Light source device, system and method for defect detection

Abstract

The present application discloses a light source device, system and method for defect detection, wherein the light source device includes a first focusing device, a plurality of first light sources and a reflecting device; wherein the first focusing device is used to converge light, and has a first focusing surface extending along a first direction, and the first focusing surface has a plurality of first focal points and a plurality of second focal points, wherein the plurality of first focal points form a first straight line parallel to the first direction, and the plurality of second focal points form a second straight line parallel to the first direction; the plurality of first light sources are used to emit light, and are arranged on the first straight line; the reflecting device is used to reflect light, and is arranged on one side of the first direction of the focusing device; wherein the light emitted by the first light source can pass through the focusing surface and / or the reflecting device and illuminate the second straight line. Through the scheme of the present application, the intensity of light received by the object to be detected at different angles can be improved, thereby increasing the range of angles of illumination of the object to be detected.

Description

Technical Field

[0001] The present application generally relates to the field of defect detection technology. More specifically, the present application relates to a light source device, system, and method for defect detection. Background Art

[0002] Automated Optical Inspection (AOI) is an industrial inspection method that uses optical imaging and computer vision technologies to automatically detect surface defects in products. It uses optical equipment to capture and scan the product under inspection (such as circuit boards, components, and displays) to obtain image information. During this process, specially designed lighting systems (such as LED ring lights, coaxial lights, and side lights) can be used to highlight key features and potential defects. The captured image is then analyzed using image processing software. The software compares the image with a preset standard template or an image or model of a known qualified product. Algorithms are then used to identify deviations in size, shape, color, position, presence, and markings (such as silkscreens and QR codes).

[0003] In AOI inspection, light sources such as line light sources, surface light sources, or coaxial light sources are often used. When using a line light source, the object to be inspected can receive light from different angles. In existing AOI inspections, the light source used is highly directional. At different angles, the amount of light received by the object to be inspected may be different, that is, the radiation intensity of these light rays may be different. Furthermore, at certain angles of received light, its radiation intensity may be very low, that is, the range of angles of illumination received by the object to be inspected in certain directions is small. It is understandable that this will result in insufficient light reflection from the surface of the object, the overall grayscale value of the image captured by the camera is low, and the grayscale difference between the target features (such as the edge of the solder joint, the outline of the circuit) and the background is reduced, resulting in a decrease in contrast in some areas and blurred features, thereby reducing the accuracy of the inspection.

[0004] In view of this, there is an urgent need to provide a light source device, system, and method for defect detection to increase the range of illumination angles of the object to be inspected. Summary of the Invention

[0005] In order to at least solve one or more of the technical problems mentioned above, the present application proposes a solution of a light source device, system and method for defect detection in multiple aspects.

[0006] In a first aspect, the present application provides a light source device for defect detection, the light source device comprising a first focusing device, a plurality of first light sources and a reflecting device; wherein the first focusing device is used to converge light, and has a first focusing surface extending along a first direction, the first focusing surface has a plurality of first focal points and a plurality of second focal points, wherein the plurality of first focal points form a first straight line parallel to the first direction, and the plurality of second focal points form a second straight line parallel to the first direction; the plurality of first light sources are used to emit light, and are arranged on the first straight line; the reflecting device is used to reflect light, and is arranged on one side of the first direction of the focusing device; wherein the light emitted by the first light source can pass through the focusing surface and / or the reflecting device and be irradiated on the second straight line.

[0007] In some embodiments, the light source device also includes a second focusing device and multiple second light sources; wherein the second focusing device has multiple third focuses and fourth focuses, wherein the third focuses form a third straight line, and the fourth focuses form a fourth straight line, wherein the third straight line and the first straight line are symmetrical with respect to the second straight line, and the fourth straight line and the second straight line coincide; the multiple second light sources are arranged on the third straight line.

[0008] In some embodiments, the first light-collecting surface comprises an ellipsoidal surface.

[0009] In some embodiments, the reflective device includes a first reflective device and a second reflective device respectively arranged on both sides of the first concentrating device in the first direction, wherein the projections of the first concentrating device and the first light source in the first direction are located on the first reflective device.

[0010] In some embodiments, the light source device also includes a third focusing device, multiple third light sources and a spectrometer; wherein the third focusing device has multiple fifth focal points, wherein the multiple fifth focal points form a fifth straight line parallel to the first straight line; the multiple third light sources are arranged on the fifth straight line; the spectrometer is used to reflect the light emitted by the third light source; wherein the light emitted by the third light source passes through the third focusing device and the spectrometer and is irradiated onto the second straight line.

