Optical detection device and optical apparatus

Abstract

The invention discloses an optical detection device and optical equipment, the optical detection device comprises a first frame and an optical collector which are assembled, a second frame and an optical detector which are assembled and a first regulation and control assembly, and the optical collector is used for collecting signal light from an object to be detected; the light detector is used for receiving the signal light transmitted by the light collector; the first regulation and control assembly is connected with the first frame and the second frame, and the first regulation and control assembly is configured to regulate the second frame in the axial direction of the light collector. The light collector is arranged on the first frame, the light detector is arranged on the second frame, and the light collector and the light detector are equivalently integrated on a support formed by the first frame and the second frame, so that the matching precision between the light detector and the light collector is ensured when the first regulation and control assembly adjusts the position of the light detector through the second frame; the light detector can better receive the signal light transmitted by the light collector after being adjusted.

Description

Technical Field

[0001] The present invention relates to the field of optical technology, and in particular to a light detection device and optical equipment. Background Art

[0002] At present, the commonly used technical means for wafer surface defect detection is optical detection technology, which has the advantages of fast detection speed and no pollution.

[0003] In related technologies, optical inspection equipment generally includes a laser, a light collector and a light detector, wherein the laser provides a detection beam for the wafer to be inspected, and the detection beam forms a signal light through the defects on the surface of the wafer to be inspected. The light collector collects the signal light and guides it to the light detector. After receiving the signal light, the light detector detects the signal light and obtains the defect information on the surface of the wafer to be inspected based on the signal light. Therefore, it is particularly important to ensure that the light detector accurately obtains the signal light transmitted by the light collector.

[0004] Among them, the light collector and the light detector are two separately set devices. When adjusting the light collector and the light detector, the accuracy between the assembled components may be poor, which leads to large errors in the adjustment of the light collector and the light detector. For optical equipment with increasingly higher precision requirements, this can no longer meet the requirements. Summary of the Invention

[0005] The present invention aims to solve at least one of the technical problems existing in the prior art. To this end, the present invention provides a light detection device and an optical device to ensure the accuracy of the light detection device during adjustment.

[0006] In a first aspect, an embodiment of the present application provides a light detector, comprising:

[0007] A first frame and a light collector assembled together, wherein the light collector is used to collect signal light from the object to be measured;

[0008] a second frame and a light detector assembled therewith, wherein the light detector is used to receive the signal light transmitted by the light collector;

[0009] The first regulating component is connected to the first frame and the second frame, and the first regulating component is configured to adjust the second frame along the axial direction of the light collector.

[0010] According to some embodiments of the present invention, the first regulating component includes:

[0011] a first slide, slidably disposed on the first frame along a first setting direction, wherein the first setting direction is perpendicular to the axial direction of the light collector;

[0012] a second slide, slidably disposed on the first slide along a second setting direction, wherein the second setting direction is inclined relative to the axial direction of the light collector;

[0013] a guide member connected to the first frame and the second slide, the guide member being used to enable the second slide to be slidably disposed on the first frame along the axial direction of the light collector;

[0014] A first regulating structure is provided on the first frame and the first slide, and the first regulating structure is configured to adjust the first slide along the first set direction; wherein, when the first regulating structure adjusts the first slide to slide along the first set direction, the second slide is suitable for the sliding of the first slide to slide along the axial direction of the light collector.

[0015] According to some embodiments of the present invention, the first regulating structure includes at least two first thread pairs and a first boss, the two first thread pairs being disposed on one of the first frame and the first slide along the first setting direction, and the first boss being disposed on the other and located between the abutting ends of the two first thread pairs;

[0016] Alternatively, the first regulating structure includes an adjusting screw and a nut seat, the adjusting screw is arranged on the first frame along the first setting direction and is rotatably connected, and the nut seat is connected to the first slide and is threadedly connected to the adjusting screw.

[0017] According to some embodiments of the present invention, the first regulating component further includes a first locking structure, and the first locking structure includes:

[0018] a connecting piece, the connecting piece being disposed on one of the first frame and the first slide, the connecting piece having a stopper affixed to the other, the stopper being provided with a waist-shaped groove along the first setting direction;

[0019] A fixing knob, the screw of which is passed through the waist-shaped groove and is threadedly connected to the other one, and the fixing knob is used to press the stop portion.

[0020] According to some embodiments of the present invention, the first frame defines an installation space running through both ends thereof, the light collector is arranged in the installation space and extends from a port portion, the second frame is arranged at another port portion of the first frame, and the light detector is used to be arranged toward the port portion.

[0021] According to some embodiments of the present invention, the light detector further comprises:

[0022] a base, disposed on a side of the first frame away from the second frame;

[0023] The second regulating component is connected to the first frame and the base, and the second regulating component is configured to adjust the first frame along a third setting direction, and the third setting direction is perpendicular to the axial direction of the light collector.

[0024] According to some embodiments of the present invention, the base is disposed on a side of the first frame away from the second frame;

[0025] a bracket, located at the head of the light collector;

[0026] The support assembly includes a first adjustment member and an adjustment pad connected to each other, wherein the first adjustment member is arranged on the base and is configured to adjust the adjustment pad along the axial direction of the light collector, and the adjustment pad is used to abut against the surface of the bracket.

