Detection system and detection method for intelligent sensor and intelligent sensor

Through a detection system of multi-dimensional adjustment platform and laser collimator combined with a blackbody radiation source, the problem of poor consistency and repeatability of infrared sensor detection results is solved, efficient and accurate measurement of multiple technical indicators is achieved, and the application reliability and adaptability of infrared sensors is improved.

CN120445429AActive Publication Date: 2025-08-08BEIJING CHIPSEA FUTURE OPTOELECTRONICS TECH CO LTD
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Patent Information

Application Number
CN202510532885.8
Authority / Receiving Office
CN · China
Patent Type
Applications(China)
Current Assignee / Owner
Filing Date
2025-04-25
Publication Date
2025-08-08
Estimated Expiration
2045-04-25

AI Technical Summary

Technical Problem

The existing technology lacks efficient and low-cost infrared sensor detection solutions, resulting in poor consistency and repeatability of detection results, affecting its application in the fields of Internet of Things, intelligent security, etc.

Method used

A detection system that combines a laser collimator and a blackbody radiation source is used to accurately measure multiple technical indicators of infrared sensors, such as viewing axis, field angle, response rate, noise equivalent temperature difference and edge frequency through multi-dimensional adjustment of the platform, combined with laser collimator and chopper.

Benefits of technology

It realizes high-precision, reliability and consistency detection of infrared sensors, simplifies the detection process, improves operational convenience and detection efficiency, and improves product consistency and competitiveness.

✦ Generated by Eureka AI based on patent content.

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Abstract

The invention provides a detection system and a detection method for an intelligent sensor and the intelligent sensor. The detection system comprises: a multi-dimensional adjustment platform having a bearing surface corresponding to a mechanical reference surface of an intelligent sensor to be detected; the laser collimator is arranged on the multi-dimensional adjusting platform, and an angle between a light path of the laser collimator and the bearing surface is known; the blackbody radiation source and the multi-dimensional adjusting platform are separately arranged; the oscilloscope is used for measuring output signals of the sensor, the multi-dimensional adjusting platform can respectively move along a first axial direction and a second axial direction and can respectively rotate around the first axial direction and the second axial direction, and the first axial direction and the second axial direction are vertical to a light path of the laser collimator. The detection system can directly measure a plurality of technical indexes of the sensor, including at least one of a sensor visual axis, a field angle, a response rate, a noise equivalent temperature difference, an upper side frequency and a lower side frequency, and provides an efficient, reliable and consistent detection means for sensor admission inspection, manufacturing and product delivery inspection.
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Description

Technical Field

[0001] The present application relates to the field of smart sensors, and more specifically, to smart sensors, detection systems and detection methods for smart sensors. Background Art

[0002] Infrared sensors are the core components of infrared thermal sensing and can be understood as single-pixel infrared imaging detectors. They are primarily used in temperature detection, target detection, and other fields. In temperature detection applications, infrared sensors, with their non-contact detection and strong environmental adaptability, are widely used in the Internet of Things (IoT) for environmental monitoring, intelligent security, and environmental automation. In target detection applications, they primarily serve as the primary sensor for infrared terminal guidance, making the testing of infrared terminal guidance seekers crucial. Currently, there is a lack of testing solutions tailored to the required indicators of infrared sensors. Users must test different parameters on multiple instruments, resulting in high testing costs, complex and inefficient operations, and inconsistent and repeatable test results. These issues with infrared sensor test results hinder their intelligent application as smart sensors in various fields, including IoT systems, intelligent systems, and precision guidance. Summary of the Invention

[0003] The purpose of this application is to provide a detection system for an intelligent sensor that can directly measure key parameters of an infrared intelligent sensor, such as the response rate, tangential angle, radial angle, tangential field of view, radial field of view, noise equivalent temperature difference, upper sideband and lower sideband, so as to solve at least one of the problems existing in the prior art.

[0004] To achieve the above objectives, this application adopts the following technical solutions:

[0005] In a first aspect of the present application, an intelligent sensor detection system is provided, the detection system comprising:

[0006] A multi-dimensional adjustment platform having a bearing surface corresponding to the mechanical reference surface of the intelligent sensor to be tested;

[0007] A laser collimator is provided on the multi-dimensional adjustment platform, wherein the angle between the optical path of the laser collimator and the bearing surface is known;

[0008] a blackbody radiation source disposed separately from the multi-dimensional adjustment platform; and

[0009] An oscilloscope for measuring the sensor output signal,

[0010] The multi-dimensional adjustment platform is capable of displacement along a first axial direction and a second axial direction, and of rotation about a first axis and a second axis, respectively. The first axial direction is perpendicular to the second axial direction, and the optical path of the laser collimator is perpendicular to the first axial direction and the second axial direction.

[0011] Preferably, the detection system further comprises an aperture arranged between the multi-dimensional adjustment platform and the blackbody radiation source.

[0012] Preferably, the detection system further comprises a chopping component located between the multi-dimensional adjustment platform and the blackbody radiation source.

[0013] In a second aspect of the present application, a smart sensor detection method is provided. The detection method utilizes the detection system for the smart sensor as described above, and includes the following steps:

[0014] Fixing the intelligent sensor to be tested on the multi-dimensional adjustment platform, with the mechanical reference surface of the sensor corresponding to the bearing surface;

[0015] Using the laser collimator, the initial position of the multi-dimensional adjustment platform is determined by adjusting the multi-dimensional adjustment platform;

[0016] Controlling the temperature of the blackbody radiation source to output infrared radiation;

[0017] The multi-dimensional adjustment platform is adjusted to measure and record the output signal of the sensor in response to the infrared radiation, and the technical indicators of the sensor are obtained according to the output signal, wherein the technical indicators include at least one of the sensor's visual axis angle, field of view angle, response rate, noise equivalent temperature difference, upper sideband, and lower sideband.

[0018] Preferably, the step of detecting the sensor visual axis by the detection system comprises:

[0019] The multi-dimensional adjustment platform is adjusted to drive the sensor to rotate around the first axis from an initial position, and the rotation angle corresponding to the maximum value of the sensor output signal measured by the oscilloscope is a first angle;

[0020] The multi-dimensional adjustment platform is adjusted to drive the sensor to rotate around the second axis from an initial position, and the rotation angle corresponding to the maximum value of the sensor output signal measured by the oscilloscope is the second included angle;

[0021] The sensor boresight is determined based on the first angle and the second angle.

