Flexible hinge optical-mechanical structure, stability evaluation device and stability evaluation method

Abstract

The invention discloses a flexible hinge optical-mechanical structure, a stability evaluation device and a stability evaluation method. The flexible hinge optical-mechanical structure comprises a fixed plate, a square bottom plate, two first vertical plates, a first driven part and a second driven part. The first driven piece comprises two second vertical plates distributed in the left-right direction and two third vertical plates distributed in the front-back direction, and the two second vertical plates and the two third vertical plates form a square cylinder. The flexible hinge optical-mechanical structure can achieve the mechanical amplification effect in the left-right direction and the front-back direction. The flexible hinge optical-mechanical structure has the micro-deformation amplification characteristic, the light weight characteristic and the plane mirror characteristic, is compact in structure and free of friction, and is sensitive to micro-plastic deformation.

Description

Technical Field

[0001] The present application relates to the technical field of optomechanical structures, and in particular to a flexible hinge optomechanical structure, a stability evaluation device, and a stability evaluation method. Background Art

[0002] With the development of lightweight design technology and high-precision manufacturing technology for airborne optoelectronic products, and the demand for low-cost, short-cycle, and high-quality research and development, the advantages of metal additive manufacturing technology in the rapid prototyping of lightweight structures have become more prominent. In recent years, metal additive manufacturing technology has been widely used in aerospace, aviation, nuclear energy, weapons, medical and other fields. However, its application in the optoelectronic industry, which has high-precision design and manufacturing requirements, is still relatively small. The reason is that the additive manufacturing process is a "solid-liquid-solid" three-state rapid melting and solidification process. After forming, there are large temperature gradients and stress gradients inside the optomechanical structure. After assembling this type of optomechanical structure into an optical system, there is a real problem of stress release leading to structural shape instability during product use. Especially for common optical path optical systems, if the shape stability of the optomechanical structure is poor, even submicron deformation of the reflector mounting surface will directly affect the imaging quality of the optical system.

[0003] In engineering, the methods for evaluating the stability of complex optomechanical structures mainly include empirical evaluation of stress relief by heat treatment, qualitative evaluation based on residual stress detection results, structural component dimensional deformation detection evaluation, and optomechanical assembly imaging quality feedback evaluation. When the above methods are used to control and evaluate the stability of structures formed by additive manufacturing, there are the following shortcomings: First, the degree of stress relief of optomechanical structures based on experience cannot be accurately grasped, and the stability cannot be quantitatively evaluated; second, the detection of residual stress is not holistic, and the internal and surface stress detection range is limited, which is not suitable for the evaluation of the stability of complex structures; third, the three-coordinate measuring machine, reverse scanning and other detection methods used for complex structure detection are difficult to take into account the detection freedom, integrity and accuracy, especially the lack of detection methods for sub-micron deformation of complex structural parts; fourth, the front end of the imaging quality detection of optomechanical assemblies involves a large number of assembly links, with large cumulative errors and many influencing factors, making it difficult to accurately trace and evaluate the stability of the optomechanical structure. Summary of the Invention

[0004] The purpose of this application is to provide a flexible hinge optomechanical structure, a stability evaluation device and a stability evaluation method. The flexible hinge optomechanical structure can solve the technical problem of poor stability of optomechanical structures in related technologies. The stability evaluation device and the stability evaluation method can solve the technical problem of difficult stability evaluation of optomechanical structures in related technologies.

