Polycrystalline silicon production waste gas treatment system

Abstract

The invention relates to a polycrystalline silicon production waste gas treatment system which comprises a transfer cylinder, a treatment cylinder, a filtering structure and a recycling mechanism, the processing cylinder is arranged above the transfer cylinder, and an air inducing device is arranged at the output part of the processing cylinder; the filtering structure is arranged on the inner edge of the treatment barrel and comprises a filter screen, a linkage barrel, a linkage column and a scraper blade, a guide channel is milled in the inner edge of the treatment barrel, the filter screen is arranged on the inner edge of the treatment barrel in a telescopic motion mode, and the outer contour of the filter screen moves in the guide channel in a telescopic mode through a guide block. And the guide block is provided with an elastic piece I at the middle position of the inner edge of the guide channel. According to the polycrystalline silicon production waste gas treatment system, the form is dynamically adjusted according to the temperature change brought by waste gas in the treatment process through the rubber sleeve and the bulging module, the sealing performance is enhanced through high-temperature bulging during waste gas treatment, the system automatically shrinks to avoid liquid overflow under the low-temperature condition when the whole system does not operate, and the stable performance of the system is guaranteed.

Description

Technical Field

[0001] The present invention belongs to the technical field of waste gas treatment, and specifically relates to a waste gas treatment system for polysilicon production. Background Art

[0002] The waste gas treatment system for polysilicon production is a complex and key environmental protection project, which needs to efficiently treat waste gas with high corrosiveness, complex composition, high temperature and a large amount of dust.

[0003] The waste gas generated during the production of polysilicon contains a certain amount of residual heat. When these waste gases are directly discharged, there is energy waste. Moreover, during the waste gas treatment process, the pollution medium in the waste gas will adhere to the filter mesh, affecting the passing rate of waste gas treatment for a long time, resulting in the need for staff to disassemble and maintain it, which affects the overall efficiency.

[0004] In view of this, a waste gas treatment system for polysilicon production is proposed. Summary of the Invention

[0005] The purpose of this part is to outline some aspects of the embodiments of the present invention and briefly introduce some preferred embodiments. Some simplifications or omissions may be made in this part, as well as in the abstract and title of the present application, to avoid obscuring the purpose of this part, the abstract and the title. However, such simplifications or omissions shall not be used to limit the scope of the present invention.

[0006] In view of the following technical problems existing in the prior art: The waste gas generated during the production of polysilicon contains a certain amount of residual heat. When these waste gases are directly discharged, there is energy waste. Moreover, during the waste gas treatment process, the pollution medium in the waste gas will adhere to the filter mesh, affecting the passing rate of waste gas treatment for a long time, resulting in the need for staff to disassemble and maintain it, which affects the overall efficiency.

[0007] To solve the above technical problems, the present invention provides the following technical solution: A waste gas treatment system for polysilicon production, including a transfer cylinder, a treatment cylinder, a filtering structure and a recovery mechanism.

[0008] The treatment cylinder is arranged above the transfer cylinder, and an air guiding device is installed at the output part of the treatment cylinder.

[0009] The filtering structure is installed along the inner edge of the treatment cylinder. The filtering structure includes a filter mesh, a linkage cylinder, a linkage column and a scraper. A guiding groove is milled along the inner edge of the treatment cylinder. The filter mesh is installed along the inner edge of the treatment cylinder in a telescopic movement manner. The outer contour of the filter mesh moves in the guiding groove by relying on a guiding block. An elastic member I is installed at the middle position of the inner edge of the guiding groove for the guiding block.

[0010] A positioning groove is milled along the inner edge of the processing cylinder, and the recycling mechanism is docked to the inner edge of the processing cylinder through the positioning groove. The recycling mechanism includes a zigzag channel, a movable seat, and a fixed seat. The fixed seat is installed in the positioning groove. The number of the movable seat and the fixed seat is one pair. The movable seat is on one side of the fixed seat. The pair of movable seats are installed at the output and input parts of the zigzag channel. An assembly groove is reserved on the side of the movable seat deviating from the zigzag channel. A rubber sleeve is arranged in the assembly groove, and a bulging module is arranged in the rubber sleeve.

[0011] As a preferred technical solution of a polysilicon production waste gas treatment system, multiple bearing frames are fixedly connected to the inner edge of the processing cylinder, and a linkage cylinder is installed at the junction of the multiple bearing frames. A spiral groove is milled in the linkage cylinder.