[0022] Preferably, the step of the detection system detecting the field of view angle of the sensor at the first predetermined ratio comprises:

[0023] Adjusting the multi-dimensional adjustment platform to rotate around the first axis, recording two positions where the oscilloscope measurement signal reaches a first predetermined proportional value of the maximum value, where the rotation angle between the two positions is a first field of view angle;

[0024] The multi-dimensional adjustment platform is adjusted to rotate around the second axis, and two positions corresponding to when the oscilloscope measurement signal reaches a first predetermined proportional value of the maximum value are recorded, and the rotation angle therebetween is the second field of view angle.

[0025] Preferably, the step of detecting the response rate of the detection system includes:

[0026] Aligning the visual axis of the sensor with the blackbody target surface;

[0027] Set the frequency of the chopper, which is located in the optical path of the sensor's boresight;

[0028] Adjusting the temperature of the blackbody radiation source to a first temperature T1 and reading a first peak voltage V1 of a measurement signal from an oscilloscope;

[0029] Adjusting the temperature of the blackbody radiation source to a second temperature T2, and reading a second peak voltage V2 of the oscilloscope measurement signal;

[0030] according to The response rate R of the sensor in the temperature range T1-T2 at the frequency is calculated and obtained in units of mV / K.

[0031] Preferably, the step of detecting the sensor noise equivalent temperature difference by the detection system includes:

[0032] Aligning the visual axis of the sensor with the blackbody target surface;

[0033] Adjusting the temperature of the blackbody radiation source to a third temperature T3, reading a first root mean square (RMS) value of the oscilloscope noise VRMS1 and a third peak voltage V3 of the oscilloscope measurement signal;

[0034] Adjusting the temperature of the blackbody radiation source to a fourth temperature T4, reading a second noise root mean square VRMS2 of the oscilloscope and a fourth peak voltage V4 of the oscilloscope measurement signal;

[0035] according to The noise equivalent temperature difference NETD of the sensor in the temperature range T3-T4 is calculated and obtained in mK.

[0036] Preferably, the step of the detection system detecting the upper sideband and the lower sideband of the sensor at the second predetermined ratio comprises:

[0037] Aligning the visual axis of the sensor with the blackbody target surface;

[0038] Adjust the frequency of the chopper, which is located in the optical path of the sensor's optical axis.

[0039] The chopper output frequency is reduced, and the chopper frequency when the oscilloscope measures the signal peak value as low as the second predetermined proportional value of the maximum value of the signal during the frequency reduction process is the upper side frequency of the sensor;

[0040] Increase the chopper output frequency. The chopper frequency when the oscilloscope measures the signal peak value as low as the second predetermined proportional value of the maximum value of the measured signal during the frequency increase process is the sensor lower side frequency.

[0041] In a third aspect of the present application, an intelligent sensor is provided, wherein the technical indicators of the intelligent sensor are detected using the detection method described above, and the technical indicators include at least one of the sensor's visual axis, field of view angle, response rate, noise equivalent temperature difference, upper sideband, and lower sideband.

[0042] The beneficial effects of this application are as follows:

[0043] This application provides a detection system for infrared smart sensors that can accurately detect multiple technical indicators of infrared sensors, including response rate, angle, field of view, noise-equivalent temperature difference, upper sideband, and lower sideband. This covers all aspects of infrared sensor performance evaluation and provides users with a comprehensive testing solution. The detection system and method of this application provide reliable detection methods for infrared sensor entry inspection, production manufacturing, and product factory inspection, improving product consistency and reliability, thereby saving costs for enterprises and enhancing the competitiveness of infrared sensor products.

[0044] This application achieves high-precision detection of infrared sensor technical indicators by simultaneously placing a laser collimator and an infrared sensor under test on a multi-dimensional adjustment platform, using the multi-dimensional adjustment platform and the laser collimator to precisely control the angle of the infrared sensor under test relative to a blackbody radiation source, and using an oscilloscope to accurately measure the sensing output signal of the infrared sensor. The test results are repeatable, consistent, and highly reliable. Such high-precision and reliable measurement results are crucial for accurately characterizing the technical indicators of infrared smart sensors and thus improving their adaptability to complex scenarios in practical applications.

[0045] The detection system for infrared intelligent sensors of the present application integrates multiple detection functions into one, and users do not need to measure different parameters on multiple instruments, which greatly simplifies the detection process and improves the convenience of operation.

[0046] The infrared smart sensor detection system of this application provides a bearing surface corresponding to the mechanical reference plane of the smart sensor under test on a multi-dimensional adjustment platform, and aligns the optical path of the laser collimator with the bearing surface at a known angle. This allows the laser collimator to conveniently determine the initial test position of the infrared sensor under test and accurately measure the angle-related technical indicators of the infrared sensor under test. This makes the application flexible and applicable to infrared sensors of different types and specifications.

[0047] This application adopts an integrated detection system. The intelligent sensor to be tested can complete the test of all technical indicators by installing it once on the multi-dimensional adjustment platform, which can significantly shorten the detection time and improve the detection efficiency. BRIEF DESCRIPTION OF THE DRAWINGS

[0048] The specific implementation methods of this application are further described in detail below with reference to the accompanying drawings.

[0049] Figure 1 A schematic diagram of an intelligent detection system of an infrared sensor provided in an embodiment of the present application is shown.

[0050] Figure 2 A schematic diagram showing the first axial direction and the second axial direction in this embodiment is shown.

[0051] Figure 3 A schematic diagram of simulating a target to be observed in this embodiment is shown.

[0052] Figure 4 FIG. 4 shows a schematic structural diagram of the chopper in this embodiment. DETAILED DESCRIPTION

[0053] To more clearly illustrate the present application, the present application is further described below in conjunction with the embodiments and drawings. Similar components in the drawings are represented by the same reference numerals. Those skilled in the art should understand that the specific description below is illustrative rather than restrictive and should not be used to limit the scope of protection of this application.

[0054] Definition of terms

[0055] The sensor's mechanical reference plane is a marking attribute of the infrared smart sensor to be tested (referred to as the smart sensor to be tested or sensor for short). It refers to a specific plane on which the sensor is precisely machined for positioning or installation. Its geometric accuracy (such as flatness and perpendicularity) meets the design requirements. It is used to provide a physical reference for the sensor's boresight positioning and ensure that the detection direction is accurately aligned with the external environment (such as the mounting bracket or device housing).

[0056] The sensor visual axis (also called the sensor optical axis) is a marking attribute of the sensor. In this application, the direction of the sensor visual axis relative to the mechanical reference plane angle is determined using the detection system and detection method provided in this application.

