Spindle adjustable slicer

Abstract

The present invention discloses a spindle-adjustable slicer, which belongs to the field of semiconductor technology. It mainly includes a frame, a support roller, a distance adjustment structure and a driver. Two support rollers are provided on the frame. An axle box is provided at the end of the support roller. A transmission shaft is provided inside the axle box. The distance adjustment structure includes a swing arm, a gear, a clutch plate, a finger, a gear ring and a clutch plate. The swing arm is hinged on the frame. The axle box is installed on the swing arm. The gear rotates and fits on the axle box. The gear is coaxial with the support roller. The finger is inserted into the gear along the axial direction of the gear. The finger is connected to the clutch plate. A slot is provided at the end of the axle box. The gear ring is fixedly installed on the frame. The gear ring is coaxial with the rotation axis of the swing arm. The gear is meshed with the gear ring. The driver is installed on the axle box. The spindle-adjustable slicer of the present invention can solve the problem of high labor intensity in the prior art of manually adjusting the center distance of the support rollers.

Description

Technical Field

[0001] The present invention relates to the field of semiconductor technology, in particular to a slicer with an adjustable spindle. Background Art

[0002] Crystalline silicon slicers are mainly used in the fields of solar silicon wafer production, semiconductor material processing, etc. They are ideal equipment for efficient and precise slicing processing.

[0003] The actual cutting capacity of the slicer is mainly related to the width of the diamond wire mesh in the cutting area. The smaller the wire mesh width, the smaller the size of the hard and brittle material that can be cut; the larger the wire mesh width, the larger the size of the hard and brittle material that can be cut. However, when the size of the hard and brittle material is small, the smaller the wire mesh width is while meeting the cutting conditions, the better the cutting yield will be. As the width of the wire mesh increases, the yield will also decrease accordingly. Therefore, hard and brittle materials of different sizes require wire meshes of corresponding widths to be cut in order to achieve the best yield. In existing slicers with adjustable spindles, in order to achieve adjustable center distance between the two support rollers, the two ends of the support rollers are usually rotatably mounted on the frame through an eccentric shaft box. When adjusting the center distance, the eccentric shaft box needs to be manually rotated, which is labor-intensive.

[0004] Therefore, it is necessary to provide a new slicer with adjustable spindle. Summary of the Invention

[0005] In view of the above problems existing in the prior art, an object of an embodiment of the present invention is to provide a slicer with an adjustable spindle, which can solve the problem of high labor intensity in manually adjusting the center distance of the support rollers in the prior art.

[0006] To achieve the above-mentioned purpose, the technical solution adopted by the present invention is as follows: providing a spindle adjustable slicer, comprising a frame, a support roller, a pitch adjustment structure and a driver, wherein the frame is provided with two support rollers, an axle box is provided at the end of the support roller, a transmission shaft fixedly connected to the support roller is provided inside the axle box, the pitch adjustment structure comprises a swing arm, a gear, a clutch plate, an insert finger, a gear ring and a clutch plate, the swing arm is hinged on the frame, the axle box is installed on the swing arm, and the gear rotates in conjunction with the axle box One, and the gear is coaxially arranged with the support roller, the finger is inserted on the gear along the axial sliding of the gear, and the finger is fixedly connected to the clutch plate one, the end of the axle box one corresponds to the finger and a slot is provided with the clutch plate two, the clutch plate two is coaxially arranged at the end of the support roller one, the clutch plate one and the clutch plate two are arranged opposite to each other, the ring gear is fixedly installed on the frame, the ring gear is coaxial with the rotation axis of the swing arm, the gear and the ring gear are meshed, the driver one is installed on the axle box one, and the output end of the driver one is transmission connected to the transmission shaft one.

[0007] Furthermore, a slip ring is rotatably provided on the clutch plate, a shift fork is installed on the slip ring, a slider is installed on the shift fork, a slide seat is slidably provided on the slider, and the slide seat slides along the circumference of the gear ring.

[0008] Furthermore, the two swing arms installed on the same end of the two support rollers are hinged together through a hinge shaft, and the hinge shaft is installed on the frame.