[0027] According to some embodiments of the present invention, the light detector further comprises:

[0028] a second adjusting member, disposed on the base;

[0029] The support pad is fixedly arranged on the surface of the bracket, and the second adjusting member can be adjusted along the axial direction of the light collector to abut against the side of the support pad away from the bracket, thereby padding the adjusting pad.

[0030] According to some embodiments of the present invention, a first slot extending from the bottom surface of the base to the edge of the base is formed, and the adjustment pad is at least partially embedded in the first slot.

[0031] According to some embodiments of the present invention, the light detector further includes a light attenuation component, and the light attenuation component includes:

[0032] A bracket, wherein a channel is opened on the side of the light collector in a direction perpendicular to the axial direction thereof, the supporting portion of the bracket slides in the channel, and a plurality of light attenuation sheets of different specifications are sequentially loaded along the extending direction of the channel;

[0033] The switching adjustment member is provided on the first frame and is used to adjust the bracket along the extension direction of the channel so that each of the light attenuation sheets is switched to a target position to attenuate the intensity of the signal light.

[0034] According to some embodiments of the present invention, the light detector further includes a detector body, a first adjustment module, a second adjustment module and a third adjustment module, wherein the first adjustment module rotates around the Z axis to adjust the detector body, the second adjustment module slides around the X axis and the Y axis to adjust the detector body, and the third adjustment module rotates around the X axis and the Y axis to adjust the detector body.

[0035] According to some embodiments of the present invention, the first adjustment module includes a first rotating table, a second rotating table, a third thread pair and a third boss, wherein the first rotating table is connected to the detector body, the second rotating table is connected to the second frame, the first rotating table and the second rotating table are connected to rotate around the Z axis, the two third thread pairs are arranged on one of the edges of the first rotating table and the edges of the second rotating table, and the third boss is arranged on the other one and is located between the abutting ends of the two third thread pairs.

[0036] According to some embodiments of the present invention, two second adjustment modules are provided, for adjusting the detector body along the X-axis and the Y-axis respectively;

[0037] The second adjustment module includes a first movable stage, a second movable stage, a fourth threaded pair and a fourth boss, wherein the first movable stage is connected to the detector body, the second movable stage is connected to the second frame, the first movable stage and the second movable stage are slidingly connected, the two fourth threaded pairs are arranged on one of the edges of the first movable stage and the edges of the second movable stage, and the fourth boss is arranged on the other one and is located between the abutting ends of the two fourth threaded pairs.

[0038] According to some embodiments of the present invention, the third adjustment module includes a first turntable, a second turntable, a third turntable, a first elastic deformation portion extending along the X-axis, a second elastic deformation portion extending along the Y-axis, a first tension adjustment member and a second tension adjustment member, wherein the first turntable is connected to the detector body, the first elastic deformation portion is connected to the edge of the first turntable and the edge of the second turntable, the first tensioning adjustment member is connected to at least one of the first turntable and the second turntable for adjusting the tension of the two, the second elastic deformation portion is connected to the edge of the second turntable and the third turntable, the second tensioning adjustment member is connected to at least one of the second turntable and the third turntable for adjusting the tension of the two, and the third turntable is connected to the second frame.

[0039] In a second aspect, an embodiment of the present application provides an optical device, including:

[0040] a laser for emitting a detection beam toward an object to be measured;

[0041] The light detector mentioned above.

[0042] It can be seen from the above technical solution that the embodiment of the present application has the following advantages: the light collector is arranged on the first frame, the light detector is arranged on the second frame, and the first frame and the second frame are adjustably connected through the first regulating component. With such a setting, the light collector and the light detector are equivalent to being integrated into the bracket composed of the first frame and the second frame. Compared with the two being set separately, it is obvious that the matching accuracy between the light collector and the light detector in the solution of the present application is improved, thereby ensuring the matching accuracy between the light detector and the light collector when the first regulating component adjusts the position of the light detector through the second frame. After adjustment, the light detector can better receive the signal light transmitted by the light collector. BRIEF DESCRIPTION OF THE DRAWINGS

[0043] Figure 1 Schematic diagram of the overall structure of a light detector according to an embodiment of the present invention;

[0044] Figure 2 This is a schematic structural diagram of a first framework and a first control component according to an embodiment of the present invention;

[0045] Figure 3 This is a structural diagram of a first frame and a support assembly according to an embodiment of the present invention;

[0046] Figure 4 for Figure 3 Enlarged schematic diagram of the middle A area;

[0047] Figure 5 Schematic diagram of the structure of a bracket according to an embodiment of the present invention;

[0048] Figure 6 Schematic diagram of the overall structure of a light detector according to an embodiment of the present invention;

[0049] Figure 7 Schematic diagram of the structure of the first adjustment module according to an embodiment of the present invention;

[0050] Figure 8 Schematic diagram of the structure of the second adjustment module according to an embodiment of the present invention;

[0051] Figure 9 Schematic diagram of the structure of the third adjustment module according to an embodiment of the present invention.

