Laser scribing field lens working distance real-time adjusting device and control method

Abstract

The invention belongs to the technical field of laser scribing, and particularly relates to a laser scribing field lens working distance real-time adjusting device and a control method, the laser scribing field lens working distance real-time adjusting device comprises a first position sensor arranged on the side wall of a supporting plate, and the first position sensor is electrically connected with an upper computer, the first position sensor is suitable for controlling the axial displacement of the field lens; the compensation assembly comprises a laser displacement meter, the laser displacement meter faces the field lens, and the laser displacement meter is electrically connected with an upper computer; by arranging the compensation assembly, when the field lens moves to the position above the base material for scribing, according to the scribing effect of the base material, the laser displacement meter can detect the distance between the field lens and the base material and then transmit data to the upper computer, and the upper computer transmits a signal to enable the field lens to axially move by a proper compensation distance, so that the influence of the flatness of the base material on the scribing effect is reduced; the consistency of the scribing depth is ensured, and the scribing quality is improved.

Description

Technical Field

[0001] The present invention belongs to the technical field of laser scribing, and particularly relates to a device and a control method for real-time adjustment of the working distance of a laser scribing field lens. Background Art

[0002] When laser scribing a perovskite cell, it will go through three scribing processes of P1 / P2 / P3 and one edge cleaning process of P4. When performing P1 or P2 or P3 scribing or P4 edge cleaning, since the surface of the perovskite cell is not completely flat after the film coating is dried, and due to the relatively fixed axial position of the field lens, it is impossible to adjust the distance in real time according to the distance between the field lens and the surface of the perovskite cell, resulting in a fixed laser focusing position of the field lens. During the scribing process on the surface of the perovskite cell, it is easy to cause inconsistent scribing depths, resulting in deviation of the scribing depth and affecting the processing quality of the cell; when laser scribing, it may accidentally touch other adjacent devices, causing the laser to be damaged and malfunction, posing a great potential safety hazard.

[0003] Therefore, it is necessary to provide a device and a control method for real-time adjustment of the working distance of a laser scribing field lens that can adjust the axial position of the field lens in real time according to the distance between the cell surface and the field lens. Summary of the Invention

[0004] In order to solve the technical problems of inconsistent scribing depths and accidental touching of adjacent devices during the scribing process in the prior art, the object of the present invention is to provide a device for real-time adjustment of the working distance of a laser scribing field lens.

[0005] To solve the above technical problems, the present invention provides a device for real-time adjustment of the working distance of a laser scribing field lens, including: a support box, the support box is radially slidably arranged on a support table, and a support plate is axially slidably arranged on the inner wall of the vertical plate of the support box. Among them, a field lens is arranged at the bottom of the support plate; a lifting component, the lifting component is arranged on the inner wall of the support box, and the lifting component is adapted to drive the support plate to axially slide; a position sensor component, the position sensor component includes a first position sensor, the first position sensor is arranged on the side wall of the support plate, and the first position sensor is electrically connected to an upper computer. Among them, the first position sensor is adapted to control the displacement amount of the field lens in the axial direction; a compensation component, the compensation component is arranged on the side wall of the support plate; the compensation component includes a laser displacement meter, the laser displacement meter faces the field lens, and the laser displacement meter is electrically connected to an upper computer.

[0006] Further, the position sensor component includes a second position sensor, the second position sensor is arranged on the outer wall of the vertical plate of the support box, and the second position sensor is electrically connected to an upper computer. Among them, the second position sensor is adapted to control the displacement amount of the support box in the radial direction.

[0007] Further, a plurality of first motion sensors are arranged in the length direction of the inner wall of the vertical plate of the support box, and a first sensor baffle is arranged on the side wall of the support plate. Among them, the first motion sensors cooperate with the first sensor baffle to determine the corresponding position of the support plate.

[0008] Further, a plurality of second motion sensors and second sensor baffles are arranged in the width direction of the outer wall of the vertical plate of the support box. Among them, the end of the second sensor baffle extends out of the side wall of the support box.