[0009] Furthermore, both ends of the support roller 1 are rotatably matched with an axle box 1, and both ends of the support roller 1 are provided with a distance adjustment structure.

[0010] Furthermore, the spindle-adjustable slicer also includes a support roller 2 located below the two support rollers 1, an axle box 2 is provided at the end of the support roller 2, a transmission shaft 2 connected to the support roller 2 is rotatably fitted on the axle box 2, a clamping seat is slidably provided on the swing arm, and the clamping seat slides circumferentially around the axle box 2 and abuts against the outer peripheral wall of the axle box 2.

[0011] Furthermore, the clamping seat is slidably connected to the swing arm via a sliding structure.

[0012] Furthermore, a plurality of rollers are mounted on the clamping seat, and the rollers roll and contact the outer side wall of the axle box 2.

[0013] Furthermore, a second driver is provided at one end of the second supporting roller, the second driver is mounted on the second axle box, and an output end of the second driver is in transmission connection with the second transmission shaft.

[0014] The beneficial effects of the present invention are as follows: the spindle-adjustable slicer provided by the present invention includes a frame, a support roller, a pitch-adjusting structure and a driver, two support rollers are provided on the frame, an axle box is provided at the end of the support roller, a transmission shaft fixedly connected to the support roller is provided inside the axle box, the pitch-adjusting structure includes a swing arm, a gear, a clutch plate, a finger, a gear ring and a clutch plate, the swing arm is hinged on the frame, the axle box is installed on the swing arm, the gear rotates and fits on the axle box, and the gear is coaxially arranged with the support roller, and the finger is inserted into the axle box along the axial direction of the gear. The gear is mounted on the axle box 1, and the finger is fixedly connected to the clutch plate 1. A slot is provided at the end of the axle box 1 corresponding to the finger. The clutch plate 2 is coaxially arranged at the end of the support roller 1. The clutch plate 1 and the clutch plate 2 are arranged opposite to each other. The ring gear is fixedly mounted on the frame. The ring gear is coaxial with the rotation axis of the swing arm. The gear and the ring gear are meshed. The driver 1 is mounted on the axle box 1, and the output end of the driver 1 is connected to the transmission shaft 1 to drive the support roller 1 to rotate relative to the axle box 1. When the center distance between the two support rollers needs to be adjusted, the finger is moved to slide on the gear until the finger drives The clutch plate 1 moves to abut against the clutch plate 2, so that the clutch plate 1 and the clutch plate 2 cooperate to realize circumferential transmission connection. In this way, when the driver 1 is started to drive the support roller 1 to rotate, the gear will be driven to rotate. The rotation of the gear will drive the gear to roll along the circumference of the gear ring. At the same time, the swing arm swings around the axis, driving the axis of the transmission shaft 1 to shift, thereby realizing the adjustment of the center distance. When the axis position of the transmission shaft 1 needs to be fixed, it is only necessary to slide the finger until the clutch plate 1 and the clutch plate 2 are separated and disengaged, and at the same time, the finger is inserted into the slot on the axle box 1, so that the gear cannot rotate relative to the axle box 1, thereby The wheel and the ring gear are relatively fixed, the swing of the swing arm is locked, and the axial position of the transmission shaft 1 is fixed. The embodiment of the present invention provides an adjustable spindle slicer, in which the driver 1 can not only drive the support roller 1 to rotate to perform slicing operations, but also when adjusting the center distance of the support roller 1, the driver 1 can also be used to drive the swing arm to swing to realize the movement of the axial center of the support roller 1, thereby realizing the adjustment of the center distance, effectively solving the problem of high labor intensity of the existing manual adjustment of the center distance of the support roller, and the design is ingenious, reducing the use of the electronically controlled motor and effectively controlling the equipment cost. BRIEF DESCRIPTION OF THE DRAWINGS

[0015] The present invention will be further described below with reference to the accompanying drawings and examples.

[0016] Figure 1 A schematic diagram of the three-dimensional structure of a slicer with adjustable spindle provided in an embodiment of the present invention.

[0017] Figure 2 Schematic diagram of the positional relationship between the distance adjustment structure and the support rollers 1 and 2 provided in an embodiment of the present invention.

