Rotary support device for vacuum coating of bearing surfaces of high-speed electric spindles

Abstract

The application relates to the technical field of support structures, in particular to a rotating support device for vacuum coating of a bearing surface of a high-speed motorized spindle, which comprises a spindle, a base body installed on the spindle, and a power assembly installed on the base body and providing power for self-rotation of the bearing, the spindle axis is coplanar with the bearing, and the spindle axis is coincident with the bearing center, a support assembly is arranged on the base body or two support assemblies are oppositely arranged, and the support assembly is used for clamping the bearing; the bearing is subjected to rolling motion and self-rotation motion in a turnover mode, so that different positions on the bearing can face coating particles at any angle, the coating particles are uniformly and fully attached to the bearing, full-automatic and continuous coating operation of the bearing is realized, time loss caused by frequent adjustment of the bearing angle is avoided, the coating mode is simplified, and the working efficiency is improved.

Description

Technical Field

[0001] This invention relates to the technical field of support structures, and in particular to a rotary support device for vacuum coating of bearing surfaces for high-speed electric spindles. Background Technology

[0002] As a core driving component in modern high-precision CNC machine tools, aerospace equipment, semiconductor processing equipment, and new energy vehicle manufacturing, the performance of high-speed electric spindles directly determines processing efficiency, accuracy, and equipment reliability. With the rapid development of intelligent manufacturing and ultra-precision machining technologies, electric spindles are evolving towards higher speeds, greater power, and longer lifespans. Under this trend, bearings, as the core load-bearing components of electric spindles, face severe challenges such as friction and wear, temperature rise deformation, and lubrication failure under extreme working conditions.

[0003] Traditional bearings are prone to fatigue spalling, fretting wear, and lubricant film rupture under high-speed, heavy-load, and frequent start-stop conditions, leading to deterioration in precision and shortened lifespan. Surface coating technology, through the deposition of nanoscale functional coatings such as diamond-like carbon (DLC), titanium nitride (TiN), and tungsten carbide (WC), can significantly improve the surface hardness of bearings, reduce the coefficient of friction, and enhance corrosion resistance, becoming an important way to overcome the performance bottleneck of bearings. However, existing vacuum coating equipment is mostly designed for static or simple rotating parts. When coating bearings, the coating particles can only adhere to the exposed parts of the bearing. For the inner ring, rolling elements, inner grooves where the rolling elements are located, or the obstructed positions when the bearing is fixed, the bearing placement angle needs to be adjusted repeatedly to ensure that the coating particles adhere to all positions of the bearing. The operation is cumbersome, the coating process is time-consuming, and the work efficiency is low. Summary of the Invention

[0004] This invention provides a rotary support device for vacuum coating the bearing surface of a high-speed electric spindle, which can effectively solve the problems in the prior art.

[0005] To achieve the above objectives, the technical solution adopted by the present invention is as follows:

[0006] A rotary support device for vacuum coating of bearing surface for high-speed electric spindle includes a spindle, a base mounted on the spindle, and a power unit mounted on the base to provide power for the rotation of the bearing. The axis of the spindle is coplanar with the bearing and the axis of the spindle coincides with the center of the bearing. One support group or two support groups are provided on the base, and the support group is used to clamp the bearing.

[0007] The power unit includes a rotating ring capable of rotation and two arc-shaped tubes located on both sides of the rotating ring. The rotating ring and the two arc-shaped tubes form an arc-shaped channel. Several blades for generating airflow are provided inside the rotating ring.

[0008] In some embodiments of the present invention, the rotating ring rotates intermittently or continuously, and the rotation direction of the rotating ring can be adjusted.

[0009] In some embodiments of the present invention, the end of the arc-shaped tube away from the rotating ring is configured to be flat.

[0010] In some embodiments of the invention, the support assembly includes a plurality of side struts for pressing the bearing.

[0011] In some embodiments of the present invention, the distance between the plurality of side pillars can be adjusted.

[0012] In some embodiments of the present invention, the number of support groups is set to two groups, and each of the side pillars is provided with a chuck for cooperating with the bearing end face.

