Rotating target inner circle and end face machining equipment

Abstract

The invention relates to the technical field of target material machining, in particular to rotating target inner circle and end face machining equipment which comprises a base and a spindle box installed on the base, a center frame is fixedly installed on the base, a three-point positioning tool is installed on the center frame in a sliding mode, and a double-spindle seat is arranged at one end of the three-point positioning tool. A high-pressure aerial fog machine and a servo motor are fixedly installed on the top of the double-spindle seat, the high-pressure aerial fog machine corresponds to the rotating target, and a grinding wheel assembly used for grinding the end face and the inner circle of the rotating target is arranged at the output end of the servo motor. A rotating target needing to be machined is placed in the three-jaw chuck, one end of the rotating target is located in the three-point positioning tool, a high-pressure aerial fog machine on the double-main-shaft base is started, the inner circle of the rotating target is cleaned through a spray head, and then the double-main-shaft base is driven by a driving device to transversely move till the grinding wheel assembly and the rotating target enter correspondingly. Therefore, the inner circle and the end face of the rotating target are machined simultaneously.

Description

Technical Field

[0001] The present invention relates to the technical field of target processing, and particularly relates to a rotary target inner circle and end face processing device. Background Art

[0002] The ITO rotary target is a key material for magnetron sputtering coating, mainly used for manufacturing transparent conductive films. During the processing of the rotary target, it is necessary to process the inner circle and end face of the rotary target. After processing, a three-coordinate measuring instrument is used to detect the dimensional accuracy of the inner circle and end face, and a surface roughness meter is used to detect the surface quality to meet the high-precision processing requirements.

[0003] In the prior art, a polishing device for a spline-type shaft rod of a rotary target machine disclosed in a patent with the publication number of CN115502873A includes a polishing platform. One end of the polishing platform is provided with a reciprocating push-pull assembly, and the reciprocating push-pull assembly includes a limit guiding rod, a self-rotating shaft, a rotating shaft, a rotating circular plate, and a first mounting tube. A same push-pull clamping seat is slidably connected to the outside of the two limit guiding rods. Rotating blocks are fixedly connected to the outside of the self-rotating shaft and the rotating shaft, and a same support rod is fixedly connected to one ends of the two rotating blocks. A limit track is fixedly connected to one end of the rotating circular plate.

[0004] The above structure uses the push-pull clamping seat to enable the shaft rod to move horizontally for uniform polishing of the key groove of the shaft rod. However, during the processing of the rotary target, it is necessary to process the inner circle and end face in sequence, resulting in low processing efficiency and inability to process the inner circle and end face of the rotary target simultaneously. Summary of the Invention

[0005] In view of this, the purpose of the present invention is to provide a rotary target inner circle and end face processing device to solve the problems of low processing efficiency and inability to process the inner circle and end face of the rotary target simultaneously.

[0006] Based on the above purpose, the present invention provides a rotary target inner circle and end face processing device, including a base and a spindle box installed on the base. A three-jaw chuck for clamping the rotary target is provided on one side of the spindle box. A center rest is fixedly installed on the base. A three-point positioning tooling is slidably installed on the center rest. The three-point positioning tooling is located outside the rotary target, and the three-point positioning tooling is concentric with the three-jaw chuck and is used for positioning the rotary target.

[0007] A double-spindle seat is provided at one end of the three-point positioning tooling. A high-pressure aerosol machine and a servo motor are respectively fixedly installed on the top of the double-spindle seat. The high-pressure aerosol machine corresponds to the rotary target. A grinding wheel assembly for grinding the end face and inner circle of the rotary target is provided at the output end of the servo motor.

[0008] A driving device is provided at the bottom end of the double spindle base, and the driving device is used to drive the grinding wheel assembly on the double spindle base to move and correspond to the rotating target.

[0009] Preferably, the grinding wheel assembly includes a main shaft fixedly connected to the output end of a servo motor. A main grinding wheel is fixedly installed on the outer part of the main shaft. A plurality of grinding wheel discs are arranged on one side of the main grinding wheel. An inner grinding wheel piece is fixedly installed on one side of the plurality of grinding wheel discs. A grinding wheel head is fixedly installed at one end of the main shaft. The plurality of inner grinding wheel pieces are slidably installed on one side of the grinding wheel head;

[0010] The plurality of inner grinding wheel pieces are circumferentially distributed outside the main grinding wheel, and an adjusting structure is arranged between the inner grinding wheel piece and the main grinding wheel.