[0011] In some embodiments, the light source device further includes a cylindrical mirror, which is disposed on a side of the spectrometer facing the third focusing device and is used to compensate for aberrations generated when light emitted by the third light source passes through the spectrometer.

[0012] In some embodiments, a gap is provided between the first concentrating device and the second concentrating device so that light can pass through the gap.

[0013] In a second aspect, the present application provides a system for defect detection, comprising: a light source device as described in any one of the first aspects; and a component to be detected, wherein the component to be detected at least partially coincides with the second straight line.

[0014] In some embodiments, the system further includes an imaging lens assembly and a camera assembly; wherein the imaging lens assembly is used to receive light reflected from the component to be inspected and transmit it to the camera assembly; and the camera assembly is used to photograph the component to be inspected.

[0015] In a third aspect, the present application provides a method for defect detection, which is applied to a system as described in any one of the second aspects, and the method includes: turning on a light source device so that the light emitted by the light source device is irradiated on the component to be inspected; collecting image information of the component to be inspected based on a camera component; and determining defect information of the inspection component based on the image information.

[0016] Through the light source device, system and method for defect detection provided above, the solution of the embodiment of the present application enables the object to be inspected to increase the illumination angle in the partial direction propagating to the second straight line when receiving light at different angles, so as to improve the range of the illumination angle of the object to be inspected, thereby realizing dome lighting. BRIEF DESCRIPTION OF THE DRAWINGS

[0017] The above and other objects, features and advantages of the exemplary embodiments of the present application will become readily understood by reading the detailed description below with reference to the accompanying drawings. In the accompanying drawings, several embodiments of the present application are shown in an exemplary and non-limiting manner, and the same or corresponding reference numerals represent the same or corresponding parts, wherein:

[0018] Figure 1 The figure shows the distribution of radiation intensity at different angles in different directions at any point on the existing object to be measured.

[0019] Figure 2 An exemplary structural diagram of a light source device for defect detection according to some embodiments of the present application is shown;

[0020] Figure 3a illustrative structural diagrams of light source devices for defect detection according to other embodiments of the present application;

[0021] Figure 3b The figure shows the distribution of radiation intensity at different angles in different directions at any point on the object to be measured according to some embodiments of the present application;

[0022] Figure 3c An exemplary structural diagram of a circuit board according to some embodiments of the present application is shown;

[0023] Figure 4 A schematic diagram of a light path of a light source device according to some embodiments of the present application is shown;

[0024] Figure 5 An exemplary structural diagram of a system for defect detection according to some embodiments of the present application is shown;

[0025] Figure 6 An exemplary block diagram of a method 600 for defect detection according to the present application is shown.

[0026] Tag Name

[0027] 10 - first concentrating device, 11 - first concentrating surface, 20 - first light source, 21 - circuit board, 22 - mounting hole, 30 - reflecting device, 40 - second concentrating device, 50 - second light source, 60 - third concentrating device, 70 - third light source, 80 - spectrometer, 801 - cylindrical mirror, 802 - bottom of spectrometer prism, 803 - first side of spectrometer prism, 910 - detection assembly, 920 - imaging lens assembly, 930 - camera assembly. DETAILED DESCRIPTION

[0028] The following will be combined with the drawings in the embodiments of this application to clearly and completely describe the technical solutions in the embodiments of this application. Obviously, the embodiments described are part of the embodiments of this application, not all of them. Based on the embodiments in this application, all other embodiments obtained by those skilled in the art without making creative efforts are within the scope of protection of this application.

[0029] It should be understood that the terms "include" and "comprising" used in the description and claims of this application indicate the presence of described features, wholes, steps, operations, elements and / or components, but do not exclude the presence or addition of one or more other features, wholes, steps, operations, elements, components and / or collections thereof.

[0030] It should also be understood that the terms used in this specification are for the purpose of describing specific embodiments only and are not intended to limit this application. As used in this specification and claims, the singular forms "a," "an," and "the" are intended to include the plural forms unless the context clearly indicates otherwise. It should also be further understood that the term "and / or" as used in this specification and claims refers to any and all possible combinations of one or more of the associated listed items, including and including these combinations.

[0031] As used in this specification and claims, the term “if” can be interpreted as “when” or “upon” or “in response to determining” or “in response to detecting,” depending on the context. Similarly, the phrase “if it is determined” or “if [described condition or event] is detected” can be interpreted as meaning “upon determination” or “in response to determining” or “upon detection of [described condition or event]” or “in response to detecting [described condition or event],” depending on the context.

[0032] The specific implementation of the present application will be described in detail below with reference to the accompanying drawings.

