Novel multi-working-mode double-branch series composite structure high-frequency ultrasonic transducer and excitation method

Abstract

The invention discloses a novel multi-working-mode double-branch series composite structure high-frequency ultrasonic transducer and an excitation method. The transducer comprises a chute amplitude-change pole, a vibration transmission rod, a double-cone amplitude-change pole, two groups of piezoelectric ceramic crystal stacks and a clamping flange. According to the chute amplitude-change pole, a rectangular chute is accurately configured on a key node where a node position under the excitation frequency of 60kHz and an antinode position under the excitation frequency of 120kHz alternately appear, so that the transducer realizes a longitudinal vibration mode and a longitudinal bending composite vibration mode which are not mutually influenced, and then 10 differential excitation methods are generated. The transducer can output vibration tracks such as straight lines, ellipses, rectangles and quadrangles from two ends by intelligently regulating and controlling excitation signal parameters (phase difference, amplitude and frequency combination) of the two groups of piezoelectric ceramics. By means of the multi-vibration-mode output characteristic, the application scene of traditional ultrasonic machining in the fields of precise micromachining, composite material treatment and the like is remarkably expanded, and an innovative solution is provided for the intelligent combined machining technology through dynamic adjustability of the vibration mode.

Description

Technical Field

[0001] The present invention relates to ultrasonic vibration assisted machining technology, in particular to a novel multi-working mode dual-branch series composite structure high-frequency ultrasonic transducer and an excitation method. Background Art

[0002] Micro-nanoscale structural devices have extensive application value in aerospace equipment, biomedical engineering, new energy systems, and semiconductor manufacturing. Ultrasonic vibration-assisted processing technology has huge development potential and broad application prospects in the processing of micro / nano components with complex morphologies. Ultrasonic vibration-assisted processing technology has significant advantages over traditional processing technologies, mainly including: suppressing rapid tool wear, reducing cutting forces, and improving processing surface quality. As the key actuator of the piezoelectric ultrasonic vibration-assisted processing system, the piezoelectric ultrasonic transducer has achieved large-scale engineering applications in the field of precision micro-nano processing with its compact topological structure, excellent economic indicators, and energy conversion mechanism based on the inverse piezoelectric effect.

[0003] In the field of ultrasonic vibration-assisted processing technology, different vibration modes correspond to specific application scenarios: linear and elliptical vibrations are mainly used in cutting processes, while rectangular vibrations are suitable for grinding processes. However, traditional transducers have significant limitations in design. Their structure can only achieve a single vibration mode, and once formed, the vibration mode cannot be changed, which seriously restricts the application scope of the transducer. In response to this technical bottleneck, the present invention innovatively proposes a multi-working mode dual-branch series composite structure high-frequency ultrasonic transducer and its excitation method. The ultrasonic transducer can flexibly switch between a variety of vibration trajectories such as straight lines, ellipses, rectangles and quadrilaterals according to changes in the excitation signal, and can achieve vibration outputs of different energies in both linear and elliptical vibration modes, significantly expanding the application scenarios of transducers in ultrasonic vibration-assisted processing technology. Summary of the Invention

[0004] In order to solve the technical problems existing in the known technology, the present invention provides a novel multi-working mode dual-branch series composite structure high-frequency ultrasonic transducer and excitation method. The transducer adopts a sandwich-type longitudinal vibration structure driven by two groups of piezoelectric ceramic crystal stacks. Two groups of mechanical amplitude rods with different structures are connected to the piezoelectric ceramic crystal stack by bolts. Both groups of mechanical amplitude rods have resonant frequencies of 60kHz and 120kHz. The mechanical amplitude rods can output longitudinal-bending composite vibration at the resonant frequency of 60kHz and output longitudinal vibration at the resonant frequency of 120kHz. This design enables the transducer to be excited under multiple frequency combinations to achieve the purpose of outputting different vibration trajectories.

[0005] The technical solution adopted by the present invention to solve the technical problems existing in the known technology is: a new type of multi-working mode dual-branch series composite structure high-frequency ultrasonic transducer and excitation method, which includes a skewed slot amplitude rod, a vibration transmission rod, a double-cone amplitude rod, a piezoelectric ceramic crystal stack A, a piezoelectric ceramic crystal stack B, a clamping flange, and an ultrasonic transducer excitation method, characterized in that: a skewed slot amplitude rod and an excitation method; the skewed slot amplitude rod is provided with a rectangular skewed slot, and the position of the rectangular skewed slot is the alternation of the 60kHz excitation frequency node and the 120kHz excitation frequency antinode of the skewed slot amplitude rod.