[0011] Preferably, at least six groups of the inner grinding wheel pieces and the grinding wheel discs are provided, and the diameter of the main grinding wheel is larger than the diameter of the grinding wheel head.

[0012] Preferably, the adjusting structure includes a large gear fixedly installed on the outer part of the main shaft. A small gear meshing with the large gear is rotatably installed on one side of the main grinding wheel. A rack is meshed with the outside of the small gear. The rack is slidably installed on one side of the main grinding wheel. A magnetic block is arranged inside the rack, and an electromagnet with the same magnetic pole is arranged at the top end of the magnetic block;

[0013] A turntable is fixedly installed on the other side of the large gear. A plurality of sliding holes are annularly arranged inside the turntable. A dial rod penetrates through the inside of the sliding hole. One end of the dial rod is fixedly installed with a connecting rod frame. The connecting rod frame is slidably installed on one side of the main grinding wheel. One end of the connecting rod frame is rotatably connected to one side of the grinding wheel disc.

[0014] Preferably, the sliding hole is inclined, the turntable and the large gear are coaxially arranged, and the diameter of the sliding hole is smaller than the diameter of the grinding wheel head.

[0015] Preferably, the three-point positioning tooling includes a saddle slidably installed on the top of the center rest. A tooling table is fixedly installed on the top of the saddle. A plurality of mounting seats are arranged inside the tooling table. The mounting seats are circumferentially distributed outside the rotating target. A bearing seat is slidably installed inside the mounting seat. A displacement sensor is arranged at the bottom of the bearing seat. A plurality of displacement sensors are electrically connected to the electromagnet. A contact wheel is movably installed at the top end of the bearing seat. A spring is installed between the bearing seat and the mounting seat.

[0016] Preferably, the tooling table is of a C-shaped structure. At least three groups of the contact wheels are provided, and a rubber layer is wrapped outside the contact wheels.

[0017] Preferably, the driving device includes a sliding seat slidably mounted at the bottom of the double-spindle seat. An electric transverse guide rail is provided at the top of the sliding seat, and the top of the electric transverse guide rail is fixedly connected to the bottom of the double-spindle seat. A fixed seat is fixedly mounted at the bottom of the sliding seat, and an electric vertical guide rail is slidably mounted at the bottom end of the fixed seat. The electric vertical guide rail is fixedly mounted on the base

[0018] Advantages of the present invention:

[0019] Put the rotating target to be processed into the three-jaw chuck. One end of the rotating target is located within the three-point positioning tooling. First, start the high-pressure aerosol machine on the double-spindle seat, and use the nozzle to clean the inner circle of the rotating target. Then, drive the double-spindle seat to move horizontally by the driving device until the grinding wheel assembly and the rotating target correspond and enter, so as to simultaneously process the inner circle and the end face of the rotating target. After processing, drive the double-spindle seat to reset by the driving device, so that the high-pressure aerosol machine corresponds to the rotating target again, and use the nozzle of the high-pressure aerosol machine to perform high-pressure aerosol flushing. Description of the drawings

[0020] In order to more clearly illustrate the technical solutions in the present invention or the prior art, the following will briefly introduce the drawings required for use in the embodiments or the description of the prior art. Obviously, the drawings described below are only those of the present invention. For those of ordinary skill in the art, without creative efforts, other drawings can also be obtained based on these drawings.

[0021] Figure 1 It is a three-dimensional structure schematic diagram of the whole of the present invention;

[0022] Figure 2 It is a side view structure schematic diagram of the whole of the present invention;

[0023] Figure 3 For the present invention Figure 2 It is an enlarged structure schematic diagram of part A in the present invention;

[0024] Figure 4 It is a top view structure schematic diagram of the whole of the present invention;

[0025] Figure 5 It is a structure schematic diagram of the three-point positioning tooling and the grinding wheel assembly of the present invention;

[0026] Figure 6 For the present invention Figure 5 It is an enlarged structure schematic diagram of part B in the present invention;

[0027] Figure 7 It is an internal structure schematic diagram of the adjustment structure of the present invention.

