Special gas system for integrated circuit manufacturing

Abstract

The invention belongs to the technical field of integrated circuit manufacturing, particularly relates to a special gas system for integrated circuit manufacturing, and provides the following scheme that the special gas system comprises a special gas system body, a main pipe and an auxiliary pipe, and mounting seats are mounted at the connecting ends of the main pipe and the auxiliary pipe; by arranging the main pipe, the auxiliary pipe and the ball valves, harmful gas and dust enter the main pipe through the ball valves and then enter the special gas system body, after the harmful gas and the dust flow through the main pipe for a certain time, the two ball valves are rotated, so that the two ends of the main pipe are closed, and the two ends of the auxiliary pipe communicate with the two ends of the main pipe correspondingly; harmful gas and dust enter the auxiliary pipe through one end of the main pipe, then enter the other end of the main pipe through the auxiliary pipe and then enter the special gas system body, the harmful gas is replaced with the auxiliary pipe for circulation, workers clean the dust in the main pipe, and the situation that the special gas system is closed due to pipeline cleaning is avoided. And the manufacturing efficiency of the integrated circuit is improved.

Description

Technical Field

[0001] The present invention relates to the technical field of integrated circuit manufacturing, and in particular to a special gas system for integrated circuit manufacturing. Background Art

[0002] In the manufacturing of integrated circuits, the special gas system is one of the core process equipment, responsible for safely and precisely transporting and controlling high-purity and highly dangerous gases used in chip manufacturing. The special gas system provides high-purity gases required in the circuit manufacturing process, such as doping, etching, deposition and other processes. The special gas system ensures the stability and accuracy of gas transportation, and safely manages toxic, flammable and corrosive gases to prevent leakage and pollution.

[0003] In the special gas system for integrated circuit manufacturing, the valve is one of the core components to ensure the safe and precise transportation of gases. Since it involves high-purity and highly dangerous gases (such as poisonous gases, flammable gases, corrosive gases), the valves of the special gas system need to meet strict technical and safety requirements.

[0004] In the prior art, when the special gas system absorbs harmful gases generated in the integrated circuit manufacturing, it will also absorb some dust in the air at the same time, causing the inner walls of the pipes and valves of the special gas system to adhere to dust, affecting the effect of the special gas system. It requires workers to regularly clean the pipes and valves of the special gas system. When cleaning the pipes and valves, the special gas system needs to be shut down, thus affecting the use of the special gas system and further affecting the integrated circuit manufacturing efficiency.

[0005] Therefore, a special gas system for integrated circuit manufacturing is needed. Summary of the Invention

[0006] The special gas system for integrated circuit manufacturing proposed by the present invention solves the problem in the prior art that when the special gas system absorbs harmful gases generated in the integrated circuit manufacturing, it will also absorb some dust in the air at the same time, causing the inner walls of the pipes and valves of the special gas system to adhere to dust, affecting the effect of the special gas system. It requires workers to regularly clean the pipes and valves of the special gas system. When cleaning the pipes and valves, the special gas system needs to be shut down, thus affecting the use of the special gas system and further affecting the integrated circuit manufacturing efficiency.

[0007] To achieve the above object, the present invention provides the following technical solutions:

[0008] A special gas system for integrated circuit manufacturing, including a special gas system main body, a main pipe and a sub-pipe. The intake port of the special gas system main body is installed with the main pipe, both ends of the main pipe are installed with sub-pipes, one end of the main pipe is installed with a suction head, the upper end of the special gas system main body is installed with an operation screen, and one end of the special gas system main body is provided with an air outlet;

[0009] Mounting seats are installed at both the connection ends of the main pipe and the auxiliary pipe. Ball valves are movably installed inside the two groups of mounting seats. Three-way grooves are provided inside the two groups of ball valves. Limit columns are installed at one end of the two groups of ball valves, and a synchronous belt is connected between the ends of the two groups of limit columns extending to one end of the outer wall of the main pipe. A turntable is installed at one end of one of the limit columns.