[0006] The material of the inclined slot amplitude rod, the vibration transmission rod and the double-cone amplitude rod is aviation aluminum 7075, and the material of the stud bolt is 45 steel.

[0007] The ultrasonic transducer has ten excitation methods.

[0008] The first excitation method: The piezoelectric ceramic group A is excited individually at a frequency of 60kHz. An ultrasonic excitation signal is applied to the piezoelectric ceramic group A, causing the piezoelectric ceramic group A to generate longitudinal vibration. The vibration generated by the piezoelectric ceramic group A is amplified and converted by the inclined slot horn and the double-cone horn, and transmitted to both ends of the ultrasonic transducer. The two ends of the ultrasonic transducer output longitudinal and bending composite vibrations.

[0009] The second excitation method: The piezoelectric ceramic group B is excited separately at a frequency of 60kHz. An ultrasonic excitation signal is applied to the piezoelectric ceramic group B separately, causing the piezoelectric ceramic group B to generate longitudinal vibration. The vibration generated by the piezoelectric ceramic group B is amplified and converted by the inclined slot horn and the double-cone horn, and transmitted to both ends of the ultrasonic transducer. The two ends of the ultrasonic transducer output longitudinal and bending composite vibration.

[0010] The third excitation method: The piezoelectric ceramic group A is excited individually at a frequency of 120kHz. An ultrasonic excitation signal is applied to the piezoelectric ceramic group A, causing the piezoelectric ceramic group A to generate longitudinal vibration. The vibration generated by the piezoelectric ceramic group A is amplified by the skewed slot horn and the double-cone horn and transmitted to both ends of the ultrasonic transducer, which output longitudinal vibration.

[0011] Fourth excitation method: The piezoelectric ceramic group B is excited individually at a frequency of 120kHz. An ultrasonic excitation signal is applied to the piezoelectric ceramic group B, causing the piezoelectric ceramic group B to generate longitudinal vibration. The vibration generated by the piezoelectric ceramic group B is amplified by the skewed horn and the double-cone horn and transmitted to both ends of the ultrasonic transducer, which output longitudinal vibration.

[0012] The fifth excitation method: piezoelectric ceramic group A and piezoelectric ceramic group B are excited at a frequency of 60kHz at the same time, and ultrasonic excitation signals of different phases are introduced into piezoelectric ceramic group A and piezoelectric ceramic group B, so that the two piezoelectric ceramic groups generate longitudinal vibrations at the same time. The vibrations generated by piezoelectric ceramic group A and the vibrations generated by piezoelectric ceramic group B are transmitted and superimposed through the vibration transmission rod. The superimposed vibrations are amplified and converted by the inclined slot amplitude rod and the double-cone amplitude rod, and transmitted to both ends of the ultrasonic transducer. Both ends of the ultrasonic transducer output longitudinal and bending composite vibrations with a large amplitude.

[0013] The sixth excitation method: piezoelectric ceramic group A and piezoelectric ceramic group B are excited at a frequency of 120kHz at the same time, and ultrasonic excitation signals of different phases are introduced into piezoelectric ceramic group A and piezoelectric ceramic group B, so that the two piezoelectric ceramic groups generate longitudinal vibrations at the same time. The vibrations generated by piezoelectric ceramic group A and the vibrations generated by piezoelectric ceramic group B are transmitted through the vibration transmission rod and superimposed. The superimposed vibrations are amplified by the inclined slot amplitude rod and the double-cone amplitude rod and transmitted to both ends of the piezoelectric ultrasonic transducer. Both ends of the ultrasonic transducer output longitudinal vibrations with a larger amplitude.

[0014] The seventh excitation method: piezoelectric ceramic group A is excited at a frequency of 60kHz, and piezoelectric ceramic group A is excited at a frequency of 120kHz. At the same time, ultrasonic excitation signals of different voltage values are applied to piezoelectric ceramic group A and piezoelectric ceramic group B, so that the two piezoelectric ceramic groups generate longitudinal vibrations at the same time. The vibrations generated by piezoelectric ceramic group A and the vibrations generated by piezoelectric ceramic group B are transmitted through the vibration transmission rod and superimposed. The superimposed vibrations are amplified and converted by the inclined slot amplitude rod and the double cone amplitude rod, and are transmitted to both ends of the ultrasonic transducer, and a quadrilateral trajectory is output at both ends of the ultrasonic transducer.

