High-precision small-angle generation device and method based on temperature regulation and control

Abstract

The invention relates to a high-precision small-angle generating device and method based on temperature regulation and control. Comprising a base, a hinge piece, a sine arm, a reflector, a gauge block, a temperature measurement module and a temperature control module. The temperature measuring module and the temperature control module are both installed on the outer wall of the gauge block. One end of the sine arm is rotationally connected with one end of the base through a hinge piece; the gauge block is mounted on the base, the other end of the sine arm is in contact with the gauge block, and the reflector is mounted on the sine arm; the height value h of the gauge block changes along with the change of the temperature, thereby pushing the sine arm to rotate around the rotation point of the hinge piece, and enabling the angle of the reflector to change. According to the invention, the temperature of the gauge block is regulated and controlled to generate a small angle, the temperature of the gauge block is in one-to-one correspondence with the generated angle change, and the influence of the environment temperature on the temperature of the gauge block is converted into the generated angle and the measured temperature, so that the harsh control requirement on the environment temperature is weakened by the mode; and the application scene of the small-angle generator is expanded.

Description

Technical Field

[0001] The present invention relates to the technical field of metrology and precision measurement, and more specifically, to a high-precision small-angle generating device and method based on temperature regulation. Background Art

[0002] A small-angle generator is a device used to generate precise small angles, which is widely used in fields such as metrology, optical measurement, aerospace, and precision machinery. Its main function is to provide a precise angle reference for various angle measuring instruments to ensure the accuracy and consistency of measurements. There are two mechanisms for small-angle generators. One is to subdivide a full circle, and the other is to define m / m according to the international unit of angle and use the sine theorem to generate angles.

[0003] The Diamond-NANGO small-angle generator developed by Diamond Light Source in the UK is composed of a piezoelectric stepping driver, a spoke-type flexible hinge, angle encoding, a control system, and a stereo reflecting prism. The spoke-type flexible hinge converts the linear displacement of the piezoelectric driver into rotational motion. The measurement range of this small-angle generator exceeds It can achieve a stepping accuracy of 1 nrad. This device has the highest accuracy, but the experimental device is complex and requires calibration and control of the piezoelectric stepping driver. The HPSAG small-angle calibration device developed by the National Metrology Institute of Turkey uses a calibrated piezoelectric ceramic to push a sine arm equipped with a balancing mass to rotate in a horizontal plane around a flexible hinge, and can achieve a stepping of 0.005 μrad within ±50 μrad. The expanded uncertainty is 0.05 μrad (k = 2). This device has high resolution and accuracy, but requires a large number of calibrations of the piezoelectric ceramic, and the process is relatively complex.

[0004] Due to the limitations of complex structures or manufacturing processes, traditional small-angle generators often have difficulty achieving high-precision angle generation; existing high-precision angle generators usually have complex devices, require complex operation and calibration processes, increasing the actual operation difficulty; at the same time, high-precision angle generators are sensitive to environmental conditions such as ambient temperature, restricting the accuracy and stability of small-angle generator devices. Summary of the Invention

[0005] The purpose of the present invention is to overcome the deficiencies of the prior art, which are greatly affected by the environment and have complex structures, and to provide a high-precision small-angle generating device and method based on temperature regulation, which can effectively reduce the influence of ambient temperature and reduce the complexity of the instrument.

[0006] To solve the above technical problems, the technical solution adopted by the present invention is:

[0007] Provided is a high-precision small-angle generating device based on temperature control, including a base, a hinge, a sine arm, a mirror, a gauge block, a temperature measurement module, and a temperature control module; the temperature measurement module and the temperature control module are both installed on the outer wall of the gauge block; one end of the sine arm is rotatably connected to one end of the base through the hinge; the gauge block is installed on the base, the other end of the sine arm contacts the gauge block, and the mirror is installed on the sine arm; the height value h of the gauge block changes with temperature, thereby pushing the sine arm to rotate around the rotation point of the hinge, causing the mirror to generate an angular change.

