Probe detection method, device and storage medium

Abstract

The present invention belongs to the field of semiconductor testing and provides a probe detection method, device, and storage medium. Software is used to acquire coordinate measurement elements and establish an initial coordinate system. A probe head sub-coordinate system and a probe tip sub-coordinate system are further established to generate a first probe test program. This program is then translated and replicated based on the inter-probe step distance to obtain a multi-probe test program. This program is then aggregated to form an overall test program and automatically executed. Probes that do not meet standards are screened using data analysis. This method overcomes the challenges of traditional manual measurement, which is subject to strong subjectivity, low efficiency, and the risk of probe damage. It achieves rapid and accurate automatic detection and probe screening, significantly improving production efficiency and reducing labor costs and risks.

Description

Technical Field

[0001] The present application relates to the field of semiconductor testing, and in particular to a probe detection method, device, and storage medium. Background Art

[0002] Probe inspection technology is widely used in semiconductor testing to verify that probe size, shape, and performance meet design specifications, thereby ensuring the reliability of subsequent chip testing. Traditional probe inspection relies primarily on operators manually measuring and screening individual probes under a microscope or projector based on drawings or technical specifications. This method has the following shortcomings:

[0003] (1) Manual measurement is highly dependent on the operator's experience and proficiency. The measurement results of different people or the same person at different times are prone to deviations, resulting in inconsistent probe parameters and difficulty in ensuring consistent detection accuracy. (2) The manual operation process is cumbersome and requires positioning and measuring each probe one by one, which consumes a lot of time and manpower costs and seriously affects production efficiency. (3) The manual measurement process is prone to scratches or deformation of the probe due to improper micro-operation, increasing the risk of damage, affecting the service life of the probe and increasing the scrap rate. (4) In multi-probe array or batch detection scenarios, manual solutions are difficult to complete the collection and analysis of large quantities of data efficiently and stably, and cannot meet the modern semiconductor industry's demand for high-throughput and high-precision detection.

[0004] While some existing automated inspection solutions attempt to utilize vision systems or coordinate measuring equipment (such as InSpec), they often require repeated manual programming and debugging of test programs, as well as individual calibration and parameter input for each probe or group of probes. This is particularly true when dealing with multiple probes distributed on a custom fixture and arranged at the same step distance, requiring manual establishment of coordinate systems and generation of corresponding inspection processes. This remains inefficient.

[0005] In view of the above-mentioned deficiencies in existing technologies, it is necessary to develop a probe testing method that can significantly improve detection efficiency, reduce the risk of manual intervention and probe damage, and meet the requirements of semiconductor manufacturing and testing for high-precision and high-throughput probe detection. Summary of the Invention

[0006] The present application provides a probe detection method, device and storage medium to solve the problems in the prior art of manual probe measurement, which are highly subjective, inefficient and prone to damage.

[0007] In a first aspect, the present application provides a probe detection method, wherein a plurality of grids are provided on a custom jig, and the probes are evenly placed in each grid, the probes including a needle head and a needle tip, and the method comprises the following steps:

[0008] Establishing an initial coordinate system based on the coordinate measurement elements on the software and the specifications of the custom fixture, and determining the position coordinates of the first probe on the custom fixture;

[0009] According to the needle position and needle tip position of the first probe, a needle tip sub-coordinate system and a needle tip sub-coordinate system are established respectively;

[0010] generating a test program for the first probe according to the needle head sub-coordinate system and the needle tip sub-coordinate system;

[0011] Determining a translation amount between the first probe and each of the other probes according to a step distance between the first probe and the other probes, and performing translation copying on the test program of the first probe based on the translation amount to obtain a test program for each of the other probes;

[0012] Generate an overall test program for all probes based on the test program of each probe;

[0013] Run the test according to the overall test procedure to filter out probes that do not meet the standards.

[0014] Optionally, the coordinate measurement elements include a starting point and coordinate axis correction elements. Establishing an initial coordinate system based on the coordinate measurement elements in the software and the specifications of the customized fixture to determine the position coordinates of the first probe on the customized fixture includes:

[0015] Select any of the four vertices of the custom fixture as the first starting point, and the vertex corresponding to the point horizontally or vertically as the second starting point;

[0016] Determining an initial direction axis according to the first starting point and the second starting point;

[0017] Perform coordinate axis correction based on the initial direction axis to establish an initial coordinate system;

[0018] The position coordinates of the first probe are determined according to the position of the first probe in the initial coordinate system.

[0019] Optionally, the needle includes a needle end point and a needle starting end point, and the needle tip includes a needle tip end point and a needle tip starting end point, and establishing a needle tip sub-coordinate system and a needle tip sub-coordinate system according to the needle tip position and the needle tip position of the first probe, respectively, includes:

[0020] Determining the needle end point position and the needle tip end point position of the first probe according to the position coordinates of the first probe;

[0021] Establishing a needle sub-coordinate system with the needle end point as the origin;

[0022] A needle tip sub-coordinate system is established with the needle tip end point position as the origin.

[0023] Optionally, generating a test program for the first probe according to the needle head sub-coordinate system and the needle tip sub-coordinate system includes:

[0024] Acquiring probe coordinate information according to the needle head sub-coordinate system and the needle tip sub-coordinate system;

[0025] Calculating probe parameter information according to the probe coordinate information;

[0026] A test program for the first probe is generated according to the probe parameter information and the needle head sub-coordinate system and the needle tip sub-coordinate system.

[0027] Optionally, the probe coordinate information includes the needle tip end point coordinates, the needle tip starting end point coordinates, the needle head end point coordinates and the needle head starting end point coordinates, and acquiring the probe coordinate information according to the needle head sub-coordinate system and the needle tip sub-coordinate system includes:

[0028] Determining the coordinates of the needle tip end point and the needle tip starting end point according to the positions of the needle tip end point and the needle tip starting end point in the needle tip sub-coordinate system;

[0029] The coordinates of the needle end point and the needle starting end point are determined according to the positions of the needle end point and the needle starting end point in the needle sub-coordinate system.

