Vacuum furnace diffusion pump cold trap automatic control and regulation refrigeration system

Abstract

The invention discloses a vacuum furnace diffusion pump cold trap automatic control and regulation refrigeration system, and relates to the technical field of refrigeration control and regulation. The vacuum furnace diffusion pump cold trap automatic control and regulation refrigeration system comprises a data acquisition module used for acquiring refrigeration operation data of a to-be-controlled diffusion pump, and a data analysis module used for performing feature analysis on the operation data of the to-be-controlled diffusion pump to obtain an efficiency index set of the to-be-controlled diffusion pump; and the comprehensive control and analysis module is used for comprehensively analyzing the efficiency index set of the diffusion pump to be controlled to obtain the refrigeration regulation and control index of the diffusion pump to be controlled. Intelligent refrigeration control measures are taken for the cold trap of the diffusion pump of the vacuum furnace through the refrigeration regulation and control index in the intelligent control and regulation module; therefore, precise adjustment of the refrigerating system is achieved, the precision of refrigerating temperature control is greatly improved, temperature fluctuation is reduced, and then stable operation of the system is ensured.

Description

Technical Field

[0001] The present invention relates to the technical field of refrigeration control and regulation, and specifically to an automatic control and regulation refrigeration system for the diffusion pump cold trap of a vacuum furnace. Background Art

[0002] With the continuous development of industrial technology, vacuum furnaces, as important high-temperature treatment equipment, are widely used in fields such as materials metallurgy, semiconductor manufacturing, and aerospace. Their core working principle depends on the high-temperature heating process in a vacuum environment, and the stable operation of a vacuum furnace is inseparable from the efficient control and maintenance of the vacuum system. As a key device in the vacuum system, a diffusion pump is mainly responsible for exhausting the gas inside the vacuum furnace through the diffusion of gas to achieve the required vacuum degree. However, the efficient operation of a diffusion pump not only requires precise control of the vacuum degree but also needs to effectively capture steam and gas through a cold trap system to prevent them from flowing back into the vacuum chamber, thereby ensuring the quality and stability of the vacuum environment. Traditional cooling methods for diffusion pumps usually rely on manual adjustment or a control system based on fixed settings to maintain the cooling temperature of the cold trap. However, this control method has some limitations, such as large temperature fluctuations during the cooling process and difficulty in accurately maintaining the optimal working temperature.

[0003] The limitations of the prior art at least include the following problems. It is difficult for the prior art to flexibly adjust the refrigeration power according to the actual operating state, resulting in difficult precise control of the cooling temperature, easy fluctuations, which in turn affect stability and working efficiency, cause energy waste, and make the refrigeration effect unstable. It is difficult to maintain the best state under different working loads, further affecting the operating cost and efficiency of the equipment. Summary of the Invention

[0004] Aiming at the deficiencies of the prior art, the present invention provides an automatic control and regulation refrigeration system for the diffusion pump cold trap of a vacuum furnace, which solves the problems of inaccurate control in the prior art, difficult flexible adjustment of the refrigeration power according to the actual operating state, resulting in fluctuations in the cooling temperature and unstable refrigeration effect, and further affecting the system stability and working efficiency.

[0005] To achieve the above object, the present invention is realized by the following technical solutions: A vacuum furnace diffusion pump cold trap automatic control and regulation refrigeration system, comprising: a data acquisition module for acquiring the refrigeration operation data of the diffusion pump to be controlled, the operation data including compressor operation data, condensation data, and evaporation data; a data analysis module for respectively performing feature analysis on the operation data of the diffusion pump to be controlled to obtain an efficiency index set of the diffusion pump to be controlled, including a compression efficiency index, a condensation efficiency index, and an evaporation efficiency index; a comprehensive control analysis module for comprehensively analyzing the efficiency index set of the diffusion pump to be controlled to obtain a refrigeration regulation index of the diffusion pump to be controlled; and an intelligent control and regulation module for taking intelligent refrigeration control measures based on the refrigeration regulation index of the diffusion pump to be controlled.