[0008] A high-precision small-angle generating device based on temperature control according to the present invention realizes the generation of small angles by regulating the temperature of the gauge block, which can avoid the limitation of strict temperature stability required in the use of traditional small-angle generators. The temperature of the gauge block corresponds one-to-one with the generated angular change. The influence of the ambient temperature on the temperature of the gauge block is converted into the generated angle and the measured temperature. This method weakens the strict control requirements for the ambient temperature and expands the applicable scenarios of the small-angle generator. Compared with other high-precision small-angle generators that require additional use of complex calibration devices, the device of the present invention is simple and easy to implement. For large-range angular changes, different thickness gauge blocks can be replaced to achieve them. For small-range angular changes that cannot be achieved by replacing the gauge block, the temperature of the gauge block can be controlled to achieve the generation of small angles with nano-radian-level precision, which is simple and feasible.

[0009] Further, the hinge is a flexible hinge. The flexible hinge has high precision, good stability, and a simple motion equation, can be applied to the flip adjustment of small-range angles, and has the advantages of no mechanical backlash, simple structure, and easy fabrication.

[0010] Further, the main body of the flexible hinge is a rectangular cube, and grooves are respectively formed on two opposite faces of the flexible hinge main body. The bottom end surface of the groove is in an arc shape with a radius of R. The distance between the vertices of the two arcs is the flexible thickness d of the flexible hinge. The central axes of the two arcs are perpendicular to the flexible thickness. The flexible hinge structure adopted in the present invention is compact, easy to fabricate, and has a simple shape, and has the advantages of a large stiffness range, high precision, and no friction. Moreover, using the flexible hinge with this structure in the present invention can ensure the stability of the rotation center during rotation, thereby improving the accuracy of angle measurement.

[0011] Further, the base, the flexible hinge, and the sine arm are integrally formed. The integrated design of the sine arm, flexible hinge, and base reduces the number of disassembly and assembly of parts, reduces measurement errors and error accumulation. The integrated design adopted in the present invention can use fewer parts and a simpler structure, and has higher reliability compared with traditional instruments.

[0012] Further, the base, the flexible hinge, and the sine arm are made of a material with a coefficient of thermal expansion less than 10 -7 / K. Using a material with a low coefficient of thermal expansion or a zero coefficient of thermal expansion can avoid the influence of temperature fluctuations in the environment, enhance the measurement stability of the device, and improve the measurement accuracy.

[0013] Further, a spherical protrusion is provided at one end of the sine arm that contacts the gauge block, and the sine arm contacts the gauge block through the spherical protrusion. The sine arm uses the spherical protrusion to contact the gauge block to ensure that there is only one contact point.

[0014] Further, a cylinder protruding toward the base side is provided on the sine arm, and the spherical protrusion is provided at the bottom of the cylinder; the cylinder, the spherical protrusion, and the sine arm are integrally formed.

[0015] Further, a plurality of temperature measurement modules are provided, and the plurality of temperature measurement modules are respectively installed on the working surface and the non-working surface of the gauge block; a plurality of temperature control modules are provided, and the plurality of temperature control modules are respectively installed on the non-working surface of the gauge block; the working surface of the two gauge blocks contacts the sine arm. The temperature control module is used to heat the gauge block, and the temperature measurement module is used to measure the temperature of the gauge block; setting a plurality of temperature control modules can ensure that each surface of the gauge block is evenly heated, and a plurality of temperature measurement modules monitor the temperature of each surface of the gauge block in real time, facilitating real-time adjustment of the temperature control modules of each surface to ensure that the temperature of each surface is consistent.

[0016] Further, the gauge block is of a cuboid structure; the bottom of the gauge block is installed on the base, the top of the gauge block contacts the sine arm; the temperature control modules are installed at intervals on the side wall of the gauge block; the temperature measurement modules are installed at intervals on the side wall and the top of the gauge block.

[0017] Further, the mirror is arranged parallel to the rotation axis of the hinge and perpendicular to the sine arm. The mirror is arranged on the top of the sine arm, that is, on the side opposite to the spherical protrusion. When the sine arm rotates, the mirror rotates coaxially with the sine arm, so that the angle of the mirror changes as the sine arm rotates.

