Turnover device and vacuum coating machine

Abstract

The invention belongs to the technical field of vacuum machining, and discloses a turnover device and a vacuum coating machine, the turnover device comprises a turnover driving mechanism and a locking mechanism, and the turnover driving mechanism is configured to drive a rotating shaft of a jig to rotate; the locking mechanisms are arranged on the workpiece frame and correspond to the rotating shafts one to one, each locking mechanism comprises a locking state and an unlocking state, when the locking mechanisms are in the locking states, the rotating shafts and the workpiece frame are relatively static, and when the locking mechanisms are in the unlocking states, the rotating shafts can rotate relative to the workpiece frame. According to the turnover device and the vacuum coating machine, the jig can be automatically turned over, and the state is stable after the jig is turned over.

Description

Technical Field

[0001] The present invention relates to the field of vacuum processing technology, and in particular to a turning device and a vacuum coating machine. Background Art

[0002] In vacuum coating applications, workpieces sometimes need to be coated on both sides to achieve specific film functions. Traditional vacuum coating machines require opening the chamber and manually flipping the workpiece over after coating the first side before coating the second side. This coating process requires repeated vacuum pumping, severely impacting production efficiency. In some cases, a flipping mechanism based on a dial and lever can be used to automatically flip the workpiece, but this structure struggles to ensure the stability of the flipping effect, impacting the coating quality. Summary of the Invention

[0003] One of the purposes of the present invention is to provide a turning device that can automatically turn over a workpiece and lock the workpiece after it is turned into place to maintain its angular stability.

[0004] To achieve this object, the present invention adopts the following technical solutions:

[0005] The turning device is used to drive the fixture for fixing the workpiece to rotate, and multiple fixtures are rotatably arranged on the workpiece rack through the rotating shaft, including:

[0006] a flip driving mechanism, configured to drive the rotating shaft to rotate;

[0007] A locking mechanism is provided on the workpiece rack and corresponds one-to-one with the rotating shaft. The locking mechanism includes a locking state and an unlocking state. When the locking mechanism is in the locking state, the rotating shaft and the workpiece rack are relatively stationary. When the locking mechanism is in the unlocking state, the rotating shaft can rotate relative to the workpiece rack.

[0008] Preferably, the locking mechanism can be switched to the locking state when the jig is in a vertical state.

[0009] Preferably, the flipping drive mechanism includes a rotating component and a telescopic component, the rotating component includes a rotating power member, the telescopic component includes a telescopic power member and a connecting member, the telescopic power member is configured to drive the connecting member to extend and retract so that the connecting member is connected to or separated from the rotating shaft; the rotating power member is configured to drive the rotating shaft connected to the connecting member to rotate.

[0010] Preferably, the telescopic assembly also includes a rotating rod and a telescopic shaft, one end of the rotating rod is connected to the connecting piece, and the other end of the rotating rod is connected to the rotating power piece through a transmission assembly, the telescopic shaft is rotatably sleeved on the rotating rod and axially limited relative to the rotating rod, and the telescopic shaft is connected to the telescopic power piece.

[0011] Preferably, the transmission assembly includes a driving wheel arranged on the output shaft of the rotating power member, a driven wheel fixedly sleeved on the rotating rod, and a synchronous belt connecting the driving wheel and the driven wheel.

[0012] Preferably, the rotating assembly further comprises an encoder, which is arranged at an end of the rotating rod away from the connecting member and is communicatively connected to the rotating power member.

[0013] Preferably, the locking mechanism includes a positioning disc, an angle limiting ring and an elastic member, the angle limiting ring is fixed on the workpiece frame, the positioning disc is axially movably connected to the rotating shaft through the elastic member, one of the positioning disc and the angle limiting ring is circumferentially provided with a plurality of positioning blocks, and the other is provided with a plurality of positioning grooves corresponding to the positioning blocks, the elastic member enables the positioning blocks and the positioning grooves to maintain a tendency to plug in and fit, and the connecting member can be connected to the positioning disc to drive the positioning disc and the rotating shaft to rotate.