[0009] Further, a light passing hole is arranged on the bottom plate of the support box, a lens holder is arranged at the bottom of the light passing hole, and the field lens faces the light passing hole. Among them, the lens holder is suitable for adjusting the light incident amount of the light passing hole.

[0010] Further, the first motion sensors include an upper limit first motion sensor, a lower limit first motion sensor, and / or a base point first motion sensor. The upper limit first motion sensor and the lower limit first motion sensor determine the upper and lower limit distances of the movement of the support plate, and the base point first motion sensor determines the initial position of the support plate.

[0011] Further, a linear motor mover and a plurality of pairs of sliders are arranged on the outer wall of the vertical plate of the support box. The sliders are arranged on both sides of the linear motor mover. Among them, the sliders are installed on the slide rails of the support table.

[0012] Further, a pair of hydraulic buffers are arranged on the outer wall of the vertical plate of the support box, and the hydraulic buffers are arranged between the sliders.

[0013] Further, a panel through pipe is arranged on the top of the top plate of the support box. The panel through pipe is communicated with the support box, and a protective cover is sleeved outside the panel through pipe; among them, the panel through pipe is suitable for introducing clean gas.

[0014] Further, the lifting assembly includes a lead screw seat, a lead screw, and a motor; the lead screw seat is arranged on the inner wall of the vertical plate of the support box, the lead screw is rotatably arranged on the lead screw seat, a connecting block is arranged on the outer wall of the support plate, and the connecting block is threadedly connected with the lead screw; the motor is below the lead screw seat, and the output shaft of the motor extends into the lead screw seat and is connected with the lead screw.

[0015] Further, the lifting assembly further includes a motor seat and a pair of guide rails; the motor seat is arranged on the inner wall of the vertical plate of the support box, the motor is arranged on the motor seat; the guide rails are arranged on the inner wall of the vertical plate of the support box, and a plurality of guide blocks are arranged on the outer wall of the support plate. Among them, the guide blocks slide on the guide rails.

[0016] Furthermore, the present invention provides a control method for the real-time adjustment device of the working distance of the above laser scribing field lens, including the following steps: S100: Introduce clean gas into the inside of the support box to prevent the external environment from interfering with the operation of the device; S200: The support plate slides axially, and the first motion sensor cooperates with the first sensor stop to determine that the support plate is in the corresponding position; the support box slides radially; S300: Detect whether the substrate is conveyed to the processing position; S400: The axial movement of the support plate drives the axial movement of the field lens, and the field lens is adjusted to an appropriate focal length; S500: The support box slides radially, so that the field lens moves above the position where the substrate needs to be scribed; S600: The laser is turned on to scribe the substrate. During the scribing process, the laser displacement meter detects the distance between the substrate and the field lens and feeds it back to the host computer. The host computer obtains the data and sends a command to the motor to work according to the result. The first position sensor senses the displacement in the axial direction. When the field lens adjusts to the required distance, the first position sensor sends a signal to the host computer, and the host computer sends a signal to stop the motor; S700: Optimize the displacement of the first position sensor according to the scribing effect of the substrate, and at the same time the lens holder adjusts the light input amount of the light passing hole to achieve the best scribing effect.

[0017] Furthermore, when using the control method of the real-time adjustment device of the working distance of the above laser scribing field lens, the S200 step further includes the following S210 step: When the host computer feedbacks the information that it needs to move downward, the program is set to trigger a signal to be sent to the host computer to stop the movement of the support plate when the first sensor stop contacts the lower limit first motion sensor; when the host computer feedbacks the information that it needs to move upward, a signal is sent to the host computer to stop the movement of the support plate when the first sensor stop 1 contacts the upper limit first motion sensor.

