Gallium nitride device aging oven

Abstract

The invention relates to the technical field of semiconductors, and discloses a gallium nitride device aging oven, which comprises a supporting mechanism, the supporting mechanism comprises a box body, the outer wall of the bottom of the box body is fixedly connected with supporting legs, the inner wall of the box body is provided with a groove, the groove is internally provided with a detection mechanism, and the detection mechanism is fixedly connected with the supporting legs. A fixing shaft is fixedly connected to the inner wall of the side, close to the groove, of the box body, a first motor is fixedly connected to the outer wall of the side, close to the supporting legs, of the box body, and when an aging test is carried out on the gallium nitride device, a second motor drives the stably-clamped gallium nitride device to be detected to start to rotate through an auxiliary assembly; therefore, in the whole process of aging detection of the gallium nitride device in the box body, each part of the gallium nitride device can uniformly bear the same temperature and humidity environment, so that the test deviation caused by local environment difference is effectively avoided, and the accuracy and reliability of the test result are improved.

Description

Technical Field

[0001] The present invention relates to the field of semiconductor technology, in particular to a gallium nitride device aging box. Background Art

[0002] The GaN device aging chamber is a specialized device used to accelerate aging testing of semiconductor devices. It is designed to optimize the characteristics of the third-generation wide-bandgap semiconductor material, GaN. By simulating extreme operating conditions such as high temperature, high humidity, and electrical stress, the equipment conducts accelerated life tests on GaN power devices, RF devices, etc. to evaluate their long-term reliability and failure modes.

[0003] The patent application with application number CN202110542715.X discloses a gallium nitride device aging box, including a cooling module and a control module and a heating module arranged on the cooling module. The heating module includes a heating aluminum plate and a mounting aluminum plate for mounting the gallium nitride device. The mounting aluminum plate is arranged on the heating aluminum plate, and the heating aluminum plate includes heating rods arranged on both sides of the mounting aluminum plate; the cooling module includes a heat dissipation tube and an air duct connected to the heat dissipation tube, a first fan is provided at one end of the heat dissipation tube, and the heating aluminum plate is fixed to the upper end of the heat dissipation tube.

[0004] In summary, during the aging test of GaN devices, due to the temperature gradient inside the aging chamber, some devices may be in an over-temperature state for a long time, resulting in increased thermal stress in the material, parameter drift, and even structural damage. Devices in the low-temperature area cannot reach the preset aging conditions, resulting in deviations in life prediction and misjudgment of reliability, which in turn affects the accuracy of the test results.

[0005] To this end, we proposed a GaN device aging chamber. Summary of the Invention

[0006] In view of the deficiencies in the prior art, the present invention provides a gallium nitride device aging box to solve the problems raised in the above background technology.

[0007] To achieve the above objectives, the present invention provides the following technical solutions: a gallium nitride device aging box, comprising a support mechanism, the support mechanism comprising a box body, a bottom outer wall of the box body fixedly connected to a support leg, an inner wall of the box body having a groove, an interior of the groove having a detection mechanism disposed therein, an inner wall of the box body near the groove having a fixed shaft fixedly connected thereto, an outer wall of the box body near the support leg having a first motor fixedly connected thereto, an output end of the first motor passing through the box body and fixedly connected to a rotating shaft, and a clamping mechanism disposed therein; The clamping mechanism comprises: a sliding frame, the sliding frame being movably sleeved on the outer surface of the rotating shaft, the inner wall of the sliding frame being fixedly connected to a third telescopic rod, and the output end of the third telescopic rod being fixedly connected to a second connecting frame; The second motor is fixedly connected to the outer surface of the second connecting frame, the output end of the second motor is fixedly connected to the rotating frame, and an auxiliary component is arranged on the outside of the rotating frame away from the second motor.

[0008] According to the above technical solution, the auxiliary component includes a flip rod rotatably connected to the inner wall of the rotating frame, the outer wall of the flip rod away from the rotating frame is rotatably connected to a clamping plate through a rotating shaft, the outer wall of the clamping plate close to the flip rod is fixedly connected to a second spring, the end of the second spring away from the clamping plate is fixedly connected to the flip rod, and the second spring is used to assist the clamping plate to complete angle adjustment.