[0013] In some embodiments of the present invention, the number of the side pillars within the support group is set to three;

[0014] The support group also includes a secondary shaft and auxiliary shafts installed at the ends of each of the side pillars. The three auxiliary shafts and the secondary shaft are arranged in a quadrilateral shape. Adjacent auxiliary shafts and the secondary shafts are connected by connecting beams.

[0015] The distance between the secondary shaft and its opposite auxiliary shaft can be adjusted.

[0016] In some embodiments of the present invention, a transmission wheel is provided on the secondary shaft and each of the side support pillars, and the four transmission wheels are driven by a synchronous belt.

[0017] In some embodiments of the present invention, the support assembly further includes a movable sleeve and a crossbeam slidably inserted on the movable sleeve. The movable sleeve is connected to the secondary shaft, the auxiliary shaft opposite to the secondary shaft is connected to one end of the crossbeam, and the other end of the crossbeam is connected to the movable sleeve through a pushing unit.

[0018] The position of the crossbeam on the base is adjustable.

[0019] In some embodiments of the present invention, an adjustment structure for adjusting the position of the crossbeam is rotatably provided on the base. The adjustment structure includes an adjustment sleeve rotatably provided on the base and a threaded post passing through the adjustment sleeve and threadedly connected to the adjustment sleeve. The end face of the adjustment sleeve is eccentrically provided with a push-pull arm that is the same number as the support group. The push-pull arm connects the adjustment sleeve and the crossbeam.

[0020] A sliding column is slidably inserted in the middle of the main shaft, and the end of the sliding column is connected to the end of the threaded column.

[0021] The technical solution of this invention can achieve the following technical effects:

[0022] By causing the bearing to undergo a reversible revolution and rotation, different positions on the bearing can be made to face the coating particles at any angle, allowing the coating particles to adhere evenly and completely to the bearing. This enables fully automatic and continuous coating operations on the bearing, avoiding the time loss caused by frequent adjustments to the bearing angle, simplifying the coating process, and improving work efficiency. Attached Figure Description

[0023] To more clearly illustrate the technical solutions in the embodiments of the present invention or the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments recorded in the present invention. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0024] Figure 1 This is a schematic diagram of the structure of the present invention;

[0025] Figure 2 yes Figure 1 Explosion structure diagram;

[0026] Figure 3 This is a schematic diagram of the support group in an embodiment of the present invention;

[0027] Figure 4 yes Figure 3 A structural diagram from another perspective;

[0028] Figure 5 This is a schematic diagram of the power unit in an embodiment of the present invention;

[0029] Figure 6 This is a schematic diagram of the rotating ring cross-sectional structure in an embodiment of the present invention;

[0030] Figure 7 This is a schematic diagram of the cross-sectional structure of the substrate in an embodiment of the present invention;

[0031] Figure 8 This is a schematic diagram of two rotating support devices arranged opposite each other in an embodiment of the present invention.

[0032] Figure label:

[0033] 100. Spindle;

[0034] 200. Base; 201. Adjusting screw sleeve; 202. Push-pull arm; 203. Threaded post; 204. Sliding post;

[0035] 300. Support assembly; 301. Side support column; 302. Chuck; 303. Auxiliary shaft; 304. Countershaft; 305. Connecting beam; 306. Drive wheel; 307. Synchronous belt; 308. Moving sleeve; 309. Crossbeam; 310. Pushing unit;

[0036] 400. Power unit; 401. Rotating ring; 402. Arc-shaped pipe body; 403. Air outlet; 404. Blade; 405. Motor; 406. Transmission wheel; 407. Side support plate. Detailed Implementation

[0037] The technical solutions of the present invention will be clearly and completely described below with reference to the accompanying drawings of the embodiments of the present invention. Obviously, the described embodiments are only some embodiments of the present invention, and not all embodiments.

[0038] Unless otherwise defined, all technical and scientific terms used herein have the same meaning as commonly understood by one of ordinary skill in the art to which this invention pertains. The terminology used in this specification is for the purpose of describing particular embodiments only and is not intended to be limiting of the invention. The term "and / or" as used herein includes any and all combinations of one or more of the associated listed items.

