Plate clamping prevention method and device for vertical furnace, computer equipment and storage medium

Abstract

The invention discloses a plate clamping prevention method and device for a vertical furnace, computer equipment and a storage medium. The method comprises the following steps: when a substrate enters a specified area of the vertical furnace, acquiring data acquired by a multi-parameter sensor group to obtain initial data; processing the initial data to obtain a processing result; and according to the processing result, the speed of a conveying rail and the positions of a guide wheel and a guide rail of the vertical furnace are adjusted through a PID controller. By means of the method, it can be guaranteed that the substrate can stably and accurately pass through all links in the furnace, and the phenomenon of plate clamping is avoided.

Description

Technical Field

[0001] The present invention relates to a control method for a vertical furnace, and more particularly to a method, device, computer device, and storage medium for preventing the clamping of plates in a vertical furnace. Background Art

[0002] The clamping of plates in a vertical furnace refers to the situation where, during the heating process, the substrate collides with or gets stuck to the internal components of the furnace due to factors such as inaccurate furnace entry position or thermal expansion, resulting in an inability to be smoothly transported. When it comes to the clamping of plates in a vertical furnace, the causes of this problem are usually multi-faceted, and one of the root causes is closely related to the position change of the product when entering the furnace and the expansion of the product during the heat treatment process.

[0003] Firstly, the uncertainty of the furnace entry position is a key factor leading to plate clamping. During the production process, due to reasons such as the working state of the equipment, manual operation errors, or fluctuations in the transmission system, the position of the substrate when entering the furnace may deviate each time. Especially when the substrate fails to be fully aligned with the guide rail during transmission, or due to mechanical errors, it deviates from the ideal position, the substrate may collide with or get stuck to other components inside the furnace, resulting in the occurrence of the plate clamping phenomenon. Secondly, the influence of substrate thermal expansion is also an important factor leading to plate clamping problems. The vertical furnace operates in a high-temperature environment, and the substrate expands during the heating process. Especially when the thermal expansion coefficient of the substrate material is large, as the temperature rises, the dimensional change of the substrate may exceed the originally set range, causing the gap between the substrate and the guide rail, rollers, or other transmission devices to become smaller, resulting in the substrate being unable to pass smoothly through the conveying system inside the furnace. This expansion may cause the substrate to get stuck, further affecting production efficiency and product quality.

[0004] Generally speaking, the unstable furnace entry position and the thermal expansion of the substrate at high temperature are often the root causes of the plate clamping phenomenon in a vertical furnace. Currently, it can only be detected manually, but this method cannot prevent plate clamping in advance.

[0005] Therefore, it is necessary to design a new method to ensure that the substrate can pass smoothly and accurately through each link inside the furnace and avoid the occurrence of the plate clamping phenomenon. Summary of the Invention

[0006] The purpose of the present invention is to overcome the defects of the prior art and provide a method, device, computer device, and storage medium for preventing the clamping of plates in a vertical furnace.

[0007] To achieve the above purpose, the present invention adopts the following technical solutions: A method for preventing the clamping of plates in a vertical furnace, comprising:

[0008] When the substrate enters the designated area of the vertical furnace, obtain the data collected by the multi-parameter sensor group to obtain the initial data;

[0009] Process the initial data to obtain a processing result;

[0010] Adjust the conveying track speed of the vertical furnace, the positions of the guide wheels and the guide rails through a PID controller according to the processing result.

[0011] A further technical solution thereof is: the multi-parameter sensor group includes a weighing sensor, a 3D line-scanning camera, a displacement sensor, and an infrared thermal imager. Among them, the weighing sensor and the 3D line-scanning camera are installed at the entrance of the specified area; the displacement sensors are deployed on both sides of the conveying track; the infrared thermal imager is installed at the plate inlet of the vertical furnace.

[0012] A further technical solution thereof is: the initial data includes the weight, thickness, planar dimensions, offset of the substrate center, and temperature data of the substrate.

[0013] A further technical solution thereof is: the processing of the initial data to obtain a processing result includes:

[0014] Extract weight features, dimension features, and temperature features from the initial data, and calculate the expansion coefficient to obtain a processing result.

[0015] A further technical solution thereof is: the adjusting of the conveying track speed of the vertical furnace, the positions of the guide wheels and the guide rails through a PID controller according to the processing result includes:

[0016] Calculate the speed adjustment amount and the position compensation amount according to the processing result;

[0017] Adjust the conveying track speed of the vertical furnace, the positions of the guide wheels and the guide rails through a PID controller according to the speed adjustment amount, the position compensation amount, and the setting rules.

[0018] A further technical solution thereof is: the speed adjustment amount adopts which is calculated as, where W is the weight of the substrate; L is the length of the substrate; k1 and k2 are weight coefficients obtained by linear fitting of historical data; Δv temp is the temperature compensation value calibrated through experiments; V(t) is the speed adjustment amount;

[0019] The position compensation amount adopts Δx = α(T - T0)L rail + βx sensor which is calculated as, where α is the thermal expansion coefficient of the guide rail material; x sensor is the offset of the substrate center; Β is the offset weight; Δx is the position compensation amount of the substrate, T is the current temperature; T0 is the predetermined temperature.

