Method and system for controlling single crystal furnace

Abstract

The invention provides a single crystal furnace control method and system, and the method comprises the following steps according to a preset process step based on a received single crystal furnace starting signal: collecting the current target operation information of a single crystal furnace from an MES system and a coil base PLC system; matching a target process control file based on the target operation information; and modifying the file name of the target process control file into a standard name, and downloading the standard name to a specified address to control the single crystal furnace to operate according to the process parameters indicated by the process control file. Through automatic matching of dynamic process control files, the manual supervision burden on a production line is relieved, the process switching time is shortened, the production efficiency is improved, and meanwhile the short line rate caused by mistaken file selection is reduced.

Description

Technical Field

[0001] The present application relates to the technical field of single crystal furnaces, and in particular to a control method and system for a single crystal furnace. Background Art

[0002] In existing single crystal furnace automation control systems, manual selection of process control files is still required. However, the naming conventions for process control files within the system are inconsistent, making searches time-consuming and dependent on experience. This results in low accuracy and can easily lead to production accidents. Furthermore, manual transmission of process control files also poses a risk of delays. Summary of the Invention

[0003] The purpose of the embodiments of the present application is to provide a control method and system for a single crystal furnace, so as to solve the problem in the prior art that the selection of process control files in the control of a single crystal furnace depends on manual labor, poses production risks, and affects production efficiency.

[0004] In a first aspect, the present invention provides a method for controlling a single crystal furnace, the method comprising:

[0005] Based on the received single crystal furnace start-up signal, the following steps are performed according to the preset work steps: the current target operation information of the single crystal furnace is collected; based on the target operation information, the target process control file is matched; the file name of the target process control file is modified to a standard name, and downloaded to the specified address to control the single crystal furnace to operate according to the process parameters indicated by the process control file.

[0006] In an optional embodiment, the file name of the process control file includes the furnace model, product specifications, production stage and residual material weight in sequence, and the target operation information includes at least the target furnace model, target product specifications, current production stage and current residual material weight. The target process control file is matched in the following manner:

[0007] From multiple process control files pre-stored in the MES system, determine the first process control file whose file name matches the target furnace model and product specifications; from the first process control file, determine the second process control file whose file name matches the current production stage; from the second control file, determine a third process control file that matches the current residual material weight as the target process control file.

[0008] In an optional embodiment, before the step of modifying the target process control file, the method further includes verifying whether the target process control file is complete; if complete, performing the step of modifying the target process control file.

[0009] In an optional embodiment, the method includes calculating a hash value of the target process control file; determining whether the hash value is equal to a preset value; and if so, determining that the target process control file is complete.

[0010] In an optional embodiment, before the step of determining whether the target process control file is complete, the step further includes determining the total number of lines in the target process control file; determining whether the total number of lines is equal to a preset number of lines; if so, executing the step of determining whether the target process control file is complete.

[0011] In an optional embodiment, before the step of determining whether the target process control file is complete, it also includes determining whether the encoding format of the target process control file is a preset format; if so, executing the step of determining whether the target process control file is complete.

[0012] In a second aspect, the present invention provides a control system for a single crystal furnace. The control system includes a controller configured to execute the following steps according to preset process steps based on a received single crystal furnace start-up signal:

[0013] Obtain the current target operation information of the single crystal furnace;

[0014] Based on the target operation information, match the target process control file;

[0015] Modify the file name of the target process control file to a standard name and download it to the specified address to control the single crystal furnace to operate according to the process parameters indicated by the process control file.

[0016] In an optional embodiment, the file name of the process control file includes the furnace model, product specifications, production stage and residual material weight in sequence, and the target operation information includes at least the target furnace model, target product specifications, current production stage and current residual material weight. The controller matches the target process control file in the following manner:

[0017] Determining a first process control file whose file name matches the target furnace model and product specifications from a plurality of pre-stored process control files;

[0018] Determining, from the first process control file, a second process control file whose file name matches the current production stage;

[0019] A third process control file that matches the current residual material weight is determined from the second control file as the target process control file.

[0020] In an optional embodiment, the controller is further configured to verify whether the target process control file is complete before the step of modifying the target process control file;

[0021] If complete, execute the step of modifying the target process control file.

[0022] In an optional embodiment, the controller is specifically configured to calculate a hash value of the target process control file;

[0023] Determine whether the hash value is equal to a preset value;

[0024] If yes, then make sure the target process control document is complete.