[0005] The technical solution is as follows:

[0006] In a first aspect, a flexible hinge optical-mechanical structure is provided, comprising:

[0007] The fixed plate is placed horizontally;

[0008] a square bottom plate, fixedly connected to the upper surface of the fixing plate, having a horizontal upper surface, a first pair of sides perpendicular to the left-right direction, and a second pair of sides perpendicular to the front-back direction;

[0009] two first vertical panels, each of the first vertical panels extending upward along the first pair of sides;

[0010] The first follower comprises two second vertical plates distributed in the left-right direction and two third vertical plates connected to the second vertical plates, wherein the two second vertical plates and the two third vertical plates form a square tube;

[0011] The distance between the two second vertical plates is equal to the distance between the two first vertical plates and the two second vertical plates are respectively located above the two first vertical plates; wherein each second vertical plate is connected to the corresponding first vertical plate via two first lever hinges with equal inclination angles;

[0012] The second follower includes two fourth vertical plates arranged in a front-to-back direction and parallel to each other, and a top plate connecting the two fourth vertical plates. The spacing between the two fourth vertical plates is equal to the spacing between the two third vertical plates and is located above the two third vertical plates. The top plate is parallel to the bottom plate. Each fourth vertical plate is connected to the corresponding third vertical plate through two second lever hinges with equal inclination angles.

[0013] Optionally, the angle between the first lever hinge and the horizontal plane is A, 45°≤A≤90°, the inclination direction of the two first lever hinges on the left and the inclination direction of the two first lever hinges on the right are opposite, and form a cross spring hinge.

[0014] Optionally, the angle between the second lever hinge and the horizontal plane is A, 45°≤A≤90°, the inclination direction of the two second lever hinges on the front side is opposite to the inclination direction of the two second lever hinges on the rear side, and a cross spring hinge is formed.

[0015] Optionally, a bottom plane reflector and a top plane reflector are further included, wherein the bottom plane reflector is located on the upper surface of the fixing plate, and the top plane reflector is located on the upper surface of the top plate.

[0016] Optionally, the flexible optomechanical mechanism is made of AlSi10Mg, the bottom plane reflector and the top plane reflector are formed by precision machining, the RMS values of the bottom plane reflector and the top plane reflector are both less than λ / 20, where λ=632.8nm, and the deflection angles of the bottom plane reflector and the top plane reflector are less than 3″.

[0017] Optionally, the inclination angle of the two first lever-type hinges on the left side is 45 degrees, and the inclination angle of the two first lever-type hinges on the right side is 45 degrees; a first center lever is also provided between the two first lever-type hinges on each side, and the first center lever and the two first lever-type hinges form a Z shape; a second center lever is also provided between the two second lever-type hinges on each side, and the second center lever and the two second lever-type hinges form a Z shape.

[0018] Optionally, each of the first center levers has a first cutting groove, which divides the first center lever into two first sub-center levers parallel to each other; each of the second center levers has a second cutting groove, which divides the second center lever into two second sub-center levers parallel to each other.

[0019] Optionally, the distance between the first lever-type hinges on the left and right sides and the square bottom plate is equal to the distance between the second lever-type hinges on the front and rear sides and the top plate.

[0020] In a second aspect, a device for evaluating the stability of a flexible hinge optomechanical structure is provided, comprising: an air-floating vibration isolation platform with a horizontal working platform, a support frame linearly arranged on the working platform, a theodolite, and a laser interferometer; and the flexible hinge optomechanical structure. The support frame has a vertical mounting surface on a side facing the theodolite, and the flexible hinge optomechanical structure is connected to the mounting surface via the fixing plate.

[0021] In a third aspect, a method for evaluating the stability of a flexible hinge optomechanical structure is provided. The method utilizes the above-mentioned device for evaluating the stability of a flexible hinge optomechanical structure and includes the following steps:

[0022] Step 1: Debug and calibrate theodolite, debug and calibrate the laser interferometer;

[0023] Step 2: Use a theodolite to measure the absolute angle of the bottom plane reflector and the absolute angle of the top plane reflector before the temperature test;

[0024] The surface RMS value of the bottom plane reflector and the surface RMS value of the top plane reflector before the temperature test are measured using a laser interferometer;

[0025] Step 3: Dismantle the flexible hinge optical-mechanical structure, perform a temperature test, and reinstall it to the mounting surface;

[0026] Step 4: Using a theodolite to measure the absolute angle of the bottom plane reflector and the absolute angle of the top plane reflector after the temperature test;