[0030] Optionally, the probe parameter information includes needle tip length, needle mid-section length, needle total length, needle head length, needle head angle, and offset. Calculating the probe parameter information based on the probe coordinate information includes:

[0031] Calculating the needle tip length according to the needle tip end point coordinates and the needle tip starting end point coordinates;

[0032] Calculating the length of the middle section of the needle according to the coordinates of the starting endpoint of the needle tip and the coordinates of the end point of the needle;

[0033] Calculating the total length of the needle based on the coordinates of the needle tip end point and the coordinates of the needle starting end point;

[0034] Calculating the needle length and needle angle according to the coordinates of the needle starting point and the needle ending point;

[0035] The offset is calculated according to the needle end point coordinates and the needle tip end point coordinates.

[0036] Optionally, running the test according to the overall test program to screen out probes that do not meet the standards includes:

[0037] Run the test according to the overall test procedure, output the standard value and tolerance of each probe, and mark each probe label;

[0038] The standard value and tolerance corresponding to each probe tag are compared with a preset value. If the difference between the standard value or the tolerance and the preset value exceeds a preset threshold, it is determined to be non-compliant with the standard.

[0039] In a second aspect, the present application provides a probe detection device, comprising a hardware module and a software module;

[0040] The hardware module is a custom fixture, which is provided with multiple grids, and each probe is evenly distributed in the grid with equal step distance, and the probe includes a needle head and a needle tip;

[0041] The software module includes:

[0042] An initial coordinate system establishment module, used to establish an initial coordinate system based on the coordinate measurement elements in the software and the specifications of the customized fixture, and determine the position coordinates of the first probe on the customized fixture;

[0043] a sub-coordinate system establishing module, configured to establish a needle tip sub-coordinate system and a needle tip sub-coordinate system according to the needle tip position and the needle tip position of the first probe, respectively;

[0044] A first program generation module is used to generate a test program for the first probe according to the needle head sub-coordinate system and the needle tip sub-coordinate system;

[0045] a translation copy module, configured to determine a translation amount between the first probe and each of the other probes according to a step distance between the first probe and the other probes, and to perform translation copying on the test program of the first probe based on the translation amount to obtain a test program for each of the other probes;

[0046] An integration module is used to generate an overall test program for all probes based on the test program of each probe;

[0047] The screening module is used to run the test according to the overall test program and screen out probes that do not meet the standards.

[0048] In a third aspect, an embodiment of the present application provides a terminal device, comprising: a memory, a processor, and a computer program stored in the memory and executable on the processor, wherein the processor implements the method described above when executing the computer program.

[0049] In a fourth aspect, an embodiment of the present application provides a computer-readable storage medium, wherein the computer-readable storage medium stores a computer program, and when the computer program is executed by a processor, the method described above is implemented.

[0050] The above-mentioned technical solution provided by the embodiment of the present application has the following advantages compared with the existing technology: coordinate measurement elements are obtained and an initial coordinate system is established through software, and then a sub-coordinate system is established based on the needle end point and the needle tip end point to accurately locate each key feature point, eliminating the unstable factors of manual positioning; the test program is automatically generated to ensure the consistency of the measurement path and parameters, thereby significantly improving the measurement accuracy and avoiding the influence of human errors on the results; after generating the test program for the first probe, the step information between the probes is used for translation and copying, and the test programs for other probes are generated in batches, avoiding the tedious process of writing or debugging programs for each probe separately; the overall test program runs all probe measurements at one time, and combines the table tool to automatically process and analyze the results, completing multi-probe detection and screening at one time, which greatly saves time compared to manual measurement one by one, improves detection throughput, and meets the needs of mass production; automated measurement reduces manual operation links, avoids manual positioning and mechanical damage to the probe during operation. BRIEF DESCRIPTION OF THE DRAWINGS

[0051] The accompanying drawings, which are incorporated in and constitute a part of this specification, illustrate embodiments consistent with the invention and, together with the description, serve to explain the principles of the invention.

[0052] In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the following briefly introduces the drawings required for use in the embodiments or the description of the prior art. Obviously, for ordinary technicians in this field, other drawings can be obtained based on these drawings without paying any creative labor.

[0053] One or more embodiments are exemplarily illustrated by pictures in the corresponding drawings. These exemplifications do not constitute limitations on the embodiments. Elements with the same reference numerals in the drawings are represented as similar elements. Unless otherwise stated, the figures in the drawings do not constitute proportional limitations.

[0054] Figure 1 A schematic structural diagram of a customized fixture provided in an embodiment of the present application;

[0055] Figure 2 A schematic diagram of a flow chart of a probe detection method provided in an embodiment of the present application;

[0056] Figure 3 A schematic diagram of the structure of a probe sub-coordinate system provided in an embodiment of the present application;

[0057] Figure 4 A schematic diagram of the structure of a probe provided in an embodiment of the present application;

[0058] Figure 5A schematic structural diagram of a probe detection device provided in an embodiment of the present application;

[0059] Figure 6 It is a structural diagram of the computer-readable storage medium provided in an embodiment of the present application. DETAILED DESCRIPTION

[0060] To make the purpose, technical solutions, and advantages of the embodiments of this application more clear, the technical solutions in the embodiments of this application will be clearly and completely described below in conjunction with the drawings in the embodiments of this application. Obviously, the described embodiments are part of the embodiments of this application, not all of the embodiments. Based on the embodiments in this application, all other embodiments obtained by ordinary technicians in this field without making creative efforts are within the scope of protection of this application.

[0061] The disclosure below provides many different embodiments or examples for implementing different configurations of the present invention. To simplify the disclosure of the present invention, the components and configurations of specific examples are described below. Of course, these are merely examples and are not intended to limit the present invention. In addition, the present invention may repeat reference numerals and / or letters in different examples. Such repetition is for the purpose of simplicity and clarity and does not in itself indicate the relationship between the various embodiments and / or configurations discussed.