[0009] According to the above technical solution, the inner wall of the flip rod away from the clamping plate is rotatably connected to the second rotating rod through a rotating shaft, the outer wall of the second rotating rod away from the flip rod is rotatably connected to the force rod through a rotating shaft, the outer wall of the force rod away from the second rotating rod is fixedly connected to the connecting shaft, the end of the connecting shaft away from the force rod passes through the rotating frame and is fixedly connected to the third spring, the end of the third spring close to the force rod is fixedly connected to the rotating frame, and the third spring is used to assist the force rod to complete the reset.

[0010] According to the above technical solution, the detection mechanism includes a first connecting frame fixedly connected to the inner wall of the groove, the inner wall of the first connecting frame is fixedly connected to a first telescopic rod, the output end of the first telescopic rod is fixedly connected to a first connecting block, and the inner wall of the first connecting block on a side away from the first telescopic rod is fixedly connected to a second telescopic rod, and the first telescopic rod is used to adjust the spacing of the first connecting blocks.

[0011] According to the above technical solution, the output end of the second telescopic rod is fixedly connected to the second connecting block, the top outer wall of the second connecting block is fixedly connected to the detector, the output end of the detector is fixedly connected to the inspection probe, and the detector detects the resistance of the gallium nitride device through the inspection probe.

[0012] According to the above technical solution, the inner wall of the first connecting block is rotatably connected to the first rotating rod via a rotating shaft, the end of the first rotating rod away from the first connecting block is rotatably connected to the sliding block via a rotating shaft, the sliding block is movably sleeved on the outer surface of the fixed shaft, the top outer wall of the sliding block is fixedly connected to the first spring, the end of the first spring away from the sliding block is fixedly connected to the inner wall of the box, and the first spring is used to assist the sliding block to complete the reset.

[0013] According to the above technical solution, the outer wall of the box is fixedly connected to a display screen, the outer wall of the box away from the display screen is fixedly connected to a drain pipe, the top outer wall of the box is rotatably connected to the box door through a hinge, the top outer wall of the box door is fixedly connected to an exhaust pipe, the inner wall of the box close to the box door is fixedly connected to an atomizer, the atomizer passes through one side of the outer wall of the box and is fixedly connected to a water inlet pipe, the side of the atomizer away from the water inlet pipe is fixedly connected to an atomizing nozzle, and the water inlet pipe is used to control the humidity inside the box through the atomizing nozzle.

[0014] According to the above technical solution, an inclined plate is fixedly connected to the inner wall of the box body close to the water inlet pipe, a refrigerator is fixedly connected to the outer wall of the box body close to the inclined plate, and a heater is fixedly connected to the bottom outer wall of the box body. The inclined plate is used to guide the cold air generated by the refrigerator toward the side of the gallium nitride device.

[0015] Compared with the prior art, the present invention provides a gallium nitride device aging box with the following beneficial effects: 1. The present invention provides a GaN device aging chamber. When performing an aging test on a GaN device, a second motor drives the firmly clamped GaN device to be tested to rotate through an auxiliary component. This ensures that all parts of the GaN device are evenly exposed to the same temperature and humidity environment throughout the aging test process inside the chamber, effectively avoiding test deviations caused by local environmental differences, thereby improving the accuracy and reliability of the test results.

[0016] 2. The present invention provides a support mechanism to simulate the aging conditions of GaN devices in different humidity environments. The water inlet pipe releases water vapor through an atomizing nozzle to accurately adjust the humidity inside the box. When simulating a low-temperature aging environment, the cold air generated by the refrigerator is guided by the inclined plate to evenly cover the GaN device. When simulating a high-temperature aging environment, the heater will continuously heat the inner wall from the bottom of the box, raising the temperature inside the box and creating high-temperature aging test conditions for the device.