[0027] The surface RMS value of the bottom plane reflector and the surface RMS value of the top plane reflector after the temperature test are measured using a laser interferometer;

[0028] Step 5: Calculate the angle difference A of the bottom plane reflector before and after the temperature test;

[0029] Calculate the angle difference B of the top plane reflector before and after the temperature test;

[0030] Calculate the difference C in the surface RMS value of the bottom plane reflector before and after the temperature test;

[0031] Calculate the difference D in the RMS value of the surface shape of the top plane reflector before and after the temperature test;

[0032] The flexible hinge optomechanical structure is determined to be in a stable state if and only if |A|≤3″, |B|≤3″, |C|≤10nm and |D|≤10nm, otherwise it is in an unstable state.

[0033] Optionally, in step 3, the temperature test includes a high temperature test, a low temperature test and a temperature shock test performed in sequence.

[0034] The beneficial effects of the technical solutions provided in the embodiments of the present application include at least:

[0035] A flexible hinge optical-mechanical structure comprises: a fixed plate, a square base plate, two first vertical plates, and a first follower and a second follower. The first follower comprises two second vertical plates distributed along the left-right direction and two third vertical plates distributed along the front-back direction, and the two second vertical plates and the two third vertical plates form a square tube. In the front-back direction, the first vertical plate on the right side is connected to the second vertical plate on the right side by two tilted first lever hinges. Through the mechanical amplification effect of the first lever hinge, the small vibrations of the base plate in the front-back direction can be amplified. Similarly, in the left-right direction, the fourth vertical plate on the rear side is connected to the third vertical plate on the rear side by two tilted second lever hinges. Through the mechanical amplification effect of the second lever hinge, the small vibrations of the base plate in the left-right direction can be amplified. In summary, the flexible hinge optical-mechanical structure can achieve mechanical amplification in the left-right direction and the front-back direction. The flexible hinge optical-mechanical structure of the present application has micro-deformation amplification characteristics, lightweight characteristics and plane reflector characteristics, and has a compact structure, is frictionless, and is sensitive to micro-plastic deformation.

[0036] Other features and advantages of the present disclosure will be described in detail in the following detailed description. BRIEF DESCRIPTION OF THE DRAWINGS

[0037] In order to more clearly illustrate the technical solutions in the embodiments of the present application, the following briefly introduces the drawings required for use in the description of the embodiments. Obviously, the drawings described below are only some embodiments of the present application. For ordinary technicians in this field, other drawings can be obtained based on these drawings without any creative work.

[0038] Figure 1 is a three-dimensional schematic diagram of a flexible hinge optical-mechanical structure provided in an embodiment of the present application;

[0039] Figure 2 yes Figure 1 A three-dimensional schematic diagram of the first follower;

[0040] Figure 3 yes Figure 1 Right view of the middle flexure hinge optomechanical structure;

[0041] Figure 4 yes Figure 1 Front view of the optical-mechanical structure of the flexible hinge;

[0042] Figure 5 Schematic diagram of the structure of the stability evaluation device provided in the embodiment of the present application.

[0043] Description of Reference Numerals

[0044] 1-fixed plate; 2-square base plate; 201-first opposite sides; 202-second opposite sides; 3-first vertical plate; 4-first follower; 401-second vertical plate; 402-third vertical plate; 5-first lever-type hinge; 6-second follower; 601-fourth vertical plate; 602-top plate; 7-second lever-type hinge; 8-bottom plane reflector; 9-top plane reflector; 10-first central lever; 101-first cutting groove; 102-first sub-central lever; 11-second central lever; 111-second cutting groove; 112-second sub-central lever; 15-air-floating vibration isolation platform; 16-support frame; 17-theodolite; 18-laser interferometer. DETAILED DESCRIPTION

[0045] The following describes the specific embodiments of the present disclosure in detail with reference to the accompanying drawings. It should be understood that the specific embodiments described herein are only used to illustrate and explain the present disclosure and are not intended to limit the present disclosure.

