Two-dimensional composite laser cleaning device

Abstract

The invention provides a two-dimensional composite laser cleaning device, and relates to the technical field of laser cleaning, the two-dimensional composite laser cleaning device comprises a two-dimensional galvanometer scanning combination package, a pulse laser collimating lens, a light path collimating turn-back package, a continuous laser collimating lens, a plane field lens and a working platform, the pulse laser collimating lens and the continuous laser collimating lens are connected to the two ends of the light path collimation turn-back package respectively, a mechanical arm switching module is arranged on the light path collimation turn-back package, the pulse laser collimating lens is used for being connected with a nanosecond pulse laser, the continuous laser collimating lens is used for being connected with a continuous laser, and the mechanical arm switching module is used for being connected with the nanosecond pulse laser. And the light path collimation turn-back packaging is used for carrying out collimation and compression combination on the pulse laser and the continuous laser so as to output a parallel composite light beam. According to the invention, field curvature and distortion can be effectively suppressed, and the phenomenon of non-uniform energy of light beam scanning is improved.

Description

Technical Field

[0001] The present invention relates to the technical field of laser cleaning, and in particular, to a two-dimensional composite laser cleaning device. Background Art

[0002] Laser surface processing technology is an advanced surface treatment technology with laser as the carrier. In recent years, with the improvement of laser performance, it has witnessed rapid development and innovation. As an important emerging technical branch of laser surface processing, laser cleaning technology effectively removes attachments on the surface of the workpiece to be processed by using the change mechanism of the interaction between the laser and the workpiece surface. It is a green and non-destructive new industrial cleaning method, and has the advantages of high controllability, non-contact, and high efficiency. In recent years, it has gradually replaced traditional industrial cleaning technology in some application fields and has continuously received extensive attention from researchers in various fields.

[0003] In related technologies, laser cleaning often adopts composite laser cleaning. Laser cleaning is one-dimensional line-scanning cleaning. It often realizes the spot coincidence in a certain axial direction at the focusing link of the field lens. At the same time, at the front end of the field lens, the parallel direction of this axial direction is used as the deflection axial direction of the galvanometer. Two one-dimensional galvanometers arranged in a staggered manner in the deflection axial direction are used to complete the reciprocating scanning movement of two laser beams in the vertical direction. Then, a one-dimensional line-scanning process of the composite spot is realized on the focusing surface of the field lens. It has the advantages of convenient operation and simple cooperation. However, while finally obtaining a moving composite spot on a single axis, phenomena such as field curvature and distortion occur, which is not conducive to the dynamic distribution of the spot energy. Moreover, during the dynamic deflection process of the one-dimensional galvanometer, the uniformity of the scanning energy of the corresponding focal plane spot is poor, which is also not conducive to high-quality and high-efficiency cleaning. Summary of the Invention

[0004] The problem to be solved by the present invention is that the spots used for cleaning in related technologies are prone to phenomena such as field curvature and distortion, which is not conducive to the dynamic distribution of the spot energy, and the uniformity of the scanning energy of the corresponding focal plane spot is poor.

[0005] In order to solve the above problems, the present invention provides a two-dimensional composite laser cleaning device, including a two-dimensional galvanometer scanning combination package, a pulse laser collimator, an optical path collimation and return package, a continuous laser collimator, a plane field mirror and a working platform, wherein the pulse laser collimator and the continuous laser collimator are respectively connected to the two ends of the optical path collimation and return package, and a mechanical arm adapter module is provided on the optical path collimation and return package. The pulse laser collimator is used to connect with a nanosecond pulse laser, the continuous laser collimator is used to connect with a continuous laser, and the optical path collimation and return package is used to connect the pulse laser to the continuous laser. The laser and continuous laser are collimated and compressed to output a parallel composite light beam. Along the propagation direction of the parallel composite light beam, the optical path collimation return package, the two-dimensional galvanometer scanning combination package and the plane field mirror are connected in sequence. The two-dimensional galvanometer scanning combination package is used to perform two-dimensional polarization scanning on the parallel composite light beam to output a two-dimensional composite laser spot. The working platform and the plane field mirror are arranged at intervals corresponding to each other. The plane field mirror is used to refract and converge the two-dimensional composite laser spot to perform two-dimensional laser cleaning on the workpiece to be cleaned on the working platform.

[0006] Optionally, the optical path collimation and return package includes a first converging unit, a second converging unit and a merging unit. The first converging unit and the second converging unit are arranged on both sides of the merging unit. The first converging unit is used to compress the pulse laser from the pulse laser collimator, and the second converging unit is used to compress the continuous laser from the continuous laser collimator. The merging unit is used to merge the compressed pulse laser and continuous laser respectively, and output the parallel composite light beam.