[0015] The eighth excitation method: piezoelectric ceramic group A is excited at a frequency of 60kHz, and piezoelectric ceramic group A is excited at a frequency of 120kHz. At the same time, ultrasonic excitation signals of the same voltage value are passed to piezoelectric ceramic group A and piezoelectric ceramic group B, so that the two piezoelectric ceramic groups generate longitudinal vibrations at the same time. The vibrations generated by piezoelectric ceramic group A and the vibrations generated by piezoelectric ceramic group B are transmitted through the vibration transmission rod and superimposed. The superimposed vibrations are amplified and converted by the inclined slot amplitude rod and the double-cone amplitude rod, and are transmitted to both ends of the ultrasonic transducer. Rectangular trajectories are output at both ends of the ultrasonic transducer.

[0016] The ninth excitation method: piezoelectric ceramic group A is excited at a frequency of 120kHz, and piezoelectric ceramic group A is excited at a frequency of 60kHz. At the same time, ultrasonic excitation signals of different voltage values are applied to piezoelectric ceramic group A and piezoelectric ceramic group B, so that the two piezoelectric ceramic groups generate longitudinal vibrations at the same time. The vibrations generated by piezoelectric ceramic group A and the vibrations generated by piezoelectric ceramic group B are transmitted through the vibration transmission rod and superimposed. The superimposed vibrations are amplified and converted by the inclined slot amplitude rod and the double cone amplitude rod, and transmitted to both ends of the ultrasonic transducer. The two ends of the ultrasonic transducer output rectangular tracks.

[0017] The tenth excitation method: piezoelectric ceramic group A is excited at a frequency of 120 kHz, and piezoelectric ceramic group A is excited at a frequency of 60 kHz. At the same time, ultrasonic excitation signals of the same voltage value are applied to piezoelectric ceramic group A and piezoelectric ceramic group B, so that the two piezoelectric ceramic groups generate longitudinal vibrations at the same time. The vibrations generated by piezoelectric ceramic group A and the vibrations generated by piezoelectric ceramic group B are transmitted through the vibration transmission rod and superimposed. The superimposed vibrations are amplified and converted by the inclined slot amplitude rod and the double-cone amplitude rod, and transmitted to both ends of the ultrasonic transducer, and a quadrilateral trajectory is output at both ends of the ultrasonic transducer.

[0018] Under 10 excitation methods, the ultrasonic transducer can output a variety of vibration trajectories at both ends, including straight lines, ellipses, rectangles, and quadrilaterals.

[0019] The advantages and positive effects of the present invention are: the ultrasonic transducer of the present invention adopts a dual-frequency dual-head design, and vibration energy output can be achieved at both ends, thereby improving work efficiency. The ultrasonic transducer contains two groups of piezoelectric ceramics and two amplitude rods with different structures. The two groups of piezoelectric ceramics can achieve power superposition, and the series configuration helps to dissipate heat, effectively extending the service life of the ultrasonic transducer. The transducer has 10 different combinations of excitation methods. These 10 excitation methods enable the transducer to output multiple vibration modes at both ends by controlling the ultrasonic excitation signal, and the multiple vibration modes can be flexibly switched. Not only does it expand the application scenarios of the transducer, but the different vibration trajectories also provide new ideas for composite processing technology. BRIEF DESCRIPTION OF THE DRAWINGS

[0020] Figure 1 Schematic diagram of the structure of the ultrasonic transducer in the present invention;

[0021] Figure 2 This is an exploded view of the structure of the ultrasonic transducer of the present invention;

[0022] Figure 3 This is the structural diagram of the chute horn;

[0023] Figure 4 The waveform diagram of the ultrasonic transducer frequency is 60 and 120kHz;

[0024] Figure 5is the linear vibration trajectory diagram of the ultrasonic transducer;

[0025] Figure 6 is the elliptical vibration trajectory diagram of the ultrasonic transducer;

[0026] Figure 7 is the quadrilateral vibration trajectory diagram of the ultrasonic transducer;