[0017] 3. The present invention provides a detection mechanism. When connecting the two ends of a GaN device to measure its resistance, the first telescopic rod drives the first connecting frame to move the first connecting block toward both sides of the GaN device, bringing it close to the GaN device. The second telescopic rod fixed to the inner wall of the first connecting block pushes the second connecting block toward the top side of the GaN device. After completing contact with the outer wall of the device top, the resistance of the GaN device is tested using the inspection probe at the output end of the detector.

[0018] 4. The present invention provides a clamping mechanism. When clamping and fixing GaN devices of different specifications, the third telescopic rod drives the second connecting frame toward the GaN device. When the edge of the GaN device touches the force-bearing rod, the force-bearing rod slides toward the rotating frame. At the same time, the second rotating rod drives the flipping rod to flip toward the GaN device. As the flipping rod rotates, the clamping plate connected to the end of the rotating frame rotates away from the rotating frame to clamp and fix the GaN device, thereby ensuring that the GaN device remains stable during subsequent operations. BRIEF DESCRIPTION OF THE DRAWINGS

[0019] Figure 1 This is a schematic diagram of the overall front structure of the present invention; Figure 2 It is a schematic diagram of the overall back structure of the present invention; Figure 3 This is a schematic diagram of the overall front cross-sectional structure of the present invention; Figure 4 It is a schematic cross-sectional structural diagram of the support mechanism of the present invention; Figure 5 It is a structural schematic diagram of the detection mechanism of the present invention; Figure 6 Schematic diagram of the clamping mechanism structure of the present invention Figure 1 ; Figure 7 Schematic diagram of the clamping mechanism structure of the present invention Figure 2 ; Figure 8 This is a schematic diagram of the auxiliary component structure of the present invention; Figure 9 For the present invention Figure 3 Schematic diagram of the enlarged structure of A in the middle.

[0020] In the figure: 1. Support mechanism; 101. Box body; 102. Support legs; 103. First motor; 104. Rotating shaft; 105. Display screen; 106. Refrigerator; 107. Inclined plate; 108. Heater; 109. Atomizer; 110. Water inlet pipe; 111. Atomizing nozzle; 112. Groove; 113. Fixed shaft; 114. Drain pipe; 115. Box door; 116. Exhaust pipe; 2. Detection mechanism; 201. First connecting frame; 202. First telescopic rod; 203. First connecting block; 204. Second telescopic rod ; 205, second connecting block; 206, detector; 207, inspection probe; 208, first rotating rod; 209, sliding block; 210, first spring; 3, clamping mechanism; 301, sliding frame; 302, third telescopic rod; 303, second connecting frame; 304, second motor; 305, rotating frame; 306, auxiliary component; 3061, flip rod; 3062, clamping plate; 3063, second spring; 3064, second rotating rod; 3065, force rod; 3066, connecting shaft; 3067, third spring. DETAILED DESCRIPTION

[0021] The technical solutions in the embodiments of the present invention will be clearly and completely described below in conjunction with the drawings in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, rather than all the embodiments.

[0022] Examples of the embodiments are shown in the accompanying drawings, wherein the same or similar reference numerals throughout represent the same or similar elements or elements having the same or similar functions. The embodiments described below with reference to the accompanying drawings are exemplary and are intended to be used to explain the present invention, but are not to be construed as limiting the present invention.

[0023] In the present invention, unless otherwise expressly specified or limited, the terms "mounted," "connected," "connect," "fixed," etc. should be understood broadly. For example, they may refer to fixed connection, detachable connection, or integration; mechanical connection or electrical connection; direct connection or indirect connection through an intermediate medium; internal communication between two components or interaction between two components. Those skilled in the art will understand the specific meanings of the above terms in the present invention based on specific circumstances.