[0028] The markings in the figure are: 1, base; 2, headstock; 3, three-jaw chuck; 4, steady rest; 5, three-point positioning tooling; 6, double spindle base; 7, high-pressure aerosol machine; 8, nozzle; 9, servo motor; 10, drive device; 11, grinding wheel assembly; 12, electric transverse guide rail; 13, slide; 14, fixed seat; 15, electric vertical guide rail; 16, main grinding wheel; 17, grinding wheel head; 18, inner grinding wheel disc; 19, main shaft; 20, grinding wheel disc; 21, adjustment structure; 22, large gear; 23, small gear; 24, toothed plate; 25, electromagnet; 251, magnetic block; 26, turntable; 27, sliding hole; 28, connecting rod frame; 29, lever; 30, saddle; 31, tooling table; 32, contact wheel; 33, mounting seat; 34, displacement sensor; 35, bearing seat. Detailed implementation manners

[0029] To make the objectives, technical solutions and advantages of the present invention clearer and more understandable, the present invention will be further described in detail below in conjunction with specific embodiments.

[0030] As Figure 1 , Figure 2 , Figure 3 , Figure 4 , Figure 5 , Figure 6 and Figure 7 shown, a rotary target inner circle and end face processing device includes a base 1 and a headstock 2 mounted on the base 1. A three-jaw chuck 3 for clamping the rotary target is provided on one side of the headstock 2. A steady rest 4 is fixedly mounted on the base 1. A three-point positioning tooling 5 is slidably mounted on the steady rest 4. The three-point positioning tooling 5 is located outside the rotary target. The three-point positioning tooling 5 is concentric with the three-jaw chuck 3 and is used for positioning the rotary target.

[0031] One end of the three-point positioning tooling 5 is provided with a double spindle base 6. A high-pressure aerosol machine 7 and a servo motor 9 are respectively fixedly mounted on the top of the double spindle base 6. The high-pressure aerosol machine 7 corresponds to the rotary target. The output end of the servo motor 9 is provided with a grinding wheel assembly 11 for grinding the end face and inner circle of the rotary target.

[0032] A drive device 10 is provided at the bottom end of the double spindle base 6. The drive device 10 is used to drive the grinding wheel assembly 11 on the double spindle base 6 to move and correspond to the rotary target.

[0033] In this embodiment, the rotating target to be processed is placed in the three-jaw chuck 3, and one end of the rotating target is located in the three-point positioning tooling 5. First, the high-pressure aerosol machine 7 on the double spindle base 6 is started, and the inner circle of the rotating target is cleaned by the nozzle 8. Then, the driving device 10 drives the double spindle base 6 to move horizontally until the grinding wheel assembly 11 corresponds to the rotating target and enters, so as to process the inner circle and end face of the rotating target simultaneously, improving the processing accuracy and efficiency. After processing, the driving device 10 drives the double spindle base 6 to reset, so that the high-pressure aerosol machine 7 corresponds to the rotating target again, and the high-pressure aerosol flushing is carried out by the nozzle 8 of the high-pressure aerosol machine 7.

[0034] As an embodiment, as Figure 4 , Figure 5 and Figure 6 shown, the grinding wheel assembly 11 includes a main shaft 19 fixedly connected to the output end of the servo motor 9. An outer main grinding wheel 16 is fixedly installed on the main shaft 19. A plurality of grinding wheel discs 20 are arranged on one side of the main grinding wheel 16. An inner grinding wheel piece 18 is fixedly installed on one side of the plurality of grinding wheel discs 20. A grinding wheel head 17 is fixedly installed at one end of the main shaft 19. The plurality of inner grinding wheel pieces 18 are slidably installed on one side of the grinding wheel head 17;

[0035] The plurality of inner grinding wheel pieces 18 are circumferentially distributed outside the main grinding wheel 16, and an adjusting structure 21 is arranged between the inner grinding wheel piece 18 and the main grinding wheel 16.

[0036] Among them, at least six groups of the inner grinding wheel pieces 18 and the grinding wheel discs 20 are provided, and the diameter of the main grinding wheel 16 is larger than the diameter of the grinding wheel head 17.

[0037] In this embodiment, the corresponding rear electric vertical guide rail 15 drives the sliding seat 13 on the fixed seat 14 to move towards the rotating target until the grinding wheel assembly 11 enters the inside of the rotating target, so that the grinding wheel disc 20 on one side of the main grinding wheel 16 abuts against the end face of the rotating target, and the inner grinding wheel piece 18 abuts against the inner circle of the rotating target. Then, the servo motor 9 drives the grinding wheel disc 20 and the inner grinding wheel piece 18 to rotate, and the six groups of inner grinding wheel pieces 18 and the grinding wheel discs 20 are used to process the inner circle and end face of the rotating target simultaneously.