[0027] Figure 8 is the rectangular vibration trajectory diagram of the ultrasonic transducer;

[0028] Figure 9 is the quadrilateral vibration trajectory diagram of the ultrasonic transducer;

[0029] The numbers in the figure are: 1-beveled slot amplitude rod, 2-piezoelectric ceramic group A, 3-vibration transmission rod, 4-piezoelectric ceramic group B, 5-double-cone amplitude rod, 6-clamping flange, 7-stud bolt, 11-rectangular beveled slot. DETAILED DESCRIPTION

[0030] In order to further understand the content, features and effects of the present invention, the following embodiments are given as examples and described in detail with reference to the accompanying drawings:

[0031] See also Figures 1 to 9 A novel multi-working mode dual-branch series composite structure high-frequency ultrasonic transducer and excitation method, comprising: an inclined slot amplitude rod 1, a vibration transmission rod 3, a double-cone amplitude rod 5, a piezoelectric ceramic group A 2, a piezoelectric ceramic group B 4, a clamping flange 6, and an excitation method; the piezoelectric ceramic group A 2 is installed between the inclined slot amplitude rod 1 and the vibration transmission rod 3, the piezoelectric ceramic group B 4 is installed between the vibration transmission rod 3 and the double-cone amplitude rod 5, the inclined slot amplitude rod 1, the vibration transmission rod 3, the double-cone amplitude rod 5, the piezoelectric ceramic group A 2, and the piezoelectric ceramic group B 4 are connected in sequence by stud bolts 7, and a clamping flange 6 is installed in the middle part of the vibration transmission rod 3, and the clamping flange 6 is connected to the fixing frame.

[0032] The inclined slot horn 1 is provided with rectangular inclined slots 11, which are distributed at equal intervals. The rectangular inclined slots 11 are located at the alternation of the 60kHz excitation frequency node and the 120kHz excitation frequency antinode. Figure 4 Marked in the dotted box.

[0033] The material of the inclined slot amplitude rod 1, the vibration transmission rod 3, and the double-cone amplitude rod 5 is selected to be aviation aluminum 7075, and the material of the stud bolt 7 is selected to be 45 steel.

[0034] The ultrasonic transducer has 10 excitation methods, which can be selected according to actual requirements during specific use.

[0035] The first excitation method: the piezoelectric ceramic group A 2 is individually excited at a frequency of 60kHz, and an ultrasonic excitation signal is separately introduced into the piezoelectric ceramic group A 2, so that the piezoelectric ceramic group A 2 generates longitudinal vibration. The vibration generated by the piezoelectric ceramic group A 2 is amplified and converted by the inclined slot amplitude rod 1 and the double cone amplitude rod 5, and transmitted to the two ends of the ultrasonic transducer, and the two ends of the ultrasonic transducer output longitudinal and bending composite vibration.

[0036] The second excitation method: the piezoelectric ceramic group B 4 is excited individually at a frequency of 60kHz, and an ultrasonic excitation signal is applied to the piezoelectric ceramic group B 4 individually, so that the piezoelectric ceramic group B 4 generates longitudinal vibration. The vibration generated by the piezoelectric ceramic group B 4 is amplified and converted by the inclined slot horn 1 and the double cone horn 5, and transmitted to both ends of the ultrasonic transducer. The two ends of the ultrasonic transducer output longitudinal and bending composite vibrations, such as Figure 5 shown.

[0037] The third excitation method: the piezoelectric ceramic group A 2 is excited separately at a frequency of 120kHz, and an ultrasonic excitation signal is applied to the piezoelectric ceramic group A 2 separately, so that the piezoelectric ceramic group A 2 generates longitudinal vibration. The vibration generated by the piezoelectric ceramic group A 2 is amplified by the inclined slot horn 1 and the double cone horn 5, and transmitted to both ends of the ultrasonic transducer. The longitudinal vibration is output at both ends of the ultrasonic transducer, such as Figure 6 shown.

[0038] The fourth excitation method: the piezoelectric ceramic group B 4 is individually excited at a frequency of 120kHz, and an ultrasonic excitation signal is separately input into the piezoelectric ceramic group B 4, so that the piezoelectric ceramic group B 4 generates longitudinal vibration. The vibration generated by the piezoelectric ceramic group B 4 is amplified by the inclined slot amplitude rod 1 and the double-cone amplitude rod 5, and transmitted to both ends of the ultrasonic transducer. In this excitation method, longitudinal vibration is output at both ends of the ultrasonic transducer.