[0012] As a preferred technical solution of a polysilicon production waste gas treatment system, a linkage column is installed in the linkage cylinder. The side of the linkage column is movably docked to the spiral groove through a convex block. The part of the linkage column extending out of the linkage cylinder is hinged to the center position of the filter screen. A scraper is installed at the part of the linkage column extending out of the filter screen.

[0013] As a preferred technical solution of a polysilicon production waste gas treatment system, the bulging module includes an annular space, a cylindrical bag, and a C-shaped frame. The annular space is reserved in the rubber sleeve. The cylindrical bag and the C-shaped frame are fixedly connected to the inner edge of the annular space. The cylindrical bag is in the middle of the C-shaped frame. A docking seat is arranged at the edge of the cylindrical bag. A straight cylinder is arranged between the docking seat and the middle of the C-shaped frame. Gaseous substances are pre-supplied in the annular space and the cylindrical bag. Multiple cylindrical bags are arranged at equal angles.

[0014] As a preferred technical solution of a polysilicon production waste gas treatment system, positioning holes arranged at equal angles are milled on both the movable seat and the fixed seat. Locking rods are installed in the positioning holes. An external channel is docked to the side of the fixed seat deviating from the movable seat.

[0015] As a preferred technical solution of a polysilicon production waste gas treatment system, an insertion module is arranged on the opposite surfaces of the movable seat and the fixed seat. The insertion module includes an insertion groove and an insertion sleeve. The insertion groove is reserved on the surface of the movable seat facing the fixed seat. The insertion sleeve is fixedly connected to the surface of the fixed seat facing the movable seat. The part of the insertion sleeve facing the movable seat is wedge-shaped.

[0016] As a preferred technical solution of a polysilicon production waste gas treatment system, a linkage space is reserved in the movable seat. A linkage frame moves telescopically in the linkage space. One side of the linkage frame is wedge-shaped. The wedge-shaped part of the linkage frame extends into the insertion groove path. A guiding groove path is milled on the inner edge of the linkage space. A guiding seat moves telescopically on the guiding groove path. A second rotary rod is installed on the guiding seat. A linkage arm is hinged on the second rotary rod. A connecting seat is installed at a position where the linkage arm deviates from the guiding seat. A first rotary rod is installed at the docking part of the linkage arm and the connecting seat. A positioning space is milled on the inner edge of the linkage space. A flexible cloth is fixedly connected in the positioning space. The connecting seat and the flexible cloth are fixedly connected.

[0017] As a preferred technical solution of a polysilicon production waste gas treatment system, a limiting module is installed on the surface of the movable seat facing the fixed seat. The limiting module includes a telescopic groove path and a limiting pad. The telescopic groove path is milled on the inner edge of the opening position of the assembly groove path. The limiting pad moves telescopically in the limiting pad. A telescopic column extending into the insertion groove path is installed on the surface of the limiting pad deviating from the rubber sleeve. The part of the telescopic column in the insertion groove path is chamfered.

[0018] As a preferred technical solution of a polysilicon production waste gas treatment system, a blocking module is installed on the inner edge of the zigzag channel. The blocking module includes a fan-shaped flexible frame and a cylindrical sleeve. The fan-shaped flexible frame is fixedly connected to the inner edge of the zigzag channel. The fan-shaped flexible frames are arranged at equal angles. The cylindrical sleeve is telescopically connected to the back of the fan-shaped flexible frame. An elastic cord is installed on the inner edge of the zigzag channel. The elastic cord is connected to the cylindrical sleeve.

[0019] As a preferred technical solution of a polysilicon production waste gas treatment system, a circular groove path is milled on the inner edge of the rubber sleeve. A limiting sleeve is installed at the part of the zigzag channel facing the rubber sleeve.

[0020] Advantages of the present invention:

[0021] 1. This polysilicon production waste gas treatment system relies on the rubber sleeve and the bulging module to dynamically adjust the shape according to the temperature change brought by the waste gas during the treatment process. When treating waste gas, it bulges at high temperature to enhance the sealing performance, and automatically shrinks at low temperature when the whole system is not running to avoid liquid overflow, ensuring the stable performance of the system;

[0022] 2. This polysilicon production waste gas treatment system relies on the synergistic effect of the limiting module and the flexible cloth, and dynamically adjusts the state of the rubber sleeve through the linkage arm and the telescopic column, preventing the interface from shifting caused by liquid flow or temperature fluctuation, and ensuring the stability of the system during long-term operation;