[0046] In this disclosure, unless otherwise indicated, directional terms such as "upper" and "lower" generally refer to the relative positions of the corresponding components in the direction of gravity when in use. "Inside" and "outside" refer to the relative positions of the corresponding components themselves. Furthermore, the terms "first" and "second" used in this disclosure are intended to distinguish one element from another and do not convey sequential or significant meanings. In the following description, when referring to the drawings, unless otherwise indicated, identical reference numerals in different drawings indicate identical or similar elements.

[0047] According to an embodiment of the present disclosure, referring to Figures 1 to 4 A flexible hinge optical-mechanical structure includes: a fixed plate 1, a square base plate 2, two first vertical plates 3, a first follower 4 and a second follower 6.

[0048] Among them, reference Figure 1 The fixing plate 1 is placed horizontally. The square bottom plate 2 is fixedly connected to the upper surface of the fixing plate 1 and has a horizontal upper surface, a first pair of sides 201 perpendicular to the left-right direction, and a second pair of sides 202 perpendicular to the front-back direction.

[0049] refer to Figure 3 , of the two first vertical plates 3, each of the first vertical plates 3 extends upward along the first pair of edges 201. Figure 1 and Figure 2 The first follower 4 includes two second upright plates 401 distributed in the left-right direction and two third upright plates 402 connected to the second upright plates 401. The two second upright plates 401 and the two third upright plates 402 form a square tube. The spacing between the two second upright plates 401 is equal to the spacing between the two first upright plates 3 and are respectively located above the two first upright plates 3. Each second upright plate 401 is connected to the corresponding first upright plate 3 via two first lever hinges 5 with equal inclination angles.

[0050] refer to Figure 1 The second follower 6 includes two parallel fourth vertical plates 601 arranged in the front-to-back direction, and a top plate 602 connecting the two fourth vertical plates 601. The spacing between the two fourth vertical plates 601 is equal to the spacing between the two third vertical plates 402 and is located above the two third vertical plates 402. The top plate 602 is parallel to the bottom plate. Each fourth vertical plate 601 is connected to the corresponding third vertical plate 402 via two second lever hinges 7 with equal inclination angles. Because the flexible hinge optomechanical structure in this embodiment of the application is integrally formed using additive manufacturing, the first lever hinge 5 and the second lever hinge 7 are both inclined relative to the horizontal plane.

[0051] In the above embodiment, reference Figure 2The first follower 4 includes two second vertical plates 401 distributed along the left-right direction and two third vertical plates 402 distributed along the front-back direction, and the two second vertical plates 401 and the two third vertical plates 402 form a square tube; the square bottom plate 1 is set as the input end of the flexible hinge optical-mechanical structure (in practice, other parts of the flexible hinge optical-mechanical structure can be used as input ends), and the top plate 602 is the output end of the flexible hinge optical-mechanical structure. Figure 3 In the front-to-back direction, the first vertical plate 3 on the right is connected to the second vertical plate 401 on the right through two tilted first lever hinges 5. The mechanical amplification effect of the first lever hinge 5 can amplify the tiny vibrations of the base plate in the front-to-back direction. Similarly, in the left-to-right direction, the fourth vertical plate 601 on the rear side is connected to the third vertical plate 402 on the rear side through two tilted second lever hinges 7. The mechanical amplification effect of the second lever hinge 7 can amplify the tiny vibrations of the base plate in the left-to-right direction. In summary, the flexible hinge optomechanical structure can achieve mechanical amplification in the left-to-right direction and the front-to-back direction. The flexible hinge optomechanical structure of the present application has micro-deformation amplification characteristics, lightweight characteristics and plane reflector characteristics, and has a compact structure, is frictionless, and is sensitive to micro-plastic deformation.

