Plasma washing type tail gas treatment system for high-concentration dust tail gas

Abstract

The invention discloses a plasma washing type tail gas treatment system for high-concentration dust tail gas, which comprises an inner reaction cavity, and the tail gas can be accelerated to enter and exit from the inner reaction cavity; a cooling system surrounds the outer side of the inner reaction cavity, a radial inner and outer layer flow velocity difference can be formed in the cavity, and a multi-stage high and low temperature uniform oxidation region in the cavity is formed; the inner reaction cavity can output tail gas to the lower end of the outer reaction cavity, the tail gas can be cooled and dust can be collected when the tail gas upwards penetrates through the outer reaction cavity, and the upper part of the outer reaction cavity can be communicated to a gas inlet in the bottom of the water washing tower; an overflow part is connected below a lower port of the outer reaction cavity, tail gas output by the inner reaction cavity penetrates through the overflow part and then enters the lower end of the outer reaction cavity, a multi-stage annular spraying mechanism is longitudinally arranged in the outer reaction cavity, and a water film is formed on the inner wall of the overflow part. The problem of blockage caused by multiple factors in a special tail gas treatment link can be solved through the reaction cavity structure and the internal water-gas system.

Description

Technical Field

[0001] The present invention relates to the technical field of waste gas treatment in industrial production, and particularly to a plasma water washing type waste gas treatment system for high-concentration dust waste gas. Background Art

[0002] Industrial waste gas often contains a large amount of dust and toxic substances. Especially for the special gases used in most semiconductor factories and solar factories, during the treatment of this waste gas, due to the high dust concentration in the waste gas, blockage of the waste gas pipeline is a common problem. For the toxic substances contained in the waste gas, they need to be decomposed or reacted through thermal decomposition or oxidation reactions to generate substances that are soluble in water or deposited, so as to be separated from the discharged waste gas. However, in this part of the reaction, solid particles may also be generated, further increasing the dust concentration in the waste gas, thus exacerbating the problem of pipeline blockage. Summary of the Invention

[0003] Object of the Invention: In order to overcome the deficiencies in the prior art, the present invention provides a plasma water washing type waste gas treatment system for high-concentration dust waste gas, which can solve the blockage problems caused by multiple factors in the special waste gas treatment process through the reaction chamber structure and the internal water-gas system.

[0004] Technical Solution: To achieve the above object, a plasma water washing type waste gas treatment system for high-concentration dust waste gas of the present invention includes an inner reaction chamber, which can form a high-temperature environment and allow the input waste gas to decompose or react, and the waste gas can accelerate in and out of the inner reaction chamber; a cooling system is surrounded outside the inner reaction chamber, which can form a radial inner and outer layer flow velocity difference in the chamber and form multiple levels of high and low temperature uniform oxidation zones in the chamber;

[0005] The inner reaction chamber can send the waste gas output therefrom to the lower end of the outer reaction chamber. When the waste gas passes upward through the outer reaction chamber, it can be cooled and dust can be collected. The upper part of the outer reaction chamber can be connected to the bottom air inlet of the water washing tower, and a waste gas discharge port is provided at the top of the water washing tower;

[0006] An overflow part is connected below the lower port of the outer reaction chamber. The waste gas output from the inner reaction chamber passes through the overflow part and then enters the lower end of the outer reaction chamber. A multi-level circumferential spraying mechanism is longitudinally arranged inside the outer reaction chamber, and a water film is formed on the inner wall of the overflow part.

[0007] Further, the inner reaction chamber is a longitudinal cylindrical chamber. The cooling system includes a plurality of temperature reduction mechanisms surrounded outside the inner wall of the inner reaction chamber. The plurality of temperature reduction mechanisms are longitudinally spaced apart and can form multiple levels of longitudinal, high and low temperature alternating uniform oxidation zones inside the inner reaction chamber.