[0025] This application provides a single crystal furnace control method and system. The method includes executing the following steps based on a received single crystal furnace start signal and according to preset process steps: collecting the current target operation information of the single crystal furnace from the MES system and the furnace table PLC system; matching a target process control file based on the target operation information; modifying the file name of the target process control file to a standard name and downloading it to a specified address to control the single crystal furnace to operate according to the process parameters indicated by the process control file. Through dynamic automatic matching of process control files, the burden of manual supervision on the production line is reduced, process switching time is shortened, production efficiency is improved, and the short line rate caused by incorrect file selection is reduced. BRIEF DESCRIPTION OF THE DRAWINGS

[0026] In order to more clearly illustrate the technical solutions of the embodiments of the present application, the following is a brief introduction to the drawings required for use in the embodiments of the present application. It should be understood that the following drawings only show certain embodiments of the present application and therefore should not be regarded as limiting the scope. For ordinary technicians in this field, other relevant drawings can be obtained based on these drawings without creative work.

[0027] Figure 1 This is a flow chart of a control method for a single crystal furnace provided in an embodiment of the present application. DETAILED DESCRIPTION

[0028] The technical solutions in the embodiments of the present application will be described below in conjunction with the drawings in the embodiments of the present application.

[0029] Example 1

[0030] Figure 1 This is a flow chart of a control method for a single crystal furnace provided in an embodiment of the present application. Figure 1 As shown, a control method for a single crystal furnace provided in an embodiment of the present application can be applied to a Jingsheng Electromechanical single crystal furnace system automatically controlled by TwinCAT software, and can be specifically applied to the selection and automatic issuance of process control files. The method includes:

[0031] Based on the received single crystal furnace start signal, the following steps are performed according to the preset steps:

[0032] The single crystal furnace start signal here is used to instruct the target furnace to start production of the target product specifications. The length of the preset step can be set as needed.

[0033] S1. Collect the current target operation information of the single crystal furnace.

[0034] The target operation information includes at least the target furnace model, target product specifications, current production stage, and current residual material weight. The target furnace model, target product specifications, and current production stage can be obtained through the manufacturing execution system (MES). The current raw material weight can be obtained from the operation data recorded by the furnace PLC or through other sensors. For example, the target furnace model can be "JZ-2025", the target product specifications can be "N type 12 inches", the current production stage can be "constant diameter stage", and the current residual material weight can be "50 kg".

[0035] S2. Based on the target operation information, match the target process control file.

[0036] The process control files can be pre-generated and stored in the MES system's process control file directory, for example, " / opt / single_crystal / process / ." These process control files can be named according to a specific format, such as <parameter 1>_<parameter 2>_<parameter 3>_<parameter 4>.csv. Parameter 1 can be the furnace model, parameter 2 can be the product specification, parameter 3 can be the production stage, and parameter 4 can be the residual material weight. The process control files are used to control parameters such as the furnace's reaction temperature.

[0037] Here, based on a multimodal matching algorithm (such as fuzzy matching + rule filtering), the unique matching process file can be screened out from the directory. Specifically, the target process control file can be matched in the following ways:

[0038] From multiple pre-stored process control files in the MES system, a first process control file whose file name matches the target furnace model and product specifications is identified. From the first process control file, a second process control file whose file name matches the current production stage is identified. From the second control file, a third process control file that matches the current residual material weight is identified as the target process control file.

[0039] According to the information of the MES system, the product size and model are matched first, then whether it is a completed section and the specific number of sections are matched, and then the range of the remaining material weight is matched to determine the unique process control file.

[0040] S3. Modify the file name of the target process control file to a standard name and download it to a designated address to control the single crystal furnace to operate according to the process parameters indicated by the process control file.

[0041] In step S3, the target process control file is renamed to a name recognizable by the single crystal furnace, such as "TESTSOP.CSV." The renamed file is then sent to a designated directory (e.g., / config / process / ) to trigger the automatic download mechanism of the single crystal furnace control system, which in turn causes the target furnace to operate according to the operating parameters specified in the target process control file.

[0042] Example 2

[0043] In one embodiment of the present application, in order to further improve the accuracy of process control file selection and reduce the short-line rate of the production line, before modifying the target process control file, the process further includes verifying whether the target process control file is complete; if complete, the process of modifying the target process control file is executed. If incomplete, an error message can be issued, allowing timely manual intervention.

[0044] Specifically, a hash value of the target process control file can be calculated; a determination can be made as to whether the hash value is equal to a preset value; if so, the target process control file is determined to be complete. The hash value can be calculated using a SHA-256 algorithm or the like.