[0057] The initial position of the multi-dimensional adjustment platform is adjusted, and the detection system determined by the laser collimator according to the alignment mark detects the starting position of the angle of the intelligent sensor to be measured.

[0058] The first axial direction and the second axial direction, in this application, the first axial direction is, for example, Figure 2 The direction shown by the X-axis is also called the horizontal direction. Rotation around the first axis is also called vertical rotation or tangential rotation. The second axis is for example the Figure 2 The Y-axis is also called the tangential direction, and the rotation around the second axis is also called the horizontal rotation or lateral rotation. Figure 2 The Z axis is perpendicular to the plane formed by the X and Y axes.

[0059] Sensor angle. In this application, the rotation angle corresponding to the maximum value of the oscilloscope measurement signal (also called the tangential maximum value) when the multi-dimensional adjustment platform rotates from the initial position around the first axis is called the first angle (also called the tangential angle); the rotation angle corresponding to the maximum value of the oscilloscope measurement signal (also called the lateral maximum value) when the multi-dimensional adjustment platform rotates from the initial position around the second axis is called the second angle (also called the lateral angle). The angle of the laser collimator with respect to the supporting surface of the multi-dimensional adjustment platform is known. Based on the measured first and second angles, the angle of the sensor's visual axis with respect to the mechanical reference plane can be determined, or the angle of the sensor's visual axis with respect to the mechanical reference plane represented by the first and second angles can be determined.

[0060] The sensor's field of view angle. In this application, the angle between the two positions corresponding to when the oscilloscope measurement signal reaches a set ratio of the maximum tangential measurement signal when the multi-dimensional adjustment platform rotates about the first axis is called the first field of view angle (also called the tangential field of view angle). The angle between the two positions corresponding to when the oscilloscope measurement signal reaches a set ratio of the maximum lateral measurement signal when the multi-dimensional adjustment platform rotates about the second axis is called the second field of view angle (also called the lateral field of view angle). The field of view angle value is less than 180°. The size of the field of view angle is related to the set ratio and is the angle range under the set ratio conditions.

[0061] The smart sensor of the present application can be a temperature sensor or imaging sensor used for temperature detection or target detection in the field of Internet of Things technology, and can also be a target detector used as the main sensor device of infrared terminal guidance.

[0062] The detection system and detection method provided by the present application have a multi-dimensional adjustment platform having a bearing surface corresponding to the mechanical reference surface of the intelligent sensor to be tested. The angle of the output light beam of the laser collimator arranged on the multi-dimensional adjustment platform relative to the bearing surface is determined based on the design angle of the visual axis of the intelligent sensor to be tested and its mechanical reference surface. When the intelligent sensor to be tested is mounted on the bearing surface of the multi-dimensional adjustment platform, the output light beam of the laser collimator is parallel to the design visual axis of the intelligent sensor to be tested. The laser collimator is used to determine the initial position of the sensor detection, which provides consistency and repeatability for the detection of the sensor technical indicators. The sensor visual axis can be accurately determined, and the various technical indicators of the sensor can be reproducibly measured and accurately characterized, thereby effectively improving the sensing accuracy of the sensor and expanding and improving the adaptability and range of the infrared sensor as an intelligent sensor to complex scenes.

[0063] like Figure 1As shown, one embodiment of the present application provides a detection system 100 for infrared smart sensors, comprising: an optical stabilization platform 110; a multi-dimensional adjustment platform 120; the adjustment platform has a bearing surface 121 corresponding to the mechanical reference surface of the smart sensor 150 to be tested; a laser collimator 130 arranged on the platform, the angle between the optical path 131 of the laser collimator 130 and the bearing surface 121 is known, which is the design angle between the visual axis of the smart sensor to be tested and its mechanical reference surface; a blackbody radiation source 140 provided separately from the adjustment platform, the radiation source can output infrared radiation at a set temperature; and an oscilloscope 160 for measuring the output signal of the sensor. The smart sensor 150 to be tested is installed with its mechanical reference surface relative to the bearing surface 121, so that the output light beam of the laser collimator is parallel to the design position of the visual axis of the smart sensor to be tested. The multi-dimensional adjustment platform 120 can be four-dimensional, five-dimensional or six-dimensional, etc., and is not limited here. For example, as Figure 2 As shown, the adjustment platform 120 of this embodiment can be displaced along the X axis and along the Y axis, and can be rotated around the X axis and around the Y axis, respectively. The X axis and the Y axis are perpendicular to each other and are perpendicular to the optical path 131 of the laser collimator. It should be noted that, Figure 2 In the figure, a smart sensor 150 to be tested is installed on the top of the bearing surface 121 , and the mechanical reference surface of the sensor 150 is installed corresponding to the bearing surface 121 or is installed corresponding to the bearing surface 121 through a sensor tooling 151 .

[0064] In one possible implementation, the detection system also includes a collimation fixture (not shown) for fixing the smart sensor to be tested. The laser collimator is configured so that the laser output light path is parallel to the designed visual axis of the infrared sensor to be tested, which is fixed on the adjustment platform. By controlling the multi-dimensional adjustment platform to drive the infrared sensor to be tested to displace in a first direction, displace in a second direction, rotate around a first axis, or rotate around a second axis, the laser collimator and the collimation fixture are coordinated so that the visual axis of the infrared sensor to be tested in the initial position is aligned with the blackbody radiation source. The laser collimator combined with the collimation fixture determines the initial position of the smart sensor to be tested, which provides a basis for the consistency of the detection results for repeated measurements of the smart sensor to be tested, and can improve the accuracy and reliability of the detection. The multi-dimensional adjustment platform can drive the smart sensor to be tested to displace in different directions and rotate around different axes. This flexibility enables the detection system to adapt to infrared sensors to be tested of different shapes and sizes, making the detection system widely applicable.

[0065] In one possible implementation, Figure 3As shown, the detection system 100 also includes an aperture 170 disposed between the multi-dimensional adjustment platform 120 and the blackbody radiation source 140. The blackbody radiation source 140 and the aperture 6 are combined to simulate an observation target 190 for the intelligent sensor under test. Using the blackbody radiation source and the aperture to simulate the observation target 190 allows for more flexible configuration of the blackbody radiation source's target surface, enabling simulation of observation targets 190 with a variety of different characteristics. This provides redundancy for subsequent detection system upgrades. For example, simulating observation targets 190 of varying sizes can be accomplished simply by changing the size of the aperture 170.