[0014] Preferably, the positioning grooves and the positioning blocks are both equidistantly arranged along the circumference of the connector or the positioning faceplate.

[0015] Preferably, the connector is plug-fitted into the positioning disc.

[0016] Preferably, a plurality of positioning pins are provided on one end surface of the connector and the positioning disc, and a plurality of positioning holes corresponding to the positioning pins are provided on the other end surface.

[0017] Another object of the present invention is to provide a vacuum coating machine, comprising a vacuum chamber, a workpiece rack and a jig, wherein the workpiece rack is rotatably arranged in the vacuum chamber, and a plurality of jigs are rotatably arranged on the workpiece rack through a rotating shaft, and further comprising any of the above-mentioned flipping devices, wherein the locking mechanism in the flipping device is arranged on the workpiece rack, the flipping drive mechanism in the flipping device is arranged on the side wall of the vacuum chamber, and the telescopic power member and the rotating power member are both located outside the vacuum chamber.

[0018] The beneficial effects of the present invention are as follows: The flipping device of the present invention, through the provided flipping drive mechanism, can drive the rotating axis of the jig to rotate, enabling automatic flipping of the jig without breaking the vacuum, thereby flipping the workpiece fixed to the jig. Furthermore, the provided locking mechanism ensures the stability of the jig state, improving coating accuracy. The vacuum coating machine of the present invention disposes the aforementioned flipping drive mechanism outside the vacuum chamber, which can reduce the space occupied by the vacuum chamber, effectively utilize the space within the vacuum chamber, and improve coating efficiency. BRIEF DESCRIPTION OF THE DRAWINGS

[0019] Figure 1 2 is a schematic structural diagram of the embodiment of the present invention when the flip drive mechanism is connected to the locking mechanism;

[0020] Figure 2 This is a schematic structural diagram of the embodiment of the present invention when the flip drive mechanism is disengaged from the locking mechanism;

[0021] Figure 3 is a structural schematic diagram of a flip drive mechanism in an embodiment of the present invention;

[0022] Figure 4 is a cross-sectional view of a flip drive mechanism according to an embodiment of the present invention;

[0023] Figure 5 is a cross-sectional view of a locking mechanism in an embodiment of the present invention;

[0024] Figure 6 1 is a front view of the locking mechanism in an embodiment of the present invention (behind the baffle).

[0025] In the picture:

[0026] 1. Flip drive mechanism; 11. Rotating assembly; 111. Rotating power member; 112. Encoder; 12. Telescopic assembly; 121. Telescopic power member; 122. Connecting member; 1221. Positioning pin; 123. Rotating rod; 124. Telescopic shaft; 125. Guide rod; 126. Limiting ring; 127. Connecting rod; 128. First connecting plate; 129. Second connecting plate; 1210. Limiting plate; 13. Transmission assembly; 131. Driving pulley; 132. Driven pulley; 133. Synchronous belt; 14. Connecting seat;

[0027] 2. Locking mechanism; 21. Positioning faceplate; 211. Positioning hole; 212. Positioning slot; 22. Angle limiting ring; 221. Positioning block; 23. Elastic member; 24. Bearing seat; 25. Drive shaft; 26. Baffle;

[0028] 3. Rotation axis;

[0029] 4. Fixtures;

[0030] 5. Vacuum chamber; 51. Mounting base. DETAILED DESCRIPTION

[0031] The present invention will be further described in detail below with reference to the accompanying drawings and examples. It will be understood that the specific embodiments described herein are intended only to illustrate the present invention and are not intended to limit the present invention. It should also be noted that, for ease of description, the accompanying drawings only illustrate portions relevant to the present invention, not all structures.