[0052] The meanings of the reference numerals are as follows:

[0053] 100, first frame; 110, installation space; 120, guide rail structure; 200, light collector; 210, channel; 300, second frame; 400, light detector; 410, detector body; 420, first adjustment module; 421, first rotating platform; 422, second rotating platform; 423, third thread pair; 424, third boss; 430, second adjustment module; 431, first moving platform; 432, second moving platform; 433, fourth thread pair; 434, fourth boss; 440, third adjustment module; 441, first rotating platform; 442, second rotating platform; 443, third rotating platform; 444, first elastic deformation part; 445, second elastic deformation part; 446, first tension adjustment member; 447, second tension adjustment member Degree adjustment member; 500, first adjustment component; 510, first slide; 520, second slide; 530, guide member; 540, first adjustment structure; 541, first thread pair; 542, first boss; 550, first locking structure; 551, connecting piece; 552, fixing knob; 600, light attenuation component; 610, bracket; 611, supporting part; 620, switching adjustment member; 630, light attenuation sheet; 700, base; 710, first slot; 800, second adjustment component; 810, second thread pair; 820, second boss; 830, second locking structure; 101, supporting component; 1011, first adjustment member; 1012, adjustment pad; 201, supporting pad; 202, second adjustment member. DETAILED DESCRIPTION

[0054] For better understanding and implementation, the technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings in the embodiments of the present invention.

[0055] In the description of the present invention, it should be noted that the terms "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inside" and "outside" indicate orientations or positional relationships based on the orientations or positional relationships shown in the accompanying drawings. They are only for the convenience of describing the present invention and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation. Therefore, they cannot be understood as limiting the present invention.

[0056] Unless otherwise defined, all technical and scientific terms used herein have the same meaning as those commonly understood by those skilled in the art of the present invention. The terms used in the specification of the present invention herein are only for the purpose of describing specific embodiments and are not intended to limit the present invention.

[0057] The present invention will be further described in detail below with reference to the accompanying drawings.

[0058] See also Figure 1, an optical detection device provided in an embodiment of the present invention includes a first frame 100 and a light collector 200 assembled together, a second frame 300 and a light detector 400 assembled together, and a first adjustment component 500, wherein the light collector 200 is used to collect signal light from the object to be measured, and the light detector 400 is used to receive the signal light transmitted by the light collector 200. The first adjustment component 500 is connected to the first frame 100 and the second frame 300, and the first adjustment component 500 is configured to adjust the second frame 300 along the axial direction of the light collector 200.

[0059] In practical applications, an external laser emits a probe beam toward the object under test. The probe beam reflects signal light after striking the object. Light collector 200 receives the signal light reflected from the object and transmits it to light detector 400. Light detector 400 receives the signal light transmitted by light collector 200 and outputs corresponding signal light image information based on the signal light, thereby detecting defects in the object under test. Light detector 400 can also be used to detect distance to the object under test, for example.

[0060] Among them, in order to enable the light detector 400 to better receive the signal light, a first adjustment component 500 is provided between the first frame 100 and the second frame 300. The first adjustment component 500 can adjust the position of the second frame 300 along the axial direction of the light collector 200, thereby adjusting the spacing between the first frame 100 and the second frame 300. The distance between the light detector 400 and the light collector 200 is adjusted, thereby adjusting the focus of the light detector 400. The signal light transmitted by the light collector 200 can be better hit on the receiving surface of the light detector 400, so as to better detect defects of the object to be measured.

[0061] It can be understood that the light collector 200 is arranged on the first frame 100, the light detector 400 is arranged on the second frame 300, and the first frame 100 and the second frame 300 are adjustably connected through the first adjustment component 500. In this way, the light collector 200 and the light detector 400 are equivalent to being integrated into the bracket composed of the first frame 100 and the second frame 300. Compared with the two being arranged separately, it is obvious that the matching accuracy between the light collector 200 and the light detector 400 in the present application scheme is improved, thereby ensuring the matching accuracy between the light detector 400 and the light collector 200 when the first adjustment component 500 adjusts the position of the light detector 400 through the second frame 300. After adjustment, the light detector 400 can better receive the signal light transmitted by the light collector 200.

[0062] In one possible embodiment, referring to Figure 1 and Figure 2The first control assembly 500 includes a first slide 510, a second slide 520, a guide 530, and a first control structure 540. A guide rail is provided on the top of the first frame 100, and the first slide 510 is slidably mounted on the first frame 100 along a first set direction via the guide rail. A guide rail is provided on the inclined surface of the first slide 510, and the second slide 520 is slidably mounted on the first slide 510 along a second set direction via the guide rail. The second frame 300 is assembled and connected to the side of the second slide 520 away from the first slide 510. The guide 530 may be a telescopic assembly, with one end of the guide 530 connected to the first frame 100 and the other end connected to the second slide 520. Thus, the second slide 520 is slidably mounted on the first frame 100 along the axial direction of the light collector 200 via the guide 530. Of course, the guide 530 may also be a guide post extending through the second slide 520, but this is not limited in this application. The first regulating structure 540 is provided on the first frame 100 and the first slide 510. The first regulating structure 540 is used to regulate the first slide 510 along a first set direction. When the first regulating structure 540 regulates the first slide 510 along the first set direction, the second slide 520 is adapted to slide along the axial direction of the light collector 200 in response to the movement of the first slide 510.

[0063] The first set direction is perpendicular to the axial direction of the light collector 200, and the second set direction is inclined relative to the axial direction of the light collector 200. For the convenience of describing the scheme, the axial direction of the light collector 200 can be understood as the up-down direction, the first set direction can be understood as the left-right direction, and the second set direction can be understood as the up-down inclined direction.