[0062] The present invention provides a probe detection method for detecting a probe placed on a custom fixture, such as Figure 1 As shown, Figure 1 A schematic diagram of the structure of a custom fixture provided in an embodiment of the present application. A custom fixture is a test fixture / platform / holder with probes mounted on a fixed structure. It is a custom device used to precisely contact and transmit signals, current, or voltage to products such as circuit boards, connectors, chips, and modules during testing.

[0063] Among them, there are multiple grids on the customized fixture, and the number and size of the grids can be adaptively changed with the specifications of the customized fixture. The probes are placed in each grid, and the step distance between the probes is equal. Among them, the probe consists of three parts: the needle head, the needle tip, and the middle section between the needle head and the needle tip.

[0064] It should be noted that in this application, only the test program for the first probe can be written, that is, the test program for the first probe is the sample test program. After generating the test program for the first probe, the step information between other probes and the first probe is used to copy the test program for the first probe (sample test program) and generate test programs for other probes in batches, avoiding the tedious process of writing or debugging programs for each probe separately.

[0065] In this application, the data parameters of each part of the detection probe will be used to automatically screen out probes that do not meet the standards, which is conducive to improving measurement accuracy and avoiding the influence of human errors on the results. It is also suitable for mass production needs and can detect a large number of probes at the same time to improve detection efficiency.

[0066] Figure 2 A schematic diagram of a flow chart of a probe detection method provided in an embodiment of the present application, wherein the method comprises the following steps:

[0067] S100 , establishing an initial coordinate system according to coordinate measurement elements in the software and the specifications of the customized fixture, and determining the position coordinates of the first probe on the customized fixture.

[0068] In an embodiment of the present application, the detection probe establishes a coordinate system of the customized fixture through the coordinate measurement elements in the preset library in the software to determine the position of each probe on the customized fixture, that is, through the coordinate measurement elements in the preset library in the software, touch or drag the icon of the coordinate measurement element to draw the corresponding coordinate system.

[0069] Specifically, the coordinate measurement elements include a starting point and coordinate axis correction elements. The initial coordinate system is established based on the coordinate measurement elements in the software and the specifications of the customized fixture, and the position coordinates of the first probe on the customized fixture are determined, including:

[0070] S101, selecting any one of the four vertices of the customized fixture as a first starting point, and the vertex corresponding to the point horizontally or vertically as a second starting point;

[0071] S102, determining an initial direction axis according to the first starting point and the second starting point;

[0072] S103, performing coordinate axis correction based on the initial direction axis to establish an initial coordinate system;

[0073] S104 : Determine the position coordinates of the first probe according to the position of the first probe in the initial coordinate system.

[0074] like Figure 1 As shown, Figure 1The plane rectangle in the figure represents a custom jig. The custom jig is provided with a plurality of grids of the same size, and probes are placed in the grids respectively, and the step distances between the probes are equal. In the embodiment of the present application, since the custom jig is a regular quadrilateral, and most of them are rectangles, any point of the vertex of the four corners of the custom jig is used as the first starting point, that is, the coordinate origin O. If the vertex corresponding to the point horizontally is used as the second starting point, then the initial direction axis determined between the first starting point and the second starting point is the X-axis. If the vertex corresponding to the point vertically is used as the second starting point, then the initial direction axis determined between the first starting point and the second starting point is the Y-axis. According to the determined X-axis or Y-axis, the coordinate axis is corrected according to the coordinate axis correction element to establish the initial coordinate system. After the initial coordinate system is established, the position coordinates of the first probe are determined by the position of the grid where the first probe is located in the initial coordinate system ( ).

[0075] It should be noted that the coordinate range can be flexibly adjusted according to actual conditions and is not specifically limited here. Therefore, under different customized fixtures or probes of different specifications, the coordinate range of the initial coordinate system may be different, mainly based on actual application.

[0076] S200 , establishing a needle head sub-coordinate system and a needle tip sub-coordinate system according to the needle head position and the needle tip position of the first probe, respectively.

[0077] In the embodiment of the present application, after establishing the initial coordinate system, the position of the first probe can be determined. The first probe can be the probe corresponding to the grid at any of the four vertices of the custom fixture. Generally, the probe corresponding to the grid at the origin of the initial coordinate system is the first probe. From step S200 to step S300, the test program for the first probe is generated, that is, the process of generating a sample test program. The test programs for other probes can be obtained by simply measuring the step distance with the first probe and translating and copying the sample test program. There is no need to manually write the test program for each probe. Automatically generating the test program improves test efficiency and eliminates the instability of manual positioning.

[0078] When writing the test program for the first probe, the computer terminal display will magnify the probe in the grid and cannot display all parts of the entire probe, including the needle head, needle tip and middle length. Therefore, in the embodiment of the present application, it is necessary to establish sub-coordinate systems for the needle head and needle tip of the probe respectively, so as to measure the data parameters of each part of the probe.

[0079] Specifically, the needle includes a needle end point and a needle starting end point, and the needle tip includes a needle tip end point and a needle tip starting end point. The needle tip sub-coordinate system and the needle tip sub-coordinate system are established according to the needle tip position and the needle tip position of the first probe, respectively, including:

[0080] S201, determining the needle end point position and the needle tip end point position of the first probe according to the position coordinates of the first probe;

[0081] S202, establishing a needle sub-coordinate system with the needle end point as the origin;

[0082] S203: Establishing a needle tip sub-coordinate system with the needle tip end point position as the origin.