[0018] Figure 3 for Figure 2 Front view of the structure shown.

[0019] Figure 4 for Figure 3 Schematic diagram of the structure shown in another working state.

[0020] Figure 5 Schematic diagram of the positional relationship between the distance adjustment structure and the support roller 1 provided in an embodiment of the present invention.

[0021] Figure 6 for Figure 5 Exploded view of the structure shown.

[0022] Figure 7 for Figure 5 Front view of the structure shown.

[0023] Figure 8 For the Figure 7 Cross-sectional view along the EE direction.

[0024] Figure 9 Schematic diagram of the positional relationship between the swing arm and the supporting roller 2 provided in an embodiment of the present invention.

[0025] Figure 10 for Figure 9 Cross-sectional view of the structure shown.

[0026] Among them, the figure marks in the figure are: 1. frame; 2. support roller 1; 21. axle box 1; 22. transmission shaft 1; 3. pitch adjustment structure; 31. swing arm; 311. slot; 32. gear; 33. clutch plate 1; 34. finger; 35. fork; 351. slider; 352. slide seat; 353. slip ring; 36. ring gear; 37. clutch plate 2; 38. articulated shaft; 39. clamping seat; 391. roller; 392. sliding structure; 4. driver 1; 5. support roller 2; 51. axle box 2; 52. transmission shaft 2; 6. driver 2. DETAILED DESCRIPTION

[0027] In order to make the technical problems, technical solutions and beneficial effects to be solved by the present invention more clearly understood, the present invention is further described in detail below with reference to the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are only used to explain the present invention and are not intended to limit the present invention.

[0028] It should be noted that when an element is referred to as being “connected to” or “disposed on” another element, it may be directly on the other element or indirectly on the other element. When an element is referred to as being “connected to” another element, it may be directly connected to the other element or indirectly connected to the other element.

[0029] In the description of the present invention, it should be noted that, unless otherwise expressly specified or limited, the terms "mounted," "connected," and "connected" should be understood in a broad sense. For example, they may refer to fixed, detachable, or integral connections; mechanical or electrical connections; direct or indirect connections through an intermediate medium; and may encompass internal communication between two components or interaction between two components. Those skilled in the art will understand the specific meanings of the above terms in the present invention based on specific circumstances.

[0030] It should be understood that the terms "length", "width", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inside", "outside", etc., indicating the orientation or position relationship, are based on the orientation or position relationship shown in the accompanying drawings, and are only for the convenience of describing the present invention and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operate in a specific orientation, and therefore cannot be understood as limiting the present invention.

[0031] Reference throughout this specification to "one embodiment" or "an embodiment" means that a particular feature, structure, or characteristic described in connection with the embodiment is included in at least one embodiment of the present application. Thus, when the phrases "in one embodiment," "in some embodiments," or "in some embodiments" appear in various places throughout this specification, not all references are to the same embodiment. Furthermore, the particular features, structures, or characteristics may be combined in any suitable manner in one or more embodiments.