[0018] The present invention also provides a method for generating a high-precision small angle based on temperature control, using the above-mentioned high-precision small angle generating device based on temperature control; heating the gauge block through the temperature control module, and measuring the real-time temperature of the gauge block through the temperature measurement module; the height h of the gauge block increases as the temperature of the gauge block rises, driving the sine arm to rotate around the rotation center of the hinge, so that the angle of the mirror changes; wherein, the relationship between the height h of the gauge block and the temperature T of the gauge block is:

[0019] h = h0 + αh0(T - T0) (1)

[0020] Where h0 is the height corresponding to the gauge block at temperature T0, and α represents the thermal expansion coefficient of the gauge block; by heating the gauge block to cause a temperature change ΔT of the gauge block, according to the principle of thermal expansion and contraction, a height change Δh of the gauge block is realized. According to formula (1), the relationship between the height change Δh of the gauge block and the temperature change ΔT is obtained as follows:

[0021] Δh = αh0ΔT (2)

[0022] According to the principle of the small angle generator, the angle change Δα corresponding to the temperature change ΔT of the gauge block is obtained as:

[0023]

[0024] Where L represents the distance value between the contact point of the gauge block and the sine arm and the rotation point of the hinge.

[0025] When Δα is a small angle, formula (3) can be approximated to obtain the following relationship:

[0026]

[0027] A high-precision small angle generation method based on temperature regulation according to the present invention adopts a method of realizing small angle generation by regulating the temperature of the gauge block, which can avoid the need for an additional precise calibration device in a traditional small angle generator; the present invention converts the length change of the gauge block into the precise measurement of temperature, and the temperature of the gauge block and the generated angle change correspond one by one. According to formulas (3) and (4), the temperature of the gauge block can be directly converted into an angle. During the measurement and calibration process, since the overall device adopts an integrated design that is insensitive to temperature, the ambient temperature does not need to be strictly controlled. The influence of the ambient temperature on the gauge block can be converted into the generated angle after monitoring the temperature of the gauge block. This method weakens the influence of the ambient temperature on the measurement, can relatively simply realize the generation of small angles at the sub-micro-radian or even nano-radian level, has extremely high precision and resolution, and expands the applicable scenarios and ranges of the small angle generator.

[0028] Compared with the prior art, the beneficial effects of the present invention are:

[0029] 1. The high-precision small angle generation device based on temperature regulation according to the present invention adopts a method of realizing small angle generation by regulating the temperature of the gauge block, which can weaken the limitation that a traditional small angle generator needs to strictly control the temperature. This solution only needs to accurately measure the real-time change of the temperature of the gauge block, and expands the applicable scenarios of the small angle generator.

[0030] 2. In the integrated design of the sine arm, hinge, and base in the high-precision small-angle generating device based on temperature control of the present invention, fewer components and a simpler structure are adopted, reducing the number of disassembly and assembly times of components, minimizing measurement errors and error accumulation, and having higher reliability compared to traditional instruments.

[0031] 3. In the high-precision small-angle generating device based on temperature control of the present invention, the sine arm, hinge, and base are made of materials with low or zero thermal expansion coefficients, which can avoid the influence of temperature fluctuations in the environment, enhance the measurement stability of the device, and improve the measurement accuracy.

[0032] 4. Compared with other high-precision small-angle generators that require additional complex calibration devices, the solution of the high-precision small-angle generating device based on temperature control of the present invention is simple and easy to implement. For large-range angle changes, it can be achieved by replacing different-thickness gauge blocks. For small-range angle changes that cannot be achieved by replacing gauge blocks, it can be achieved by temperature modulation of gauge blocks of different specifications, with extremely high simplicity and accuracy.

[0033] 5. In a high-precision small-angle generating method based on temperature control of the invention, the method of realizing small-angle generation by temperature control of gauge blocks is adopted, which can avoid the need for additional precise calibration devices in traditional small-angle generators; the present invention converts the height change of the gauge block into precise temperature measurement, and the temperature of the gauge block corresponds one-to-one with the generated angle change. According to formulas (3) and (4), the temperature of the gauge block can be directly converted into an angle. During the measurement and calibration process, since the overall device adopts an integrated design that is insensitive to temperature, the ambient temperature does not need to be strictly controlled. The influence of the ambient temperature on the gauge block can be converted into the generated angle after monitoring the temperature of the gauge block. This method weakens the influence of the ambient temperature on the measurement, can relatively simply realize the generation of small angles at the sub-microradian or even nano-radian level, has extremely high accuracy and resolution, and expands the applicable scenarios and scope of the small-angle generator. BRIEF DESCRIPTION OF THE DRAWINGS

[0034] Figure 1 is a schematic structural diagram of the high-precision small-angle generating device based on temperature control of the present invention;

[0035] Figure 2 is a schematic structural diagram of the hinge in the present invention;

[0036] Figure 3 is a schematic diagram of the positional relationship among the gauge block, temperature measurement module, and temperature control module in the present invention;

[0037] Figure 4 is a schematic diagram of the principle of the small-angle generator.