[0066] In one possible implementation, an alignment mark is provided on the aperture. The laser collimator's laser beam is aligned with the alignment mark by adjusting a multi-dimensional adjustment platform. The position of each dimension of the adjustment platform at this point represents the initial position for detecting the sensor's angle. The sensor angle is a technical indicator used to characterize the sensor's visual axis and is an absolute angle. This application utilizes a laser collimator to determine the initial detection position. By adjusting the multi-dimensional adjustment platform, the intelligent sensor under test is rotated and the amplitude of the sensed signal displayed on an oscilloscope is observed and recorded. The sensor's lateral and tangential angles are determined based on the rotation angle at which the sensor's sensed signal reaches its maximum value, thereby providing a representation of the sensor's visual axis's angle relative to the design direction. The angle between the laser collimator's output beam and the supporting surface can also be used to determine the visual axis's angle relative to a mechanical reference plane. As another possible implementation, the alignment mark can be placed on a blackbody radiation source. Compared to prior art methods that only indicate the sensor's visual axis by indicating that the error between the visual axis and the reference plane is less than a certain value (e.g., 0.1°), the detection system of this application provides a method that can accurately detect and annotate the sensor's visual axis with a specific value.

[0067] In one possible implementation, Figure 1 The detection system 100 also includes a chopper assembly 180, comprising a chopper 181 and a chopper driver 182, located between the multi-dimensional adjustment platform 120 and the blackbody radiation source 140. The chopper assembly can modulate the frequency of infrared radiation from the blackbody radiation source 140, thereby outputting modulated infrared radiation at a set frequency to the smart sensor 150 under test. The modulated infrared radiation can be used to detect the response characteristics of the infrared sensor. Because the infrared radiation is precisely modulated, the infrared sensor's response to infrared radiation of different frequencies and intensities can be more easily observed and measured, which is used to detect the upper sideband and down-conversion of the smart sensor 150 under test, thereby improving detection efficiency and accuracy.

[0068] During the technical performance testing of infrared sensors, modulated infrared radiation can be used as a standard signal input. By comparing the infrared sensor's response to the modulated signal with the designed response, the sensor's performance can be more accurately evaluated and potential problems or defects can be identified.

[0069] Another embodiment of the present application provides a detection method for detecting an infrared smart sensor using the above-mentioned detection system. The detection method includes the following steps: Step S110, fixing the infrared smart sensor to be tested on a multi-dimensional adjustment platform, with the mechanical reference surface of the sensor corresponding to the bearing surface; Step S120, using a laser collimator to determine the initial position of the multi-dimensional adjustment platform by adjusting the multi-dimensional adjustment platform; Step S130, controlling the temperature of a blackbody radiation source to output infrared radiation; adjusting the multi-dimensional adjustment platform, measuring and recording a sensing signal of the sensor in response to the infrared radiation, and obtaining technical indicators of the sensor based on the sensing signal, the technical indicators including at least one of the sensor's visual axis angle, field of view angle, response rate, noise equivalent temperature difference, upper sideband, and lower sideband.

[0070] In one possible implementation, the steps of detecting the sensor's visual axis by the detection system include: step S210, adjusting the multi-dimensional adjustment platform to drive the sensor to rotate about a first axis from an initial position, wherein the rotation angle corresponding to the maximum value of the sensor output signal measured by the oscilloscope is a first angle; step S220, adjusting the multi-dimensional adjustment platform to drive the sensor to rotate about a second axis from the initial position, wherein the rotation angle corresponding to the maximum value of the sensor output signal measured by the oscilloscope is a second angle; and step S230, determining the sensor's visual axis based on the first angle and the second angle. For example, the first angle and the second angle can be used as angle representations of the sensor's visual axis relative to the design visual axis direction; or the angle representation of the visual axis of the intelligent sensor to be tested relative to the mechanical reference plane can be further determined based on the angular relationship between the output beam of the laser collimator and the supporting surface.

[0071] In one possible implementation, the step of the detection system detecting the field of view angle of the sensor at a first predetermined ratio includes: step S310, adjusting the multi-dimensional adjustment platform to rotate around the first axis, recording the two positions where the oscilloscope measurement signal reaches the first predetermined ratio value of the maximum value, and the rotation angle between them is the first field of view angle; step S320, adjusting the multi-dimensional adjustment platform to rotate around the second axis, recording the two positions corresponding to the first predetermined ratio value where the oscilloscope measurement signal reaches the maximum value, and the rotation angle between them is the second field of view angle. According to the sensor field of view angle detection method of the present invention, the relative field of view angle range under different set ratio values can be obtained. The present application uses an oscilloscope to observe the output value of the sensor in response to the blackbody radiation output sensing signal, and can obtain the corresponding relationship between the output value and the change of the sensor rotation angle.

[0072] Existing methods that use imaging as a method for detecting field of view angles suffer from inaccurate detection results and a failure to determine the correspondence between sensor intensity and angle, limiting the use of infrared sensors as smart sensors. The infrared sensor detection system and method of this application can detect field of view angles at various set ratios, providing high-precision and rich technical indicator data. This opens the possibility of designing adjustable field of view angles for infrared smart sensors in IoT node networking applications.

[0073] In one possible implementation, the steps of detecting the response rate of the detection system include: step S410, aligning the visual axis of the sensor with the blackbody target surface; step S420, setting the chopper frequency and waiting for the frequency to stabilize, the chopper being located between the sensor and the blackbody radiation source; step S430, adjusting the temperature of the blackbody radiation source to a first temperature T1, waiting for the temperature to stabilize, and reading the first peak voltage V1 of the oscilloscope measurement signal; step S440, adjusting the temperature of the blackbody radiation source to a second temperature T2, waiting for the temperature to stabilize, and reading the second peak voltage V2 of the oscilloscope measurement signal; step S450, according to The response rate R of the sensor in the temperature range T1-T2 at this frequency is calculated in mV / K. Step S460: Change the chopper frequency and the first and second temperatures, read the peak voltage of the signal measured by the oscilloscope under different conditions, and the response rate of the intelligent sensor to be tested at different frequencies and different temperature ranges can be obtained. Utilizing the infrared sensor detection system and detection method of the present application, the response rates of different temperature ranges at various frequencies can be detected, providing high-precision and rich technical indicator data, and providing a data reference for the application of dynamic temperature compensation algorithms in data processing of infrared intelligent sensors to correct for the effects of ambient temperature.