[0064] Specifically, when the first regulating structure 540 adjusts the position of the first slide 510 to the left, the second slide 520 remains stationary in the left-right direction under the restriction of the guide member 530. At the same time, the connection between the first slide 510 and the second slide 520 is lowered, the position of the second slide 520 is lowered, and the second frame 300 and the light detector 400 are lowered synchronously, thereby reducing the distance between the light collector 200 and the light detector 400. Conversely, when the first regulating structure 540 adjusts the position of the first slide 510 to the right, the second slide 520 remains stationary in the left-right direction under the restriction of the guide member 530. At the same time, the connection between the first slide 510 and the second slide 520 is raised, the position of the second slide 520 is raised, and the second frame 300 and the light detector 400 are raised synchronously, thereby increasing the distance between the light collector 200 and the light detector 400.

[0065] It can be understood that compared to directly adjusting the light detector 400 along the axial direction of the light collector 200, the present application solution can more conveniently adjust the position of the first slide 510 through the first control structure 540, thereby facilitating the adjustment of the position of the light detector 400 through the second slide 520.

[0066] In order to achieve adjustment of the first slide 510 along the first set direction, in one possible embodiment, the first regulating structure 540 includes at least two first thread pairs 541 and a first boss 542, wherein the two first thread pairs 541 are arranged along the first set direction on one of the first frame 100 and the first slide 510. For example, one first thread pair 541 is arranged on the front side of the first frame 100 along the left-right direction, and the abutting end of the first thread pair 541 is arranged to the right, and the other first thread pair 541 is arranged on the front side of the first frame 100 along the left-right direction, and the abutting end of the first thread pair 541 is arranged to the left. The first boss 542 is fixedly arranged on the front side of the first slide 510 and is at least partially located between the abutting ends of the two first thread pairs 541. The abutting ends of the two first thread pairs 541 respectively abut on the left and right sides of the first boss 542. Of course, the first thread pair 541 and the first boss 542 can be installed in a swapped position, that is, the first thread pair 541 is disposed on the first slide 510 , and the first boss 542 is disposed on the first frame 100 .

[0067] Specifically, when the light detector 400 needs to be adjusted downward, the staff member adjusts the abutting ends of the two first threaded pairs 541 to the left. The two first threaded pairs 541, via the first boss 542, move the first slide 510 to the left, and the second slide 520 moves downward, thereby adjusting the light detector 400 downward. Conversely, when the light detector 400 needs to be adjusted upward, the staff member adjusts the abutting ends of the two first threaded pairs 541 to the right. The two first threaded pairs 541, via the first boss 542, move the first slide 510 to the right, and the second slide 520 moves upward, thereby adjusting the light detector 400 upward.

[0068] It can be understood that the two first thread pairs 541 can keep the first boss 542 in the adjusted position, and the first slide 510 remains in a position in the left and right directions, thereby maintaining the height position of the second slide 520. As a result, the light detector 400 remains in the same position relative to the light collector 200 after adjustment.

[0069] In other possible embodiments, the first control structure 540 includes an adjusting screw and a nut seat (not shown), wherein the adjusting screw is disposed in the left-right direction on the front side of the first frame 100, and both ends of the adjusting screw are rotatably connected to the first frame 100 via bearings. The nut seat is fixedly disposed on the front side of the first slide 510, and the adjusting screw and the nut seat are threadedly connected. Thus, the adjusting screw is manually or automatically controlled to rotate, and the adjusting screw drives the first slide 510 to move left and right, thereby controlling the up and down movement of the second slide 520, and further controlling the up and down adjustment of the light detector 400 through the second frame 300.

[0070] In order to ensure that the first slide 510 can remain in the adjusted position after being adjusted left and right, in some embodiments, the first adjustment component 500 also includes a first locking structure 550, which is connected to the first frame 100 and the first slide 510 and is used to maintain the position of the first slide 510. Specifically, the first locking structure 550 includes a connecting piece 551 and a fixing knob 552, wherein the connecting piece 551 is roughly L-shaped and is arranged on one of the first frame 100 and the first slide 510. For example, one part of the connecting piece 551 is fixed to the first frame 100 by a screw, and the other part of the connecting piece 551 is a stopper, which is fitted on the side of the first slide 510 and has a waist-shaped groove along the first set direction. The screw of the fixing knob 552 is inserted into the waist-shaped groove and is threadedly connected to the first slide 510. The fixing knob 552 is used to press the stopper. Specifically, when the fixing knob 552 is loosened, the frictional resistance between the side of the stopper and the first slide 510 is small, allowing the first slide 510 to slide left and right while the fixing knob 552 slides within the waist-shaped groove. After the first slide 510 is adjusted, the fixing knob 552 is tightened, and the stopper tightly abuts against the side of the first slide 510. A large friction force is generated between the first slide 510 and the stopper, thereby limiting the movement of the first slide 510.

[0071] In some embodiments, the first frame 100 defines a mounting space 110 extending through both ends thereof. The light collector 200 is disposed within the mounting space 110, with the head of the light collector 200 extending from one end of the mounting space 110. The first frame 100 is arranged in a gantry configuration, and the second frame 300 is assembled to the other end of the first frame 100 via a first control assembly 500. The light detector 400 is configured to be positioned toward this end. It will be appreciated that the light collector 200 is assembled within the mounting space 110 of the first frame 100. This allows the first frame 100, light collector 200, second frame 300, and light detector 400 to be assembled together in a relatively compact manner, allowing the light detection device to be flexibly assembled in limited application spaces.