[0032] In the description of the present invention, unless otherwise expressly specified or limited, the terms "connected," "connected," and "fixed" should be understood in a broad sense. For example, they may refer to fixed connections, detachable connections, or integration; mechanical connections or electrical connections; direct connections or indirect connections through an intermediate medium; and internal communication between two components or interaction between two components. Those skilled in the art will understand the specific meanings of the above terms in the present invention in specific circumstances.

[0033] In the present invention, unless otherwise expressly specified or limited, a first feature being "above" or "below" a second feature may include the first and second features being in direct contact, or may include the first and second features being in contact not directly but through another feature between them. Furthermore, a first feature being "above," "above," and "above" a second feature may include the first feature being directly above or obliquely above the second feature, or may simply mean that the first feature is higher in level than the second feature. A first feature being "below," "below," and "below" a second feature may include the first feature being directly below or obliquely below the second feature, or may simply mean that the first feature is lower in level than the second feature.

[0034] In the description of this embodiment, the terms "upper," "lower," "left," "right," and other orientations or positional relationships are based on the orientations or positional relationships shown in the accompanying drawings and are intended solely for ease of description and simplified operation. They do not indicate or imply that the devices or components referred to must have, be constructed, or operate in a specific orientation. Therefore, they should not be construed as limitations on the present invention. Furthermore, the terms "first" and "second" are used solely for descriptive purposes and have no special meanings.

[0035] Before describing the flipping device in an embodiment of the present invention, a brief description of the structure of an existing vacuum coating machine is provided. The vacuum coating machine includes a vacuum chamber 5 capable of being evacuated to a vacuum state, and a workpiece holder rotatably disposed within the vacuum chamber 5. The workpiece holder is driven to rotate by a central rotating shaft. The workpiece holder comprises an inner ring, an outer ring, and a dividing rib. The inner ring secures the central rotating shaft. The outer ring is coaxially arranged with the inner ring. The dividing rib is Y-shaped, with one end of its bifurcation connected to the outer ring and the other end to the inner ring. The dividing rib divides the annular space between the inner and outer rings into multiple mounting areas. The mounting areas are axially symmetrical, within which a jig 4 is rotatably disposed. The shape of the jig 4 matches the shape of the mounting area in which it is located. The ends of the jig 4 connecting to the inner and outer rings are each provided with a rotating shaft 3 to achieve a rotational connection between the jig 4 and the workpiece holder. The rotating shaft 3, located at the end of the jig 4 away from the inner ring, extends through the outer ring. The workpiece to be coated can be inserted into a mounting hole provided in the jig 4. Rotating the jig 4 can achieve the workpiece flipping.

[0036] On this basis, reference Figures 1-6 As shown, the flipping device in this embodiment includes a flipping drive mechanism 1 and a locking mechanism 2, wherein the flipping drive mechanism 1 is used to drive the rotating shaft 3 of multiple jigs 4 to rotate, and multiple locking mechanisms 2 are arranged on the outer ring of the workpiece frame in a one-to-one correspondence with the jigs 4, which includes a locked state and an unlocked state. When the locking mechanism 2 is in the locked state, the rotating shaft 3 is locked, and the jig 4 is stationary relative to the workpiece frame. When the locking mechanism 2 is in the unlocked state, the rotating shaft 3 can rotate relative to the workpiece frame driven by the flipping drive mechanism 1, thereby realizing the flipping of the jig 4.

[0037] The above-mentioned flipping device is provided with a locking mechanism 2 corresponding to the jig 4 on the workpiece holder. During the workpiece coating process, the locking mechanism 2 is in a locked state, the rotating shaft 3 is locked, and the jig 4 is stationary relative to the workpiece holder, thereby maintaining the angular stability of the jig 4. After the coating of one side of the workpiece is completed, the locking mechanism 2 is converted to an unlocked state, and the flipping drive mechanism 1 drives the rotating shaft 3 to rotate 180°, thereby realizing the flipping of the jig 4 and the workpiece embedded in the jig 4, so as to coat the other side of the workpiece. The entire flipping device realizes automatic flipping of the workpiece, has high coating efficiency, and can keep the workpiece stable during coating, thereby improving the coating accuracy. It is worth emphasizing that the flipping device can also be applied to other processes that require flipping of the workpiece, such as double-sided etching.

