Lifting bearing device and detection equipment

Abstract

The invention discloses a lifting bearing device and detection equipment, the lifting bearing device comprises a bearing assembly and a lifting driving assembly, the lifting driving assembly comprises a linear driving piece, a first linear piece and a second linear piece, and the second linear piece is provided with at least three motion guide parts; the at least three bearing parts are slidably connected with the at least three movement guiding parts in a one-to-one correspondence mode. The lifting bearing device can install the power source in the vacuum detection cavity, and connecting structures such as pipelines for connecting the inside and the outside of the vacuum detection cavity can be omitted, so that the lifting bearing device can be easily arranged on a motion platform in the vacuum detection cavity, and the lifting bearing of a wafer to be detected is realized; moreover, due to the fact that movement of connecting structures such as staggered avoiding pipelines does not need to be arranged, the lifting bearing device and other mechanisms can be fused to be at the same height, mechanism stacking is reduced, and occupied space is more compact.

Description

Technical Field

[0001] The present invention relates to the field of detection technology, and particularly relates to a lifting and bearing device and a detection device. Background Art

[0002] Currently, in the semiconductor industry, during the transfer of wafers, when the process position receives the wafers transferred by the robot in the EFEM chamber, a lifting and bearing member is often required to catch the wafers transferred by the robot, and at the same time, it is lifted to a certain height so that the robot fingers can be disengaged from the wafers. During the process, the bearing member needs to be lowered by a certain height to place the wafers on the chuck at the process position.

[0003] However, for the current lifting and bearing member structure, in the case where the process position is a fixed position, the handling situation is relatively simple. However, for the case where the process position is placed on an x-y moving platform, it is relatively troublesome to implement. Summary of the Invention

[0004] The present invention provides a lifting and bearing device and a detection device, which are used to solve the problem that it is difficult to implement the lifting and bearing device when the process position is placed on an x-y moving platform.

[0005] In one embodiment, a lifting and bearing device is provided, including:

[0006] A bearing assembly, including at least three bearing members having bearing ends, the bearing ends of at least three of the bearing members being located in a plane, and the bearing ends of at least three of the bearing members being used to jointly bear a workpiece to be measured; and

[0007] A lifting drive assembly, including a linear drive member, a first linear moving member, and a second linear moving member connected in sequence. The second linear moving member is provided with at least three movement guiding portions, and at least three of the bearing members are slidably connected to at least three of the movement guiding portions in a one-to-one correspondence; when lifting is driven, the linear drive member drives the first linear moving member to move linearly, the first linear moving member drives the second linear moving member to move linearly synchronously, and at least three movement guiding portions of the second linear moving member drive at least three of the bearing members to rise or fall synchronously.

[0008] In one embodiment, the first linear moving member has at least three linear racks, the second linear moving member includes at least three sliders, the sliders are provided with the movement guiding portions, and at least three of the linear racks are connected to at least three of the sliders in a one-to-one correspondence; the linear drive member is used to drive at least three of the linear racks to move linearly synchronously.

[0009] In one embodiment, at least three of the linear racks are spaced apart on the same circumference and tangent to the circumference; one of the at least three linear racks is connected to the linear driving member, and the at least three linear racks are connected to each other through intermediate gears.

[0010] In one embodiment, the vertical side surface of the slider is provided with the movement guiding portion.

[0011] In one embodiment, the lifting driving assembly further includes a base, and the slider is slidably connected to the base.

[0012] In one embodiment, the movement guiding portion is a guiding groove or a guiding hole located in a vertical plane, the guiding groove or the guiding hole is a parabolic or arc structure, the movement guiding portion includes a first end and a second end, and in the vertical direction, the first end is higher than the second end; when the carrier slides to the first end, the carrier is at the highest position, and when the carrier slides to the second end, the carrier is at the lowest position.

[0013] In one embodiment, a cam follower is installed at one end of the carrier away from the carrying end, and the carrier is slidably connected to the movement guiding portion through the cam follower.

[0014] In one embodiment, the lifting and carrying device further includes at least three carrying mounting frames, at least three carrying mounting frames are connected to at least three of the carriers in one-to-one correspondence, and the carriers are liftably installed on the carrying mounting frames.