[0020] Its further technical solution is: adjusting the conveying track speed of the vertical furnace, and the positions of the guide wheels and guide rails through a PID controller according to the speed adjustment amount, position compensation amount, and setting rules, including:

[0021] Adjusting the conveying track speed of the vertical furnace, and the positions of the guide wheels and guide rails through a PID controller according to the priority levels from high to low of the emergency stop rule, position compensation rule, temperature compensation rule, and speed adjustment rule;

[0022] Among them, the emergency stop rule includes: when the vibration frequency exceeds 50 Hz and the offset exceeds 2 mm, stop the machine and trigger an audible and visual alarm;

[0023] The position compensation rule includes: adjusting the reverse thrust of the guide wheel according to the position compensation amount, where the reverse thrust is the product of the offset amount of the substrate center and the offset coefficient;

[0024] The temperature compensation rule includes: automatically adjusting the distance between the guide rails according to the expansion coefficient;

[0025] The speed adjustment rule includes: when the weight of the substrate is greater than 5 kg and the length is greater than 1 m, reducing the conveying speed to 60% of the default value.

[0026] The present invention also provides a vertical furnace anti-jamming device for a substrate, including:

[0027] An acquisition unit, configured to acquire data collected by a multi-parameter sensor group when the substrate enters a specified area of the vertical furnace to obtain initial data;

[0028] A processing unit, configured to process the initial data to obtain a processing result;

[0029] An adjustment unit, configured to adjust the conveying track speed of the vertical furnace, and the positions of the guide wheels and guide rails through a PID controller according to the processing result.

[0030] The present invention also provides a computer device, where the computer device includes a memory and a processor, a computer program is stored on the memory, and when the processor executes the computer program, the above method is implemented.

[0031] The present invention also provides a storage medium, where the storage medium stores a computer program, and when the computer program is executed by a processor, the above method is implemented.

[0032] The beneficial effects of the present invention compared with the prior art are as follows: When the substrate enters the designated area of the vertical furnace, the system uses a multi-parameter sensor group to collect data in real time and process it. After obtaining the initial data, the PID controller accurately adjusts the conveying track speed of the vertical furnace, the positions of the guide wheels and the guide rails according to the processing results. This closed-loop control process ensures that the substrate can be conveyed smoothly and accurately in each link of the furnace, avoiding the occurrence of card board phenomenon, thereby improving the stability and efficiency of the production line.

[0033] The following further describes the present invention in conjunction with the accompanying drawings and specific embodiments. BRIEF DESCRIPTION OF THE DRAWINGS

[0034] In order to more clearly illustrate the technical solutions of the embodiments of the present invention, the following will briefly introduce the accompanying drawings required for the description of the embodiments. Obviously, the accompanying drawings in the following description are some embodiments of the present invention. For those of ordinary skill in the art, other accompanying drawings can be obtained based on these drawings without creative efforts.

[0035] Figure 1 It is a schematic flowchart of the method for preventing card board of the vertical furnace provided by the embodiment of the present invention;

[0036] Figure 2 It is a schematic sub-flowchart of the method for preventing card board of the vertical furnace provided by the embodiment of the present invention;

[0037] Figure 3 It is a schematic block diagram of the device for preventing card board of the vertical furnace of the present invention;

[0038] Figure 4 It is a schematic block diagram of the **** unit of the device for preventing card board of the vertical furnace provided by the embodiment of the present invention;

[0039] Figure 5 It is a schematic block diagram of the computer device provided by the embodiment of the present invention. DETAILED DESCRIPTION OF THE EMBODIMENTS

[0040] The following will clearly and completely describe the technical solutions in the embodiments of the present invention in conjunction with the accompanying drawings in the embodiments of the present invention. Obviously, the described embodiments are some, but not all, of the embodiments of the present invention. All other embodiments obtained by those of ordinary skill in the art based on the embodiments of the present invention without creative efforts fall within the scope of protection of the present invention.

[0041] It should be understood that when used in this specification and the appended claims, the terms "comprising" and "including" indicate the presence of the described features, wholes, steps, operations, elements, and / or components, but do not exclude the presence or addition of one or more other features, wholes, steps, operations, elements, components, and / or their combinations.

[0042] It should also be understood that the terms used in the specification of the present invention are merely for the purpose of describing specific embodiments and are not intended to limit the present invention. As used in the specification of the present invention and the appended claims, unless the context clearly indicates otherwise, the singular forms "a", "an" and "the" are intended to include the plural forms.

[0043] It should be further understood that the term "and / or" used in the specification of the present invention and the appended claims refers to any combination and all possible combinations of one or more of the associated listed items, and includes these combinations.

[0044] Please refer to Figure 1 , Figure 1 which is a schematic flowchart of the vertical furnace anti-jamming method provided by an embodiment of the present invention. The vertical furnace anti-jamming method is applied to a server such as an industrial control computer, which interacts with a vertical furnace and a multi-parameter sensor group. The server collects data such as the weight, size, and temperature of a substrate through the multi-parameter sensor group (such as a weighing sensor, a 3D line-scanning camera, a displacement sensor, and an infrared thermal imager), extracts features and calculates the expansion coefficient after processing, and adjusts the conveying track speed of the vertical furnace, the positions of the guide wheels and the guide rails in combination with a PID controller. By calculating the speed adjustment amount and the position compensation amount, it is ensured that the substrate is smoothly conveyed in the furnace, avoiding the jamming phenomenon caused by dimensional changes or temperature fluctuations. The control strategy also includes rules such as emergency shutdown, position compensation, temperature compensation, and speed adjustment to ensure that the substrate can pass through each link in the furnace smoothly and accurately.

[0045] Figure 1 is a schematic flowchart of the vertical furnace anti-jamming method provided by an embodiment of the present invention. As Figure 1 shown, the method includes the following steps S110 to S130.

[0046] S110. When the substrate enters the designated area of the vertical furnace, obtain the data collected by the multi-parameter sensor group to obtain the initial data.