[0083] In the embodiment of the present application, the needle end point and the needle tip end point of the first probe can be determined according to the position coordinates of the first probe obtained in S100. Figure 3 As shown, Figure 3 A schematic diagram of the structure of a probe sub-coordinate system provided in an embodiment of the present application. The probe includes a needle head and a needle tip. The needle head includes a needle head starting endpoint A and a needle head end point A', and the needle tip includes a needle tip starting endpoint B and a needle tip end point B'. A needle head sub-coordinate system is established with needle tip end point A' as the origin, and a needle tip sub-coordinate system is established with needle tip end point B' as the origin. The process of establishing a sub-coordinate system can refer to the process of establishing an initial coordinate system. Through the coordinate measurement elements in the software, the first starting point and the second starting point are first determined, and the coordinate axis correction is performed based on the coordinate axis formed by the first starting point and the second starting point.

[0084] S300 : Generate a test program for the first probe according to the needle head sub-coordinate system and the needle tip sub-coordinate system.

[0085] In the embodiment of the present application, the needle head sub-coordinate system and the needle tip sub-coordinate system are established in order to determine the length parameters, angles, and offsets of each part of the probe. This information needs to be calculated through each coordinate in the probe. Specifically, the test program for the first probe is generated based on the needle head sub-coordinate system and the needle tip sub-coordinate system, including:

[0086] S301 : Acquire probe coordinate information according to the needle head sub-coordinate system and the needle tip sub-coordinate system.

[0087] Specifically, the probe coordinate information includes the needle tip end point coordinates, the needle tip starting end point coordinates, the needle head end point coordinates and the needle head starting end point coordinates. The acquisition of the probe coordinate information according to the needle head sub-coordinate system and the needle tip sub-coordinate system includes:

[0088] S3011, determining the coordinates of the needle tip end point and the coordinates of the needle tip starting end point according to the positions of the needle tip end point and the needle tip starting end point in the needle tip sub-coordinate system;

[0089] S3012: Determine the coordinates of the needle end point and the needle starting end point according to the positions of the needle end point and the needle starting end point in the needle sub-coordinate system.

[0090] In the embodiments of this application, Figure 3 As shown, the probe coordinate information includes the coordinates of the needle tip end point B', the coordinates of the needle tip starting end point B, the coordinates of the needle tip end point A' and the coordinates of the needle tip starting end point A. The corresponding coordinate information is the coordinates of the needle tip end point , the starting and ending coordinates of the needle tip , coordinates of the needle end point and the starting and ending point coordinates of the needle .

[0091] S302: Calculate probe parameter information according to the probe coordinate information.

[0092] like Figure 4 As shown, Figure 4 This is a schematic diagram of the structure of a probe provided in an embodiment of the present application, wherein the probe parameter information includes needle tip length, needle middle section length, needle total length, needle head length, needle head angle and offset,

[0093] Calculating probe parameter information according to the probe coordinate information includes:

[0094] S3021, calculating the needle tip length according to the needle tip end point coordinates and the needle tip starting end point coordinates;

[0095] S3022, calculating the needle mid-section length based on the coordinates of the needle tip starting point and the needle end point;

[0096] S3023, calculating the total length of the needle according to the coordinates of the end point of the needle tip and the coordinates of the starting end point of the needle;

[0097] S3024, calculating the needle length and needle angle according to the coordinates of the needle starting point and the needle ending point;

[0098] S3025: Calculate an offset based on the needle end point coordinates and the needle tip end point coordinates.

[0099] In the embodiment of the present application, the following probe parameters are defined: needle tip length L_tip: defined as the distance from the needle tip starting point to the needle tip end point in the needle tip sub-coordinate system; needle mid-segment length L_mid: defined as the distance between the needle tip starting point and the needle head end point; needle total length L_total: usually equal to the distance from the needle tip starting point to the needle head starting point or a combination of the aforementioned sections; needle head length L_head: the length between the needle head starting point and the needle head end point; needle head angle : The inclination or angle of the needle tip relative to the axis of the needle middle section; Offset: The relative offset between the end point of the needle tip and the end point of the needle tip in the sub-coordinate system, used for measurement path correction.

[0100] To enable the InSpec device to execute the measurement command, the local coordinates of each key point in the sub-coordinate system need to be converted to the initial coordinate system. The software module knows the transformation matrix or transformation parameters of the needle sub-coordinate system and the needle tip sub-coordinate system in the initial coordinate system. For each measurement key point, the needle tip end point coordinates , the starting and ending coordinates of the needle tip , coordinates of the needle end point and the starting and ending point coordinates of the needle In one possible implementation, the coordinates of the needle tip end point and the needle tip starting point in the initial coordinate system, as well as the coordinates of the needle tip end point and the needle tip starting point in the initial coordinate system, are calculated using a matrix transformation or a coordinate transformation function. The needle tip length, needle midsection length, needle total length, needle tip length, needle tip angle, and offset are calculated based on the coordinates of the needle tip end point, needle tip starting point, needle tip end point, and needle tip starting point converted to the initial coordinate system.

[0101] For example, to measure the tip length, the coordinates of the starting and ending points of the tip can be converted from the tip sub-coordinate system to the movement to the tip end point, and the displacement can be recorded through the InSpec contact detection command. To calibrate the tip length and angle, you can first locate the reference position in the tip sub-coordinate system, then move along a specific trajectory, record the position when the detection is triggered, and thus calculate the length and angle. For simultaneous multi-point measurement or scanning measurement, if it is necessary to scan the side or curved surface of the tip, contact or non-contact measurement actions can be performed in sequence in the global coordinate system according to a pre-calculated sequence of multiple measurement points, collect multiple data points, and measure multiple probe parameter information at the same time.

[0102] In one possible embodiment, the present application also sets a safe or pre-positioning motion trajectory. Before moving to the measurement point, it should first move to a safe height or safe position to avoid colliding with the tooling or other probes, and approach the measurement end point along a predefined direction from the measurement starting point, or perform probe geometric size or feature measurement according to the measurement method required by the InSpec device, such as Z-direction pressure drop detection, force feedback detection, etc.

