Niobium oxide spraying powder, niobium oxide target material and preparation method thereof

Abstract

The invention discloses niobium oxide spraying powder, a niobium oxide target material and a preparation method of the niobium oxide spraying powder, and belongs to the technical field of plasma powder preparation. According to the niobium oxide spraying powder, niobium oxide and a certain amount of water are mixed and then ground, then slurry obtained through grinding is subjected to spray granulation and then sintered in a hydrogen environment at a specific temperature, and crushing and screening are conducted after sintering, so that the sphericity degree of the niobium oxide spraying powder can be effectively improved; the particle size of the niobium oxide spraying powder is in a proper range, and the particle size distribution uniformity is high; in addition, the obtained niobium oxide spraying powder also has a suitable apparent density range, excellent flowability and a relatively high spraying deposition rate. Meanwhile, in the preparation process of the niobium oxide spraying powder provided by the invention, no other metal powder is added, and no binder is added, so that the preparation cost can be effectively reduced. Furthermore, when the niobium oxide spraying powder provided by the invention is used for preparing a niobium oxide target material, the prepared niobium oxide target material is high in density and low in resistivity.

Description

Technical Field

[0001] The present invention belongs to the technical field of plasma powder preparation, and particularly relates to a niobium oxide spraying powder, a niobium oxide target and a preparation method thereof. Background Art

[0002] Niobium oxide targets are important materials for preparing antireflective and antistatic glass and shadowless touch screen glass. Antireflective and antistatic glass is to deposit a niobium pentoxide antireflective film on the glass surface by sputtering coating technology, which can effectively reduce the reflection of the glass itself, increase the transmittance of the glass, and make the colors originally transmitted through the glass more vivid and real. Shadowless touch screen glass is to deposit an antireflective and antistatic film between the indium tin oxide (ITO) film and the glass. While meeting the conductivity of ITO, better visual brightness can be obtained by reducing the influence of ambient light. In addition, the high transmittance of the antireflective and antistatic film can be used to reduce the visual contrast between the ITO area and the non-ITO area, making the ITO lines of the capacitive screen fade and improving the visual effect. Due to these remarkable advantages, niobium pentoxide targets are widely used in the fields of solar cells, liquid crystal displays, ion displays, mobile phone touch screens, optical glass, etc.

[0003] The preparation methods of niobium oxide targets mainly include the pressing and sintering method and the plasma spraying method. The targets prepared by pressing and sintering have limited sizes and cannot be used for the preparation of large-size integral targets. Moreover, the preparation cost of pressing and sintering is high. The plasma spraying method can avoid these problems. The raw material of the plasma spraying target is the spraying powder. The quality of the spraying powder affects the production cost and performance of the target. The spraying powder needs to meet the requirements of good fluidity, narrow particle size distribution, good sphericity, etc. Therefore, it is necessary to study the preparation method of niobium oxide spraying powder that can be used for plasma spraying.

[0004] Chinese invention patent CN103045995A discloses a niobium oxide rotary target and a preparation method thereof. The main steps include: spraying powder preparation, spraying substrate treatment, spraying the bottom layer, and spraying the target. The process is simple, but the spraying powder is prepared by mixing and sintering and crushing the original niobium oxide powder and niobium powder. The spraying powder prepared by this method has poor fluidity, and the production cost is high due to the additional addition of niobium powder. Summary of the Invention

[0005] The purpose of the present invention is to overcome the deficiencies of the above-mentioned prior art and provide a niobium oxide spraying powder, a niobium oxide target and a preparation method thereof, which have spherical particles, appropriate particle size, high uniformity of particle size distribution, appropriate loose bulk density, excellent fluidity and high spraying deposition rate. When applied to the preparation of niobium oxide targets, the obtained niobium oxide targets have low resistivity and high density.

[0006] To achieve the above purpose, in the first aspect of the present invention, the present invention provides a preparation method of a niobium oxide spraying powder, and the preparation method includes the following steps:

[0007] (1) Add niobium oxide to water and grind to obtain a slurry.

[0008] (2) Spray granulate the slurry to obtain a niobium oxide spray powder precursor.

[0009] (3) Sinter the niobium oxide spray powder precursor in a hydrogen environment.

[0010] (4) After sintering, crush and screen to obtain the niobium oxide spray powder.

[0011] In the said step (1), based on the total mass of niobium oxide and water, the mass percentage of niobium oxide is 65 - 75%.