[0047] In this embodiment, the multi-parameter sensor group includes a weighing sensor, a 3D line-scanning camera, a displacement sensor, and an infrared thermal imager. Among them, the weighing sensor and the 3D line-scanning camera are installed at the entrance of the designated area; the displacement sensors are deployed on both sides of the conveying track; the infrared thermal imager is installed at the plate inlet of the vertical furnace.

[0048] The initial data includes the weight, thickness, planar size, offset of the center of the substrate, and temperature data.

[0049] Specifically, in this embodiment, the system obtains key data in real time through a multi-parameter sensor group to ensure that the position and size of the substrate during the furnace loading process can be accurately controlled, thereby avoiding the occurrence of card board phenomena.

[0050] The process of obtaining the initial data is as follows:

[0051] Load cell: Installed at the entrance of the designated area, the load cell can measure the weight of the substrate in real time. The weight data is crucial for calculating the conveying speed, adjusting the guide rail spacing, and performing temperature compensation.

[0052] The data provided by the load cell can help evaluate the load condition of the substrate and avoid overloading or other card board problems caused by weight changes.

[0053] 3D line scan camera: This camera is used to measure the thickness and planar dimensions of the substrate, especially the length and width of the substrate. The 3D line scan camera can provide high-precision dimension data, which is very important for position compensation and dynamically adjusting the guide rail spacing.

[0054] The camera can accurately capture the shape change of the substrate, so as to accurately know the size of the substrate before entering the furnace and avoid card board due to uneven or deformed products.

[0055] Displacement sensor: Deployed on both sides of the conveying track, the displacement sensor precisely monitors the offset of the center of the substrate. Real-time detection of substrate offset helps the system perform position compensation.

[0056] Excessive offset will cause the substrate to move irregularly in the furnace, increasing the risk of card board. Through the real-time offset data, the system can adjust the position of the guide wheels to ensure that the substrate passes through the furnace body in the correct direction.

[0057] Infrared thermal imager: Installed at the inlet of the vertical furnace, it is used to monitor the thermal expansion deformation of the guide rails and rollers. Since temperature changes will affect the deformation of the equipment, the infrared thermal imager can accurately detect the thermal expansion situation, thereby providing data support for subsequent temperature compensation.

[0058] In a high-temperature environment, the expansion of the guide rails and rollers may cause a change in the guide rail spacing, which in turn affects the normal conveyance of the substrate. Through the temperature data provided by the infrared thermal imager, the system can dynamically adjust the width of the guide rails to cope with the impact of temperature on the equipment.

[0059] These initial data (substrate weight, thickness, planar size, offset, and temperature) will be sent to the edge computing unit for further processing and analysis. The data will undergo fusion and feature extraction for status evaluation and decision-making. For example, based on the real-time detection of the substrate weight, size, offset, and temperature, the system calculates the coefficient of thermal expansion and adjusts parameters such as the guide rail spacing and conveyor speed to avoid jamming caused by environmental changes or the characteristics of the substrate itself.

[0060] Through real-time monitoring and adjustment, the system can dynamically adapt to different substrate conditions and ensure the smooth operation of the production line.

[0061] S120. Process the initial data to obtain a processing result.

[0062] In this embodiment, the processing result includes:

[0063] The weight and size characteristics of the substrate; the calculated coefficient of thermal expansion; these data will provide inputs for subsequent control logic, such as adjusting the speed, adjusting the guide rail spacing, and performing temperature compensation.

[0064] Specifically, extract the weight characteristics, size characteristics, and temperature characteristics from the initial data, and calculate the coefficient of thermal expansion to obtain the processing result.

[0065] First, key characteristics need to be extracted from these initial data. For example:

[0066] Weight characteristic: The actual weight of the substrate.

[0067] Size characteristics: The size properties such as the length, width, and thickness of the substrate. These information are usually obtained by a 3D line scan camera.

[0068] Temperature characteristic: The measured temperature data of the substrate or the equipment, which may affect material expansion or equipment efficiency.

[0069] Based on the collected temperature data and the size characteristics of the substrate, the system calculates the coefficient of thermal expansion. The coefficient of thermal expansion is only related to the material; this coefficient reflects the degree of deformation of the material due to temperature changes. In practice, the coefficient of thermal expansion is usually calculated based on the material type and the current temperature difference.

[0070] Therefore, the S120 stage is actually to extract and process the initial data collected by the system, and perform calculations in combination with physical properties (such as the coefficient of thermal expansion) to provide accurate real-time feedback and adjustment basis for subsequent control strategies.

[0071] S130. Adjust the conveyor track speed of the vertical furnace, the positions of the guide wheels and guide rails according to the processing result through a PID controller.

[0072] In one embodiment, please refer to Figure 2 , the above step S130 may include steps S131 to S132.

[0073] S131. Calculate the speed adjustment amount and the position compensation amount according to the processing result.

[0074] In this embodiment, the speed adjustment amount is calculated by , where W is the weight of the substrate; L is the length of the substrate; k1 and k2 are weight coefficients obtained by linear fitting of historical data; Δv temp is the temperature compensation value calibrated through experiments, used to compensate for the influence of temperature change on the conveying speed. The influence of temperature on the motor efficiency and lubrication conditions will be adjusted through experimental calibration; V(t) is the speed adjustment amount; W max is the maximum allowable weight, considering the influence of temperature on the conveying speed. This formula dynamically adjusts the conveying speed by considering the weight, length of the substrate and temperature influence to avoid the phenomenon of card board.

[0075] The position compensation amount is calculated by Δx = α(T - T0)L rail + βx sensor , where α is the thermal expansion coefficient of the guide rail material; x sensor is the offset of the substrate center; Β is the offset weight, used to adjust the size of the compensation amount; Δx is the position compensation amount of the substrate, T is the current temperature; T0 is the predetermined temperature. This formula is used to calculate the influence of temperature change and substrate offset on the guide rail position, so as to adjust the guide rail spacing and ensure the smooth passage of the substrate.