[0038] refer to Figure 3 and Figure 4 As shown, in some embodiments, the flip drive mechanism 1 includes a connecting seat 14, a rotating component 11 and a telescopic component 12, wherein the connecting seat 14 serves as an installation base and is fixed on the side wall of the vacuum chamber 5, and the rotating component 11 and the telescopic component 12 are both arranged on the connecting seat 14. The telescopic component 12 is connected to or separated from the rotating shaft 3 by telescoping, and the rotating component 11 can drive the rotating shaft 3 connected to the telescopic component 12 to rotate.

[0039] Specifically, the rotating assembly 11 includes a rotating power member 111, and the telescopic assembly 12 includes a telescopic power member 121 and a connecting member 122. The telescopic power member 121 is configured to drive the connecting member 122 to extend and retract to achieve connection or disconnection between the connecting member 122 and the rotating shaft 3, while the rotating power member 111 is configured to drive the connecting member 122 to rotate to drive the rotating shaft 3 connected to the connecting member 122 to rotate. For example, the telescopic power member 121 is a cylinder, and the rotating power member 111 is a motor.

[0040] like Figure 2As shown, the telescopic assembly 12 also includes a rotating rod 123 and a telescopic shaft 124 coaxially arranged with the rotating shaft 3. The rotating rod 123 is inserted into the connecting seat 14, one end of which is connected to the connecting piece 122, and the other end is connected to the rotating power piece 111 through the transmission assembly 13. The telescopic shaft 124 is rotatably sleeved on the rotating rod 123 through a bearing. The telescopic shaft 124 is axially limited by the rotating rod 123. The telescopic shaft 124 is connected to the telescopic end of the telescopic power piece 121 away from one end of the connecting seat 14. When the output end of the rotating power piece 111 rotates, the rotating rod 123 drives the connecting piece 122 to rotate around its own axis. When the telescopic power piece 121 is extended, the telescopic shaft 124 can move in the direction away from the vacuum chamber 5, and the rotating rod 123 axially limited by the telescopic shaft 124 can move in the direction away from the vacuum chamber 5 together with the telescopic shaft 124, thereby making the connecting piece 122 away from the rotating shaft 3. Specifically, in order to reduce the space occupied by the flipping drive mechanism 1 in the length direction, the transmission assembly 13 is a pulley transmission structure, including a driving wheel 131 arranged on the output shaft of the rotating power part 111, a driven wheel 132 fixedly mounted on the rotating rod 123, and a synchronous belt 133 connecting the driving wheel 131 and the driven wheel 132.

[0041] More specifically, in order to achieve axial limitation between the rotating rod 123 and the telescopic shaft 124, the telescopic assembly 12 also includes a plurality of connecting rods 127 parallel to the rotating rod 123, and a first connecting plate 128 is fixedly provided at the end of the telescopic shaft 124 away from the vacuum chamber 5, and a second connecting plate 129 is rotatably provided at the end of the rotating rod 123 away from the vacuum chamber 5, and the two ends of the connecting rod 127 are respectively fixed to the first connecting plate 128 and the second connecting plate 129, the telescopic end of the telescopic power member 121 is fixed on the second connecting plate 129, and the rotating power member 111 is fixed on the first connecting plate 128. In order to make the telescopic shaft 124 extend and retract along a preset direction (the extension direction of the rotating shaft 3), the telescopic assembly 12 also includes a plurality of guide rods 125, which are fixed on the connecting seat 14 along the axial direction of the rotating shaft 3, and the guide rods 125 pass through the bearings provided on the first connecting plate 128 and are slidably connected to the first connecting plate 128. Under the guiding action of the guide rods 125, the first connecting plate 128 drives the telescopic shaft 124 and the rotating rod 124 to perform linear motion along the axial direction of the rotating shaft 3.