[0072] In some embodiments, reference Figure 1 and Figure 2 The light detector 400 further includes a hollow base 700 and a second adjustment assembly 800. The base 700 is slidably mounted on a side of the first frame 100 away from the second frame 300 via a guide rail. The second adjustment assembly 800 is connected to the first frame 100 and the base 700. The second adjustment assembly 800 is configured to adjust the first frame 100 along a third set direction. The third set direction is perpendicular to the axial direction of the light collector 200. For ease of description, the third set direction can also be understood as a left-right direction.

[0073] It can be understood that during the application of the light detection device, the position of the first frame 100 is adjusted left and right through the second control component 800, and the light collector 200 and the light detector 400 are adjusted left and right synchronously, wherein the field of view of the light collector 200 is adjusted, so as to better receive the signal light reflected from the object to be measured.

[0074] Furthermore, the second adjustment assembly 800 includes a second thread pair 810 and a second boss 820, wherein the two second thread pairs 810 are disposed along a third set direction on one of the base 700 and the first frame 100. For example, one second thread pair 810 is disposed along the left-right direction on the front side of the base 700, with the abutting end of the second thread pair 810 facing rightward, and the other second thread pair 810 is disposed along the left-right direction on the front side of the base 700, with the abutting end of the second thread pair 810 facing leftward. The second boss 820 is fixedly disposed on the front side of the first frame 100 and is at least partially located between the abutting ends of the two second thread pairs 810, with the abutting ends of the two second thread pairs 810 abutting on the left and right sides of the second boss 820, respectively. Of course, the second thread pair 810 and the second boss 820 can be installed in a reversed position, that is, the second thread pair 810 is disposed on the first frame 100 and the second boss 820 is disposed on the base 700. It is understandable that the staff manually adjusts the positions of the abutting ends of the two second thread pairs 810 , thereby adjusting the position of the first frame 100 , and further adjusting the positions of the light collector 200 and the light detector 400 .

[0075] Furthermore, the second regulating assembly 800 also includes a second locking structure 830 . The second locking structure 830 has the same structure as the first locking structure 550 . The second locking structure 830 is used to maintain the position between the base 700 and the first frame 100 , which will not be described in detail.

[0076] In some embodiments, reference Figures 3 to 5The light detector 400 further includes a bracket and a support assembly 101. The bracket can be a dark field protective cover. The dark field protective cover is located at the head of the light collector 200 and is used to provide a dark field environment for the light collector 200 so that the light collector 200 can better receive signal light. The support assembly 101 includes a first adjustment member 1011 and an adjustment pad 1012 connected to each other. The first adjustment member 1011 can be a threaded pair, a differential head, etc. The first adjustment member 1011 is disposed on the base 700. The adjustment pad 1012 is connected to the movable end of the first adjustment member 1011. The first adjustment member 1011 is used to adjust the adjustment pad 1012 along the axial direction of the light collector 200 and abuts against the surface of the dark field protective cover. It is understandable that by adjusting the extension distance of the first adjusting member 1011, the height of the first frame 100 is adjusted by adjusting the spacer 1012, and then the object distance of the light collector 200 is adjusted, thereby allowing the light collector 200 to better receive the signal light reflected by the object to be measured.

[0077] Furthermore, the light detector 400 further includes a second adjusting member 202 (see Figure 2 ) and the support pad 201, wherein the second adjustment member 202 can be a threaded pair, a micrometer head or a bolt, etc., and the second adjustment member 202 is set on the base 700. The material of the support pad 201 is relatively hard, and the support pad 201 is fixedly set on the surface of the dark field protective cover. The second adjustment member 202 can be adjusted along the axial direction of the light collector 200 to abut against the side of the support pad 201 away from the dark field protective cover, thereby padding the adjustment pad 1012. It is understandable that when the support pad 201 needs to be replaced, the staff adjusts the second adjustment member 202 to extend downward and abut against the support pad 201, and the height of the first frame 100 is increased. When the second frame 300 is high enough, the staff can easily replace the adjustment pad 1012 with other thicknesses to adapt to the height of the first frame 100. Among them, a support pad 201 is set on the dark field protective cover. During the adjustment process, the second adjusting member 202 is replaced by the second adjusting member 202 to abut against the surface of the dark field protective cover, and the second adjusting member 202 abuts against the support pad 201, thereby effectively protecting the dark field protective cover; and the support pad 201 is not prone to generating waste debris, thereby ensuring the cleanliness of the optical environment.

[0078] Furthermore, a first card slot 710 is provided on the bottom surface of the base 700, and the first card slot 710 extends to the edge of the base 700, and the adjustment pad 1012 is at least partially embedded in the first card slot 710. In addition, a second card slot is provided on the surface of the dark field protective cover, and the adjustment pad 1012 is at least partially embedded in the second card slot. Of course, it is also possible that one of the base 700 and the dark field protective cover is provided with a card slot, which is not limited in this application. It can be understood that through the provision of the first card slot 710 and the second card slot, the adjustment pad 1012 is embedded in the first card slot 710 and the second card slot, and the adjustment pad 1012 further defines the position between the base 700 and the dark field protective cover, thereby ensuring the stability between the two.