[0018] Furthermore, when using the control method of the real-time adjustment device of the working distance of the above laser scribing field lens, the S500 step further includes the following S510 triple anti-collision steps: S511: The linear motor mover can accurately control the displacement of the support box. When the support box moves to the corresponding position, the linear motor mover automatically stops working; S512: The second motion sensor of this device cooperates with the second sensor stop of other devices to determine that the support box is in the corresponding position. Other devices can be one end of the gantry or another identical device of this device to prevent this device from colliding with one end of the gantry or other devices; S513: In the case of out-of-control of this device, the hydraulic buffer cooperates with the block of other devices to absorb the impact force generated by the impact of this device.

[0019] Advantages of the present invention: 1. By setting up the support box, the support box can stably install the scene, lifting component and position sensor component, providing a good working environment for the real-time working distance adjustment device of the laser scribing field lens of the present invention; through the radial sliding setting of the support box, the support box can drive the field lens to slide above the position where the substrate needs to be scribed; through the axial sliding setting of the support plate, the field lens can axially slide to adjust to an appropriate focal length, realizing stepless adjustment of the focal length, ensuring that the working distance of the field lens is in an optimal state, and improving the processing efficiency and quality. 2. By setting up the lifting component, the lifting component drives the support plate to axially slide, thereby driving the field lens to axially move, so that the field lens is in the best working position. 3. By setting up the position sensor component, the first position sensor can sense the axial displacement distance of the field lens during the axial movement of the field lens and then transmit it to the host computer, and the host computer sends a signal to control the required distance of the axial displacement of the field lens, ensuring the movement accuracy during the movement of the field lens. 4. By setting up the second motion sensor and the second sensor flap, the second motion sensor of this device cooperates with the second sensor flap of other devices to determine the corresponding position of the support box. Other devices can be one end of the gantry or another identical device of this device to prevent this device from colliding with one end of the gantry or other devices.

[0020] 5. By setting up the compensation component, when the field lens moves to scribe above the substrate, according to the scribing effect of the substrate, the laser displacement meter can detect the distance between the field lens and the substrate and then transmit the data to the host computer, and the host computer transmits a signal to make the field lens axially move an appropriate compensation distance, thereby reducing the influence of the flatness of the substrate itself on the scribing effect, ensuring the consistency of the scribing depth, and improving the scribing quality. BRIEF DESCRIPTION OF THE DRAWINGS

[0021] In order to more clearly illustrate the specific embodiments of the present invention or the technical solutions in the prior art, the following will briefly introduce the drawings required for the description of the specific embodiments or the prior art. Obviously, the following drawings are some embodiments of the present invention. For those of ordinary skill in the art, other drawings can be obtained based on these drawings without creative efforts.

[0022] Figure 1 is the first structural schematic diagram of the real-time working distance adjustment device of the laser scribing field lens of the present invention; Figure 2 is the second structural schematic diagram of the real-time working distance adjustment device of the laser scribing field lens of the present invention; Figure 3 is the flow chart of Embodiment 2 of the present invention; Figure 4 is the flow chart of Embodiment 3 of the present invention;

[0023] Figure 5 is the flowchart of Embodiment 4 of the present invention.

[0024] In the figure: 100, support box; 110, support plate; 111, field lens; 112, laser displacement meter; 113, first sensor baffle; 120, first position sensor; 130, second position sensor; 140, first motion sensor, 1401, upper limit first motion sensor, 1402, base point first motion sensor, 1403, lower limit first motion sensor; 141, second motion sensor; 142, second sensor baffle; 150, lens holder; 151, light passing hole; 160, slider; 170, panel straight pipe; 171, protective cover; 180, hydraulic buffer; 181, stop block; 190, linear motor mover; 200, lifting assembly; 210, lead screw base; 220, threaded rod; 230, motor; 240, motor base; 250, guide rail. Specific embodiments

[0025] To make the objectives, technical solutions, and advantages of the embodiments of the present invention clearer, the technical solutions of the present invention will be clearly and completely described below with reference to the accompanying drawings. Apparently, the described embodiments are some, but not all, of the embodiments of the present invention. All other embodiments obtained by those of ordinary skill in the art based on the embodiments of the present invention without creative efforts shall fall within the protection scope of the present invention.