[0015] In one embodiment, the carrying mounting frame is provided with a guiding and limiting member, the guiding and limiting member has a lifting limiting channel, a part of the carrier is located in the lifting limiting channel, and the carrier moves up and down along the lifting limiting channel.

[0016] In one embodiment, the guiding and limiting member includes a plurality of rollers distributed on two vertical lines, an lifting limiting channel is formed between the plurality of rollers, and the carrier is in rolling connection with the rollers.

[0017] In one embodiment, the carrying mounting frame includes a first carrying mounting frame and a second carrying mounting frame, the first carrying mounting frame is vertically arranged outside the enclosed area of the lifting driving assembly, the second carrying mounting frame is horizontally arranged, one end of the second carrying mounting frame is connected to the upper end of the first carrying mounting frame, and the end of the second carrying mounting frame away from the first carrying mounting frame extends to the inside of the enclosed area of the lifting driving assembly; the first carrying mounting frame is provided with the guiding and limiting member, and the end of the second carrying mounting frame away from the first carrying mounting frame is provided with a mounting hole, and the carrier passes through the mounting hole.

[0018] In one embodiment, the carrier includes a first carrier rod, a second carrier rod, and a third carrier rod connected in sequence. The first carrier rod and the third carrier rod are vertically arranged, the second carrier rod is horizontally or obliquely arranged, a part of the first carrier rod is inserted into the lifting limit channel, and a part of the third carrier rod is inserted into the mounting hole.

[0019] In one embodiment, a detection device is provided, including:

[0020] A box body having a vacuum detection cavity;

[0021] A moving platform disposed in the vacuum detection cavity;

[0022] The above-mentioned lifting and carrying device disposed in the vacuum detection cavity, the elevator is disposed on the moving platform, and the moving platform is used to drive the lifting and carrying device to move.

[0023] According to the lifting and carrying device and the detection device of the above embodiment, since the lifting drive assembly of the lifting and carrying device includes a linear drive member, a first linear moving member, and a second linear moving member, the linear drive member can drive at least three movement guiding portions of the second linear moving member to move linearly synchronously through the first linear moving member, so as to drive at least three carrier members to rise or fall synchronously; the lifting drive assembly adopts a linear transmission drive of a mechanical structure, so that the lifting and carrying device can be integrally installed in the vacuum detection cavity of the detection device, that is, the power source of this structure of the lifting and carrying device can be installed in the vacuum detection cavity, and the connection structures such as pipes connecting inside and outside the vacuum detection cavity can be omitted. Therefore, the present lifting and carrying device can be more easily arranged on the moving platform in the vacuum detection cavity to realize the lifting and carrying of the wafer to be measured; and, since there is no need to set up a moving structure for staggering and avoiding connection structures such as pipes, the lifting and carrying device can be integrated with other mechanisms at the same height, reducing the stacking of mechanisms and making the space occupation more compact. Description of the Drawings

[0024] Figure 1 It is a schematic structural diagram of a lifting and carrying device in one embodiment;

[0025] Figure 2 It is a schematic structural diagram of a second linear moving member in one embodiment;

[0026] Figure 3 It is a schematic structural diagram of a carrier assembly in one embodiment;

[0027] Figure 4 It is a schematic structural diagram of a detection device in one embodiment;

[0028] Wherein the reference numerals are as follows:

[0029] 1 - Load - bearing component, 11 - Load - bearing piece, 111 - First load - bearing rod, 112 - Second load - bearing rod, 113 - Third load - bearing rod, 12 - Cam follower, 13 - Load - bearing mounting bracket, 131 - First load - bearing mounting bracket, 132 - Second load - bearing mounting bracket, 14 - Guide and limit component;

[0030] 2 - Lifting drive component, 21 - Linear drive piece, 22 - First linear moving piece, 221 - Linear rack, 222 - Intermediate gear, 23 - Second linear moving piece, 231 - Movement guiding part, 2311 - First end, 2312 - Second end;

[0031] 3 - Base;

[0032] 100 - Box body, 200 - Moving platform, 300 - Lifting and load - bearing device. Specific embodiments

[0033] In the prior art, since the power source of the lifting and load - bearing device is arranged outside the vacuum environment, the power source is connected to the lifting and load - bearing device through connection structures such as pipes. For example, the driving part of the lifting structure is a cylinder, and the driving air source of the cylinder is located outside the device. When the lifting and load - bearing device is installed on a fixed platform, the above - mentioned structural layout can be realized; however, when the lifting and load - bearing device is installed on a moving platform, the connection structures such as pipes connecting the inside and outside will also move accordingly, which will easily cause problems such as entanglement of internal components of the device, and further lead to difficulties in the layout of the lifting and load - bearing device.