[0007] Optionally, the merging unit includes a convex parabolic mirror and a concave lens; the first converging unit includes a pulsed laser reflecting mirror and a pulsed laser concave parabolic mirror, the pulsed laser passing through the pulsed laser collimating mirror, the pulsed laser reflecting mirror and the pulsed laser concave parabolic mirror in sequence and then being incident on the convex parabolic mirror, the pulsed laser reflecting mirror is used to vertically change the exit direction of the pulsed laser from the pulsed laser collimating mirror, the incident angle of the pulsed laser incident on the pulsed laser concave parabolic mirror is a first preset acute angle, and the pulsed laser concave parabolic mirror is used to compress the pulsed laser;

[0008] The second converging unit includes a continuous laser reflecting mirror and a continuous laser concave parabolic mirror. The continuous laser passes through the continuous laser collimating mirror, the continuous laser reflecting mirror and the continuous laser concave parabolic mirror in sequence and then enters the convex parabolic mirror. The continuous laser reflecting mirror is used to vertically change the exit direction of the continuous laser from the pulse laser collimating mirror. The incident angle of the pulse laser entering the continuous laser concave parabolic mirror is a second preset acute angle. The continuous laser concave parabolic mirror is used to compress the continuous laser.

[0009] The centers of the convex parabolic mirror and the concave lens are on the first horizontal line. The compressed pulsed laser and the continuous laser are incident from both sides of the convex parabolic mirror respectively, and are combined into the parallel composite beam after passing through the convex parabolic mirror and the concave lens in sequence.

[0010] Optionally, the pulsed laser mirror and the continuous laser mirror are symmetrically distributed on both sides of the convex parabolic mirror and the concave lens with the first horizontal line as the axis of symmetry. The pulsed laser concave parabolic mirror and the continuous laser concave parabolic mirror are symmetrically distributed on both sides of the convex parabolic mirror and the concave lens with the first horizontal line as the axis of symmetry. The reflection optical paths of the convex parabolic mirror for the compressed pulsed laser and the continuous laser do not overlap each other.

[0011] Optionally, the optical path collimation and folding package has a folding compression ratio greater than 2 for both the pulsed laser and the continuous laser.

[0012] Optionally, the two-dimensional galvanometer scanning combination package includes a Y-axis scanning galvanometer and an X-axis scanning galvanometer. The Y-axis scanning galvanometer and the X-axis scanning galvanometer are spaced at a preset distance and are arranged with a 45-degree offset. The parallel composite beam passes through the Y-axis scanning galvanometer and the X-axis scanning galvanometer continuously at a 45-degree incident angle, and the Y-axis scanning galvanometer and the X-axis scanning galvanometer scan the parallel composite beam respectively with preset scanning parameters. The scanned parallel composite beam is perpendicularly incident from the central position of the plano-field lens.

[0013] Optionally, the preset scanning parameters include a scanning angle and a scanning frequency, and the scanning angle matches the scanning frequency.

[0014] Optionally, the preset scanning parameters further include a scanning trajectory and a scanning speed, and different scanning trajectories and scanning speeds correspond to different uniform scanning curves.

[0015] Optionally, the working platform is movably arranged.

[0016] Optionally, it further includes a dust removal unit and an observation unit.

[0017] The beneficial effect of the two-dimensional composite laser cleaning device of the present invention is that the entire device can be moved to the corresponding position of the work platform by means of the mechanical arm adapter module on the optical path collimation and return package, and the entire device can be moved to the corresponding position of the work platform under the drive of the mechanical arm. Through the coordinated setting of the optical path collimation and return package, the two-dimensional galvanometer scanning combination package and the plane field mirror, the pulse laser collimator is used to connect with the nanosecond pulse laser, and the pulse laser is incident through the plane field mirror. Similarly, the continuous laser is incident through the continuous laser collimator, and then passes through the optical path collimation and return package. The optical path collimation and return package has the function of collimation and compression merging, and is connected to the corresponding Between the laser and the two-dimensional galvanometer scanning combination package, therefore, the optical path collimation and return package can act on the pulse laser and the continuous laser to obtain two collimated parallel light beams, and then compress and merge the two collimated parallel light beams, and input the combined parallel light into the two-dimensional galvanometer scanning combination package. Through the parallel light beam compression and beam combining effect of the optical path collimation and return package, the two light beams are nearly coaxially transmitted at the front end of the two-dimensional galvanometer scanning combination package, and are input into the two-dimensional galvanometer scanning combination package as a parallel composite light beam, which reduces the space size and weight required for the two-dimensional galvanometer reflection and improves the scanning rate; the parallel composite light beam is input from the two-dimensional galvanometer scanning combination package The incident light is placed within the range of the pupil center (effective aperture), and the effective scanning range of the light spot on the surface of the workpiece to be cleaned is increased. Furthermore, since the two-dimensional galvanometer scanning combination package can perform two-dimensional polarization scanning on the parallel composite light beam, the two-dimensional galvanometer scanning combination package can realize the deflection of the parallel composite light beam in two perpendicular directions, such as the deflection in the heading angle and the pitch angle. The light beam output by the two-dimensional galvanometer scanning combination package is a dynamic light beam, that is, a two-dimensional composite laser spot. After the action of the two-dimensional galvanometer scanning combination package and the plane field mirror, it is finally focused on the focal plane (on the workpiece to be cleaned). The composite light spot can realize coverage scanning of the two-dimensional plane, which significantly improves the movement dimension. The two-dimensional composite laser spot is focused to the focal plane under the refraction and convergence of the plane field mirror to form an effective light spot. Since the two beams contained in the parallel composite light beam are nearly coaxial at a parallel distance and are compounded, the spatial distance between the two-dimensional galvanometer scanning combination package and the plane field mirror entrance pupil is guaranteed. The parallel composite light beam is closer to the center of the plane field mirror, which is conducive to improving the uniformity of the light spot energy on the focal plane and effectively suppressing the field curvature phenomenon in related technologies. The plane field mirror further corrects aberrations such as distortion. In summary, the cleaning efficiency and cleaning quality are significantly improved. BRIEF DESCRIPTION OF THE DRAWINGS