[0024] Example 1: See Figure 1-Figure 4The present invention provides a technical solution: a gallium nitride device aging box, comprising a support mechanism 1, the support mechanism 1 comprising a box body 101, a bottom outer wall of the box body 101 fixedly connected to a support leg 102, an inner wall of the box body 101 having a groove 112, an interior of the groove 112 being provided with a detection mechanism 2, an inner wall of the box body 101 on a side close to the groove 112 being fixedly connected to a fixed shaft 113, an outer wall of the box body 101 on a side close to the support leg 102 being fixedly connected to a first motor 103, an output end of the first motor 103 passing through the box body 101 and fixedly connected to a rotating shaft 104, and an interior of the box body 101 being provided with a clamping mechanism 3; The clamping mechanism 3 includes: The sliding frame 301 is movably connected to the outer surface of the rotating shaft 104. The inner wall of the sliding frame 301 is fixedly connected to the third telescopic rod 302. The output end of the third telescopic rod 302 is fixedly connected to the second connecting frame 303. The second motor 304 is fixedly connected to the outer surface of the second connecting frame 303. The output end of the second motor 304 is fixedly connected to the rotating frame 305. An auxiliary component 306 is provided on the outside of the rotating frame 305 away from the second motor 304. When testing the gallium nitride device to be tested for aging, the box door 115 connected to the top of the box 101 by a hinge is first opened, and the gallium nitride device to be tested is placed inside the box 101. Then, the first motor 103 drives the sliding frame 301 to slide via the rotating shaft 104. At the same time, the third telescopic rod 302 pushes the second connecting frame 303, driving the auxiliary component 306 to move toward the side of the GaN device to be tested, thereby using the auxiliary component 306 to clamp and fix the GaN device to be tested. After the auxiliary component 306 completes the clamping and fixing operation of the GaN device to be tested, the second motor 304 causes the auxiliary component 306 to rotate the clamped GaN device to be tested, thereby ensuring that the temperature and humidity of various parts of the GaN device to be tested remain consistent during the aging test operation inside the box 101, thereby improving the accuracy of the test results.

[0025] The outer wall of the box body 101 is fixedly connected to the display screen 105, the outer wall of the box body 101 on the side away from the display screen 105 is fixedly connected to the drain pipe 114, the top outer wall of the box body 101 is connected to the box door 115 through a hinge, the top outer wall of the box door 115 is fixedly connected to the exhaust pipe 116, the inner wall of the box body 101 on the side close to the box door 115 is fixedly connected to the atomizer 109, the atomizer 109 passes through the outer wall of one side of the box body 101 and is fixedly connected to the water inlet pipe 110, the side of the atomizer 109 away from the water inlet pipe 110 is fixedly connected to the atomizing nozzle 111, the inner wall of the box body 101 on the side close to the water inlet pipe 110 is fixedly connected to the inclined plate 107, the outer wall of the box body 101 on the side close to the inclined plate 107 is fixedly connected to the refrigerator 106, and the box body A heater 108 is fixedly connected to the bottom outer wall of 101. When the GaN device to be tested is subjected to aging test, the aging degree is detected under different conditions through multi-dimensional environmental simulation. The water inlet pipe 110 is connected to the atomizing nozzle 111, which sprays water mist into the interior of the box 101 to control the humidity environment inside the box 101, thereby simulating the aging of the GaN device under different humidity conditions. The cold air generated by the refrigerator 106 is guided by the inclined plate 107 and blown onto the surface of the GaN device, thereby simulating the aging effect of the low temperature environment on the device. The heater 108 continuously heats upward from the bottom of the box 101, so that the temperature of the inner wall of the box is evenly increased, thereby creating a high-temperature environment and simulating the aging degree of the GaN device under high temperature conditions.

[0026] During the aging test of GaN devices, environmental factors have a significant impact on their aging speed, and there is a temperature gradient inside the box 101. Different areas of the device may not reach the same aging conditions, which will seriously affect the accuracy of life prediction and test results. To solve this problem, a support mechanism 1 is set up. During the test, the water inlet pipe 110 adjusts the humidity inside the box 101 through the atomizing nozzle 111 to simulate aging conditions under different humidity environments; the refrigerator 106 uses the inclined plate 107 to guide cold air to the GaN device to simulate a low-temperature aging environment; the heater 108 continuously heats the inner wall from the bottom of the box 101 to simulate a high-temperature aging environment. At the same time, the auxiliary component 306 is driven by the second motor 304 to drive the clamped GaN device to rotate, thereby ensuring that all parts of the device are evenly subjected to temperature and humidity changes during the aging test, which can effectively improve the accuracy and reliability of the test results.