[0079] In some embodiments, reference Figure 1 and Figure 6 The light detector 400 further includes a light attenuation assembly 600, which includes a bracket 610 and a switching adjustment member 620. A channel 210 is defined on the side of the light collector 200, perpendicular to its axial direction. The bracket 610 is slidably mounted on the first frame via a guide rail structure 120. A supporting portion 611 of the bracket 610 slides within the channel 210. A plurality of light attenuating sheets 630 of varying sizes are sequentially mounted on the upper side of the supporting portion 611 along the extension direction of the channel 210. The switching adjustment member 620 may be a linear motor or other structure. The switching adjustment member 620 is disposed inside the first frame 100. The driving portion of the switching adjustment member 620 is connected to the bracket 610 and is configured to adjust the bracket 610 along the extension direction of the channel 210. This allows each light attenuating sheet 630 on the bracket 610 to be switched to a target position. More specifically, each light attenuating sheet 630 is switched to the optical path at the center of the light collector 200. When the signal light passes through the light attenuation plate 630 , the light attenuation plate 630 attenuates the intensity of the signal light.

[0080] In actual applications, if the signal light intensity is high, the light detector 400 may become saturated when receiving the signal light, resulting in image distortion. In this application, a light attenuation plate 630 is provided in the optical path of the light collector 200. When the signal light passes through the light attenuation plate 630, the light attenuation plate 630 can reduce the intensity of the signal light, thereby effectively preventing the light detector 400 from becoming saturated when receiving the signal light.

[0081] Among them, the bracket 610 is equipped with light attenuation plates 630 of different specifications. Each light attenuation plate 630 has a different attenuation effect on light intensity. Therefore, during use of the light detection device, the light attenuation plate 630 at the target position can be adjusted using the switching adjustment member 620, so as to select the light attenuation plate 630 with the appropriate attenuation rate to ensure that the signal light is transmitted to the light detector 400 with the appropriate light intensity.

[0082] In some embodiments, reference Figure 6 The light detector 400 also includes a detector body 410, a first adjustment module 420, a second adjustment module 430 and a third adjustment module 440, wherein the first adjustment module 420 rotates and adjusts the detector body 410 around the Z axis, the second adjustment module 430 slides and adjusts the detector body 410 around the X axis and the Y axis, and the third adjustment module 440 rotates and adjusts the detector body 410 around the X axis and the Y axis.

[0083] The first adjustment module 420, the second adjustment module 430, and the third adjustment module 440 are connected in sequence. The first adjustment module 420 is connected to the detector body 410, and the third adjustment module 440 is connected to the second frame 300. Of course, the positions of the first adjustment module 420, the second adjustment module 430, and the third adjustment module 440 can be interchanged at will, and this application is not limited thereto.

[0084] Furthermore, the X-axis and the Y-axis are arranged perpendicularly, and can be understood as an extension line parallel to the receiving surface of the detector body 410 , and the Z-axis can be understood as an extension line perpendicular to the X-axis and the Y-axis.

[0085] It can be understood that during the application of the light detector 400, the staff can flexibly adjust the posture of the detector body 410 through the first adjustment module 420, the second adjustment module 430 and the third adjustment module 440, so that the signal light transmitted by the light collector 200 can be better hit on the receiving surface of the detector body 410, so as to more completely generate image information of the object to be tested and detect defects of the object to be tested.

[0086] In one possible embodiment, referring to Figure 6 and Figure 7 The first adjustment module 420 includes a first rotating platform 421, a second rotating platform 422, a third thread pair 423, and a third boss 424. The first rotating platform 421 is connected to the detector body 410, and the second rotating platform 422 is connected to the second adjustment module 430. The first rotating platform 421 and the second rotating platform 422 are connected to each other around the Z axis via an annular boss. The two third thread pairs 423 are set on the edge of the second rotating platform 422, and the third boss 424 is set on the edge of the first rotating platform 421 and is located between the abutting ends of the two third thread pairs 423. The abutting ends of the two third thread pairs 423 abut on opposite sides of the third boss 424. Of course, the third thread pair 423 and the third boss 424 can be installed in a swapped position, that is, the third thread pair 423 is set on the edge of the first rotating platform 421, and the third boss 424 is set on the edge of the second rotating platform 422.

[0087] During the specific adjustment process, the position of the third boss 424 is adjusted by adjusting the extension distance of the two third threaded pairs 423, and the angle of the first rotating platform 421 is then rotated and adjusted, and the detector body 410 is simultaneously adjusted. It can be understood that the first adjustment module 420 adopts the above-mentioned structure. In the thickness direction of the first adjustment module 420, the first adjustment module 420 occupies a small space, thereby reducing the space occupied by the light detector 400.

[0088] In one possible embodiment, referring to Figure 6 and Figure 8 Two second adjustment modules 430 are provided. The two second adjustment modules 430 are assembled and connected. One second adjustment module 430 is assembled to the first adjustment module 420, and the other second adjustment module 430 is assembled to the third adjustment module 440. One second adjustment module 430 is used to slide and adjust the detector body 410 around the X-axis, and the other second adjustment module 430 is used to slide and adjust the detector body 410 along the Y-axis.

[0089] The second adjustment module 430 includes a first platform 431, a second platform 432, a fourth threaded pair 433, and a fourth boss 434. The first platform 431 is connected to the first adjustment module 420, the second platform 432 is directly or indirectly connected to the third adjustment module 440, and the first platform 431 and the second platform 432 are slidably connected. Two fourth threaded pairs 433 are disposed on the edges of the second platform 432, and the fourth boss 434 is disposed on the first platform 431 and located between the abutting ends of the two fourth threaded pairs 433. Of course, the fourth threaded pair 433 and the fourth boss 434 can be installed in a reversed position, i.e., the fourth threaded pair 433 is disposed on the edge of the first platform 431, and the fourth boss 434 is disposed on the edge of the second platform 432.