[0076] S132. Adjust the conveying track speed, the position of the guide wheel and the guide rail of the vertical furnace through a PID controller according to the speed adjustment amount, the position compensation amount and the setting rules.

[0077] In this embodiment, according to the priority levels from high to low of the emergency stop rule, the position compensation rule, the temperature compensation rule, and the speed adjustment rule, the conveying track speed, the position of the guide wheel and the guide rail of the vertical furnace are adjusted through a PID controller;

[0078] Among them, the emergency stop rule includes: when the vibration frequency exceeds 50Hz and the offset exceeds 2mm, stop the machine and trigger an audible and visual alarm;

[0079] The position compensation rule includes: adjusting the reverse thrust of the guide wheel according to the position compensation amount, where the reverse thrust is the product of the offset of the substrate center and the offset coefficient;

[0080] The temperature compensation rule includes: automatically adjusting the guide rail spacing according to the expansion coefficient;

[0081] The speed adjustment rule includes: when the weight of the substrate is greater than 5 kg and the length is greater than 1 m, reduce the conveying speed to 60% of the default value.

[0082] In this embodiment, once the speed adjustment amount and the position compensation amount are calculated, the control system will perform dynamic adjustment through the PID controller. The specific steps are as follows:

[0083] Adjust according to the rule priority:

[0084] Emergency stop rule: If the detected vibration frequency is greater than 50 Hz and the substrate offset is greater than 2 mm, the system will immediately trigger an emergency stop and issue an audible and visual alarm to ensure safety.

[0085] Position compensation rule: According to the calculated offset amount, compensate through the reverse thrust of the guide wheel. The magnitude of the reverse thrust is the product of the offset amount and the offset coefficient. The thrust of the guide wheel is adjusted in real time through the PID controller to ensure the stability of the substrate during conveying.

[0086] Temperature compensation rule: According to the calculated influence of the temperature change on the guide rail spacing, automatically adjust the guide rail spacing through the PID controller to compensate for the deviation caused by thermal expansion.

[0087] Speed adjustment rule: When the weight of the substrate exceeds 5 kg and the length exceeds 1 m, the system will reduce the conveying speed to 60% of the default value to avoid offset or jamming phenomena caused by excessive speed.

[0088] Specifically, the speed adjustment rule is equivalent to an executed speed adjustment, a pre-judgment for position compensation, etc., used to protect the operation of the equipment. If the above situation occurs, after completing the above operations, then perform the adjustment to prevent damage to the equipment. Therefore, the sorting of the conflict priority needs to be set.

[0089] The PID controller adjusts each component of the vertical furnace (the speed of the conveying track, the position of the guide wheel and the guide rail) in real time according to the speed adjustment amount, position compensation amount and temperature compensation amount calculated above.

[0090] The PID controller realizes the stable control of the vertical furnace system through precise adjustment of speed, position and temperature compensation, ensuring that there is no jamming phenomenon when the product passes through the furnace body.

[0091] Through the PID control adjustment step in S130, the system can dynamically adjust the conveying track speed, the position of the guide wheel and the guide rail of the vertical furnace according to real-time sensor data (such as the weight, size, offset, temperature, etc. of the substrate). By comprehensively considering the influence of speed, position and temperature and making reasonable adjustments according to the set rule priority, the occurrence of jamming phenomena is avoided and the efficiency and safety of the entire production process are ensured.

[0092] The core of this control strategy lies in leveraging advanced sensor technology and real-time computing capabilities, combined with the precise adjustment ability of the PID controller, to achieve fine control of the vertical furnace system.

[0093] Specifically, if the sudden change in substrate weight is detected to exceed 10%, the system will trigger a retest and alarm to ensure the accuracy of the data.

[0094] The temperature data is filtered using a sliding window mean filter, and the window time is adjusted according to the specific settings of the product to avoid the impact of short-term fluctuations on system control.

[0095] When the vibration frequency exceeds 50 Hz and the substrate offset exceeds 2 mm, the system will immediately stop and trigger an audible and visual alarm to prevent equipment damage.

[0096] When the substrate weight exceeds 5 kg and the length exceeds 1 m, the system will automatically reduce the conveying speed to 60% of the default value to ensure that no jamming occurs during the conveying process.

[0097] When a position offset occurs, the system compensates through the reverse thrust of the adjustable guide wheels, and the compensation force is calculated based on the offset amount.

[0098] Temperature changes will cause the guide rails to expand or contract, and the system will automatically increase or decrease the guide rail spacing to adapt to the expansion or contraction changes.

[0099] In this embodiment, the method of this embodiment is applied to the following hardware:

[0100] To ensure the accurate measurement of the weight and size of the substrate, high-precision weighing sensors and 3D line scan cameras are installed at the entrance. These devices can detect the weight, thickness, and planar size of the substrate in real time, providing accurate input data for subsequent adjustment and control.

[0101] On both sides of the conveying track, laser displacement sensors (with an accuracy of ±0.1 mm) are arranged to monitor the position offset of the substrate in real time. Through this device, the center offset of the substrate can be accurately detected and compensated and adjusted in a timely manner.

[0102] An infrared thermal imager is installed at the inlet of the furnace body to monitor the thermal expansion and deformation of the guide rails and rollers. This device can provide real-time temperature data to help dynamically adjust the guide rail spacing and compensate for the impact of temperature changes.

[0103] The actuators include:

[0104] Variable frequency motor: By controlling the conveying speed, the variable frequency motor can be dynamically adjusted according to real-time data to ensure the stability of the conveying system and the smooth passage of the substrate.