[0027] Example 2: Please refer to Figure 5On the basis of the first embodiment, the present invention provides a technical solution: the detection mechanism 2 includes a first connecting frame 201 fixedly connected to the inner wall of the groove 112, the inner wall of the first connecting frame 201 is fixedly connected to a first telescopic rod 202, the output end of the first telescopic rod 202 is fixedly connected to a first connecting block 203, the inner wall of the first connecting block 203 away from the first telescopic rod 202 is fixedly connected to a second telescopic rod 204, the first telescopic rod 202 is used to adjust the spacing of the first connecting block 203, the output end of the second telescopic rod 204 is fixedly connected to a second connecting block 205, and the top outer wall of the second connecting block 205 is fixedly connected to the detector 20 6. The output end of the detector 206 is fixedly connected to an inspection probe 207. When performing aging testing on a GaN device during testing, the degree of aging can be analyzed based on the resistance of the GaN device under different environments. When it is necessary to connect the two ends of the GaN device to measure its resistance, the first connecting frame 201 first pushes the first connecting block 203 toward the sides of the GaN device. Then, the second telescopic rod 204 fixedly connected to the inner wall of the first connecting block 203 pushes the second connecting block 205 toward the top side of the GaN device. Finally, the detector 206 detects the resistance of the GaN device using the inspection probe 207.

[0028] The inner wall of the first connecting block 203 is rotatably connected to a first rotating rod 208 via a rotating shaft. The end of the first rotating rod 208 away from the first connecting block 203 is rotatably connected to a sliding block 209 via a rotating shaft. The sliding block 209 is movably sleeved on the outer surface of the fixed shaft 113. The top outer wall of the sliding block 209 is fixedly connected to a first spring 210. The end of the first spring 210 away from the sliding block 209 is fixedly connected to the inner wall of the box body 101. The first spring 210 is used to assist the sliding block 209 in completing the reset. During the movement of the first connecting block 203, it drives the sliding block 209 to slide along the outer surface of the fixed shaft 113 through the first rotating rod 208, and at the same time stretches the first spring 210. The sliding block 209 ensures that the sliding distances of the first connecting blocks 203 on both sides are always synchronized through the first rotating rod 208, thereby achieving alignment of the two ends of the gallium nitride device.

[0029] When performing aging testing on GaN devices of different specifications, it is necessary to ensure that the inspection probe 207 contacts the edges of both ends of the device simultaneously so that the detector 206 can analyze its resistance changes under different environments and thus assess the degree of aging. To this end, a detection mechanism 2 is provided. The first connecting frame 201 drives the first connecting block 203 to move toward the two sides of the GaN device. The second telescopic rod 204 on the inner wall of the first connecting block 203 pushes the second connecting block 205 toward the top of the device, and the detector 206 completes the resistance test of the GaN device through the inspection probe 207.

[0030] Example 3: Please refer to Figure 6-Figure 9The second spring 3063 is used to assist the clamping plate 3062 in completing the angle adjustment of the clamping plate 3062, and the inner wall of the flip rod 3061 away from the clamping plate 3062 is rotatably connected to the inner wall of the rotating frame 305. The outer wall of the flip rod 3061 at one end away from the rotating frame 305 is rotatably connected to the clamping plate 3062 through a rotating shaft. The outer wall of the clamping plate 3062 close to the flip rod 3061 is fixedly connected to a second spring 3063. The end of the second spring 3063 away from the clamping plate 3062 is fixedly connected to the flip rod 3061. The second spring 3063 is used to assist the clamping plate 3062 in completing the angle adjustment. The inner wall of the flip rod 3061 away from the clamping plate 3062 is rotatably connected to the second rotating rod 3064 through a rotating shaft. The outer wall of the second rotating rod 3064 away from the flip rod 3061 is rotatably connected to the force rod 3065 through a rotating shaft. A connecting shaft 3066 is fixedly connected to an outer wall of one side of 64. The end of the connecting shaft 3066 away from the force-bearing rod 3065 passes through the rotating frame 305 and is fixedly connected to a third spring 3067. The end of the third spring 3067 near the force-bearing rod 3065 is fixedly connected to the rotating frame 305. The third spring 3067 is used to assist the force-bearing rod 3065 in completing the reset. When clamping and fixing gallium nitride devices of different specifications, the third telescopic rod 302 pushes the second connecting frame 303 toward the gallium nitride device. When the edge of the gallium nitride device contacts the force-bearing rod 3065, the force-bearing rod 3065 slides toward the side of the rotating frame 305 and pulls the flip rod 3061 to flip toward the gallium nitride device through the second rotating rod 3064. At this time, the clamping plate 3062 rotatably connected to the end of the flip rod 3061 away from the rotating frame 305 clamps and fixes the gallium nitride device.