[0039] like Figures 1 to 6 As shown, the rotary support device for vacuum coating of bearing surface of high-speed electric spindle of the present invention includes spindle 100, base 200 mounted on spindle 100 and power unit 400 mounted on base 200 and providing power for bearing rotation. The axis of spindle 100 is coplanar with the bearing and the axis of spindle 100 coincides with the center of the bearing. One support group 300 or two support groups 300 are provided on base 200, and the support group 300 is used to clamp the bearing.

[0040] The power unit 400 includes a rotating ring 401 capable of rotation and two arc-shaped tubes 402 located on both sides of the rotating ring 401. The rotating ring 401 and the two arc-shaped tubes 402 form an arc-shaped channel. Several blades 404 for generating airflow are provided inside the rotating ring 401.

[0041] In this invention, the main spindle 100 primarily provides power for the revolution of the bearing. The power source for the main spindle 100 can be an external motor. Here, revolution refers to the rotational motion of the bearing with a straight line passing through its center point on its surface as the axis of rotation. Therefore, the direction of the bearing's revolution can be arbitrary, and since the axis of revolution coincides with the axis of the main spindle 100, the direction of the main spindle 100 can be arbitrarily set, such as... Figure 1As shown, the axis of the main shaft 100 is horizontal, and the bearing's revolution direction is in the vertical plane. The bearing's revolution mainly provides different display angles in different directions and positions to facilitate the entry of coating particles between the inner and outer rings of the bearing and to coat the rolling elements and the inner groove where the rolling elements are located. The substrate 200 is mainly used to provide support positions for the support group 300 and the power group 400. The support group 300 can be set in one or two groups. When the support group 300 is set in one group, it allows the fixing of one end face of the bearing. When the support group 300 is set in two groups, it fixes both end faces of the bearing, thereby achieving the fixing of the bearing. Of course, the two support groups 300 can also cooperate to squeeze and fix the bearing. Thus, the bearing can be fixed individually by the support group 300, or it can be fixed by the cooperation of the two support groups 300. The fixing methods are diverse. In some embodiments, the rotating support device can also be set in two opposing groups, such as... Figure 8 As shown, they act on the left and right sides of the bearing respectively, which makes the bearing move more smoothly;

[0042] The power unit 400 provides power for the rotation of the bearing. The rotating ring 401 and two arc-shaped tubes 402 in the power unit 400 form an arc-shaped channel. The arc-shaped air outlet 403 is close to the bearing. Both ends of the channel are close to each other and near the bearing. When the rotating ring 401 rotates, it generates airflow inside the arc-shaped channel through several blades 404. The airflow flows along the arc-shaped channel, discharging airflow from one end. This airflow acts on the bearing and drives its rotation, while the other end of the arc-shaped channel draws in gas. Because the two ends of the channel are close together, a circulating vortex of airflow is formed within the channel and at the air outlet 403. This is achieved by utilizing the rotating ring... The continuous rotation of 401 allows the cyclone to continuously act on the local bearing position at the air outlet 403, thereby providing power for the bearing's rotation. This pneumatic method avoids random gas flow and prevents airflow from affecting the movement of coating particles, thus preventing inconsistent coating thickness. It can meet the requirements, especially in highly directional coating processes such as electron beam coating. At the same time, it can maintain the air pressure around the coating within a specified range and avoid air pressure fluctuations. Moreover, this method does not require the introduction of gas into the environment around the coating, and can maintain constant pressure in low-pressure or ultra-low-pressure coating operations. In some embodiments, the power unit 400 can also adopt an air pump for air intake and supply, or a mechanical friction drive.

[0043] In use, the bearing is placed on the support assembly 300 and supported by the support assembly 300. The rotating ring 401 in the power assembly 400 rotates and drives several blades 404 inside it to rotate, thereby generating airflow in the arc-shaped channel formed by the rotating ring 401 and the two arc-shaped tubes 402. The airflow is discharged through one end of the arc-shaped channel and acts on the bearing. The friction between the airflow and the bearing causes the bearing to rotate. Then the airflow can enter the arc-shaped channel again through the other end, thus achieving the bearing's rotation effect. When the bearing rotates, any position on it can move to the path of the coating particles, so that the coating particles are attached to the bearing. Then the main shaft 100 is rotated, and the bearing revolves. In this way, different surfaces on the bearing can be exposed on the path of the coating particles, thereby achieving a full coating effect on the bearing without the need to frequently adjust the bearing position.