[0018] Figure 1 A schematic structural diagram of a two-dimensional composite laser cleaning device according to an embodiment of the present invention is shown;

[0019] Figure 2 It shows a schematic diagram of the optical path of the return component in an embodiment of the present invention;

[0020] Figure 3Schematic diagram of two-dimensional light beam deflection and planar focusing in an embodiment of the present invention.

[0021] Description of reference numerals:

[0022] 1. 2D galvanometer external interface; 2. 2D galvanometer electrical interface; 3. 2D galvanometer scanning combination package; 4. Robotic arm adapter module; 5. Pulsed laser collimator; 6. Optical path collimation and return package; 7. Continuous laser collimator; 8. Plane field mirror; 9. Workpiece to be cleaned; 10. Working platform; 21. Pulsed laser reflector; 22. Continuous laser reflector; 23. Convex parabolic mirror; 24. Pulsed laser concave parabolic mirror; 25. Continuous laser concave parabolic mirror; 26. Concave lens; 31. Y-axis scanning galvanometer; 32. X-axis scanning galvanometer. DETAILED DESCRIPTION

[0023] In order to make the above-mentioned objects, features and advantages of the present invention more obvious and easy to understand, specific embodiments of the present invention are described in detail below with reference to the accompanying drawings.

[0024] The Z-axis in the accompanying drawings represents the vertical direction, that is, the up-down position, with the positive direction of the Z-axis representing the top and the reverse direction of the Z-axis representing the bottom. The X-axis in the accompanying drawings represents the horizontal direction and is designated as the front-to-back position, with the positive direction of the X-axis representing the front side and the reverse direction of the X-axis representing the rear side. The Y-axis in the accompanying drawings represents the left-to-right position, with the positive direction of the Y-axis representing the left side and the reverse direction of the Y-axis representing the right side. It should also be noted that the aforementioned Z-axis, Y-axis, and X-axis are merely for the purpose of facilitating the description of the present invention and simplifying the description, and are not intended to indicate or imply that the devices or components referred to must have a specific orientation, be constructed, or operate in a specific orientation. Therefore, they should not be construed as limitations on the present invention.

[0025] Throughout this specification, references to the terms "embodiment," "one embodiment," and "an implementation" indicate that the specific features, structures, materials, or characteristics described in conjunction with that embodiment or implementation are included in at least one embodiment or implementation of the present invention. In this specification, schematic representations of these terms do not necessarily refer to the same embodiment or implementation. Furthermore, the specific features, structures, materials, or characteristics described may be combined in any suitable manner in any one or more embodiments or implementations.

[0026] Reference Figure 1 、 Figure 2 and Figure 3As shown, the two-dimensional composite laser cleaning device provided by the embodiment of the present invention includes a two-dimensional galvanometer scanning combination package 3, a pulse laser collimator 5, an optical path collimation and return package 6, a continuous laser collimator 7, a plane field mirror 8 and a working platform 10, wherein the pulse laser collimator 5 and the continuous laser collimator 7 are respectively connected to the two ends of the optical path collimation and return package 6, and the optical path collimation and return package 6 is provided with a mechanical arm adapter module 4, the pulse laser collimator 5 is used to connect with a nanosecond pulse laser, the continuous laser collimator 7 is used to connect with a continuous laser, and the optical path collimation and return package 6 is used to pulse The laser and continuous laser are collimated and compressed to output a parallel composite light beam. Along the propagation direction of the parallel composite light beam, the optical path collimation return package 6, the two-dimensional galvanometer scanning combination package 3 and the plane field mirror 8 are connected in sequence. The two-dimensional galvanometer scanning combination package 3 is used to perform two-dimensional polarization scanning on the parallel composite light beam to output a two-dimensional composite laser spot. The working platform 10 and the plane field mirror 8 are arranged at intervals and in correspondence. The plane field mirror 8 is used to refract and converge the two-dimensional composite laser spot to perform two-dimensional laser cleaning on the workpiece 9 to be cleaned located on the working platform 10.