[0031] When performing aging tests on GaN devices of different specifications, frequently replacing the corresponding fixtures can reduce testing efficiency. To address this issue, a clamping mechanism 3 is provided. When GaN devices of different specifications need to be fixed, the third telescopic rod 302 pushes the second connecting frame 303 toward the device. After the force-bearing rod 3065 contacts the device, it pulls the flip rod 3061 toward the device via the second rotating rod 3064. The flip rod 3061 then rotates the connected clamping plate 3062 at the far end to achieve secure clamping. At the same time, to ensure that the GaN device can reach the same environmental conditions at all locations during the aging test, the second motor 304 drives the auxiliary component 306 to rotate the clamped device. This allows the GaN device to be evenly exposed to the effects of temperature and humidity within the box 101, effectively improving the accuracy and reliability of the aging test results.

[0032] It should be noted that, in this document, relational terms such as first and second, etc., are used only to distinguish one entity or operation from another entity or operation, and do not necessarily require or imply any actual relationship or order between these entities or operations. Moreover, the terms "comprises," "comprising," or any other variations thereof are intended to cover non-exclusive inclusion, such that a process, method, article, or apparatus that includes a list of elements includes not only those elements but also other elements not explicitly listed, or elements inherent to such process, method, article, or apparatus.

[0033] Finally, it should be noted that the above descriptions are merely preferred embodiments of the present invention and are not intended to limit the present invention. Although the present invention has been described in detail with reference to the aforementioned embodiments, those skilled in the art will be able to modify the technical solutions described in the aforementioned embodiments or substitute equivalents for some of the technical features. Any modifications, equivalent substitutions, and improvements made within the spirit and principles of the present invention shall be included within the scope of protection of the present invention.

Claims

1. A gallium nitride device aging box, comprising a support mechanism (1), the support mechanism (1) comprising a box body (101), a bottom outer wall of the box body (101) being fixedly connected to a support leg (102), an inner wall of the box body (101) being provided with a groove (112), an interior of the groove (112) being provided with a detection mechanism (2), an inner wall of the box body (101) on a side close to the groove (112) being fixedly connected to a fixed shaft (113), an outer wall of the box body (101) on a side close to the support leg (102) being fixedly connected to a first motor (103), an output end of the first motor (103) passing through the box body (101) and being fixedly connected to a rotating shaft (104), characterized in that: A clamping mechanism (3) is provided inside the box (101); The clamping mechanism (3) comprises: A sliding frame (301), the sliding frame (301) is movably sleeved on the outer surface of the rotating shaft (104), the inner wall of the sliding frame (301) is fixedly connected to a third telescopic rod (302), and the output end of the third telescopic rod (302) is fixedly connected to a second connecting frame (303); A second motor (304) is fixedly connected to the outer surface of the second connecting frame (303); an output end of the second motor (304) is fixedly connected to a rotating frame (305); an auxiliary component (306) is provided on the outside of the rotating frame (305) away from the second motor (304).