[0103] Set appropriate speed, acceleration and detection trigger conditions for each motion action to balance measurement accuracy and efficiency. For example, use low speed to ensure accuracy when approaching the measurement point, and use higher speed to save time during rapid positioning. Path sequence optimization is also performed. Based on probe parameters and tooling layout, the execution order of measurement points can be optimized to reduce movement distance and increase overall operating speed. The software can dynamically generate the optimal or suboptimal measurement path sequence based on probe shape and device interface capabilities.

[0104] S303: Generate a test program for the first probe according to the probe parameter information and the needle head sub-coordinate system and the needle tip sub-coordinate system.

[0105] In this embodiment of the present application, a test program for the first probe is generated based on the probe parameter information calculated in step S302 and the sub-coordinate system for the needle tip and needle head established in step S301. In this embodiment, it is assumed that the probe parameter information for the first probe, including the needle tip length, needle mid-section length, needle total length, needle tip length, needle tip angle, and offset, has been obtained in the previous step. Furthermore, a needle tip sub-coordinate system and a needle tip sub-coordinate system have been established, with their origins corresponding to the needle tip end point and the needle tip end point of the probe on the custom fixture, respectively. The following describes how the software module uses this information to generate a test program that can be executed by an InSpec device or similar coordinate measuring instrument.

[0106] First, read and verify the parameter information. The software module reads the probe parameter information of the first probe from the data structure (such as a database or memory object), including the needle tip length, needle mid-section length, needle full length, needle head length, needle head angle, and offset. The rationality of each parameter read is checked, for example, to ensure that L_tip, L_mid, L_head, etc. are all positive values, and the angle is The offset is within the allowable range, meets the design tolerance, etc. If an anomaly is detected, a warning may be triggered or manual confirmation may be required, but in this embodiment it is assumed that the parameters are valid.

[0107] The software module uses a script template approach. Within a pre-prepared test program template, key locations and parameters are defined as placeholders. The software module then populates the template with calculated coordinate values, velocity, acceleration, and trigger conditions through text replacement or template rendering, generating a complete script. The final output is a device-readable program file (e.g., an ".isp" script, a G-code snippet, or a manufacturer-specific command sequence), which can be saved to a specified path or directly delivered to the InSpec device via an interface.

[0108] S400 , determining a translation amount between the first probe and each other probe according to a step distance between the first probe and other probes, and performing translation copying on the test program of the first probe based on the translation amount to obtain a test program of each other probe.

[0109] In the embodiment of the present application, after completing the generation of the test program for the first probe, the software module continues to execute the following steps to batch generate test programs for other probes.

[0110] First, the probe array pitch information is read from the custom fixture specifications or user-entered grid parameters. This pitch includes the horizontal pitch Px and the vertical pitch Py, which represent the distance between the centers of two adjacent probes in the X and Y axes, respectively. For example, if the fixture is arranged in a rectangular matrix, Px = 5 mm and Py = 4 mm.

[0111] Then, the translation offset ΔXk and ΔYk of the kth probe (k starts counting from 1) in the i-th row and j-th column of the array relative to the "first probe" (usually regarded as the probe at the origin of the coordinate system) are calculated as follows:

[0112] ΔXk = (column number j–1) × Px

[0113] ΔYk = (row index i–1) × Py

[0114] The row and column indices are determined by the probe's position index in the fixture grid. If the probe array is M rows by N columns, the remaining probes can be enumerated sequentially in row-first or column-first order. The software module then performs a translational copy of all coordinate-related instructions in the test program for the first probe: the X coordinate of each instruction in the original test program is added with the corresponding probe's ΔXk, and the Y coordinate is added with the corresponding probe's ΔYk. The Z coordinate remains unchanged or is adjusted accordingly based on the different probe height offsets.

[0115] The software automatically loops through this copying process based on the array size, writing the translated instruction sequence into the test program file corresponding to each probe for easy device recall. Necessary identifiers (such as probe number and test sequence number) are embedded in the test program to ensure that the result data is uniquely associated with the specific probe, facilitating subsequent good product screening and traceability. This copying mechanism allows for rapid generation of test programs for the entire probe group, requiring only maintenance and verification of the test logic for the first probe. This significantly simplifies programming and ensures consistent measurement paths and parameters for all probes.

[0116] S500: Generate an overall test program for all probes based on the test program of each probe.

[0117] In an embodiment of the present application, a test program for all probes is synthesized by generating a test program for the first probe and test programs corresponding to other probes. When generating the test program, the software can pre-insert data recording instructions, for example, automatically output the results to a log or database in a predefined format after each measurement is completed, so that Excel or other analysis tools can read them later. At the same time, error handling or anomaly detection instructions are added to the program. For example, if no contact is detected during the measurement process, the anomaly is recorded and the subsequent steps are skipped, or an alarm process is triggered when the measured value exceeds the design range. For possible device communication anomalies or measurement failures, retries or backup paths can be inserted in the script to improve test stability.

[0118] After the software generates a test program, it can be run in a simulation environment or the device's simulation function to verify the appropriateness of the motion trajectory, whether the measurement action is correctly triggered, and whether there is a collision risk. Once the simulation passes, it is then sent to the actual InSpec device for execution. During the simulation phase, the simulation log is automatically compared with the expected measurement path. Any deviations are fed back to the parameter or template adjustment module for iterative optimization.

[0119] In addition to the test program itself, the software also generates a report based on the results, such as an Excel macro or CSV formatted description, which can be used to automatically import, parse, and compare the InSpec instrument output data to pre-set standards or tolerances. Once the test program is generated, the software module provides a user interface or command prompt, displaying the generated file path and summary information (such as the coordinates of key measurement points and the expected measurement sequence) for user confirmation.

[0120] S600: Run a test according to the overall test program to screen out probes that do not meet the standards.

