Ejector pin assembly, process chamber and semiconductor process equipment

Abstract

The invention discloses an ejector pin assembly, a process chamber and semiconductor process equipment, the ejector pin assembly comprises an ejector pin, an ejector pin mounting part, a fixed seat, a first rolling piece and a second rolling piece, the first rolling piece and the second rolling piece are both arranged on the fixed seat, and the ejector pin mounting part is arranged on the fixed seat. The ejector pin mounting part is clamped between the first rolling piece and the second rolling piece in a first direction, and the first rolling piece is in rolling fit with a first rolling matching surface of the ejector pin mounting part in a plane perpendicular to the first direction; the second rolling part is in rolling fit with a second rolling matching surface of the ejector pin mounting part in a plane perpendicular to the first direction, the ejector pin is connected with the ejector pin mounting part and extends in the first direction, and the ejector pin can drive the ejector pin mounting part to move in the plane perpendicular to the first direction. According to the scheme, the risk that the ejector pin is broken due to rubbing between the ejector pin and the supporting seat can be solved.

Description

Technical Field

[0001] The present invention relates to the technical field of semiconductor equipment, and in particular to a ejector pin assembly, a process chamber and semiconductor process equipment. Background Art

[0002] Semiconductor processing equipment is equipment that processes semiconductor sheets (such as wafers). During some processes (such as etching processes), the process needs to be carried out in a reaction chamber with a wafer support structure. When the semiconductor sheet needs to be transferred into the reaction chamber, the ejector pins of the wafer support structure rise to pass through the supporting surface of the support seat and lift the semiconductor sheet (such as a wafer) on the transfer device. After the transfer device exits the reaction chamber, the ejector pins descend and retract to below the supporting surface to place the semiconductor sheet on the support seat. After the process on the semiconductor sheet is completed, the ejector pins rise to lift the semiconductor sheet from the supporting surface, and the transfer device transfers the semiconductor sheet out of the reaction chamber.

[0003] However, due to installation errors and processing errors, the ejector pin is prone to deflection relative to the avoidance hole of the support seat (i.e., the ejector pin is tilted relative to the central axis of the avoidance hole of the support seat), which makes it easy for the ejector pin and the support seat to be scratched, resulting in the risk of the ejector pin breaking. Summary of the Invention

[0004] The present invention discloses an ejector pin assembly, a process chamber and semiconductor process equipment, so as to solve the problem in the related art that the ejector pin has a risk of being broken due to scratches between the ejector pin and a support seat.

[0005] In order to solve the above-mentioned technical problems, the present invention is achieved as follows:

[0006] In a first aspect, the present application discloses an ejector assembly, which includes an ejector, an ejector mounting portion, a fixing seat, a first rolling element, and a second rolling element, wherein:

[0007] The first rolling element and the second rolling element are both arranged on the fixed seat, and the ejector mounting portion is clamped between the first rolling element and the second rolling element in a first direction, and the first rolling element and the first rolling matching surface of the ejector mounting portion are rolling matched in a plane perpendicular to the first direction, and the second rolling element and the second rolling matching surface of the ejector mounting portion are rolling matched in a plane perpendicular to the first direction. The ejector is connected to the ejector mounting portion and extends along the first direction. The ejector can drive the ejector mounting portion to move in a plane perpendicular to the first direction.

[0008] In a second aspect, the present application further discloses a process chamber, comprising a first interface plate, a support base, a drive mechanism, and the ejector pin assembly described in the first aspect, wherein the support base is stacked above the first interface plate, the first interface plate comprises a sealing support portion, the sealing support portion defines a first through-hole, the support base defines a second through-hole, the first through-hole and the second through-hole being concentrically arranged, and the drive mechanism is connected to the fixed base;

[0009] In the process of the driving mechanism driving the ejector pin to move along the first direction through the fixed seat, the ejector pin is used to sequentially pass through the first through-hole and the second through-hole to extend above the bearing surface of the support seat, or retract to below the bearing surface, and the sealing support portion applies an elastic force perpendicular to the first direction to the ejector pin.

[0010] In a third aspect, the present application further discloses a semiconductor process equipment, characterized in that it includes the process chamber described in the second aspect.