[0052] In additive manufacturing technology, when the angle between the suspended part and the horizontal direction is ≥45°, it can usually achieve self-support without the need for additional support structures. When the angle is less than 45°, the suspended part may collapse due to the weight of the unsupported material, so a support structure needs to be added. According to the embodiments of the present disclosure, reference Figures 1 to 4 , the angle between the first lever hinge 5 and the horizontal plane is A, where 45°≤A≤90°, the inclination direction of the two first lever hinges 5 on the left and the inclination direction of the two first lever hinges 5 on the right are opposite, and form a cross-spring hinge. The cross-spring flexible hinge is mainly composed of two interlaced springs. The cross-spring flexible hinge is different from the general flexible hinge. It can not only store and release angular energy but also produce large deformation. When one end is fixed and the position of other workpieces and the cross-spring flexible hinge changes, the cross-spring flexible hinge can generate torque to pull the workpiece back to its initial position. Cross-spring flexible hinges are widely used in various precision instruments and micro-electromechanical systems, especially in the field of vibration isolation, where they have better vibration isolation characteristics and are used to provide reset elastic force for rotating parts.

[0053] Similarly, according to the embodiments of the present disclosure, reference Figures 1 to 4 The angle between the second lever hinge 7 and the horizontal plane is A, where 45°≤A≤90°. The inclination directions of the two second lever hinges 7 on the front side are opposite to the inclination directions of the two second lever hinges 7 on the rear side, and form a cross-spring hinge.

[0054] After the flexible hinge optical-mechanical structure is designed, its stability needs to be tested, and the slight changes in the flexible hinge optical-mechanical structure are difficult to detect using conventional testing methods. Figures 1 to 4 The flexible hinge optomechanical structure further includes a bottom plane reflector 8 and a top plane reflector 9. The bottom plane reflector 8 is located on the upper surface of the fixed plate 1, and the top plane reflector 9 is located on the upper surface of the top plate 602. By providing the flexible hinge optomechanical structure with the bottom plane reflector 8 and the top plane reflector 9, minute deformations can be amplified through the principle of optical magnification, thereby facilitating the determination of the stability of the flexible hinge optomechanical structure.

[0055] According to an embodiment of the present disclosure, referring to Figures 1 to 4 The flexible hinge optical-mechanical mechanism is made of AlSi10Mg, which facilitates the processing of the bottom plane reflector 8 on the bottom plate and the top plane reflector 9 on the top plate 602. Specifically, the bottom plane reflector 8 and the top plane reflector 9 are formed by precision machining. The RMS values of the bottom plane reflector 8 and the top plane reflector 9 are both less than λ / 20, where λ = 632.8nm. The deflection angle of the bottom plane reflector 8 and the top plane reflector 9 is less than 3".

[0056] According to an embodiment of the present disclosure, referring to Figures 1 to 4 The inclination angle of the two first lever type hinges 5 on the left side is 45 degrees, and the inclination angle of the two first lever type hinges 5 on the right side is 45 degrees.

[0057] In order to further improve the mechanical amplification effect of the flexible hinge optical-mechanical structure in the front-to-back direction, refer to Figure 3 A first central lever 10 is further provided between the two first lever hinges 5 on each side, and the first central lever 10 and the two first lever hinges 5 form a Z shape. Figure 4 In order to further improve the mechanical amplification effect of the flexible hinge optical-mechanical structure in the front-to-back direction, a second central lever 11 is further provided between the two second lever-type hinges 7 on each side, and the second central lever 11 and the two second lever-type hinges 7 form a Z shape.

[0058] In order to further improve the flexibility of the flexible hinge optical-mechanical structure in the front-to-back direction, making the flexible hinge optical-mechanical structure easier to deform in the front-to-back direction, refer to Figure 3 Each of the first central levers 10 has a first cutting groove 101 , and the first cutting groove 101 divides the first central lever 10 into two first sub-central levers 102 parallel to each other.

[0059] Similarly, in order to further improve the flexibility of the flexible hinge optical structure in the left and right directions, making the flexible hinge optical structure easier to deform in the left and right directions, refer to Figure 4 Each of the second central levers 11 has a second cutting groove 111 , and the second cutting groove 111 divides the second central lever 11 into two second sub-central levers 112 parallel to each other.