[0039] The fifth excitation method: the piezoelectric ceramic group A 2 and the piezoelectric ceramic group B 4 are excited at a frequency of 60kHz at the same time, and ultrasonic excitation signals of different phases are introduced into the piezoelectric ceramic group A 2 and the piezoelectric ceramic group B 4, so that the two piezoelectric ceramic groups generate longitudinal vibrations at the same time. The vibrations generated by the piezoelectric ceramic group A 2 and the vibrations generated by the piezoelectric ceramic group B 4 are transmitted and superimposed through the vibration transmission rod 3. The superimposed vibrations are amplified and converted by the inclined slot amplitude rod 1 and the double-cone amplitude rod 5, and transmitted to the two ends of the ultrasonic transducer. With this excitation method, both ends of the ultrasonic transducer output longitudinal and bending composite vibrations with a large amplitude.

[0040] The sixth excitation method: the piezoelectric ceramic group A 2 and the piezoelectric ceramic group B 4 are excited at a frequency of 120kHz at the same time, and ultrasonic excitation signals of different phases are introduced into the piezoelectric ceramic group A 2 and the piezoelectric ceramic group B 4, so that the two piezoelectric ceramic groups generate longitudinal vibrations at the same time. The vibrations generated by the piezoelectric ceramic group A 2 and the vibrations generated by the piezoelectric ceramic group B 4 are transmitted through the vibration transmission rod 3 and superimposed. The superimposed vibrations are amplified by the inclined slot amplitude rod 1 and the double cone amplitude rod 5 and transmitted to both ends of the ultrasonic transducer. In this excitation method, both ends of the ultrasonic transducer output longitudinal vibrations with larger amplitudes, such as Figure 6 shown.

[0041] The seventh excitation method: piezoelectric ceramic group A 2 is excited at a frequency of 60kHz, and piezoelectric ceramic group A 2 is excited at a frequency of 120kHz. At the same time, ultrasonic excitation signals of different voltage values are applied to piezoelectric ceramic group A 2 and piezoelectric ceramic group B 4, so that the two piezoelectric ceramic groups generate longitudinal vibrations at the same time. The vibrations generated by piezoelectric ceramic group A 2 and the vibrations generated by piezoelectric ceramic group B 4 are transmitted through the vibration transmission rod 3 and superimposed. The superimposed vibrations are amplified and converted by the inclined slot amplitude rod 1 and the double cone amplitude rod 5, and transmitted to both ends of the ultrasonic transducer. With this excitation method, both ends of the transducer can output a quadrilateral vibration trajectory rotated 45°, such as Figure 7 shown.

[0042] The eighth excitation method: piezoelectric ceramic group A 2 is excited at a frequency of 60kHz, and piezoelectric ceramic group A 2 is excited at a frequency of 120kHz. At the same time, ultrasonic excitation signals of the same voltage value are applied to piezoelectric ceramic group A 2 and piezoelectric ceramic group B 4, so that the two piezoelectric ceramic groups generate longitudinal vibrations at the same time. The vibrations generated by piezoelectric ceramic group A 2 and the vibrations generated by piezoelectric ceramic group B 4 are transmitted through the vibration transmission rod 3 and superimposed. The superimposed vibrations are amplified and converted by the inclined slot amplitude rod 1 and the double cone amplitude rod 5, and transmitted to both ends of the ultrasonic transducer. With this excitation method, both ends of the ultrasonic transducer can output rectangular vibration trajectories, such as Figure 8 shown.

[0043] The ninth excitation method: piezoelectric ceramic group A 2 is excited at a frequency of 120kHz, and piezoelectric ceramic group A 2 is excited at a frequency of 60kHz. At the same time, ultrasonic excitation signals of different voltage values are passed to piezoelectric ceramic group A 2 and piezoelectric ceramic group B 4, so that the two piezoelectric ceramic groups generate longitudinal vibrations at the same time. The vibration generated by the piezoelectric ceramic group A and the vibration generated by the piezoelectric ceramic group B 4 are transmitted through the vibration transmission rod 3 and superimposed. The superimposed vibration is amplified and converted by the inclined slot amplitude rod 1 and the double-cone amplitude rod 5, and transmitted to both ends of the ultrasonic transducer. With this excitation method, both ends of the ultrasonic transducer can output rectangular vibration trajectories.