[0010] Preferably, air filter pipes are installed inside both the main pipe and the auxiliary pipe. Multiple filter holes are provided in the two groups of air filter pipes, and filter meshes are installed on the inner walls of the multiple filter holes.

[0011] Preferably, dust outlet pipes are installed at one end of the two groups of air filter pipes. Partition plates are movably installed inside the two groups of dust outlet pipes. A partition plate (11) is movably installed inside the auxiliary pipe 25.

[0012] Preferably, limit shafts are installed at one end of the multiple partition plates. Limit bevel gears are installed at the ends of the two of the limit shafts extending to the outer walls of the main pipe and the auxiliary pipe, and the two limit bevel gears are meshed. A synchronous belt is connected between the two limit shafts.

[0013] Preferably, dust collection boxes are installed at the upper end of the special gas system main body and the lower end of the auxiliary pipe. The ends of the two dust outlet pipes extending to one end of the outer wall of the main pipe and the ends extending to one end of the outer wall of the auxiliary pipe are respectively connected to the dust inlet ports of the two dust collection boxes. The control screen is electrically connected to the two air pumps, and air pumps are provided inside the two dust collection boxes.

[0014] Preferably, air inlet pipes are installed at the air outlet of the two dust collection boxes, and the two air inlet pipes are respectively connected to the main pipe and the auxiliary pipe. Check valves are provided at one end of the two air inlet pipes close to the main pipe or close to the auxiliary pipe.

[0015] Preferably, mounting shafts are movably installed inside the two air inlet pipes. Wind wheels are installed on the outer walls at one end of the two mounting shafts. Transmission shafts are installed at the ends of the two mounting shafts extending to the outer walls of the air inlet pipes.

[0016] Preferably, linkage shafts are movably installed on the inner walls of the two air filter pipes. Synchronous belts are connected between the two linkage shafts and the two transmission shafts respectively. Linkage gears are installed at one end of the two linkage shafts.

[0017] Preferably, mounting rings are movably installed on the inner walls of the two air filter pipes. Tooth rings are installed on the outer walls of the two mounting rings, and the two tooth rings are respectively meshed with the two linkage gears.

[0018] Preferably, cleaning rods are installed on the inner walls of the two mounting rings, and the two cleaning rods are respectively movably connected to the inner walls of the two air filter pipes.

[0019] Preferably, a plurality of groups of springs are movably installed on the inner walls of the main pipe and the auxiliary pipe. One end of each of the plurality of groups of springs is provided with a movable plate, and the outer walls of the plurality of movable plates are respectively movably connected to the outer walls of the two filter gas pipes.

[0020] The present invention provides a special gas system for integrated circuit manufacturing. Compared with the prior art, the beneficial effects of the present invention are as follows:

[0021] 1. By providing a main pipe, an auxiliary pipe and a ball valve, the present invention solves the problem that the special gas system needs to be shut down for pipeline cleaning. Harmful gases and dust enter the interior of the main pipe through the ball valve and then enter the interior of the special gas system body. After the harmful gases and dust flow through the main pipe for a certain period of time, the two ball valves are rotated so that both ends of the main pipe are closed, and both ends of the auxiliary pipe are respectively connected to both ends of the main pipe. Harmful gases and dust enter the interior of the auxiliary pipe through one end of the main pipe, and then the harmful gases enter the other end of the main pipe through the auxiliary pipe. After that, the harmful gases enter the interior of the special gas system body, and the harmful gases are circulated by replacing the auxiliary pipe. The staff cleans the dust inside the main pipe, avoiding the shutdown of the special gas system due to pipeline cleaning and improving the efficiency of integrated circuit manufacturing.

[0022] 2. By providing a filter gas pipe, after harmful gases and dust enter the filter gas pipe inside the main pipe or the auxiliary pipe, the filter gas pipe filters the dust inside the harmful gases, enabling the harmful gases to pass through the filter gas pipe while the dust remains inside the filter gas pipe. The filter gas pipe collects the dust, avoiding the multiple attachments of dust on the inner walls of the main pipe or the auxiliary pipe, improving the convenience of cleaning the dust inside the main pipe or the auxiliary pipe, and extending the service life of the main pipe or the auxiliary pipe.