[0026] Embodiment 1. As Figure 1-2As shown in the figure, the present invention provides a device for real-time adjustment of the working distance of a laser scribing field lens, comprising: a support box 100, the support box 100 is radially slidably arranged on a support table (not shown in the figure), and the support table can be a gantry, a marble bracket, etc. An "L"-shaped support plate 110 is axially slidably arranged on the inner wall of the vertical plate of the support box 100. Among them, a field lens 111 is arranged at the bottom of the support plate 110; by arranging the support box 100, the support box 100 can stably mount the scene, the lifting assembly 200 and the position sensor assembly, providing a good working environment for the device for real-time adjustment of the working distance of the laser scribing field lens 111 of the present invention; through the radially slidable arrangement of the support box 100, the support box 100 can drive the field lens 111 to slide above the position where the substrate needs to be scribed; through the axially slidable arrangement of the support plate 110, the field lens 111 can axially slide to adjust to a suitable focal length, realizing stepless adjustment of the focal length, ensuring that the working distance of the field lens 111 is in an optimal state, and improving the processing efficiency and quality; a lifting assembly 200, the lifting assembly 200 is arranged on the inner wall of the support box 100. Among them, the lifting assembly 200 is adapted to drive the support plate 110 to axially slide; by arranging the lifting assembly 200, the lifting assembly 200 drives the support plate 110 to axially slide, thereby driving the field lens 111 to axially move as required, so that the field lens 111 is in the best working position; a position sensor assembly, the position sensor assembly includes a first position sensor 120, the first sensor is arranged on the side wall of the support plate 110, and the first position sensor 120 is electrically connected to a host computer (not shown in the figure). Among them, the first position sensor 120 is adapted to control the axial displacement amount of the field lens 111; by arranging the position sensor assembly, the first position sensor 120 can sense the axial displacement distance of the field lens 111 during the axial movement of the field lens 111 and then transmit it to the host computer, and the host computer sends a signal to control the required distance of the axial displacement of the field lens 111, ensuring the movement accuracy during the movement of the field lens 111; a compensation assembly, the compensation assembly is arranged on the side wall of the support plate 110; the compensation assembly includes a laser displacement meter 112, the laser displacement meter 112 faces the field lens 111. Among them, the laser displacement meter 112 is electrically connected to the host computer; by arranging the compensation assembly, when the field lens 111 moves to scribe above the substrate, according to the scribing effect of the substrate, the laser displacement meter 112 can detect the distance between the field lens 111 and the substrate and then transmit data to the host computer, and the host computer transmits a signal to make the field lens 111 axially move an appropriate compensation distance, thereby reducing the influence of the flatness of the substrate itself on the scribing effect, ensuring the consistency of the scribing depth, and improving the scribing quality.

[0027] The position sensor assembly includes a second position sensor 130, which is arranged on the outer wall of the vertical plate of the support box 100. The second position sensor 130 is electrically connected to the upper computer. Wherein, the second position sensor 130 is adapted to control the displacement amount in the radial direction of the support box 100; the second position sensor 130 can sense the displacement amount in the radial direction of the support box 100, transmit the data back to the upper computer, and the upper computer sends a signal to control the displacement amount in the radial direction of the support box 100, so as to accurately control the support box 100 to move above the area where the substrate needs to be scribed; for example: compare the actual distance A that the support box 100 runs by itself driven by the motor 230 with the running distance B calculated by the second position sensor 130, and then feedback it to the upper computer, and the upper computer will compensate for the distance deviation generated by A and B.