[0034] Based on the above analysis, the present application proposes a new lifting and load - bearing device. The lifting and load - bearing device adopts a mechanical motor drive, and the power source is integrated into the lifting and load - bearing device, so that the lifting and load - bearing device and its power source can be installed on the moving platform together, that is, the entire lifting and load - bearing device is installed in the vacuum environment inside the device. With such a setting, connection structures such as pipes connecting the inside and outside can be omitted, and it is easy to realize the layout of the lifting and load - bearing device; moreover, since there is no need to set up structures to stagger and avoid the movement of connection structures such as pipes, the lifting and load - bearing device can be integrated with other mechanisms at the same height, reducing the stacking of mechanisms and making the space occupation more compact.

[0035] The present invention will be further described in detail below in conjunction with the accompanying drawings through specific embodiments. Similar elements in different embodiments are labeled with related similar element numbers. In the following embodiments, many detailed descriptions are provided to enable a better understanding of the present application. However, those skilled in the art can easily recognize that some of the features can be omitted in different situations, or can be replaced by other elements, materials, or methods. In some cases, some operations related to the present application are not shown or described in the specification to avoid overwhelming the core part of the present application with excessive descriptions. For those skilled in the art, it is not necessary to describe these related operations in detail, and they can fully understand the related operations based on the descriptions in the specification and the general technical knowledge in the field.

[0036] In addition, the features, operations, or characteristics described in the specification can be combined in any appropriate manner to form various embodiments. At the same time, the steps or actions in the method description can also be reordered or adjusted in an obvious manner by those skilled in the art. Therefore, the various sequences in the specification and the drawings are only for clearly describing a certain embodiment and do not mean that they are the necessary sequences, unless it is stated that a certain sequence must be followed.

[0037] The serial numbers assigned to the components herein, such as "first", "second", etc., are only used to distinguish the described objects and do not have any sequential or technical meaning. And the "connection" and "coupling" mentioned in the present application, unless otherwise specified, both include direct and indirect connection (coupling).

[0038] Surface inspection: The surface of the workpiece to be measured is imaged through an imaging system, and corresponding algorithms are used for analysis, so as to detect defects on the surface of the workpiece to be measured. In semiconductor production, the workpiece to be measured can include wafers, and it is necessary to detect surface defects on the front side of the wafers. In some cases, the inspection of wafers needs to be carried out in a vacuum environment, and a corresponding loading device is also required for support and fixation. When the manipulator places the wafer on the loading device, the loading device needs to be lifted to transfer the wafer from the manipulator to the loading device. To meet the positioning requirements of the wafers, the loading device needs to be set as a moving platform along the x-y axis, and the lifting loading device will move together with the moving platform. Therefore, the entire lifting loading device needs to be installed on the moving platform in the vacuum environment to achieve the layout and compact stacking of the lifting loading device.

[0039] In one embodiment, a lifting and bearing device is provided. This lifting and bearing device is a mechanism for lifting and bearing wafers in a detection device. When rising, it can receive wafers from a manipulator and provide temporary support, and when descending, it can make the wafers fall smoothly onto a bearing platform (also known as a CHUCK). This lifting and bearing device uses a motor and mechanical transmission to drive multiple bearing components to lift simultaneously, so that the power source and corresponding transmission mechanism of the lifting and bearing device can be integrated together and installed on a moving platform in a vacuum environment, thus facilitating the layout of the lifting and bearing device. Moreover, since there is no need to set up moving connection structures such as staggered avoidance pipes, the lifting and bearing device can be integrated with other mechanisms at the same height, reducing mechanism stacking and making the space occupation more compact.

[0040] Please refer to Figures 1 to 3 , the lifting and bearing device of this embodiment mainly includes a bearing component 1 and a lifting drive component 2. The lifting and bearing device may also include a base 3. The bearing component 1 is installed on the base 3 in a liftable manner, and the lifting drive component 2 is installed on the base 3. The lifting and bearing device may also not include the base 3, and the bearing component 1 and the lifting drive component 2 may also be installed on a moving platform.