[0008] Further, the outer reaction chamber is a longitudinal annular cylindrical chamber, and the outer reaction chamber is sleeved outside the inner reaction chamber. The multi-stage circumferential spraying mechanism in the outer reaction chamber serves as a plurality of cooling mechanisms surrounding the outer side of the inner reaction chamber wall.

[0009] Further, the cooling system includes CDA gas evenly blown in a ring outside the inner reaction chamber, which can combine with the multi-stage circumferential spraying mechanism to form a multi-stage water network covering the transverse cross-section, and a large number of fine misty water molecule clusters are formed.

[0010] Further, the cooling system further includes a full-coverage water waterfall formed on the outer surface of the inner reaction chamber wall, which can form a circumferential uniform cooling zone together with the ring-blown CDA gas.

[0011] Further, the upper cavity of the outer reaction chamber is connected to the lower inlet of the water washing tower through a lateral bypass pipe. The corner where the bypass pipe communicates with the lower end of the water washing tower is set as a large-sized commutation chamber, and a maintenance opening that can be opened is provided on one side;

[0012] The multi-stage circumferential spraying mechanism is located below the air inlet port of the bypass pipe. The inner surface of the cavity of the outer reaction chamber above the multi-stage circumferential spraying mechanism is coated with a hydrophilic coating, and the inner surface of the remaining lower cavity is coated with an acid and alkali corrosion-resistant coating.

[0013] Further, the inlet pipe of the inner reaction chamber includes a longitudinal and large-diameter conveying pipe section and an accelerating pipe section for accelerating air intake. The diameter of the accelerating pipe section is narrower than that of the conveying pipe section; the accelerating pipe section includes an inclined part connected to the conveying pipe section and a vertical part connected to the inner reaction chamber, and a scraper structure that can longitudinally lift and lower is provided at the upper part of the vertical part.

[0014] Further, the lower water collecting pipe of the overflow part extends to near the bottom of the water tank and extends into the dust collection structure. The dust collection structure is a net-like container structure and is immersed in the water body of the water tank. The water tank circulates water for the water washing tower and the multi-stage circumferential spraying mechanism through a water supply pipeline.

[0015] Further, the dust collection structure is a cylindrical flexible mesh bag, the upper and lower ports of which are respectively fixedly connected to the upper and lower wall surfaces of the water tank through annular fixing structures, and a disturbing device is arranged in the water body beside it, which can reciprocally sweep the water body to form water waves that laterally disturb the flexible mesh bag.

[0016] Further, it includes anti-blocking of the following multiple sections:

[0017] The inner reaction chamber is anti-clogging. By accelerating the input exhaust gas and accelerating the output after the exhaust gas passes through the plasma flame area, it is used to enhance the flow rate of dust relative to the inner cavity wall to reduce the dust adhesion amount. By using a waterfall on the outer side of the cavity wall for full-coverage heat dissipation, it is used to form a radial inner and outer layer flow rate difference in the cavity, so that the dust flows towards the inner layer and away from the cavity wall. By using a multi-stage circumferential spraying mechanism on the outer side of the cavity wall to form multi-stage high and low temperature uniform oxidation areas in the cavity, it is used to trigger a uniform oxidation reaction in a longitudinal multi-stage manner to reduce the concentrated generation of dust products in a local area.

[0018] The outer reaction chamber is anti-clogging. The upper part of the outer ring wall forms a water film through a hydrophilic coating, the lower part of the outer ring wall is washed by a multi-stage circumferential spraying mechanism, and the inner ring wall is washed by a full-coverage waterfall, so that neither the inner nor the outer ring walls of the outer reaction chamber adhere to dust. Through the water film formed by the overflow part, the dust flowing down from the inner and outer ring walls does not deposit at the overflow part.