[0027] In this embodiment, the entire device can be moved to the corresponding position of the working platform 10 with the help of the robotic arm adapter module 4 on the optical path collimation and folding package 6. Driven by the robotic arm, the entire device is moved to the corresponding position of the working platform 10. Through the cooperative setting of the optical path collimation and folding package 6, the two-dimensional galvanometer scanning combination package 3, the plano-field lens 8, etc., the pulsed laser collimating lens 5 is used to connect to the nanosecond pulsed laser. The pulsed laser is incident through the plano-field lens 8. Similarly, the continuous laser is incident through the continuous laser collimating lens 7, and then through the optical path collimation and folding package 6. The optical path collimation and folding package 6 has the functions of collimation and compression combination, and is connected between the corresponding laser and the two-dimensional galvanometer scanning combination package 3. Therefore, the optical path collimation and folding package 6 can act on the pulsed laser and the continuous laser to obtain two collimated parallel beams, and then compress and combine the two collimated parallel beams to input the combined parallel light into the two-dimensional galvanometer scanning combination package 3. Through the parallel beam compression and combination function of the optical path collimation and folding package 6, the two beams of light are close to coaxial transmission at the front end of the two-dimensional galvanometer scanning combination package 3, and are input into the two-dimensional galvanometer scanning combination package 3 as a parallel composite beam, reducing the spatial size and weight required for the two-dimensional galvanometer reflection and improving the scanning rate; the parallel composite beam is incident within the range of the entrance pupil center (effective aperture) of the two-dimensional galvanometer scanning combination package 3, and the effective scanning range of the light spot on the surface of the workpiece to be cleaned 9 is increased. Further, since the two-dimensional galvanometer scanning combination package 3 can perform two-dimensional polarization scanning on the parallel composite beam, the two-dimensional galvanometer scanning combination package 3 can realize the deflection of the parallel composite beam in two perpendicular directions, such as the deflection in the heading angle and the pitch angle. Therefore, the beam output by the two-dimensional galvanometer scanning combination package 3 is a dynamic beam, that is, a two-dimensional composite laser spot. Through the action of the two-dimensional galvanometer scanning combination package 3 and the plano-field lens 8, the composite spot finally focused on the focal plane (on the workpiece to be cleaned 9) can realize the coverage scanning of the two-dimensional plane, significantly improving the motion dimension. The two-dimensional composite laser spot is refracted and converged by the plano-field lens 8 to focus on the focal plane to form an action spot. Since the two beams of light included in the parallel composite beam are close to coaxial and combined in the parallel distance, the spatial distance between the two-dimensional galvanometer scanning combination package 3 and the entrance pupil of the plano-field lens 8 is ensured. The parallel composite beam is closer to the center of the plano-field lens 8, which is beneficial to improving the energy uniformity of the spot on the focal plane and effectively suppressing the field curvature phenomenon in the related art. The plano-field lens 8 further corrects aberration such as distortion. In summary, the cleaning efficiency and cleaning quality are significantly improved.

[0028] The cleaning device provided by the present invention increases the motion dimension of the composite laser cleaning head, can flexibly adapt to more cleaning environments, effectively suppresses phenomena such as field curvature and distortion, improves the uniformity of beam scanning and the effective scanning range, and to a certain extent ensures the overall focal depth of the composite spot on the focal plane.

[0029] Such as Figure 1As shown, as an alternative embodiment of the present invention, the optical path collimation and folding package 6 includes a first converging unit, a second converging unit, and a combining unit. The first converging unit and the second converging unit are arranged on both sides of the combining unit. The first converging unit is used to compress the pulsed laser from the pulsed laser collimating mirror 5, and the second converging unit is used to compress the continuous laser from the continuous laser collimating mirror 7. The combining unit is used to combine the compressed pulsed laser and continuous laser respectively, and output the parallel composite beam.

[0030] Specifically, the first converging unit and the second converging unit can compress the pulsed laser and the continuous laser respectively. After the compression of the converging units on both sides, the beams can be combined based on the same combining unit. After passing through the compression optical path of the combining unit, two compressed beams with very close spacing are output, which can be simultaneously received by the same planar field lens 8. Under the action of the planar field lens 8, they are converged at the focal plane field to form a composite (combined) light spot. The function of compression is also to enable the planar field lens 8 with a limited size to completely receive the two beams. The planar field lens 8 can theoretically be made larger, but it is not conducive to dynamic scanning. Therefore, it is necessary to use the compression optical path to completely receive the two light spots on the conventional galvanometer. At this time, the deflection function of the planar field lens 8 can be used to satisfy the coordinated deflection of the two beams in the two-dimensional space. The focal plane composite light spot after the planar field lens 8 is combined satisfies the two-dimensional motion condition.