[0038] As an embodiment, as Figure 4 , Figure 5 and Figure 6 shown, the adjusting structure 21 includes a large gear 22 fixedly installed on the outer part of the main shaft 19. A small gear 23 meshing with the large gear 22 is rotatably installed on one side of the main grinding wheel 16. A rack 24 is meshed with the outside of the small gear 23. The rack 24 is slidably installed on one side of the main grinding wheel 16. A magnetic block 251 is arranged inside the rack 24, and an electromagnet 25 with the same magnetic pole is arranged at the top of the magnetic block 251;

[0039] A turntable 26 is fixedly mounted on the other side of the large gear 22. A sliding hole 27 is opened in the internal annular array of the turntable 26. A shift rod 29 passes through the interior of the sliding hole 27. A connecting rod frame 28 is fixedly mounted on one end of the shift rod 29. The connecting rod frame 28 is slidably mounted on one side of the main grinding wheel 16. One end of the connecting rod frame 28 is rotatably connected to one side of the grinding wheel disc 20.

[0040] The sliding hole 27 is arranged obliquely, the turntable 26 and the large gear 22 are arranged coaxially, and the diameter of the sliding hole 27 is smaller than the diameter of the grinding wheel head 17.

[0041] In this embodiment, when rotating targets of different sizes come into contact with the contact wheel 32 in the tooling table 31, due to the change in the diameter of the rotating targets, the gear plate 24 moves to drive the small gear 23 and the large gear 22 to engage and rotate with each other, and the turntable 26 then rotates. The internal inclined sliding hole 27 drives the lever 29 to swing, thereby driving the connecting rod frame 28 to extend and retract, changing the position of the grinding wheel 20 and the inner grinding wheel 18.

[0042] Until the inner grinding wheel 18 collides with the inner circle of the rotating target, and the adjusted grinding wheel disc 20 collides with the end face of the rotating target, the grinding wheel disc 20 and the inner grinding wheel 18 are driven to rotate by the servo motor 9, so that the inner circle and end face of rotating targets of different diameters can be processed simultaneously.

[0043] As an implementation method, Figure 2 、 Figure 3 、 Figure 5 and Figure 6 As shown, the three-point positioning tool 5 includes a saddle 30 slidably mounted on the top of the center frame 4, a tooling table 31 is fixedly mounted on the top of the saddle 30, a plurality of mounting seats 33 are arranged inside the tooling table 31, and the mounting seats 33 are circumferentially distributed on the outside of the rotating target, a bearing seat 35 is slidably mounted inside the mounting seat 33, a displacement sensor 34 is provided at the bottom of the bearing seat 35, and the plurality of displacement sensors 34 are electrically connected to the electromagnet 25, a contact wheel 32 is movably mounted on the top of the bearing seat 35, and a spring is installed between the bearing seat 35 and the mounting seat 33.

[0044] The tooling table 31 is a C-shaped structure, and at least three groups of contact wheels 32 are provided. The exterior of the contact wheels 32 is wrapped with a rubber layer.

[0045] In this embodiment, the rotary target to be processed is placed in the three-jaw chuck 3, and one end of the rotary target is located in the three-point positioning fixture 5. The saddle 30 is moved on the center frame 4 to move the position of the three-point positioning fixture 5, so that the contact wheel 32 in the fixture table 31 on the saddle 30 is kept in contact with the outside of the rotary target;

[0046] When rotary targets of different sizes come into conflict with the contact wheel 32 in the workbench 31, the diameter of the rotary target changes, and the bearing seat 35 of the contact wheel 32 moves inside the mounting seat 33, thereby causing the displacement sensor 34 to be sensed. The displacement generated by the displacement sensor 34 connects the electromagnet 25 in the adjustment structure 21, and adjusts the grinding wheel assembly 11 to correspond to the rotary target.

[0047] As an implementation method, Figure 1 、 Figure 2 、 Figure 4 As shown, the driving device 10 includes a slide 13 slidably mounted on the bottom of the dual-spindle seat 6, an electric transverse guide rail 12 is provided on the top of the slide 13, and the top of the electric transverse guide rail 12 is fixedly connected to the bottom of the dual-spindle seat 6, a fixed seat 14 is fixedly mounted on the bottom of the slide 13, and an electric vertical guide rail 15 is slidably mounted on the bottom end of the fixed seat 14, and the electric vertical guide rail 15 is fixedly mounted on the base 1.

