System and method for synchronous measurement of multiple surface density measuring instruments

Abstract

The invention provides a system and method for synchronous measurement of multiple surface density measuring instruments, and relates to the technical field of synchronous measurement, the system comprises N surface density measuring instruments, and each surface density measuring instrument is provided with a fixed position color code sensor and a measuring head color code sensor; the length measuring encoder is used for recording encoder information for identifying the position of the color code; the controller is used for calibrating the distance between the front frame and the rear frame by utilizing the distance between the two color codes of the front frame and the distance between the two color codes of the rear frame; the first displacement sensor measures the surface of a base material to obtain base material position information, the second displacement sensor measures the edge of the base material to obtain the heel edge distance, and the laser distance measuring sensors are installed on a rear frame of the double-frame unit, distributed in the coating direction and used for measuring the distance to the surface of the base material to obtain the actual position of the base material in the coating direction. And the controller is also used for controlling synchronous measurement of the rear frame when the actual position is greater than or equal to the sum of the pre-stored position and the distance between the front and rear frames. The control method is simple, and track synchronization is convenient.

Description

Technical Field

[0001] The present invention relates to the technical field of synchronous measurement, and in particular to a system and method for synchronous measurement of multiple surface density measuring instruments. Background Art

[0002] Online testing of electrode surface density is a critical process inspection step in the lithium battery coating production process. Pole coating quality impacts battery capacity consistency and safety. The lithium battery electrode coating process requires online monitoring of electrode surface density to provide real-time quality information, enabling intelligent coating adjustments based on big data analysis.

[0003] Patent CN114200079A A pole piece coating tracking measurement system and method proposes a pole piece coating tracking measurement system and method. The system includes a controller, a first measuring device, a second measuring device and a roller encoder. The controller is connected to the first measuring device, the second measuring device and the roller encoder signal respectively. The controller is used to obtain the pulse signal and calculate the first pulse number generated by the roller encoder after the first measuring device starts scanning and before the second measuring device starts scanning. When the first pulse number is equal to the first preset value, the controller controls the second measuring device to start scanning. Since the measurement system uses one controller to control multiple measuring devices, it can reduce the communication delay between multiple measuring devices, ensure that the starting positions of multiple scans are the same, and thus ensure the accuracy of the measurement; at the same time, the use of a roller encoder to calculate the transmission length of the pole piece and control the scanning of the second measuring device can ensure that the scanning of the first measuring device and the second measuring device play the same role. For multi-frame measurement and synchronous control of multiple measuring devices, using one controller and roller encoder will put a heavy computational burden on the controller, and will require high real-time computing of multiple threads. Moreover, once a problem occurs with the on-site controller or the roller encoder loses a pulse or a measuring device stops and resets abnormally, the entire multi-frame system will crash. Therefore, the synchronization fault tolerance between multiple frames is poor and the system robustness is insufficient.

[0004] Patent 202510073949.2, "Area Density Synchronous Measurement Method, Device, Equipment, and Medium," discloses a method, device, equipment, and medium for synchronous areal density measurement. The method comprises: obtaining the tape run length L1 between areal densitometer No. 1 and areal densitometer No. 2 during synchronous operation; obtaining the tape run length L2 between areal densitometer No. 1 and areal densitometer No. 2 during actual operation; and determining a compensation value ΔL for areal densitometer No. 2 based on L1 and L2, where ΔL = (L1 - L2) / 2. During the actual measurement process, the compensation value ΔL is used to compensate areal densitometer No. 2, ensuring that the scanning trajectories of areal densitometer No. 1 and No. 2 coincide, enabling accurate calculation of the coating's areal density. Only the tape running direction during normal production of electrode coating, the longitudinal distance value and compensation value of the two measuring instruments are considered. However, the measuring head (ray generator and ray detector) of the area density measuring instrument is horizontally reciprocating scanning, and the reciprocating motion requires switching time, and the measuring head needs to return to the origin regularly for zero point correction and standard piece calibration. The starting time and position of the measuring head of each measuring instrument are closely related to the longitudinal coordinate value. Taking into account the situation that the electrode may deviate, the horizontal coordinate starting position of the measuring head is not fixed each time, otherwise the scanning trajectory cannot be synchronized.

[0005] Therefore, the present invention provides a system and method for synchronous measurement of multiple areal density measuring instruments. Summary of the Invention

[0006] The present invention provides a system and method for synchronous measurement of multiple areal density measuring instruments, which are used to solve the above-mentioned technical problems.

[0007] The present invention provides a system for synchronous measurement of multiple areal density measuring instruments, comprising:

[0008] N areal density measuring instruments, each of which is equipped with a fixed position color mark sensor and a measuring head color mark sensor, wherein the N measuring instrument scanning frames form N-1 double-frame units;

[0009] The length measuring encoder is used to start the coater normally in the length measuring mode, mark the front frame with a marker, record the encoder information of the mark moving to the front frame measuring head color mark, the front frame fixed color mark, the rear frame fixed color mark, and the rear frame measuring head color mark position, and calibrate the distance between the two color marks on the front frame, the distance between the front and rear frames, and the distance between the two color marks on the rear frame;

[0010] The controller is used to calibrate the distance between the front and rear racks using the distance between the two color marks on the front rack and the distance between the two color marks on the rear rack, and to control the coating machine to start working;

[0011] A first displacement sensor is provided on the areal density measuring instrument to measure the substrate surface to obtain substrate position information. At the same time, a second displacement sensor provided on the areal density measuring instrument measures the substrate edge to obtain a trailing edge distance. The zero boundary position of the rear frame is automatically adjusted based on the substrate position information and the trailing edge distance.