[0074] In one possible implementation, the step of the detection system detecting the noise equivalent temperature difference of the sensor includes: step S510, aligning the visual axis of the sensor with the blackbody target surface; step S520, setting the chopper frequency and waiting for the frequency to stabilize; step S530, adjusting the temperature of the blackbody radiation source to a third temperature T3, and after the blackbody temperature reaches the third temperature, reading the first root mean square (RMS) of the oscilloscope noise VRMS1 and the third peak voltage V3 of the oscilloscope measurement signal; step S540, adjusting the temperature of the blackbody radiation source to a fourth temperature T4, and after the blackbody temperature reaches the fourth temperature, reading the second root mean square (RMS) of the oscilloscope noise VRMS2 and the fourth peak voltage V4 of the oscilloscope measurement signal;

[0075] according to Calculate the noise equivalent temperature difference NETD of the smart sensor under test in the temperature range T3-T4, in mK.

[0076] In one possible implementation, the steps of the detection system detecting the upper sidefrequency and the lower sidefrequency of the sensor at a second predetermined ratio include: step S610, aligning the visual axis of the sensor with a blackbody target surface; step S620, adjusting the chopper frequency and waiting for the frequency to stabilize, the chopper being located in the optical path where the visual axis of the sensor is located; step S630, adjusting the multi-dimensional adjustment platform and observing that the measurement signal output of the oscilloscope reaches a maximum value; step S640, reducing the chopper output frequency, and the chopper frequency when the oscilloscope measurement signal peak value is lower than the second predetermined ratio value of the maximum value is the upper sidefrequency of the sensor; step S650, increasing the chopper output frequency, and the chopper frequency when the oscilloscope measurement signal peak value is lower than the second predetermined ratio value of the maximum value is the lower sidefrequency of the sensor.

[0077] The infrared intelligent sensor detection system and method disclosed in this application can measure the sensor's boresight, field of view, responsivity, noise-equivalent temperature difference, upper sideband, and lower sideband within a single detection system. This not only avoids repeated fixed installation, saving detection time and improving efficiency, but also ensures the consistency of measurement results. By providing a laser collimator, the reproducibility of measurement results during repeated measurements is guaranteed, ensuring the accuracy of the sensor's technical specifications.

[0078] Another embodiment of the present application provides an intelligent sensor, which is an infrared intelligent sensor, more specifically, a temperature sensor or an image sensor. The technical indicators of the sensor are detected using the above detection system and detection method. The technical indicators include at least one of the sensor's visual axis, field of view angle, response rate, noise equivalent temperature difference, upper sideband, and lower sideband, wherein the sensor's visual axis is an absolute angle value; the sensor's field of view angle is a relative field of view angle range under at least one set of, for example, a given ratio value; the response rate is the response rate for at least one set of given frequencies and given temperature ranges; the noise equivalent temperature difference is a noise equivalent temperature difference under at least one set of, for example, a given frequency and given temperature range; and the upper sideband and lower sideband are the upper sideband and lower sideband under at least one set of given ratio values. The infrared sensor characterized by the technical indicators detected by the present application expands the application scenarios of the intelligent sensor and provides a benchmark and reference for the calibration, data processing, and application upgrade of the intelligent sensor in application.

[0079] The infrared intelligent sensor detection system and detection method of the present application are described in detail below with reference to the accompanying drawings and examples. It should be understood that the drawings and numerical values disclosed in the present application are for illustration only and should not be construed as limiting the scope of protection of the present application.

[0080] In a specific example, the detection system of the infrared sensor in this application is set on the optical stabilization platform 110, such as Figure 1 As shown:

[0081] The working environment and target characteristics of the infrared sensor detection system are as follows:

[0082] Ambient temperature: 20℃±5℃;

[0083] Relative humidity: ≤80%;

[0084] Power supply voltage: 220V ± 10V;

[0085] Observation target size: 2m×3m (@150m);

[0086] Temperature difference between observation target and environment: 15℃~25℃.

[0087] Among them, the optical stabilization platform 110 is selected as follows:

[0088] In this example, the infrared sensor under test observes a 2m x 3m target 150m away, with a designed field of view of 0.8°. Based on a 10mm x 10mm blackbody target, the full field of view imaging distance is 0.7m. Therefore, the optical platform's long side must be greater than 0.7m. Considering the equipment installation space, a 1.2m long and 1m wide optical stabilization platform is recommended.

[0089] like Figure 3 As shown, the selection of the blackbody radiation source 140 is as follows:

[0090] According to the above calculations, the blackbody radiation source 140 uses a blackbody target surface, and its design requires 10mm×10mm. Since the smallest target surface of the commonly used blackbody on the market is 80mm×80mm, a combination of an 80mm×80mm target surface blackbody and a 10mm×10mm aperture 170 is used to simulate the observation target 190. At the same time, redundancy is reserved for subsequent system upgrades, that is, to simulate targets of different sizes, only the size of the aperture 170 needs to be modified.

[0091] The maximum temperature difference between the observation target and the environment is 25°C. The ambient temperature is 25°C ± 5°C, and the maximum value is 30°C. The highest simulated blackbody temperature is 55°C. Therefore, a blackbody radiation source in the range of room temperature to 80°C can meet the system requirements.

[0092] Among them, such as Figure 4 As shown, the chopper 181 is selected as follows:

[0093] From the upper sideband of 30±15Hz and the lower sideband of 510±30Hz, we can see that the minimum frequency of the chopper is ≤10Hz and the maximum frequency is ≥550Hz. Therefore, a 10-slot chopper blade can meet the system requirements.

[0094] The light path area blocked by chopper 181 needs to be larger than the aperture area 10mm×10mm, e.g. Figure 4 As shown, the diameter of the 10-slot chopper is 102mm. After deducting the edge, the radius is 50mm. The side length of the chopper's shielding area is calculated as It can completely block the light path and meet system requirements.

[0095] Among them, the selection of oscilloscope 160 is as follows:

[0096] The maximum sideband measured is 550Hz. Considering that the rising and falling delay time of the signal is 0.5ms, the oscilloscope bandwidth is selected as 500M.

[0097] Continuing with the above example, Figure 1 As shown, the measurement principles of the various parameters in this application are as follows: Response rate: the response range of the electrical signal induced by the infrared sensor under test to a given temperature difference, the unit is mV / K; the principle is to adjust the blackbody radiation source 140 to change the known temperature difference, record the change range of the output signal, and calculate the result. Tangential angle, radial angle, tangential field of view, radial field of view: all measurements are angles, and the tangential angle and radial angle are measured as absolute angles. The tangential field of view and radial field of view measure relative angles. The measurement principle is that the infrared sensor to be tested is aimed at the blackbody radiation source 140, and when a certain percentage of output value is reached during tangential and radial movement, it is considered to have reached the angle edge, and the result is recorded and calculated. NETD: Noise equivalent temperature difference, the blackbody radiation source 140 changes the known temperature, records the noise and output value, and finally calculates the noise average value and the temperature value equivalent to this noise average value in the response rate, which is NETD. Upper and lower sidebands: The sensor has a response boundary for low-frequency and high-frequency targets. This means that when the target changes below the low frequency or above the high frequency, the sensor output reaches its critical response value. The corresponding low and high frequency points are the lower and upper sidebands. The measurement principle is to use a chopper to adjust the output frequency until the sensor response output reaches a certain percentage, and then record the result.