[0045] Furthermore, before the step of determining whether the target process control file is complete, the step may also include determining the total number of lines in the target process control file; determining whether the total number of lines is equal to a preset number of lines; if so, executing the step of determining whether the target process control file is complete.

[0046] Before the step of determining whether the target process control file is complete, the method may further include determining whether the encoding format of the target process control file is a preset format; if so, executing the step of determining whether the target process control file is complete.

[0047] Here you can check whether the encoding format of the process file content is the specified GBK-8, whether the total number of lines is the same as the required number of lines, and whether the content in the process control file has been modified or deleted, and then determine whether the selected process control file can be executed normally.

[0048] In a specific embodiment, a process file directory (such as / opt / single_crystal / process / ) can be configured in the MES system to store N-type 12-inch silicon wafer process files, with the naming rule being <furnace model>_<product specification><segment>_<residual material weight>.csv.

[0049] When the single crystal furnace starts and triggers the specified process step, the control system automatically scans the directory and loads the latest version of the process file. The furnace model (such as JZ-2025), product specifications (such as N-type 12 inches), current section (such as equal diameter section) and residual material weight (such as 50kg) can be collected in real time through PLC or sensors. The process file directory is preset in the MES system (such as / opt / single_crystal / process / ), and the file naming rule is <parameter 1>_<parameter 2>_<parameter 3>_<parameter 4>.csv (such as JZ-2025_N-type 12 inches_equal diameter section_50kg.csv). Based on the multimodal matching algorithm (such as fuzzy matching + rule filtering), the unique matching process file is screened from the directory.

[0050] When the remaining material weight is less than 50kg and the current segment is "3 equal diameter segments," the system automatically matches and renames the file to TESTSOP.csv. The matching file is renamed to the format required by the Jingsheng single crystal furnace (e.g., TESTSOP.csv). The file integrity is verified using a hash checksum (e.g., SHA-256) to ensure it has not been tampered with. The file is then sent to the single crystal furnace's designated directory (e.g., / config / process / ), triggering the furnace's automatic download mechanism and enabling unattended production.

[0051] The control method for a single crystal furnace provided in an embodiment of the present application has improved production efficiency compared with the existing technology: the single process switching time is shortened from 3 minutes to 15 seconds, supporting 24-hour unmanned operation; accuracy is improved: the parameter matching accuracy rate is ≥99.9%, reducing the disconnection rate caused by file errors; operating cost savings: reducing the need for main operators by 20%, saving manpower.

[0052] Example 3

[0053] In one embodiment of the present application, a control system for a single crystal furnace is provided. The control system includes a controller configured to execute the following steps according to preset process steps based on a received single crystal furnace start-up signal:

[0054] Obtain the current target operation information of the single crystal furnace;

[0055] Based on the target operation information, match the target process control file;

[0056] Modify the file name of the target process control file to a standard name and download it to the specified address to control the single crystal furnace to operate according to the process parameters indicated by the process control file.

[0057] In an optional embodiment, the file name of the process control file includes the furnace model, product specifications, production stage and residual material weight in sequence, and the target operation information includes at least the target furnace model, target product specifications, current production stage and current residual material weight. The controller matches the target process control file in the following manner:

[0058] Determining a first process control file whose file name matches the target furnace model and product specifications from a plurality of pre-stored process control files;

[0059] Determining, from the first process control file, a second process control file whose file name matches the current production stage;

[0060] A third process control file that matches the current residual material weight is determined from the second control file as the target process control file.

[0061] In an optional embodiment, the controller is further configured to verify whether the target process control file is complete before the step of modifying the target process control file;

[0062] If complete, execute the step of modifying the target process control file.

[0063] In an optional embodiment, the controller is specifically configured to calculate a hash value of the target process control file;

[0064] Determine whether the hash value is equal to a preset value;

[0065] If yes, then make sure the target process control document is complete.

[0066] The control principle of the control system provided in the embodiment of the present application is the same as the control method in the aforementioned embodiment, and will not be repeated here.

[0067] In the embodiments provided in this application, it should be understood that the disclosed devices and methods can be implemented in other ways. The device embodiments described above are merely schematic. For example, the division of the units is only a logical function division. There may be other division methods in actual implementation. For example, multiple units or components can be combined or integrated into another system, or some features can be ignored or not executed. Another point is that the mutual coupling or direct coupling or communication connection shown or discussed can be through some communication interface, indirect coupling or communication connection of devices or units, which can be electrical, mechanical or other forms.