[0041] In this embodiment, the bearing component 1 includes at least three bearing members 11, preferably three bearing members 11. The three bearing members 11 are vertically distributed at the three vertices of an equilateral triangle, and the three vertices can form a bearing surface, which can avoid overconstraint. The bearing member 11 is in a rod-like structure. One end of the bearing member 11 is a bearing end, and the bearing end is used to bear and abut against wafers and other components to be measured. The bearing ends of the three bearing members 11 form three points, and the three points are located in a horizontal plane to jointly achieve the bearing of horizontally placed wafers. In other embodiments, the bearing component 1 may also include four bearing members 11 or other numbers of bearing members 11. The four bearing members 11 are vertically distributed at the four vertices of a square, and can also achieve the bearing of wafers.

[0042] In this embodiment, a PIN needle ejector rod or other flexible structure terminals may be installed at the bearing end of the bearing member 11, so that the bearing end of the bearing member 11 is in flexible contact with the wafer, which can avoid scratching the wafer when the bearing member 11 bears and lifts the wafer.

[0043] The lifting drive component 2 is connected to at least three bearing members 11, that is, the lifting drive component 2 is connected to all the bearing members 11. The lifting drive component 2 is used to drive all the bearing members 11 to rise or fall simultaneously. All the bearing members 11 are connected to the lifting drive component 2, which can achieve the synchronous rise or fall of all the bearing members 11, and thus lift the wafers and other components to be measured more smoothly up or down.

[0044] The base 3 may include at least three, and the number of the bases 3 is the same as the number of the sliders. One slider is installed on one base 3. The base 3 is provided with a linear guide rail or guide groove, and the slider is slidably connected to the guide rail or guide groove. The base 3 may also be an integral structure, and all the sliders are installed on one base 3.

[0045] The load-bearing assembly 1 further includes at least three load-bearing mounting brackets 13. The number of the load-bearing mounting brackets 13 is the same as the number of the load-bearing members 11. One load-bearing mounting bracket 13 is used to mount one load-bearing member 11. The lower end of the load-bearing mounting bracket 13 can be fixed to the base 3 by means of screw connection, welding, snap connection, etc. The load-bearing mounting bracket 13 and the base 3 may also be an integral structure. The load-bearing member 11 is liftably installed on the load-bearing mounting bracket 13. The load-bearing mounting bracket 13 is used to limit the degree of freedom of the load-bearing member 11 moving in the horizontal plane, so that when the cam follower 12 on the load-bearing member 11 slides relative to the movement guiding portion 231, the load-bearing member 11 cannot move linearly along with the lifting drive assembly 2 and can only move up and down relative to the load-bearing mounting bracket 13.

[0046] In this embodiment, the lifting drive assembly 2 includes a linear drive member 21, a first linear motion member 22 and a second linear motion member 23 which are connected in sequence. The lifting drive assembly 2 adopts a linear drive mode to drive at least three load-bearing members 11 to rise or fall.

[0047] The linear drive member 21 may be a linear drive source such as a linear motor. The linear drive member 21 has an output shaft, and the output shaft moves axially in a telescopic manner. The linear drive member 21 may also include a rotary motor and a transmission mechanism. The transmission mechanism includes structures such as a screw rod and a slider. The rotary motor is connected to the screw rod, and the screw rod is connected to the slider through a thread. The transmission mechanism can convert the rotary pair output by the rotary motor into a linear pair.

[0048] The first linear motion member 22 may include at least three linear racks 221. The number of the linear racks 221 is the same as the number of the load-bearing members 11.

[0049] As Figure 1 shown, there are three load-bearing members 11, three corresponding linear racks 221, and three second linear motion members 23. The number of the second linear motion members 23 is the same as the number of the load-bearing members 11. The second linear motion member 23 may be a block structure such as a slider. The base 3 is provided with a linear slide rail or slide groove. The bottom of the slider is provided with a sliding portion connected to the base 3. The sliding portion may be a groove or a protrusion. The block structure such as the slider is slidably installed on the base 3. The linear rack 221 and the slider can be fixedly connected by means of screws, welding, etc. The guide rail direction of the base 3 is parallel to the length direction of the linear rack.