[0011] The technical solution adopted by the present invention can achieve the following technical effects:

[0012] The ejector assembly disclosed in the embodiment of the present application is provided with a first rolling member and a second rolling member, so that the ejector mounting portion is clamped between the first rolling member and the second rolling member in a first direction, so that the ejector mounting portion and the first rolling member and the second rolling member roll in cooperation in a plane perpendicular to the first direction, so that the ejector mounting portion and the ejector pin have an adjustment amount in a plane perpendicular to the first direction, and then, when the ejector assembly is applied to a process chamber, since the sealing support portion will apply an elastic force in the circumferential direction of the ejector pin, when the ejector pin deflects relative to the first direction, the ejector pin drives the ejector mounting portion to move in a plane perpendicular to the first direction under the action of the elastic force of the sealing support portion, so that the ejector pin is restored to a state parallel to the first direction, thereby realizing adaptive adjustment of the ejector pin during the process of lifting and lowering along the first direction, avoiding scratches between the ejector pin and the support seat when the ejector pin deflects relative to the first direction, and thus preventing the risk of breakage of the ejector pin. BRIEF DESCRIPTION OF THE DRAWINGS

[0013] Figure 1 Schematic diagram of the structure of the process chamber disclosed in an embodiment of the present invention, wherein a represents a semiconductor sheet;

[0014] Figure 2 A schematic diagram of the distribution of the ejector assembly, the drive mechanism, and the first interface plate disclosed in an embodiment of the present invention;

[0015] Figure 3 This is an exploded schematic diagram of the ejector pin assembly disclosed in an embodiment of the present invention;

[0016] Figure 4A schematic diagram of an assembled ejector pin assembly disclosed in an embodiment of the present invention;

[0017] Figure 5 A partially enlarged schematic diagram of a process chamber disclosed in an embodiment of the present invention;

[0018] Figure 6 for Figure 5 A partial enlarged schematic diagram of point b in the middle.

[0019] Description of reference numerals:

[0020] 100-thimble assembly,

[0021] 110-thimble, 111a-boss, 120-thimble mounting portion, 121-mounting portion body, 122-extension portion, 130-fixed seat, 131-fixed seat body, 131a-limiting protrusion, 132-top cover, 132a-first shell, 132b-second shell, 132c-elastic member, 140-first rolling member, 150-second rolling member, 160-locking nut, 170-fixed seat mounting portion,

[0022] 200-first interface plate, 210-seal support portion, 211-base, 212-seal, 213-bushing,

[0023] 300-support seat,

[0024] 400-driving mechanism, 410-driving motor, 411-telescopic rod, 420-motor adapter,

[0025] 500-second interface disk,

[0026] 610-Inner door mechanism, 620-Lower electrode structure, 630-Upper electrode structure,

[0027] 710-Transmission device,

[0028] a-Semiconductor sheet. DETAILED DESCRIPTION

[0029] To make the objectives, technical solutions, and advantages of the present invention more clear, the technical solutions of the present invention will be clearly and completely described below in conjunction with specific embodiments of the present invention and corresponding drawings. Obviously, the embodiments described are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without making creative efforts are within the scope of protection of the present invention.

[0030] In the related art, a centering module is used to adjust the ejector pin circumferentially to mitigate the risk of scraping between the ejector pin and the support base. However, because the centering module in the related art adjusts the ejector pin circumferentially rather than radially, the ejector pin still deviates relative to the clearance hole in the support base, resulting in the risk of the ejector pin scraping against the support base and breaking. The embodiments disclosed in this application can address the risk of the ejector pin scraping against the support base and breaking in the related art, as described below.

[0031] The technical solutions disclosed in various embodiments of the present invention are described in detail below with reference to the accompanying drawings.

[0032] Please refer to Figures 1 to 6 An embodiment of the present invention discloses an ejector assembly 100 , which includes an ejector 110 , an ejector mounting portion 120 , a fixing seat 130 , a first rolling element 140 , and a second rolling element 150 .

[0033] The first rolling element 140 and the second rolling element 150 are both disposed on the fixing seat 130 , and the ejector mounting portion 120 is clamped between the first rolling element 140 and the second rolling element 150 in the first direction, that is, the first rolling element 140 , the ejector mounting portion 120 and the second rolling element 150 are stacked.