[0012] In the said step (3), the sintering temperature is 1000 - 1300 °C.

[0013] A niobium oxide spray powder provided by the present invention, by first mixing niobium oxide with a certain amount of water and then grinding, subsequently spray granulating the obtained slurry and sintering it at a specific temperature in a hydrogen environment, and then crushing and screening after sintering, can effectively improve the sphericity of the niobium oxide spray powder, make the particle size of the niobium oxide spray powder within a suitable range and have a high particle size distribution uniformity; moreover, the obtained niobium oxide spray powder also has a suitable loose bulk density range, excellent fluidity and a high spraying deposition rate. At the same time, during the preparation process of the niobium oxide spray powder provided by the present invention, no other metal powder is added, nor is any binder added, which can effectively reduce the preparation cost.

[0014] Exemplarily, in the said step (1), based on the total mass of niobium oxide and water, the mass percentage of niobium oxide can be any point value or any two - point range value between 65 - 75%, such as 65%, 68%, 70%, 72%, 75%, etc.

[0015] Exemplarily, in the said step (3), the sintering temperature can be any point value or any two - point range value between 1000 - 1300 °C, such as 1050 °C, 1100 °C, 1150 °C, 1200 °C, 1250 °C, 1300 °C, etc.

[0016] Preferably, in the said step (3), the sintering temperature is 1100 - 1200 °C.

[0017] The present invention has found through research that the sintering temperature not only affects the efficiency of the preparation process, but also affects the comprehensive performance of the niobium oxide spray powder; if the sintering temperature is too high, it will cause partial melting of the niobium oxide spray powder and result in adhesion, thus increasing the production difficulty, and the fluidity of the prepared niobium oxide spray powder will also significantly decrease, and the particle size distribution uniformity will also become worse; if the sintering temperature is too low, the preparation efficiency is low, which is not conducive to high - efficiency production.

[0018] As a preferred embodiment of the preparation method of the present invention, in the step (1), the Dv90 particle size of the slurry is ≤2 μm, and the viscosity at 25 °C is 20-50 mPa·s.

[0019] The present invention has found through research that when the Dv90 particle size of the slurry after grinding and the viscosity at 25 °C are within the above ranges, the subsequent spray granulation process can be carried out better, which is beneficial to improving the particle size distribution uniformity and sphericity of the niobium oxide spraying powder, and can ensure that the particle size of the obtained niobium oxide spraying powder is within an appropriate range, and it also has a good loose packing density range, excellent fluidity and a high spraying deposition rate.

[0020] As a preferred embodiment of the preparation method of the present invention, in the step (1), the grinding time is 2-4 h, and the grinding speed is 800-900 rpm.

[0021] The present invention has found through research that when the grinding time and speed are further within the above ranges, the Dv90 particle size of the slurry after grinding and the viscosity at 25 °C will be within the preferred ranges of the present invention.

[0022] As a preferred embodiment of the preparation method of the present invention, in the step (2), the parameters of the spray granulation are: the inlet temperature is 230-250 °C, the outlet temperature is 110-120 °C, and the rotation speed of the atomization disk is 7000-10000 rpm.

[0023] Preferably, in the step (2), the rotation speed of the atomization disk is 7000-9000 rpm.

[0024] The present invention has found through research that when within the above spray granulation parameter ranges, a niobium oxide spraying powder precursor with appropriate particle size can be obtained, which is beneficial to improving the efficiency of subsequent sintering.

[0025] As a preferred embodiment of the preparation method of the present invention, in the step (3), during the sintering process, the hydrogen flow rate is 10-20 L / min.

[0026] As a preferred embodiment of the preparation method of the present invention, in the step (3), the sintering time is 5-8 h.

[0027] As a preferred embodiment of the preparation method of the present invention, in the step (3), after sintering, the X value after oxygen loss of niobium oxide (Nb2O X ) is 4.6-4.9.

[0028] It should be noted that in the step (3), after sintering, the test method for the X value after oxygen loss of niobium oxide is the sintering weight loss method, and the calculation method is: the number of moles of O before sintering / the number of moles of Nb * 2.

[0029] The research of the present invention finds that during the sintering process, in addition to the sintering temperature, the sintering time, hydrogen flow rate, and the X value after oxygen loss of niobium oxide also affect the performance of niobium oxide spraying powder to a certain extent. When further selecting the sintering time, hydrogen flow rate, and the X value after oxygen loss of niobium oxide within the above ranges, the comprehensive performance of the obtained niobium oxide spraying powder is better.