[0031] As Figure 2 As shown, as an alternative embodiment of the present invention, the combining unit includes a convex parabolic mirror 23 and a concave lens 26; the first converging unit includes a pulsed laser reflecting mirror 21 and a pulsed laser concave parabolic mirror 24. The pulsed laser passes through the pulsed laser collimating mirror 5, the pulsed laser reflecting mirror 21, and the pulsed laser concave parabolic mirror 24 in sequence and then is incident on the convex parabolic mirror 23. The pulsed laser reflecting mirror 21 is used to vertically change the outgoing direction of the pulsed laser from the pulsed laser collimating mirror 5. The incident angle of the pulsed laser on the pulsed laser concave parabolic mirror 24 is a first preset acute angle, and the pulsed laser concave parabolic mirror 24 is used to compress the pulsed laser.

[0032] In the present invention, the pulsed laser collimating mirror 5 and the continuous laser collimating mirror 7 can be matched according to different cleaning scenarios. Exemplarily, they are usually divided into 300W (pulsed) + 2000W (continuous), 500W (pulsed) + 4000W (continuous), and the working platform 1000W (pulsed) + 6000W (continuous), 2000W (pulsed) + 8000W (continuous). The output light spots are divided into Gaussian light spots and flat-top light spots.

[0033] As Figure 2As shown, the second converging unit includes a continuous laser reflecting mirror 22 and a continuous laser concave parabolic mirror 25. The continuous laser is incident on the convex parabolic mirror 23 after passing through the continuous laser collimating mirror 7, the continuous laser reflecting mirror 22, and the continuous laser concave parabolic mirror 25 in sequence. The continuous laser reflecting mirror 22 is used to vertically change the outgoing direction of the continuous laser from the pulsed laser collimating mirror 5. The incident angle of the pulsed laser on the continuous laser concave parabolic mirror 25 is a second preset acute angle. The continuous laser concave parabolic mirror 25 is used to compress the continuous laser;

[0034] The parallel light beam emitted by the collimating mirror can save the space of the optical path transmission through a 90° optical path folding. The outgoing aperture of the high-power collimating mirror is generally large, which can ensure the adjustment range of the expected optical axis distance between the two beams in the parallel direction of the composite laser, facilitating the design of the subsequent compression optical path. The pulsed laser reflecting mirror 21 and the continuous laser reflecting mirror 22 are used for spatial compression and regulation, leaving a margin for the spacing of the optical axes;

[0035] The centers of the convex parabolic mirror 23 and the concave lens 26 are on the first horizontal line. The compressed pulsed laser and continuous laser are incident from both sides of the convex parabolic mirror 23 respectively, and are combined into the parallel composite light beam after passing through the convex parabolic mirror 23 and the concave lens 26 in sequence.

[0036] Specifically, the nanosecond pulsed laser can specifically select a power output of 1000W, and the continuous laser can specifically select a power output of 6000W. At this time, the apertures of the two parallel light beams output by the pulsed laser collimating mirror 5 and the continuous laser collimating mirror 7 are about 20mm. The output light beams are as Figure 2 shown, and are respectively connected to the pulsed laser reflecting mirror 21 and the continuous laser reflecting mirror 22. The pulsed laser concave parabolic mirror 24, the continuous laser concave parabolic mirror 25, and the convex parabolic mirror 23 can compress and combine the two parallel and spaced reflected light beams output by the two reflecting mirrors at all angles. That is, under the combined reflection action of the pulsed laser concave parabolic mirror 24, the continuous laser concave parabolic mirror 25, and the convex parabolic mirror 23, the merging and compression process of the two parallel light beams of the pulsed laser and the continuous laser is realized. At the same time, the convex parabolic mirror 23 has a buffering effect of equivalent focal length, which is convenient for increasing the curvature margin of the concave lens 26, so that the parallel light beam can be output at a smaller curvature, reducing the requirement for the curvature of the concave lens 26.

[0037] As Figure 2As shown, as an alternative embodiment of the present invention, the pulsed laser mirror 21 and the continuous laser mirror 22 are symmetrically distributed on both sides of the convex parabolic mirror 23 and the concave lens 26 with the first horizontal line as the axis of symmetry. The pulsed laser concave parabolic mirror 24 and the continuous laser concave parabolic mirror 25 are symmetrically distributed on both sides of the convex parabolic mirror 23 and the concave lens 26 with the first horizontal line as the axis of symmetry. The reflection optical paths of the compressed pulsed laser and continuous laser by the convex parabolic mirror 23 do not overlap with each other.

[0038] The difference between the pulsed laser mirror 21 and the continuous laser mirror 22 lies in the difference in the coating process under different modes for continuous laser output and pulsed laser output. For the pulsed laser concave parabolic mirror 24 and the continuous laser concave parabolic mirror 25, the difference lies in the differential design of the coating process for the damage characteristics under different output modes, and it is required to satisfy the symmetrical arrangement in space.