[0121] In the embodiment of the present application, the results of the overall test program are imported into an EXCEL table for data analysis and statistics, and probes that do not meet the standards are screened out, specifically including:

[0122] S601 runs the test according to the overall test program, outputs the standard value and tolerance of each probe, and marks each probe label;

[0123] S602 compares the standard value and tolerance corresponding to each probe tag with a preset value, and if the difference between the standard value or the tolerance and the preset value exceeds a preset threshold, determines that the probe tag does not meet the standard.

[0124] After completing the translation and copying of the test programs for each probe and issuing them in batches, the software module executes the following steps to automatically run the overall test, obtain the results, and filter out probes that do not meet the standards.

[0125] First, the InSpec device interface is called to load and start the entire test program. The device then performs contact or scanning measurements on each probe in turn, outputting the measurement results and tolerances for each probe simultaneously according to the probe label and saving them as a log file. The Excel automation module is then launched on the software side to import the log file into a predefined Excel template. The template contains columns such as probe label, measurement result, measurement tolerance, preset standard value, preset tolerance, calculated deviation, and pass / fail judgment.

[0126] Specifically: Fill the measurement results and measurement tolerances into the corresponding cells respectively; read the preset standard value and preset tolerance from the configuration table; use the formula to calculate the absolute difference between the measurement result and the preset standard value, as well as the absolute difference between the measurement tolerance and the preset tolerance; automatically generate a qualified mark based on the preset threshold: if any difference exceeds the threshold, it will be marked as unqualified in the qualified judgment column, otherwise it will be marked as qualified; the software collects all probe labels judged as unqualified in the Excel table into the defective product list, and generates corresponding report files and statistical charts to facilitate production line personnel to quickly locate and eliminate unqualified probes. Its image is consistent with the custom fixture and the grid on the custom fixture. Each grid represents the probe placed on its grid. When the probe is unqualified, the grid is marked dark to distinguish it from the qualified probe. The operator can directly determine the location of the unqualified probe on the custom fixture based on the image table drawn on Excel.

[0127] Finally, based on the screening results, the system automatically feeds back information about defective probes to higher-level systems, triggering subsequent retesting or scrapping, completing a closed-loop management process. The entire process, from test execution to result screening, requires no human intervention, ensuring both speed and consistent, traceable results.

[0128] Compared with the existing technology, the advantages of this application include: (1) improving detection accuracy and reducing human errors: obtaining coordinate measurement elements and establishing an initial coordinate system through software, and then establishing a sub-coordinate system with the end point of the needle and the end point of the needle tip, which can accurately locate key feature points; automatically generating a test program to ensure that the measurement path and parameters are consistent each time, avoiding manual visual positioning and manual operation errors, thereby significantly improving measurement accuracy.

[0129] (2) Significantly shorten the detection time and improve the detection throughput: After generating the test program for the first probe, the step information between probes is used for translation and copying, without the need to rewrite the program for each probe; the overall test program runs multiple probes at one time; combined with Excel and other spreadsheet tools to automatically process the results, batch and high-throughput detection is achieved, which greatly saves time and improves efficiency compared to manual measurement of each probe.

[0130] (3) Reduce the risk of probe damage and improve the yield rate: The automated measurement process reduces manual intervention and avoids scratches or deformation of the probe due to improper manual operation; the use of precise coordinate systems and preset measurement paths makes the probe movement controllable and repeatable, reducing accidental collisions; the automatic screening mechanism only retains probes that meet the standards, reducing defective products caused by damage or measurement deviations, improving the yield rate and reducing scrap costs.

[0131] (4) Enhanced adaptability and maintainability: By parameterizing coordinate measurement elements and customized fixture specifications, probe arrays of different specifications and arrangements can be quickly adapted; the sub-coordinate system establishment and translation copy mechanism are universal, and the test program can be regenerated by simply adjusting the measurement elements, simplifying upgrades and maintenance; the software-based process is easy to integrate version management and supports rapid iteration and optimization.

[0132] (5) Achieve traceability of results and data-driven decision-making: Generate labels and record measurement values ​​and tolerance comparison results during the detection process of each probe, and automatically summarize and visualize the results through Excel or similar tables to facilitate quality traceability, statistical analysis and process improvement; timely adjust needle making or testing parameters through data feedback to form a closed-loop optimization and improve overall production quality and stability.

[0133] (6) Reduce dependence on operator skills and improve automation level: Automatic generation of test programs and automatic screening processes greatly reduce the professional skills requirements of personnel in the inspection process, and only equipment installation and software configuration are required; reducing training costs and differences in manual operations is conducive to rapid promotion and application among different production lines or teams, and improving the overall automation level and consistency.

[0134] (7) Save manpower and risk costs and improve economic benefits: Automation replaces large-scale manual measurement, reducing manpower input; reduces the risk of probe damage or personal injury due to improper operation, and reduces potential compensation and quality accident costs; compared with traditional manual inspection solutions, the overall economic benefits are significant.

[0135] The present invention provides a probe detection device, comprising a hardware module and a software module;

[0136] The hardware module is a custom fixture, which is provided with multiple grids, and each probe is evenly distributed in the grid with equal step distance (such as Figure 1 As shown), the probe comprises a needle and a needle tip. (As shown Figure 3 shown)

[0137] like Figure 5 As shown, Figure 5 This is a schematic diagram of the structure of a probe detection device provided in an embodiment of the present application. The software module includes:

[0138] An initial coordinate system establishment module 710 is used to establish an initial coordinate system based on the coordinate measurement elements in the software and the specifications of the customized fixture, and determine the position coordinates of the first probe on the customized fixture;

[0139] A sub-coordinate system establishing module 720 is configured to establish a needle tip sub-coordinate system and a needle tip sub-coordinate system according to the needle tip position and the needle tip position of the first probe, respectively;

[0140] A first program generation module 730 is configured to generate a test program for the first probe according to the needle head sub-coordinate system and the needle tip sub-coordinate system;

[0141] a translation and copying module 740 for determining a translation amount between the first probe and each of the other probes based on a step distance between the first probe and the other probes, and performing translation and copying of the test program of the first probe based on the translation amount to obtain test programs of each of the other probes;

[0142] An integration module 750 is used to generate an overall test program for all probes based on the test program of each probe;

[0143] The screening module 760 is used to run the test according to the overall test program and screen out probes that do not meet the standards.