[0098] Based on this, this application implements the infrared sensor detection process through the detection system, which specifically includes two parts: pre-detection preparation and test measurement. The detailed process is as follows:

[0099] When conducting the test, you need to do the following preparations:

[0100] Turn on the system power, start the laser collimator 130, cooperate with the alignment tool, adjust the multi-dimensional adjustment platform 120 that carries the fixture, and adjust the initial position of the multi-dimensional adjustment platform 120 to zero, for example; place the infrared sensor to be tested on the fixture and lock it; start the oscilloscope 160; start the blackbody radiation source 140, set the initial temperature of the blackbody radiation source 140 to 40°C, and wait for the temperature of the blackbody radiation source 140 to stabilize; start the chopper, set its frequency to 100 Hz, and wait for its frequency to stabilize.

[0101] The specific detection process mainly includes the following contents:

[0102] In this embodiment, the output frequency of the chopper is 100 Hz, the first set temperature is 40° C., and the second set temperature is 50° C. The first signal peak value a measured by the oscilloscope 160 when the blackbody radiation source 140 is at the first temperature of 40° C. is read. The temperature of the blackbody radiation source 140 is adjusted to the second set temperature of 50° C., and the second signal peak value b measured by the oscilloscope 160 when the blackbody radiation source 140 is at the second set temperature is read. The responsivity R of the infrared sensor under test at 100 Hz and 40-50° C. is calculated according to R=(b a ) / (50-40) in mV / K.

[0103] The multi-dimensional adjustment platform 120 is adjusted to drive the infrared sensor to be tested to rotate about the X-axis from the initial position. The angle corresponding to the maximum value of the signal measured by the oscilloscope 160 is recorded as the first angle. The angle of rotation from the initial angle of the initial position about the X-axis to the first angle is recorded as the first included angle A1 of the infrared sensor to be tested. It is understood that the angle of rotation from the initial angle of the initial position about the X-axis to the first angle is the smaller of the two angles of rotation from the initial angle of the initial position about the X-axis in a clockwise direction and the counterclockwise direction to the first angle.

[0104] Adjusting the multi-dimensional adjustment platform 120 causes the infrared sensor under test to rotate about the Y-axis from its initial position. The angle corresponding to the maximum value of the signal measured by the oscilloscope 160 is recorded as the fourth angle. The rotation angle from the initial angle at the initial position about the Y-axis to the fourth angle is recorded as the second angle A1 of the infrared sensor under test. It should be understood that the rotation angle from the initial angle at the initial position about the second axis to the fourth angle is the smaller of the two rotation angles from the initial angle at the initial position about the second axis in a clockwise direction and the counterclockwise direction. Thus, the sensor's visual axis position is obtained as having the first angle A1 and the second angle A2 with respect to the design visual axis.

[0105] The multi-dimensional adjustment platform 120 is adjusted to drive the infrared sensor to be tested to rotate around the X-axis from the initial position, and the angle corresponding to the maximum value of the signal measured by the oscilloscope 160 is recorded as the first angle; the multi-dimensional adjustment platform 1202 is controlled to drive the infrared sensor to be tested to rotate around the X-axis from the first angle in a third direction, and the angle corresponding to when the signal measured by the oscilloscope 160 reaches p1% of the maximum value is recorded as the second angle; the multi-dimensional adjustment platform 120 is adjusted to drive the infrared sensor to be tested to rotate around the X-axis from the second angle in a fourth direction opposite to the third direction, and the angle corresponding to when the signal measured by the oscilloscope 160 again reaches p1% of the maximum value is recorded as the third angle; the angle of rotation from the second angle in the fourth direction around the first axis to the third angle is recorded as the first field of view angle of the infrared sensor to be tested; wherein p1% is a first preset percentage;

[0106] The multi-dimensional adjustment platform 120 is adjusted to drive the infrared sensor to be tested to rotate around the Y-axis from the initial position, and the angle corresponding to the maximum value of the signal measured by the oscilloscope 160 is recorded as the fourth angle; the multi-dimensional adjustment platform 120 is adjusted to drive the infrared sensor to be tested to rotate around the first axis from the fourth angle in the fifth direction, and the angle corresponding to when the signal measured by the oscilloscope 160 reaches p2% of the maximum value is recorded as the fifth angle; the multi-dimensional adjustment platform 120 is controlled to drive the infrared sensor to be tested to rotate around the second axis from the fifth angle in the fifth direction opposite to the fourth direction, and the angle corresponding to when the signal measured by the oscilloscope 160 reaches p2% of the maximum value again is recorded as the sixth angle, and the angle of rotation from the fourth angle in the fifth direction around the second axis to the sixth angle is recorded as the second field of view angle of the infrared sensor to be tested; wherein p2% is a second preset percentage, and p1% and p2% can be the same or different.

[0107] In this embodiment, the third direction and the fifth direction are clockwise or counterclockwise, respectively.

[0108] Specifically, in this embodiment, the value of p1 is 30, and the value of p2 is 30, that is, the first preset percentage and the second preset percentage are 30% respectively.

[0109] The frequency is set to 100 Hz, and the multi-dimensional adjustment platform 120 is adjusted to drive the infrared sensor to be tested to displace in the first direction, displace in the second direction, rotate around the first axis, or rotate around the second axis, so that the visual axis of the infrared sensor to be tested 9 is aligned with the blackbody radiation source 140 in the initial position through the cooperation of the laser collimator 130 and the alignment fixture; the temperature of the blackbody radiation source 140 is set to the second set temperature T3; the first root mean square VRMS1 of the noise of the signal measured by the oscilloscope 160 is read, and the first peak voltage V3 of the signal measured by the oscilloscope 160 is read; the temperature of the blackbody radiation source 140 is set to the third set temperature T4; the second root mean square VRMS2 of the noise of the signal measured by the oscilloscope 160 is read, and the second peak voltage V4 of the signal measured by the oscilloscope 160 is read; according to Calculate the noise equivalent temperature difference of the infrared sensor to be tested.