[0039] Specifically, the axis of symmetry of the pulsed laser mirror 21 and the continuous laser mirror 22 is the first horizontal line. Similarly, the axis of symmetry of the pulsed laser concave parabolic mirror 24 and the continuous laser concave parabolic mirror 25 is also the first horizontal line. That is, the first converging unit and the second converging unit are symmetrically arranged on both sides of the combining unit. And the pulsed laser and the continuous laser are incident on the convex parabolic mirror 23 from their respective corresponding sides. For example, the pulsed laser is incident on the convex parabolic mirror 23 from the upper half, and the continuous laser is incident on the convex parabolic mirror 23 from the lower half. And the reflected light rays are separated from each other and enter the concave lens 26, presenting non-overlapping optical paths. The above enables the pulsed laser and the continuous laser to enter the same combining unit after being compressed along the same optical path, which not only ensures the structural compactness inside the optical path collimation and folding package 6, facilitates the symmetrical arrangement, further saves the space for optical path transmission, but also enables the finally compressed beams to enter the combining unit side by side.

[0040] As Figure 1 shown, as an alternative embodiment of the present invention, the optical path collimation and folding package 6 has a folding compression ratio for both the pulsed laser and the continuous laser greater than 2.

[0041] Specifically, the overall folding compression ratio of the optical path collimation and folding package 6 is greater than 2, indicating that through the action of the first converging unit, the second converging unit, and the combining unit, the size of the light beam emitted in the compression direction is smaller than 1 / 2 of the original incident light beam size. That is, the size of the emitted light beam is reduced by at least 2 times. When the apertures of the two parallel light beams output by the pulsed laser collimator 5 and the continuous laser collimator 7 are about 20 mm, finally, the combined output parallel light beam is a composite light spot with a length of about 20 mm and a width of 10 mm, and the size of the composite light spot is completely received by the two-dimensional galvanometer scanning combination package 3.

[0042] AsFigure 3 As shown in the figure, as an alternative embodiment of the present invention, the two-dimensional galvanometer scanning combined package 3 includes a Y-axis scanning galvanometer 31 and an X-axis scanning galvanometer 32. The Y-axis scanning galvanometer 31 and the X-axis scanning galvanometer 32 are spaced apart by a preset distance and are arranged with a 45-degree offset. The parallel composite beam continuously passes through the Y-axis scanning galvanometer 31 and the X-axis scanning galvanometer 32 at a 45-degree incident angle, and the Y-axis scanning galvanometer 31 and the X-axis scanning galvanometer 32 respectively scan the parallel composite beam with preset scanning parameters. The scanned parallel composite beam is perpendicularly incident from the central position of the plano field lens 8.

[0043] As Figure 1 shown in the figure, the two-dimensional galvanometer scanning combined package 3 is also provided with a two-dimensional galvanometer external interface 1 and a two-dimensional galvanometer electrical interface 2, and is used in cooperation with the robotic arm transfer module 4. The two-dimensional galvanometer external interface 1 is a water-cooled and airtight interface.

[0044] Specifically, the Y-axis scanning galvanometer 31 and the X-axis scanning galvanometer 32 are spaced apart by a certain distance to ensure that the optical path distance between the two is within a specified range, and the two are at a 45-degree spatial angle in space. The Y-axis scanning galvanometer 31 and the X-axis scanning galvanometer 32 are both offset by 45° within the specified optical path distance range to ensure that both the incident angle and the exit angle are 45 degrees. The Y-axis scanning galvanometer 31 and the X-axis scanning galvanometer 32 respectively perform rapid swings around the heading axis and the pitch axis (one deflects in the Y direction and the other deflects in the X direction). Then the size of the composite light spot can be completely received by the two-dimensional galvanometer scanning combined package 3. After receiving the light beam, the dynamic optical path of two-dimensional light beam deflection and planar focusing is Figure 3 shown in the figure. The two are spaced apart by a specified optical path distance range and are arranged with a 45° offset (the 45° offset can make the reflection angle 90°, that is, the original exit light is deflected by 90° of the incident light, which can ensure the scanning range of the final scanned light spot and the two-dimensional light spot can be perpendicularly incident on the plano field lens 8; the above can achieve the rapid and high-quality scanning of the final composite laser light spot in the two-dimensional plane (finally presenting the scanning of the XY plane on the working plane).

[0045] As an alternative embodiment of the present invention, the preset scanning parameters include a scanning angle and a scanning frequency, and the scanning angle matches the scanning frequency.

[0046] In a preferred combination, the scanning angle is ±12.5°, and the scanning frequency > 10 Hz.