[0144] like Figure 6 As shown, Figure 6 Schematic diagram of the structure of the computer-readable storage medium provided in the embodiment of the present application. The computer-readable storage medium 800 of this embodiment includes: a server 810 ( Figure 6 Only one is shown), a client 820 and a data recovery program 821 stored in the client 820 and executable on the at least one client 820, the client 820 executes the data recovery program 821 to send a request to the server 810, and the server 810 feeds back a result to implement the steps in the above method embodiment.

[0145] Those skilled in the art can clearly understand that, for the convenience and brevity of description, only the division of the above-mentioned functional units and modules is used as an example for illustration. In actual applications, the above-mentioned functions can be distributed and completed by different functional units and modules as needed, that is, the internal structure of the device can be divided into different functional units or modules to complete all or part of the functions described above. The functional units and modules in the embodiment can be integrated into one processing unit, or each unit can exist physically alone, or two or more units can be integrated into one unit. The above-mentioned integrated unit can be implemented in the form of hardware or in the form of software functional units. In addition, the specific names of the functional units and modules are only for the convenience of distinguishing each other, and are not used to limit the scope of protection of this application. The specific working process of the units and modules in the above-mentioned system can refer to the corresponding process in the aforementioned method embodiment, and will not be repeated here.

[0146] In the above embodiments, the description of each embodiment has its own focus. For parts that are not described or recorded in detail in a certain embodiment, reference can be made to the relevant description of other embodiments.

[0147] Those skilled in the art will appreciate that the units and algorithm steps of each example described in conjunction with the embodiments disclosed in this application can be implemented in electronic hardware, or a combination of computer software and electronic hardware. Whether these functions are performed in hardware or software depends on the specific application and design constraints of the technical solution. Professional and technical personnel can use different methods to implement the described functions for each specific application, but such implementation should not be considered beyond the scope of this application.

[0148] In the embodiments provided in this application, it should be understood that the disclosed devices / terminal equipment and methods can be implemented in other ways. For example, the device / terminal equipment embodiments described above are merely illustrative. For example, the division of the modules or units is merely a logical function division. In actual implementation, there may be other division methods, such as multiple units or components can be combined or integrated into another system, or some features can be ignored or not executed. Another point is that the mutual coupling or direct coupling or communication connection shown or discussed can be through some interfaces, indirect coupling or communication connection of devices or units, which can be electrical, mechanical or other forms.

[0149] In addition, the functional units in the various embodiments of the present application may be integrated into a single processing unit, or each unit may exist physically separately, or two or more units may be integrated into a single unit. The aforementioned integrated units may be implemented in the form of hardware or software functional units.

[0150] If the integrated module / unit is implemented as a software functional unit and sold or used as a standalone product, it can be stored in a computer-readable storage medium. Based on this understanding, the present application can implement all or part of the process steps in the above-mentioned method embodiments by instructing the relevant hardware through a computer program. The computer program can be stored in a computer-readable storage medium. When executed by a processor, the computer program can implement the steps of each of the above-mentioned method embodiments. The computer program includes computer program code, which can be in source code form, object code form, executable file, or some intermediate form. The computer-readable medium can include: any entity or device capable of carrying the computer program code, recording medium, USB flash drive, mobile hard drive, magnetic disk, optical disk, computer memory, read-only memory (ROM), random access memory (RAM), electric carrier signal, telecommunication signal, and software distribution medium. It should be noted that the content of the computer-readable medium can be appropriately increased or decreased based on the requirements of legislation and patent practice in a jurisdiction. For example, in some jurisdictions, based on legislation and patent practice, computer-readable media does not include electric carrier signals and telecommunication signals.

[0151] The present application implements all or part of the processes in the above-mentioned embodiment method, and can also be completed through a computer program product. When the computer program product is run on a terminal device, the terminal device can implement the steps in the above-mentioned method embodiments when executing.

[0152] The above embodiments are intended only to illustrate the technical solutions of the present application and are not intended to limit them. Although the present application has been described in detail with reference to the above embodiments, those skilled in the art should understand that they may still modify the technical solutions described in the above embodiments or replace some of the technical features therein with equivalents; and such modifications or replacements do not deviate from the spirit and scope of the technical solutions of the embodiments of the present application and should be included within the scope of protection of the present application.

Claims

1. A probe detection method, characterized in that: A plurality of grids are provided on the custom jig, and the probes are evenly placed in each grid. The probes include a needle head and a needle tip. The method includes the following steps: Establishing an initial coordinate system based on the coordinate measurement elements on the software and the specifications of the custom fixture, and determining the position coordinates of the first probe on the custom fixture; According to the needle position and needle tip position of the first probe, a needle tip sub-coordinate system and a needle tip sub-coordinate system are established respectively; generating a test program for the first probe according to the needle head sub-coordinate system and the needle tip sub-coordinate system; Determining a translation amount between the first probe and each of the other probes according to a step distance between the first probe and the other probes, and performing translation copying on the test program of the first probe based on the translation amount to obtain a test program for each of the other probes; Generate an overall test program for all probes based on the test program of each probe; Run the test according to the overall test procedure to screen out probes that do not meet the standards; The coordinate measurement elements include a starting point and coordinate axis correction elements. The initial coordinate system is established based on the coordinate measurement elements in the software and the specifications of the customized fixture to determine the position coordinates of the first probe on the customized fixture, including: Select any of the four vertices of the custom fixture as the first starting point, and the vertex corresponding to the point horizontally or vertically as the second starting point; Determining an initial direction axis according to the first starting point and the second starting point; Perform coordinate axis correction based on the initial direction axis to establish an initial coordinate system; Determining the position coordinates of the first probe according to the position of the first probe in the initial coordinate system; The needle includes a needle end point and a needle starting end point, and the needle tip includes a needle tip end point and a needle tip starting end point. The needle tip sub-coordinate system and the needle tip sub-coordinate system are established according to the needle tip position and the needle tip position of the first probe, respectively, including: Determining the needle end point position and the needle tip end point position of the first probe according to the position coordinates of the first probe; Establishing a needle sub-coordinate system with the needle end point as the origin; Establishing a needle tip sub-coordinate system with the needle tip end point position as the origin; The step of generating a test program for the first probe according to the needle head sub-coordinate system and the needle tip sub-coordinate system includes: Acquiring probe coordinate information according to the needle head sub-coordinate system and the needle tip sub-coordinate system; Calculating probe parameter information according to the probe coordinate information; A test program for the first probe is generated according to the probe parameter information and the needle head sub-coordinate system and the needle tip sub-coordinate system.