[0034] The first rolling element 140 and the first rolling fitting surface of the ejector mounting portion 120 roll in a plane perpendicular to the first direction, and the second rolling element 150 and the second rolling fitting surface of the ejector mounting portion 120 roll in a plane perpendicular to the first direction.

[0035] When the ejector mounting portion 120 is subjected to a force or a component force perpendicular to the first direction, the ejector mounting portion 120 rolls with the first rolling element 140 and the second rolling element 150 so that the ejector mounting portion 120 can move in a plane perpendicular to the first direction.

[0036] The ejector pin 110 is connected to the ejector pin mounting portion 120 and extends along a first direction. The ejector pin 110 can drive the ejector pin mounting portion 120 to move in a plane perpendicular to the first direction. The ejector pin can be raised and lowered in the first direction to support the semiconductor sheet.

[0037] Please note that, please refer to Figure 5 and Figure 6The first direction may be a vertical direction. When the ejector assembly 100 is applied to a process chamber, the end of the ejector 110 facing away from the ejector mounting portion 120 needs to pass through the first through-hole of the sealing support portion 210 of the first interface tray 200. When the ejector assembly 100 is lifted or lowered along the first direction, the end of the ejector 110 facing away from the ejector mounting portion 120 is used to pass through the second through-hole of the support base 300 to extend above the bearing surface of the support base 300, or retract to below the bearing surface, so as to lift the semiconductor sheet from the bearing surface of the support base 300 or place the semiconductor sheet on the bearing surface of the support base 300. The sealing support portion 210 mainly includes a base 211, a sealing member 212, and a bushing 213. The base 211 is provided with a mounting channel extending along a first direction. The sealing member 212 is provided in the mounting channel. One end of the bushing 213 is connected to the mounting channel for limiting the position of the sealing member 212. The first perforation passes through the base 211, the sealing member 212, and the bushing 213. When the ejector pin 110 passes through the first perforation, the ejector pin 110 fits tightly with the sealing member 212, so that the ejector pin 110 stretches the sealing member 212 to put the sealing member 212 in a stretched state. The seal 212 in the stretched state will give the ejector pin 110 an elastic force in the circumferential direction (for example, Figure 4 and Figure 5 When ejector pin 110 deflects relative to the first direction, the elastic force of seal 212 causes ejector pin 110 to drive ejector mounting portion 120 to move in a plane perpendicular to the first direction, thereby restoring ejector pin 110 to a state parallel to the first direction.

[0038] The ejector assembly 100 disclosed in the embodiment of the present application is provided with a first rolling member 140 and a second rolling member 150, so that the ejector mounting portion 120 is clamped between the first rolling member 140 and the second rolling member 150 in a first direction, so that the ejector mounting portion 120 and the first rolling member 140 and the second rolling member 150 are rolling-matched in a plane perpendicular to the first direction, so that the ejector mounting portion 120 and the ejector 110 have an adjustment amount in the plane perpendicular to the first direction, and then when the ejector assembly 100 is applied to a process chamber, due to the sealing support portion 210 will apply an elastic force in the circumferential direction of the ejector 110. When the ejector 110 is deflected relative to the first direction, the elastic force of the sealing support portion 210 causes the ejector 110 to drive the ejector mounting portion 120 to move in a plane perpendicular to the first direction, so that the ejector 110 is restored to a state parallel to the first direction, thereby realizing adaptive adjustment of the ejector 110 during the process of rising and falling along the first direction, avoiding scratches between the ejector 110 and the support base 300 when the ejector 110 is deflected relative to the first direction, and further preventing the risk of breakage of the ejector 110.

[0039] It should be noted that during the assembly process, the first through-hole of the sealing support portion 210 and the second through-hole of the support seat 300 are concentrically arranged. When the ejector pin 110 is parallel to the first direction, the ejector pin 110 will not be scratched by the support seat 300.

[0040] In an optional embodiment, the fixing seat 130 can be two brackets arranged opposite to each other, and the first rolling member 140 and the second rolling member 150 can include a rolling body and a rolling seat. The rolling body can be rotatably arranged on the rolling seat, and the rolling seat can be connected to the two brackets.