[0023] 3. By providing a filter gas pipe, a dust outlet pipe, a dust collection box and an air inlet pipe, when the torsion block rotates, it drives the limit shaft to rotate, which in turn drives the isolation plate to rotate, opening one dust outlet pipe. The air pump inside the dust collection box is started, creating a negative pressure at one end of the dust outlet pipe. The dust inside one filter gas pipe and the harmful gases remaining inside the main pipe enter the dust collection box through the dust outlet pipe, and the harmful gases return to the main pipe through the air inlet pipe, improving the convenience of cleaning the dust inside the filter gas pipe.

[0024] 4. By providing a filter gas pipe and a cleaning rod, harmful gases pass through the air inlet pipe, driving the wind wheel to rotate, which in turn drives a set of mounting shafts to rotate, and then drives a set of transmission shafts to rotate. A set of transmission shafts are connected to a set of linkage shafts through a synchronous belt. When a set of linkage shafts rotate, they drive a set of linkage gears to rotate. The linkage gears are meshed with the toothed ring, driving a set of toothed rings to rotate, which in turn drives the mounting ring to rotate, and then drives the cleaning rod to rotate. The cleaning rod cleans the inner wall of the filter gas pipe, reducing the dust attached to the inner wall of the filter gas pipe and further improving the dust cleaning effect inside the filter gas pipe. Description of the Drawings

[0025] Figure 1 Schematic diagram of the main body of a special gas system for integrated circuit manufacturing in the present invention;

[0026] Figure 2 Schematic diagram of the connection between the main pipe and the auxiliary pipe of a special gas system for integrated circuit manufacturing in the present invention;

[0027] Figure 3 Schematic diagram of the internal structure of the main pipe and the auxiliary pipe of a special gas system for integrated circuit manufacturing in the present invention;

[0028] Figure 4 Schematic diagram of the limit shaft of a special gas system for integrated circuit manufacturing in the present invention;

[0029] Figure 5 Side sectional view of the ball valve of a special gas system for integrated circuit manufacturing in the present invention;

[0030] Figure 6 Schematic diagram of the filter gas pipe of a special gas system for integrated circuit manufacturing in the present invention;

[0031] Figure 7 Side sectional view of the filter gas pipe of a special gas system for integrated circuit manufacturing in the present invention;

[0032] Figure 8 Schematic diagram of the linkage shaft of a special gas system for integrated circuit manufacturing in the present invention;

[0033] Figure 9 Schematic diagram of the connection between the movable plate and the filter gas pipe of a special gas system for integrated circuit manufacturing in the present invention;

[0034] Figure 10 Schematic diagram of the movable plate of a special gas system for integrated circuit manufacturing in the present invention.

[0035] In the figure: 1. Main body of the special gas system; 2. Control screen; 3. Main pipe; 4. Suction head; 5. Mounting seat; 6. Ball valve; 7. Limit post; 8. Turntable; 9. Filter gas pipe; 10. Dust outlet pipe; 11. Partition board; 12. Limit shaft; 13. Limit bevel gear; 14. Mounting ring; 15. Cleaning rod; 16. Tooth ring; 17. Linkage shaft; 18. Linkage gear; 19. Inlet pipe; 20. Check valve; 21. Mounting shaft; 22. Wind wheel; 23. Transmission shaft; 24. Dust collection box; 25. Auxiliary pipe; 26. Air outlet; 27. Movable plate; 28. Spring. Detailed implementation manners

[0036] Next, the technical solutions in the embodiments of the present invention will be clearly and completely described in conjunction with the accompanying drawings in the embodiments of the present invention. Obviously, the described embodiments are only a part of the embodiments of the present invention, rather than all the embodiments. All other embodiments obtained by those of ordinary skill in the art based on the embodiments of the present invention without creative efforts shall fall within the protection scope of the present invention.