[0006] Further, the compressor operation data includes a compressor efficiency index, a compressor pressure deviation index, a compressor oil temperature difference value, and a compressor vibration intensity value, and the specific steps for obtaining the compression efficiency index of the diffusion pump to be controlled are as follows: Obtain the environmental correction index of the diffusion pump to be controlled, and perform normalization processing in combination with the compressor efficiency index, the compressor pressure deviation index, the compressor oil temperature difference value, and the compressor vibration intensity value; comprehensively analyze the environmental correction index, the compressor efficiency index, the compressor pressure deviation index, the compressor oil temperature difference value, and the compressor vibration intensity value of the diffusion pump to be controlled to obtain the compression efficiency index of the diffusion pump to be controlled.

[0007] Further, the specific steps for obtaining the compressor efficiency index of the diffusion pump to be controlled are as follows: Obtain the compressor operation frequency value, the compressor power value, and the compressor load index of the diffusion pump to be controlled, and perform normalization processing; comprehensively analyze the compressor operation frequency value, the compressor power value, and the compressor load index of the diffusion pump to be controlled after normalization processing to obtain the compressor efficiency index of the diffusion pump to be controlled.

[0008] Further, the specific steps for obtaining the environmental correction index of the diffusion pump to be controlled are as follows: Obtain the environmental temperature value, the environmental humidity value, the environmental air pressure value, and the air flow velocity value of the diffusion pump to be controlled, and perform normalization processing; comprehensively analyze the environmental temperature value, the environmental humidity value, the environmental air pressure value, and the air flow velocity value of the diffusion pump to be controlled after normalization processing to obtain the environmental correction index of the diffusion pump to be controlled.

[0009] Further, the condensation data includes a cooling pressure index and a condensation efficiency index, and the specific steps for obtaining the condensation efficiency index of the diffusion pump to be controlled are as follows: Obtain the condensation efficiency correction index of the diffusion pump to be controlled; and comprehensively analyze the condensation efficiency correction index, the cooling pressure index, and the condensation efficiency index of the diffusion pump to be controlled to obtain the condensation efficiency index of the diffusion pump to be controlled.

[0010] Furthermore, the specific steps for obtaining the condensation efficiency correction index of the diffusion pump to be controlled are as follows: obtaining the condensation heat flux density value, condensation operation time value, and condensation flow value of the diffusion pump to be controlled, and performing standardization processing; performing a comprehensive analysis on the condensation heat flux density value, condensation operation time value, and condensation flow value of the diffusion pump to be controlled after the standardization processing to obtain the condensation efficiency correction index of the diffusion pump to be controlled.

[0011] Furthermore, the specific steps for obtaining the evaporation efficiency index of the diffusion pump to be controlled are as follows: standardizing the evaporation data of the diffusion pump to be controlled, the evaporation data including the evaporation temperature difference value, the evaporation flow value, the heat exchange rate value, and the evaporator thermal uniformity index; and comprehensively analyzing the standardized evaporation data of the diffusion pump to be controlled to obtain the evaporation efficiency index of the diffusion pump to be controlled.

[0012] Furthermore, the specific steps of taking intelligent refrigeration control measures based on the refrigeration control index of the diffusion pump to be controlled are as follows: comparing and analyzing the refrigeration control index of the diffusion pump to be controlled with a preset refrigeration control index threshold; if the refrigeration control index of the diffusion pump to be controlled is lower than or equal to the preset refrigeration control index threshold, taking the first refrigeration control measure; if the refrigeration control index of the diffusion pump to be controlled is higher than the preset refrigeration control index threshold, taking the second refrigeration control measure The present invention has the following beneficial effects: (1) The vacuum furnace diffusion pump cold trap automatically controls and adjusts the refrigeration system. Through the cooperation of multiple modules, the refrigeration control index is obtained, thereby providing data support for the intelligent control and adjustment module and realizing precise adjustment of the refrigeration system, thereby greatly improving the accuracy of refrigeration temperature control, reducing temperature fluctuations, ensuring stable operation of the system, and then effectively avoiding the problem of cooling temperature fluctuations, thereby improving the working efficiency of the vacuum furnace diffusion pump and the stability of the equipment, and extending the service life of the equipment.