[0044] The tenth excitation method: the piezoelectric ceramic group A 2 is excited at a frequency of 120kHz, and the piezoelectric ceramic group A 2 is excited at a frequency of 60kHz. At the same time, ultrasonic excitation signals of the same voltage value are supplied to the piezoelectric ceramic group A 2 and the piezoelectric ceramic group B 4, so that the two piezoelectric ceramic groups vibrate at the same time. The vibration generated by the piezoelectric ceramic group A 2 and the vibration generated by the piezoelectric ceramic group B 4 are transmitted through the vibration transmission rod 3 and superimposed. The superimposed vibration is amplified and converted by the inclined slot amplitude rod 1 and the double cone amplitude rod 5, and transmitted to both ends of the ultrasonic transducer. With this excitation method, both ends of the ultrasonic transducer can output a quadrilateral vibration trajectory, such as Figure 9 shown.

[0045] Under 10 excitation methods, the ultrasonic transducer can output a variety of vibration trajectories at both ends, including straight lines, ellipses, rectangles, and diamonds.

[0046] Although the preferred embodiments of the present invention have been described above in conjunction with the accompanying drawings, the present invention is not limited to the above-mentioned specific embodiments. The above-mentioned specific embodiments are merely illustrative and not restrictive. Under the guidance of the present invention, ordinary technicians in this field can also make many forms without departing from the scope of protection of the present invention and the claims, which all fall within the scope of protection of the present invention.

Claims

1. A novel multi-mode dual-branch series composite structure high-frequency ultrasonic transducer and excitation method, comprising a skewed horn, a vibration transmission rod, a double-cone horn, a piezoelectric ceramic crystal stack A, a piezoelectric ceramic crystal stack B, a clamping flange, and an ultrasonic transducer excitation method, characterized in that: A skewed slot amplitude transformer and an excitation method; the skewed slot amplitude transformer is provided with rectangular skewed slots, and the positions of the rectangular skewed slots are the alternations of the 60kHz excitation frequency nodes and the 120kHz excitation frequency antinodes of the skewed slot amplitude transformer.