[0041] In another embodiment, the fixing seat 130 may include a fixing seat body 131 and a top cover 132. The fixing seat body 131 may have a receiving groove. The top cover 132 may be connected to the fixing seat body 131 and cover the notch of the receiving groove. The first rolling element 140 may be rollably disposed between the bottom wall of the receiving groove and the first rolling mating surface. The second rolling element 150 may be rollably disposed between the top cover 132 and the second rolling mating surface. The ejector mounting portion 120 may have a first movable gap (i.e., an adjustment gap between the needle mounting portion 120 and the ejector 110 in a plane perpendicular to the first direction) between the sidewall of the receiving groove. The top cover 132 may have a relief hole, and at least a portion of the ejector may be located outside the receiving groove and connected to the ejector mounting portion 120 at the location of the relief hole. The direction from the bottom wall of the receiving groove to the notch of the receiving groove is parallel to the first direction.

[0042] The ejector assembly 100 disclosed in the embodiment of the present application is configured such that the fixing seat 130 includes a fixing seat body 131 and a top cover 132, so that the first rolling member 140 can be rollingly disposed between the bottom wall of the accommodating groove and the first rolling mating surface, and the second rolling member 150 can be rollingly disposed between the top cover 132 and the second rolling mating surface, thereby enabling the fixing seat 130 to protect the first rolling member 140 and the second rolling member 150.

[0043] Optionally, the ejector mounting portion 120 may be entirely located within the accommodating groove, one end of the ejector 110 may be connected to the ejector mounting portion 120 , and the other end may extend from the avoidance hole to outside the accommodating groove.

[0044] In order to avoid damage to the ejector pin 110 caused by scratches between the ejector pin 110 and the hole wall of the avoidance hole, optionally, the ejector pin mounting portion 120 may include a mounting portion body 121 and an extension portion 122. The extension portion 122 may be connected to the mounting portion body 121 and extend in a direction away from the mounting portion body 121 in a plane perpendicular to the first direction. The extension portion 122 may include a first rolling mating surface and a second rolling mating surface. Part of the mounting portion body 121 extends out of the avoidance hole and has a second active gap with the hole wall of the avoidance hole. The ejector pin 110 is connected to the portion of the mounting portion body 121 located outside the avoidance hole.

[0045] The ejector assembly 100 disclosed in the embodiment of the present application is configured such that the ejector mounting portion 120 includes a mounting portion body 121 and an extension portion 122, so that a portion of the mounting portion body 121 extends outside the avoidance hole, thereby connecting the ejector 110 to the portion of the mounting portion body 121 located outside the avoidance hole. This can prevent the ejector 110 from being damaged by scratches against the hole wall of the avoidance hole.

[0046] Furthermore, the first active gap is smaller than or equal to the second active gap.

[0047] It should be noted that the first movable gap refers to the travel of the extension portion 122 in any direction within a plane perpendicular to the first direction, and the second movable gap refers to the travel of the mounting portion body 121 in any direction within a plane perpendicular to the first direction.

[0048] The ejector assembly 100 disclosed in the embodiment of the present application sets the first movable gap to be less than or equal to the second movable gap, thereby preventing the ejector 110 from tilting when the ejector mounting portion 120 moves and the mounting portion body 121 uses the hole wall of the avoidance hole as a fulcrum.

[0049] Optionally, the first rolling element 140 and the second rolling element 150 can both be structures including multiple balls, and the multiple balls are directly rollingly arranged between the bottom wall of the accommodating groove and the first rolling matching surface, and rollingly arranged between the top cover 132 and the second rolling matching surface.

[0050] In another embodiment, the first rolling element 140 and the second rolling element 150 may both include a bearing seat and balls, the balls are installed on the bearing seat, the balls of the first rolling element 140 respectively roll with the bottom wall of the accommodating groove and the first rolling mating surface, and the balls of the second rolling element 150 respectively roll with the top cover 132 and the second rolling mating surface.

[0051] The ejector assembly 100 disclosed in the embodiment of the present application is configured such that the movement of the ejector mounting portion 120 is more stable by installing the ball bearings on the bearing seat, and then making the ball bearings of the first rolling member 140 roll with the bottom wall of the accommodating groove and the first rolling mating surface respectively, and the ball bearings of the second rolling member 150 roll with the top cover 132 and the second rolling mating surface respectively.

[0052] Optionally, the bearing seat of the second rolling element 150 can be sleeved on the mounting portion body 121, so that the mounting portion body 121 can limit the second rolling element 150, thereby making the arrangement of the second rolling element 150 more stable.

