Cutting treatment equipment for semiconductor manufacturing

Abstract

The invention provides cutting treatment equipment for semiconductor manufacturing, and relates to the technical field of semiconductor manufacturing. A controller is fixedly mounted on the outer side of the upper end of a machine body; a plurality of groups of hinged protective doors are arranged, each group of hinged protective doors comprises two hinged protective doors, and the plurality of groups of hinged protective doors are hinged to the inner side of the machine body; the number of the observation windows is two, and the two observation windows are fixedly installed on the inner sides of the two hinged protective doors at the front end correspondingly. The plurality of fixed foot pads are fixedly connected to the lower end surface of the machine body; the material bearing table is fixedly mounted on the inner side of the machine body; the cutting assembly is installed on the inner side of the machine body, and the problem that in the using process of existing cutting treatment equipment for semiconductor manufacturing, after long-time operation, chippings or dust generated in the cutting process are inevitably attached to the surface of a window, and accurate judgment of an operator on the equipment operation state is disturbed is solved. A more convenient operation condition is provided for equipment maintenance, and the working efficiency is improved.

Description

Technical Field

[0001] The present invention relates to the technical field of semiconductor manufacturing, and in particular to a cutting processing device for semiconductor manufacturing. Background Art

[0002] The cutting processing equipment used in semiconductor manufacturing is the core tool for achieving wafer-level chip separation. Its main function is to accurately divide the entire wafer into individual chips. As a key link connecting wafer processing and chip packaging, the core task of the cutting equipment is to completely separate the circuit patterns on the wafer with high precision while ensuring the functionality and integrity of the chip. According to the different cutting principles and technologies, cutting equipment is mainly divided into laser cutting equipment and mechanical cutting equipment. Among them, laser cutting equipment uses a high-energy-density laser beam to locally heat the material, causing the target area to instantly evaporate or produce controllable cracks, thereby achieving efficient and precise cutting.

[0003] According to the application number: CN201110232505.7, a method for manufacturing semiconductor wafers by laser cutting can effectively avoid the etching undercut phenomenon caused by the subsequent manufacturing process of the components on the semiconductor crystal grains after laser cutting, which includes the following steps: covering the surface of the wafer with a protective layer; laser cutting the wafer and separating each crystal unit; removing the laser cutting residue of the components on the crystal grains by wet etching; and removing the protective layer and cleaning the components on the crystal grains. The selection of the material of the protective layer must take into account the following factors: (1) the material of the protective layer must have good adhesion and coverage to the wafer; (2) the material of the protective layer must be able to withstand the acidic or alkaline etching solution of the etching residue.

[0004] However, during the use of existing cutting processing equipment for semiconductor manufacturing, it is usually necessary to observe the operating conditions inside the equipment through a window. However, after long-term operation, debris or dust generated during the cutting process will inevitably adhere to the surface of the window, affecting the transparency of the window and interfering with the operator's accurate judgment of the equipment's operating status. During the equipment maintenance process, since the lighting position inside the cutting equipment is usually fixed, some dark areas or blind spots are difficult to obtain sufficient lighting, and maintenance personnel often need additional handheld flashlights for auxiliary lighting, affecting maintenance efficiency. Summary of the Invention

[0005] In view of this, the present invention provides a cutting processing equipment for semiconductor manufacturing, which has.

[0006] The present invention provides a cutting processing equipment for semiconductor manufacturing, which specifically includes a body, a controller, a hinged protective door, an observation window, a fixed foot, a material carrying platform, a cutting assembly, a loading assembly, a lighting mechanism and a cleaning mechanism; the controller is fixedly installed on the outer side of the upper end of the body; the hinged protective door is provided with multiple groups, each group of hinged protective doors is provided with two, and multiple groups of hinged protective doors are hinged on the inner side of the body; the observation window is provided with two, and the two observation windows are respectively fixed on the inner sides of the two hinged protective doors at the front end; the fixed foot is provided with multiple, and multiple fixed feet are fixedly connected to the lower end surface of the body; the material carrying platform is fixedly installed on the inner side of the body; the cutting assembly is installed on the inner side of the body; the loading assembly is installed on the inner side of the body; the lighting mechanism is arranged at the upper end of the inner side of the body; and the cleaning mechanism is arranged on the outer side of the hinged protective door.