[0012] The laser distance measuring sensors are installed on the rear frame of the double-frame unit and are distributed along the coating direction, and are used to measure the distance to the surface of the substrate when the substrate passes through to obtain the actual position of the substrate in the coating direction;

[0013] The controller is also used to control the rear frame to start scanning along the scanning trajectory of the first frame at the same scanning speed and the same starting position when the actual position is greater than or equal to the sum of the pre-stored position and the distance between the front and rear frames, so as to achieve synchronous measurement.

[0014] Preferably, the controller is also used to, when in multi-frame synchronization mode, if the rear frame is waiting at the zero boundary position, at this time, the longitudinal coordinate value obtained by the rear frame is greater than the sum of the longitudinal coordinate of the front frame and the upper threshold, control the rear frame to abandon the current motion cycle, and wait for the next cycle motion signal of the front frame before continuing to move.

[0015] Preferably, the controller is further configured to, in the length measurement mode, abandon modifying the distance between the front and rear frames when the absolute value of the difference between the measured distance between the front and rear fixed color marks and the distance calibrated in the length measurement mode is less than a preset value.

[0016] Preferably, the zero boundary is set outside the substrate;

[0017] Each areal density measuring instrument is respectively set with the same scanning speed, reversing time and scanning width, and the reversing time is set to be more than 1s, and the timing period of the reversing time timer is 1ms;

[0018] N≥5, and N-frame areal density measuring instruments include substrate areal density detection, single-sided wet film detection, single-sided dry film detection, double-sided wet film detection, and double-sided dry film detection.

[0019] Preferably, the original distance between the front and rear frames L = L1 + L2 - L3 + L4, where L1 represents the distance between the two color marks of the front frame, L2 represents the distance between the current frame and the front frame, L3 represents the distance between the two color marks of the rear frame, and L4 represents the corrected distance between the front and rear frames;

[0020] After each dynamic distance correction, the distance between the front and rear frames is obtained according to L1+Ld-L3+L4, where Ld represents the fixed color scale value of the two frames measured dynamically.

[0021] Preferably, during synchronous operation, the forward scanning stop position of the rear frame measuring instrument in a single cycle is determined by the scanning width; the reverse scanning stop position is determined by the stored position of the front frame thickness gauge from the edge of the substrate.

[0022] Preferably, it also includes:

[0023] The master station is used to send a status signal to the control panel of each areal density measuring instrument, and when the control panel receives the status signal, it turns off the automatic start mode;

[0024] a relationship determination module, configured to determine the control interaction relationship between the master station and each density surface measuring instrument, and to determine whether there is a control signal with a control interaction failure number greater than or equal to a set value; if so, determining that a control interaction failure relationship exists for the corresponding density surface measuring instrument;

[0025] a control diagram determination module, configured to determine an execution function device based on the control signal in the corresponding rack density surface measuring instrument and other controllable signals matching the execution function device, and further interactively mine to obtain an initial control diagram, wherein the initial control diagram includes a controlled effective coefficient of each other controllable signal;

[0026] Performing secondary interactive mining on the initial control graph to obtain an extended control graph, wherein the extended control graph includes a controlled effective coefficient of each extended functional device based on the corresponding remaining controllable signals;

[0027] The replacement module is used to provide a replacement reminder for the execution function component based on the replacement probability of the execution function component according to the initial control diagram and the extended control diagram.

[0028] Preferably, it also includes:

[0029] a drawing module, configured to receive data from the laser ranging sensor measuring the distance to the substrate surface when the substrate passes through, and perform surface drawing along the distribution of the distance along the coating direction to obtain a first distance plane of the substrate;

[0030] a locking module, configured to project the first distance plane and the calibrated distance plane of the laser ranging sensor into a standard coordinate system, and to lock abnormal points in the first distance plane in combination with the set shape of the substrate;

[0031] If the number of abnormal points is 0, the distance measured to the substrate surface remains unchanged;

[0032] If the number of the abnormal points is 1, then the abnormal points are adjusted once by 0.1 mm;

[0033] Otherwise, determine the normal vectors of the sub-surfaces formed by any three points of a triangle in the first distance plane, and find the first normal vector R1 corresponding to the minimum surface from all sub-surfaces, where there is at least one abnormal point among the three points;

[0034] A face construction module is used to select three normal points that are closest to the abnormal point of the smallest face and the abnormal point of the second smallest face and form a triangle, and form the corresponding first reference triangular face and second reference triangular face;

[0035] an angle determination module, configured to determine a first angle J1 between the first reference triangular face and the first normal vector R1, and a second angle J2 between the second reference triangular face and the first normal vector R1, and simultaneously, based on a two-dimensional plane formed by the normal vectors of the first reference triangular face and the second reference triangular face, obtain a third angle J3 with a horizontal plane;

[0036] a unit determination module, configured to, if the directions of the first angle J1 and the second angle J2 are consistent, obtain a unit adjustment distance based on an absolute difference between a first perpendicular distance of the outlier point on the minimum surface to the first reference surface and a second perpendicular distance to the second reference surface, and an absolute difference between the first angle J1 and the second angle J2;

[0037] Otherwise, the unit adjustment distance is obtained based on the sum of the first perpendicular distance from the outlier point of the minimum surface to the first reference surface and the second perpendicular distance to the second reference surface, the sum of the first angle J1 and the second angle J2, and the third angle J3.

[0038] The adjustment optical module is used to adjust the distance of each abnormal point according to the depression ratio between each abnormal point and the nearest three normal points and in combination with the unit adjustment distance to obtain the actual position.