[0110] Specifically, in this embodiment, T3 is 30° C., T4 is 40° C., and a noise equivalent temperature difference of 30-40° C. at 100 Hz is obtained.

[0111] The displacement of the multi-dimensional adjustment platform 120 is adjusted so that the signal value displayed by the oscilloscope 160 reaches a maximum; the output frequency of the chopper is reduced by the driver until the signal measured by the oscilloscope 160 decreases to p3% of the maximum value, and the current output frequency of the chopper is recorded as the upper sideband Fu; wherein p3 is a third preset percentage; the output frequency of the chopper is increased by the driver until the signal measured by the oscilloscope 160 decreases to p4% of the maximum value, and the current output frequency of the chopper is recorded as the lower sideband Fd; wherein p4 is a fourth preset percentage.

[0112] Specifically, in this embodiment, p3 is 30, p4 is 30, that is, the third preset percentage and the fourth preset percentage are 30% respectively, and the upper side frequency Fu and the lower side frequency Fd when the maximum value is 30% are obtained.

[0113] Through precise control of the multi-dimensional adjustment platform 120 and accurate measurement of the output signal by the oscilloscope 160, the intelligent detection system of the infrared sensor can achieve high-precision detection of the infrared sensor's performance. This high precision and reliability are crucial to ensuring the performance of the infrared sensor in practical applications.

[0114] The infrared sensor detection system integrates multiple detection functions, eliminating the need for users to measure different parameters on multiple instruments. This greatly simplifies the detection process and improves operational convenience. In one possible implementation, the detection system also includes a controller that centrally controls the multi-dimensional adjustment platform 120, aperture 170, and chopper drive, making the detection process more automated and intelligent.

[0115] The infrared sensor detection system is applicable to infrared sensors of different types and specifications. The flexible displacement and rotation functions of the multi-dimensional adjustment platform 120 enable the infrared sensor to be easily adjusted to the optimal detection position, ensuring the accuracy of the detection results.

[0116] This application adopts an integrated detection system with a controller to achieve efficient detection, which can significantly shorten the detection time and improve the detection efficiency.

[0117] Furthermore, this application can detect parameters such as the responsivity, tangential angle, radial angle, tangential field of view, radial field of view, NETD (noise equivalent temperature difference), upper sideband, and lower sideband of infrared sensor products. This provides a reliable testing method for sensor incoming inspection, manufacturing, and product delivery inspection, improving product consistency and reliability, thereby saving companies costs and increasing product competitiveness.

[0118] This application proposes to accurately measure key parameters of infrared sensors such as "responsivity, angle, field of view, noise equivalent temperature difference, upper sideband and lower sideband" to qualitatively and quantitatively measure the performance of infrared sensors. Therefore, the matching between infrared sensors and scenes can be evaluated based on the performance of infrared sensors, so that infrared sensors can be applied to a wider range of scenarios.

[0119] In one embodiment, the angle parameter is sensitive to different lighting environments. In strong light environments, the infrared sensor may be affected by direct sunlight and other light sources. In this case, the angle should be appropriately reduced to minimize the proportion of light directly striking the sensor. Furthermore, an excessively small angle can limit the detection range. Therefore, this embodiment employs a light shield or adjusts the sensor's mounting position to minimize the impact of strong light on the sensor.

[0120] In low-light environments, the infrared sensor's detection range and accuracy will be affected. Therefore, it is necessary to increase the angle to expand the detection range and increase the received infrared signal strength.

[0121] Similarly, in different temperature environments, high temperatures can cause unstable operation of the infrared sensor's internal circuitry and increase noise. Therefore, it's necessary to appropriately reduce the angle to reduce unnecessary signal interference and improve detection accuracy. Furthermore, if the temperature is too high, consider adding a heat sink, using a fan, or other cooling device to dissipate heat from the infrared sensor. Low temperatures can also affect the infrared sensor's detection range and accuracy. Therefore, it's necessary to appropriately increase the angle to extend the detection range and improve detection sensitivity.

[0122] In one embodiment, it is necessary to determine whether the infrared sensor is suitable for scenarios with high response rate requirements, such as high-speed moving target detection environments, weak signal detection environments, high-precision temperature measurement environments, and complex environments, based on the measured response rate of the infrared sensor.

[0123] This application can also evaluate the matching between the infrared sensor and the scene based on the measured field of view angle, noise equivalent temperature difference, upper sideband and lower sideband parameters, so that the infrared sensor can be applied to a wider range of scenarios. I will not go into details here.

[0124] In one embodiment, this embodiment can also provide a method for evaluating the matching between the infrared sensor and the scene; specifically:

[0125] Accurately measure and record key parameters of each infrared sensor, including response rate, angle, field of view, noise equivalent temperature difference, upper sideband, and lower sideband.

[0126] Collect scene data for different scenarios, including temperature distribution, light intensity, target object characteristics, and background noise. Respond to user settings, clarify the characteristics and requirements of each scenario, and annotate the scene data;

[0127] Annotate infrared image data.

[0128] More specifically, the characteristics of the target object are at least selected from one or more of shape characteristics (the outer contour of the object, such as circle, square, triangle, etc.), size characteristics (size information such as length, width, height, etc. of the object), and motion characteristics.

[0129] Construct a neural network model, wherein the neural network model is selected from one of a convolutional neural network (CNN), a recurrent neural network (RNN), and a hybrid model.

[0130] The feature vector is extracted from the measured parameters of the infrared sensor and used as the input of the neural network.

[0131] Perform feature extraction on scene data to extract the outline and texture of the target object.

[0132] The labeled scene data and key parameters of the infrared sensor are used as training data, and the data is divided into a training set and a validation set to train the neural network model and verify its performance.

[0133] Use the validation set to evaluate the performance of the neural network, such as accuracy, recall, and other indicators.

[0134] Visualize the model's predictions to understand its decision-making process and potential problems.

[0135] Based on the evaluation results, the structure, parameters or training strategy of the neural network are adjusted to improve its performance.

[0136] For new infrared smart sensors and scenarios, the trained neural network model is used to perform matching evaluation.

[0137] Based on the model's prediction results, determine whether the infrared sensor is suitable for the scenario.

[0138] Specifically, in actual application, data is continuously collected and the neural network model is updated to improve its generalization ability and adaptability.