[0028] A plurality of first motion sensors 140 are arranged in the length direction of the inner wall of the vertical plate of the support box 100, and a first sensor stopper 113 is arranged on the side wall of the support plate 110. Wherein, the first motion sensor 140 cooperates with the first sensor stopper 113 to determine the corresponding position of the support plate 110; preferably, an upper limit first motion sensor 1401, a base point first motion sensor 1402, and a lower limit first motion sensor 1403 are respectively arranged. The initial position of the first sensor stopper 113 is at the base point first motion sensor 1402, and this position is the initial position of the support box 100. When the upper computer feedbacks information that it needs to move downward, the first sensor stopper 113 moves downward. To prevent the support plate 110 from moving infinitely downward and damaging equipment such as the field lens 111 and the laser displacement meter 112, the program is set to trigger a signal to be sent to the upper computer when the first sensor stopper 113 contacts the lower limit first motion sensor 1403 to stop the movement of the support plate 110; similarly, to prevent the support plate 110 from moving infinitely upward and damaging the equipment in the protective cover 171, the program is set to trigger a signal to be sent to the upper computer when the first sensor stopper 113 contacts the upper limit first motion sensor 1403 to stop the movement of the support plate 110. It should be noted that when the first sensor stopper 113 contacts the base point first motion sensor 1402, only the base point position signal is triggered to clarify the base point position, and whether to stop the movement can be set through program modification. This design can also only design the upper limit first motion sensor 1401 and the lower limit first motion sensor 1403, and the setting of the base point first motion sensor 1402 does not affect the realization of the anti-collision function. The cooperation between the first motion sensor 140 and the first sensor stopper 113 can not only play an anti-collision role, but also control the axial movement distance of the support plate 110 by changing the distance between a plurality of first motion sensors 140.

[0029] A number of second motion sensors 141 and second sensor stoppers 142 are arranged in the width direction of the outer wall of the vertical plate of the support box 100. Among them, the end of the second sensor stopper 142 extends out of the side wall of the support box 100. The second sensor stopper 142 of this device is adapted to be inserted into the notch of the second motion sensor 141 (not shown in the figure) of other devices to limit the continuous movement of the support box 100. The other device can be one end of a gantry or another identical device of this device (not shown in the figure), preventing this device from colliding with one end of the gantry or other devices. The second sensor stopper 142 (not shown in the figure) of other devices is adapted to be inserted into the notch of the second motion sensor 141 of this device to limit the continuous movement of the support box 100. The other device can be one end of a gantry or another identical device of this device (not shown in the figure), preventing this device from colliding with one end of the gantry or other devices.

[0030] When the support box 100 slides radially so that the second sensor stopper 142 passes through the second motion sensor 141, the second motion sensor 141 sends a signal to the upper computer to stop the movement of the support box 100, preventing the two from colliding.

[0031] A light passing hole 151 is arranged on the bottom plate of the support box 100. A lens holder 150 is arranged at the bottom of the light passing hole 151. The field lens 111 faces the light passing hole 151. Among them, the lens holder 150 is adapted to adjust the light input amount of the light passing hole 151. The lens holder 150 changes the size of the light passing hole 151, thereby changing the light input amount entering the optical path system, avoiding the influence on the scribing effect caused by the light passing hole 151 being too large or too small, and improving the processing accuracy.

[0032] A linear motor mover 190 and several pairs of sliders 160 are arranged on the outer wall of the vertical plate of the support box 100. The sliders 160 are arranged on both sides of the linear motor mover 190. Among them, the sliders 160 are installed on the slide rails of the support table. The slide rails can support the sliding of the sliders 160, thereby avoiding the situation of shaking when the support box 100 slides radially. The linear motor mover 190 provides power for the radial sliding of the support box 100 and can also accurately control the displacement amount of the support box 100.

[0033] A pair of hydraulic buffers 180 are arranged on the outer wall of the vertical plate of the support box 100. The hydraulic buffers 180 are arranged between the sliders 160. A pair of stoppers 181 are arranged at the corresponding positions of other devices (not shown in the figure). In the case of out-of-control of the control of this device, the cooperation between the hydraulic buffers 180 and the stoppers 181 of other devices can absorb the impact force generated by the impact of this device, effectively reducing the damage of this device, protecting this device, and improving the service life of the device.