[0039] The present invention provides a method for synchronous measurement of multiple areal density measuring instruments, comprising:

[0040] Step 1: In the length measurement mode, start the coater normally, mark the front frame with a marker, record the encoder information of the position of the marker moving to the front frame measuring head color mark, the front frame fixed color mark, the rear frame fixed color mark, and the rear frame measuring head color mark, and calibrate the distance between the two color marks of the front frame, the distance between the front and rear frames, and the distance between the two color marks of the rear frame, wherein N areal density measuring instruments are provided, and each areal density measuring instrument is respectively equipped with a fixed position color mark sensor and a measuring head color mark sensor, wherein the N measuring instrument scanning frames constitute N-1 double-frame units;

[0041] Step 2: Use the distance between the two color marks on the front rack and the distance between the two color marks on the rear rack to calibrate the distance between the front and rear racks, and control the coating machine to start working;

[0042] Step 3: Using a first displacement sensor provided on the areal density measuring instrument to measure the surface of the substrate to obtain substrate position information, and simultaneously using a second displacement sensor provided on the areal density measuring instrument to measure the edge of the substrate to obtain a trailing edge distance, and automatically adjusting the zero boundary position of the rear frame based on the substrate position information and the trailing edge distance;

[0043] Step 4: When the substrate passes, the distance to the substrate surface is measured by the laser ranging sensor to obtain the actual position of the substrate in the coating direction;

[0044] Step 5: When the actual position is greater than or equal to the sum of the pre-stored position and the distance between the front and rear frames, the rear frame is controlled to start scanning along the scanning trajectory of the first frame at the same scanning speed and the same starting position to achieve synchronous measurement.

[0045] Compared with the prior art, the present invention has the following advantages:

[0046] The technical solution proposed in this paper constructs a synchronized scanning measurement system with multiple dual-frame measuring instruments. This system features a simple control method and transmits rich data and status information. Each measuring instrument uses two color mark sensors, fully utilizing the position coordinate information along the length of the pole piece and the transverse scanning direction of the measuring head, facilitating trajectory synchronization. The data transmission hardware connection is reliable, particularly the use of optical fiber for transmission of high-frequency signals such as encoder high-speed pulses and color mark status, avoiding interference in complex electromagnetic environments. The trajectory error of synchronized measurements between multiple instruments is less than 3 mm.

[0047] Other features and advantages of the present invention will be described in the following description, and in part will become apparent from the description, or will be understood by practicing the present invention. The purpose and other advantages of the present invention can be realized and obtained by the structures particularly pointed out in the written description and the accompanying drawings.

[0048] The technical solution of the present invention is further described in detail below through the accompanying drawings and embodiments. BRIEF DESCRIPTION OF THE DRAWINGS

[0049] The accompanying drawings are used to provide a further understanding of the present invention and constitute a part of the specification. Together with the embodiments of the present invention, they are used to explain the present invention and do not constitute a limitation of the present invention. In the accompanying drawings:

[0050] Figure 1 A structural diagram of a system for synchronous measurement of multiple areal density measuring instruments according to an embodiment of the present invention;

[0051] Figure 2 This is a flow chart of a method for synchronous measurement of multiple areal density measuring instruments according to an embodiment of the present invention;

[0052] Figure 3This is a communication structure diagram of the master station and each measuring instrument in an embodiment of the present invention;

[0053] Figure 4 This is a structural diagram of a double-rack unit in an embodiment of the present invention;

[0054] Figure 5 This is a distance measurement diagram in an embodiment of the present invention;

[0055] Figure 6 This is a scanning trend diagram in an embodiment of the present invention;

[0056] Figure 7 This is a synchronous measurement flow chart in an embodiment of the present invention. DETAILED DESCRIPTION

[0057] The preferred embodiments of the present invention are described below with reference to the accompanying drawings. It should be understood that the preferred embodiments described herein are only used to illustrate and explain the present invention, and are not used to limit the present invention.

[0058] The present invention provides a system for synchronous measurement of multiple surface density measuring instruments, such as Figure 1 Shown, including:

[0059] N areal density measuring instruments, each of which is equipped with a fixed position color mark sensor and a measuring head color mark sensor, wherein the N measuring instrument scanning frames form N-1 double-frame units;

[0060] The length measuring encoder is used to start the coater normally in the length measuring mode, mark the front frame with a marker, record the encoder information of the mark moving to the front frame measuring head color mark, the front frame fixed color mark, the rear frame fixed color mark, and the rear frame measuring head color mark position, and calibrate the distance between the two color marks on the front frame, the distance between the front and rear frames, and the distance between the two color marks on the rear frame;

[0061] The controller is used to calibrate the distance between the front and rear racks using the distance between the two color marks on the front rack and the distance between the two color marks on the rear rack, and to control the coating machine to start working;

[0062] A first displacement sensor is provided on the areal density measuring instrument to measure the substrate surface to obtain substrate position information. At the same time, a second displacement sensor provided on the areal density measuring instrument measures the substrate edge to obtain a trailing edge distance. The zero boundary position of the rear frame is automatically adjusted based on the substrate position information and the trailing edge distance.

[0063] The laser distance measuring sensors are installed on the rear frame of the double-frame unit and are distributed along the coating direction, and are used to measure the distance to the surface of the substrate when the substrate passes through to obtain the actual position of the substrate in the coating direction;

[0064] The controller is also used to control the rear frame to start scanning along the scanning trajectory of the first frame at the same scanning speed and the same starting position when the actual position is greater than or equal to the sum of the pre-stored position and the distance between the front and rear frames, so as to achieve synchronous measurement.

[0065] Preferably, the controller is further configured to, when in multi-frame synchronization mode, if the rear frame is waiting at the zero boundary position and the longitudinal coordinate value obtained by the rear frame is greater than the sum of the longitudinal coordinate value of the front frame and an upper threshold, control the rear frame to abandon the current motion cycle and wait for the next cycle motion signal from the front frame before continuing motion. It should be noted that the upper threshold is 1 cm.

