Treatment method of diamond-like carbon layer

Abstract

The treatment method of the diamond-like carbon layer comprises the following steps: coating a metal oxide on the diamond-like carbon layer; and performing a laser irradiation treatment on the diamond-like carbon layer and the metal oxide, the laser being configured to graphitize the diamond-like carbon layer. The method is simple and efficient, the structural property of the diamond-like carbon layer can be effectively changed, the internal stress of the diamond-like carbon layer is reduced, the toughness of the diamond-like carbon layer is improved, brittle rupture is prevented, and therefore the service life is prolonged.

Description

Technical Field

[0001] The present invention relates to the field of mechanical manufacturing, and particularly to a method for treating a diamond-like carbon layer. Background Art

[0002] With the development of technology, diamond-like carbon (DLC) has been widely used in the fields of scientific research, industrial production, medical devices, optical devices, etc. due to its high hardness and low friction coefficient. During the coating process, when the thickness of the DLC film increases, the internal stress also increases, which in turn causes the DLC film to crack.

[0003] Therefore, how to reduce the internal stress of the DLC film and improve its toughness has become one of the current research hotspots. It is necessary to provide an improved method for treating a diamond-like carbon layer to overcome the above defects. Summary of the Invention

[0004] The purpose of the present invention is to provide an improved method for treating a diamond-like carbon layer, which is simple and efficient, can effectively change the structural properties of the diamond-like carbon layer, reduce the internal stress of the diamond-like layer, improve the toughness of the diamond-like carbon layer to prevent cracking, and thus extend the service life.

[0005] To achieve the above purpose, the method for treating a diamond-like carbon layer of the present invention, the diamond-like carbon layer is formed on a substrate, and the treatment method includes the following steps:

[0006] Coating a metal oxide on the diamond-like carbon layer; and

[0007] Performing a laser irradiation treatment on the diamond-like carbon layer and the metal oxide, the laser being configured to graphitize the diamond-like carbon layer.

[0008] Compared with the prior art, in the method of the present invention, the diamond-like carbon layer on the substrate is subjected to a laser irradiation treatment to achieve local graphitization of the diamond-like carbon layer, that is, a three-dimensional graphite network is formed on the surface of the substrate. The structure of the graphite network is softer than the original structure of the diamond-like carbon layer. Therefore, the internal stress of the diamond-like carbon layer can be effectively reduced, the toughness of the diamond-like carbon layer can be improved, thereby preventing it from cracking and extending its service life. Moreover, before performing the laser irradiation treatment, coating a metal oxide on the diamond-like carbon layer can accelerate the graphitization speed of the diamond-like carbon layer, thereby improving the treatment efficiency.

[0009] As an embodiment, the laser irradiation treatment includes: controlling the surface temperature of the diamond-like carbon layer to be 500 - 800 °C.

[0010] As an example, the surface heating rate of the diamond-like carbon layer is controlled to be 10 - 25 mm / s.

[0011] As an example, the laser irradiation treatment includes: controlling the laser power to be 5 - 8 kW and the laser spot diameter to be 1 - 1.5 mm.

[0012] Preferably, the laser irradiation treatment includes: controlling the defocus amount of the laser to be 1 - 8 mm.

[0013] Preferably, in the laser irradiation treatment, helium is used as the protective gas.

[0014] As an example, the thickness of the diamond-like carbon layer is not greater than 30 μm.

[0015] As an example, the metal in the metal oxide is selected from at least one of iron, nickel, and zinc.

[0016] Preferably, the metal oxide is formed by physical vapor deposition, chemical vapor deposition, or electron beam evaporation. Detailed implementation manners

[0017] To make the above objects, features, and advantages of the present application more obvious and understandable, the following describes the detailed implementation manners of the present application in combination with some examples. Many specific details are set forth in the following description to fully understand the present application. However, the present application can be implemented in many other ways different from those described herein, and those skilled in the art can make similar improvements without departing from the connotation of the present application. Therefore, the present application is not limited by the specific examples disclosed below.