[0038] In the accompanying drawings: 1. Base; 2. Hinge; 3. Sine arm; 4. Mirror; 5. Gauge block; 6. Temperature measurement module; 7. Temperature control module; 8. Spherical protrusion; 9. Groove. Detailed implementation mode

[0039] The present invention will be further described below in conjunction with the detailed implementation mode. Among them, the accompanying drawings are only for illustrative purposes, showing only schematic diagrams, not physical diagrams, and should not be construed as a limitation to the present invention; in order to better illustrate the embodiments of the present invention, some components in the accompanying drawings will be omitted, enlarged or reduced, which does not represent the size of the actual product; for those skilled in the art, it is understandable that some well-known structures and their descriptions in the accompanying drawings may be omitted.

[0040] In the accompanying drawings of the embodiments of the present invention, the same or similar reference numerals correspond to the same or similar components; in the description of the present invention, it should be understood that if there are terms such as "upper", "lower", "left", "right", etc. indicating the orientation or positional relationship, it is based on the orientation or positional relationship shown in the accompanying drawings. It is only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation. Therefore, the terms describing the positional relationship in the accompanying drawings are only for illustrative purposes and should not be construed as a limitation to the present invention. For those of ordinary skill in the art, the specific meanings of the above terms can be understood according to specific circumstances.

[0041] Embodiment 1

[0042] This embodiment is an embodiment of a high-precision small-angle generating device based on temperature control. As Figures 1 to 3 shown, it includes a base 1, a hinge 2, a sine arm 3, a mirror 4, a gauge block 5, a temperature measurement module 6, and a temperature control module 7; the temperature measurement module 6 and the temperature control module 7 are both installed on the outer wall of the gauge block 5; one end of the sine arm 3 is rotatably connected to one end of the base 1 through the hinge 2; the gauge block 5 is installed on the base 1, the other end of the sine arm 3 is in contact with the gauge block 5, and the mirror 4 is installed on the sine arm 3; the height value h of the gauge block 5 changes with temperature, thereby pushing the sine arm 3 to rotate around the rotation point of the hinge 2, causing the mirror 4 to change the angle.

[0043] In this embodiment, the hinge 2 is a flexible hinge. The flexible hinge has high precision, good stability, and a simple motion equation, can be applied to the flipping adjustment of a small range of angles, and has the advantages of no mechanical backlash, simple structure, and easy fabrication.

[0044] As Figure 2As shown, the flexible hinge body is a rectangular cube. Grooves 9 are respectively formed on two opposite faces of the flexible hinge body. The bottom end face of the groove 9 is in an arc shape with a radius of R. The distance between the vertices of the two arcs is the flexible thickness d of the flexible hinge. The central axes of the two arcs are perpendicular to the flexible thickness. The flexible hinge structure adopted in the present invention is compact, easy to manufacture, and has a simple shape. Moreover, it has advantages such as a large stiffness range, high precision, and no friction. Moreover, the flexible hinge adopting the structure of the present invention can ensure the stability of the rotation center during rotation, thereby improving the accuracy of angle measurement.

[0045] In this embodiment, as Figure 1 shown, the base 1, the flexible hinge, and the sine arm 3 are integrally formed. The integrated design of the sine arm 3, the flexible hinge, and the base 1 reduces the disassembly and assembly times of components, reduces measurement errors and the accumulation of errors. The present invention adopts an integrated design, which can use fewer components and a simpler structure, and has higher reliability compared with traditional instruments.

[0046] In this embodiment, the base 1, the flexible hinge, and the sine arm 3 are made of a material with a coefficient of thermal expansion less than 10 -7 / K. Using a material with a low coefficient of thermal expansion or a zero coefficient of thermal expansion can avoid the influence of temperature fluctuations in the environment, enhance the measurement stability of the device, and improve the measurement accuracy. The material adopted in this embodiment is glass-ceramics. The coefficient of thermal expansion of the glass-ceramics is 0±0.007*10 -6 / K. Made of glass-ceramics with a low coefficient of thermal expansion or a zero coefficient of thermal expansion, the length L of the sine arm 3 is stable. By changing the temperature of the gauge block 5, a small angle can be generated. By measuring the temperature change of the gauge block 5, the measurement of the generated small angle can be realized.