[0047] Specifically, when the scanning parameters include the scanning angle and the scanning frequency, the corresponding galvanometers control the swing angles (scanning angles) of the Y-axis scanning galvanometer 31 and the X-axis scanning galvanometer 32 through their respective deflection motors to be 12.5 degrees counterclockwise to 12.5 degrees clockwise (along the reference direction determined by a 45-degree angle with the incident angle), and the swing frequency (scanning frequency) is greater than 10 Hz. The dynamic composite beam reflected by the galvanometer is refracted and converged by the field lens 8 used in this embodiment. The focal plane of the field lens 8, that is, the focal spot of the working plane, on the basis of the aperture of the two parallel beams being about 20 mm, finally has a scanning range of ±245 mm in both the heading and pitch directions (for example, the X-axis direction and the Y-axis direction in the figure). The final composite spot aperture < 1.5 mm, and the effective focal depth > 20 mm, far exceeding the scanning effect in a single dimension in the prior art.

[0048] As an optional embodiment of the present invention, the preset scanning parameters further include a scanning trajectory and a scanning speed, and different scanning trajectories and scanning speeds correspond to different uniform scanning curves.

[0049] Specifically, multiple scanning trajectories and scanning speeds can be adopted to control the scanning speeds of the Y-axis scanning galvanometer 31 and the X-axis scanning galvanometer 32. The inward circular grating scanning trajectory is used to improve the speed smoothness of the scanning curve. The inward circular grating scanning is a return scanning, scanning layer by layer from the edge gradually inward. The scanning search can use an 8-neighborhood search in a specific direction to achieve continuous edge scanning, and update the new edge layer by layer for inward scanning until the target pattern is completely covered, so as to improve the dynamic scanning non-uniformity phenomenon caused by the non-linear mapping of the field lens 8. On the basis of the inward circular grating scanning trajectory, a gradient or segmented speed compensation that changes with the scanning radius is introduced. Since the scanning radius is based on the projection refraction (radius) of the deflected beam passing through the field lens 8 in the converging focal plane, then at different scanning radii, that is, at different circular positions of the entrance pupil of the field lens 8 where the projected beam is incident, the speed is segmentedly controlled, and the speed of the projected spot can be compensated for uniformity, optimizing the dynamic scanning non-uniformity phenomenon caused by the non-linear mapping of the field lens group as a whole.

[0050] As Figure 1 shown, as an optional embodiment of the present invention, the working platform 10 is movably arranged.

[0051] Specifically, the working platform 10 can be equipped with a lead screw moving component (not shown in the drawing) to achieve directional movement, and can also be equipped with a clamping device (such as a hydraulic fixture, etc.) to facilitate the fixing and cleaning of the workpiece 9 to be cleaned.

[0052] As an optional embodiment of the present invention, it further includes a dust removal unit and an observation unit (not shown in the figure).

[0053] Specifically, the present invention can also be configured with a dust removal unit for timely recovery of splashes and waste debris from cleaning materials to ensure a clean environment during the cleaning process; an observation unit can be assembled for ranging, positioning, visual analysis and process monitoring; an intelligent control unit can also be integrated, and intelligent cleaning based on multiple inspirations such as graphics planning and cleaning process constraints; when connected to a robotic arm, the robotic arm adapter module 4 provided on the optical path collimation and return package 6 can be directly docked with the robotic arm adapter module 4 to realize the driving of the two-dimensional composite laser cleaning device, so as to facilitate the driving of the two-dimensional composite laser cleaning device to perform multi-degree-of-freedom spatial movement and realize cleaning under multi-degree-of-freedom.

[0054] The foregoing description is intended only to provide specific embodiments of the present invention, which will enable those skilled in the art to understand and implement the present invention. Various modifications to these embodiments will be readily apparent to those skilled in the art, and the general principles defined herein may be implemented in other embodiments without departing from the spirit or scope of the present invention. Therefore, the present invention is not intended to be limited to the embodiments shown herein, but is to be construed in the widest possible manner consistent with the principles and novel features disclosed herein.

[0055] Although the present invention is disclosed as above, the protection scope of the present invention is not limited thereto. Those skilled in the art may make various changes and modifications without departing from the spirit and scope of the present invention, and these changes and modifications will fall within the protection scope of the present invention.

Claims

1. A two-dimensional composite laser cleaning device, characterized in that, The invention comprises a two-dimensional galvanometer scanning combination package (3), a pulse laser collimator (5), an optical path collimation and return package (6), a continuous laser collimator (7), a plane field mirror (8) and a working platform (10), wherein the pulse laser collimator (5) and the continuous laser collimator (7) are respectively connected to two ends of the optical path collimation and return package (6), a mechanical arm adapter module (4) is provided on the optical path collimation and return package (6), the pulse laser collimator (5) is used to connect to a nanosecond pulse laser, the continuous laser collimator (7) is used to connect to a continuous laser, and the optical path collimation and return package (6) is used to adjust the pulse laser and the continuous laser. Collimation and compression merging are performed to output a parallel composite light beam. Along the propagation direction of the parallel composite light beam, the optical path collimation return package (6), the two-dimensional galvanometer scanning combination package (3) and the plane field mirror (8) are connected in sequence. The two-dimensional galvanometer scanning combination package (3) is used to perform two-dimensional polarization scanning on the parallel composite light beam to output a two-dimensional composite laser spot. The working platform (10) and the plane field mirror (8) are arranged at intervals and in correspondence. The plane field mirror (8) is used to refract and converge the two-dimensional composite laser spot to perform two-dimensional laser cleaning on a workpiece (9) to be cleaned on the working platform (10).