[0066] Preferably, the controller is further configured to, in the length measurement mode, abandon modifying the distance between the front and rear frames when the absolute value of the difference between the measured distance between the front and rear fixed color scales and the distance calibrated in the length measurement mode is less than a preset value. It should be noted that the preset value is 5 mm.

[0067] Preferably, the zero boundary is set outside the substrate;

[0068] Each areal density measuring instrument is respectively set with the same scanning speed, reversing time and scanning width, and the reversing time is set to be more than 1s, and the timing period of the reversing time timer is 1ms;

[0069] N≥5, and N-frame areal density measuring instruments include substrate areal density detection, single-sided wet film detection, single-sided dry film detection, double-sided wet film detection, and double-sided dry film detection.

[0070] Preferably, the original distance between the front and rear frames L = L1 + L2 - L3 + L4, where L1 represents the distance between the two color marks of the front frame, L2 represents the distance between the current frame and the front frame, L3 represents the distance between the two color marks of the rear frame, and L4 represents the corrected distance between the front and rear frames;

[0071] After each dynamic distance correction, the distance between the front and rear frames is obtained according to L1+Ld-L3+L4, where Ld represents the fixed color scale value of the two frames measured dynamically.

[0072] Preferably, during synchronous operation, the forward scanning stop position of the rear frame measuring instrument in a single cycle is determined by the scanning width; the reverse scanning stop position is determined by the stored position of the front frame thickness gauge from the edge of the substrate.

[0073] This system consists of a master station and various measuring instruments, which are connected by Ethernet. Figure 3 As shown in the figure, the master station does not participate in motion control, but only obtains the surface density measurement values of each measuring instrument through Ethernet to calculate the net coating surface density.

[0074] Each measuring instrument is connected by a CAN bus and IO signal lines. The CAN bus, with a baud rate of 500k to 1Mbps, is used for real-time data transmission: information about the distance between the first two color marks and the scanning status of the measuring head (normal scanning pass or reset pass). The application layer protocol is CanOpen. The IO signal line transmits the most real-time data, including the color mark signal of the front frame and the forward scanning status signal of the front frame.

[0075] The encoder in the coating direction is used to record the tape position information, and the front and rear frame measuring instruments interactively measure the length and encode the coordinate information in the tape direction.

[0076] Both IO signals and encoder signals are high-frequency pulse signals. In order to prevent interference from the complex electromagnetic environment on site and avoid loss of key information, all signals are transmitted by optical fiber. Each scanner is equipped with an optical terminal to realize photoelectric signal conversion.

[0077] In this embodiment, multi-frame synchronous measurement (scanning track co-location measurement) is essentially servo motion control. The multi-frame measuring instruments are divided into several dual-frame units. For example, a multi-frame scanning measurement system consisting of five areal density measuring instruments is divided into four dual-frame units (front and rear). Each dual-frame unit uses its own independent length measurement sensor and edge measurement color mark sensor.

[0078] Each measuring instrument scanning frame is equipped with two color mark sensors, namely fixed position color mark sensor and measuring head color mark sensor. Figure 4 shown.

[0079] In this embodiment, the specific steps for the above system are as follows:

[0080] Marking: Stick the high-temperature tape to the front of the first device in the direction of tape travel. Stick both sides, try to ensure that the front and back sides are in the same position. The sticking direction is the scanning direction. When sticking, try to ensure that it is perpendicular to the foil. The length of the tape on each side must be greater than or equal to the width of the foil.

[0081] Set the color mark mode: Set all color marks on each measuring instrument (including moving and fixed color marks), and set the light mode to be on when suspended, off when foil, and on when high-temperature tape.

[0082] Determine the position of each color mark: Position each measuring instrument at approximately the same position as the fixed color mark. This is to ensure that the moving color mark and the fixed color mark of each measuring instrument ensure that the measured signals are at the same position.

[0083] Reset the vertical coordinate of the transport direction and start transporting.

[0084] L1 = X coordinate of 1 fixed color mark when in motion - X coordinate of 1 moving color mark when induction

[0085] L2 = X coordinate when 2 fixed color marks are in motion - X coordinate when 1 fixed color mark is inductively sensed

[0086] L3 = X coordinates when 2 fixed color marks are in motion - X coordinates when 2 moving color marks are inductively sensed

[0087] Specific as Figure 5 shown.

[0088] In this embodiment, when synchronous measurement is required for normal operation, the first frame scan is started after the coating line speed is stabilized. When the front frame scans for the first time, the rear frame will make a judgment based on the current position. If the current position is greater than the set zero boundary, it will automatically run to the set zero boundary and wait. During the synchronization process, the zero boundary and full boundary of each frame are dynamically changed. The zero boundary is determined based on the edge of the substrate and the set follow-edge distance. The position coordinate is equal to the substrate edge coordinate minus the set follow-edge distance. The full boundary position is the zero boundary plus the scanning width, such as Figure 6 As shown in the figure, the distance between the stop position of the rear frame measuring instrument in reverse scanning and the pole piece is consistent with the position when the first frame starts scanning. Each time the front frame starts scanning in the forward direction, the rear frame equipment needs to record the position of the coating length measuring encoder at that moment. The scanning of the rear frame equipment is controlled by the recorded position and the calibrated distance between the two frames. Figure 7 As shown in the figure, it is a synchronous measurement flow chart. It should be noted that the first one is the first surface density measuring instrument.

[0089] In this embodiment, in the synchronous measurement mode, if the rear frame does not receive the synchronization signal for a set time (more than 10S), it will automatically switch to the standby state, and any operation can be performed in the standby state; when the rear frame device is in a state without motion control abnormality, after receiving the synchronization signal, it will perform the scanning action according to the synchronization signal.

[0090] In the synchronous measurement mode, the action reset cycle of the rear frame should be reset according to the action reset trajectory of the front frame to complete the scanning trajectory of the rear frame and the front frame.