[0044] It should be noted that each arc-shaped tube 402 is connected and fixed to the base 200 by a side support plate 407. A motor 405 is installed on one side support plate 407, and a transmission wheel 406 is installed at the output end of the motor 405. The transmission wheel 406 is connected to the rotating ring 401 for transmission, thereby achieving the purpose of providing power to the rotating ring 401.

[0045] By causing the bearing to undergo a reversible revolution and rotation, different positions on the bearing can be made to face the coating particles at any angle, allowing the coating particles to adhere evenly and completely to the bearing. This enables fully automatic and continuous coating operations on the bearing, avoiding the time loss caused by frequent adjustments to the bearing angle, simplifying the coating process, and improving work efficiency.

[0046] When the bearing is coated, the rotating ring 401 can use different operating modes to provide power for the rotation of the bearing. Specifically, the rotating ring 401 can rotate intermittently or continuously, and the rotation direction of the rotating ring 401 can be adjusted.

[0047] When the rotating ring 401 adopts a continuous rotation mode, it can continuously generate airflow and blow the bearing to rotate. At this time, the bearing rotates without interruption and its speed fluctuation is small, which is suitable for scenarios with extremely high requirements for coating uniformity. In addition, its control method is simple and reduces start-stop impact. However, the disadvantage of this method is that the airflow interference is large and it is easy to cause plasma instability. It is mainly suitable for low-pressure processes, short-term coating, and high-speed coating.

[0048] When the rotating ring 401 adopts an intermittent rotation mode, it can drive the bearing to rotate intermittently or make the bearing rotate in a cycle of fast and slow speeds. This operation mode can improve the vacuum compatibility of the coating work, reduce airflow interference, and save energy and reduce consumption. However, its disadvantages are poor speed stability and complex control. It requires precise matching of the blowing cycle and bearing inertia, otherwise it is easy to stop or overshoot. It is mainly suitable for high vacuum processes, low-speed coating, and cost-sensitive production.

[0049] Adjusting the rotation direction of the rotating ring 401 can change the airflow direction, thereby changing the bearing's rotation direction. This allows the bearing to be coated using different operating modes.

[0050] When airflow enters and exits through the end openings of the two arc-shaped tubes 402, to concentrate the airflow and enable it to exert a more effective blowing force on the bearing, the ends of the arc-shaped tubes 402 can be narrowed. To increase the contact area between the airflow and the bearing and improve the effectiveness of the airflow in rotating the bearing, the ends of the arc-shaped tubes 402 furthest from the rotating ring 401 can be flattened, such as... Figure 5 As shown, the length direction of the flat opening of the arc-shaped tube 402 is parallel to the width direction of the bearing. This allows the exhaust airflow to contact the bearing over a larger area in the width direction, thereby improving the effectiveness of pneumatic transmission and reducing the energy loss of ineffective airflow.

[0051] Since the bearing needs to be able to rotate when fixed by the support assembly 300, the structure within the support assembly 300 used to clamp the bearing needs to be limited, specifically as follows: Figure 3 As shown, the support assembly 300 includes several side supports 301 for pressing against the bearing; the side supports 301 can contact the bearing, and the bearing can drive the side supports 301 to rotate when rotating; the specific fixing method of the side supports 301 can be that the side supports 301 are all located on the outer ring of the bearing, and the bearing is pressed and fixed by their proximity to each other; or the side supports 301 are all located on the inner ring of the bearing, and the bearing is externally supported and fixed by their distance from each other; or the side supports 301 can fix the inner and outer rings of the bearing simultaneously; or the side supports 301 can be located on the same side of the bearing, with some side supports 301 located on the inner ring and some side supports 301 located on the outer ring of the bearing, so that the side supports 301 on the inner and outer rings press against each other to fix the bearing. The specific fixing method can be determined according to the actual situation, and the specific distribution of the side supports 301 is not limited as long as the side supports 301 do not obstruct or hinder the coating work, and all of them are within the protection scope of this case.