[0030] As a preferred embodiment of the preparation method of the present invention, in the step (4), the roll gap of the crusher during crushing is 0.8 - 1 mm, and the mesh number of the sieve during screening is 80 - 325 meshes.

[0031] In the second aspect of the present invention, the present invention provides a niobium oxide spraying powder, which is prepared by the preparation method of the present invention.

[0032] As a preferred embodiment of the niobium oxide spraying powder of the present invention, the Dv90 particle size of the niobium oxide spraying powder is 90 - 120 μm, the particle size distribution uniformity is ±2 μm, the flow rate ≤ 35 s / 50 g, the spraying deposition rate ≥ 70%, and the loose bulk density is 2.5 - 3 g / cm 3 。

[0033] The niobium oxide spraying powder provided by the present invention has a spherical structure, has a Dv90 particle size and a loose bulk density within a suitable range, and has high particle size distribution uniformity, good fluidity, and high spraying deposition rate; it can be used in the preparation of niobium oxide targets, and the obtained niobium oxide targets have low resistivity and high target density.

[0034] In the third aspect of the present invention, the present invention provides a niobium oxide target, which is prepared by spraying the niobium oxide spraying powder of the present invention.

[0035] As a preferred embodiment of the niobium oxide target of the present invention, the spraying is vacuum spraying, and the parameters of the vacuum spraying are: the spraying hydrogen flow rate is 150 - 200 L / h, the spraying power is 20 - 25 kw, and the powder feeding rate is 50 - 100 g / min.

[0036] As a preferred embodiment of the niobium oxide target of the present invention, the resistivity of the niobium oxide target ≤ 10 mΩ·cm, and the target density ≥ 4.8 g / cm 3 。

[0037] Compared with the prior art, the beneficial effects of the present invention are:

[0038] A niobium oxide spraying powder provided by the present invention is prepared by first mixing niobium oxide with a certain amount of water and then grinding, followed by spray granulating the obtained slurry and sintering it at a specific temperature in a hydrogen atmosphere, and then crushing and screening after sintering. It can effectively improve the sphericity of the niobium oxide spraying powder, make the particle size of the niobium oxide spraying powder within a suitable range and have high particle size distribution uniformity; moreover, the obtained niobium oxide spraying powder also has a suitable loose bulk density range, excellent fluidity and high spraying deposition rate. At the same time, no other metal powder or binder is added during the preparation process of the niobium oxide spraying powder provided by the present invention, which can effectively reduce the preparation cost. Further, when preparing a niobium oxide target from the niobium oxide spraying powder provided by the present invention, the obtained niobium oxide target has a high density and a low resistivity. Description of the Drawings

[0039] Figure 1 SEM observation result diagram of the niobium oxide spraying powder prepared in Example 1;

[0040] Figure 2 SEM observation result diagram of the niobium oxide spraying powder prepared in Example 3;

[0041] Figure 3 SEM observation result diagram of the niobium oxide spraying powder prepared in Example 5;

[0042] Figure 4 SEM observation result diagram of the niobium oxide spraying powder prepared in Example 6;

[0043] Figure 5 SEM observation result diagram of the niobium oxide spraying powder prepared in Comparative Example 1. Detailed Embodiments

[0044] To better illustrate the purpose, technical solution and advantages of the present invention, the present invention will be further described below in conjunction with specific embodiments.

[0045] The reagents, methods and equipment used in the present invention are all conventional reagents, methods and equipment in the art unless otherwise specified.

[0046] Example 1

[0047] The present invention provides a niobium oxide spraying powder and a niobium oxide target. The preparation method of the niobium oxide spraying powder and the niobium oxide target includes the following steps:

[0048] (1) After adding niobium oxide to water (the mass percentage of niobium oxide is 65% based on the total mass of niobium oxide and water), grind it at a rotation speed of 900 rpm for 2 h to obtain a slurry with a Dv90 particle size of 0.7 μm and a viscosity of 30 mPa·s at 25°C;

[0049] (2) Spray granulate the slurry to obtain a precursor of niobium oxide spraying powder; the parameters of spray granulation are: the inlet temperature is 250 °C, the outlet temperature is 120 °C, and the rotation speed of the atomization disk is 7000 rpm;

[0050] (3) Place the precursor of niobium oxide spraying powder in a hydrogen environment and sinter at 1100 °C for 8 h. During the sintering process, the hydrogen flow rate is 15 L / min. After sintering, the X value of niobium oxide after oxygen loss is 4.77;

[0051] (4) After sintering, perform crushing and screening. The roll gap of the crusher is 1 mm, and the screen mesh for screening is 200 mesh. Collect the undersize to obtain niobium oxide spraying powder;

[0052] (5) Perform vacuum spraying on the niobium oxide spraying powder. The parameters of vacuum spraying are: the spraying hydrogen flow rate is 180 L / h, the spraying power is 22 kw, and the powder feeding rate is 75 g / min to obtain a niobium oxide target.