[0068] In addition, the units described as separate components may or may not be physically separate, and the components shown as units may or may not be physical units, that is, they may be located in one place or distributed across multiple network units. Some or all of the units may be selected according to actual needs to achieve the purpose of the solution of this embodiment.

[0069] Furthermore, the functional modules in each embodiment of the present application can be integrated together to form an independent part, or each module can exist independently, or two or more modules can be integrated to form an independent part.

[0070] It should be noted that if the function is implemented in the form of a software function module and sold or used as an independent product, it can be stored in a computer-readable storage medium. Based on this understanding, the technical solution of the present application, or the part that contributes to the prior art, or the part of the technical solution, can be embodied in the form of a software product. The computer software product is stored in a storage medium and includes several instructions for enabling a computer device (which can be a personal computer, a server, or a network device, etc.) to execute all or part of the steps of the method described in each embodiment of the present application. The aforementioned storage medium includes: various media that can store program codes, such as a USB flash drive, a mobile hard disk, a read-only memory (ROM), a random access memory (RAM), a magnetic disk, or an optical disk.

[0071] In this document, relational terms such as first and second, etc. are used merely to distinguish one entity or operation from another entity or operation, but do not necessarily require or imply any actual relationship or order between these entities or operations.

[0072] The above description is merely an embodiment of the present application and is not intended to limit the scope of protection of the present application. For those skilled in the art, various modifications and variations of the present application are possible. Any modifications, equivalent substitutions, improvements, etc. made within the spirit and principles of the present application shall be included in the scope of protection of the present application.

Claims

1. A control method for a single crystal furnace, characterized in that: The method comprises: Based on the received single crystal furnace start signal, the following steps are performed according to the preset steps: Collect the current target operation information of the single crystal furnace; Matching a target process control file based on the target operation information; Modify the file name of the target process control file to a standard name and download it to the specified address to control the single crystal furnace to operate according to the process parameters indicated by the process control file.

2. The method according to claim 1, characterized in that The name of the process control file includes the furnace model, product specifications, production stage and residual material weight in sequence. The target operation information includes at least the target furnace model, target product specifications, current production stage and current residual material weight. The target process control file is matched in the following way: Determine the first process control file whose file name matches the target furnace model and product specifications from multiple process control files pre-stored in the MES system; Determining, from the first process control file, a second process control file whose file name matches the current production stage; A third process control file that matches the current residual material weight is determined from the second control file as the target process control file.

3. The method according to claim 1, characterized in that Before modifying the target process control file, it also includes: Verify that the target process control documents are complete; If complete, execute the step of modifying the target process control file.

4. The method according to claim 3, characterized in that The method comprises: Calculate the hash value of the target process control file; Determining whether the hash value is equal to a preset value; If yes, then make sure the target process control document is complete.

5. The method according to claim 4, characterized in that Before determining the steps to complete the target process control document, it also includes: Determine the total number of lines in the target process control file; Determining whether the total number of rows is equal to a preset number of rows; If yes, proceed to the step of determining whether the target process control document is complete.

6. The method according to claim 5, characterized in that Before determining the steps to complete the target process control document, it also includes: Determine whether the encoding format of the target process control file is the preset format; If yes, proceed to the step of determining whether the target process control document is complete.

7. A control system for a single crystal furnace, characterized in that: The control system includes a controller for executing the following steps according to preset process steps based on the received single crystal furnace start-up signal: Obtain the current target operation information of the single crystal furnace; Matching a target process control file based on the target operation information; Modify the file name of the target process control file to a standard name and download it to the specified address to control the single crystal furnace to operate according to the process parameters indicated by the process control file.

8. The system according to claim 7, characterized in that The name of the process control file includes the furnace model, product specifications, production stage and residual material weight in sequence. The target operation information includes at least the target furnace model, target product specifications, current production stage and current residual material weight. The controller matches the target process control file in the following way: Determining a first process control file whose file name matches the target furnace model and product specifications from a plurality of pre-stored process control files; Determining, from the first process control file, a second process control file whose file name matches the current production stage; A third process control file that matches the current residual material weight is determined from the second control file as the target process control file.

9. The system according to claim 7, wherein: The controller is further configured to verify whether the target process control file is complete before the step of modifying the target process control file; If complete, execute the step of modifying the target process control file.

10. The system according to claim 9, characterized in that The controller is specifically used to calculate the hash value of the target process control file; Determining whether the hash value is equal to a preset value; If yes, then make sure the target process control document is complete.

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