[0013] (2) The vacuum furnace diffusion pump cold trap automatically controls and adjusts the refrigeration system. Through intelligent data analysis and regulation, it can flexibly adjust the refrigeration power according to the real-time operating status of the diffusion pump, thereby avoiding energy waste. During the operation of the system, accurate analysis of key data such as the compression efficiency index, condensation efficiency index and evaporation efficiency index helps the system to reasonably adjust the refrigeration power according to the actual load demand, improve energy efficiency, and then reduce energy consumption, reduce equipment operation and maintenance costs, and further optimize the system's operational efficiency.

[0014] Of course, any product implementing the present invention does not necessarily need to achieve all of the advantages described above at the same time. BRIEF DESCRIPTION OF THE DRAWINGS

[0015] Figure 1This is a block diagram of an automatic control and regulation refrigeration system for the diffusion pump cold trap of the present invention.

[0016] Figure 2 This is a specific step flowchart for obtaining the compression efficiency index of the diffusion pump to be controlled in the automatic control and regulation refrigeration system of the diffusion pump cold trap of the present invention. Detailed implementation manners

[0017] Please refer to Figure 1 , an embodiment of the present invention provides a technical solution: an automatic control and regulation refrigeration system for the diffusion pump cold trap of a vacuum furnace, including: a data acquisition module, configured to acquire the refrigeration operation data of the diffusion pump to be controlled (i.e., the diffusion pump of the vacuum furnace), and the operation data includes compressor operation data, condensation data, and evaporation data; a data analysis module, configured to perform feature analysis on the operation data of the diffusion pump to be controlled respectively to obtain an efficiency index set of the diffusion pump to be controlled, including a compression efficiency index, a condensation efficiency index, and an evaporation efficiency index; a comprehensive control analysis module, configured to perform comprehensive analysis on the efficiency index set of the diffusion pump to be controlled to obtain a refrigeration regulation index of the diffusion pump to be controlled; and an intelligent control and regulation module, configured to take intelligent refrigeration control measures based on the refrigeration regulation index of the diffusion pump to be controlled.

[0018] Specifically, as Figure 2 shown, the compressor operation data includes a compressor efficiency index, a compressor pressure deviation index, a compressor oil temperature difference value, and a compressor vibration intensity value, and the specific steps for obtaining the compression efficiency index of the diffusion pump to be controlled are as follows: obtain the environmental correction index of the diffusion pump to be controlled, and perform standardization processing in combination with the compressor efficiency index, the compressor pressure deviation index, the compressor oil temperature difference value, and the compressor vibration intensity value; perform comprehensive analysis on the environmental correction index, the compressor efficiency index, the compressor pressure deviation index, the compressor oil temperature difference value, and the compressor vibration intensity value of the diffusion pump to be controlled to obtain the compression efficiency index of the diffusion pump to be controlled.

[0019] Among them, the compressor pressure deviation index is the ratio of the compressor suction pressure and the compressor discharge pressure to the compressor suction reference pressure and the compressor discharge reference pressure, and perform ratio analysis respectively (such as compressor suction pressure / compressor suction reference pressure), and perform weighted processing based on the ratio analysis result, and the obtained result is the compressor pressure deviation index, and both the compressor suction pressure and the compressor discharge pressure can be obtained through a pressure sensor, the compressor suction reference pressure can be obtained by acquiring the compressor suction pressure values at several historical times and performing mean processing, and the compressor discharge reference pressure and the compressor suction reference pressure acquisition logics are the same.