[0032] Please refer to Figures 1 to 10As shown, a spindle-adjustable slicer provided by the present invention is now described. The spindle-adjustable slicer includes a frame 1, a support roller 2, a distance adjustment structure 3 and a driver 4. Two support rollers 2 are provided on the frame 1. The end of the support roller 2 is provided with an axle box 21. The interior of the axle box 21 is provided with a transmission shaft 22 fixedly connected to the support roller 2. The distance adjustment structure 3 includes a swing arm 31, a gear 32, a clutch plate 33, an insert finger 34, a gear ring 36 and a clutch plate 2 37. The swing arm 31 is hinged to the frame 1, the axle box 21 is installed on the swing arm 31, the gear 32 is rotatably matched with the axle box 21, and the gear 32 is coaxially arranged with the support roller 2. The insert finger 34 The gear 32 is inserted into the gear 32 along the axial sliding of the gear 32, and the finger 34 is fixedly connected to the clutch plate 1 33. The end of the shaft box 1 21 is provided with a slot 311 corresponding to the finger 34. The clutch plate 2 37 is coaxially arranged at the end of the support roller 2. The clutch plate 1 33 and the clutch plate 2 37 are arranged opposite to each other. The ring gear 36 is fixedly installed on the frame 1. The ring gear 36 is coaxial with the rotation axis of the swing arm 31. The gear 32 is meshed with the ring gear 36. The driver 4 is installed on the shaft box 1 21, and the output end of the driver 4 is connected to the transmission shaft 1 22 to drive the support roller 2 to rotate relative to the shaft box 1 21. When the center distance between the two support rollers 2 needs to be adjusted, the driver 4 can be turned to adjust the center distance between the two support rollers 2. The insert finger 34 slides on the gear 32 until the insert finger 34 drives the clutch plate 1 33 to move and abut against the clutch plate 2 37, so that the clutch plate 1 33 and the clutch plate 2 37 cooperate to realize circumferential transmission connection. In this way, when the driver 14 is started to drive the support roller 1 2 to rotate, the gear 32 will be driven to rotate. The rotation of the gear 32 will drive the gear 32 to roll along the circumference of the ring gear 36. At the same time, the swing arm 31 swings around the axis, driving the axis of the transmission shaft 1 22 to shift, thereby realizing the adjustment of the center distance. When the axis position of the transmission shaft 1 22 needs to be fixed, it is only necessary to slide the insert finger 34 until the clutch plate 1 33 and the clutch plate 2 37 are separated and disengaged, and at the same time, the insert finger 34 is inserted into the slot 311 on the axle box 1 21. , so that the gear 32 cannot rotate relative to the shaft box 21, and then the gear 32 and the ring gear 36 are relatively fixed, the swing arm 31 is locked, and the axial position of the transmission shaft 22 is fixed. The spindle adjustable slicer provided by the embodiment of the present invention, wherein the driver 4 can not only drive the support roller 2 to rotate for slicing operations, but also when adjusting the center distance of the support roller 2, the driver 4 can also be used to drive the swing arm 31 to swing to achieve the axial movement of the support roller 2, thereby achieving the adjustment of the center distance, effectively solving the problem of high labor intensity of manual adjustment of the center distance of the support roller, and the design is ingenious, reducing the use of the electronically controlled motor, and effectively controlling the equipment cost.

[0033] like Figures 5 to 8As shown, in some embodiments, a slip ring 353 is rotatably provided on the clutch plate 1 33, a shift fork 35 is mounted on the slip ring 353, a slider 351 is mounted on the shift fork 35, a slide seat 352 is slidably provided on the slider 351, and the slide seat 352 slides along the circumferential direction of the ring gear 36, so that the axial sliding displacement of the inserting finger 34 can be achieved by shifting the slider 351, and the shift fork 35 can swing along with the swing arm 31.

[0034] like Figure 2 and Figure 4 As shown, in some embodiments, two swing arms 31 installed on the same end of two support rollers 2 are hingedly matched through a hinge shaft 38, and the hinge shaft 38 is installed on the frame 1.

[0035] like Figure 2 and Figure 4 As shown, in some embodiments, both ends of the support roller 2 are rotatably matched with an axle box 21, and both ends of the support roller 2 are provided with a distance adjustment structure 3.