[0037] Please refer to Figure 1-10 , the present invention provides a technical solution: a special gas system for integrated circuit manufacturing, including a special gas system main body 1, a main pipe 3, and a sub-pipe 25. The intake port of the special gas system main body 1 is installed with the main pipe 3, both ends of the main pipe 3 are installed with the sub-pipe 25, one end of the main pipe 3 is installed with a suction head 4, and the suction head 4 is erected on one side of the integrated circuit manufacturing platform. A control screen 2 is installed at the upper end of the special gas system main body 1. By starting the special gas system main body 1 through the control screen 2, the suction head 4 generates suction force, and harmful gases and dust enter the inside of the main pipe 3 through the suction head. An air outlet 26 is provided at one end of the special gas system main body 1, and the gas processed by the special gas system main body 1 is discharged through the air outlet 26;

[0038] Installation seats 5 are installed at the connection ends of the main pipe 3 and the sub-pipe 25. Ball valves 6 are movably installed inside the two installation seats 5, and three-way grooves are provided inside the two ball valves 6. Limit columns 7 are installed at one end of the two ball valves 6, and a synchronous belt is connected between the ends of the two limit columns 7 extending to the outer wall of the main pipe 32. A turntable 8 is installed at one end of one limit column 7. Harmful gases and dust enter the inside of the main pipe 3 through the ball valve 6 and then enter the inside of the special gas system main body 1. After the harmful gases and dust flow through the main pipe 3 for a certain period of time, the two ball valves 6 are rotated to close both ends of the main pipe 3, and both ends of the sub-pipe 25 are respectively connected to both ends of the main pipe 3. Harmful gases and dust enter the inside of the sub-pipe 25 through one end of the main pipe 3, and then the harmful gases enter the other end of the main pipe 3 through the sub-pipe 25. After that, the harmful gases enter the inside of the special gas system main body 1, and the harmful gases are circulated by replacing the sub-pipe 25, avoiding the shutdown of the special gas system due to pipeline cleaning and improving the integrated circuit manufacturing efficiency.

[0039] Please refer to Figure 4 - Figure 7 , filter gas pipes 9 are installed inside both the main pipe 3 and the sub-pipe 25. Multiple filter holes are provided in the two filter gas pipes 9, and filter meshes are installed on the inner walls of the multiple filter holes. After harmful gases and dust enter the inside of the filter gas pipes 9, the multiple filter meshes filter the dust, and then the harmful gases pass through the filter gas pipes 9.

[0040] Please refer to Figure 6 - Figure 7, dust outlet pipes 10 are installed at one end of each of the two groups of filter gas pipes 9. Partition plates 11 are movably installed inside the two dust outlet pipes 10, and a partition plate 11 is movably installed inside the secondary pipe 25. The two partition plates 11 close one end of the two dust outlet pipes 10 respectively, making the two dust outlet pipes 10 in a closed state.

[0041] Please refer to Figure 3 - Figure 7 , limit shafts 12 are installed at one end of each of the multiple partition plates 11. Two of the limit shafts 12 extend to the outer wall ends of the main pipe 3 and the secondary pipe 25, and limit bevel gears 13 are installed at the ends. The two limit bevel gears 13 are meshed and connected. A synchronous belt is connected between the two limit shafts 12. When air flow enters the secondary pipe 25, it blows one partition plate 11 to flip 90 degrees, thereby driving one limit shaft 12 to rotate, and then driving one limit bevel gear 13 to rotate. The two limit bevel gears 13 are meshed and connected, so the other limit bevel gear 13 rotates, driving the other limit shaft 12 to rotate, and then driving the other partition plate 11 to flip, thus opening one dust outlet pipe 10. One limit shaft 12 and the remaining limit shaft 12 are connected by a synchronous belt. The remaining limit shaft 12 rotates, driving the remaining partition plate to flip, thus closing the other dust outlet pipe 10.

[0042] Please refer to Figure 1 - Figure 3 , dust collection boxes 24 are installed at the upper end of the specialty gas system main body 1 and the lower end of the secondary pipe 25. The two dust outlet pipes 10 extend to one end of the outer wall of the main pipe 3 and one end of the outer wall of the secondary pipe 25, and are respectively connected to the dust inlet ports of the two dust collection boxes 24. The control screen 2 is electrically connected to the two air pumps, and air pumps are provided inside the two dust collection boxes 24. By starting the air pump inside one dust collection box 24 through the control screen 2, negative pressure is generated at one end of the dust outlet pipe 10, and the dust inside the filter gas pipe 9 and the harmful gases remaining inside the main pipe 3 or the secondary pipe 25 enter one dust collection box 24 through the dust outlet pipe 10.