[0020] The compressor oil temperature difference value is the oil temperature difference value between the inlet and outlet of the compressor oil tank, and the compressor oil tank inlet oil temperature value can be obtained through a temperature sensor.

[0021] The compressor vibration intensity value can be obtained through a vibration sensor.

[0022] The specific steps to obtain the compressor efficiency index of the diffusion pump to be controlled are as follows: obtain the compressor operating frequency value, compressor power value, and compressor load index of the diffusion pump to be controlled, and perform normalization processing; comprehensively analyze the normalized compressor operating frequency value, compressor power value, and compressor load index of the diffusion pump to be controlled to obtain the compressor efficiency index of the diffusion pump to be controlled.

[0023] Among them, the compressor operating frequency value can be obtained through the data acquisition interface in the variable frequency drive.

[0024] The compressor power value is the input power value of the compressor, which can be obtained through a power meter.

[0025] The compressor load index is the ratio between the exhaust temperature and the suction temperature of the compressor, and both the exhaust temperature and the suction temperature can be obtained through temperature sensors.

[0026] The specific steps to obtain the environmental correction index of the diffusion pump to be controlled are as follows: obtain the environmental temperature value, environmental humidity value, environmental air pressure value, and air flow velocity value of the diffusion pump to be controlled, and perform standardization processing; comprehensively analyze the standardized environmental temperature value, environmental humidity value, environmental air pressure value, and air flow velocity value of the diffusion pump to be controlled to obtain the environmental correction index of the diffusion pump to be controlled.

[0027] Among them, the environmental temperature value can be obtained through a temperature sensor.

[0028] The environmental humidity value can be obtained through a humidity sensor.

[0029] The environmental air pressure value can be obtained through a pressure sensor.

[0030] The air flow velocity value can be obtained through an anemometer.

[0031] In this implementation scheme, by obtaining and analyzing multiple key parameters in detail, it is possible to comprehensively understand the operating state of the compressor, and use these parameters, combined with the environmental correction index, so that the system can accurately evaluate the working efficiency of the compressor, thereby improving the working efficiency and stability of the refrigeration system, and avoiding the limitation of making judgments based on a single piece of data. Secondly, by integrating the environmental correction index, the system can adaptively adjust the control strategy of the diffusion pump under different external environmental conditions, so that when the external environment changes, the system can timely adjust the operating parameters to ensure the stable operation of the diffusion pump, thereby improving the reliability of the equipment, and avoiding unstable operation or energy waste caused by environmental factors, further improving the economy and long-term stability of the system. Finally, combined with the analysis of the environmental correction index, the system can optimize the working parameters according to the changes in the external environment, improve the overall energy efficiency, thereby reducing the operating cost and reducing energy waste.

[0032] Specifically, the condensation data includes a cooling pressure index and a condensation efficiency index, and the specific steps to obtain the condensation efficiency index of the diffusion pump to be controlled are as follows: obtain the condensation efficiency correction index of the diffusion pump to be controlled; and comprehensively analyze the condensation efficiency correction index, the cooling pressure index, and the condensation efficiency index of the diffusion pump to be controlled to obtain the condensation efficiency index of the diffusion pump to be controlled.

[0033] Among them, the cooling pressure index is the ratio of the working pressure of the condenser to the maximum allowable working pressure. The working pressure of the condenser can be obtained through a pressure sensor, and the maximum allowable working pressure of the condenser can be obtained through the technical specification of the condenser stored in the database.

[0034] The condensation efficiency index is the condensation efficiency when the condenser is working. It can be obtained by obtaining the condenser inlet temperature value, the condenser outlet temperature value, and the condensation medium temperature value, and respectively performing difference analysis (such as the difference between the condenser inlet temperature value and the condensation medium temperature value), and performing ratio analysis, that is, the difference between the condenser inlet temperature value and the condensation medium temperature value / the difference between the condenser outlet temperature value and the condensation medium temperature value. The obtained result is the condensation efficiency index.