[0052] Because the bearings in the electric spindle have different models and installation positions, the distance between several side supports 301 can be adjusted so that the support assembly 300 can support different models of bearings. This adjustable distance also facilitates the disassembly and assembly of the bearings. Specifically, the distance between each side support 301 can be adjusted, or the positions of multiple side supports 301 on one side of the bearing can be adjusted, while the positions of multiple side supports 301 on the other side are fixed. The adjustment power of the side supports 301 can be provided by a power source such as a cylinder or hydraulic cylinder.

[0053] When the support assembly 300 supports the bearing, the side support column 301 on the support assembly 300 can contact either the end face of the bearing or the side wall of the bearing. However, regardless of the contact method, it can only restrict the bearing in one direction. For example, when the side support column 301 contacts the end face of the bearing, the bearing is not effectively restricted on the bearing surface; and when the side support column 301 contacts the side wall of the bearing, it does not effectively restrict the bearing width. To improve the fixing effect of the support assembly 300 on the bearing, the support method of the support assembly 300 needs to be improved. Figure 1 and Figure 3 For example, the number of support groups 300 is set to two groups, and each side support column 301 is provided with a chuck 302 for cooperating with the bearing end face; the side wall of the side support column 301 contacts the side wall of the bearing. In the bearing width direction, the bearing width direction can be fixed by the relative compression of the two support groups 300 and the compression of the bearing end face by the chuck 302 on each side support column 301. In this way, the bearing can be restricted in any direction, and this restriction does not affect the rotation of the bearing.

[0054] To optimize the clamping method of the support assembly 300 and reduce its structural complexity, the bearing is supported using a minimum number of side support columns 301 to reduce costs. This can be achieved by employing methods such as... Figure 4 As shown, the number of side support columns 301 within the support group 300 is set to three;

[0055] The support assembly 300 also includes a secondary shaft 304 and auxiliary shafts 303 installed at the ends of each side support column 301. The three auxiliary shafts 303 and the secondary shaft 304 are arranged in a quadrilateral shape. Adjacent auxiliary shafts 303 and the secondary shaft 304 are connected by connecting beams 305.

[0056] The distance between the secondary shaft 304 and its opposite auxiliary shaft 303 can be adjusted.

[0057] The three side support pillars 301 can be arranged such that one is on the inner side of the bearing and two are on the outer side, or two are on the inner side of the bearing and one is on the outer side. This three-point clamping method provides stable support for the bearing. In some embodiments, all three side support pillars 301 can also be located on the outer or inner side of the bearing to achieve different support effects. Figure 4 For example, one of the three side supports 301 is located inside the bearing, and the other two are located outside the bearing. When these supports cooperate with the secondary shaft 304, they can form a quadrilateral. When the two opposite endpoints of the quadrilateral move closer or further apart, the overall shape of the quadrilateral will change. In this case, when the distance between the secondary shaft 304 and its opposite auxiliary shaft 303 changes, the remaining two auxiliary shafts 303 and their upper side supports 301 will be displaced. That is, the vertical distance between the auxiliary shaft 303 opposite to the secondary shaft 304 and the remaining two auxiliary shafts 303 changes. When the bearing is within the range of this vertical distance, the change in vertical distance will enable the three side supports 301 to clamp and fix the bearing. The control method only requires moving the secondary shaft 304. Therefore, it is simpler in terms of structure and control method. The four connecting beams 305 are mainly used to support the auxiliary shafts 303 and the secondary shaft 304 so that the quadrilateral can be formed.