[0018] In the description of the present application, the terms "first" and "second" are only used for descriptive purposes and cannot be understood as indicating or implying relative importance or implicitly specifying the quantity of the indicated technical features. Thus, the features defined with "first" and "second" may explicitly or implicitly include at least one of these features. In the description of the present application, "a plurality of" means at least two, such as two, three, etc., unless otherwise specifically and clearly defined.

[0019] In the present application, unless otherwise clearly specified and limited, the first feature being "on" or "under" the second feature may be that the first and second features are in direct contact, or the first and second features are indirectly in contact through an intermediate medium. Moreover, the first feature being "above", "over", and "on top of" the second feature may be that the first feature is directly above or obliquely above the second feature, or merely indicates that the first feature has a higher horizontal height than the second feature. The first feature being "under", "below", and "beneath" the second feature may be that the first feature is directly below or obliquely below the second feature, or merely indicates that the first feature has a lower horizontal height than the second feature.

[0020] It should be noted that when an element is referred to as "fixed to" or "disposed on" another element, it can be directly on the other element or there may also be an intermediate element. When an element is considered to be "connected" to another element, it can be directly connected to the other element or there may be an intermediate element at the same time. The terms "vertical", "horizontal", "upper", "lower", "left", "right" and similar expressions used herein are for illustrative purposes only and do not represent the only implementation.

[0021] The method for treating a diamond-like carbon layer of the present invention will be further described below in conjunction with embodiments, but the present invention is not limited thereby. The method of the present invention aims to provide a method for treating a diamond-like carbon layer, which is simple and efficient, can effectively change the structural properties of the diamond-like carbon layer, reduce the internal stress of the diamond-like layer, improve the toughness of the diamond-like carbon layer and prevent brittle fracture, thereby extending the service life.

[0022] In an embodiment of the method for treating a diamond-like carbon layer of the present invention, the diamond-like carbon layer is formed on a substrate, such as a metal substrate or a semiconductor substrate, without limitation. The treatment method includes the following steps:

[0023] Coating a metal oxide on the diamond-like carbon layer; and

[0024] Performing a laser irradiation treatment on the diamond-like carbon layer and the metal oxide, and the laser is configured to graphitize the diamond-like carbon layer.

[0025] In the method of the present invention, the diamond-like carbon layer on the substrate is subjected to a laser irradiation treatment to achieve local graphitization of the diamond-like carbon layer, that is, a three-dimensional graphite network is formed on the substrate surface. The structure of the graphite network is softer than the original structure of the diamond-like carbon layer. Therefore, the internal stress of the diamond-like carbon layer can be effectively reduced, the toughness of the diamond-like carbon layer can be improved, thereby preventing brittle fracture and extending its service life. Moreover, before performing the laser irradiation treatment, coating a metal oxide on the diamond-like carbon layer can accelerate the graphitization speed of the diamond-like carbon layer, thereby improving the treatment efficiency.

[0026] In a specific embodiment, a metal substrate with a diamond-like carbon layer is provided. Preferably, the thickness of the diamond-like carbon layer is not greater than 30 μm. Subsequently, a metal oxide is coated on the diamond-like carbon layer. For example, the metal in the metal oxide is selected from at least one of iron, nickel, and zinc. Specifically, the metal oxide of iron / nickel / zinc can be formed by physical vapor deposition, chemical vapor deposition, or electron beam evaporation. As an example, the metal substrate with the diamond-like carbon layer is placed in a vacuum chamber for chemical vapor deposition treatment. The deposition source is an appropriate metal gas, and the deposition thickness is 8 - 10 nm. After treatment, the surface structure of the DLC film is analyzed by X-ray diffraction (XRD), and it can be found that a metal oxide layer is formed on the surface of the diamond-like carbon layer. Coating oxides such as iron, nickel, and zinc on the surface of the diamond-like carbon layer will accelerate the graphitization rate of the diamond-like carbon layer.