2. The probe detection method according to claim 1, wherein The probe coordinate information includes the needle tip end point coordinates, the needle tip starting end point coordinates, the needle head end point coordinates and the needle head starting end point coordinates. The acquisition of the probe coordinate information based on the needle head sub-coordinate system and the needle tip sub-coordinate system includes: Determining the coordinates of the needle tip end point and the needle tip starting end point according to the positions of the needle tip end point and the needle tip starting end point in the needle tip sub-coordinate system; The coordinates of the needle end point and the needle starting end point are determined according to the positions of the needle end point and the needle starting end point in the needle sub-coordinate system.

3. The probe detection method according to claim 2, wherein: The probe parameter information includes needle tip length, needle mid-section length, needle full length, needle head length, needle head angle and offset. The probe parameter information is calculated based on the probe coordinate information, including: Calculating the needle tip length according to the needle tip end point coordinates and the needle tip starting end point coordinates; Calculating the length of the middle section of the needle according to the coordinates of the starting endpoint of the needle tip and the coordinates of the end point of the needle; Calculating the total length of the needle based on the coordinates of the needle tip end point and the coordinates of the needle starting end point; Calculating the needle length and needle angle according to the coordinates of the needle starting point and the needle ending point; The offset is calculated according to the needle end point coordinates and the needle tip end point coordinates.

4. The probe detection method according to claim 1, wherein: The running of the test according to the overall test procedure to screen out probes that do not meet the standards includes: Run the test according to the overall test procedure, output the standard value and tolerance of each probe, and mark each probe label; The standard value and tolerance corresponding to each probe tag are compared with a preset value. If the difference between the standard value or the tolerance and the preset value exceeds a preset threshold, it is determined to be non-compliant with the standard.

5. A probe detection device, characterized in that: The probe detection device is used to perform the probe detection method, including a hardware module and a software module; The hardware module is a custom fixture, which is provided with multiple grids, and each probe is evenly distributed in the grid with equal step distance, and the probe includes a needle head and a needle tip; The software module includes: An initial coordinate system establishment module, used to establish an initial coordinate system based on the coordinate measurement elements in the software and the specifications of the customized fixture, and determine the position coordinates of the first probe on the customized fixture; a sub-coordinate system establishing module, configured to establish a needle tip sub-coordinate system and a needle tip sub-coordinate system according to the needle tip position and the needle tip position of the first probe, respectively; A first program generation module is used to generate a test program for the first probe according to the needle head sub-coordinate system and the needle tip sub-coordinate system; a translation copy module, configured to determine a translation amount between the first probe and each of the other probes according to a step distance between the first probe and the other probes, and to perform translation copying on the test program of the first probe based on the translation amount to obtain a test program for each of the other probes; An integration module is used to generate an overall test program for all probes based on the test program of each probe; A screening module, configured to run a test according to the overall test procedure and screen out probes that do not meet the standards; The coordinate measurement elements include a starting point and coordinate axis correction elements. The initial coordinate system is established based on the coordinate measurement elements in the software and the specifications of the customized fixture to determine the position coordinates of the first probe on the customized fixture, including: Select any of the four vertices of the custom fixture as the first starting point, and the vertex corresponding to the point horizontally or vertically as the second starting point; Determining an initial direction axis according to the first starting point and the second starting point; Perform coordinate axis correction based on the initial direction axis to establish an initial coordinate system; Determining the position coordinates of the first probe according to the position of the first probe in the initial coordinate system; The needle includes a needle end point and a needle starting end point, and the needle tip includes a needle tip end point and a needle tip starting end point. The needle tip sub-coordinate system and the needle tip sub-coordinate system are established according to the needle tip position and the needle tip position of the first probe, respectively, including: Determining the needle end point position and the needle tip end point position of the first probe according to the position coordinates of the first probe; Establishing a needle sub-coordinate system with the needle end point as the origin; Establishing a needle tip sub-coordinate system with the needle tip end point position as the origin; The step of generating a test program for the first probe according to the needle head sub-coordinate system and the needle tip sub-coordinate system includes: Acquiring probe coordinate information according to the needle head sub-coordinate system and the needle tip sub-coordinate system; Calculating probe parameter information according to the probe coordinate information; A test program for the first probe is generated according to the probe parameter information and the needle head sub-coordinate system and the needle tip sub-coordinate system.

6. An intelligent terminal, characterized in that: The intelligent terminal includes a memory, a processor, and a computer program stored in the memory and executable on the processor. When the computer program is executed by the processor, the steps of the probe detection method according to any one of claims 1 to 4 are implemented.

7. A computer-readable storage medium, characterized in that The computer-readable storage medium stores a computer program, and when the computer program is executed by a processor, the steps of the probe detection method according to any one of claims 1 to 4 are implemented.

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