[0060] According to an embodiment of the present disclosure, referring to Figure 1 and Figure 2 The distance between the first lever hinge 5 on the left and right sides and the square bottom plate 2 is equal to the distance between the second lever hinge 7 on the front and rear sides and the top plate 602. Figure 2 In this way, in the left-right direction, the first follower 4 has two downward avoidance areas for accommodating the two first vertical plates 3, and in the front-back direction, the first follower 4 has two upward avoidance areas for accommodating the two fourth vertical plates 601. This design of the first follower 4 can make the flexible hinge optomechanical structure have a smaller spatial structure, thereby making the flexible hinge optomechanical structure have a smaller volume.

[0061] Secondly, embodiments of the present application further provide a stability evaluation device for a flexible hinge optomechanical structure, for evaluating the stability of the flexible hinge optomechanical structure, comprising: an air-floating vibration isolation platform 15 having a horizontal working platform, a support frame 16 linearly arranged on the working platform, a theodolite 17, a laser interferometer 18, and the flexible hinge optomechanical structure. The support frame 16 has a vertical mounting surface on the side facing the theodolite 17, and the flexible hinge optomechanical structure is connected to the mounting surface via the fixing plate 1.

[0062] Specifically, the work surface of the air-floating vibration isolation platform 15 is provided with threaded mounting holes. One end of the support frame 16 is mounted to the air-floating vibration isolation platform 15 using standard screws, with the bottom surface as a reference. The other end is screwed through the screw mounting hole, positioning the flexible hinge optomechanical structure on the mounting plane, thereby achieving a rigid connection between the air-floating vibration isolation platform 15, the support frame 16, and the flexible hinge optomechanical structure. The theodolite 17 is visually mounted on the air-floating vibration isolation platform 15. Its optical plummet is used to precisely align it with the flexible hinge optomechanical structure. After leveling, the top and bottom plane reflectors 9 and 8 are aligned and read to obtain angle values. Using the bottom plane reflector 8 as a reference, the angle between the top and bottom plane reflectors 9 and 8 is calculated. Visually mount the laser interferometer 18 on the air-floating vibration isolation platform 15. Align the standard lens of the laser interferometer 18 with the star-seeking window and adjust the gimbal to ensure the light spot is centered on the target. Obtain the surface RMS value. After the temperature test, repeat the above steps to obtain new angle values between the top and bottom plane reflectors 9 and the top plane reflector 8, as well as the surface RMS value of the top plane reflector 9. Calculate the difference between the angle and the surface RMS before and after the temperature test to determine whether the optomechanical structure is stable.

[0063] The stability evaluation device described above can be used to determine the stability of a flexible hinge optomechanical structure. The device has the advantages of small assembly error, strong operability, and high detection accuracy.

[0064] In a second aspect, embodiments of the present application further provide a method for evaluating the stability of a flexible hinge optomechanical structure. The method utilizes the above-mentioned device for evaluating the stability of a flexible hinge optomechanical structure and includes the following steps:

[0065] Step 1: Debug and calibrate theodolite 17, debug and calibrate the laser interferometer 18;

[0066] Step 2: Using the theodolite 17 to measure the absolute angle of the bottom plane reflector 8 and the absolute angle of the top plane reflector 9 before the temperature test;

[0067] The laser interferometer 18 is used to measure the surface RMS value of the bottom plane reflector 8 and the surface RMS value of the top plane reflector 9 before the temperature test;

[0068] Step 3: Dismantle the flexible hinge optical-mechanical structure, perform a temperature test, and reinstall it to the mounting surface;

[0069] Step 4: Using the theodolite 17 to measure the absolute angle of the bottom plane reflector 8 and the absolute angle of the top plane reflector 9 after the temperature test;

[0070] The laser interferometer 18 is used to measure the surface RMS value of the bottom plane reflector 8 and the surface RMS value of the top plane reflector 9 after the temperature test;

[0071] Step 5: Calculate the angle difference A of the bottom plane reflector 8 before and after the temperature test;

[0072] Calculate the angle difference B of the top plane reflector 9 before and after the temperature test;

[0073] Calculate the difference C in the surface RMS value of the bottom plane reflector 8 before and after the temperature test;

[0074] Calculate the difference D in the surface RMS value of the top plane reflector 9 before and after the temperature test;

[0075] The flexible hinge optomechanical structure is determined to be in a stable state if and only if |A|≤3″, |B|≤3″, |C|≤10nm and |D|≤10nm, otherwise it is in an unstable state.