[0036] like Figure 1 and Figure 2 As shown, in some embodiments, the spindle-adjustable slicer further includes a support roller 2 5 located below the two support rollers 1 2, an end portion of the support roller 2 5 is provided with an axle box 2 51, a transmission shaft 2 52 connected to the support roller 2 5 is rotatably engaged on the axle box 2 51, a clamping seat 39 is slidably provided on the swing arm 31, and the clamping seat 39 slides around the circumference of the axle box 2 51 and abuts against the outer peripheral wall of the axle box 2 51, as shown in FIG. Figure 10 As shown, two clamping seats 39 are arranged opposite to each other on the two swing arms 31 at the same end of the two support rollers 2, and the two clamping seats 39 are respectively located on both sides of the axle box 2 51, so that the axle box 2 51 is clamped by the two clamping seats 39 at the same end of the two support rollers 2. When the swing arm 31 is adjusted to swing so that the angle between the two swing arms 31 at the same end of the two support rollers 2 increases, the clamping seat 39 is forced to move downward, thereby driving the axle box 2 51 to move downward; when the swing arm 31 is adjusted to swing so that the angle between the two swing arms 31 at the same end of the two support rollers 2 decreases, the clamping seat 39 is forced to move upward, thereby driving the axle box 2 51 and the support roller 2 5 to move upward. In this way, the support roller 2 5 can be linked to move up and down by increasing the angle between the swing arms 31, as shown in FIG. Figure 3 and Figure 4As shown, when the diameter of the silicon rod to be cut is large and the center distance needs to be adjusted to increase, the support roller 2 5 can be moved down synchronously to avoid the silicon rod with a larger diameter. When the diameter of the silicon rod to be cut is small and the center distance needs to be adjusted to decrease, the support roller 2 5 can be moved up synchronously, thereby reducing the empty support area of ​​the diamond wire and minimizing the vibration of the diamond wire. Compared with the existing technology that requires manual adjustment one by one, the operation is simpler. Specifically, when circumferential limitation is required between the shaft box 2 51 and the clamping seat 39, the screw hole at the end of the shaft box 2 51 can be used to lock with the clamping seat 39, thereby preventing the shaft box 2 51 and the clamping seat 39 from rotating relative to each other.

[0037] like Figure 10 As shown, in some embodiments, the clamping seat 39 is slidably connected to the swing arm 31 via a sliding structure 392, and the sliding structure 392 can be but is not limited to a guide rod structure.

[0038] like Figure 10 As shown, in some embodiments, a plurality of rollers 391 are mounted on the clamping seat 39 , and the rollers 391 roll in contact with the outer side wall of the axle box 2 51 to reduce the contact friction between the clamping seat 39 and the axle box 2 51 .

[0039] like Figure 1 and Figure 2 As shown, in some embodiments, a second driver 6 is provided at one end of the second supporting roller 5 , the second driver 6 is mounted on the second axle box 51 , and an output end of the second driver 6 is in transmission connection with the second transmission shaft 52 .

[0040] The above description is only a preferred embodiment of the present invention and is not intended to limit the present invention. Any modifications, equivalent substitutions and improvements made within the spirit and principles of the present invention should be included in the scope of protection of the present invention.

Claims

1. A slicer with adjustable spindle, characterized by: The transmission gear is engaged with the gear of said sliding arm and is engaged with the gear of said sliding arm, and the transmission gear is engaged with the gear of said sliding arm and is engaged with the gear of said sliding arm.

2. The spindle-adjustable slicer according to claim 1, characterized in that: A slip ring is rotatably provided on the clutch plate, a shift fork is installed on the slip ring, a slider is installed on the shift fork, a slide seat is slidably provided on the slider, and the slide seat is slidably fitted along the circumference of the gear ring.

3. The spindle-adjustable slicer according to claim 1, characterized in that: The two swing arms installed on the same end of the two support rollers are hinged and matched through a hinge shaft, and the hinge shaft is installed on the frame.

4. The spindle-adjustable slicer according to claim 1, characterized in that: Both ends of the support roller 1 are rotatably matched with axle box 1, and both ends of the support roller 1 are provided with a distance adjustment structure.

5. The spindle-adjustable slicer according to claim 1, characterized in that: The spindle-adjustable slicer also includes a support roller 2 located below the two support rollers 1, an axle box 2 is provided at the end of the support roller 2, a transmission shaft 2 connected to the support roller 2 is rotatably fitted on the axle box 2, a clamping seat is slidably provided on the swing arm, and the clamping seat slides circumferentially around the axle box 2 and abuts against the outer peripheral wall of the axle box 2.

6. The spindle-adjustable slicer according to claim 5, characterized in that: The clamping seat is slidably connected to the swing arm via a sliding structure.

7. The spindle-adjustable slicer according to claim 5, characterized in that: A plurality of rollers are installed on the clamping seat, and the rollers roll and contact with the outer side wall of the axle box 2.

8. The slicer with adjustable spindle according to claim 5, characterized in that: One end of the second supporting roller is provided with a second driver, the second driver is mounted on the second axle box, and the output end of the second driver is in transmission connection with the second transmission shaft.

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