[0019] The water washing tower is anti-clogging. Through a multi-stage water network covering the cross-section formed in the outer reaction chamber and a large number of fine mist-like water molecule clusters, a large amount of dust is left in the outer reaction chamber and sent to the dust collection structure in the water tank along with the converging water flow, which can reduce the dust removal load of the water washing tower. On this basis, the water washing tower uses a vertical and large-diameter hollow pipe as the tower body to form an unobstructed exhaust channel.

[0020] The water tank for circulating water supply is anti-clogging. By using a flexible mesh bag to block the dust from dispersing into the water body of the water tank and generating a transverse water wave to pass through and disturb the flexible mesh bag, the collected dust does not deposit in the mesh bag and does not adhere to the mesh surface, enabling the water circulation supply in the water tank.

[0021] Beneficial effects: A plasma water washing type exhaust gas treatment system for high-concentration dust exhaust gas of the present invention realizes the full-process anti-clogging of the entire exhaust gas treatment reaction system through multiple anti-clogging links such as anti-clogging of the exhaust gas inlet, inner and outer reaction chambers, tail water washing pipeline, and circulating water tank, thoroughly solving the blockage risk in the exhaust gas treatment process. Description of the Drawings

[0022] Figure 1 It is a schematic diagram of the overall structure and the internal exhaust gas state of an embodiment of the exhaust gas treatment system of the present invention. Detailed Embodiments

[0023] The present invention will be further described in detail below with reference to the drawings.

[0024] As shown in the attached Figure 1The described plasma water-washing type tail gas treatment system for high-concentration dust tail gas includes an inner reaction chamber 1. A plasma torch is arranged at the central position of the upper part of the inner reaction chamber 1 to form a plasma flame in the central area of the upper part of the chamber, so as to form a high-temperature environment in the chamber and allow the input tail gas to undergo high-temperature decomposition or oxidation reaction. And the tail gas can accelerate in and out of the inner reaction chamber 1, so that the dust-containing gas flow is not easily adhered to the chamber wall and accumulated at the inlet and outlet, thus avoiding the blockage of the inlet and outlet of the inner reaction chamber. A cooling system is arranged around the outer side of the inner reaction chamber 1, which can make a radial flow velocity difference between the inner and outer layers in the chamber. Among them, the inner-layer gas flow has a higher temperature, active molecules and a smaller density, so the flow velocity is faster, while the outer-layer gas flow has a relatively lower temperature, so the density is large and the flow velocity is slow. The high-speed inner-layer gas flow forms a low-pressure area, so that the outer-layer gas can drive the dust to flow inwards and away from the chamber wall. On this basis, due to the rapid in and out of the tail gas, a small amount of dust close to the chamber wall cannot adhere to the chamber wall relatively, thus avoiding the blockage inside the inner reaction chamber. And a multi-stage high-low temperature uniform oxidation area is formed in the chamber. By forming a low-temperature area every time passing through a section to uniform the oxidation reaction, multiple oxidation areas are formed longitudinally, and each oxidation area is uniformly oxidized. Cooperating with the high-speed flow of the tail gas in the chamber, when the tail gas passes through these uniform oxidation areas at a high speed, the uniform oxidation of the tail gas in the whole inner reaction chamber can be realized, avoiding the concentrated oxidation reaction in a local area and generating a large amount of solid dust accumulation. Therefore, when treating some special tail gases that can generate dust particles through oxidation reaction, the risk of blockage of the inner reaction chamber is further reduced, and the generation of nitrogen oxides is effectively reduced in this process.