[0053] Example 2

[0054] An embodiment of the present invention provides a niobium oxide spraying powder and a niobium oxide target. The preparation method of the niobium oxide spraying powder and the niobium oxide target includes the following steps:

[0055] (1) After adding niobium oxide to water (the mass percentage of niobium oxide is 75% based on the total mass of niobium oxide and water), grind at a rotation speed of 800 rpm for 3 h to obtain a slurry with a Dv90 particle size of 0.8 μm and a viscosity of 33 mPa·s at 25 °C;

[0056] (2) Spray granulate the slurry to obtain a precursor of niobium oxide spraying powder; the parameters of spray granulation are: the inlet temperature is 230 °C, the outlet temperature is 110 °C, and the rotation speed of the atomization disk is 9000 rpm;

[0057] (3) Place the precursor of niobium oxide spraying powder in a hydrogen environment and sinter at 1200 °C for 5 h. During the sintering process, the hydrogen flow rate is 20 L / min. After sintering, the X value of niobium oxide after oxygen loss is 4.83;

[0058] (4) After sintering, perform crushing and screening. The roll gap of the crusher is 1 mm, and the screen mesh for screening is 200 mesh. Collect the undersize to obtain niobium oxide spraying powder;

[0059] (5) Perform vacuum spraying on the niobium oxide spraying powder. The parameters of vacuum spraying are: the spraying hydrogen flow rate is 200 L / h, the spraying power is 20 kw, and the powder feeding rate is 50 g / min to obtain a niobium oxide target.

[0060] Example 3

[0061] An embodiment of the present invention provides a niobium oxide spraying powder and a niobium oxide target. The preparation methods of the niobium oxide spraying powder and the niobium oxide target are different from those of Example 1 in that in step (1), grinding is carried out for 3 h to obtain a slurry with a Dv90 particle size of 0.55 μm and a viscosity of 28 mPa·s at 25°C;

[0062] In step (3), after sintering, the X value of the niobium oxide after oxygen loss is 4.79.

[0063] Example 4

[0064] An embodiment of the present invention provides a niobium oxide spraying powder and a niobium oxide target. The preparation methods of the niobium oxide spraying powder and the niobium oxide target are different from those of Example 1 in that in step (1), grinding is carried out for 4 h to obtain a slurry with a Dv90 particle size of 0.5 μm and a viscosity of 28 mPa·s at 25°C;

[0065] In step (3), before and after sintering, the oxygen loss amount of the niobium oxide is 4.81.

[0066] Example 5

[0067] An embodiment of the present invention provides a niobium oxide spraying powder and a niobium oxide target. The preparation methods of the niobium oxide spraying powder and the niobium oxide target are different from those of Example 1 in that in step (2), the rotation speed of the atomization disk is 10,000 rpm;

[0068] In step (3), after sintering, the X value of the niobium oxide after oxygen loss is 4.77.

[0069] Example 6

[0070] An embodiment of the present invention provides a niobium oxide spraying powder and a niobium oxide target. The preparation methods of the niobium oxide spraying powder and the niobium oxide target are different from those of Example 1 in that in step (3), sintering is carried out at 1300°C for 8 h;

[0071] In step (3), before and after sintering, the oxygen loss amount of the niobium oxide is 4.63.

[0072] Example 7

[0073] An embodiment of the present invention provides a niobium oxide spraying powder and a niobium oxide target. The preparation methods of the niobium oxide spraying powder and the niobium oxide target are different from those of Example 1 in that in step (3), sintering is carried out at 1000°C for 8 h;

[0074] In step (3), before and after sintering, the oxygen loss amount of the niobium oxide is 4.89.

[0075] Comparative Example 1

[0076] The comparative example of the present invention provides a niobium oxide spraying powder and a niobium oxide target. The preparation methods of the niobium oxide spraying powder and the niobium oxide target are different from those of Example 1 in that, based on the total mass of niobium oxide and water in step (1), the mass percentage of niobium oxide is 55%;

[0077] In step (3), after sintering, the X value of niobium oxide after oxygen loss is 4.77.