[0139] In the description of this application, it should be noted that the terms "upper" and "lower" and the like indicate orientations or positional relationships based on the orientations or positional relationships shown in the accompanying drawings, and are only for the convenience of describing this application and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation on this application. Unless otherwise clearly specified and limited, the terms "installed", "connected", and "connected" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection, or an indirect connection through an intermediate medium, or it can be internal communication between two elements. For those of ordinary skill in the art, the specific meanings of the above terms in this application can be understood according to the specific circumstances.

[0140] It should also be noted that, in the description of the present application, relational terms such as first and second, etc. are merely used to distinguish one entity or operation from another entity or operation, and do not necessarily require or imply the existence of any such actual relationship or order between these entities or operations. Moreover, the terms "comprise", "include" or any other variants thereof are intended to cover non-exclusive inclusion, so that a process, method, article or device comprising a series of elements includes not only those elements, but also other elements not explicitly listed, or also includes elements inherent to such process, method, article or device. In the absence of further restrictions, an element defined by the statement "comprises a ..." does not exclude the presence of other identical elements in the process, method, article or device comprising the element.

[0141] Obviously, the above embodiments of the present application are merely examples for clearly illustrating the present application, and are not intended to limit the implementation methods of the present application. For ordinary technicians in this field, other different forms of changes or modifications can be made based on the above description. It is impossible to list all the implementation methods here. All obvious changes or modifications derived from the technical solution of the present application are still within the scope of protection of the present application.

Claims

1. A detection system for an intelligent sensor, characterized in that: The detection system comprises: A multi-dimensional adjustment platform having a bearing surface corresponding to the mechanical reference surface of the intelligent sensor to be tested; A laser collimator is provided on the multi-dimensional adjustment platform, wherein the angle between the optical path of the laser collimator and the bearing surface is known; a blackbody radiation source disposed separately from the multi-dimensional adjustment platform; and An oscilloscope for measuring the sensor output signal, The multi-dimensional adjustment platform is capable of displacement along a first axial direction and a second axial direction and of rotation around a first axis and a second axis, respectively. The first axial direction is perpendicular to the second axial direction, and the optical path of the laser collimator is perpendicular to the first axial direction and the second axial direction, respectively.

2. The detection system according to claim 1, characterized in that The detection system further includes an aperture arranged between the multi-dimensional adjustment platform and the blackbody radiation source.

3. The detection system according to claim 1, characterized in that The detection system further includes a chopping component located between the multi-dimensional adjustment platform and the blackbody radiation source.

4. An intelligent sensor detection method using the detection system according to claim 1, characterized in that: The detection method comprises the following steps Fixing the intelligent sensor to be tested on the multi-dimensional adjustment platform, with the mechanical reference surface of the sensor corresponding to the bearing surface; Using the laser collimator, the initial position of the multi-dimensional adjustment platform is determined by adjusting the multi-dimensional adjustment platform; Controlling the temperature of the blackbody radiation source to output infrared radiation; The multi-dimensional adjustment platform is adjusted to measure and record the output signal of the sensor in response to the infrared radiation, and the technical indicators of the sensor are obtained according to the output signal, wherein the technical indicators include at least one of the sensor's visual axis angle, field of view angle, response rate, noise equivalent temperature difference, upper sideband, and lower sideband.

5. The detection method according to claim 4, characterized in that The steps of the detection system detecting the visual axis of the sensor include: The multi-dimensional adjustment platform is adjusted to drive the sensor to rotate around the first axis from an initial position, and the rotation angle corresponding to the maximum value of the sensor output signal measured by the oscilloscope is a first angle; The multi-dimensional adjustment platform is adjusted to drive the sensor to rotate around the second axis from an initial position, and the rotation angle corresponding to the maximum value of the sensor output signal measured by the oscilloscope is the second included angle; The sensor boresight is determined based on the first angle and the second angle.

6. The detection method according to claim 4 or 5, characterized in that The step of the detection system detecting the field of view angle of the sensor at a first predetermined ratio includes: Adjusting the multi-dimensional adjustment platform to rotate around the first axis, recording two positions where the oscilloscope measurement signal reaches a first predetermined proportional value of the maximum value, where the rotation angle between the two positions is a first field of view angle; The multi-dimensional adjustment platform is adjusted to rotate around the second axis, and two positions where the oscilloscope measurement signal reaches a first predetermined proportional value of the maximum value are recorded, and the rotation angle therebetween is the second field of view angle.

7. The detection method according to claim 4 or 5, characterized in that The step of detecting the response rate of the detection system includes: Set the frequency of the chopper, which is located in the optical path of the sensor's boresight; Adjusting the temperature of the blackbody radiation source to a first temperature T1 and reading a first peak voltage V1 of a measurement signal from an oscilloscope; Adjusting the temperature of the blackbody radiation source to a second temperature T2, and reading a second peak voltage V2 of the oscilloscope measurement signal; according to The response rate R of the sensor within the temperature range T1-T2 at the frequency is calculated.

8. The detection method according to claim 4 or 5, characterized in that The step of detecting the sensor noise equivalent temperature difference by the detection system includes: Adjusting the temperature of the blackbody radiation source to a third temperature T3, reading a first root mean square (RMS) value of the oscilloscope noise VRMS1 and a third peak voltage V3 of the oscilloscope measurement signal; Adjusting the temperature of the blackbody radiation source to a fourth temperature T4, reading a second noise root mean square VRMS2 of the oscilloscope and a fourth peak voltage V4 of the oscilloscope measurement signal; according to The noise equivalent temperature difference NETD of the sensor in the temperature range T3-T4 is calculated.

9. The detection method according to claim 4 or 5, characterized in that The step of the detection system detecting the upper side frequency and the lower side frequency of the sensor at a second predetermined ratio includes: Aligning the visual axis of the sensor with the blackbody target surface; Adjust the multi-dimensional adjustment platform and observe the maximum value of the signal measured by the oscilloscope; Adjust the frequency of the chopper, which is located in the optical path of the sensor's optical axis. The chopper output frequency is reduced, and the chopper frequency when the oscilloscope measures the signal peak value as low as the second predetermined proportional value of the maximum value is the upper side frequency of the sensor; Increase the chopper output frequency. The chopper frequency when the oscilloscope measures the signal peak value as low as the second predetermined proportional value of the maximum value is the sensor lower side frequency.

10. An intelligent sensor, characterized in that: The smart sensor is a temperature sensor or an image sensor, and the technical indicators of the sensor are detected using the detection method according to any one of claims 4 to 9, and the technical indicators include at least one of the sensor's visual axis, field of view angle, response rate, noise equivalent temperature difference, upper sideband, and lower sideband.

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