[0042] In some embodiments, to prevent the telescopic shaft 124 from over-extending, the telescopic assembly 12 further includes a limiting ring 126 and a limiting plate 1210. The limiting ring 126 is fixedly mounted on the guide rods 125, and the limiting plate 1210 is fixed to the ends of the guide rods 125 away from the connecting base 14. When the bearing on the first connecting plate 128 abuts the limiting ring 126 or the limiting plate 1210, the telescopic shaft 124 extends and retracts into position. It should be noted that the limiting plate 1210 does not interfere with the movement of the second connecting plate 129.

[0043] In some embodiments, the rotating assembly 11 further includes an encoder 112 in communication with the rotating power member 111. The encoder 112 is used to determine the rotation angle of the rotating rod 123, and thus determine the flip angle of the fixture 4. When the rotating shaft 3 rotates to the required angle, the rotating power member 111 stops rotating according to the instructions of the encoder 112. The encoder 112 can improve the rotation accuracy of the fixture 4, allowing the fixture 4 to remain at a preset angle. Specifically, the encoder 112 is disposed at the end of the rotating rod 123 away from the connecting member 122 via a coupling.

[0044] refer to Figure 5 and Figure 6 As shown, the locking mechanism 2 includes a positioning disc 21, an angle limiting ring 22 and an elastic member 23. The angle limiting ring 22 is fixed to the outer ring of the workpiece frame through a bearing seat 24 and its axis is coaxial with the corresponding rotating shaft 3. The positioning disc 21 is axially movably connected to the rotating shaft 3 through the elastic member 23. A plurality of positioning blocks 221 are circumferentially arranged on one of the positioning disc 21 and the angle limiting ring 22, and a plurality of positioning grooves 212 are arranged on the other corresponding to the positioning block 221. The elastic member 23 keeps the positioning block 221 and the positioning groove 212 in a tendency to be plugged in and fitted. The connecting member 122 can be connected to the positioning disc 21 under the action of the telescopic power member 121, thereby achieving an indirect connection with the rotating shaft 3, and the connecting member 122 can push the positioning disc 21 to move axially, so that the positioning block 221 disengages the positioning groove 212, the locking mechanism 2 is unlocked, and the rotating power member 111 drives the connecting member 122 and the positioning disc 21 to rotate together, thereby driving the rotating shaft 3 to rotate, during which the elastic member 23 is compressed; when the connecting member 122 moves away from the positioning disc 21 under the action of the telescopic power member 121, the positioning disc 21 returns to its original position under the elastic force of the elastic member 23, the positioning block 221 and the positioning groove 212 are plugged and matched again, and are restricted by the spring restoring force, the locking mechanism 2 is adjusted to the locked state, and the rotating shaft 3 is locked again. In other words, in addition to connecting or separating the telescopic shaft 124, the telescopic assembly 12 can also unlock the locking mechanism 2, without the need for an additional unlocking structure. For example, the elastic member 23 is a compression spring. In some embodiments, the positioning faceplate 21 is located within the angle limiting ring 22. In order to enable the positioning faceplate 21 to drive the rotating shaft 3 to rotate, in some embodiments, the rotating shaft 3 is configured to be elliptical, and the through hole provided on the positioning faceplate 21 for the rotating shaft 3 to pass through is also configured to be elliptical to adapt to the rotating shaft 3. Of course, in other embodiments, the rotating shaft 3 can also be configured to be any non-cylindrical shape.