2. The two-dimensional composite laser cleaning device according to claim 1, wherein The optical path collimating and folding package (6) comprises a first converging unit, a second converging unit and a merging unit. The first converging unit and the second converging unit are arranged on both sides of the merging unit. The first converging unit is used to compress the pulse laser from the pulse laser collimator (5), the second converging unit is used to compress the continuous laser from the continuous laser collimator (7), and the merging unit is used to merge the compressed pulse laser and continuous laser, and output the parallel composite light beam.

3. The two-dimensional composite laser cleaning device according to claim 2, wherein, The merging unit includes a convex parabolic mirror (23) and a concave lens (26); the first converging unit includes a pulse laser reflecting mirror (21) and a pulse laser concave parabolic mirror (24); the pulse laser passes through the pulse laser collimating mirror (5), the pulse laser reflecting mirror (21), and the pulse laser concave parabolic mirror (24) in sequence and then enters the convex parabolic mirror (23); the pulse laser reflecting mirror (21) is used to vertically change the exit direction of the pulse laser from the pulse laser collimating mirror (5); the incident angle of the pulse laser entering the pulse laser concave parabolic mirror (24) is a first preset acute angle; and the pulse laser concave parabolic mirror (24) is used to compress the pulse laser; The second converging unit includes a continuous laser reflecting mirror (22) and a continuous laser concave polishing mirror (25). The continuous laser sequentially passes through the continuous laser collimating mirror (7), the continuous laser reflecting mirror (22), and the continuous laser concave polishing mirror (25) and then is incident on the convex polishing mirror (23). The continuous laser reflecting mirror (22) is used to vertically change the outgoing direction of the continuous laser from the pulsed laser collimating mirror (5). The incident angle of the pulsed laser on the continuous laser concave polishing mirror (25) is a second preset acute angle, and the continuous laser concave polishing mirror (25) is used to compress the continuous laser; The center of the convex polishing mirror (23) and the center of the concave lens (26) are on the first horizontal line. The compressed pulsed laser and the continuous laser are respectively incident from both sides of the convex polishing mirror (23), and are combined into the parallel composite beam after sequentially passing through the convex polishing mirror (23) and the concave lens (26).

4. The two-dimensional composite laser cleaning device according to claim 3, wherein, The pulsed laser reflecting mirror (21) and the continuous laser reflecting mirror (22) are symmetrically distributed on both sides of the convex polishing mirror (23) and the concave lens (26) with the first horizontal line as the axis of symmetry. The pulsed laser concave polishing mirror (24) and the continuous laser concave polishing mirror (25) are symmetrically distributed on both sides of the convex polishing mirror (23) and the concave lens (26) with the first horizontal line as the axis of symmetry. The reflection optical paths of the compressed pulsed laser and the continuous laser by the convex polishing mirror (23) do not overlap.

5. The two-dimensional composite laser cleaning device according to any one of claims 1-4, characterized in that, The optical path collimation and folding package (6) has a folding compression ratio greater than 2 for both the pulsed laser and the continuous laser.

6. The two-dimensional composite laser cleaning device according to any one of claims 1-4, characterized in that The two-dimensional galvanometer scanning combination package (3) includes a Y-axis scanning galvanometer (31) and an X-axis scanning galvanometer (32). The Y-axis scanning galvanometer (31) and the X-axis scanning galvanometer (32) are spaced at a preset distance and are arranged with a 45-degree offset. The parallel composite beam continuously passes through the Y-axis scanning galvanometer (31) and the X-axis scanning galvanometer (32) at a 45-degree incident angle, and the Y-axis scanning galvanometer (31) and the X-axis scanning galvanometer (32) respectively scan the parallel composite beam with preset scanning parameters. The scanned parallel composite beam is vertically incident from the center position of the field flattener (8).

7. The two-dimensional composite laser cleaning device according to any one of claims 1-4, characterized in that, The working platform (10) is movably arranged.

8. The two-dimensional composite laser cleaning device according to claim 6, characterized in that, The preset scanning parameters include a scanning angle and a scanning frequency, and the scanning angle matches the scanning frequency.

9. The two-dimensional composite laser cleaning device according to claim 6, wherein, The preset scanning parameters further include a scanning trajectory and a scanning speed, and different scanning trajectories and scanning speeds correspond to different uniform scanning curves.

10. The two-dimensional composite laser cleaning device according to any one of claims 1-4, characterized in that, It further includes a dust removal unit and an observation unit.

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