[0023] 3. This polysilicon production waste gas treatment system relies on a barrier module and a flexible fan-shaped structure to relieve the liquid force and reduce the direct loss of the liquid flow to the rubber sleeve;

[0024] 4. This polysilicon production waste gas treatment system relies on the liquid circulation system of the zigzag channel and the external connection channel, uses the waste heat of the waste gas to preheat or drive other process links, improves the energy utilization rate, and reduces the energy consumption cost;

[0025] 5. This polysilicon production waste gas treatment system drives the scraper to automatically scrape the dust on the surface of the filter screen through the telescopic movement of the filter screen under negative pressure, combined with the spiral groove of the linkage cylinder and the rotation of the linkage column, realizing cleaning without shutting down the machine and improving the waste gas treatment efficiency.

[0026] Other features and advantages of the present invention will be described in the subsequent description, and, in part, will become obvious from the description or will be understood by implementing the present invention. The objectives and other advantages of the present invention can be achieved and obtained through the structures specifically pointed out in the description and the drawings. BRIEF DESCRIPTION OF THE DRAWINGS

[0027] In order to more clearly illustrate the technical solutions of the embodiments of the present invention, the following will briefly introduce the drawings required for the description of the embodiments. Obviously, the following drawings are only some embodiments of the present invention. For those of ordinary skill in the art, without creative efforts, other drawings can also be obtained based on these drawings. Among them:

[0028] Figure 1 is the overall structure schematic diagram of the present invention.

[0029] Figure 2 is the filter structure schematic diagram of the present invention.

[0030] Figure 3 is the schematic diagram of the recovery mechanism of the present invention Figure 1 .

[0031] Figure 4 is the schematic diagram of the recovery mechanism of the present invention Figure 2 .

[0032] Figure 5 is based on the present invention Figure 3 overall semi-sectional view.

[0033] Figure 6 is based on the present invention Figure 3 arrow cutaway view.

[0034] Figure 7 is based on the present invention Figure 5 at X in the figure.

[0035] Figure 8 For the present invention, based on Figure 5 Schematic diagram at position Y in

[0036] Figure 9 For the present invention, based on Figure 5 Schematic diagram at position Z in

[0037] Figure 10 For the present invention, based on Figure 5 Schematic diagram at position Q in

[0038] Figure 11 For the present invention, based on Figure 6 Schematic diagram at position P in

[0039] Reference numerals:

[0040] 100, transfer cylinder; 101, processing cylinder; 102, air induction device; 200, filtering structure; 201, filter screen; 202, guiding groove path; 203, first elastic member; 204, linkage cylinder; 205, spiral groove path; 206, bearing frame; 207, linkage column; 208, scraper; 300, positioning groove path; 301, recovery mechanism; 302, zigzag channel; 303, movable seat; 304, fixed seat; 305, locking rod; 306, positioning hole; 307, insertion sleeve; 308, external connection channel; 309, fan-shaped flexible frame; 310, elastic rope; 311, cylindrical sleeve; 312, insertion groove path; 313, rubber sleeve; 314, linkage frame; 315, assembly groove path; 316, linkage space; 317, guiding groove path; 318, guiding seat; 319, positioning space; 320, first rotary rod; 321, connection seat; 322, flexible cloth; 323, linkage arm; 324, second rotary rod; 325, limiting sleeve; 326, loop-shaped groove path; 327, loop-shaped space; 328, cylindrical bag; 329, C-shaped frame; 330, docking seat; 331, straight cylinder; 332, telescopic column; 333, telescopic groove path; 334, limiting pad. Detailed implementation manners

[0041] To make the above objects, features, and advantages of the present invention more apparent and understandable, the following detailed description of the specific implementation manners of the present invention will be given in conjunction with the accompanying drawings of the specification.

[0042] In the following description, many specific details are set forth to fully understand the present invention. However, the present invention can also be implemented in other ways different from this description. Those skilled in the art can make similar generalizations without departing from the connotation of the present invention. Therefore, the present invention is not limited by the specific embodiments disclosed below.

[0043] Second, the "one embodiment" or "embodiment" referred to herein means a specific feature, structure, or characteristic that may be included in at least one implementation of the present invention. The appearances of "in one embodiment" in different places in this specification do not all refer to the same embodiment, nor are they separate or selectively exclusive embodiments from other embodiments.