[0027] Next, laser irradiation treatment is performed on the diamond-like carbon layer and the metal oxide. The laser is configured to graphitize the diamond-like carbon layer. Specifically, as a preferred embodiment, the laser irradiation treatment includes: controlling the surface temperature of the diamond-like carbon layer to be 500 - 800 °C. At a specific temperature, the diamond-like carbon layer is graphitized, and a three-dimensional graphite network is formed on its surface. Preferably, controlling the surface heating rate of the diamond-like carbon layer to be 10 - 25 mm / s is more conducive to graphitization. During the laser irradiation treatment, the laser power is controlled to be 5 - 8 kW, the laser spot diameter is 1 - 1.5 mm, and the defocus amount of the laser is 1 - 8 mm. Thus, a better graphite network is obtained. More preferably, during the laser treatment process, a protective gas, such as helium, is introduced, and the gas flow rate is controlled to be 45 - 60 L / min. After the laser irradiation treatment, a three-dimensional graphite network will be formed on the substrate surface. The shape of the graphite can be circular, triangular, rhombic, etc. The distance between two adjacent shapes is greater than the width (diameter) of the shape itself.

[0028] In summary, in the method of the present invention, the diamond-like carbon layer on the substrate undergoes laser irradiation treatment to achieve local graphitization of the diamond-like carbon layer, that is, a three-dimensional graphite network is formed on the substrate surface. The structure of the graphite network is softer than the original structure of the diamond-like carbon layer. Therefore, the internal stress of the diamond-like carbon layer can be effectively reduced, the toughness of the diamond-like carbon layer can be improved, thereby preventing it from brittle fracture and extending its service life. Moreover, before the laser irradiation treatment, coating a metal oxide on the diamond-like carbon layer can accelerate the graphitization rate of the diamond-like carbon layer, thereby improving the processing efficiency.

[0029] The above-disclosed are only the preferred embodiments of the present invention. Of course, the scope of the rights of the present invention cannot be limited by this. Therefore, equivalent changes made according to the scope of the patent application of the present invention still fall within the scope covered by the present invention.

Claims

1. A method for treating a diamond-like carbon layer, the diamond-like carbon layer being formed on a substrate, characterized in that, Including the following steps: Coating a metal oxide on the diamond-like carbon layer; And Performing a laser irradiation treatment on the diamond-like carbon layer and the metal oxide, the laser being configured to graphitize the diamond-like carbon layer.

2. The method for treating the diamond-like carbon layer according to claim 1, characterized in that, The laser irradiation treatment includes: controlling the surface temperature of the diamond-like carbon layer to be 500 - 800 °C.

3. The method for treating the diamond-like carbon layer according to claim 2, wherein, Controlling the surface heating rate of the diamond-like carbon layer to be 10 - 25 mm / s.

4. The method for treating the diamond-like carbon layer according to claim 1, characterized in that, The laser irradiation treatment includes: controlling the laser power to be 5 - 8 kW and the laser spot diameter to be 1 - 1.5 mm.

5. The method for treating the diamond-like carbon layer according to claim 4, wherein, The laser irradiation treatment includes: controlling the defocus amount of the laser to be 1 - 8 mm.

6. The method for treating a diamond-like carbon layer according to claim 1, characterized in that, In the laser irradiation treatment, helium is used as a protective gas.

7. The method for treating the diamond-like carbon layer according to claim 1, characterized in that, The thickness of the diamond-like carbon layer is not greater than 30 μm.

8. The method for treating the diamond-like carbon layer according to claim 1, characterized in that, The metal in the metal oxide is selected from at least one of iron, nickel, and zinc.

9. The method for treating the diamond-like carbon layer according to claim 1, wherein The metal oxide is formed by physical vapor deposition, chemical vapor deposition, or electron beam evaporation.