[0007] Furthermore, the lighting mechanism includes: a lighting fixed slide, a lighting connecting slider, a lighting fixing frame and a lighting lamp post; there are two lighting fixed slides, and the two lighting fixed slides are fixedly connected to the inner side of the upper end of the body; there are two lighting connecting sliders, and the two lighting connecting sliders are respectively slidably connected to the inner sides of the two lighting fixed slides; the lighting fixing frame is fixedly connected to the lower end surface of the lighting connecting slider; the lighting lamp post is installed on the inner side of the lighting fixing frame.

[0008] Furthermore, the lighting mechanism also includes: an adjusting threaded shaft and a connecting worm gear; there are two adjusting threaded shafts, both of which are rotatably connected to the upper end of the inner side of the body, and the two adjusting threaded shafts are respectively threadedly connected to the inner side of the two lighting connecting sliders; there are two connecting worm gears, both of which are fixedly connected to the outer sides of the two adjusting threaded shafts.

[0009] Furthermore, the lighting mechanism also includes: a connecting shaft, a connecting worm and an adjusting motor; the connecting shaft is rotatably connected to the upper end of the inner side of the body; there are two connecting worms, both of which are fixedly connected to the outer side of the connecting shaft, and the connecting worm is engaged with the connecting worm wheel; the adjusting motor is fixedly installed at the upper end of the inner side of the body, and the adjusting motor is fixedly connected to the connecting shaft.

[0010] Furthermore, the cleaning mechanism includes: a cleaning threaded shaft, a connecting pulley, a transmission connecting belt, a cleaning motor and a cleaning rod; the cleaning threaded shaft is provided with two groups, and the two groups of cleaning threaded shafts are respectively rotatably connected to the outside of the two hinged protective doors at the front end; the connecting pulley is provided with two groups, and the two groups of connecting pulleys are respectively fixedly connected to the outside of the two groups of cleaning threaded shafts; the transmission connecting belts are provided with two, and the two transmission connecting belts are respectively covered on the outside of the two groups of connecting pulleys; the cleaning motor is provided with two, and the two cleaning motors are respectively fixedly connected to the outside of the two hinged protective doors, and the cleaning motor is fixedly connected to the connecting pulley; the cleaning rod is provided with two, and the two cleaning rods are respectively threadedly connected to the outside of the two groups of cleaning threaded shafts.

[0011] Furthermore, the cleaning mechanism also includes: a cleaning turntable, a cleaning brush, a fixed gear and a connecting gear; the cleaning turntable is provided with two groups, and the two groups of cleaning turntables are rotatably connected to the inner side of the two cleaning rods; the cleaning brush is provided with two groups, and the two groups of cleaning brushes are respectively fixedly connected to the lower end surfaces of the two groups of cleaning turntables; the fixed gear is provided with two groups, and the two groups of fixed gears are respectively fixedly connected to the upper ends of the two groups of cleaning turntables; the connecting gear is provided with two groups, and the two groups of connecting gears are both rotatably connected to the inner side of the two cleaning rods, and the connecting gears are meshed with the fixed gears.

[0012] Furthermore, the cleaning mechanism also includes: a cleaning pulley and a synchronous belt; the cleaning pulley is provided with two groups, and both groups of cleaning pulleys are rotatably connected to the upper end surfaces of the two cleaning rods, and the cleaning pulleys are fixedly connected to the fixed gears; the synchronous belt is provided with two, and the two synchronous belts are respectively wrapped around the outside of the two groups of cleaning pulleys.

[0013] Furthermore, the cleaning mechanism also includes: a driving gear and a fixed rack; there are two driving gears, and the two driving gears are respectively fixedly connected to the outside of the two sets of cleaning pulleys; there are two fixed racks, and the two fixed racks are respectively fixedly connected to the outside of the two hinged protective doors, and the fixed racks are engaged with the driving gear. Beneficial effects

[0014] The present invention realizes the movement of the position of the lighting pole through the setting of the lighting mechanism. When the adjusting motor is started, it drives the connecting worm to rotate through the connecting shaft. The rotation of the connecting worm drives the connecting worm wheel threadedly connected to it to rotate, thereby driving the adjusting threaded shaft to rotate. The rotation of the adjusting threaded shaft further cooperates with the thread of the lighting connecting slider to push the lighting fixing frame to slide. The movement of the lighting fixing frame drives the lighting pole to adjust its position, thereby optimizing the lighting effect, providing more convenient operating conditions for equipment maintenance, and improving work efficiency.