[0053] In order to make the connection between the ejector pin 110 and the ejector pin mounting seat 120 more stable, optionally, the ejector pin assembly 100 may include a locking nut 160, and the portion of the mounting portion body 121 extending out of the avoidance hole may be provided with a first mounting groove. The end of the ejector pin 110 connected to the mounting portion body 121 may have a boss portion 111a, and the boss portion 111a may extend into the first mounting groove. The locking nut 160 may be threadedly engaged with the portion of the mounting portion body 121 extending out of the avoidance hole, and lock the boss portion 111a in the first mounting groove.

[0054] The ejector assembly 100 disclosed in the embodiment of the present application locks the boss portion 111 a of the ejector 110 in the first mounting groove through the locking nut 160 , thereby making the connection between the ejector 110 and the ejector mounting portion 120 more stable.

[0055] In order to avoid the situation where the rolling fit of the first rolling element 140, the second rolling element 150 and the ejector mounting portion 120 is stuck due to excessive pressing force in the first direction, the top cover 132 may include a first shell portion 132a, a second shell portion 132b and an elastic member 132c, the first shell portion 132a may be connected to the fixing seat body 131, the second shell portion 132b may be connected to the second rolling element 150, and the elastic member 132c may be elastically supported between the first shell portion 132a and the second shell portion 132b.

[0056] The ejector assembly 100 disclosed in the embodiment of the present application is configured to have a structure including a first shell portion 132a, a second shell portion 132b and an elastic member 132c through a top cover, so that the first shell portion 132a can be connected to the fixing seat body 131, the second shell portion 132b can contact the second rolling member 150, and the elastic member 132c can be elastically supported between the first shell portion 132a and the second shell portion 132b, so that the elastic member 132c can have a certain elastic buffer in the first direction, thereby avoiding the situation where the first rolling member 140, the second rolling member 150 and the ejector mounting portion 120 are pressed too hard in the first direction, resulting in a jam in the rolling fit between the first rolling member 140, the second rolling member 150 and the ejector mounting portion 120.

[0057] In order to make the installation of the elastic member 132c more stable, optionally, the second shell portion 132b can have a second installation groove, the elastic member 132c can be arranged in the second installation groove, and the first shell portion 132a can overlap with the notch of the second installation groove, thereby making the installation of the elastic member 132c more stable.

[0058] The top cover 132 and the notch of the receiving groove can be connected by bonding, bolting, etc. In another embodiment, the notch of the receiving groove has a limiting protrusion 131a, and the limiting protrusion 131a can face the inner side of the receiving groove. The top cover 132 can be limited between the limiting protrusion 131a and the second rolling element 150, thereby making the installation of the top cover 132 easier.

[0059] A fixing base mounting portion 170 is provided on a side of the fixing base 130 facing away from the ejector pin 110. The fixing base mounting portion 170 is configured to connect to the drive mechanism 400 that drives the ejector pin assembly 100 to move in the first direction. Specifically, the fixing base mounting portion 170 and the telescopic rod 411 of the drive mechanism 400 can be connected by threads. Of course, the fixing base mounting portion 170 and the telescopic rod 411 of the drive mechanism 400 can also be welded, bonded, or otherwise connected. This embodiment of the present application does not limit the method of connection between the fixing base mounting portion 170 and the telescopic rod 411 of the drive mechanism 400.

[0060] The present application also discloses a process chamber, comprising a first interface tray 200, a support base 300, a drive mechanism 400, and the ejector pin assembly 100 disclosed in the above embodiment. The support base 300 can be stacked on top of the first interface tray 200. The first interface tray 200 can include a sealing support portion 210. The sealing support portion 210 can have a first through-hole. The support base 300 can have a second through-hole, with the first through-hole and the second through-hole being arranged concentrically. The drive mechanism 400 can be connected to the fixed base 130. When the drive mechanism 400 drives the ejector pin 110 to move in a first direction via the fixed base 130, the ejector pin 110 can be sequentially passed through the first through-hole and the second through-hole to extend above the support surface of the support base 300, or retracted below the support surface. The sealing support portion 210 applies an elastic force perpendicular to the first direction to the ejector pin 110.