[0091] The front measuring instrument starts scanning according to the interval set by the zero boundary and the full boundary, and the rear measuring instrument first automatically returns to the zero boundary position and waits for startup.

[0092] Each time the front-mounted measuring instrument scans forward, it must measure the position data of the zero boundary distance from the substrate edge (edge measurement) and transmit this position data to the rear-mounted measuring instrument, which then saves it to the designated data storage area. This data needs to be updated and transmitted in each cycle.

[0093] During synchronous operation, the rear-mount gauge's forward scan stop position (full boundary) is determined by the scan width; the reverse scan stop position is determined by the stored position of the front-mount gauge from the substrate edge. This means the rear-mount gauge's reverse stop position also serves as the starting position for the next forward scan, ensuring the starting position remains the same distance from the electrode as the front-mount gauge.

[0094] When performing dynamic distance correction, the reference distance value should be the distance between two fixed color standards measured in the length measurement calibration mode. This distance can be corrected manually or automatically in the length measurement mode.

[0095] The above technical solution has the beneficial effect of simplifying the multi-frame synchronization system into multiple independent dual-frame systems, eliminating the need for an additional synchronization controller and making control simpler. In addition to the necessary longitudinal coordinate data transmission between the two frames, the two frames also exchange information such as the color mark sensor status, color mark position spacing, measuring instrument scanning status, and measuring instrument surface density measurement value. Different transmission media such as optical fiber, CAN bus, and Ethernet are used to achieve data transmission according to real-time requirements and data volume, which is more conducive to the accuracy of synchronization control. Each measuring instrument is equipped with two color mark sensors, namely a fixed color mark and a moving color mark of the measuring head. This can eliminate the influence of the fixed position distance between the two frames caused by the fluctuation of the pole piece tension. A length measurement calibration process is implemented. By regularly making marks on the pole piece that can be recognized by the color mark sensor, the tape running distance between the two frames is determined, providing compensation values for synchronous measurement. The moving color mark of the measuring head is used to determine the relative position of the measuring head and the pole piece tape, namely the zero boundary and the full boundary, thereby determining the starting position of the measuring head and achieving the overlap of the motion trajectory with the front frame.

[0096] The present invention provides a system for synchronous measurement of multiple areal density measuring instruments, further comprising:

[0097] The master station is used to send a status signal to the control panel of each areal density measuring instrument, and when the control panel receives the status signal, it turns off the automatic start mode;

[0098] a relationship determination module, configured to determine the control interaction relationship between the master station and each density surface measuring instrument, and to determine whether there is a control signal with a control interaction failure number greater than or equal to a set value; if so, determining that a control interaction failure relationship exists for the corresponding density surface measuring instrument;

[0099] a control diagram determination module, configured to determine an execution function device based on the control signal in the corresponding rack density surface measuring instrument and other controllable signals matching the execution function device, and further interactively mine to obtain an initial control diagram, wherein the initial control diagram includes a controlled effective coefficient of each other controllable signal;

[0100] Performing secondary interactive mining on the initial control graph to obtain an extended control graph, wherein the extended control graph includes a controlled effective coefficient of each extended functional device based on the corresponding remaining controllable signals;

[0101] The replacement module is used to provide a replacement reminder for the execution function component based on the replacement probability of the execution function component according to the initial control diagram and the extended control diagram.

[0102] In this embodiment, the status signal refers to whether the control board needs to switch modes, and the mode switch is between off mode and start mode. In addition to the control board itself controlling the operation of the measuring instrument, the master station is also required to obtain control rights to verify whether the measuring instrument is operating normally, so as to ensure the accuracy of the measurement.

[0103] In this embodiment, the control interaction relationship includes: a control interaction validity relationship and a control interaction invalidation relationship.

[0104] In this embodiment, the set value is 3, and the number of times the control signal is sent is generally 10 times. If the number of control interaction failures is 5, then it is greater than 3, and it is determined that the corresponding rack density surface measuring instrument has a control interaction failure relationship. It should be noted that the control signal is to control the surface density measuring instrument to operate according to the corresponding signal. The control signals corresponding to the execution function devices involved in the surface density measuring instrument may be different or the same. For example, the control signals of device 1 are: signal 11, signal 12, and the control signals of device 2 are: signal 21, signal 11.

[0105] In this embodiment, taking device 1 as an example, if the control signal sent is signal 12, then the remaining control signal is signal 11. At this time, the first-level interaction mining of signal 11 shows that device 2 is also controlled by signal 11. Then the controlled effective coefficient of signal 11 is calculated as follows:

[0106]

[0107] Among them, X11 is the controlled effective coefficient of signal 11; n1 represents the executive function device involved in signal 11; M i1 Indicates the number of times the control test of the i1th executive function device is passed using signal 11; N i1 Indicates the total number of times the signal 11 is used to perform control tests on the i1th executive function device; β i1 represents the device weight of the i1th functional device, and Nz i1 It represents the total number of times that all control signals are used to perform control tests on the i1th executive function device.

[0108] In this embodiment, secondary interactive mining refers to using the execution function device (extended function device) involved in each remaining controllable signal in the initial control diagram to determine the controlled effective coefficient of the extended function device in each remaining controllable signal, that is: the number of test passes of the corresponding extended function device corresponding to the remaining controllable signal / the total number of tests of the corresponding extended function device corresponding to the remaining controllable signal.

[0109] In this embodiment, the probability of replacing the functional device = 1-A1×the control success rate of the control signal-A2×the average value of the controlled effective coefficient based on the initial control diagram-A3×the average value of the controlled effective coefficient based on the extended control diagram, where A1, A2, and A3 are set constants, which are 0.6, 0.3, and 0.1, respectively.