[0034] At the top of the top plate of the support box 100, there is a panel through pipe 170, which is communicated with the support box 100. Among them, the panel through pipe 170 is suitable for introducing clean gas; the clean gas introduced into the panel through pipe 170 enters the interior of the support box 100 to prevent the external environment from polluting the working environment in the support box 100 and improve the light transmission quality.

[0035] A protective cover 171 is sleeved outside the panel through pipe 170; the protective cover 171 has a simple and reliable structure and provides a good working environment for the panel through pipe 170.

[0036] The lifting assembly 200 includes a lead screw base 210, a lead screw rod 220, and a motor 230; the lead screw base 210 is arranged on the inner wall of the vertical plate of the support box 100, the lead screw rod 220 is rotatably arranged on the lead screw base 210, and a connecting block is arranged on the outer wall of the support plate 110. Among them, the connecting block is threadedly connected with the lead screw rod 220; the motor 230 is below the lead screw base 210. Among them, the output shaft of the motor 230 extends into the lead screw base 210 and is connected with the lead screw rod 220; the output shaft of the motor 230 drives the lead screw rod 220 to rotate on the lead screw base 210. When the lead screw rod 220 rotates, the support plate 110 axially slides on the lead screw to drive the scene to axially slide.

[0037] The lifting assembly 200 further includes a motor base 240 and a pair of guide rails 250; the motor base 240 is arranged on the inner wall of the vertical plate of the support box 100, and the motor is arranged on the motor base 240; the guide rails 250 are arranged on the inner wall of the vertical plate of the support box 100, and several guide blocks (not shown in the figure) are arranged on the outer wall of the support plate 110. Among them, the guide blocks slide on the guide rails 250; the motor base 240 can stably mount the motor 230 to make the motor work stably; the guide blocks can stably slide on the guide rails 250 to avoid the situation of shaking when the support plate 110 axially slides and improve the stability of the axial sliding of the field lens 111.

[0038] Embodiment 2, as Figure 3 shown, the present invention provides a control method for the device for real-time adjustment of the working distance of the laser scribing field lens 111 described in any one of the above, including the following steps: S100: Introduce clean gas into the interior of the support box 100 to prevent the external environment from interfering with the operation of the device; S200: The support plate 110 axially slides, and the first motion sensor 140 cooperates with the first sensor stop 113 to determine the corresponding position of the support plate 110; the support box 110 radially slides; S300: Detect whether the substrate is conveyed to the processing position; S400: The axial movement of the support plate 110 drives the axial movement of the field lens 111, and the field lens 111 is adjusted to an appropriate focal length; S500: The support box 100 slides radially, so that the field lens 111 moves above the position where the substrate needs to be scribed; S600: Turn on the laser to scribe the substrate. During the scribing process, the laser displacement sensor 112 detects the distance between the substrate and the field lens 111 and feeds it back to the host computer. The host computer obtains the data and sends a command to the motor 230 to work according to the result. The first position sensor 120 senses the axial displacement. When the field lens 111 adjusts to the required distance, the first position sensor 120 sends a signal to the host computer, and the host computer sends a signal to stop the motor 230; S700: Optimize the displacement of the first position sensor 120 according to the scribing effect of the substrate, and at the same time, the mirror frame 150 adjusts the light input amount of the light passing hole 151 to achieve the best scribing effect.

[0039] Example 3, as Figure 3 shown, the S200 step further includes the following S210 step; S211: When the host computer feedback information requires downward movement, the program is set to trigger a signal to be sent to the host computer to stop the movement of the support plate 110 when the first sensor flap 113 contacts the lower limit first motion sensor 1403; S212: When the host computer feedback information requires upward movement, a signal is sent to the host computer to stop the movement of the support plate 110 when the first sensor flap 113 contacts the upper limit first motion sensor 1403.