[0061] The process chamber disclosed in the embodiment of the present application is provided with the ejector pin assembly 100 disclosed in the above embodiment, so that when the ejector pin 110 is deflected relative to the first direction, the elastic force of the sealing support portion 210 causes the ejector pin 110 to drive the ejector pin mounting portion 120 to move in a plane perpendicular to the first direction, so that the ejector pin 110 is restored to a state parallel to the first direction, thereby achieving adaptive adjustment of the ejector pin 110 during the process of rising and falling along the first direction, avoiding scratches between the ejector pin 110 and the support base 300 when the ejector pin 110 is deflected relative to the first direction, and further preventing the risk of breakage of the ejector pin 110.

[0062] Optionally, the process chamber may further include a second interface tray 500, and the driving mechanism 400 and the ejector assembly 100 may be multiple, and the multiple driving mechanisms 400 may be arranged in a one-to-one correspondence with the multiple ejector assemblies 100. The multiple ejector assemblies 100 may be arranged on the second interface tray 500, and the driving mechanism 400 may be used to drive the corresponding ejector assemblies 100 to move along the first direction.

[0063] The process chamber disclosed in the embodiment of the present application is provided with a second interface plate 500, so that multiple ejector assemblies 100 are driven by independent driving mechanisms 400 to rise and fall in the first direction, thereby making the rise and fall of each ejector assembly 100 along the first direction more stable.

[0064] Specifically, the drive mechanism 400 may include a drive motor 410 and a motor adapter 420. The drive motor 410 may be connected to the motor adapter 420, which may be fixed in a positioning slot of the second interface tray 500. The ejector assembly 100 is connected to the telescopic rod 411 of the drive motor 410. The drive motor 410 drives the ejector assembly 100 to move up and down in the first direction via the telescopic rod 411. The drive motor 410 and the ejector assembly 100 may be disposed on opposite sides of the second interface tray 500.

[0065] In order to avoid the unreasonable distribution of the driving mechanism 400, which may cause the second interface tray 500 to tilt and cause the ejector pin 110 to scratch against the ejector pin mounting seat 120, optionally, multiple driving mechanisms 400 and multiple ejector pin assemblies 100 can be evenly distributed on the second interface tray 500, thereby alleviating the tilting of the second interface tray 500 and further avoiding the second interface tray 500 tilting and causing the ejector pin 110 to scratch against the ejector pin mounting seat 120.

[0066] In order to enable the multiple ejector pin assemblies 100 to rise and fall synchronously, the process chamber may optionally include a controller, which may be connected to the multiple driving mechanisms 400 to control the multiple driving mechanisms 400 to synchronously drive the multiple ejector pin assemblies 100 to move.

[0067] In order to ensure the height difference of the ejector pins 110 of multiple ejector pin assemblies 100 during the lifting and lowering process along the first direction, multiple drive mechanisms can be controlled in a coordinated manner. The controller may include a CTC (Cluster Tool Controller, cluster equipment software control system), a PMC (Process Module Computer, process chamber computer), and a pin position sensor. The CTC sends instructions to the PMC, and the PMC connects to the multi-axis drive through the ECAT protocol (EtherCAT (Ethernet for Control Automation Technology) is a real-time industrial field bus communication protocol based on the development architecture of Ethernet). After the multi-axis drive parses the instructions, it synchronously sends motion signals to the drive motors 410 of the multiple drive mechanisms. After receiving the signals, the drive motors 410 can drive the ejector pin assemblies 100 to rise and fall along the first direction through the telescopic rod 411. At the same time, the data detected by the pin position sensor collected by the PMC is collected to monitor the real-time position of the ejector pins. Multiple drive motors 410 can use absolute value encoding. After zero point calibration, the telescopic rods 411 of the multiple drive motors 410 can move synchronously (that is, the telescopic rods rise, fall, or stop moving simultaneously in the first direction, and maintain the same speed during the movement), thereby achieving synchronous operation without interference and ensuring that the height difference of the ejectors 110 of the multiple ejector assemblies 100 meets the requirements.