[0090] During the specific adjustment process, the position of the fourth boss 434 is adjusted by adjusting the extension distance of the two fourth threaded pairs 433, thereby adjusting the position of the first movable stage 431 on the X-axis or Y-axis, and the detector body 410 is simultaneously adjusted. It can be understood that the second adjustment module 430 adopts the above-mentioned structure, and the second adjustment module 430 occupies a small space in the thickness direction of the second adjustment module 430, thereby reducing the space occupied by the light detector 400.

[0091] In some embodiments, reference Figure 6 and Figure 9The third adjustment module 440 includes a first turntable 441, a second turntable 442, a third turntable 443, a first elastic deformation portion 444 extending along the X-axis, a second elastic deformation portion 445 extending along the Y-axis, a first tension adjustment member 446, and a second tension adjustment member 447. The first turntable 441 is connected to the second adjustment module 430, the first elastic deformation portion 444 is connected to the edge of the first turntable 441 and the edge of the second turntable 442, the first tension adjustment member is connected to at least one of the first turntable 441 and the second turntable 442 to adjust the tension of both. The second elastic deformation portion 445 is connected to the edges of the second turntable 442 and the third turntable 443, the second tension adjustment member is connected to at least one of the second turntable 442 and the third turntable 443 to adjust the tension of both. The third turntable 443 is connected to the second frame 300.

[0092] Specifically, the first tension adjustment member 446 is a screw threadedly connected to the edge of the first turntable 441, and the end of the first tension adjustment member 446 acts on the inclined surface inside the second turntable 442. When the first tension adjustment member 446 moves into the space between the first turntable 441 and the second turntable 442, the first tension adjustment member 446 acts on the second turntable 442 through the inclined surface, causing the first turntable 441 and the second turntable 442 to elastically deform at the position of the first elastic deformation portion 444, thereby adjusting the posture of the detector body 410 with the first elastic deformation portion 444 as the rotation center. Similarly, the second tension adjustment member 447 is a screw threadedly connected to the edge of the second turntable 442, and the end of the second tension adjustment member 447 acts on the inclined surface inside the third turntable 443. When the second tension adjustment member 447 moves toward the space between the second turntable 442 and the third turntable 443, the second tension adjustment member 447 acts on the third turntable 443 via its inclined surface, causing the second turntable 442 and the third turntable 443 to elastically deform at the location of the second elastic deformation portion 445, thereby adjusting the posture of the detector body 410 about the second elastic deformation portion 445. It can be understood that the above-described structure of the third adjustment module 440 occupies less space in the thickness direction of the third adjustment module 440, thereby reducing the space occupied by the light detector 400.

[0093] This application also discloses an optical device, referring to Figure 1 , comprising a laser and the above-mentioned light detection device, wherein the laser is used to emit a detection light beam toward the object to be measured.

[0094] In a specific application, a laser emits a probe beam toward the object to be measured. After irradiating the object, the probe beam reflects signal light. The light collector 200 is used to collect the signal light reflected by the object to be measured and transmit it to the light detector 400. The light detector 400 receives the signal light transmitted by the light collector 200 and outputs corresponding signal light image information based on the signal light, thereby detecting defects in the object to be measured. Of course, the light detector 400 can also be used to detect the distance of the object to be measured, etc.

[0095] It can be understood that the optical device adopts the above-mentioned light detection device, the light collector 200 is arranged on the first frame 100, the light detector 400 is arranged on the second frame 300, and the first frame 100 and the second frame 300 are adjustably connected through the first adjustment component 500. With this arrangement, the light collector 200 and the light detector 400 are equivalent to being integrated into the bracket composed of the first frame 100 and the second frame 300. Compared with the two being arranged separately, it is obvious that the matching accuracy between the light collector 200 and the light detector 400 in the present application scheme is improved, thereby ensuring the matching accuracy between the light detector 400 and the light collector 200 when the first adjustment component 500 adjusts the position of the light detector 400 through the second frame 300. After adjustment, the light detector 400 can better receive the signal light transmitted by the light collector 200, thereby ensuring that the optical device can better detect defects of the object to be measured.

[0096] The technical means disclosed in the solutions of the present invention are not limited to those disclosed in the above-mentioned embodiments, but also include technical solutions composed of any combination of the above-mentioned technical features. It should be noted that those skilled in the art may make various improvements and modifications without departing from the principles of the present invention, and such improvements and modifications are also considered to be within the scope of protection of the present invention.

Claims

1. A light detection device, characterized in that include: A first frame and a light collector assembled together, wherein the light collector is used to collect signal light from the object to be measured; a second frame and a light detector assembled therewith, wherein the light detector is used to receive the signal light transmitted by the light collector; The first regulating component is connected to the first frame and the second frame, and the first regulating component is configured to adjust the second frame along the axial direction of the light collector.

2. The light detection device according to claim 1, wherein The first control component includes: a first slide, slidably disposed on the first frame along a first setting direction, wherein the first setting direction is perpendicular to the axial direction of the light collector; a second slide, slidably disposed on the first slide along a second setting direction, wherein the second setting direction is inclined relative to the axial direction of the light collector; a guide member connected to the first frame and the second slide, the guide member being used to enable the second slide to be slidably disposed on the first frame along the axial direction of the light collector; The first regulating structure is configured to adjust the first slide along the first set direction; wherein, when the first regulating structure adjusts the first slide along the first set direction, the second slide is adapted to slide along the axial direction of the light collector so that the first slide slides.