[0025] The inner reaction chamber 1 can send the tail gas output therefrom to the lower end of the outer reaction chamber 2. When the tail gas passes upward through the outer reaction chamber 2, it can be cooled and the dust can be collected. The upper part of the outer reaction chamber 2 can be communicated with the bottom air inlet of the water-washing tower 3, and a tail gas discharge port is arranged at the top of the water-washing tower 3. Since the dust-containing tail gas passes through the outer reaction chamber 2 and the water-washing tower 3 from bottom to top, most of the dust can be separated from the gas by cooperating with the spraying of water during this process. Considering that the conventional spraying tower intercepts dust through multiple groups of spray heads, fillers or mesh partition plates arranged inside, it is easy to cause the blockage of the spraying tower, and the resistance is large when the gas passes through, the exhaust efficiency is reduced, and the load is large. To solve the problems caused by blockage, the dust adsorbed on the fillers or partition plates needs to be cleaned regularly, and the cleaning is relatively difficult. If the cleaning is not thorough, the permanent effect will become worse. Therefore, in this scheme, most of the dust is collected in the outer reaction chamber part, so as to reduce the working load of the water-washing tower 3. The tail gas treatment can be completed by only arranging the spraying structure, omitting the filler and partition plate structures, making the internal resistance smaller, the pipe diameter can be set larger, the gas flow is smoother, the dust amount is reduced and it is not easy to accumulate and block, and a small amount of dust is easier to clean, effectively avoiding the blockage of the water-washing tower caused by dust.

[0026] An overflow part 4 is connected below the lower port of the outer reaction chamber 2. The tail gas output from the inner reaction chamber 1 passes through the overflow part 4 and then enters the lower end of the outer reaction chamber 2. A multi-stage circumferential spraying mechanism 21 is longitudinally arranged inside the outer reaction chamber 2, and a water film is formed on the inner wall of the overflow part 4. Inside the outer reaction chamber, through the multi-stage annular spraying structure, the water mist ejected can combine with the dust particles in the tail gas. By wetting and coarsening the dust particles, the water absorption surface thereof can be increased, and then the surrounding dust particles can be further adsorbed, so that the weight of the dust mass is gradually increased, the sedimentation of the dust is accelerated, and the settled dust finally falls into the lower overflow part 4. The overall overflow part is in a funnel structure with a constricted center at the bottom end. By forming an artificial overflow phenomenon on its surface, a flowing water film is formed, so that the dust mass falling on the surface is not easy to deposit, but flows along the surface and finally flows into the lower water tank. The large accumulation of dust in the outer reaction chamber is avoided, and thus the blockage of the reaction chamber is effectively avoided.

[0027] The lower end water collecting pipe 41 of the overflow part 4 extends to be close to the bottom of the water tank 5 and extends into the dust collection structure 6. The dust collection structure 6 is a net-like container structure and is immersed in the water body of the water tank 5. The water tank 5 circulates water supply for the water washing tower 3 and the multi-stage circumferential spraying mechanism 21 through a water supply pipeline. Among them, the dust collection structure 6 is equivalent to a filter screen. The water sprayed in the outer reaction chamber and the water washing tower converges at the overflow part and flows back to the water tank through the lower end water collecting pipe 41. The water in the water tank is pumped by a water pump and sent to the water washing tower 3 and the outer reaction chamber to form a circulating water use. The dust collection structure 6 effectively avoids the dust from entering the water supply of the spraying system, and thus avoids the dust from entering the reaction chamber again and increasing the blockage risk.

[0028] On this basis, the dust collection structure 6 is a cylindrical flexible mesh bag. Its upper and lower ports are respectively fixedly connected to the upper and lower wall surfaces of the water tank 5 through annular fixing structures, and a disturbance device 7 is arranged in the water body beside it, which can reciprocally sweep the water body to form transverse water waves that disturb the flexible mesh bag. Through the disturbed water waves, the mesh bag and the water body inside it can be driven to fluctuate together, so that the internal dust is always in a suspended state, and the fluctuation of the mesh bag also reduces the adsorption of the dust to the mesh bag, effectively avoiding the deposition of the dust, further avoiding the blockage of the lower port of the water collecting pipe 41, and also avoiding the blockage of the mesh holes of the mesh bag, ensuring the normal circulation of the water flow, and avoiding the water level from rising in the outer reaction chamber.