[0105] Servo motor-driven adjustable guide wheel: This part is used to achieve position compensation to ensure that the substrate runs along the accurate path of the conveyor belt. Especially when the position of the substrate shifts due to temperature changes or other reasons, the guide wheel can make dynamic adjustments.

[0106] Linear module: This device can dynamically adjust the spacing of the guide rails to cope with the change in the size of the guide rails caused by thermal expansion, ensuring the normal operation of the system under different temperature conditions.

[0107] The control layer is also the controller of the vertical furnace:

[0108] Edge computing unit: It adopts a combination of industrial-grade PLC and industrial control computer, runs real-time control algorithms, ensures that the data processing and control response speed are fast enough to support the efficient operation of the system.

[0109] Communication protocol: It uses EtherCAT high-speed bus to ensure the synchronization of data transmission between sensors, controllers and actuators, ensures that the data synchronization period is less than 10ms, and avoids the instability of the system caused by control delay.

[0110] During the process of the substrate entering the system, the 3D camera and weighing sensor will complete the acquisition of data such as the weight, size, offset and temperature of the substrate within 0.5 seconds. These data will then be transmitted to the control unit for processing.

[0111] The transmitted raw data will undergo feature extraction and fusion processing to analyze the expansion coefficient of the substrate and other influencing factors. Through the state evaluation algorithm, the expansion behavior of the substrate can be calculated in real time and initial control instructions can be generated. Specifically, use sliding window splicing. For example, taking 30S as a window, input the temperature, displacement characteristics and expansion coefficient as a matrix to generate initial control instructions.

[0112] According to the calculated expansion coefficient, the weight, size and offset of the substrate, the system will generate a preliminary speed setting. At the same time, the control system will make dynamic adjustments to the conveyor speed, guide wheel and guide rail spacing to compensate for the changes of the substrate. A PID controller is used to fine-tune the conveyor speed to avoid substrate offset caused by rapid acceleration or deceleration.

[0113] The control system will continuously monitor the sensor feedback and make dynamic adjustments according to these data. Each adjustment will record the decision effect to evaluate whether the phenomenon of board jamming has been successfully avoided. If the decision made by the system is effective, the system will further optimize the control parameters according to the reinforcement learning method.

[0114] In this embodiment, to enhance the adaptive ability of the system, a reinforcement learning (RL) algorithm will be introduced, enabling the system to perform dynamic optimization based on real-time feedback. Every 24 hours, the system will automatically collect the operation data of the past 24 hours, including various parameters such as temperature, substrate weight, size change, and transfer speed. Based on this data, the reinforcement learning model will analyze the impact of different control parameters (such as v temp ) on the system stability and efficiency, and automatically adjust these parameters through a reward mechanism to achieve the optimal control strategy. This process enables the system to more precisely adapt to the changes in the production environment over time, gradually improving the processing efficiency and stability.

[0115] The core idea of reinforcement learning is to let the system find the best balance between "exploration" and "exploitation". Through continuous operation, the system will try different control strategies, and based on the results, give rewards or punishments to gradually optimize the decision-making process. For example, when the system detects a large change in the weight or size of the substrate, the reinforcement learning model will adjust the compensation value of v temp to reduce the transfer speed fluctuation caused by temperature fluctuations. In addition, the system will continuously fine-tune parameters such as k1 and k2 to ensure that the transfer system can still operate smoothly under different production loads.

[0116] Through this closed-loop optimization mechanism, the system can not only respond to unforeseen fluctuations in the production process in real time, but also continuously self-adjust and improve based on the accumulation of data during long-term operation. This method enables the control system to have a high degree of intelligence and flexibility, can handle complex situations under different production conditions, avoids the frequent need for manual intervention, thus greatly improving the production efficiency, reducing the failure rate, and ultimately realizing the intelligent management of the production line.

[0117] For the above vertical furnace anti-jamming method, when the substrate enters the specified area of the vertical furnace, the system uses a multi-parameter sensor group to collect data in real time and process it. After obtaining the initial data, the PID controller accurately adjusts the transfer track speed of the vertical furnace, the positions of the guide wheels and guide rails according to the processing results; this closed-loop control process ensures that the substrate can be transferred smoothly and accurately in each link of the furnace, avoiding the occurrence of jamming phenomena, thereby improving the stability and efficiency of the production line.

[0118] Figure 3 is a schematic block diagram of a vertical furnace anti-jamming device 300 provided by an embodiment of the present invention. As Figure 3 shown, corresponding to the above vertical furnace anti-jamming method, the present invention also provides a vertical furnace anti-jamming device 300. The vertical furnace anti-jamming device 300 includes units for executing the above vertical furnace anti-jamming method, and this device can be configured in a server. Specifically, please refer to Figure 3, the vertical furnace anti-jamming plate device 300 includes an acquisition unit 301, a processing unit 302, and an adjustment unit 303.

[0119] The acquisition unit 301 is configured to obtain data collected by a multi-parameter sensor group when the substrate enters a specified area of the vertical furnace, so as to obtain initial data; the processing unit 302 is configured to process the initial data to obtain a processing result; the adjustment unit 303 is configured to adjust the transmission track speed, the position of the guide wheels and the guide rails of the vertical furnace through a PID controller according to the processing result.

[0120] In one embodiment, the processing unit 302 is configured to extract weight features, dimension features, and temperature features from the initial data, and calculate the expansion coefficient to obtain a processing result.

[0121] In one embodiment, as Figure 4 shown, the adjustment unit 303 includes a calculation sub-unit 3031 and a PID control sub-unit 3032.