[0044] Furthermore, the present invention is described in detail with reference to the schematic diagrams. When detailing the embodiments of the present invention, for ease of explanation, the cross-sectional views showing the device structure will be enlarged locally out of the general proportion, and the schematic diagrams are only examples and should not limit the scope of protection of the present invention herein. In addition, the three-dimensional spatial dimensions of length, width, and depth should be included in actual production.

[0045] Embodiment, a polysilicon production waste gas treatment system, comprising a transfer cylinder 100, a treatment cylinder 101, a filtering structure 200, and a recovery mechanism 301;

[0046] Referring to Figure 1 and 2 , the treatment cylinder 101 is disposed above the transfer cylinder 100, and an air induction device 102 is installed at the output part of the treatment cylinder 101;

[0047] The filtering structure 200 is installed along the inner edge of the treatment cylinder 101. The filtering structure 200 includes a filter screen 201, a linkage cylinder 204, a linkage column 207, and a scraper 208. A guiding groove 202 is milled along the inner edge of the treatment cylinder 101. The filter screen 201 is installed along the inner edge of the treatment cylinder 101 in a telescopic motion manner. The outer contour of the filter screen 201 moves in the guiding groove 202 by relying on a guiding block. An elastic member 203 is installed at the middle position along the inner edge of the guiding groove 202 for the guiding block. Multiple bearing frames 206 are fixedly connected along the inner edge of the treatment cylinder 101. A linkage cylinder 204 is installed at the junction of the multiple bearing frames 206. A spiral groove 205 is milled in the linkage cylinder 204. A linkage column 207 is installed in the linkage cylinder 204. The side of the linkage column 207 is movably butted in the spiral groove 205 through a convex block. The part of the linkage column 207 extending out of the linkage cylinder 204 is hinged to the center position of the filter screen 201. A scraper 208 is installed at the part of the linkage column 207 extending out of the filter screen 201;

[0048] The following can be achieved: relying on the air extraction device 102, the waste gas generated during polysilicon production can be introduced into the treatment cylinder 101. Relying on the filter screen 201, impurities in the waste gas can be filtered. After long-term use, a large amount of dust will adhere to the surface of the filter screen 201, and less waste gas will pass through the filter screen 201. Under the action of negative pressure, the filter screen 201 will move towards the position of the carrier 206. Under the action of the bump and the spiral groove 205, the linkage column 207 can rotate during the movement of the filter screen 201. The linkage column 207 relies on the scraper 208 to scrape off the impurities on the surface of the filter screen 201, so as to ensure the normal filtering operation of the waste gas. Under the action of the first elastic member 203, the impurities on the surface of the filter screen 201 are convenient for the filter screen 201 to return to its original position after cleaning, facilitating the next cleaning operation;

[0049] Refer to Figure 1 、 3 As shown in FIGS. 3 and 4, a positioning groove 300 is milled along the inner edge of the treatment cylinder 101. The recovery mechanism 301 is connected to the inner edge of the treatment cylinder 101 through the positioning groove 300. The recovery mechanism 301 includes a zigzag channel 302, a movable seat 303 and a fixed seat 304. The fixed seat 304 is installed in the positioning groove 300. The number of the movable seat 303 and the fixed seat 304 is one pair. The movable seat 303 is on one side of the fixed seat 304. A pair of movable seats 303 are installed at the output and input parts of the zigzag channel 302. An assembly groove 315 is reserved on the side of the movable seat 303 deviating from the zigzag channel 302. A rubber sleeve 313 is arranged in the assembly groove 315, and a bulging module is arranged in the rubber sleeve 313;

[0050] The following can be achieved: during the waste gas treatment process, when the waste gas passes through the recovery mechanism 301, under the action of the external connection channel 308, liquid circulates in the zigzag channel 302. When the waste gas encounters the zigzag channel 302 with liquid inside, the waste heat can be utilized;

[0051] Refer to Figure 5 、 9 As shown in FIGS. 10 and 11, the bulging module includes an annular space 327, a cylindrical bag 328 and a C-shaped frame 329. The annular space 327 is reserved in the rubber sleeve 313. The cylindrical bag 328 and the C-shaped frame 329 are fixedly connected to the inner edge of the annular space 327. The cylindrical bag 328 is in the middle position of the C-shaped frame 329. A docking seat 330 is arranged at the edge position of the cylindrical bag 328. A straight cylinder 331 is arranged between the docking seat 330 and the middle position of the C-shaped frame 329. Gaseous substances are pre-supplied in the annular space 327 and the cylindrical bag 328. A plurality of cylindrical bags 328 are arranged at equal angles;