[0058] When the power unit 400 provides rotational power to the bearing, if it simultaneously powers both the inner and outer rings, the rolling elements between them cannot roll; they remain stationary relative to each other. Therefore, the coating particles cannot fully coat the rolling elements and their obstructed areas. Conversely, when the power unit 400 only powers either the inner or outer ring, it cannot guarantee simultaneous relative motion. Therefore, to improve the bearing's motion and ensure relative motion between the inner and outer rings, allowing the rolling elements within the bearing to roll, the following methods can be employed: Figure 4 As shown, transmission wheels 306 are provided on the secondary shaft 304 and on each side support 301, and the four transmission wheels 306 are connected by a synchronous belt 307. Based on the quadrilateral structure, when the power unit 400 acts on the outer ring of the bearing, the side support 301 on the outer ring of the bearing will rotate. At this time, the side support 301 can drive the remaining two side supports 301 to rotate through the transmission wheels 306 and the synchronous belt 307. The side support 301 in contact with the inner ring of the bearing will rotate, thereby driving the inner ring of the bearing to rotate. At this time, the inner and outer rings of the bearing move synchronously relative to each other. Conversely, if the power unit 400 acts on the inner ring of the bearing, the outer ring of the bearing will rotate synchronously relative to each other.

[0059] Since the transmission wheel 306 and the timing belt 307 are based on a quadrilateral, the deformation of the quadrilateral, i.e. the compression or loosening of the bearing by the support group 300, will not change the total length of the quadrilateral. Therefore, the timing belt 307 can maintain the transmission state with each transmission wheel 306 at any deformed position.

[0060] Based on the above embodiments, such as Figure 4 As shown, the support assembly 300 also includes a movable sleeve 308 and a crossbeam 309 that slides through the movable sleeve 308. The movable sleeve 308 is connected to the secondary shaft 304. The auxiliary shaft 303, which is opposite to the secondary shaft 304, is connected to one end of the crossbeam 309. The other end of the crossbeam 309 is connected to the movable sleeve 308 through a push unit 310. The push unit 310 is a structure such as a cylinder, a hydraulic cylinder, or a propulsion motor.

[0061] The position of the crossbeam 309 on the base 200 is adjustable;

[0062] The movable sleeve 308 and the crossbeam 309 can provide support for the various structures on the support group 300. When the crossbeam 309 moves on the base 200, the two support groups 300 can move closer or further apart. Based on the crossbeam 309, when it is necessary to control the support group 300 to clamp or release the bearing, the push unit 310 performs a telescopic movement, which can push the movable sleeve 308 to move on the crossbeam 309, thereby changing the distance between the secondary shaft 304 and its opposite side support 301, causing the quadrilateral to deform. The movement of the crossbeam 309 can be powered by a push structure such as a cylinder or hydraulic cylinder.

[0063] Furthermore, such as Figure 7 As shown, an adjustment structure for adjusting the position of the crossbeam 309 is rotatably provided on the base 200. The adjustment structure includes an adjustment sleeve 201 rotatably provided on the base 200 and a threaded post 203 passing through the adjustment sleeve 201 and threadedly connected to the adjustment sleeve 201. The end face of the adjustment sleeve 201 is eccentrically provided with a push-pull arm 202, which is the same number as the support group 300. The push-pull arm 202 connects the adjustment sleeve 201 and the crossbeam 309.

[0064] A sliding column 204 is slidably inserted in the middle of the spindle 100, and the end of the sliding column 204 is connected to the end of the threaded column 203.

[0065] When the sliding column 204 moves, it can push the threaded column 203 to move. Since the threaded column 203 is threadedly connected to the adjusting sleeve 201, the threaded column 203 will push the adjusting sleeve 201 to rotate. The adjusting sleeve 201 can simultaneously pull the two crossbeams 309 closer or further apart through its two eccentric push-pull arms 202, thereby controlling the movement of the two sets of support groups 300. The base 200 can provide support for the adjusting sleeve 201. Specifically, a rotating structure such as a copper ring or a small bearing can be fitted on the outer wall of the adjusting sleeve 201, and then the rotating structure can be fixed to the base 200. When the main shaft 100 rotates, the sliding column 204 will rotate synchronously, and the moving power of the sliding column 204... It can be provided by a cylinder, oil cylinder or other pushing structure; in some embodiments, the sliding column 204 and the threaded column 203 can also be rotatably connected, and a locking structure is set between them. When it is necessary to adjust the position of the support group 300, the locking structure locks the sliding column 204 and the threaded column 203. At this time, the movement of the sliding column 204 will push the adjusting sleeve 201 to rotate. When the base 200 rotates, the locking structure unlocks. At this time, the sliding column 204 and the threaded column 203 are rotatably connected. The main shaft 100 can drive the adjusting sleeve 201 and the threaded column 203 to rotate synchronously. The position between the adjusting sleeve 201 and the threaded column 203 is relatively stationary. The sliding column 204 can remain stationary and does not need to rotate with the main shaft 100.