[0122] The calculation sub-unit 3031 is configured to calculate a speed adjustment amount and a position compensation amount according to the processing result; the PID control sub-unit 3032 is configured to adjust the transmission track speed, the position of the guide wheels and the guide rails of the vertical furnace through a PID controller according to the speed adjustment amount, the position compensation amount, and a set rule.

[0123] In one embodiment, the PID control unit is configured to adjust the transmission track speed, the position of the guide wheels and the guide rails of the vertical furnace through a PID controller according to the priority levels from high to low of an emergency stop rule, a position compensation rule, a temperature compensation rule, and a speed adjustment rule;

[0124] wherein, the emergency stop rule includes: when the vibration frequency exceeds 50 Hz and the offset exceeds 2 mm, stop the machine and trigger an audible and visual alarm;

[0125] The position compensation rule includes: adjusting the reverse thrust of the guide wheels according to the position compensation amount, wherein the reverse thrust is the product of the offset amount of the substrate center and the offset coefficient;

[0126] The temperature compensation rule includes: automatically adjusting the guide rail spacing according to the expansion coefficient;

[0127] The speed adjustment rule includes: when the weight of the substrate is greater than 5 kg and the length is greater than 1 m, reducing the transmission speed to 60% of the default value.

[0128] It should be noted that those skilled in the art can clearly understand that the specific implementation processes of the above vertical furnace anti-jamming plate device 300 and each unit can refer to the corresponding descriptions in the foregoing method embodiments. For the convenience and conciseness of description, they will not be elaborated herein.

[0129] The above vertical furnace anti-jamming plate device 300 can be implemented in the form of a computer program, which can run on a computer device as shown in Figure 5 the following.

[0130] Please refer to Figure 5 , Figure 5 which is a schematic block diagram of a computer device provided by an embodiment of the present application. The computer device 500 may be a server. Among them, the server may be an independent server or a server cluster composed of multiple servers.

[0131] Referring to Figure 5 , the computer device 500 includes a processor 502, a memory, and a network interface 505 connected through a system bus 501. Among them, the memory may include a non-volatile storage medium 503 and an internal memory 504.

[0132] The non-volatile storage medium 503 can store an operating system 5031 and a computer program 5032. The computer program 5032 includes program instructions. When the program instructions are executed, the processor 502 can be caused to execute a vertical furnace anti-jamming plate method.

[0133] The processor 502 is used to provide computing and control capabilities to support the operation of the entire computer device 500.

[0134] The internal memory 504 provides an environment for the operation of the computer program 5032 in the non-volatile storage medium 503. When the computer program 5032 is executed by the processor 502, the processor 502 can be caused to execute a vertical furnace anti-jamming plate method.

[0135] The network interface 505 is used for network communication with other devices. Those skilled in the art can understand that Figure 5 the structure shown in

[0136] is only a block diagram of a part of the structure related to the solution of the present application, and does not constitute a limitation on the computer device 500 to which the solution of the present application is applied. The specific computer device 500 may include more or fewer components than those shown in the figure, or combine certain components, or have different component arrangements.

[0137] When the substrate enters the specified area of the vertical furnace, acquire the data collected by the multi-parameter sensor group to obtain initial data; process the initial data to obtain a processing result; adjust the transmission track speed, the position of the guide wheels and the guide rails of the vertical furnace according to the processing result through a PID controller.

[0138] The multi-parameter sensor group includes a load cell, a 3D line-scanning camera, a displacement sensor, and an infrared thermal imager. Among them, the load cell and the 3D line-scanning camera are installed at the entrance of the specified area; the displacement sensors are deployed on both sides of the transfer track; the infrared thermal imager is installed at the plate inlet of the vertical furnace.

[0139] The initial data includes the weight, thickness, planar dimensions, offset of the substrate center, and temperature data of the substrate.

[0140] In one embodiment, when the processor 502 implements the step of processing the initial data to obtain a processing result, the following specific steps are implemented:

[0141] Extract the weight feature, dimension feature, and temperature feature from the initial data, and calculate the expansion coefficient to obtain the processing result.

[0142] In one embodiment, when the processor 502 implements the step of adjusting the speed of the transfer track, the position of the guide wheels and the guide rails of the vertical furnace through a PID controller according to the processing result, the following specific steps are implemented:

[0143] Calculate the speed adjustment amount and the position compensation amount according to the processing result; adjust the speed of the transfer track, the position of the guide wheels and the guide rails of the vertical furnace through a PID controller according to the speed adjustment amount, the position compensation amount, and the set rules.

[0144] Among them, the speed adjustment amount is calculated by where W is the weight of the substrate; L is the length of the substrate; k1 and k2 are weight coefficients obtained by linear fitting of historical data; Δv temp is the temperature compensation value calibrated through experiments; V(t) is the speed adjustment amount;

[0145] The position compensation amount is calculated by Δx = α(T - T0)L rail + βx sensor where α is the thermal expansion coefficient of the guide rail material; x sensor is the offset of the substrate center; Β is the offset weight; Δx is the position compensation amount of the substrate, T is the current temperature; T0 is the predetermined temperature.

[0146] In one embodiment, when the processor 502 implements the step of adjusting the speed of the transfer track, the position of the guide wheels and the guide rails of the vertical furnace through a PID controller according to the speed adjustment amount, the position compensation amount, and the set rules, the following specific steps are implemented:

[0147] Adjust the speed of the transfer track, and the positions of the guide wheels and guide rails of the vertical furnace through a PID controller according to the priority levels from high to low of the emergency shutdown rule, position compensation rule, temperature compensation rule, and speed adjustment rule;

[0148] Among them, the emergency shutdown rule includes: when the vibration frequency exceeds 50 Hz and the offset exceeds 2 mm, stop the machine and trigger an audible and visual alarm;

[0149] The position compensation rule includes: adjusting the reverse thrust of the guide wheel according to the position compensation amount, where the reverse thrust is the product of the offset of the substrate center and the offset coefficient;

[0150] The temperature compensation rule includes: automatically adjusting the distance between the guide rails according to the expansion coefficient;

[0151] The speed adjustment rule includes: when the weight of the substrate is greater than 5 kg and the length is greater than 1 m, reduce the transfer speed to 60% of the default value.