[0048] In this embodiment, the electric vertical guide rail 15 in the driving device 10 drives the slide 13 on the fixed seat 14 to move. After the slide 13 moves vertically, the electric transverse guide rail 12 drives the dual spindle seat 6 to move transversely until the grinding wheel assembly 11 corresponds to the rotating target, and the front and back operations of processing are performed.

[0049] Working principle: Place the rotating target to be processed into the three-jaw chuck 3, with one end of the rotating target located in the three-point positioning fixture 5. Move the three-point positioning fixture 5 on the center frame 4 through the saddle 30, and keep the contact wheel 32 in the fixture table 31 on the saddle 30 against the outside of the rotating target. First, start the high-pressure aerosol machine 7 on the dual-spindle seat 6, and use the nozzle 8 to clean the inner circle of the rotating target. After completion, the electric vertical guide rail 15 in the drive device 10 drives the slide 13 on the fixed seat 14 to move. After the slide 13 moves vertically, the electric horizontal guide rail 12 drives the dual-spindle seat 6 to move horizontally until the grinding wheel assembly 11 corresponds to the rotating target.

[0050] The corresponding rear electric vertical guide rail 15 drives the slide 13 on the fixed seat 14 to move toward the rotating target until the grinding wheel assembly 11 enters the interior of the rotating target, so that the grinding wheel disc 20 on one side of the main grinding wheel 16 contacts the end face of the rotating target, and the inner grinding wheel disc 18 contacts the inner circle of the rotating target. Then, the servo motor 9 drives the grinding wheel disc 20 and the inner grinding wheel disc 18 to rotate, thereby processing the inner circle and end face of the rotating target simultaneously;

[0051] When rotating targets of different sizes come into conflict with the contact wheel 32 in the workbench 31, due to the change in the diameter of the rotating target, the displacement generated by the displacement sensor 34 connects to the electromagnet 25, and the magnetic poles of the magnetic field generated by the electromagnet 25 push the toothed plate 24 outside the magnetic block 251. The toothed plate 24 moves to drive the small gear 23 and the large gear 22 to engage and rotate with each other, and the turntable 26 then rotates. The internal sliding hole 27 drives the lever 29 to swing, thereby driving the connecting rod frame 28 to extend and retract, changing the grinding wheel disc 20 and the inner grinding wheel piece 18. The greater the displacement, the greater the current generated by the electromagnet 25, and the greater the distance between the grinding wheel disc 20 at one end of the connecting rod frame 28 and the inner grinding wheel piece 18, until the inner grinding wheel piece 18 comes into conflict with the inner circle of the rotating target, and the adjusted grinding wheel disc 20 comes into conflict with the end face of the rotating target, and then the grinding wheel disc 20 and the inner grinding wheel piece 18 are driven to rotate by the servo motor 9, so that the inner circle and end face of rotating targets of different diameters can be processed simultaneously;

[0052] After processing, the dual-spindle seat 6 is driven to reset by the driving device 10 so that the high-pressure aerosol machine 7 is aligned with the rotating target again, and the nozzle 8 of the high-pressure aerosol machine 7 is used for high-pressure aerosol flushing.

[0053] Those skilled in the art should understand that the discussion of any of the above embodiments is merely illustrative and is not intended to imply that the scope of the present invention (including the claims) is limited to these examples. Within the scope of the present invention, the technical features in the above embodiments or different embodiments may be combined, the steps may be implemented in any order, and there are many other variations of the different aspects of the present invention as described above, which are not provided in detail for the sake of simplicity.

[0054] The present invention is intended to cover all such substitutions, modifications and variations that fall within the broad scope of the appended claims. Therefore, any omissions, modifications, equivalent substitutions, improvements, etc. made within the spirit and principles of the present invention should be included within the scope of protection of the present invention.

Claims

1. A rotary target inner circle and end face processing device, comprising a base (1) and a spindle box (2) installed on the base (1). A three-jaw chuck (3) for clamping the rotary target is arranged on one side of the spindle box (2), and it is characterized in that, A center rest (4) is fixedly installed on the base (1). A three-point positioning tooling (5) is slidably installed on the center rest (4). The three-point positioning tooling (5) is located outside the rotating target. The three-point positioning tooling (5) is concentric with the three-jaw chuck (3), and the three-point positioning tooling (5) is used for positioning the rotating target. One end of the three-point positioning tooling (5) is provided with a double spindle base (6). A high-pressure aerosol machine (7) and a servo motor (9) are respectively fixedly installed on the top of the double spindle base (6). The high-pressure aerosol machine (7) corresponds to the rotating target. The output end of the servo motor (9) is provided with a grinding wheel assembly (11) for grinding the end face and inner circle of the rotating target. A driving device (10) is arranged at the bottom end of the double spindle base (6). The driving device (10) is used to drive the grinding wheel assembly (11) on the double spindle base (6) to move and correspond to the rotating target.