[0035] The specific steps to obtain the condensation efficiency correction index of the diffusion pump to be controlled are as follows: obtain the condensation heat flux density value, the condensation operation duration value, and the condensation flow rate value of the diffusion pump to be controlled, and perform standardization processing; comprehensively analyze the standardized condensation heat flux density value, the condensation operation duration value, and the condensation flow rate value of the diffusion pump to be controlled to obtain the condensation efficiency correction index of the diffusion pump to be controlled.

[0036] Among them, the condensation heat flux density reflects the heat exchange intensity of the condensation process per unit area, and it can be obtained through a heat sensor.

[0037] The condensation operation duration value can be obtained from the operation log of the condenser stored in the data.

[0038] The condensation flow rate value can be obtained by a flow sensor.

[0039] In this embodiment, by combining the condensation efficiency correction index, the cooling pressure index, and the condensation efficiency index, comprehensive analysis is performed on the various parameters of the condensation process, so as to accurately evaluate the working efficiency of the condenser, thereby precisely understanding whether the condensation system has reached the optimal working state, and further ensuring the stability and efficiency of the system's refrigeration effect. Secondly, the ratio of the working pressure of the condenser to the maximum allowable working pressure (cooling pressure index) can effectively monitor the working state of the condenser, thereby preventing equipment damage or safety accidents caused by excessive working pressure, and further enhancing the safety of the system. Finally, the calculation of the condensation efficiency index is based on the temperature differences at the inlet and outlet of the condenser and the condensation medium, which can effectively reflect the heat exchange efficiency of the condenser, so as to adjust the condensation system under different operating environments and load conditions to ensure its operation at the highest efficiency, and further achieve energy conservation and reduction of operating costs.

[0040] Specifically, the specific steps to obtain the evaporation efficiency index of the diffusion pump to be controlled are as follows: standardize the evaporation data of the diffusion pump to be controlled, where the evaporation data includes the evaporation temperature difference value, the evaporation flow rate value, the heat exchange rate value, and the evaporator heat uniformity index; and perform comprehensive analysis on the standardized evaporation data of the diffusion pump to be controlled to obtain the evaporation efficiency index of the diffusion pump to be controlled.

[0041] Among them, the evaporation temperature difference value is the difference between the surface temperature of the evaporator and the refrigerant temperature inside the evaporator, and both the surface temperature of the evaporator and the refrigerant temperature inside the evaporator can be obtained by a temperature sensor.

[0042] The evaporation flow rate value is the flow rate of the refrigerant passing through the evaporator per unit time, which can be obtained by a mass flow meter.

[0043] The heat exchange rate value is the rate at which the evaporator absorbs heat from the surrounding environment, which can be obtained by multiplying the heat flux density (which can be obtained by a heat flow meter) and the area of contact between the evaporator and the outside (which can be obtained from the technical specification sheet of the evaporator stored in the database), and the resulting value is the heat exchange rate value.

[0044] The evaporator heat uniformity index is the temperature values at multiple positions on the evaporator, and the average value is processed, and the temperature values at multiple positions can be obtained by a temperature sensor array.

[0045] In this implementation scheme, by standardizing and comprehensively analyzing the evaporation data, the efficiency of the evaporation system can be accurately evaluated, which helps to grasp the working state of the evaporation system in real time and ensure that the system operates at the best efficiency. Secondly, by analyzing the heat exchange rate value and evaporation flow rate of the evaporator, the energy efficiency in the evaporation process can be effectively optimized and unnecessary energy consumption can be reduced. Finally, the introduction of the heat uniformity index of the evaporator can detect whether the temperature distribution inside the evaporator is uniform by monitoring the temperature differences at multiple positions of the evaporator, which can ensure the stability and reliability of the evaporation system and avoid unstable refrigeration effects or equipment damage caused by uneven temperature.