[0043] Please refer to Figure 1 - Figure 3 , air inlet pipes 19 are installed at the air outlet of the two dust collection boxes 24, and the two air inlet pipes 19 are respectively connected to the main pipe 3 and the secondary pipe 25. Check valves 20 are provided at one end of the two air inlet pipes 19 close to the main pipe 3 or close to the secondary pipe 25. Through the setting of the check valves 20, harmful gases are prevented from entering the dust collection boxes 24 through the air inlet pipes 19.

[0044] Please refer to Figure 3 - Figure 8, inside the two intake pipes 19, mounting shafts 21 are movably installed. At one end of the outer walls of the two mounting shafts 21, wind wheels 22 are installed. At one end of the two mounting shafts 21 extending to the outer wall of the intake pipe 19, transmission shafts 23 are installed. The harmful gas passes through the intake pipe 19, driving the wind wheel 22 to rotate, thereby driving the mounting shaft 21 to rotate, and further driving the transmission shaft 23 to rotate.

[0045] Please refer to Figure 7 - Figure 8 , inside the inner walls of the two filter pipes 9, linkage shafts 17 are movably installed. And between the two linkage shafts 17 and the two transmission shafts 23 respectively, there are synchronous belts connected. At one end of the two linkage shafts 17, linkage gears 18 are installed. The transmission shaft 23 rotates, and the transmission shaft 23 and the linkage shaft 17 are connected by a synchronous belt. The linkage shaft 17 rotates, driving the linkage gear 18 to rotate.

[0046] Please refer to Figure 7 - Figure 8 , inside the inner walls of the two filter pipes 9, mounting rings 14 are movably installed. On the outer walls of the two mounting rings 14, toothed rings 16 are installed. And the two toothed rings 16 are respectively meshed and connected with the two linkage gears 18. The linkage gear 18 rotates, and the linkage gear 18 is meshed and connected with the toothed ring 16, driving the toothed ring 16 to rotate, thereby driving the mounting ring 14 to rotate.

[0047] Please refer to Figure 7 - Figure 8 , inside the inner walls of the two mounting rings 14, cleaning rods 15 are installed. And the two cleaning rods 15 are respectively movably connected with the inner walls of the two filter pipes 9. The mounting ring 14 rotates, driving the cleaning rod 15 to rotate. The cleaning rod 15 cleans the inner wall of the filter pipe 9, reducing the dust adhering to the inner wall of the filter pipe 9.

[0048] Please refer to Figure 9 - Figure 10 , inside the main pipe 3 and the inner wall of the auxiliary pipe 25, multiple groups of springs 28 are movably installed. At one end of the multiple groups of springs 28, movable plates 27 are installed. And the outer walls of the multiple groups of movable plates 27 are respectively movably connected with the outer walls of the two filter pipes 9. When the harmful gas passes through the filter pipe 9, the harmful gas pushes the movable plate 27 to displace. Then the multiple groups of springs 28 push the movable plate 27 to displace, so that the multiple groups of movable plates 27 strike the outer wall of the filter pipe 9, avoiding more dust adhering to one end of the filter screen, affecting the filtering effect of the filter screen and the passing efficiency of the harmful gas through the filter screen, improving the service life of the filter screen. And when the inner wall of the filter pipe 9 is cleaned, the movable plate 27 strikes the outer wall of the filter pipe 9, reducing the dust adhesion effect on the inner wall of the filter pipe 9 and improving the cleaning effect of the cleaning rod 15 on the dust on the inner wall of the filter pipe 9.