2. The gallium nitride device aging chamber according to claim 1, characterized in that: The auxiliary component (306) includes a flip rod (3061) rotatably connected to the inner wall of the rotating frame (305); the outer wall of one end of the flip rod (3061) away from the rotating frame (305) is rotatably connected to a clamping plate (3062) via a rotating shaft; the outer wall of the clamping plate (3062) on one side close to the flip rod (3061) is fixedly connected to a second spring (3063); the end of the second spring (3063) away from the clamping plate (3062) is fixedly connected to the flip rod (3061); the second spring (3063) is used to assist the clamping plate (3062) in completing angle adjustment.

3. The gallium nitride device aging chamber according to claim 2, characterized in that: The inner wall of the flip rod (3061) away from the clamping plate (3062) is rotatably connected to the second rotating rod (3064) via a rotating shaft. The outer wall of the second rotating rod (3064) away from the flip rod (3061) is rotatably connected to the force-bearing rod (3065) via a rotating shaft. The outer wall of the force-bearing rod (3065) away from the second rotating rod (3064) is fixedly connected to a connecting shaft (3066). The end of the connecting shaft (3066) away from the force-bearing rod (3065) passes through the rotating frame (305) and is fixedly connected to a third spring (3067). The end of the third spring (3067) close to the force-bearing rod (3065) is fixedly connected to the rotating frame (305). The third spring (3067) is used to assist the force-bearing rod (3065) in completing the reset.

4. The gallium nitride device aging chamber according to claim 1, characterized in that: The detection mechanism (2) comprises a first connecting frame (201) fixedly connected to the inner wall of the groove (112); a first telescopic rod (202) is fixedly connected to the inner wall of the first connecting frame (201); an output end of the first telescopic rod (202) is fixedly connected to a first connecting block (203); a second telescopic rod (204) is fixedly connected to the inner wall of the first connecting block (203) away from the first telescopic rod (202); and the first telescopic rod (202) is used to adjust the spacing of the first connecting blocks (203).

5. The gallium nitride device aging chamber according to claim 4, characterized in that: The output end of the second telescopic rod (204) is fixedly connected to a second connecting block (205), the top outer wall of the second connecting block (205) is fixedly connected to a detector (206), the output end of the detector (206) is fixedly connected to an inspection probe (207), and the detector (206) detects the resistance of the gallium nitride device through the inspection probe (207).

6. The gallium nitride device aging chamber according to claim 5, characterized in that: The inner wall of the first connecting block (203) is rotatably connected to a first rotating rod (208) via a rotating shaft, and one end of the first rotating rod (208) away from the first connecting block (203) is rotatably connected to a sliding block (209) via a rotating shaft, and the sliding block (209) is movably sleeved on the outer surface of the fixed shaft (113), and the top outer wall of the sliding block (209) is fixedly connected to a first spring (210), and one end of the first spring (210) away from the sliding block (209) is fixedly connected to the inner wall of the box body (101), and the first spring (210) is used to assist the sliding block (209) in completing the reset.

7. The gallium nitride device aging chamber according to claim 1, characterized in that: The outer wall of the box (101) is fixedly connected to a display screen (105), the outer wall of the box (101) on a side away from the display screen (105) is fixedly connected to a drain pipe (114), the top outer wall of the box (101) is rotatably connected to a box door (115) through a hinge, the top outer wall of the box door (115) is fixedly connected to an exhaust pipe (116), the inner wall of the box (101) on a side close to the box door (115) is fixedly connected to an atomizer (109), the atomizer (109) passes through the outer wall of one side of the box (101) and is fixedly connected to a water inlet pipe (110), the side of the atomizer (109) away from the water inlet pipe (110) is fixedly connected to an atomizing nozzle (111), and the water inlet pipe (110) is used to control the humidity inside the box (101) through the atomizing nozzle (111).

8. The gallium nitride device aging chamber according to claim 7, characterized in that: An inclined plate (107) is fixedly connected to an inner wall of the box body (101) on one side close to the water inlet pipe (110), a refrigerator (106) is fixedly connected to an outer wall of the box body (101) on one side close to the inclined plate (107), and a heater (108) is fixedly connected to the outer wall of the bottom of the box body (101). The inclined plate (107) is used to guide the cold air generated by the refrigerator (106) toward the side of the gallium nitride device.

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