[0050] The slider has a vertical outer side surface, which is the circumferential outer side surface of the surrounding area of the lifting drive assembly 2, that is, the outer side surface is the circumferential outer side surface of the three second linear motion members 23 located on the same circumference. A motion guiding portion 231 is provided on the outer side surface of the second linear motion member 23. The cam follower 12 at the lower end of the carrier 11 is slidably connected to the motion guiding portion 231 in the plane. The linear movement of the second linear motion member 23 can drive the cam follower 12 to slide within the motion guiding portion 231, thereby driving the carrier 11 to rise or fall.

[0051] The three linear racks 221 are spaced apart on the same circumference and are tangent to the circumference. The three linear racks 221 can be distributed at different height positions on the same circumference so as to be staggered from each other in space. When the three linear racks 221 do not interfere with each other, they can be arranged in the same plane. In other words, the three linear racks 221 can be set at different height positions according to whether they interfere with each other.

[0052] The three linear racks 221 are connected by idler gears 222. The three linear racks 221 are sequentially connected by two idler gears 222. A linear drive member 21 is connected to one end of a linear rack 221, and can simultaneously drive the three linear racks 221 to linearly move, thereby driving the three second linear motion members 23 to linearly move.

[0053] In other embodiments, each of the three linear racks 221 can also be connected to a linear drive member 21. The three linear drive members 21 respectively drive the three linear racks 221 to linearly move, and can also simultaneously drive the three carriers 11 to rise or fall.

[0054] In this embodiment, the motion guiding portion 231 is a long strip-shaped guiding groove or guiding hole located in a vertical plane. The guiding groove or guiding hole can be a parabolic or arc-shaped structure. The motion guiding portion 231 includes a first end 2311 and a second end 2312. In the vertical direction, the first end 2311 is higher than the second end 2312, that is, the first end 2311 is the highest end and the second end 2312 is the lowest end. There is a smoothly transitioning parabolic or arc-shaped structure between the first end 2311 and the second end 2312. A cam follower 12 is installed at the lower end (the end far from the loading end) of the carrier 11. The cam follower 12 is a pulley installed at the lower end of the carrier 11. The diameter of the cam follower 12 is adapted to the width of the motion guiding portion 231. The cam follower 12 is slidably installed within the motion guiding portion 231. The motion guiding portion 231 is on the vertical side surface. The motion guiding portion 231 has an upper inner side surface and a lower inner side surface. The cam follower 12 contacts the upper inner side surface and the lower inner side surface of the motion guiding portion 231. The cam follower 12 can roll along the upper inner side surface and the lower inner side surface of the motion guiding portion 231, thereby driving the carrier 11 to rise or fall.

[0055] Wherein, the first end 2311 and the second end 2312 of the movement guiding part 231 can be set as horizontal grooves, so that when the cam follower 12 slides to the first end 2311 or the second end 2312, it can be in a relatively stable state, which can avoid the accidental sliding of the cam follower 12 relative to the movement guiding part 231. In other words, the stability of the carrier 11 at the highest position and the lowest position can be improved.

[0056] In this embodiment, the first carrier mounting frame 131 of the carrier mounting frame 13 is arranged outside the enclosed area of the three second linear motion parts 23, and one end of the second carrier mounting frame 132 extends to the inside of the enclosed area of the three second linear motion parts 23. With such an arrangement, the bearing ends of the three carriers 11 can also be set to be closer to each other, forming a smaller bearing surface, which can be used to carry smaller-sized wafers and other components to be measured; and the first carrier mounting frame 131 is located outside the enclosed area of the three second linear motion parts 23, which can avoid interfering with the components within the enclosed area of the three second linear motion parts 23.

[0057] In this embodiment, the lifting drive principle of the lifting and carrying device is as follows:

[0058] When the carrier 11 rises: the linear drive part 21 extends to drive a linear rack 221 to move linearly, and a linear rack 221 drives the other two linear racks 221 to move linearly along their respective lengths through the intermediate gear 222. The three linear racks 221 drive the three second linear motion parts 23 to move linearly, and then drive the three movement guiding parts 231 to move linearly at the same time. The three movement guiding parts 231 respectively drive the three cam followers 12 to roll, and then drive the three carriers 11 to rise synchronously.

[0059] When the carrier 11 descends: the linear drive part 21 retracts to drive a linear rack 221 to move linearly in the reverse direction, which can realize driving the three carriers 11 to descend synchronously.