[0110] The beneficial effect of the above technical solution is: by determining the control interaction failure relationship, the initial control diagram and the extended control diagram of the execution function device are determined, and the replacement probability is comprehensively determined from two aspects to ensure the reliability of the judgment.

[0111] The present invention provides a system for synchronous measurement of multiple areal density measuring instruments, further comprising:

[0112] a drawing module, configured to receive data from the laser ranging sensor measuring the distance to the substrate surface when the substrate passes through, and perform surface drawing along the distribution of the distance along the coating direction to obtain a first distance plane of the substrate;

[0113] a locking module, configured to project the first distance plane and the calibrated distance plane of the laser ranging sensor into a standard coordinate system, and to lock abnormal points in the first distance plane in combination with the set shape of the substrate;

[0114] If the number of abnormal points is 0, the distance measured to the substrate surface remains unchanged;

[0115] If the number of the abnormal points is 1, then the abnormal points are adjusted once by 0.1 mm;

[0116] Otherwise, determine the normal vectors of the sub-surfaces formed by any three points of a triangle in the first distance plane, and find the first normal vector R1 corresponding to the minimum surface from all sub-surfaces, where there is at least one abnormal point among the three points;

[0117] A face construction module is used to select three normal points that are closest to the abnormal point of the smallest face and the abnormal point of the second smallest face and form a triangle, and form the corresponding first reference triangular face and second reference triangular face;

[0118] an angle determination module, configured to determine a first angle J1 between the first reference triangular face and the first normal vector R1, and a second angle J2 between the second reference triangular face and the first normal vector R1, and simultaneously, based on a two-dimensional plane formed by the normal vectors of the first reference triangular face and the second reference triangular face, obtain a third angle J3 with a horizontal plane;

[0119] a unit determination module, configured to, if the directions of the first angle J1 and the second angle J2 are consistent, obtain a unit adjustment distance based on an absolute difference between a first perpendicular distance of the outlier point on the minimum surface to the first reference surface and a second perpendicular distance to the second reference surface, and an absolute difference between the first angle J1 and the second angle J2;

[0120] Otherwise, the unit adjustment distance is obtained based on the sum of the first perpendicular distance from the outlier point of the minimum surface to the first reference surface and the second perpendicular distance to the second reference surface, the sum of the first angle J1 and the second angle J2, and the third angle J3.

[0121] The adjustment optical module is used to adjust the distance of each abnormal point according to the depression ratio between each abnormal point and the nearest three normal points and in combination with the unit adjustment distance to obtain the actual position.

[0122] In this embodiment, the number of laser ranging sensors set is 10 or more, providing a quantitative basis for forming triangles. The smallest face refers to the face with the smallest area obtained from all sub-faces, and the second smallest face refers to the face with the second smallest area obtained.

[0123] In this embodiment, the first distance plane refers to a distance plane of the substrate obtained by mapping the distance between the laser ranging sensor and the surface of the substrate.

[0124] In this embodiment, the calibration distance plane of the laser ranging sensor refers to a distribution plane set by the laser ranging sensor based on the coating direction.

[0125] In this embodiment, the standard coordinate system is pre-set and is a three-dimensional coordinate system.

[0126] In this embodiment, the substrate is generally arranged in a planar shape. At this time, if there is a convex or concave point in the first distance plane that seriously deviates from the planar shape, it is considered an abnormal point. It should be noted that serious deviation refers to a distance of 2mm from the convex or concave.

[0127] In this embodiment, the consistent direction means that the first angle J1 and the second angle J2 are both between 0 and 180 degrees, or between 180 degrees and 360 degrees. It should be noted that the angles are obtained in sequence in a clockwise direction.

[0128] The inconsistent directions refer to the first angle J1 and the second angle J2, one is between 0 and 180 degrees, and the other is between 180 degrees and 360 degrees.

[0129] In this embodiment, when the directions are consistent, the unit adjustment distance Ld is calculated. yz :

[0130]

[0131] Here, |Lc1―Lc2| represents the absolute difference between the first vertical distance Lc1 and the second vertical distance Lc2.

[0132] It should be noted that This value reflects the ratio of the difference between the first angle J1 and the second angle J2 to the straight angle. The greater the difference, the greater the ratio. When the directions are consistent, the angle difference can reflect the degree of deviation of the outlier point. The 0.1mm in 0.1mm+|Lc1―Lc2| represents the base adjustment.

[0133] In this embodiment, when the directions are inconsistent, the unit adjustment distance Ld is calculated. byz :

[0134]

[0135] Wherein, Lave represents the average value of the distances measured to the normal points in the first reference triangle and the second reference triangle.

[0136] It should be noted that It reflects the proportion of the comprehensive angle difference to the circumference. 0.1mm×sinJ3 adds a fine-tuning item. |Lc1+Lc2―2×Lave| measures the difference between the distance from the abnormal point to the reference surface and the average distance from the normal point. Overall, it meets the need to adjust the distance based on the comprehensive calculation of angle and distance.

[0137] In this embodiment, the value of the concave ratio ranges from 0 to 1. The abnormal point is determined based on the height of each point among the three most recent normal points. If it is lower than the corresponding normal point, it is considered concave. If it is higher than the corresponding normal point, it is considered convex. At this time, the concave ratio is counted, that is, the number of times in the concave state / 3.

[0138] In this embodiment, if the concave ratio is 1, then according to max(Ld yz , Ld byz ) to make unit upward adjustments;

[0139] If the concave ratio is 2 / 3, then according to (Ld yz +Ld byz ) / 2 for unit upward adjustment;

[0140] If the concave ratio is 1 / 3, then according to min(Ld yz ,Ld byz ) to make a unit downward adjustment;

[0141] If the concave ratio is 0, then according to max(Ld yz , Ld byz ) to adjust the unit downward.