[0029] Furthermore, a concentration detection sensor can be arranged inside the mesh bag, a sewage discharge port can be opened on the water tank body corresponding to the lower end of the mesh bag, and a valve can be arranged. The opening and closing of the valve are controlled by the concentration detection sensor. When the dust concentration is too high, automatic sewage discharge is carried out. Considering the lack of total water volume caused by sewage discharge, an additional water supply pipeline from the outside is added. Preferably, the water supply pipeline is introduced into the top of the water scrubber in the form of spraying, as the last water scrubbing process before the tail gas is discharged, and a water-gas separation device or a gas drying device is added at the exhaust port.

[0030] Embodiment; the inner reaction chamber 1 is a longitudinal cylindrical chamber, and the cooling system includes a plurality of cooling mechanisms surrounding the outer side of the wall of the inner reaction chamber 1. The plurality of cooling mechanisms are longitudinally spaced apart and can form a longitudinal, multi-stage uniform oxidation zone with alternating high and low temperatures inside the inner reaction chamber 1. The cooling mechanism can be realized by blowing air or spraying water directly against the chamber wall. The longitudinal spacing between adjacent cooling mechanisms is specifically set according to the amount of dust generated by the oxidation reaction of the tail gas within a single spacing.

[0031] The outer reaction chamber 2 is a longitudinal annular cylindrical chamber, and the outer reaction chamber 2 is sleeved outside the inner reaction chamber 1. The multi-stage circumferential spraying mechanism 21 in the outer reaction chamber 2, on the basis of the original spraying device for settling dust, further serves as a plurality of cooling mechanisms surrounding the outer side of the wall of the inner reaction chamber 1. Thus, the circumferential spraying mechanism 21 has a dual function.

[0032] The cooling system includes CDA gas evenly blown around the outside of the inner reaction chamber 1 and also blown circumferentially inside the outer reaction chamber 2. First of all, it can evenly cool the wall of the inner reaction chamber to a certain extent, thereby promoting the formation of an internal flow velocity difference. In addition, it can combine with the multi-stage circumferential spraying mechanism 21 to form a multi-stage water network covering the transverse section and form a large number of fine misty water molecule clusters. Among them, the circumferential spraying mechanism 21 uses high-flow spiral nozzles, which can spray refined water mist. Under the action of the annular wind field, it is further homogenized and forms a circumferential flowing water network. When the tail gas passes upward through the water network, it will also be affected by the circumferential wind field and form a spiral upward trend, thereby increasing the residence time of the tail gas in the outer reaction chamber. The dust also has enough time to contact the water vapor, and thus gradually coarsens, which is more conducive to the dust staying in the outer reaction chamber.

[0033] The cooling system further includes a full-coverage water waterfall formed on the outer surface of the wall of the inner reaction chamber 1, which can form a circumferential uniform cooling zone together with the circumferentially blown CDA gas. Further enhancing the cooling effect on the outer wall of the inner reaction chamber, and then enhancing the internal flow velocity difference phenomenon. In addition, the water waterfall effectively avoids the adsorption and accumulation of dust on the outer surface of the wall of the inner reaction chamber 1, and has a significant effect on preventing blockage of the outer reaction chamber.

[0034] The upper cavity of the outer reaction chamber 2 is connected to the lower inlet of the water scrubber 3 through a lateral bypass pipe 31. A large-sized commutation chamber 32 is provided at the corner where the bypass pipe 31 communicates with the lower end of the water scrubber 3, and an openable maintenance port is provided on one side. Dust is most likely to accumulate at the corner. By increasing the inner diameter here, the contact between dust and the wall is reduced. And by providing a maintenance port, it is convenient to clean the dust, which has a beneficial effect on preventing blockage of the water scrubber.