3. The light detection device according to claim 2, wherein: The first regulating structure includes at least two first thread pairs and a first boss, wherein the two first thread pairs are disposed on one of the first frame and the first slide along the first setting direction, and the first boss is disposed on the other and is located between the abutting ends of the two first thread pairs; Alternatively, the first regulating structure includes an adjusting screw and a nut seat, the adjusting screw is arranged on the first frame along the first setting direction and is rotatably connected, and the nut seat is connected to the first slide and is threadedly connected to the adjusting screw.

4. The light detection device according to claim 2 or 3, characterized in that The first regulating component further includes a first locking structure, and the first locking structure includes: a connecting piece, the connecting piece being disposed on one of the first frame and the first slide, the connecting piece having a stopper affixed to the other, the stopper being provided with a waist-shaped groove along the first setting direction; A fixing knob, the screw of which is passed through the waist-shaped groove and is threadedly connected to the other one, and the fixing knob is used to press the stop portion.

5. The light detection device according to claim 1, wherein The first frame defines an installation space running through both ends thereof. The light collector is arranged in the installation space and extends from a port portion. The second frame is arranged at the other port portion of the first frame. The light detector is used to be arranged toward the port portion.

6. The light detection device according to claim 1, wherein The light detector further comprises: a base, disposed on a side of the first frame away from the second frame; The second regulating component is connected to the first frame and the base, and the second regulating component is configured to adjust the first frame along a third setting direction, and the third setting direction is perpendicular to the axial direction of the light collector.

7. The light detection device according to claim 1, wherein The light detector further comprises: a base, disposed on a side of the first frame away from the second frame; The support assembly includes a first adjustment member and an adjustment pad connected to each other, wherein the first adjustment member is arranged on the base and is configured to adjust the adjustment pad along the axial direction of the light collector, and the adjustment pad is used to abut against the surface of the bracket.

8. The light detection device according to claim 7, wherein: Light detectors also include: a second adjusting member, disposed on the base; The support pad is fixedly arranged on the surface of the bracket, and the second adjusting member can be adjusted along the axial direction of the light collector to abut against the side of the support pad away from the bracket, thereby padding the adjusting pad.

9. The light detection device according to claim 7, wherein: A first slot is formed on the bottom surface of the base and extends to the edge of the base, and the adjustment pad is at least partially embedded in the first slot.

10. The light detection device according to claim 1, wherein The light detector further includes a light attenuation component, and the light attenuation component includes: A bracket, wherein a channel is opened on the side of the light collector in a direction perpendicular to the axial direction thereof, the supporting portion of the bracket slides in the channel, and a plurality of light attenuation sheets of different specifications are sequentially loaded along the extending direction of the channel; The switching adjustment member is provided on the first frame and is used to adjust the bracket along the extension direction of the channel so that each of the light attenuation sheets is switched to a target position to attenuate the intensity of the signal light.

11. The light detection device according to claim 1, wherein The optical detector also includes a detector body, a first adjustment module, a second adjustment module and a third adjustment module, wherein the first adjustment module rotates around the Z axis to adjust the detector body, the second adjustment module slides around the X axis and the Y axis to adjust the detector body, and the third adjustment module rotates around the X axis and the Y axis to adjust the detector body.

12. The light detection device according to claim 11, wherein The first adjustment module includes a first rotating table, a second rotating table, a third thread pair and a third boss, wherein the first rotating table is connected to the detector body, the second rotating table is connected to the second frame, the first rotating table and the second rotating table are connected for rotation around the Z axis, the two third thread pairs are arranged on one of the edges of the first rotating table and the edges of the second rotating table, and the third boss is arranged on the other one and is located between the abutting ends of the two third thread pairs.

13. The light detection device according to claim 11, wherein The second adjustment modules are provided with two for adjusting the detector body along the X axis and the Y axis respectively; The second adjustment module includes a first movable stage, a second movable stage, a fourth threaded pair and a fourth boss, wherein the first movable stage is connected to the detector body, the second movable stage is connected to the second frame, the first movable stage and the second movable stage are slidingly connected, the two fourth threaded pairs are arranged on one of the edges of the first movable stage and the edges of the second movable stage, and the fourth boss is arranged on the other one and is located between the abutting ends of the two fourth threaded pairs.

14. The light detection device according to claim 11, wherein The third adjustment module includes a first turntable, a second turntable, a third turntable, a first elastic deformation part extending along the X-axis, a second elastic deformation part extending along the Y-axis, a first tension adjustment member and a second tension adjustment member, wherein the first turntable is connected to the detector body, the first elastic deformation part is connected to the edge of the first turntable and the edge of the second turntable, the first tensioning adjustment member is connected to at least one of the first turntable and the second turntable for adjusting the tension of the two, the second elastic deformation part is connected to the edge of the second turntable and the third turntable, the second tensioning adjustment member is connected to at least one of the second turntable and the third turntable for adjusting the tension of the two, and the third turntable is connected to the second frame.

15. An optical device, characterized in that include: a laser for emitting a detection beam toward an object to be measured; The light detection device according to any one of claims 1 to 14.

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