[0060] In the lifting and bearing device of this embodiment, since the lifting drive assembly 2 includes a linear drive member 21, a first linear motion member 22, and a second linear motion member 23, the linear drive member 21 can drive at least three second linear motion members 23 to move linearly synchronously through the first linear motion member 22, so as to drive at least three bearing members 11 to rise or fall synchronously; the lifting drive assembly 2 adopts a linear drive of a mechanical structure, so that the lifting and bearing device can be installed as a whole in the vacuum detection cavity of the detection device, that is, the power source of the lifting and bearing device with this structure can be installed in the vacuum detection cavity, and the connection structures such as pipes connecting inside and outside the vacuum detection cavity can be omitted. Therefore, this lifting and bearing device can be more easily arranged on the moving platform in the vacuum detection cavity to realize the lifting and bearing of the wafer to be measured; moreover, since there is no need to set the movement of staggering and avoiding connection structures such as pipes, the lifting and bearing device and other mechanisms can be integrated at the same height, reducing the stacking of mechanisms and making the space occupation more compact.

[0061] Please refer to Figure 1 , in one embodiment, on the inner side of the bearing mounting frame 13 facing the area enclosed by the lifting drive assembly 2, a guiding and limiting member 14 is provided. The guiding and limiting member 14 has a lifting limiting channel. The guiding and limiting member 14 can include four or other numbers of rollers. The multiple rollers are arranged in two vertical columns on two vertical straight lines, and a vertical lifting limiting channel is formed between the multiple rollers in the two vertical columns. The bearing member 11 is installed in the lifting limiting channel between the four rollers in the two vertical columns. The four rollers limit the bearing member 11. The two sides of the bearing member 11 in the vertical direction are in rolling connection with the rollers. The bearing member 11 cannot move left and right and back and forth relative to the bearing mounting frame 13, and the bearing member 11 can rise or fall along the rollers. The guiding and limiting member 14 is set as a roller structure, which can not only play a role in limiting and guiding, but also reduce the friction with the bearing member 11, and can avoid the influence of guiding on the rising or falling of the bearing member 11.

[0062] In other embodiments, the guiding and limiting member 14 can also be a guiding cylinder, and the bearing member 11 is installed in the guiding cylinder, which can also realize the lifting guidance of the bearing member 11.

[0063] Please refer to Figure 3, in one embodiment, the carrier mounting bracket 13 can be an inverted L-shaped structure. The carrier mounting bracket 13 includes a first carrier mounting bracket 131 and a second carrier mounting bracket 132. The first carrier mounting bracket 131 and the second carrier mounting bracket 132 can be rod-shaped or block-shaped structures. The first carrier mounting bracket 131 is vertically mounted on the base 3, and the guiding and limiting member 14 is disposed on the vertical side surface of the first carrier mounting bracket 131. The second carrier mounting bracket 132 is horizontally disposed. One end of the second carrier mounting bracket 132 is fixedly connected to the first carrier mounting bracket 131, and the other end of the second carrier mounting bracket 132 extends above the inner side of the ring body. A vertical mounting hole is further provided at the other end of the second carrier mounting bracket 132.

[0064] The carrier 11 is a Z-shaped structure. The carrier 11 includes a first carrier rod 111, a second carrier rod 112, and a third carrier rod 113. The first carrier rod 111, the second carrier rod 112, and the third carrier rod 113 are connected in sequence. The first carrier rod 111 and the third carrier rod 113 are vertically disposed, and the second carrier rod 112 is horizontally disposed. A cam follower 12 is provided at the lower end of the first carrier rod 111. The first carrier rod 111 is parallel to the first carrier mounting bracket 131, and the first carrier rod 111 is slidably connected to the guiding and limiting member 14 on the first carrier mounting bracket 131. The second carrier rod 112 is horizontally disposed below the second carrier mounting bracket 132 in parallel. The third carrier rod 113 passes through the mounting hole of the second carrier mounting bracket 132. The upper end of the third carrier rod 113 is the carrier end of the carrier 11. The mounting hole of the second carrier mounting bracket 132 can also play a role in limiting and guiding the carrier 11. Among them, the second carrier rod 112 can also be inclined, as long as the first carrier rod 111 and the third carrier rod 113 are vertically disposed, and the vertical lifting movement of the carrier 11 can also be realized.