[0052] Refer to Figure 3 、 4At 5, positioning holes 306 arranged at equal included angles are milled on both the movable seat 303 and the fixed seat 304. A locking rod 305 is installed in the positioning holes 306. An external channel 308 is butted on one side of the fixed seat 304 deviating from the movable seat 303;

[0053] Through this content, the following can be achieved: When assembling the zigzag channel 302, the movable seat 303 is aligned with the fixed seat 304. After adjusting to the appropriate position, the locking rod 305 is inserted into the positioning hole 306 and locked to connect the movable seat 303 and the fixed seat 304, so that the zigzag channel 302 can be assembled at the specified position. The installation of the assembly groove 315 can ensure that the movable seat 303 and the fixed seat 304 are not prone to position deviation during butt joint. The rubber sleeve 313 plays an anti-overflow effect at this time;

[0054] When the opposite surfaces of the movable seat 303 and the fixed seat 304 touch, the rubber sleeve 313 can prevent the liquid flowing in the middle from overflowing. Under its own action, the C-frame 329 can push the outer periphery of the rubber sleeve 313 to bulge. When the exhaust gas containing heat energy is transmitted to the movable seat 303, the gaseous substances in the annular space 327 are more active. At this time, the rubber sleeve 313 is in the best bulging state, improving the stability after the butt joint of the movable seat 303 and the fixed seat 304. When there is no liquid flow in the zigzag channel 302, the rubber sleeve 313 is no longer affected by the exhaust gas containing heat energy. At this time, the rubber sleeve 313 will concave when cooled, creating a certain space at the butt joint of the movable seat 303, the rubber sleeve 313 and the fixed seat 304. At the same time, the cylindrical bag 328 will also sink. When the cylindrical bag 328 sinks, it relies on the straight tube 331 to drive the middle position of the C-frame 329 to move towards the position of the cylindrical bag 328. At this time, the part of the C-frame 329 butted on the inner edge of the annular space 327 will move outwards, so that the rubber sleeve 313 returns to the bulging state again, further improving the stability after the butt joint of the movable seat 303 and the fixed seat 304, and being able to avoid liquid overflow when the whole is not running, because when not running, the overall temperature sense is also relatively low.

[0055] Refer to Figure 5 and 8 Refer to

[0056] Refer to Figure 8, a linkage space 316 is reserved in the movable seat 303. A linkage frame 314 moves telescopically in the linkage space 316. One side of the linkage frame 314 is wedge-shaped. The wedge-shaped part of the linkage frame 314 extends into the insertion groove path 312. A guiding groove path 317 is milled on the inner edge of the linkage space 316. A guiding seat 318 moves telescopically on the guiding groove path 317. A second rotary rod 324 is installed on the guiding seat 318. A linkage arm 323 is hinged on the second rotary rod 324; A connecting seat 321 is installed at the part of the linkage arm 323 deviating from the guiding seat 318. A first rotary rod 320 is installed at the docking part of the linkage arm 323 and the connecting seat 321. A positioning space 319 is milled on the inner edge of the linkage space 316. A flexible cloth 322 is fixedly connected in the positioning space 319. The flexible cloth 322 is flexible, and the connecting seat 321 is fixedly connected to the flexible cloth 322;

[0057] Through this content, the following can be achieved: When the movable seat 303 corresponds to the fixed seat 304, the insertion sleeve 307 on the fixed seat 304 will be inserted into the insertion groove path 312. Under the action of the wedge-shaped structure, the linkage frame 314 will move inward into the linkage space 316. The linkage frame 314 touches the linkage arm 323. The linkage frame 314 pushes against the linkage arm 323 to change its shape. Since the guiding seat 318 can move telescopically in the guiding groove path 317, at this time, the linkage arm 323 can change its angle. During the process of angle change, under the action of the first rotary rod 320 and the connecting seat 321, the connecting seat 321 can push against the flexible cloth 322 to bulge. After the flexible cloth 322 bulges, it directly acts on the rubber sleeve 313 to ensure that after the movable seat 303 and the fixed seat 304 are docked, the rubber sleeve 313 can achieve the best anti-spill effect;