[0045] In some embodiments, based on the existing rotating shaft 3 (cylindrical), in order to reduce the replacement of the rotating shaft, the locking mechanism 2 also includes a non-cylindrical transmission shaft 25, which can be coaxially fixed with the rotating shaft 3, and the positioning disc 21 is slidably mounted on the transmission shaft 25, thereby realizing an axially movable connection with the rotating shaft 3.

[0046] In some embodiments, in order to prevent the positioning disc 21 from detaching from the transmission shaft 25 under the action of the elastic member 23, a baffle 26 is further provided at the end of the transmission shaft 25 away from the rotating shaft 3. The size of the baffle 26 is larger than the through hole provided on the positioning disc 21 for the transmission shaft 25 to pass through.

[0047] In some embodiments, the transmission shaft 25 and the rotating shaft 3 are connected in a detachable manner including but not limited to snap-on connection to facilitate replacement of the entire locking mechanism 2 .

[0048] As for the connection method between the connector 122 and the positioning disc 21, the connector 122 and the positioning disc 21 can be connected in a manner including but not limited to plugging and magnetic attraction. In order to improve the consistency of the rotating shaft 3 with the rotating component 11 when rotating, in some embodiments, the connector 122 is plugged into the positioning disc 21. Of course, there are also many specific means of implementation of plugging. For example, a socket for inserting the positioning disc 21 can be provided on the connector 122, and in order to make the positioning disc 21 rotate with the connector 122, a limiting protrusion is provided on the periphery of the positioning disc 21, and the socket has the same shape as the periphery of the positioning disc 21 with the limiting protrusion; or a positioning pin 1221 is provided on one of the end faces of the connector 122 and the positioning disc 21, and a positioning hole corresponding to the positioning pin 1221 is provided on the other end face. One positioning pin 1221 and one positioning hole can be provided respectively. In this case, the positioning pin 1221 is eccentric to the rotating rod 123, and the positioning hole is also eccentric to the positioning disc 21; or, multiple positioning pins 1221 and multiple positioning holes can be provided.

[0049] In some embodiments, multiple positioning holes are provided on the positioning disc 21, multiple positioning pins 1221 are provided on the connecting member 122, multiple positioning blocks 221 are equidistantly provided on the inner periphery of the angle limiting ring 22, and multiple positioning grooves 212 and multiple positioning blocks 221 are provided on the outer periphery of the positioning disc 21 in a one-to-one correspondence.

[0050] It should be noted that during the evacuation of the vacuum chamber 5 before coating, the workpiece surface is prone to falling material (such as dust), which may affect the final coating quality. Therefore, during the evacuation, the jig 4 can be flipped from horizontal to vertical to prevent dust and other impurities from falling on the workpiece surface. Based on this, the locking mechanism 2 in this embodiment can lock the rotating shaft 3 whether the jig 4 is horizontal or vertical.

[0051] refer to Figure 6As shown, in some embodiments, four positioning grooves 212 are provided along the circumferential array of the positioning faceplate 21, and four positioning blocks 221 are provided along the circumference of the angle limiting ring 22. For every 90° rotation of the positioning faceplate 21, the positioning grooves 212 and the positioning blocks 221 become opposed to each other, and the positioning blocks 221 can be inserted into the positioning grooves 212 to achieve circumferential positioning between the positioning faceplate 21 and the positioning grooves 212. Four positioning holes 211 are also provided along the circumferential array of the positioning faceplate 21, and four corresponding positioning pins 1221 are provided on the connector 122. To reduce the difficulty of inserting the positioning pins 1221 into the positioning holes 211, the positioning holes 211 are connected to the outer circumferential surface of the positioning faceplate 21, and a tapered guide surface is provided on the side of the positioning hole 211 facing the positioning pins 1221.