[0068] Optionally, the process chamber may include an inner door mechanism 610 and a lower electrode structure 620. When processing a semiconductor wafer, the inner door mechanism 610 descends to open the wafer transfer port, and the transfer device 710 transfers the semiconductor wafer into the process chamber through the wafer transfer port. The drive mechanism 400 drives the ejector pin assembly to ascend in a first direction to receive the semiconductor wafer, the transfer device 710 exits the process chamber, and the inner door mechanism 610 closes. The drive mechanism 400 drives the ejector pin assembly 100 to descend in a first direction to place the semiconductor wafer on the support surface of the support base 300, and the lower electrode structure 620 can provide an electrostatic adsorption force to adsorb the semiconductor wafer on the support surface of the support base 300. At this time, process gas is introduced into the process chamber through the air flow holes of the upper electrode structure 630 above the process chamber, and radio frequency is fed into the process chamber through the lower electrode structure 620, ionizing the process gas in the process chamber into plasma to perform processes such as etching on the semiconductor wafer.

[0069] The present application also discloses a semiconductor process equipment, which includes the process chamber disclosed in the above embodiment.

[0070] The semiconductor process equipment disclosed in the embodiment of the present application is provided with the process chamber disclosed in the above embodiment, so that when the ejector pin 110 is deflected relative to the first direction, the elastic force of the sealing support portion 210 causes the ejector pin 110 to drive the ejector pin mounting portion 120 to move in a plane perpendicular to the first direction, so that the ejector pin 110 is restored to a state parallel to the first direction, thereby realizing adaptive adjustment of the ejector pin 110 during the process of rising and falling along the first direction, avoiding scratches between the ejector pin 110 and the support base 300 when the ejector pin 110 is deflected relative to the first direction, and further preventing the risk of breakage of the ejector pin 110.

[0071] The above embodiments of the present invention focus on the differences between the various embodiments. As long as the different optimization features between the various embodiments are not contradictory, they can be combined to form a better embodiment. Considering the simplicity of the text, they will not be repeated here.

[0072] The embodiments of the present invention are described above in conjunction with the accompanying drawings, but the present invention is not limited to the above-mentioned specific implementation methods. The above-mentioned specific implementation methods are merely illustrative and not restrictive. Under the guidance of the present invention, ordinary technicians in this field can also make many forms without departing from the scope of protection of the present invention and the claims, all of which are protected by the present invention.

Claims

1. A ejector pin assembly, characterized in that: It comprises a thimble (110), a thimble mounting portion (120), a fixing seat (130), a first rolling element (140) and a second rolling element (150), wherein: The first rolling element (140) and the second rolling element (150) are both arranged on the fixed seat (130); the ejector pin mounting portion (120) is clamped between the first rolling element (140) and the second rolling element (150) in a first direction; the first rolling element (140) and the first rolling matching surface of the ejector pin mounting portion (120) are rolling matched in a plane perpendicular to the first direction; the second rolling element (150) and the second rolling matching surface of the ejector pin mounting portion (120) are rolling matched in a plane perpendicular to the first direction; the ejector pin (110) is connected to the ejector pin mounting portion (120) and extends along the first direction; the ejector pin (110) can drive the ejector pin mounting portion (120) to move in a plane perpendicular to the first direction.

2. The ejector pin assembly according to claim 1, wherein: The fixing seat (130) includes a fixing seat body (131) and a top cover (132), wherein the fixing seat body (131) is provided with an accommodating groove, the top cover (132) is connected to the fixing seat body (131) and is arranged on the notch of the accommodating groove, the first rolling element (140) is rollingly arranged between the bottom wall of the accommodating groove and the first rolling matching surface, the second rolling element (150) is rollingly arranged between the top cover (132) and the second rolling matching surface, and a first movable gap is provided between the ejector pin mounting portion (120) and the side wall of the accommodating groove; The top cover (132) is provided with an escape hole, at least a portion of the ejector pin is located outside the accommodating groove, and is connected to the ejector pin mounting portion (120) at the position of the escape hole; wherein the direction from the bottom wall of the accommodating groove to the notch of the accommodating groove is parallel to the first direction.

3. The ejector pin assembly according to claim 2, wherein: The ejector pin mounting portion (120) includes a mounting portion body (121) and an extension portion (122), wherein the extension portion (122) is connected to the mounting portion body (121) and extends in a plane perpendicular to the first direction in a direction away from the mounting portion body (121), and the extension portion (122) includes the first rolling fitting surface and the second rolling fitting surface, a portion of the mounting portion body (121) extends out of the avoidance hole, and a second movable gap is formed between the mounting portion body (121) and the hole wall of the avoidance hole, and the ejector pin (110) is connected to the portion of the mounting portion body (121) located outside the avoidance hole.