[0142] The beneficial effect of the above technical solution is: the outlier point is locked through the first distance plane and the calibrated distance plane, and then when there is an outlier point, the number of outlier points is at least 2, the normal vector of the minimum face is used as the incision, and the normal vector is constructed based on the reference triangle face based on the two outlier points to obtain the angle, and the unit adjustment distance is obtained in the case of consistent and inconsistent directions, so as to achieve reasonable adjustment of the distance and ensure the accuracy of the actual position acquisition.

[0143] The present invention provides a method for synchronous measurement of multiple surface density measuring instruments, such as Figure 2 Shown, including:

[0144] Step 1: In the length measurement mode, start the coater normally, mark the front frame with a marker, record the encoder information of the position of the marker moving to the front frame measuring head color mark, the front frame fixed color mark, the rear frame fixed color mark, and the rear frame measuring head color mark, and calibrate the distance between the two color marks of the front frame, the distance between the front and rear frames, and the distance between the two color marks of the rear frame, wherein N areal density measuring instruments are provided, and each areal density measuring instrument is respectively equipped with a fixed position color mark sensor and a measuring head color mark sensor, wherein the N measuring instrument scanning frames constitute N-1 double-frame units;

[0145] Step 2: Use the distance between the two color marks on the front rack and the distance between the two color marks on the rear rack to calibrate the distance between the front and rear racks, and control the coating machine to start working;

[0146] Step 3: Using a first displacement sensor provided on the areal density measuring instrument to measure the surface of the substrate to obtain substrate position information, and simultaneously using a second displacement sensor provided on the areal density measuring instrument to measure the edge of the substrate to obtain a trailing edge distance, and automatically adjusting the zero boundary position of the rear frame based on the substrate position information and the trailing edge distance;

[0147] Step 4: When the substrate passes, the distance to the substrate surface is measured by the laser ranging sensor to obtain the actual position of the substrate in the coating direction;

[0148] Step 5: When the actual position is greater than or equal to the sum of the pre-stored position and the distance between the front and rear frames, the rear frame is controlled to start scanning along the scanning trajectory of the first frame at the same scanning speed and the same starting position to achieve synchronous measurement.

[0149] The beneficial effects of this technical solution are: by constructing a synchronized scanning measurement system with multiple dual-frame measuring instruments, the control method is simple, and rich data and status information is transmitted. Each measuring instrument uses two color mark sensors, fully utilizing the position coordinate information along the length of the pole piece and the transverse scanning direction of the measuring head of the measuring instrument, facilitating synchronized trajectory. The hardware connection for data transmission is reliable, especially the use of optical fiber to transmit high-frequency signals such as encoder high-speed pulses and color mark status, avoiding interference in complex electromagnetic environments. The error in synchronized measurement trajectory between multiple frames is less than 3mm.

[0150] Obviously, those skilled in the art may make various changes and modifications to the present invention without departing from the spirit and scope of the present invention. Thus, if such changes and modifications fall within the scope of the claims and their equivalents, the present invention is intended to include such changes and modifications.

Claims

1. A system for synchronous measurement of multiple areal density measuring instruments, characterized in that: include: N areal density measuring instruments, each of which is equipped with a fixed position color mark sensor and a measuring head color mark sensor, wherein the N measuring instrument scanning frames form N-1 double-frame units; The length measuring encoder is used to start the coater normally in the length measuring mode, mark the front frame with a marker, record the encoder information of the mark moving to the front frame measuring head color mark, the front frame fixed color mark, the rear frame fixed color mark, and the rear frame measuring head color mark position, and calibrate the distance between the two color marks on the front frame, the distance between the front and rear frames, and the distance between the two color marks on the rear frame; The controller is used to calibrate the distance between the front and rear racks using the distance between the two color marks on the front rack and the distance between the two color marks on the rear rack, and to control the coating machine to start working; A first displacement sensor is provided on the areal density measuring instrument to measure the substrate surface to obtain substrate position information. At the same time, a second displacement sensor provided on the areal density measuring instrument measures the substrate edge to obtain a trailing edge distance. The zero boundary position of the rear frame is automatically adjusted based on the substrate position information and the trailing edge distance. The laser distance measuring sensors are installed on the rear frame of the double-frame unit and are distributed along the coating direction, and are used to measure the distance to the surface of the substrate when the substrate passes through to obtain the actual position of the substrate in the coating direction; The controller is also used to control the rear frame to start scanning along the scanning trajectory of the first frame at the same scanning speed and the same starting position when the actual position is greater than or equal to the sum of the pre-stored position and the distance between the front and rear frames, so as to achieve synchronous measurement.

2. The system for synchronous measurement of multiple areal density measuring instruments according to claim 1, characterized in that: The controller is further configured to, when in multi-frame synchronization mode, if the rear frame is waiting at the zero boundary position and the longitudinal coordinate value obtained by the rear frame is greater than the sum of the longitudinal coordinate of the front frame and the upper threshold, control the rear frame to abandon the current motion cycle and wait for the next cycle motion signal of the front frame before continuing to move.

3. The system for synchronous measurement of multiple areal density measuring instruments according to claim 1, characterized in that: The controller is further configured to abandon modifying the distance between the front and rear frames when, in the length measurement mode, the absolute value of the difference between the distance between the front and rear fixed color marks and the distance calibrated in the length measurement mode is less than a preset value.

4. The system for synchronous measurement of multiple areal density measuring instruments according to claim 1, characterized in that: The zero boundary is set outside the substrate; Each areal density measuring instrument is respectively set with the same scanning speed, reversing time and scanning width, and the reversing time is set to be more than 1s, and the timing period of the reversing time timer is 1ms; N≥5, and N-frame areal density measuring instruments include substrate areal density detection, single-sided wet film detection, single-sided dry film detection, double-sided wet film detection, and double-sided dry film detection.