[0066] The foregoing has shown and described the basic principles, main features, and advantages of the present invention. Those skilled in the art should understand that the present invention is not limited to the above embodiments. The embodiments and descriptions in the specification are merely illustrative of the principles of the invention. Various changes and modifications can be made to the invention without departing from its spirit and scope, and all such changes and modifications fall within the scope of the present invention as claimed. The scope of protection of the present invention is defined by the appended claims and their equivalents.

Claims

1. A rotary support device for high-speed electric spindle bearings with vacuum-coated surfaces, characterized in that, It includes a spindle, a base mounted on the spindle, and a power unit mounted on the base to provide power for the rotation of the bearing. The axis of the spindle is coplanar with the bearing and coincides with the center of the bearing. The base is provided with a support group or two support groups are provided opposite to each other. The support group is used to clamp the bearing. The power unit includes a rotating ring capable of rotation and two arc-shaped tubes located on both sides of the rotating ring. The rotating ring and the two arc-shaped tubes form an arc-shaped channel. Several blades for generating airflow are provided inside the rotating ring. The support assembly includes several side pillars for pressing the bearing, with the side pillars distributed simultaneously on the inner and outer sides of the bearing. The distance between the aforementioned side pillars can be adjusted. The support assembly also includes a secondary shaft and an auxiliary shaft installed at the end of each of the side pillars, wherein the distance between the secondary shaft and the opposite auxiliary shaft is adjustable. A drive wheel is provided on the secondary shaft and on each of the side support pillars, and the drive wheels are driven by a synchronous belt.

2. The rotary support device for vacuum coating of bearing surface for high-speed electric spindles according to claim 1, characterized in that, The rotating ring rotates intermittently or continuously, and the direction of rotation of the rotating ring can be adjusted.

3. The rotary support device for vacuum coating of bearing surface for high-speed electric spindles according to claim 1, characterized in that, The end of the arc-shaped tube away from the rotating ring is flattened.

4. The rotary support device for vacuum coating of bearing surface for high-speed electric spindles according to claim 1, characterized in that, The number of support groups is set to two groups, and each of the side pillars is provided with a chuck for cooperating with the bearing end face.

5. The rotary support device for vacuum coating of bearing surface for high-speed electric spindles according to claim 1, characterized in that, The number of the side pillars in the support group is set to three; The three auxiliary shafts and the secondary shaft are arranged in a quadrilateral shape, and adjacent auxiliary shafts and secondary shafts are connected by connecting beams.

6. The rotary support device for vacuum coating of bearing surface for high-speed electric spindles according to claim 5, characterized in that, The support assembly also includes a movable sleeve and a crossbeam that slides through the movable sleeve. The movable sleeve is connected to the secondary shaft. The auxiliary shaft opposite to the secondary shaft is connected to one end of the crossbeam. The other end of the crossbeam is connected to the movable sleeve through a pushing unit. The position of the crossbeam on the base is adjustable.

7. The rotary support device for vacuum coating of bearing surface for high-speed electric spindles according to claim 6, characterized in that, An adjustment structure for adjusting the position of the crossbeam is rotatably provided on the base. The adjustment structure includes an adjustment sleeve rotatably provided on the base and a threaded post passing through the adjustment sleeve and threadedly connected to the adjustment sleeve. The end face of the adjustment sleeve is eccentrically provided with a push-pull arm that is the same number as the support group. The push-pull arm connects the adjustment sleeve and the crossbeam. A sliding column is slidably inserted in the middle of the main shaft, and the end of the sliding column is connected to the end of the threaded column.

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