[0046] Specifically, the specific steps of taking intelligent refrigeration control measures based on the refrigeration control index of the diffusion pump to be controlled are as follows: Compare and analyze the refrigeration control index of the diffusion pump to be controlled with the preset refrigeration control index threshold; If the refrigeration control index of the diffusion pump to be controlled is lower than or equal to the preset refrigeration control index threshold, take the first refrigeration control measure, which specifically includes strengthening the cooling capacity (such as increasing the operating power of the cooling system or reducing the condensation pressure to improve the refrigeration efficiency of the refrigeration system), adjusting the operating state of the compressor (increasing the load of the compressor or raising the operating frequency of the compressor to improve its refrigeration efficiency), and optimizing the environmental parameters (correcting the index according to the real-time environment and adjusting the response of the cooling system to environmental factors to ensure the refrigeration effect); If the refrigeration control index of the diffusion pump to be controlled is higher than the preset refrigeration control index threshold, take the second refrigeration control measure, which specifically includes reducing the cooling power (reducing the refrigeration capacity of the cooling system, reducing the load of the compressor or adjusting the condensation pressure to avoid energy waste caused by excessive cooling), reducing the compressor operating frequency (reducing the load of the compressor or reducing its operating frequency to reduce energy consumption and system pressure), and optimizing the cooling cycle (such as adjusting the ratio of the condensation pressure to the evaporation pressure to reduce the excessively high condensation temperature and evaporation temperature to keep the temperature stable within a reasonable range).

[0047] In this implementation scheme, by real-time monitoring and adjusting the cooling capacity and the operating state of the compressor according to the refrigeration control index of the diffusion pump, the working state of the refrigeration system can be flexibly adjusted under different working loads and environmental conditions, which ensures the stable operation of the system, adjusts the cooling power and the compressor load according to the actual demand, and thus avoids temperature fluctuations, improves the efficiency and operating stability of the system. Through intelligent control and comparing the refrigeration control index with the threshold, the system can accurately judge whether it is necessary to increase or decrease the refrigeration capacity, effectively avoiding unnecessary energy waste.

[0048] Although the preferred embodiments of the present invention have been described, additional changes and modifications can be made to these embodiments by those skilled in the art once they learn the basic inventive concept. Therefore, the appended claims are intended to be construed to include the preferred embodiments as well as all changes and modifications that fall within the scope of the present invention.

[0049] Obviously, those skilled in the art can make various changes and modifications to the present invention without departing from the spirit and scope of the present invention. Thus, if these modifications and variations of the present invention fall within the scope of the claims of the present invention and their equivalent technologies, the present invention is also intended to include these modifications and variations.

Claims

1. An automatic control and regulation refrigeration system for the diffusion pump cold trap of a vacuum furnace, characterized in that, Including: A data acquisition module for acquiring the refrigeration operation data of the diffusion pump to be controlled, where the operation data includes compressor operation data, condensation data, and evaporation data; A data analysis module for performing feature analysis on the operation data of the diffusion pump to be controlled respectively, to obtain an efficiency index set of the diffusion pump to be controlled, including a compression efficiency index, a condensation efficiency index, and an evaporation efficiency index; A comprehensive control analysis module for comprehensively analyzing the efficiency index set of the diffusion pump to be controlled to obtain a refrigeration regulation index of the diffusion pump to be controlled; An intelligent control adjustment module for taking intelligent refrigeration control measures based on the refrigeration regulation index of the diffusion pump to be controlled.

2. The automatic control and adjustment refrigeration system for the diffusion pump cold trap of the vacuum furnace according to claim 1, wherein The compressor operation data includes a compressor efficiency index, a compressor pressure deviation index, a compressor oil temperature difference value, and a compressor vibration intensity value, and the specific steps for obtaining the compression efficiency index of the diffusion pump to be controlled are as follows: Obtain the environmental correction index of the diffusion pump to be controlled, and perform standardization processing in combination with the compressor efficiency index, the compressor pressure deviation index, the compressor oil temperature difference value, and the compressor vibration intensity value; Perform comprehensive analysis on the environmental correction index, the compressor efficiency index, the compressor pressure deviation index, the compressor oil temperature difference value, and the compressor vibration intensity value of the diffusion pump to be controlled to obtain the compression efficiency index of the diffusion pump to be controlled.