[0015] In addition, the cleaning of the observation window is achieved through the setting of the cleaning mechanism. When the cleaning motor is started, it drives the cleaning thread shaft to rotate through the linkage of the connecting pulley and the transmission connecting belt. The rotation of the cleaning thread shaft will push the cleaning rod to slide in cooperation with the thread of the cleaning rod. The sliding of the cleaning rod is driven by the meshing action of the driving gear and the fixed rack, and with the help of the transmission of the cleaning pulley and the synchronous belt, the cleaning turntable is driven to rotate. The rotation of the cleaning turntable causes the cleaning brush to rotate accordingly, thereby efficiently cleaning the observation window and ensuring that it always remains clear and transparent, ensuring that the staff can accurately judge the operating status of the equipment, reducing the labor intensity of manual cleaning, and improving work efficiency.

[0016] In addition, through the setting of the above-mentioned mechanism, not only the adjustment of the position of the lighting pole is realized, which provides convenience for equipment maintenance, but also the automatic cleaning of the observation window is completed, ensuring the monitoring of the equipment operation status, reducing the operation difficulty and labor intensity, and improving the overall work efficiency. BRIEF DESCRIPTION OF THE DRAWINGS

[0017] In order to more clearly illustrate the technical solutions of the embodiments of the present invention, the drawings of the embodiments are briefly introduced below.

[0018] The drawings described below only relate to some embodiments of the present invention, but are not intended to limit the present invention.

[0019] In the attached figure: Figure 1 It is a structural diagram of the main body of embodiment 1 of the present invention.

[0020] Figure 2 It is a schematic diagram of the internal structure of the main body of the first embodiment of the present invention.

[0021] Figure 3 It is a structural schematic diagram of the lighting fixed slideway according to the first embodiment of the present invention.

[0022] Figure 4 It is a structural schematic diagram of the connecting worm gear of embodiment 1 of the present invention.

[0023] Figure 5 It is a structural schematic diagram of the lighting connection slider according to the first embodiment of the present invention.

[0024] Figure 6 It is a structural schematic diagram of the hinged protective door of embodiment 2 of the present invention.

[0025] Figure 7 It is a structural schematic diagram of a cleaning threaded shaft according to the second embodiment of the present invention.

[0026] Figure 8 It is a structural schematic diagram of the fixed rack according to the second embodiment of the present invention.

[0027] Figure 9 It is a structural schematic diagram of a cleaning brush according to the second embodiment of the present invention.

[0028] Reference Signs List 1. Machine body; 2. Controller; 3. Hinged protective door; 4. Observation window; 5. Fixed footrest; 6. Material carrying platform; 7. Cutting assembly; 8. Loading assembly; 9. Lighting fixed slide; 10. Lighting connecting slider; 1001. Lighting fixed frame; 11. Lighting lamp column; 12. Adjusting threaded shaft; 1201. Connecting worm gear; 13. Connecting shaft; 1301. Connecting worm; 14. Adjusting motor; 15. Cleaning threaded shaft; 1501. Connecting pulley; 16. Transmission connecting belt; 17. Cleaning motor; 18. Cleaning rod; 19. Cleaning turntable; 1901. Cleaning brush; 20. Fixed gear; 21. Connecting gear; 22. Cleaning pulley; 23. Synchronous belt; 24. Drive gear; 25. Fixed rack. DETAILED DESCRIPTION Example 1

[0029] Please refer to Figure 1-Figure 5 As shown: The present invention provides a cutting processing equipment for semiconductor manufacturing, including a body 1, a controller 2, a hinged protective door 3, an observation window 4, a fixed foot 5, a material carrying platform 6, a cutting assembly 7, a loading assembly 8 and a lighting mechanism; the controller 2 is fixedly installed on the outer side of the upper end of the body 1; there are multiple groups of hinged protective doors 3, each group of hinged protective doors 3 is provided with two, and multiple groups of hinged protective doors 3 are hinged on the inner side of the body 1; there are two observation windows 4, and the two observation windows 4 are respectively fixedly installed on the inner sides of the two hinged protective doors 3 at the front end; there are multiple fixed feet 5, and the multiple fixed feet 5 are fixedly connected to the lower end surface of the body 1; the material carrying platform 6 is fixedly installed on the inner side of the body 1; the cutting assembly 7 is installed on the inner side of the body 1; the loading assembly 8 is installed on the inner side of the body 1; and the lighting mechanism is arranged at the upper end of the inner side of the body 1.