[0065] The first carrier rod 111, the second carrier rod 112, and the third carrier rod 113 can be formed by bending a rod twice perpendicularly, or the first carrier rod 111, the second carrier rod 112, and the third carrier rod 113 can be fixedly connected by means of screw connection, welding, etc.

[0066] The carrier 11 is set as a Z-shaped structure, and the carrier mounting bracket 13 is set as an inverted L-shaped structure. The lower end of the carrier mounting bracket 13 is located on the first circumference, and the upper end of the carrier mounting bracket 13 is located on the second circumference. The first circumference is larger than the second circumference, so that the lower ends of the three carriers 11 are fixed to the outside of the lifting drive assembly 2, and the carrier ends of the three carriers 11 are located above the inside of the lifting drive assembly 2. The carrier 11 can avoid the installation of components such as the lifting drive assembly 2, and can also realize the loading of smaller-sized wafers and other workpieces to be measured.

[0067] In other embodiments, the carrier 11 and the carrier mounting frame 13 may also be configured as a vertical rod-shaped structure, with the carrying ends of the three carriers 11 located within a larger circumference to carry larger wafers waiting to be tested.

[0068] Please refer to Figure 4 In one embodiment, a detection device is provided, which can be a wafer surface defect detection device.

[0069] In this embodiment, the detection device includes a box 100, a motion platform 200, and the lifting and carrying device 300 in any of the above embodiments. The detection device may also be provided with a carrying mechanism, an imaging mechanism, a manipulator, and other mechanisms.

[0070] The box 100 has a vacuum detection chamber, and other mechanisms such as the motion platform 200 and the lifting and carrying device 300 are installed in the vacuum detection chamber of the box 100. The wafer waiting to be tested is tested in a vacuum environment to improve the accuracy of the test.

[0071] The motion platform 200 can perform planar motion translation along the XY axis. The lifting and carrying device 300 is integrally fixedly mounted on the motion platform 200 , and the lifting and carrying device 300 can move along with the motion platform 200 .

[0072] In this embodiment, the principle process of wafer transfer detection of the lifting and carrying device 300 is as follows:

[0073] The robot first transfers the wafer to be tested to the top of the carrier and stops it;

[0074] The carrier 11 of the lifting and carrying device 300 passes through the carrying mechanism and rises to receive the wafer, and the robot arm then withdraws;

[0075] The carrier 11 of the lifting and carrying device 300 descends to transfer the wafer to the carrying surface of the carrying mechanism and separates from the wafer;

[0076] The carrier mechanism opens the vacuum adsorption and other fixing structures to fix the wafer on the carrier surface, thus completing the fixation of the wafer;

[0077] The imaging mechanism takes photos and detects the wafer fixed on the carrying mechanism.

[0078] Before the imaging mechanism takes pictures for detection, the motion platform 200 can also be used to drive the wafer plane to move to an accurate detection area.

[0079] In this embodiment, the lifting and bearing device 300 adopts a linear drive of a mechanical structure, so that the lifting and bearing device 300 can be installed as a whole in the vacuum detection cavity of the detection device. That is, the power source of the lifting and bearing device 300 with this structure can be installed in the vacuum detection cavity, and the connection structures such as pipes connecting inside and outside the vacuum detection cavity can be omitted. Therefore, the lifting and bearing device 300 can be more easily arranged on the moving platform in the vacuum detection cavity to realize the lifting and bearing of the wafer to be measured; moreover, since there is no need to set the movement of staggering and avoiding connection structures such as pipes, the lifting and bearing device can be integrated with other mechanisms at the same height, reducing the stacking of mechanisms and making the space occupation more compact.

[0080] The above uses specific examples to elaborate on the present invention, which is only used to help understand the present invention and is not intended to limit the present invention. For those skilled in the technical field to which the present invention belongs, according to the idea of the present invention, several simple deductions, deformations or substitutions can also be made.