3. The automatic control and regulation refrigeration system for the diffusion pump cold trap of the vacuum furnace according to claim 2, wherein The specific steps for obtaining the compressor efficiency index of the diffusion pump to be controlled are as follows: Obtain the compressor operation frequency value, the compressor power value, and the compressor load index of the diffusion pump to be controlled, and perform normalization processing; Perform comprehensive analysis on the normalized compressor operation frequency value, the compressor power value, and the compressor load index of the diffusion pump to be controlled to obtain the compressor efficiency index of the diffusion pump to be controlled.

4. The automatic control and regulation refrigeration system for the diffusion pump cold trap of the vacuum furnace according to claim 2, characterized in that, The specific steps for obtaining the environmental correction index of the diffusion pump to be controlled are as follows: Obtain the environmental temperature value, the environmental humidity value, the environmental air pressure value, and the air flow velocity value of the diffusion pump to be controlled, and perform standardization processing; Perform comprehensive analysis on the standardized environmental temperature value, the environmental humidity value, the environmental air pressure value, and the air flow velocity value of the diffusion pump to be controlled to obtain the environmental correction index of the diffusion pump to be controlled.

5. The automatic control and regulation refrigeration system of the diffusion pump cold trap of the vacuum furnace according to claim 1, wherein The condensation data includes a cooling pressure index and a condensation efficiency index, and the specific steps for obtaining the condensation efficiency index of the diffusion pump to be controlled are as follows: Obtain the condensation efficiency correction index of the diffusion pump to be controlled; And perform comprehensive analysis on the condensation efficiency correction index, the cooling pressure index, and the condensation efficiency index of the diffusion pump to be controlled to obtain the condensation efficiency index of the diffusion pump to be controlled.

6. The automatic control and regulation refrigeration system of the diffusion pump cold trap of the vacuum furnace according to claim 5, characterized in that, The specific steps for obtaining the condensation efficiency correction index of the diffusion pump to be controlled are as follows: Obtain the condensation heat flux density value, the condensation operation duration value, and the condensation flow rate value of the diffusion pump to be controlled, and perform standardization processing; Perform comprehensive analysis on the standardized condensation heat flux density value, the condensation operation duration value, and the condensation flow rate value of the diffusion pump to be controlled to obtain the condensation efficiency correction index of the diffusion pump to be controlled.

7. The automatic control and regulation refrigeration system of the diffusion pump cold trap of the vacuum furnace according to claim 1, characterized in that, The specific steps for obtaining the evaporation efficiency index of the diffusion pump to be controlled are as follows: Standardize the evaporation data of the diffusion pump to be controlled, where the evaporation data includes evaporation temperature difference value, evaporation flow rate value, heat exchange rate value, and evaporator heat uniformity index; And comprehensively analyze the standardized evaporation data of the diffusion pump to be controlled to obtain the evaporation efficiency index of the diffusion pump to be controlled.

8. The automatic control and regulation refrigeration system of the diffusion pump cold trap of the vacuum furnace according to claim 1, wherein The specific steps for taking intelligent refrigeration control measures based on the refrigeration regulation index of the diffusion pump to be controlled are as follows: Compare and analyze the refrigeration regulation index of the diffusion pump to be controlled with the preset refrigeration regulation index threshold; If the refrigeration regulation index of the diffusion pump to be controlled is lower than or equal to the preset refrigeration regulation index threshold, then take the first refrigeration control measure; If the refrigeration regulation index of the diffusion pump to be controlled is higher than the preset refrigeration regulation index threshold, then take the second refrigeration control measure.

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