[0030] Among them, the lighting mechanism includes: a lighting fixed slide 9, a lighting connecting slider 10, a lighting fixing frame 1001, a lighting lamp post 11, an adjusting threaded shaft 12, a connecting worm gear 1201, a connecting shaft 13, a connecting worm 1301 and an adjusting motor 14; there are two lighting fixed slides 9, and the two lighting fixed slides 9 are fixedly connected to the inner side of the upper end of the body 1; there are two lighting connecting sliders 10, and the two lighting connecting sliders 10 are respectively slidably connected to the inner side of the two lighting fixed slides 9; the lighting fixing frame 1001 is fixedly connected to the lower end surface of the lighting connecting slider 10; the lighting lamp post 11 is installed on the inner side of the lighting fixing frame 1001; the adjusting threaded shaft 1 2 is provided, and the two adjusting threaded shafts 12 are both rotatably connected to the upper end of the inner side of the body 1. The two adjusting threaded shafts 12 are respectively threadedly connected to the inner sides of the two lighting connecting sliders 10; there are two connecting worm wheels 1201, and the two connecting worm wheels 1201 are respectively fixedly connected to the outer sides of the two adjusting threaded shafts 12; the connecting shaft 13 is rotatably connected to the upper end of the inner side of the body 1; there are two connecting worms 1301, and the two connecting worms 1301 are both fixedly connected to the outer sides of the connecting shaft 13, and the connecting worms 1301 are engaged with the connecting worm wheels 1201; the adjusting motor 14 is fixedly installed at the upper end of the inner side of the body 1, and the adjusting motor 14 is fixedly connected to the connecting shaft 13.

[0031] The specific usage and function of this embodiment: when the adjusting motor 14 is started, the adjusting motor 14 will drive the connecting worm 1301 to rotate through the connecting shaft 13, and the rotation of the connecting worm 1301 will drive the adjusting threaded shaft 12 to rotate under the action of the threaded connection with the connecting worm wheel 1201, and the rotation of the adjusting threaded shaft 12 will drive the lighting fixing frame 1001 to slide under the action of the threaded connection with the lighting connecting slider 10, and the sliding of the lighting fixing frame 1001 will drive the lighting lamp post 11 to slide, thereby adjusting the position of the lighting lamp post 11 to achieve better lighting effects. Example 2

[0032] Based on the first embodiment, Figure 6-Figure 9As shown, the cleaning mechanism includes: a cleaning threaded shaft 15, a connecting pulley 1501, a transmission connecting belt 16, a cleaning motor 17, a cleaning rod 18, a cleaning turntable 19, a cleaning brush 1901, a fixed gear 20, a connecting gear 21, a cleaning pulley 22, a synchronous belt 23, a driving gear 24 and a fixed rack 25; the cleaning mechanism is arranged on the outside of the hinged protective door 3; the cleaning threaded shaft 15 is provided with two groups, and the two groups of cleaning threaded shafts 15 are respectively rotatably connected to the outside of the two hinged protective doors 3 at the front end; the connecting pulley 1501 is provided There are two groups, and the two groups of connecting pulleys 1501 are fixedly connected to the outside of the two groups of cleaning threaded shafts 15; there are two transmission connecting belts 16, and the two transmission connecting belts 16 are respectively covered on the outside of the two groups of connecting pulleys 1501; there are two cleaning motors 17, and the two cleaning motors 17 are respectively fixedly connected to the outside of the two hinged protective doors 3, and the cleaning motors 17 are fixedly connected to the connecting pulleys 1501; there are two cleaning rods 18, and the two cleaning rods 18 are respectively threadedly connected to the outside of the two groups of cleaning threaded shafts 15; the cleaning pulleys 150 There are two groups of disks 19, and both groups of cleaning disks 19 are rotatably connected to the inner sides of the two cleaning rods 18; there are two groups of cleaning brushes 1901, and both groups of cleaning brushes 1901 are fixedly connected to the lower end surfaces of the two groups of cleaning disks 19; there are two groups of fixed gears 20, and both groups of fixed gears 20 are fixedly connected to the upper ends of the two groups of cleaning disks 19; there are two groups of connecting gears 21, and both groups of connecting gears 21 are rotatably connected to the inner sides of the two cleaning rods 18, and the connecting gears 21 are meshed with the fixed gears 20; a cleaning pulley 22 is provided Two groups, both groups of cleaning pulleys 22 are rotatably connected to the upper end surfaces of the two cleaning rods 18, and the cleaning pulleys 22 are fixedly connected to the fixed gear 20; two synchronous belts 23 are provided, and the two synchronous belts 23 are respectively wrapped around the outside of the two groups of cleaning pulleys 22; two driving gears 24 are provided, and the two driving gears 24 are respectively fixedly connected to the outside of the two groups of cleaning pulleys 22; two fixed racks 25 are provided, and the two fixed racks 25 are respectively fixedly connected to the outside of the two hinged protective doors 3, and the fixed racks 25 are engaged with the driving gear 24.