[0035] A plurality of the circumferential spraying mechanisms 21 are located below the air inlet port of the bypass pipe 31. The inner surface of the cavity of the outer reaction chamber 2 above the plurality of circumferential spraying mechanisms 21 is coated with a hydrophilic coating, such as a hydrophilic ceramic coating, which can attract water molecules to form a water film, so that the dust adsorbed thereon can naturally flow down along the wall with the water flow, thereby avoiding the accumulation and blockage of dust on the upper half of the outer ring wall. The inner surface of the remaining lower cavity is coated with an acid and alkali corrosion-resistant coating, such as a Teflon material, which has corrosion resistance and can prevent the acid and alkali products after the reaction from corroding the wall when dissolved in water. The outer ring wall of the lower part can be flushed by the circumferential spraying mechanisms 21 to avoid the accumulation and blockage of dust. This reflects the third function of the circumferential spraying mechanism 21, and at the same time takes into account the anti-blocking effect in special cases of the inner reaction chamber and the anti-blocking effect of the local part of the outer reaction chamber.

[0036] Embodiment: The inlet pipe of the inner reaction chamber 1 includes a longitudinal and large-diameter conveying pipe section 11 and an accelerating pipe section 12 for accelerating the intake air. The diameter of the accelerating pipe section 12 is narrower than that of the conveying pipe section 11, which can accelerate the intake air and avoid the adsorption of dust on the pipe wall. The accelerating pipe section 12 includes an inclined part connected to the conveying pipe section 11 and a vertical part connected to the inner reaction chamber 1. A small-angle corner is beneficial to prevent H2 backfire and is not likely to cause dust accumulation at the corner. On this basis, a heating sleeve can be sleeved outside the inlet pipe to further increase the gas flow rate and reduce the risk of blockage of the inlet pipe. And a scraping blade structure 13 capable of longitudinally lifting is provided at the upper part of the vertical part. By longitudinally scraping, the dust is scraped off the pipe wall relative to the inlet, completely solving the blockage problem of dust at the inlet.

[0037] This solution has a good anti-blocking effect in dealing with high-concentration dust tail gas treatment, especially for the treatment of special gases that generate new dust during the oxidation reaction. The anti-blocking methods for the following multiple sections are specifically included:

[0038] The inner reaction chamber 1 is anti-clogging. By accelerating the input exhaust gas and accelerating the output after the exhaust gas passes through the plasma flame region, it is used to enhance the flow rate of dust relative to the inner cavity wall to reduce the dust adhesion amount. By performing full-coverage heat dissipation through the waterfall on the outer side of the cavity wall, it is used to form a radial inner and outer layer flow rate difference in the cavity, so that the dust flows inward and away from the cavity wall. By forming a multi-stage circumferential spraying mechanism 21 on the outer side of the cavity wall, a multi-stage high and low temperature uniform oxidation region is formed in the cavity, which is used to trigger a uniform oxidation reaction in a longitudinal multi-stage manner to reduce the concentrated generation of dust products in a local area.

[0039] The outer reaction chamber 2 is anti-clogging. The upper part of the outer circumferential wall forms a water film through a hydrophilic coating, the lower part of the outer circumferential wall is washed by a multi-stage circumferential spraying mechanism 21, and the inner circumferential wall is washed by a full-coverage waterfall, so that neither the inner nor the outer circumferential walls of the outer reaction chamber adhere to dust. Through the water film formed by the overflow part 4, the dust flowing down from the inner and outer circumferential walls does not deposit in the overflow part.

[0040] The water washing tower 3 is anti-clogging. Through a multi-stage water network covering the cross-section formed in the outer reaction chamber 2 and a large number of fine mist-like water molecule clusters, a large amount of dust is left in the outer reaction chamber 2 and sent to the dust collection structure 6 in the water tank along with the converging water flow, which can reduce the dust removal load of the water washing tower 3. On this basis, the water washing tower 3 uses a vertical and large-diameter hollow pipe as the tower body to form an unobstructed exhaust passage.