[0047] In this embodiment, as Figure 1 shown, a cylinder protruding towards the base 1 is provided on the sine arm 3. A spherical protrusion 8 is provided at one end of the sine arm 3 in contact with the gauge block 5. The spherical protrusion 8 is provided at the bottom of the cylinder. The sine arm 3 contacts the gauge block 5 through the spherical protrusion 8. The sine arm 3 adopts the spherical protrusion 8 to contact the gauge block 5 to ensure that there is only one contact point. The cylinder, the spherical protrusion 8, and the sine arm 3 are integrally formed.

[0048] In this embodiment, as Figure 3As shown in the figure, multiple temperature measurement modules 6 are provided, and the multiple temperature measurement modules 6 are respectively installed on the working surface and the non-working surface of the gauge block 5; multiple temperature control modules 7 are provided, and the multiple temperature control modules 7 are respectively installed on the non-working surface of the gauge block 5; the working surfaces of the two blocks are in contact with the sine arm 3. The temperature control module 7 is used to heat the gauge block 5, and the temperature measurement module 6 is used to measure the temperature of the gauge block 5; setting multiple temperature control modules 7 can ensure that each surface of the gauge block 5 is evenly heated, and the multiple temperature measurement modules 6 monitor the temperature of each surface of the gauge block 5 in real time, facilitating real-time adjustment of the temperature control modules 7 of each surface to ensure that the temperature of each surface is consistent. According to specific requirements, different temperature measurement methods and heating methods can be designed. The angle of the reflecting mirror 4 is measured by the angle measurement device to be calibrated, so as to realize the calibration of the device.

[0049] In this embodiment, the gauge block 5 is of a cuboid structure; the bottom of the gauge block 5 is installed on the base 1, and the top of the gauge block 5 is in contact with the sine arm 3; the temperature control modules 7 are installed at intervals on the side wall of the gauge block 5; the temperature measurement modules 6 are installed at intervals on the side wall and the top of the gauge block 5.

[0050] In this embodiment, as Figure 1 shown, the reflecting mirror 4 is arranged parallel to the rotation axis of the hinge.

[0051] The high-precision small-angle generating device based on temperature control provided in this embodiment can replace different gauge blocks 5 for measurement according to different measurement requirements. For large-range angle changes, the gauge block 5 can be directly used to achieve, and there is no need to use a heating device; for angle measurements that cannot be achieved by the gauge block 5, the temperature of the gauge block 5 can be controlled to achieve small-range angle changes and meet the measurement requirements.

[0052] In this embodiment, a high-precision small-angle generating device based on temperature control adopts a method of realizing small-angle generation by controlling the temperature of the gauge block 5, which can avoid the limitation of strict temperature stability required when using traditional small-angle generators. The temperature of the gauge block 5 corresponds one-to-one with the generated angle change. The influence of the ambient temperature on the temperature of the gauge block 5 is converted into the generated angle and the measured temperature. This method weakens the strict control requirements for the ambient temperature and expands the applicable scenarios of the small-angle generator. Compared with other high-precision small-angle generators that require additional use of complex calibration devices, the device of the present invention is simple and easy to implement. For large-range angle changes, it can be achieved by replacing gauge blocks 5 with different thicknesses. For small-range angle changes that cannot be achieved by replacing the gauge block 5, the temperature of the gauge block 5 can be controlled to achieve small-angle generation with nano-arcsecond-level precision, which is simple and feasible.

[0053] Embodiment 2

[0054] This embodiment is an embodiment of a high-precision small-angle generation method based on temperature control. This embodiment uses the high-precision small-angle generation device provided in Embodiment 1; the temperature control module 7 heats the gauge block 5, and the temperature measurement module 6 measures the real-time temperature of the gauge block 5; the height h of the gauge block 5 increases as the temperature of the gauge block 5 rises, driving the sine arm 3 to rotate around the rotation center of the hinge 2, thereby changing the angle of the mirror 4; among them, the relationship between the height h of the gauge block 5 and the temperature T of the gauge block 5 is:

[0055] h = h0 + αh0(T - T0) (1)