[0040] Example 4, as Figure 4 shown, the S500 step further includes the following S510 triple anti-collision steps: S511: The linear motor mover 190 can accurately control the displacement of the support box 100. When the support box 100 moves to the corresponding position, the linear motor mover 190 automatically stops working; S512: The second motion sensor 141 of this device cooperates with the second sensor flap 142 of other devices to determine that the support box 100 is in the corresponding position. Other devices can be one end of the gantry or another identical device of this device to prevent this device from colliding with one end of the gantry or other devices; S513: In the case of out-of-control of this device, the hydraulic buffer 180 cooperates with the block 181 of other devices to absorb the impact force generated by the impact of this device; The S510 triple anti-collision steps are triggered alternately or successively.

[0041] Taking the above-described ideal embodiments of the present invention as an inspiration, through the above description, relevant staff can completely make various changes and modifications without departing from the technical idea of this invention. The technical scope of this invention is not limited to the content in the specification, and its technical scope must be determined according to the scope of the claims.

Claims

1. A real-time adjustment device for the working distance of a laser scribing field lens, characterized in that, Comprising: A support box, the support box is radially slidably arranged on a support platform, and a support plate is axially slidably arranged on the inner wall of the vertical plate of the support box. Among them, A field lens is arranged at the bottom of the support plate; A lifting assembly, the lifting assembly is arranged on the inner wall of the support box. Among them, The lifting assembly is adapted to drive the support plate to axially slide; A position sensor assembly, the position sensor assembly includes a first position sensor, the first position sensor is arranged on the side wall of the support plate, and the first position sensor is electrically connected to an upper computer. Among them, The first position sensor is adapted to control the axial displacement amount of the field lens; A compensation assembly, the compensation assembly is arranged on the side wall of the support plate; the compensation assembly includes a laser displacement meter, and the laser displacement meter faces the field lens. Among them, The laser displacement meter is electrically connected to an upper computer.

2. The real-time working distance adjusting device for a laser scribing field lens according to claim 1, characterized in that The position sensor assembly includes a second position sensor, the second position sensor is arranged on the outer wall of the vertical plate of the support box, and the second position sensor is electrically connected to an upper computer. Among them, The second position sensor is adapted to control the radial displacement amount of the support box.

3. The real-time working distance adjusting device for a laser scribing field lens according to claim 1, characterized in that A plurality of first motion sensors are arranged in the length direction of the inner wall of the vertical plate of the support box, and a first sensor stopper is arranged on the side wall of the support plate. Among them, The first motion sensors cooperate with the first sensor stopper to determine that the support plate is in a corresponding position.

4. The real-time working distance adjusting device for a laser scribing field lens according to claim 1, characterized in that A plurality of second motion sensors and second sensor stoppers are arranged in the width direction of the outer wall of the vertical plate of the support box. Among them, The end of the second sensor stopper extends out of the side wall of the support box.

5. The real-time working distance adjusting device for a laser scribing field lens according to claim 1, characterized in that A light passing hole is arranged on the bottom plate of the support box, a lens holder is arranged at the bottom of the light passing hole, and the field lens faces the light passing hole. Among them, The lens holder is adapted to adjust the light incident amount of the light passing hole.

6. The real-time working distance adjusting device for a laser scribing field lens according to claim 3, characterized in that The first motion sensors include an upper limit first motion sensor, a lower limit first motion sensor and / or a base point first motion sensor. The upper limit first motion sensor and the lower limit first motion sensor determine the upper and lower limit distances of the movement of the support plate, and the base point first motion sensor determines the initial position of the support plate.

7. The real-time working distance adjusting device for a laser scribing field lens according to claim 1, characterized in that A linear motor mover and a plurality of pairs of sliders are arranged on the outer wall of the vertical plate of the support box, and the sliders are arranged on both sides of the linear motor mover. Among them, The sliders are installed on the slide rails of the support platform.