[0049] Working principle: When the staff uses this special gas system during integrated circuit manufacturing, the suction head 4 is placed on one side of the integrated circuit manufacturing platform, and then the main body 1 of the special gas system is started through the control screen 2, so that the suction head 4 generates suction. Harmful gases and dust enter the inside of the main pipe 3 through the suction head, and then enter the inside of the filter pipe 9 through the ball valve 6. The filter pipe 9 separates the harmful gases from the dust, so that the dust remains inside the filter pipe 9, and then the harmful gases enter the inside of the main body 1 of the special gas system through the main pipe 3 for treatment;

[0050] After the main pipe 3 has been used for a long time, the staff rotates the turntable 8 to drive a group of limit posts 7 to rotate. The two groups of limit posts 7 are connected by a synchronous belt, and the two groups of limit posts 7 rotate synchronously, thereby driving the two groups of ball valves 6 to rotate, so that both ends of the main pipe 3 are closed, and both ends of the auxiliary pipe 25 are connected to both ends of the main pipe 3. Harmful gases and dust enter the inside of the auxiliary pipe 25 through a group of ball valves 6. The filter pipe 9 inside the auxiliary pipe 25 separates the harmful gases from the dust. The harmful gases enter another group of ball valves 6 through the auxiliary pipe 25, and then enter the inside of the main pipe 3. After that, the harmful gases enter the inside of the main body 1 of the special gas system;

[0051] When the harmful gases enter the main pipe 3 through the auxiliary pipe 25, the air flow enters the auxiliary pipe 25, blowing a group of isolation plates 11 to flip 90 degrees, thereby driving a group of limit shafts 12 to rotate, and then driving a group of limit bevel gears 13 to rotate. The two groups of limit bevel gears 13 are meshed and connected, and the other group of limit bevel gears 13 rotates, thereby driving the other group of limit shafts 12 to rotate, and then driving the other group of isolation plates 11 to flip, so as to open a group of dust outlet pipes 10. A group of limit shafts 12 and the remaining group of limit shafts 12 are connected by a synchronous belt, and the remaining group of limit shafts 12 rotates, and then drives the remaining group of isolation plates to flip, so as to close the other group of dust outlet pipes 10. Then the staff starts the air pump inside a group of dust collection boxes 24 through the control screen 2, so that a negative pressure is generated at one end of a group of dust outlet pipes 10. The dust inside a group of filter pipes 9 and the harmful gases remaining inside the main pipe 3 enter the inside of a group of dust collection boxes 24 through the dust outlet pipes 10;

[0052] After the air pump inside the dust collection box 24 is started, the harmful gas flows back into the main pipe 3 through the intake pipe 19. When the harmful gas passes through the intake pipe 19, it drives the wind wheel 22 to rotate, thereby driving a set of mounting shafts 21 to rotate, and further driving a set of transmission shafts 23 to rotate. A set of transmission shafts 23 are connected to a set of linkage shafts 17 through a synchronous belt. When a set of linkage shafts 17 rotate, they drive a set of linkage gears 18 to rotate. The linkage gears 18 are meshed and connected to the toothed ring 16, driving a set of toothed rings 16 to rotate, thereby driving the mounting ring 14 to rotate, and further driving the cleaning rod 15 to rotate. The cleaning rod 15 cleans the inner wall of the filter gas pipe 9, reducing the dust attached to the inner wall of the filter gas pipe 9 and further improving the dust cleaning effect inside the filter gas pipe 9.

[0053] Although the embodiments of the present invention have been shown and described, for those of ordinary skill in the art, it can be understood that various changes, modifications, substitutions, and variations can be made to these embodiments without departing from the principles and spirit of the present invention. The scope of the present invention is defined by the appended claims and their equivalents.

Claims

1. A special gas system for integrated circuit manufacturing, comprising a special gas system main body (1), a main pipe (3), and a secondary pipe (25), characterized in that: The intake port of the specialty gas system main body (1) is equipped with a main pipe (3). Both ends of the main pipe (3) are equipped with auxiliary pipes (25). One end of the main pipe (3) is equipped with a suction head (4). The upper end of the specialty gas system main body (1) is equipped with a control panel (2). One end of the specialty gas system main body (1) is provided with an air outlet (26). Mounting seats (5) are installed at the connection ends of the main pipe (3) and the auxiliary pipes (25). Ball valves (6) are movably installed inside the two groups of mounting seats (5). Trident grooves are opened inside the two groups of ball valves (6). Limit columns (7) are installed at one end of the two groups of ball valves (6). A synchronous belt is connected between the ends of the two groups of limit columns (7) extending to one end of the outer wall of the main pipe (32). A turntable (8) is installed at one end of one group of limit columns (7).