[0076] Furthermore, the temperature test in step 3 includes a high temperature test, a low temperature test, and a temperature shock test, which are performed in sequence. Specifically, the high temperature test, low temperature test, and temperature shock test are carried out in accordance with GJB 150 "Laboratory Environmental Test Methods for Military Equipment" "Part 3: High Temperature Test", "Part 4: Low Temperature Test", and "Part 5: Temperature Shock Test" respectively.

[0077] The preferred embodiments of the present disclosure are described in detail above in conjunction with the accompanying drawings. However, the present disclosure is not limited to the specific details of the above embodiments. Within the technical concept of the present disclosure, various simple modifications can be made to the technical solutions of the present disclosure, and these simple modifications all fall within the scope of protection of the present disclosure.

[0078] It should also be noted that the various specific technical features described in the above specific embodiments can be combined in any suitable manner without contradiction. To avoid unnecessary repetition, the present disclosure will not further describe various possible combinations.

[0079] In addition, the various embodiments of the present disclosure may be arbitrarily combined, and as long as they do not violate the concept of the present disclosure, they should also be regarded as the contents disclosed by the present disclosure.

Claims

1. A flexible hinge optical-mechanical structure, characterized in that: include: A fixed plate (1) is placed horizontally; A square bottom plate (2) is fixedly connected to the upper surface of the fixed plate (1), and has a horizontal upper surface, a first pair of sides (201) perpendicular to the left-right direction, and a second pair of sides (202) perpendicular to the front-back direction; Two first vertical plates (3), each of the first vertical plates (3) extending upward along the first pair of edges (201); A first follower (4) includes two second vertical plates (401) distributed in the left-right direction and two third vertical plates (402) connected to the second vertical plates (401), wherein the two second vertical plates (401) and the two third vertical plates (402) form a square tube; The distance between the two second vertical plates (401) is equal to the distance between the two first vertical plates (3) and the two second vertical plates (401) are respectively located above the two first vertical plates (3); Each second vertical plate (401) is connected to the corresponding first vertical plate (3) via two first lever-type hinges (5) with equal inclination angles; The second follower (6) comprises two fourth vertical plates (601) arranged in a front-to-back direction and parallel to each other, and a top plate (602) connecting the two fourth vertical plates (601), wherein the spacing between the two fourth vertical plates (601) is equal to the spacing between the two third vertical plates (402) and the second follower (6) is located above the two third vertical plates (402), and the top plate (602) is parallel to the bottom plate; Each fourth vertical plate (601) is connected to the corresponding third vertical plate (402) via two second lever-type hinges (7) with equal inclination angles.

2. The flexible hinge optical-mechanical structure according to claim 1, characterized in that: The angle between the first lever hinge (5) and the horizontal plane is A, 45°≤A≤90°, the inclination direction of the two first lever hinges (5) on the left side is opposite to the inclination direction of the two first lever hinges (5) on the right side, and they form a cross-leaf hinge; The angle between the second lever hinge (7) and the horizontal plane is A, 45°≤A≤90°, the inclination direction of the two second lever hinges (7) on the front side is opposite to the inclination direction of the two second lever hinges (7) on the rear side, and a cross leaf hinge is formed.

3. The flexible hinge optical-mechanical structure according to claim 1, wherein: The flexible hinge optical-mechanical structure further comprises a bottom plane reflector (8) and a top plane reflector (9), wherein the bottom plane reflector (8) is located on the upper surface of the fixed plate (1), and the top plane reflector (9) is located on the upper surface of the top plate (602).