[0056] In the formula, h0 is the height corresponding to the gauge block 5 at the temperature of T0, and α represents the thermal expansion coefficient of the gauge block 5; by heating the gauge block 5, the temperature of the gauge block 5 changes by ΔT. According to the principle of thermal expansion and contraction, the height change Δh of the gauge block 5 is realized. According to formula (1), the relationship between the height change Δh of the gauge block 5 and the temperature change ΔT is:

[0057] Δh = αh0ΔT (2)

[0058] According to the principle of the small-angle generator, the angle change Δα corresponding to the temperature change ΔT of the gauge block 5 is:

[0059]

[0060] In the formula, L represents the distance value between the contact point of the gauge block and the sine arm and the rotation point of the hinge, that is, Figure 4 the length value of |OB|;

[0061] When Δα is a small angle, formula (3) can be approximated to obtain the following relationship:

[0062]

[0063] In this embodiment, the principle of the small-angle generator based on the International System of Units is briefly introduced; as Figure 4 shown, point O is the rotation point, |OB| is the length of the sine arm (in this embodiment, it is the distance value between the contact point of the sine arm and the gauge block and the rotation point of the hinge), |AB| is the height of the sine arm and the reference plane. According to the sine theorem, it can be obtained that:

[0064]

[0065] According to the arcsine operation, the angle α generated by the small-angle generator is:

[0066]

[0067] In the actual use scenario of a high-precision small-angle generator, the generated angle α is generally very small. Therefore, formula (6) can be simplified as:

[0068]

[0069] Changing the height can achieve the generation of a small angle. In this process, the length needs to be kept stable to achieve precise small-angle generation. In this embodiment, the length L of the sine arm 3 is insensitive to temperature and will not change.

[0070] A method for generating a high-precision small angle based on temperature regulation in this embodiment, which adopts the method of regulating the temperature of the gauge block 5 to generate a small angle, can avoid the need for an additional precise calibration device in a traditional small-angle generator. The present invention converts the length change of the gauge block 5 into an accurate measurement of temperature. The temperature of the gauge block 5 and the generated angle change correspond one by one. According to formulas (3) and (4), the temperature of the gauge block 5 can be directly converted into an angle. During the measurement and calibration process, since the overall device adopts an integrated design that is insensitive to temperature, the ambient temperature does not need to be strictly controlled. The influence of the ambient temperature on the gauge block 5 can be converted into the generated angle after monitoring the temperature of the gauge block 5. This method weakens the influence of the ambient temperature on the measurement and can relatively simply achieve the generation of small angles at the sub-micro-radian or even nano-radian level, with extremely high precision and resolution, and expands the applicable scenarios and ranges of the small-angle generator.

[0071] Embodiment Three

[0072] This embodiment is the second embodiment of the method for generating a high-precision small angle based on temperature regulation. This embodiment is similar to Embodiment One, except that in this embodiment, by adjusting the temperature change of the gauge block 5, the corresponding angle change can be achieved. At 20 °C, the thermal expansion coefficient α of a typical steel gauge block 5 is 11.5×10 -6 / K, and the standard uncertainty is 9.0×10 -9 / K. A gauge block 5 with a length of 10.0 mm is selected, and the standard uncertainty of the length is 0.5 μm. The length L of the integrated sine arm 3 made of glass-ceramics is 40.0 mm, and its typical thermal expansion coefficient is 2.0×10 -8 / K. When the changing angle of the small-angle generating device is Δα = 50.0 μrad, the typical temperature measurement accuracy is 0.01 °C, and the corresponding standard uncertainty σ Δα = 0.060 μrad. When the changing angle of the small-angle generating device is Δα = 5.0 μrad, the typical temperature measurement accuracy is 0.01 °C, and the corresponding standard uncertainty σ Δα = 6.0 nrad. Through the device provided in Embodiment One, the generation and measurement of small angles with nano-radian-level accuracy can be achieved.

[0073] In the specific content of the above specific embodiments, each technical feature can be combined arbitrarily without contradiction. For the sake of concise description, not all possible combinations of the above technical features are described. However, as long as the combinations of these technical features do not exist in contradiction, they should all be considered to be within the scope described in this specification.

[0074] Obviously, the above embodiments of the present invention are merely examples for clearly illustrating the present invention, rather than limiting the embodiments of the present invention. For those of ordinary skill in the art, other different forms of changes or modifications can be made on the basis of the above description. It is not necessary and impossible to enumerate all the embodiments here. Any modifications, equivalent replacements, and improvements made within the spirit and principle of the present invention shall be included in the protection scope of the claims of the present invention.