[0078] Comparative Example 2

[0079] The comparative example of the present invention provides a niobium oxide spraying powder and a niobium oxide target. The preparation methods of the niobium oxide spraying powder and the niobium oxide target are different from those of Example 1 in that, based on the total mass of niobium oxide and water in step (1), the mass percentage of niobium oxide is 85%;

[0080] In step (3), after sintering, the X value of niobium oxide after oxygen loss is 4.77.

[0081] Comparative Example 3

[0082] The comparative example of the present invention provides a niobium oxide spraying powder and a niobium oxide target. The preparation methods of the niobium oxide spraying powder and the niobium oxide target are different from those of Example 1 in that in step (3), sintering is carried out at 900 °C for 8 h;

[0083] In step (3), after sintering, the X value of niobium oxide after oxygen loss is 5.

[0084] Comparative Example 4

[0085] The comparative example of the present invention provides a niobium oxide spraying powder and a niobium oxide target. The preparation methods of the niobium oxide spraying powder and the niobium oxide target are different from those of Example 1 in that in step (3), sintering is carried out at 1400 °C for 8 h;

[0086] In step (3), after sintering, the X value of niobium oxide after oxygen loss is 4.46.

[0087] Comparative Example 5

[0088] The comparative example of the present invention provides a niobium oxide spraying powder and a niobium oxide target. The preparation methods of the niobium oxide spraying powder and the niobium oxide target are different from those of Example 1 in that in step (3), it is placed in a vacuum environment with a vacuum degree of 1*10 -2 -1*10 - 4 Pa;

[0089] In step (3), after sintering, the X value of niobium oxide after oxygen loss is 4.99.

[0090] Effect Example

[0091] Example verification of the effects of the present invention: The properties of the niobium oxide spraying powder and the niobium oxide target prepared in Examples 1-7 and Comparative Examples 1-5 include the following aspects:

[0092] 1. Dv90 particle size of the niobium oxide spraying powder: Measured by a laser particle size analyzer;

[0093] 2. Particle size distribution uniformity P of the niobium oxide spraying powder: Take test samples at three different positions of the same sample and measure the corresponding particle sizes. Calculate the difference between the Dv90 of the test samples at the three different positions, which is recorded as the particle size distribution uniformity of the niobium oxide spraying powder;

[0094] 3. Flow rate of the niobium oxide spraying powder: Measured by a Hall flowmeter;

[0095] 4. Loose bulk density of the niobium oxide spraying powder: Measured by a Hall flowmeter;

[0096] 5. Spraying deposition rate of the niobium oxide spraying powder: Measured by spraying equipment;

[0097] 6. Resistivity of the niobium oxide target: Measured by a four-probe resistivity meter;

[0098] 7. Density of the niobium oxide target: Measured by a density tester;

[0099] The results obtained are shown in Table 1;

[0100] Table 1

[0101]

[0102] As can be seen from Table 1, when the technical solution provided by the present invention is adopted, both the obtained niobium oxide spraying powder and the niobium oxide target have good properties; among them, the niobium oxide spraying powder has a smaller particle size and a uniform particle size distribution, and excellent fluidity, suitable loose bulk density, and a higher spraying deposition rate; specifically, the Dv90 particle size of the obtained niobium oxide spraying powder is between 97-105 μm, the particle size distribution uniformity P is between 1.3-1.6 μm, the flow rate is between 44-48 s / 50 g, and the loose bulk density is between 1.55-1.61 g / cm 3 3, and the spraying deposition rate is above 70%; among them, the SEM diagrams of the niobium oxide spraying powder prepared in Examples 1, 3, 5, and 6 are respectively as Figures 1-4 shown, and it can be clearly seen from Figures 1-4 that the niobium oxide spraying powder prepared by the technical solution of the present invention is spherical and has a high particle size distribution uniformity.

[0103] Meanwhile, the niobium oxide target prepared by using the corresponding niobium oxide spraying powder has a low resistivity and a high density; specifically, the resistivity of the obtained niobium oxide target is below 6 mΩ·cm and the density is above 4.80 g / cm 3 3.