5. The system for synchronous measurement of multiple areal density measuring instruments according to claim 1, characterized in that: The original distance between the front and rear frames is L = L1 + L2 - L3 + L4, where L1 represents the distance between the two color marks on the front frame, L2 represents the distance between the current frame and the front frame, L3 represents the distance between the two color marks on the rear frame, and L4 represents the corrected distance between the front and rear frames. After each dynamic distance correction, the distance between the front and rear frames is obtained according to L1+Ld-L3+L4, where Ld represents the fixed color scale value of the two frames measured dynamically.

6. The system for synchronous measurement of multiple areal density measuring instruments according to claim 1, characterized in that: During synchronous operation, the forward scanning stop position of the rear frame measuring instrument in a single cycle is determined by the scanning width; the reverse scanning stop position is determined by the stored position of the front frame thickness gauge from the edge of the substrate.

7. The system for synchronous measurement of multiple areal density measuring instruments according to claim 1, characterized in that: Also includes: The master station is used to send a status signal to the control board of each areal density measuring instrument, and when the control board receives the status signal, it turns off the automatic start mode; a relationship determination module, configured to determine the control interaction relationship between the master station and each density surface measuring instrument, and to determine whether there is a control signal with a control interaction failure number greater than or equal to a set value; if so, determining that a control interaction failure relationship exists for the corresponding density surface measuring instrument; a control diagram determination module, configured to determine an execution function device based on the control signal in the corresponding rack density surface measuring instrument and other controllable signals matching the execution function device, and further interactively mine to obtain an initial control diagram, wherein the initial control diagram includes a controlled effective coefficient of each other controllable signal; Performing secondary interactive mining on the initial control graph to obtain an extended control graph, wherein the extended control graph includes a controlled effective coefficient of each extended functional device based on the corresponding remaining controllable signals; The replacement module is used to provide a replacement reminder for the execution function component based on the replacement probability of the execution function component according to the initial control diagram and the extended control diagram.

8. The system for synchronous measurement of multiple areal density measuring instruments according to claim 1, characterized in that: Also includes: a drawing module, configured to receive data from the laser ranging sensor measuring the distance to the substrate surface when the substrate passes through, and perform surface drawing along the distribution of the distance along the coating direction to obtain a first distance plane of the substrate; a locking module, configured to project the first distance plane and the calibrated distance plane of the laser ranging sensor into a standard coordinate system, and to lock abnormal points in the first distance plane in combination with the set shape of the substrate; If the number of abnormal points is 0, the distance measured to the substrate surface remains unchanged; If the number of the abnormal points is 1, then the abnormal points are adjusted once by 0.1 mm; Otherwise, determine the normal vectors of the sub-surfaces formed by any three points of a triangle in the first distance plane, and find the first normal vector R1 corresponding to the minimum surface from all sub-surfaces, where there is at least one abnormal point among the three points; A face construction module is used to select three normal points that are closest to the abnormal point of the smallest face and the abnormal point of the second smallest face and form a triangle, and form the corresponding first reference triangular face and second reference triangular face; an angle determination module, configured to determine a first angle J1 between the first reference triangular face and the first normal vector R1, and a second angle J2 between the second reference triangular face and the first normal vector R1, and simultaneously, based on a two-dimensional plane formed by the normal vectors of the first reference triangular face and the second reference triangular face, obtain a third angle J3 with a horizontal plane; a unit determination module, configured to, if the directions of the first angle J1 and the second angle J2 are consistent, obtain a unit adjustment distance based on an absolute difference between a first perpendicular distance of the outlier point on the minimum surface to the first reference surface and a second perpendicular distance to the second reference surface, and an absolute difference between the first angle J1 and the second angle J2; Otherwise, the unit adjustment distance is obtained based on the sum of the first perpendicular distance from the outlier point of the minimum surface to the first reference surface and the second perpendicular distance to the second reference surface, the sum of the first angle J1 and the second angle J2, and the third angle J3. The adjustment optical module is used to adjust the distance of each abnormal point according to the depression ratio between each abnormal point and the nearest three normal points and in combination with the unit adjustment distance to obtain the actual position.

9. A method for synchronous measurement of multiple areal density measuring instruments, characterized in that: include: Step 1: In the length measurement mode, start the coater normally, mark the front frame with a marker, record the encoder information of the position of the marker moving to the front frame measuring head color mark, the front frame fixed color mark, the rear frame fixed color mark, and the rear frame measuring head color mark, and calibrate the distance between the two color marks of the front frame, the distance between the front and rear frames, and the distance between the two color marks of the rear frame, wherein N areal density measuring instruments are provided, and each areal density measuring instrument is respectively equipped with a fixed position color mark sensor and a measuring head color mark sensor, wherein the N measuring instrument scanning frames constitute N-1 double-frame units; Step 2: Use the distance between the two color marks on the front rack and the distance between the two color marks on the rear rack to calibrate the distance between the front and rear racks, and control the coating machine to start working; Step 3: Using a first displacement sensor provided on the areal density measuring instrument to measure the surface of the substrate to obtain substrate position information, and simultaneously using a second displacement sensor provided on the areal density measuring instrument to measure the edge of the substrate to obtain a trailing edge distance, and automatically adjusting the zero boundary position of the rear frame based on the substrate position information and the trailing edge distance; Step 4: When the substrate passes, the distance to the substrate surface is measured by the laser ranging sensor to obtain the actual position of the substrate in the coating direction; Step 5: When the actual position is greater than or equal to the sum of the pre-stored position and the distance between the front and rear frames, the rear frame is controlled to start scanning along the scanning trajectory of the first frame at the same scanning speed and the same starting position to achieve synchronous measurement.

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