[0152] It should be understood that in the embodiment of the present application, the processor 502 may be a central processing unit 302 (Central Processing Unit, CPU), and the processor 502 may also be other general-purpose processors, digital signal processors (Digital Signal Processor, DSP), application specific integrated circuits (Application Specific Integrated Circuit, ASIC), off-the-shelf programmable gate arrays (Field-Programmable Gate Array, FPGA) or other programmable logic devices, discrete gate or transistor logic devices, discrete hardware components, etc. Among them, the general-purpose processor may be a microprocessor or the processor may also be any conventional processor, etc.

[0153] Those of ordinary skill in the art can understand that all or part of the processes in the methods of the above embodiments can be completed by instructing relevant hardware through a computer program. The computer program includes program instructions, and the computer program can be stored in a storage medium, and the storage medium is a computer-readable storage medium. The program instructions are executed by at least one processor in the computer system to implement the process steps of the embodiments of the above methods.

[0154] Therefore, the present invention also provides a storage medium. The storage medium may be a computer-readable storage medium. The storage medium stores a computer program, and when the computer program is executed by a processor, the processor executes the following steps:

[0155] When the substrate enters the specified area of the vertical furnace, acquire the data collected by the multi-parameter sensor group to obtain the initial data; process the initial data to obtain a processing result; adjust the speed of the transfer track, the positions of the guide wheels and the guide rails of the vertical furnace through a PID controller according to the processing result.

[0156] The multi-parameter sensor group includes a weighing sensor, a 3D line-scanning camera, a displacement sensor, and an infrared thermal imager. Among them, the weighing sensor and the 3D line-scanning camera are installed at the entrance of the specified area; the displacement sensors are deployed on both sides of the transfer track; the infrared thermal imager is installed at the plate inlet of the vertical furnace.

[0157] The initial data includes the weight, thickness, planar dimensions, offset of the substrate center, and temperature data of the substrate.

[0158] In one embodiment, when the processor executes the computer program to implement the step of processing the initial data to obtain a processing result, the following steps are specifically implemented:

[0159] Extract the weight feature, dimension feature, and temperature feature from the initial data, and calculate the expansion coefficient to obtain a processing result.

[0160] In one embodiment, when the processor executes the computer program to implement the step of adjusting the speed of the transfer track, the positions of the guide wheels and the guide rails of the vertical furnace through a PID controller according to the processing result, the following steps are specifically implemented:

[0161] Calculate the speed adjustment amount and the position compensation amount according to the processing result; adjust the speed of the transfer track, the positions of the guide wheels and the guide rails of the vertical furnace through a PID controller according to the speed adjustment amount, the position compensation amount, and the set rules.

[0162] Among them, the speed adjustment amount is calculated by where W is the weight of the substrate; L is the length of the substrate; k1 and k2 are weight coefficients obtained by linear fitting of historical data; Δv temp is the temperature compensation value calibrated through experiments; V(t) is the speed adjustment amount;

[0163] The position compensation amount is calculated by Δx = α(T - T0)L rail + βx sensor where α is the thermal expansion coefficient of the guide rail material; x sensor is the offset of the substrate center; Β is the offset weight; Δx is the position compensation amount of the substrate, T is the current temperature; T0 is the predetermined temperature.

[0164] In one embodiment, when the processor executes the computer program to implement the step of adjusting the conveying track speed of the vertical furnace, and the positions of the guide wheels and guide rails according to the speed adjustment amount, position compensation amount, and setting rules through a PID controller, the following specific steps are implemented:

[0165] Adjust the conveying track speed of the vertical furnace, and the positions of the guide wheels and guide rails through a PID controller according to the priority levels from high to low of the emergency stop rule, position compensation rule, temperature compensation rule, and speed adjustment rule;

[0166] Among them, the emergency stop rule includes: when the vibration frequency exceeds 50 Hz and the offset exceeds 2 mm, stop the machine and trigger an audible and visual alarm;

[0167] The position compensation rule includes: adjusting the reverse thrust of the guide wheel according to the position compensation amount, where the reverse thrust is the product of the offset amount at the center of the substrate and the offset coefficient;

[0168] The temperature compensation rule includes: automatically adjusting the distance between the guide rails according to the expansion coefficient;

[0169] The speed adjustment rule includes: when the weight of the substrate is greater than 5 kg and the length is greater than 1 m, reduce the conveying speed to 60% of the default value.

[0170] The storage medium may be a variety of computer-readable storage media such as a USB flash drive, a mobile hard disk, a read-only memory (ROM), a magnetic disk, or an optical disc that can store program codes.

[0171] Those of ordinary skill in the art can realize that the units and algorithm steps of the examples described in combination with the embodiments disclosed herein can be implemented by electronic hardware, computer software, or a combination of the two. To clearly illustrate the interchangeability of hardware and software, the components and steps of the examples have been generally described according to their functions in the above description. Whether these functions are executed in a hardware or software manner depends on the specific application and design constraints of the technical solution. Professional technicians can use different methods to implement the described functions for each specific application, but such implementation should not be considered to exceed the scope of the present invention.