[0104] It can be seen from Example 1 and Comparative Example 1 that when the mass percentage of niobium oxide in step (1) of Comparative Example 1 in the total mass of niobium oxide and water is not within the given range, the loose bulk density of the obtained niobium oxide spraying powder is too low, the particle size distribution uniformity decreases significantly, and the spraying deposition rate of the niobium oxide target is low, only 55%. This can also be seen from Figure 5 the poor sphericity; it can be seen from Example 1 and Comparative Example 2 that when the mass percentage of niobium oxide in step (1) of Comparative Example 2 in the total mass of niobium oxide and water is not within the given range, the obtained niobium oxide spraying powder has larger particles, a high slurry viscosity, an increased difficulty in preparing the slurry, and a low powder collection rate; the deposition rate of the corresponding niobium oxide target obtained is <70%, and the density of the obtained target also decreases significantly;

[0105] It can be seen from Example 1 and Comparative Example 3 that when the sintering temperature in step (3) of Comparative Example 3 is too low, the oxygen loss of the obtained niobium oxide spraying powder is small, the X value after oxygen loss is large, and the resistivity of the corresponding niobium oxide target obtained is high; it can be seen from Example 1 and Comparative Example 4 that when the sintering temperature in step (3) of Comparative Example 4 is too high, the obtained niobium oxide spraying powder will adhere, the spherical particles are incomplete after being broken, and the fluidity is poor; the corresponding niobium oxide target cannot be prepared. It can be seen from Example 1 and Comparative Example 5 that the oxygen loss effect of vacuum sintering on niobium oxide is less than that of hydrogen, resulting in a high resistivity of the spraying target.

[0106] Finally, it should be noted that the above embodiments are used to illustrate the technical solutions of the present invention rather than to limit the protection scope of the present invention. Although the present invention has been described in detail with reference to the preferred embodiments, those of ordinary skill in the art should understand that the technical solutions of the present invention can be modified or equivalently replaced without departing from the essence and scope of the technical solutions of the present invention.

Claims

1. A preparation method of niobium oxide spraying powder, characterized in that, The preparation method includes the following steps: (1) Add niobium oxide to water and grind to obtain a slurry; (2) Spray granulate the slurry to obtain a niobium oxide spray powder precursor; (3) Place the niobium oxide spray powder precursor in a hydrogen environment for sintering; (4) After sintering, crush and screen to obtain niobium oxide spray powder; In the step (1), based on the total mass of niobium oxide and water, the mass percentage of niobium oxide is 65 - 75%; In the step (3), the sintering temperature is 1000 - 1300 °C.

2. The preparation method according to claim 1, wherein In the step (1), the Dv90 particle size of the slurry is ≤2 μm, and the viscosity at 25 °C is 20 - 50 mPa·s.

3. The preparation method according to claim 1, characterized in that, In the step (2), the parameters of spray granulation are: the inlet temperature is 230 - 250 °C, the outlet temperature is 110 - 120 °C, and the rotation speed of the atomization disk is 7000 - 10000 rpm.

4. The preparation method according to claim 1, wherein In the step (3), during the sintering process, the hydrogen flow rate is 10 - 20 L / min; and / or, in the step (3), the sintering time is 5 - 8 h; and / or, in the step (3), after sintering, the X value of the niobium oxide after oxygen loss is 4.6 - 4.

9.

5. The preparation method according to claim 1, wherein In the step (4), the roll gap of the crusher during crushing is 0.8 - 1 mm, and the mesh number of the sieve during screening is 80 - 325 mesh.

6. A niobium oxide spraying powder, characterized in that, The niobium oxide spray powder is prepared by the preparation method described in any one of claims 1 - 5.

7. The niobium oxide spraying powder according to claim 6, characterized in that, The Dv90 particle size of the niobium oxide spraying powder is 90 - 120 μm, the particle size distribution uniformity is ±2 μm, the flow rate is ≤35 s / 50 g, the spraying deposition rate is ≥70%, and the loose bulk density is 2.5 - 3 g / cm 3 .

8. A niobium oxide target, characterized in that, The niobium oxide target is prepared by spraying with the niobium oxide spray powder described in any one of claims 6 - 7.

9. The niobium oxide target according to claim 8, wherein, The spraying is vacuum spraying, and the parameters of the vacuum spraying are: the spraying hydrogen flow rate is 150 - 200 L / h, the spraying power is 20 - 25 kw, and the powder feeding rate is 50 - 100 g / min.

10. The niobium oxide target according to claim 8, wherein The resistivity of the niobium oxide target is ≤ 10 mΩ·cm, and the target density is ≥ 4.8 g / cm 3 .

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