[0052] In other embodiments, the flip drive mechanism includes a flip drive dial and a retractable lever. The flip drive dial is disposed on the rotating shaft and has multiple grooves disposed circumferentially thereon. The lever can be extended and retracted to engage and disengage the grooves. When the lever is inserted into the grooves, the flip drive dial can drive the rotating shaft 3 to rotate along with the workpiece holder's revolution. In this case, the locking mechanism 2 can utilize a linear drive structure that is the same as or different from the telescopic power element used in the telescopic assembly 12, and a limit pin connected to the linear drive structure. The rotating shaft 3 is provided with radially defined limit holes for the limit pins to insert. When the limit pins are inserted into the limit holes under the action of the linear drive structure, the rotating shaft 3 is locked in position.

[0053] Other embodiments of the present invention also provide a vacuum coating machine, comprising the aforementioned vacuum chamber 5, a workpiece holder, a central rotating shaft, a coating source, a jig 4, and a flipping device. A flipping drive mechanism 1, comprising a rotating assembly 11 and a telescopic assembly 12, is mounted on a mounting seat 51 protruding outward from the sidewall of the vacuum chamber 5 via a connecting seat 14. The connecting seat 14 is flange-connected to the mounting seat 51. To ensure the sealing of the vacuum chamber 5, a sealing ring is provided between the connecting seat 14 and the mounting seat 51. Furthermore, multiple first sealing rings are axially disposed between the telescopic shaft 124 and the rotating rod 123. The first sealing rings primarily withstand friction generated during rotation of the rotating rod 123 relative to the telescopic shaft 124. The telescopic shaft 124 is inserted into the connecting seat 14, and multiple second sealing rings are axially disposed between the telescopic shaft 124 and the connecting seat 14. The second sealing rings primarily withstand friction generated during extension and retraction of the telescopic shaft 124 relative to the connecting seat 14. The provision of the first and second sealing rings disperses wear on the sealing rings caused by rotation and telescopic motion, thereby increasing the service life of the sealing rings and reducing maintenance frequency. Furthermore, a linear bearing is provided between the telescopic shaft 124 and the connecting base 14 to reduce friction between the telescopic shaft 124 and the connecting base 14 during linear motion. With the exception of the connector 122 and the portion of the rotating rod 123 connected to the connector 122 located within the vacuum chamber 5, all other components of the flip drive mechanism 1 (including but not limited to the rotating power member 111 and the telescopic power member 121) are located outside the vacuum chamber 5. This arrangement minimizes the space occupied by the flip drive mechanism 1 within the vacuum chamber 5, resulting in high space utilization within the vacuum chamber 5 and improved coating efficiency.

[0054] When vacuum chamber 5 is evacuated, telescopic member 121 is first retracted, positioning pin 1221 is inserted into positioning hole 211, and positioning faceplate 21 and angle limit ring 22 are disengaged. Rotating member 111 then flips jig 4 to a vertical position. The telescopic member is then retracted, and the central rotary shaft rotates the workpiece holder. This process is then repeated to flip multiple jigs 4 to a vertical position using flip drive mechanism 1. When coating is required, each jig 4 is rotated to a horizontal position. After coating one side of the workpiece, it is flipped 180° to coat the other side.

[0055] Obviously, the above embodiments of the present invention are merely examples for the purpose of clearly illustrating the present invention and are not intended to limit the embodiments of the present invention. A person skilled in the art would be able to make various obvious changes, readjustments, and substitutions without departing from the scope of protection of the present invention. It is not necessary and impossible to enumerate all embodiments here. Any modifications, equivalent substitutions, and improvements made within the spirit and principles of the present invention shall be included within the scope of protection of the claims of the present invention.

Claims

1. A turning device for driving a jig (4) for fixing a workpiece to turn over, wherein the jig (4) is rotatably arranged on a workpiece holder via a rotating shaft (3), and is characterized in that: include: A flip driving mechanism (1) configured to drive the rotating shaft (3) to rotate; A locking mechanism (2) is provided on the workpiece rack and corresponds one-to-one with the rotating shaft (3). The locking mechanism (2) includes a locking state and an unlocking state. When the locking mechanism (2) is in the locking state, the rotating shaft (3) and the workpiece rack are relatively stationary. When the locking mechanism (2) is in the unlocking state, the rotating shaft (3) can rotate relative to the workpiece rack.