[0058] Refer to Figure 10 and 11 , a limiting module is installed on the side of the movable seat 303 facing the fixed seat 304. The limiting module includes a telescopic groove path 333 and a limiting pad 334. The telescopic groove path 333 is milled on the inner edge of the opening position of the assembly groove path 315. The limiting pad 334 moves telescopically in the limiting pad 334; A telescopic column 332 extending into the insertion groove path 312 is installed on the side of the limiting pad 334 deviating from the rubber sleeve 313. The part of the telescopic column 332 in the insertion groove path 312 is chamfered;

[0059] Through this content, the following can be achieved: When the insertion sleeve 307 is inserted into the insertion groove path 312, the wedge-shaped part of the insertion sleeve 307 will first directly act on the telescopic column 332. The telescopic column 332 will be linked to move towards the position of the rubber sleeve 313. The telescopic column 332 links the limiting pad 334 to move together. When the limiting pad 334 touches the side of the rubber sleeve 313, it can play an anti-offset effect on the rubber sleeve 313 and further improve the anti-spill effect;

[0060] Refer to Figure 5and 7 , a barrier module is installed along the inner edge of the zigzag channel 302. The barrier module includes a fan-shaped flexible frame 309 and a cylindrical sleeve 311. The fan-shaped flexible frame 309 is fixedly connected to the inner edge of the zigzag channel 302. The fan-shaped flexible frame 309 is arranged in an equal-angle manner. The cylindrical sleeve 311 is telescopically docked to the back of the fan-shaped flexible frame 309; an elastic rope 310 is installed along the inner edge of the zigzag channel 302, and the elastic rope 310 is docked with the cylindrical sleeve 311;

[0061] Refer to Figure 9 , a circular groove 326 is milled along the inner edge of the rubber sleeve 313, and a limiting sleeve 325 is installed at the part of the zigzag channel 302 facing the rubber sleeve 313;

[0062] Through this content, the following can be achieved: The installation of the limiting sleeve 325 and the circular groove 326 can limit the position of the rubber sleeve 313. When the liquid passes through the zigzag channel 302, when the liquid passes through the rubber sleeve 313 for a long time, it will cause wear to the rubber sleeve 313, which will affect the frequent replacement of the rubber sleeve 313. After the installation of the barrier module, before the liquid in the zigzag channel 302 reaches the external channel 308, during this process, the liquid will reach the position of the fan-shaped flexible frame 309. The fan-shaped flexible frame 309 partially offsets the force when the liquid passes through, so that the liquid will not have such a large force when it reaches the position of the rubber sleeve 313, reducing the wear of the rubber sleeve 313 and avoiding frequent replacement. During this process, the cylindrical sleeve 311 will move in position due to the morphological change of the fan-shaped flexible frame 309, and under the action of the elastic rope 310, a pulling force is continuously provided for the cylindrical sleeve 311 to ensure that the fan-shaped flexible frame 309 can always offset the force of the liquid.

[0063] It should be understood that in the development process of any actual implementation, in any engineering or design project, a large number of specific implementation decisions can be made. Such development efforts may be complex and time-consuming, but for those ordinary technical personnel who benefit from this disclosure, without excessive experimentation, the development efforts will be a routine work of design, manufacturing and production.

[0064] It should be noted that the above embodiments are only used to illustrate the technical solutions of the present invention and not to limit them. Although the present invention has been described in detail with reference to the preferred embodiments, those of ordinary skill in the art should understand that the technical solutions of the present invention can be modified or equivalently replaced without departing from the spirit and scope of the technical solutions of the present invention, and they should all be covered within the scope of the claims of the present invention.

Claims

1. A polysilicon production waste gas treatment system, characterized in that: It includes a transfer cylinder, a processing cylinder, a filtering structure and a recycling mechanism; The processing cylinder is arranged above the transfer cylinder, and an air guiding device is installed at the output part of the processing cylinder; The filtering structure is installed along the inner edge of the processing cylinder. The filtering structure includes a filter screen, a linkage cylinder, a linkage column and a scraper. A guiding groove is milled along the inner edge of the processing cylinder. The filter screen is installed along the inner edge of the processing cylinder in a telescopic motion manner. The outer contour of the filter screen moves in the guiding groove by relying on a guiding block. An elastic member I is installed at the middle position of the inner edge of the guiding groove of the guiding block; A positioning groove is milled along the inner edge of the processing cylinder. The recycling mechanism is connected to the inner edge of the processing cylinder through the positioning groove. The recycling mechanism includes a zigzag channel, a movable seat and a fixed seat; the fixed seat is installed in the positioning groove. The number of the movable seat and the fixed seat installed is one pair. The movable seat is on one side of the fixed seat. A pair of the movable seats are installed at the output and input parts of the zigzag channel. An assembly groove is reserved on the side of the movable seat deviating from the zigzag channel. A rubber sleeve is arranged in the assembly groove, and a bulging module is arranged in the rubber sleeve.