4. The ejector pin assembly according to claim 3, wherein: The first active gap is smaller than or equal to the second active gap.

5. The ejector pin assembly according to claim 3, wherein: The first rolling element (140) and the second rolling element (150) both include a bearing seat and a ball, the ball being mounted on the bearing seat, the ball of the first rolling element (140) respectively rolling-fitting with the bottom wall of the accommodating groove and the first rolling fitting surface, and the ball of the second rolling element (150) respectively rolling-fitting with the top cover (132) and the second rolling fitting surface.

6. The ejector pin assembly according to claim 5, characterized in that: The bearing seat of the second rolling element (150) is sleeved on the mounting portion body (121).

7. The ejector pin assembly according to claim 3, wherein: The ejector assembly (100) includes a locking nut (160), a portion of the mounting body (121) extending out of the avoidance hole is provided with a first mounting groove, one end of the ejector (110) connected to the mounting body (121) has a boss portion (111a), and the boss portion (111a) extends into the first mounting groove, and the locking nut (160) is threadedly engaged with the portion of the mounting body (121) extending out of the avoidance hole, and locks the boss portion (111a) in the first mounting groove.

8. The ejector pin assembly according to claim 2, wherein: The top cover (132) includes a first shell portion (132a), a second shell portion (132b) and an elastic member (132c), wherein the first shell portion (132a) is connected to the fixing seat body (131), the second shell portion (132b) is in contact with the second rolling member (150), and the elastic member (132c) is elastically supported between the first shell portion (132a) and the second shell portion (132b).

9. The ejector pin assembly according to claim 8, wherein: The second shell portion (132b) has a second installation groove, the elastic member (132c) is arranged in the second installation groove, and the first shell portion (132a) overlaps with the notch of the second installation groove.

10. The ejector pin assembly according to claim 2, wherein: The notch of the accommodating groove has a limiting protrusion (131a), and the top cover (132) is limited between the limiting protrusion (131a) and the second rolling element (150).

11. The ejector pin assembly according to claim 1, wherein: A fixing seat mounting portion (170) is provided on a side of the fixing seat (130) facing away from the ejector pin (110), and the fixing seat mounting portion (170) is used to connect to a driving mechanism (400) that drives the ejector pin assembly (100) to move along the first direction.

12. A process chamber, characterized in that: The invention comprises a first interface disk (200), a support seat (300), a driving mechanism (400) and the ejector pin assembly (100) according to any one of claims 1 to 11, wherein the support seat (300) is stacked on the first interface disk (200), the first interface disk (200) comprises a sealing support portion (210), the sealing support portion (210) is provided with a first through-hole, the support seat (300) is provided with a second through-hole, the first through-hole and the second through-hole are arranged concentrically, and the driving mechanism (400) is connected to the fixing seat (130); During the process in which the driving mechanism (400) drives the ejector pin (110) to move along the first direction via the fixing seat (130), the ejector pin (110) is used to sequentially pass through the first through-hole and the second through-hole to extend above the bearing surface of the support seat (300), or retract to below the bearing surface, and the sealing support portion (210) applies an elastic force perpendicular to the first direction to the ejector pin (110).

13. The process chamber according to claim 12, wherein: The process chamber also includes a second interface disk (500), and the driving mechanism (400) and the ejector assembly (100) are both multiple, and the multiple driving mechanisms (400) are arranged in a one-to-one correspondence with the multiple ejector assemblies (100). The multiple ejector assemblies (100) are arranged on the second interface disk (500), and the driving mechanism (400) is used to drive the corresponding ejector assembly (100) to move along the first direction.

14. The process chamber according to claim 13, wherein: The plurality of driving mechanisms (400) and the plurality of ejector pin assemblies (100) are evenly distributed on the second interface plate (500).

15. The process chamber according to claim 13, wherein: The process chamber comprises a controller, which is connected to the plurality of driving mechanisms (400) and is used to control the plurality of driving mechanisms (400) to synchronously drive the plurality of ejector pin assemblies (100) to move.

16. A semiconductor process equipment, characterized in that: A process chamber comprising any one of claims 12 to 15.

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