[0172] In several embodiments provided by the present invention, it should be understood that the disclosed apparatus and method can be implemented in other ways. For example, the apparatus embodiments described above are merely illustrative. For example, the division of each unit is only a logical function division, and there may be other division methods in actual implementation. For example, multiple units or components can be combined or integrated into another system, or some features can be ignored or not executed.

[0173] The steps in the method of the embodiments of the present invention can be adjusted in order, combined, and deleted according to actual needs. The units in the device of the embodiments of the present invention can be combined, divided, and deleted according to actual needs. In addition, in each embodiment of the present invention, the functional units can be integrated in a processing unit 302, or each unit can exist physically alone, or two or more units can be integrated in one unit.

[0174] If the integrated unit is implemented in the form of a software functional unit and sold or used as an independent product, it can be stored in a storage medium. Based on such an understanding, the technical solution of the present invention, in essence, or the part that contributes to the prior art, or all or part of the technical solution can be embodied in the form of a software product. The computer software product is stored in a storage medium and includes several instructions for causing a computer device (which can be a personal computer, a terminal, or a network device, etc.) to execute all or part of the steps of the methods described in the embodiments of the present invention.

[0175] As mentioned above, the above are only specific embodiments of the present invention, but the protection scope of the present invention is not limited thereto. Any person skilled in the art within the technical scope disclosed by the present invention can easily think of various equivalent modifications or substitutions, and these modifications or substitutions should all be covered within the protection scope of the present invention. Therefore, the protection scope of the present invention should be subject to the protection scope of the claims.

Claims

1. Method for preventing clamping of vertical furnace plate, characterized in that, Including: When the substrate enters the designated area of the vertical furnace, acquire the data collected by the multi-parameter sensor group to obtain the initial data; Process the initial data to obtain a processing result; According to the processing result, adjust the conveying track speed, the positions of the guide wheels and the guide rails of the vertical furnace through a PID controller.

2. The vertical furnace anti-jamming plate method according to claim 1, characterized in that, The multi-parameter sensor group includes a weighing sensor, a 3D line-scanning camera, a displacement sensor, and an infrared thermal imager. Among them, the weighing sensor and the 3D line-scanning camera are installed at the entrance of the designated area; the displacement sensors are deployed on both sides of the conveying track; the infrared thermal imager is installed at the plate inlet of the vertical furnace.

3. The vertical furnace anti-jamming plate method according to claim 2, characterized in that, The initial data includes the weight, thickness, planar dimensions, offset of the substrate center, and temperature data of the substrate.

4. The vertical furnace anti-jamming plate method according to claim 1, characterized in that The processing of the initial data to obtain a processing result includes: Extract the weight feature, dimension feature, and temperature feature from the initial data, and calculate the expansion coefficient to obtain a processing result.

5. The vertical furnace anti-jamming plate method according to claim 1, characterized in that The adjusting of the conveying track speed, the positions of the guide wheels and the guide rails of the vertical furnace according to the processing result through a PID controller includes: Calculate the speed adjustment amount and the position compensation amount according to the processing result; Adjust the conveying track speed, the positions of the guide wheels and the guide rails of the vertical furnace through a PID controller according to the speed adjustment amount, the position compensation amount, and the setting rules.

6. The vertical furnace anti-jamming plate method according to claim 5, characterized in that, The speed adjustment amount is adopted by calculation, where W is the weight of the substrate; L is the length of the substrate; k1 and k2 are weighting coefficients obtained by linear fitting of historical data; Δv temp is the temperature compensation value calibrated through experiments; V(t) is the speed adjustment amount; The position compensation amount is calculated by Δx = α(T - T0)L rail + βx sensor where α is the thermal expansion coefficient of the guide rail material; x sensor is the offset of the substrate center; Β is the offset weight; Δx is the position compensation amount of the substrate, T is the current temperature; T0 is the predetermined temperature.

7. The vertical furnace anti-jamming plate method according to claim 6, characterized in that The adjusting of the conveying track speed, the positions of the guide wheels and the guide rails of the vertical furnace according to the speed adjustment amount, the position compensation amount, and the setting rules through a PID controller includes: Adjust the conveying track speed, the positions of the guide wheels and the guide rails of the vertical furnace through a PID controller according to the priority levels from high to low of the emergency stop rule, the position compensation rule, the temperature compensation rule, and the speed adjustment rule; Among them, the emergency stop rule includes: when the vibration frequency exceeds 50 Hz and the offset exceeds 2 mm, stop the machine and trigger an audible and visual alarm; The position compensation rule includes: adjust the reverse thrust of the guide wheel according to the position compensation amount, where the reverse thrust is the product of the offset of the substrate center and the offset coefficient; The temperature compensation rule includes: automatically adjust the guide rail spacing according to the expansion coefficient; The speed adjustment rule includes: when the weight of the substrate is greater than 5 kg and the length is greater than 1 m, reduce the conveying speed to 60% of the default value.

8. Vertical furnace anti-jamming plate device, characterized in that, Including: An acquisition unit, configured to acquire the data collected by the multi-parameter sensor group to obtain the initial data when the substrate enters the designated area of the vertical furnace; A processing unit, configured to process the initial data to obtain a processing result; An adjusting unit, configured to adjust the conveying track speed, the positions of the guide wheels and the guide rails of the vertical furnace through a PID controller according to the processing result.

9. A computer device, characterized in that, The computer device includes a memory and a processor. A computer program is stored on the memory. When the processor executes the computer program, the method described in any one of claims 1 to 7 is implemented.

10. A storage medium, characterized in that, The storage medium stores a computer program. When the computer program is executed by a processor, the method described in any one of claims 1 to 7 is implemented.

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