4. The flexible hinge optical-mechanical structure according to claim 3, characterized in that: The flexible optical mechanism is made of AlSi10Mg, the bottom plane reflector (8) and the top plane reflector (9) are formed by precision machining, the RMS values of the bottom plane reflector (8) and the top plane reflector (9) are both less than λ / 20, where λ=632.8nm, and the deflection angles of the bottom plane reflector (8) and the top plane reflector (9) are less than 3″.

5. The flexible hinge optical-mechanical structure according to claim 1, wherein: The inclination angle of the two first lever-type hinges (5) on the left side is 45 degrees, and the inclination angle of the two first lever-type hinges (5) on the right side is 45 degrees; A first central lever (10) is further provided between the two first lever-type hinges (5) on each side, and the first central lever (10) and the two first lever-type hinges (5) form a Z shape; A second central lever (11) is further provided between the two second lever-type hinges (7) on each side, and the second central lever (11) and the two second lever-type hinges (7) form a Z shape.

6. The flexible hinge optical-mechanical structure according to claim 5, characterized in that: Each of the first central levers (10) has a first cutting groove (101), and the first cutting groove (101) divides the first central lever (10) into two mutually parallel first sub-central levers (102); Each of the second central levers (11) has a second cutting groove (111), and the second cutting groove (111) divides the second central lever (11) into two second sub-central levers (112) that are parallel to each other.

7. The flexible hinge optical-mechanical structure according to claim 6, characterized in that: The distance between the first lever-type hinges (5) on the left and right sides and the square bottom plate (2) is equal to the distance between the second lever-type hinges (7) on the front and rear sides and the top plate (602).

8. A device for evaluating the stability of a flexible hinge optomechanical structure, for evaluating the stability of the flexible hinge optomechanical structure according to any one of claims 1 to 7, characterized in that: include: An air-floating vibration isolation platform (15) having a horizontal working platform; A support frame (16), a theodolite (17) and a laser interferometer (18) are arranged on the working platform along a straight line; and a flexible hinge optical-mechanical structure; The support frame (16) has a vertical mounting surface on one side facing the theodolite (17), and the flexible hinge optical-mechanical structure is connected to the mounting surface via the fixing plate (1).

9. A method for evaluating the stability of a flexible hinge optomechanical structure, the method utilizing the stability evaluation device of claim 8, characterized in that: The following steps are involved: Step 1: Debugging and calibrating theodolite (17), debugging and calibrating the laser interferometer (18); Step 2: Using a theodolite (17), measure the absolute angle of the bottom plane reflector (8) and the absolute angle of the top plane reflector (9) before the temperature test; Using a laser interferometer (18) to measure the surface RMS value of the bottom plane reflector (8) and the surface RMS value of the top plane reflector (9) before the temperature test; Step 3: Dismantle the flexible hinge optical-mechanical structure, perform a temperature test, and reinstall it to the mounting surface; Step 4: using a theodolite (17) to measure the absolute angle of the bottom plane reflector (8) and the absolute angle of the top plane reflector (9) after the temperature test; Using a laser interferometer (18) to measure the surface RMS value of the bottom plane reflector (8) and the surface RMS value of the top plane reflector (9) after the temperature test; Step 5: Calculate the angle difference A of the bottom plane reflector (8) before and after the temperature test; Calculate the angle difference B of the top plane reflector (9) before and after the temperature test; Calculate the difference C in the surface RMS value of the bottom plane reflector (8) before and after the temperature test; Calculate the difference D in the surface RMS value of the top plane reflector (9) before and after the temperature test; The flexible hinge optomechanical structure is determined to be in a stable state if and only if |A|≤3″, |B|≤3″, |C|≤10nm and |D|≤10nm, otherwise it is in an unstable state.

10. The method for evaluating the stability of a flexible hinge optical-mechanical structure according to claim 9, wherein: In step 3, the temperature test includes a high temperature test, a low temperature test and a temperature shock test performed in sequence.

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