2. The polysilicon production waste gas treatment system according to claim 1, characterized in that: Multiple bearing frames are fixedly connected along the inner edge of the processing cylinder. A linkage cylinder is installed at the intersection of the multiple bearing frames. A spiral groove is milled in the linkage cylinder.

3. The polysilicon production waste gas treatment system according to claim 1, wherein: A linkage column is installed in the linkage cylinder. The side of the linkage column is movably connected to the spiral groove through a convex block. The part of the linkage column extending out of the linkage cylinder is hinged to the center position of the filter screen. A scraper is installed at the part of the linkage column extending out of the filter screen.

4. The polysilicon production waste gas treatment system according to claim 1, wherein: The bulging module includes an annular space, a cylindrical bag and a C-shaped frame. The annular space is reserved in the rubber sleeve. The cylindrical bag and the C-shaped frame are fixedly connected to the inner edge of the annular space. The cylindrical bag is in the middle of the C-shaped frame. A docking seat is arranged at the edge part of the cylindrical bag. A straight cylinder is arranged between the docking seat and the middle position of the C-shaped frame. A gaseous substance is pre-supplied in the annular space and the cylindrical bag. Multiple cylindrical bags are arranged, and the multiple cylindrical bags are arranged at equal included angles.

5. The polysilicon production waste gas treatment system according to claim 1, characterized in that: Positioning holes arranged at equal included angles are milled on both the movable seat and the fixed seat. A locking rod is installed in the positioning holes. An external channel is connected to the side of the fixed seat deviating from the movable seat.

6. The polysilicon production waste gas treatment system according to claim 1, wherein: An insertion module is installed on the opposite surfaces of the movable seat and the fixed seat. The insertion module includes an insertion groove and an insertion sleeve. The insertion groove is reserved on the surface of the movable seat facing the fixed seat. The insertion sleeve is fixedly connected to the surface of the fixed seat facing the movable seat. The part of the insertion sleeve facing the movable seat is wedge-shaped.

7. The polysilicon production waste gas treatment system according to claim 1, characterized in that: A linkage space is reserved in the movable seat. A linkage frame moves telescopically in the linkage space. One side of the linkage frame is processed into a wedge shape. The wedge-shaped part of the linkage frame extends into the insertion groove. A guiding groove is milled along the inner edge of the linkage space. A guiding seat moves telescopically on the guiding groove. A second rotary rod is installed on the guiding seat. A linkage arm is hinged to the second rotary rod; A connecting seat is arranged at the part of the linkage arm deviating from the guiding seat. A first rotary rod is arranged at the docking part of the linkage arm and the connecting seat. A positioning space is milled along the inner edge of the linkage space. A flexible cloth is fixedly connected in the positioning space. The connecting seat and the flexible cloth are fixedly connected.

8. The polysilicon production waste gas treatment system according to claim 1, wherein: One side of the movable seat facing the fixed seat is provided with a limiting module. The limiting module includes a telescopic groove and a limiting pad. The telescopic groove is milled at the inner edge of the opening of the assembly groove, and the limiting pad moves telescopically in the limiting pad. A telescopic column extending into the insertion groove is arranged on the side of the limiting pad deviating from the rubber sleeve, and the part of the telescopic column in the insertion groove is chamfered.

9. The polysilicon production waste gas treatment system according to claim 1, wherein: A blocking module is arranged on the inner edge of the zigzag channel. The blocking module includes a fan-shaped flexible frame and a cylindrical sleeve. The fan-shaped flexible frame is fixedly connected to the inner edge of the zigzag channel, and the fan-shaped flexible frame is arranged at equal angles. The cylindrical sleeve is telescopically butted against the back of the fan-shaped flexible frame. An elastic rope is arranged on the inner edge of the zigzag channel, and the elastic rope is butted against the cylindrical sleeve.

10. The polysilicon production waste gas treatment system according to claim 1, characterized in that: A circular groove is milled on the inner edge of the rubber sleeve, and a limiting sleeve is arranged at the part of the zigzag channel facing the rubber sleeve.

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