2. The turning device according to claim 1, characterized in that: The locking mechanism (2) can be switched to the locking state when the jig (4) is in a vertical state.

3. The turning device according to claim 1, characterized in that: The flip drive mechanism (1) comprises a rotating assembly (11) and a telescopic assembly (12); the telescopic assembly (12) comprises a telescopic power member (121) and a connecting member (122); the rotating assembly (11) comprises a rotating power member (111); the telescopic power member (121) is configured to drive the connecting member (122) to telescope so as to connect or disconnect the connecting member (122) from the rotating shaft (3); and the rotating power member (111) is configured to drive the rotating shaft (3) connected to the connecting member (122) to rotate.

4. The turning device according to claim 3, characterized in that: The telescopic assembly (12) further comprises a rotating rod (123) and a telescopic shaft (124); one end of the rotating rod (123) is connected to the connecting member (122); the other end of the rotating rod (123) is connected to the rotating power member (111) via the transmission assembly (13); the telescopic shaft (124) is rotatably sleeved on the rotating rod (123) and axially limited relative to the rotating rod (123); and the telescopic shaft (124) is connected to the telescopic power member (121).

5. The turning device according to claim 4, characterized in that: The transmission assembly (13) comprises a driving wheel (131) arranged on the output shaft of the rotating power member (111), a driven wheel (132) fixedly sleeved on the rotating rod (123), and a synchronous belt (133) connecting the driving wheel (131) and the driven wheel (132).

6. The turning device according to claim 4, characterized in that: The rotating assembly (11) further comprises an encoder (112), which is arranged at one end of the rotating rod (123) away from the connecting member (122) and is communicatively connected to the rotating power member (111).

7. The turning device according to claim 3, characterized in that: The locking mechanism (2) comprises a positioning faceplate (21), an angle limiting ring (22) and an elastic member (23); the angle limiting ring (22) is fixed on the workpiece frame; the positioning faceplate (21) is axially movably connected to the rotating shaft (3) through the elastic member (23); a plurality of positioning blocks (221) are circumferentially arranged on one of the positioning faceplate (21) and the angle limiting ring (22); a plurality of positioning grooves (212) are correspondingly arranged on the other of the positioning faceplate (21), the elastic member (23) enables the positioning blocks (221) and the positioning grooves (212) to maintain a plug-fitting tendency; the connecting member (122) can be connected to the positioning faceplate (21) to drive the positioning faceplate (21) and the rotating shaft (3) to rotate.

8. The turning device according to claim 7, characterized in that: The positioning grooves (212) and the positioning blocks (221) are both arranged at equal distances along the circumference of the connecting member (122) or the positioning faceplate (21).

9. The turning device according to claim 7, characterized in that: The connecting piece (122) is plug-fitted to the positioning disc (21).

10. The turning device according to claim 9, characterized in that: A plurality of positioning pins (1221) are provided on one end surface of the connecting member (122) and the positioning disc (21), and a plurality of positioning holes (211) corresponding to the positioning pins (1221) are provided on the other end surface.

11. A vacuum coating machine, comprising a vacuum chamber (5), a workpiece rack and a fixture (4), wherein the workpiece rack is rotatably arranged in the vacuum chamber (5), and a plurality of the fixtures (4) are rotatably arranged on the workpiece rack via the rotating shaft (3), characterized in that: It also includes a flipping device as described in any one of claims 3 to 10, wherein the locking mechanism (2) in the flipping device is arranged on the workpiece rack, the flipping drive mechanism (1) in the flipping device is arranged on the side wall of the vacuum chamber (5), and the telescopic power member (121) and the rotating power member (111) are both installed outside the vacuum chamber (5).

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