2. A novel multi-working mode dual-branch series composite structure high-frequency ultrasonic transducer and excitation method according to claim 1, characterized in that: There are 10 different types of excitation methods, which are as follows: The first excitation method: The piezoelectric ceramic group A is excited individually at a frequency of 60kHz. An ultrasonic excitation signal is applied to the piezoelectric ceramic group A, causing the piezoelectric ceramic group A to generate longitudinal vibration. The vibration generated by the piezoelectric ceramic group A is amplified and converted by the inclined slot horn and the double-cone horn, and transmitted to both ends of the ultrasonic transducer. The two ends of the ultrasonic transducer output longitudinal and bending composite vibrations. The second excitation method: The piezoelectric ceramic group B is excited separately at a frequency of 60kHz. An ultrasonic excitation signal is applied to the piezoelectric ceramic group B separately, causing the piezoelectric ceramic group B to generate longitudinal vibration. The vibration generated by the piezoelectric ceramic group B is amplified and converted by the inclined slot horn and the double-cone horn, and transmitted to both ends of the ultrasonic transducer. The two ends of the ultrasonic transducer output longitudinal and bending composite vibration. The third excitation method: The piezoelectric ceramic group A is excited individually at a frequency of 120kHz. An ultrasonic excitation signal is applied to the piezoelectric ceramic group A, causing the piezoelectric ceramic group A to generate longitudinal vibration. The vibration generated by the piezoelectric ceramic group A is amplified by the skewed slot horn and the double-cone horn and transmitted to both ends of the ultrasonic transducer, which output longitudinal vibration. Fourth excitation method: The piezoelectric ceramic group B is excited individually at a frequency of 120kHz. An ultrasonic excitation signal is applied to the piezoelectric ceramic group B, causing the piezoelectric ceramic group B to generate longitudinal vibration. The vibration generated by the piezoelectric ceramic group B is amplified by the skewed horn and the double-cone horn and transmitted to both ends of the ultrasonic transducer, which output longitudinal vibration. The fifth excitation method: piezoelectric ceramic group A and piezoelectric ceramic group B are excited at a frequency of 60kHz at the same time, and ultrasonic excitation signals of different phases are introduced into piezoelectric ceramic group A and piezoelectric ceramic group B, so that the two piezoelectric ceramic groups generate longitudinal vibrations at the same time. The vibrations generated by piezoelectric ceramic group A and the vibrations generated by piezoelectric ceramic group B are transmitted and superimposed through the vibration transmission rod. The superimposed vibrations are amplified and converted by the inclined slot amplitude rod and the double-cone amplitude rod, and transmitted to both ends of the ultrasonic transducer. Both ends of the ultrasonic transducer output longitudinal and bending composite vibrations with a large amplitude. The sixth excitation method: piezoelectric ceramic group A and piezoelectric ceramic group B are excited at a frequency of 120kHz at the same time, and ultrasonic excitation signals of different phases are introduced into piezoelectric ceramic group A and piezoelectric ceramic group B, so that the two piezoelectric ceramic groups generate longitudinal vibrations at the same time. The vibrations generated by piezoelectric ceramic group A and the vibrations generated by piezoelectric ceramic group B are transmitted through the vibration transmission rod and superimposed. The superimposed vibrations are amplified by the inclined slot amplitude rod and the double-cone amplitude rod and transmitted to both ends of the ultrasonic transducer. Both ends of the ultrasonic transducer output longitudinal vibrations with a larger amplitude. The seventh excitation method: piezoelectric ceramic group A is excited at a frequency of 60kHz, and piezoelectric ceramic group A is excited at a frequency of 120kHz. At the same time, ultrasonic excitation signals of different voltage values are applied to piezoelectric ceramic group A and piezoelectric ceramic group B, so that the two piezoelectric ceramic groups generate longitudinal vibrations at the same time. The vibrations generated by piezoelectric ceramic group A and the vibrations generated by piezoelectric ceramic group B are transmitted through the vibration transmission rod and superimposed. The superimposed vibrations are amplified and converted by the inclined slot amplitude rod and the double cone amplitude rod, and are transmitted to both ends of the ultrasonic transducer, and a quadrilateral trajectory is output at both ends of the ultrasonic transducer. The eighth excitation method: piezoelectric ceramic group A is excited at a frequency of 60kHz, and piezoelectric ceramic group A is excited at a frequency of 120kHz. At the same time, ultrasonic excitation signals of the same voltage value are passed to piezoelectric ceramic group A and piezoelectric ceramic group B, so that the two piezoelectric ceramic groups generate longitudinal vibrations at the same time. The vibrations generated by piezoelectric ceramic group A and the vibrations generated by piezoelectric ceramic group B are transmitted through the vibration transmission rod and superimposed. The superimposed vibrations are amplified and converted by the inclined slot amplitude rod and the double-cone amplitude rod, and are transmitted to both ends of the ultrasonic transducer. Rectangular trajectories are output at both ends of the ultrasonic transducer. The ninth excitation method: piezoelectric ceramic group A is excited at a frequency of 120kHz, and piezoelectric ceramic group A is excited at a frequency of 60kHz. At the same time, ultrasonic excitation signals of different voltage values are applied to piezoelectric ceramic group A and piezoelectric ceramic group B, so that the two piezoelectric ceramic groups generate longitudinal vibrations at the same time. The vibrations generated by piezoelectric ceramic group A and the vibrations generated by piezoelectric ceramic group B are transmitted through the vibration transmission rod and superimposed. The superimposed vibrations are amplified and converted by the inclined slot amplitude rod and the double cone amplitude rod, and transmitted to both ends of the ultrasonic transducer. The two ends of the ultrasonic transducer output rectangular tracks. The tenth excitation method: piezoelectric ceramic group A is excited at a frequency of 120 kHz, and piezoelectric ceramic group A is excited at a frequency of 60 kHz. At the same time, ultrasonic excitation signals of the same voltage value are applied to piezoelectric ceramic group A and piezoelectric ceramic group B, so that the two piezoelectric ceramic groups vibrate at the same time. The vibration generated by piezoelectric ceramic group A and the vibration generated by piezoelectric ceramic group B are transmitted through the vibration transmission rod and superimposed. The superimposed vibration is amplified and converted by the inclined slot amplitude rod and the double cone amplitude rod, and transmitted to both ends of the ultrasonic transducer, and a quadrilateral trajectory is output at both ends of the ultrasonic transducer.

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