[0041] The water tank 5 has anti-clogging for circulating water supply. By using a flexible mesh bag to block the dust from dispersing into the water body of the water tank and generating a transverse water wave to pass through and disturb the flexible mesh bag, the collected dust does not deposit in the mesh bag and does not adhere to the mesh surface, enabling the water in the water tank to be circulated and supplied.

[0042] The above description is only the preferred embodiment of the present invention. It should be pointed out that for those of ordinary skill in the art in this technical field, without departing from the above principles of the present invention, several improvements and refinements can still be made, and these improvements and refinements are also regarded as the protection scope of the present invention.

Claims

1. A plasma water-washing type tail gas treatment system for high-concentration dust tail gas, characterized in that: It includes an inner reaction chamber (1) which can form a high-temperature environment and decompose or react the input tail gas, and the tail gas can accelerate in and out of the inner reaction chamber (1); a cooling system is surrounded outside the inner reaction chamber (1), which can form a radial flow velocity difference between the inner and outer layers in the chamber and form multiple high- and low-temperature uniform oxidation zones in the chamber; The inner reaction chamber (1) can send the tail gas it outputs to the lower end of the outer reaction chamber (2). When the tail gas passes upward through the outer reaction chamber (2), it can be cooled and dust can be collected. The upper part of the outer reaction chamber (2) can be connected to the bottom air inlet of the water washing tower (3), and a tail gas discharge port is arranged at the top of the water washing tower (3); An overflow part (4) is connected below the lower port of the outer reaction chamber (2). The tail gas output from the inner reaction chamber (1) passes through the overflow part (4) and then enters the lower end of the outer reaction chamber (2). Multiple circumferential spraying mechanisms (21) are longitudinally arranged inside the outer reaction chamber (2), and a water film is formed on the inner wall of the overflow part (4).

2. The plasma water-washing type tail gas treatment system for high-concentration dust tail gas according to claim 1, wherein: The inner reaction chamber (1) is a longitudinal cylindrical chamber. The cooling system includes multiple cooling mechanisms surrounded outside the wall of the inner reaction chamber (1). The multiple cooling mechanisms are longitudinally spaced apart and can form multiple longitudinal, high- and low-temperature alternating uniform oxidation zones inside the inner reaction chamber (1).

3. The plasma water washing type tail gas treatment system for high-concentration dust tail gas according to claim 2, characterized in that: The outer reaction chamber (2) is a longitudinal annular cylindrical chamber, and the outer reaction chamber (2) is sleeved outside the inner reaction chamber (1). The multiple circumferential spraying mechanisms (21) in the outer reaction chamber (2) serve as multiple cooling mechanisms surrounded outside the wall of the inner reaction chamber (1).

4. The plasma water washing type tail gas treatment system for high-concentration dust tail gas according to claim 3, characterized in that: The cooling system includes CDA gas evenly blown around the outside of the inner reaction chamber (1), which can combine with the multiple circumferential spraying mechanisms (21) to form multiple water nets covering the transverse section and form a large number of fine misty water molecule clusters.

5. The plasma water-washing type tail gas treatment system for high-concentration dust tail gas according to claim 4, characterized in that: The cooling system further includes a full-coverage water waterfall formed on the outer surface of the wall of the inner reaction chamber (1), which can jointly form a circumferential uniform cooling zone with the blown CDA gas.

6. The plasma water washing type tail gas treatment system for high-concentration dust tail gas according to claim 5, characterized in that: The upper cavity of the outer reaction chamber (2) is connected to the lower air inlet of the water washing tower (3) through a lateral bypass pipe (31). The corner where the bypass pipe (31) is connected to the lower end of the water washing tower (3) is set as a large-sized commutation chamber (32), and a maintenance opening that can be opened is arranged on one side; The multiple circumferential spraying mechanisms (21) are located below the air inlet port of the bypass pipe (31). The inner surface of the cavity of the outer reaction chamber (2) above the multiple circumferential spraying mechanisms (21) is coated with a hydrophilic coating, and the inner surface of the remaining lower cavity is coated with an acid- and alkali-resistant coating.