Claims

1. A high-precision small-angle generating device based on temperature control, characterized in that It includes a base (1), a hinge (2), a sine arm (3), a mirror (4), a gauge block (5), a temperature measurement module (6) and a temperature control module (7); the temperature measurement module (6) and the temperature control module (7) are both installed on the outer wall of the gauge block (5); one end of the sine arm (3) is rotatably connected to one end of the base (1) through the hinge (2); the gauge block (5) is installed on the base (1), the other end of the sine arm (3) contacts the gauge block (5), and the mirror (4) is installed on the sine arm (3); the height value h of the gauge block (5) changes with temperature, thereby driving the sine arm (3) to rotate around the rotation point of the hinge (2), causing an angular change of the mirror (4).

2. The high-precision small-angle generating device based on temperature regulation according to claim 1, wherein The hinge (2) is a flexible hinge.

3. The high-precision small-angle generating device based on temperature control according to claim 2, characterized in that, The flexible hinge body is a rectangular cube, and grooves (9) are respectively formed on two opposite faces of the flexible hinge body. The bottom end surface of the groove (9) is in an arc shape with a radius of R. The distance between the vertices of the two arcs is the flexible thickness d of the flexible hinge, and the central axes of the two arcs are perpendicular to the flexible thickness.

4. The high-precision small-angle generating device based on temperature regulation according to claim 2, wherein The base (1), the flexible hinge and the sine arm (3) are integrally formed.

5. The high-precision small-angle generating device based on temperature regulation according to claim 2, characterized in that, The base (1), the flexible hinge, and the sine arm (3) are made of a material with a coefficient of thermal expansion less than 10 -7 / K.

6. The high-precision small-angle generating device based on temperature regulation according to claim 1, wherein A spherical protrusion (8) is provided at one end of the sine arm (3) that contacts the gauge block (5), and the sine arm (3) contacts the gauge block (5) through the spherical protrusion (8).

7. The high-precision small-angle generating device based on temperature regulation according to claim 6, wherein A column protruding towards the base (1) is provided on the sine arm (3), and the spherical protrusion (8) is provided at the bottom of the column; the column, the spherical protrusion (8) and the sine arm (3) are integrally formed.

8. The high-precision small-angle generating device based on temperature regulation according to claim 1, characterized in that, A plurality of the temperature measurement modules (6) are provided, and the plurality of temperature measurement modules (6) are respectively installed on the working surface and the non-working surface of the gauge block (5); a plurality of the temperature control modules (7) are provided, and the plurality of temperature control modules (7) are respectively installed on the non-working surface of the gauge block (5); the working surface of the gauge block (5) contacts the sine arm (3).

9. The high-precision small-angle generating device based on temperature regulation according to any one of claims 1 to 8, characterized in that, The mirror (4) is arranged parallel to the rotation axis of the hinge (2) and perpendicular to the sine arm (3).

10. A high-precision small-angle generation method based on temperature control, characterized in that, Using the high-precision small-angle generating device based on temperature control described in any one of claims 1 to 9; heating the gauge block (5) through the temperature control module (7), and measuring the real-time temperature of the gauge block (5) through the temperature measurement module (6); the height h of the gauge block (5) increases as the temperature of the gauge block (5) rises, driving the sine arm (3) to rotate around the rotation center of the hinge (2), thereby causing an angular change of the mirror (4); wherein, the relationship between the height h of the gauge block (5) and the temperature T of the gauge block (5) is: h = h0 + αh0(T - T0) (1) In the formula, h0 is the height corresponding to the gauge block (5) at the temperature T0, and α represents the thermal expansion coefficient of the gauge block (5); by heating the gauge block (5), the temperature of the gauge block (5) changes by ΔT. According to the principle of thermal expansion and contraction, the height of the gauge block (5) changes by Δh. According to formula (1), the relationship between the height change Δh of the gauge block (5) and the temperature change ΔT is: Δh = αh0ΔT (2) According to the principle of the small angle generator, the angle change Δα corresponding to the temperature change ΔT of the gauge block (5) is: In the formula, L represents the distance value between the contact point of the gauge block and the sine arm and the rotation point of the hinge.

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