Claims

1. A lifting and bearing device, characterized in that, Comprising: A load-bearing component, including at least three load-bearing members having load-bearing ends, the load-bearing ends of at least three of the load-bearing members being located in a plane, and the load-bearing ends of at least three of the load-bearing members being used to jointly bear the component to be measured; And A lifting drive component, including a linear drive member, a first linear motion member, and a second linear motion member connected in sequence. The second linear motion member is provided with at least three motion guiding portions, and at least three of the load-bearing members are slidably connected to at least three of the motion guiding portions in a one-to-one correspondence. When lifting and driving, the linear drive member drives the first linear motion member to move linearly, the first linear motion member drives the second linear motion member to move linearly synchronously, and at least three motion guiding portions of the second linear motion member drive at least three of the load-bearing members to rise or fall synchronously.

2. The lifting and bearing device according to claim 1, characterized in that The first linear motion member includes at least three linear racks, the second linear motion member includes at least three sliders, the sliders are provided with the motion guiding portions, and at least three of the linear racks are connected to at least three of the sliders in a one-to-one correspondence; the linear drive member is used to drive at least three of the linear racks to move linearly synchronously.

3. The lifting and bearing device according to claim 2, characterized in that, At least three of the linear racks are spaced apart and distributed on the same circumference and are tangent to the circumference; one of at least three of the linear racks is connected to the linear drive member, and at least three of the linear racks are connected to each other through intermediate gears.

4. The lifting and bearing device according to claim 2, characterized in that The vertical side surface of the slider is provided with the motion guiding portion.

5. The lifting and bearing device according to claim 2, characterized in that, The lifting drive component further includes a base, and the slider is slidably connected to the base.

6. The lifting and bearing device according to claim 1, characterized in that, The motion guiding portion is a guiding groove or a guiding hole located in a vertical plane, the guiding groove or the guiding hole is a parabolic or arc-shaped structure, the motion guiding portion includes a first end and a second end, and in the vertical direction, the first end is higher than the second end; when the load-bearing member slides to the first end, the load-bearing member is at the highest position, and when the load-bearing member slides to the second end, the load-bearing member is at the lowest position.

7. The lifting and bearing device according to claim 6, characterized in that One end of the load-bearing member away from the load-bearing end is provided with a cam follower, and the load-bearing member is slidably connected to the motion guiding portion through the cam follower.

8. The lifting and bearing device according to claim 1, characterized in that, The lifting and load-bearing device further includes at least three load-bearing mounting frames, at least three load-bearing mounting frames are connected to at least three of the load-bearing members in a one-to-one correspondence, and the load-bearing members are liftably mounted on the load-bearing mounting frames.

9. The lifting and bearing device according to claim 8, wherein, The load-bearing mounting frame is provided with a guiding and limiting member, the guiding and limiting member has a lifting limiting channel, a part of the load-bearing member is located in the lifting limiting channel, and the load-bearing member moves up and down along the lifting limiting channel.

10. The lifting and bearing device according to claim 9, wherein, The guiding and limiting member includes a plurality of rollers distributed on two vertical lines, and a lifting limiting channel is formed between the plurality of rollers, and the load-bearing member is in rolling connection with the rollers.

11. The lifting and bearing device according to claim 9, characterized in that, The bearing mounting frame includes a first bearing mounting frame and a second bearing mounting frame. The first bearing mounting frame is vertically arranged outside the enclosed area of the lifting drive assembly. The second bearing mounting frame is horizontally arranged. One end of the second bearing mounting frame is connected to the upper end of the first bearing mounting frame. The end of the second bearing mounting frame away from the first bearing mounting frame extends to the inside of the enclosed area of the lifting drive assembly. The guiding and limiting member is provided on the first bearing mounting frame. An installation hole is provided at the end of the second bearing mounting frame away from the first bearing mounting frame. The bearing member is inserted into the installation hole.

12. The lifting and bearing device according to claim 11, wherein, The bearing member includes a first bearing rod, a second bearing rod and a third bearing rod which are connected in sequence. The first bearing rod and the third bearing rod are vertically arranged. The second bearing rod is horizontally or obliquely arranged. A part of the first bearing rod is inserted into the lifting limiting channel. A part of the third bearing rod is inserted into the installation hole.

13. A detection device, characterized in that, Comprising: A box body which has a vacuum detection cavity; A moving platform arranged in the vacuum detection cavity; A lifting and bearing device as described in any one of claims 1 to 12 arranged in the vacuum detection cavity. The lifting and bearing device is arranged on the moving platform, and the moving platform is used to drive the lifting and bearing device to move.

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