2. The special gas system for integrated circuit manufacturing according to claim 1, wherein: Filter pipes (9) are installed inside both the main pipe (3) and the auxiliary pipes (25). Multiple filter holes are opened in the two groups of filter pipes (9). Filter meshes are installed on the inner walls of the multiple filter holes.

3. The special gas system for integrated circuit manufacturing according to claim 2, wherein: Dust outlet pipes (10) are installed at one end of the two groups of filter pipes (9). Partition plates (11) are movably installed inside the two groups of dust outlet pipes (10). A partition plate (11) is movably installed inside the auxiliary pipe (25).

4. The special gas system for integrated circuit manufacturing according to claim 3, wherein: Limit shafts (12) are installed at one end of the multiple groups of partition plates (11). Limit bevel gears (13) are installed at the ends of the two groups of limit shafts (12) extending to the outer walls of the main pipe (3) and the auxiliary pipes (25). The two groups of limit bevel gears (13) are meshed and connected. A synchronous belt is connected between the two groups of limit shafts (12).

5. The special gas system for integrated circuit manufacturing according to claim 4, wherein: Dust collection boxes (24) are installed at the upper end of the specialty gas system main body (1) and the lower end of the auxiliary pipe (25). The ends of the two groups of dust outlet pipes (10) extending to one end of the outer wall of the main pipe (3) and the ends extending to the outer wall of the auxiliary pipe (25) are respectively connected to the dust inlet ports of the two groups of dust collection boxes (24). The control panel (2) is electrically connected to the two air pumps. Air pumps are provided inside the two groups of dust collection boxes (24).

6. The special gas system for integrated circuit manufacturing according to claim 5, wherein: Intake pipes (19) are installed at the air outlet of the two groups of dust collection boxes (24). The two groups of intake pipes (19) are respectively connected to the main pipe (3) and the auxiliary pipes (25). Check valves (20) are provided at one end of the two groups of intake pipes (19) close to the main pipe (3) or close to the auxiliary pipes (25).

7. The special gas system for integrated circuit manufacturing according to claim 6, wherein: Mounting shafts (21) are movably installed inside the two groups of intake pipes (19). Wind wheels (22) are installed on the outer walls of one end of the two groups of mounting shafts (21). Transmission shafts (23) are installed at the ends of the two groups of mounting shafts (21) extending to the outer wall of the intake pipes (19).

8. The special gas system for integrated circuit manufacturing according to claim 7, wherein: Linkage shafts (17) are movably installed inside the inner walls of the two groups of filter pipes (9). Synchronous belts are connected between the two groups of linkage shafts (17) and the two groups of transmission shafts (23) respectively. Linkage gears (18) are installed at one end of the two groups of linkage shafts (17).

9. The special gas system for integrated circuit manufacturing according to claim 8, wherein: Installation rings (14) are movably installed on the inner walls of the two groups of said air filter pipes (9). Tooth rings (16) are installed on the outer walls of the two groups of said installation rings (14), and the two groups of tooth rings (16) are respectively meshed and connected with the two groups of linkage gears (18). Cleaning rods (15) are installed on the inner walls of the two groups of said installation rings (14), and the two groups of cleaning rods (15) are respectively movably connected with the inner walls of the two groups of air filter pipes (9).

10. The special gas system for integrated circuit manufacturing according to claim 2, wherein: Multiple groups of springs (28) are movably installed on the inner walls of the said main pipe (3) and the auxiliary pipe (25). One ends of the multiple groups of said springs (28) are all installed with movable plates (27), and the outer walls of the multiple groups of movable plates (27) are respectively movably connected with the outer walls of the two groups of air filter pipes (9).

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