[0033] The specific usage and function of this embodiment: when the cleaning motor 17 is started, the cleaning motor 17 will drive the cleaning threaded shaft 15 to rotate through the setting of the connecting pulley 1501 and the transmission connecting belt 16. The rotation of the cleaning threaded shaft 15 will cause the cleaning rod 18 to slide under the action of the threaded connection with the cleaning rod 18. The sliding of the cleaning rod 18 will drive the cleaning turntable 19 to rotate through the setting of the cleaning pulley 22 and the synchronous belt 23 under the action of the engagement of the driving gear 24 and the fixed rack 25. The rotation of the cleaning turntable 19 will drive the cleaning brush 1901 to rotate, thereby cleaning the observation window 4.

[0034] In this article, there are several points to note: 1. The drawings of the embodiments of the present invention only relate to the structures related to the embodiments of the present invention. Other structures may refer to conventional designs.

[0035] 2. In the absence of conflict, the embodiments of the present invention and the features therein may be combined with each other to form new embodiments.

[0036] The above are merely specific embodiments of the present invention, but the scope of protection of the present invention is not limited thereto. Any modifications or substitutions that can be easily conceived by a person skilled in the art within the technical scope disclosed in the present invention should be included within the scope of protection of the present invention. Therefore, the scope of protection of the present invention should be based on the scope of protection of the claims.

Claims

1. A cutting processing device for semiconductor manufacturing, comprising a body (1), a controller (2), a hinged protective door (3), an observation window (4), a fixed foot (5), a material carrying platform (6), a cutting assembly (7), a loading assembly (8), a lighting mechanism and a cleaning mechanism; the controller (2) is fixedly mounted on the outer side of the upper end of the body (1); the hinged protective door (3) is provided in a plurality of groups, each group of hinged protective doors (3) is provided with two hinged protective doors, and the plurality of hinged protective doors (3) are hinged on the inner side of the body (1); the characteristics are: There are two observation windows (4), which are respectively fixedly mounted on the inner sides of the two hinged protective doors (3) at the front end; there are multiple fixed feet (5), which are all fixedly connected to the lower end surface of the machine body (1); the material carrying platform (6) is fixedly mounted on the inner side of the machine body (1); the cutting assembly (7) is mounted on the inner side of the machine body (1); the feeding assembly (8) is mounted on the inner side of the machine body (1); the lighting mechanism is arranged at the upper end of the inner side of the machine body (1); and the cleaning mechanism is arranged on the outer side of the hinged protective door (3).

2. The semiconductor manufacturing dicing equipment according to claim 1, wherein: The lighting mechanism comprises: a lighting fixed slide (9), a lighting connecting slider (10), a lighting fixed frame (1001) and a lighting lamp post (11); two lighting fixed slides (9) are provided, and the two lighting fixed slides (9) are fixedly connected to the inner side of the upper end of the body (1); two lighting connecting sliders (10) are provided, and the two lighting connecting sliders (10) are respectively slidably connected to the inner sides of the two lighting fixed slides (9); the lighting fixed frame (1001) is fixedly connected to the lower end surface of the lighting connecting slider (10); and the lighting lamp post (11) is installed on the inner side of the lighting fixed frame (1001).