7. The plasma water-washing type tail gas treatment system for high-concentration dust tail gas according to claim 1, wherein: The intake pipe of the inner reaction chamber (1) includes a longitudinal and large-diameter conveying pipe section (11) and an accelerating pipe section (12) for accelerating air intake. The diameter of the accelerating pipe section (12) is narrower than that of the conveying pipe section (11); the accelerating pipe section (12) includes an inclined part connected to the conveying pipe section (11) and a vertical part connected to the inner reaction chamber (1), and a scraping knife structure (13) that can longitudinally move up and down is arranged on the upper part of the vertical part.

8. The plasma water washing type tail gas treatment system for high-concentration dust tail gas according to claim 1, characterized in that: The lower end water collecting pipe (41) of the overflow part (4) extends close to the bottom of the water tank (5) and extends into the interior of the dust collection structure (6). The dust collection structure (6) is a net-shaped container structure and is immersed in the water body of the water tank (5). The water tank (5) circulates water supply to the water scrubbing tower (3) and the multi-stage circumferential spraying mechanism (21) through a water supply pipeline.

9. The plasma water washing type tail gas treatment system for high-concentration dust tail gas according to claim 9, wherein: The dust collection structure (6) is a cylindrical flexible net bag, the upper and lower ports of which are respectively fixedly connected to the upper and lower wall surfaces of the water tank (5) through an annular fixing structure, and a disturbance device (7) is arranged in the water body beside it, which can reciprocally sweep across the water body to form water waves that laterally disturb the flexible net bag.

10. A method for preventing blockage of a plasma water-washing type tail gas treatment system for high-concentration dust tail gas according to any one of claims 1-9, characterized in that, It includes anti-blocking of the following multiple sections: Anti-blocking of the inner reaction chamber (1): By accelerating the input of tail gas and accelerating the output after the tail gas passes through the plasma flame area, it is used to enhance the flow velocity of dust relative to the inner cavity wall to reduce the dust adhesion amount; By carrying out full-coverage heat dissipation through the water waterfall on the outer side of the cavity wall, it is used to form a radial inner and outer layer flow velocity difference in the cavity, so that the dust flows towards the inner layer and away from the cavity wall; By forming multi-stage high and low temperature uniform oxidation zones in the cavity through the multi-stage circumferential spraying mechanism (21) on the outer side of the cavity wall, it is used to trigger uniform oxidation reactions in a longitudinal multi-stage manner to reduce the concentrated generation of dust products in local areas; Anti-blocking of the outer reaction chamber (2): A water film is formed on the upper part of the outer ring wall through a hydrophilic coating, the lower part of the outer ring wall is washed through the multi-stage circumferential spraying mechanism (21), and the inner ring wall is washed through a full-coverage water waterfall, so that no dust adheres to the inner and outer ring walls of the outer reaction chamber; Through the water film formed by the overflow part (4), the dust flowing down from the inner and outer ring walls does not deposit in the overflow part; Anti-blocking of the water scrubbing tower (3): Through the multi-stage water net covering the cross-section formed in the outer reaction chamber (2) and a large number of fine mist-like water molecule clusters, a large amount of dust is left in the outer reaction chamber (2) and sent to the dust collection structure (6) in the water tank along with the converging water flow, which can reduce the dust removal load of the water scrubbing tower (3). On this basis, the water scrubbing tower (3) uses a vertical and large-diameter hollow pipe as the tower body to form an unobstructed exhaust passage; Anti-blocking of the circulating water supply of the water tank (5): The flexible net bag blocks the dust from dispersing into the water body of the water tank, and generates lateral water waves to pass through and disturb the flexible net bag, so that the collected dust does not deposit in the net bag and does not adhere to the net surface, which can enable the water in the water tank to be circulated and supplied.

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