8. A real-time adjustment device for the working distance of a laser scribing field lens as described in claim 4, characterized in that a pair of hydraulic buffers are provided on the outer wall of the vertical plate of the support box, and the hydraulic buffers are arranged between the sliders.

9. A real-time adjustment device for the working distance of a laser scribing field lens as described in claim 1, characterized in that a panel through pipe is provided on the top of the top plate of the support box, the panel through pipe is communicated with the support box, and a protective cover is sleeved outside the panel through pipe.

10. Among them, the panel through pipe is suitable for introducing clean gas.

11. A real-time adjustment device for the working distance of a laser scribing field lens as described in claim 1, characterized in that the lifting assembly includes a lead screw base, a lead screw rod, and a motor; the lead screw base is arranged on the inner wall of the vertical plate of the support box, the lead screw rod is rotatably arranged on the lead screw base, a connecting block is arranged on the outer wall of the support plate, and among them, the connecting block is threadedly connected with the lead screw rod; the motor is below the lead screw base, and among them, the output shaft of the motor extends into the lead screw base and is connected with the lead screw rod.

12. A real-time adjustment device for the working distance of a laser scribing field lens as described in claim 10, characterized in that the lifting assembly further includes a motor base and a pair of guide rails; the motor base is arranged on the inner wall of the vertical plate of the support box, and the motor is arranged on the motor base; the guide rails are arranged on the inner wall of the vertical plate of the support box, and a plurality of guide blocks are arranged on the outer wall of the support plate, and among them, the guide blocks slide on the guide rails.

13. The control method of the working distance real-time adjustment device of the laser scribing field lens according to any one of claims 1-11, characterized in that, It includes the following steps: S100: Introduce clean gas into the interior of the support box to prevent the external environment from interfering with the operation of the device.

14. S200: The support plate slides axially, and the first motion sensor cooperates with the first sensor flap to determine the corresponding position of the support plate; the support box slides radially; S300: Detect whether the substrate is transported to the processing position; S400: The axial movement of the support plate drives the axial movement of the field lens, and the field lens is adjusted to an appropriate focal length; S500: The support box slides radially so that the field lens moves above the position where the substrate needs to be scribed; S600: The laser is turned on to scribe the substrate. During the scribing process, the laser displacement meter detects the distance between the substrate and the field lens and feeds it back to the host computer. The host computer obtains the data and sends a command to the motor to work according to the result. The first position sensor senses the axial displacement. When the field lens adjusts to the required distance, the first position sensor sends a signal to the host computer, and the host computer sends a signal to stop the motor; S700: Optimize the displacement of the first position sensor according to the scribing effect of the substrate, and at the same time, the mirror frame adjusts the light input amount of the light passing hole to achieve the best scribing effect.

15. The control method of the working distance real-time adjustment device of the laser scribing field lens according to claim 12, characterized in that, The S200 step further includes the following S210 step: When the host computer feeds back information that it needs to move downward, the program is set so that when the first sensor flap contacts the lower limit first motion sensor, a signal is triggered and sent to the host computer to stop the movement of the support plate; when the host computer feeds back information that it needs to move upward, when the first sensor flap contacts the upper limit first motion sensor, a signal is triggered and sent to the host computer to stop the movement of the support plate.

16. The control method of the working distance real-time adjustment device of the laser scribing field lens according to claim 13, characterized in that, The step S500 further includes the following triple anti-collision steps of S510: S511: The linear motor mover can accurately control the displacement of the support box. When the support box moves to the corresponding position, the linear motor mover automatically stops working. S512: The second motion sensor of this device cooperates with the second sensor flap of other devices to determine that the support box is in the corresponding position. The other devices can be one end of the gantry or another identical device of this kind, preventing this device from colliding with one end of the gantry or other devices. S513: In the case of out-of-control of this device, the hydraulic buffer cooperates with the block of other devices to absorb the impact force generated by the collision of this device.

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