3. The semiconductor manufacturing dicing equipment according to claim 2, wherein: The lighting mechanism further comprises: an adjusting threaded shaft (12) and a connecting worm gear (1201); two adjusting threaded shafts (12) are provided, and both adjusting threaded shafts (12) are rotatably connected to the upper end of the inner side of the body (1), and the two adjusting threaded shafts (12) are respectively threadedly connected to the inner sides of two lighting connecting sliders (10); two connecting worm gears (1201) are provided, and the two connecting worm gears (1201) are respectively fixedly connected to the outer sides of the two adjusting threaded shafts (12).

4. The semiconductor manufacturing dicing equipment according to claim 3, wherein: The lighting mechanism further comprises: a connecting shaft (13), a connecting worm (1301) and an adjusting motor (14); the connecting shaft (13) is rotatably connected to the upper end of the inner side of the body (1); two connecting worms (1301) are provided, and both connecting worms (1301) are fixedly connected to the outer side of the connecting shaft (13), and the connecting worms (1301) are meshed with the connecting worm wheel (1201); the adjusting motor (14) is fixedly mounted on the upper end of the inner side of the body (1), and the adjusting motor (14) is fixedly connected to the connecting shaft (13).

5. The semiconductor manufacturing cutting processing equipment according to claim 1, wherein: The cleaning mechanism comprises: a cleaning threaded shaft (15), a connecting pulley (1501), a transmission connecting belt (16), a cleaning motor (17) and a cleaning rod (18); the cleaning threaded shaft (15) is provided with two groups, and the two groups of cleaning threaded shafts (15) are respectively rotatably connected to the outside of the two hinged protective doors (3) at the front end; the connecting pulley (1501) is provided with two groups, and the two groups of connecting pulleys (1501) are respectively fixedly connected to the outside of the two groups of cleaning threaded shafts (15); the transmission connecting belt (16) is provided with two, and the two transmission connecting belts (16) are respectively covered on the outside of the two groups of connecting pulleys (1501); the cleaning motor (17) is provided with two, and the two cleaning motors (17) are respectively fixedly connected to the outside of the two hinged protective doors (3), and the cleaning motor (17) is fixedly connected to the connecting pulley (1501); the cleaning rod (18) is provided with two, and the two cleaning rods (18) are respectively threadedly connected to the outside of the two groups of cleaning threaded shafts (15).

6. The semiconductor manufacturing dicing equipment according to claim 5, wherein: The cleaning mechanism further comprises: a cleaning turntable (19), a cleaning brush (1901), a fixed gear (20) and a connecting gear (21); the cleaning turntable (19) is provided with two groups, and the two groups of cleaning turntables (19) are both rotatably connected to the inner sides of the two cleaning rods (18); the cleaning brush (1901) is provided with two groups, and the two groups of cleaning brushes (1901) are respectively fixedly connected to the lower end surfaces of the two groups of cleaning turntables (19); the fixed gear (20) is provided with two groups, and the two groups of fixed gears (20) are respectively fixedly connected to the upper ends of the two groups of cleaning turntables (19); the connecting gear (21) is provided with two groups, and the two groups of connecting gears (21) are both rotatably connected to the inner sides of the two cleaning rods (18), and the connecting gear (21) is meshed with the fixed gear (20).

7. The semiconductor manufacturing dicing equipment according to claim 6, wherein: The cleaning mechanism further comprises: a cleaning pulley (22) and a synchronous belt (23); the cleaning pulley (22) is provided with two groups, and the two groups of cleaning pulleys (22) are both rotatably connected to the upper end surfaces of the two cleaning rods (18), and the cleaning pulleys (22) are fixedly connected to the fixed gear (20); the synchronous belt (23) is provided with two groups, and the two synchronous belts (23) are respectively covered on the outside of the two groups of cleaning pulleys (22).

8. The semiconductor manufacturing dicing equipment according to claim 7, wherein: The cleaning mechanism further comprises: a driving gear (24) and a fixed rack (25); two driving gears (24) are provided, and the two driving gears (24) are respectively fixedly connected to the outsides of the two sets of cleaning pulleys (22); two fixed racks (25) are provided, and the two fixed racks (25) are respectively fixedly connected to the outsides of the two hinged protective doors (3), and the fixed racks (25) are meshed with the driving gear (24).

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