2. The internal circle and end face processing equipment for a rotary target according to claim 1, characterized in that, The grinding wheel assembly (11) includes a main shaft (19) fixedly connected to the output end of the servo motor (9). A main grinding wheel (16) is fixedly installed on the outside of the main shaft (19). A plurality of groups of grinding wheel discs (20) are arranged on one side of the main grinding wheel (16). An inner grinding wheel piece (18) is fixedly installed on one side of the plurality of groups of grinding wheel discs (20). A grinding wheel head (17) is fixedly installed at one end of the main shaft (19). The plurality of groups of inner grinding wheel pieces (18) are slidably installed on one side of the grinding wheel head (17). The plurality of groups of inner grinding wheel pieces (18) are circumferentially distributed outside the main grinding wheel (16). An adjusting structure (21) is arranged between the inner grinding wheel piece (18) and the main grinding wheel (16).

3. The rotary target inner circle and end face processing equipment according to claim 2, wherein, At least six groups of the inner grinding wheel pieces (18) and the grinding wheel discs (20) are provided. The diameter of the main grinding wheel (16) is larger than the diameter of the grinding wheel head (17).

4. A rotary target inner circle and end face processing device according to claim 2, characterized in that, The adjusting structure (21) includes a large gear (22) fixedly installed on the outside of the main shaft (19). A small gear (23) meshing with the large gear (22) is rotatably installed on one side of the main grinding wheel (16). A toothed plate (24) is meshed outside the small gear (23). The toothed plate (24) is slidably installed on one side of the main grinding wheel (16). A magnetic block (251) is arranged inside the toothed plate (24). An electromagnet (25) with the same magnetic pole is arranged at the top end of the magnetic block (251). A turntable (26) is fixedly installed on the other side of the large gear (22). A sliding hole (27) is annularly and arrayedly opened inside the turntable (26). A dial rod (29) penetrates through the sliding hole (27). One end of the dial rod (29) is fixedly installed with a connecting rod frame (28). The connecting rod frame (28) is slidably installed on one side of the main grinding wheel (16). One end of the connecting rod frame (28) is rotatably connected to one side of the grinding wheel disc (20).

5. A rotary target inner circle and end face processing device according to claim 4, characterized in that The sliding hole (27) is inclined. The turntable (26) and the large gear (22) are coaxially arranged. The diameter of the sliding hole (27) is smaller than the diameter of the grinding wheel head (17).

6. A rotary target inner circle and end face processing device according to claim 4, characterized in that The three-point positioning tooling (5) includes a saddle (30) slidably mounted on the top of the center rest (4). A tooling table (31) is fixedly mounted on the top of the saddle (30). A plurality of mounting seats (33) are arranged inside the tooling table (31). The mounting seats (33) are circumferentially distributed outside the rotary target. A bearing seat (35) is slidably mounted inside the mounting seat (33). A displacement sensor (34) is arranged at the bottom of the bearing seat (35). A plurality of displacement sensors (34) are electrically connected to the electromagnet (25). A contact wheel (32) is movably mounted at the top end of the bearing seat (35). A spring is mounted between the bearing seat (35) and the mounting seat (33).

7. The rotary target inner circle and end face processing equipment according to claim 6, characterized in that, The tooling table (31) is of a C-shaped structure. At least three contact wheels (32) are provided, and a rubber layer is wrapped outside the contact wheels (32).

8. A rotary target inner circle and end face processing device according to claim 1, characterized in that, The driving device (10) includes a sliding seat (13) slidably mounted at the bottom of the double-spindle seat (6). An electric transverse guide rail (12) is arranged on the top of the sliding seat (13). The top of the electric transverse guide rail (12) is fixedly connected to the bottom of the double-spindle seat (6). A fixed seat (14) is fixedly mounted at the bottom of the sliding seat (13). An electric vertical guide rail (15) is slidably mounted at the bottom end of the fixed seat (14). The electric vertical guide rail (15) is fixedly mounted on the base (1).

Images