[0033] Figure 1 The figure shows the distribution of radiation intensity at different angles in different directions at any point on the existing object to be measured. It should be understood that the first direction mentioned in the text is the direction shown in the figure, and the first direction can be the direction of the arrow in the figure or the direction opposite to the arrow. Figure 1 As shown in the figure, the first coordinate graph can display the distribution of the radiation intensity of the object under test at different angles, the second coordinate graph can display the distribution of the radiation intensity of any point on the object under test at different angles in a certain direction, and the third coordinate graph can display the distribution of the radiation intensity of any point on the object under test at different angles in another direction. It can be understood that the illumination intensity of the light gradually decreases in the order of red, yellow, green, and blue.

[0034] In some embodiments, according to the first and second coordinate graphs, it can be seen that the object under test can receive light at an angle of -70 degrees to +70 degrees in a certain direction. According to the first and third coordinate graphs, it can be seen that the object under test can receive light at an angle of -40 degrees to +40 degrees in another direction. At this time, in this direction, it is difficult for the object under test to receive light at angles of -90 degrees to -40 degrees or from 40 degrees to 90 degrees.

[0035] It is understandable that, since the object to be measured receives light in certain directions (such as the direction corresponding to the third coordinate diagram), the range of angles at which it receives light is small, and therefore the amount of light received is small, resulting in a limited amount of light that the object to be measured can reflect in this direction.

[0036] Figure 2 An exemplary structural diagram of a light source device for defect detection according to some embodiments of the present application is shown.

[0037] like Figure 2As shown, the light source device includes a first concentrating device 10, a plurality of first light sources 20 and a reflecting device 30; wherein, the first concentrating device 10 is used to converge light, and has a first concentrating surface 11 extending along a first direction, and the first concentrating surface 11 has a plurality of first focal points and a plurality of second focal points, wherein the plurality of first focal points form a first straight line parallel to the first direction, and the plurality of second focal points form a second straight line parallel to the first direction; the plurality of first light sources 20 are used to emit light, and are arranged on the first straight line; the reflecting device 30 is used to reflect light, and is arranged on one side of the first concentrating device 10 in the first direction; wherein, the light emitted by the first light source 20 can pass through the concentrating surface 11 and / or the reflecting device 30 and be irradiated on the second straight line.

[0038] In some embodiments, the first light-collecting surface 11 comprises an ellipsoidal surface. In some embodiments, the ellipsoidal surface is replicated and extended along the first direction to form a cylindrical ellipsoidal surface.

[0039] In some embodiments, the first concentrating device 10 can be used to converge light, and it can include a reflector, a spectroscope, a prism, a reflective concentrator, and the like. Furthermore, the reflector can include a spherical reflector, a parabolic reflector, and an ellipsoidal reflector, and the like. Preferably, the first concentrating device 10 can be an ellipsoidal reflector, which has the advantages of high energy density and low light loss rate. It is understandable that the longitudinal cross-section of the ellipsoidal reflector can have two different focal points. When the first light source is set at one of the focal points, the light emitted by the first light source can be reflected by the ellipsoidal reflector and propagate to the other focal point. Therefore, the object to be tested can be placed at another focal point, so that the detection of the object to be tested can be achieved.

[0040] In some embodiments, the ellipsoidal reflector may have a first light-collecting surface 11 extending along a first direction, and the first light-collecting surface 11 may have a plurality of first focal points and a plurality of second focal points. Specifically, the longitudinal cross-section of the first light-collecting surface 11 may be an ellipse, and the first light-collecting surface 11 may have a plurality of continuous longitudinal cross-sections, each of which may be an ellipse. It is understood that each ellipse may have a first focus and a second focus. Further, the line connecting these multiple first foci may form a first straight line, and the first straight line may be parallel to the first direction. It is understood that the first light-collecting surface 11 may be formed by extending the ellipse of its longitudinal cross-section along the first direction. It is understood that the line connecting the second focus of each of the aforementioned ellipses may form a second straight line, and the second straight line may be arranged parallel to the first straight line.

[0041] In some embodiments, the first light source may include an LED, a laser, an ultraviolet, an infrared, or a halogen light source. Preferably, the first light source may be an LED, which offers advantages such as high brightness, long life, and ease of control. Furthermore, the LED may include LED beads. In some embodiments, the plurality of first light sources 20 may be arranged in a straight line, sequentially arranged along the first direction. Furthermore, the plurality of first light sources 20 may be closely spaced along the first straight line, or spaced apart along the first straight line, for example, with a predetermined distance between each adjacent first light source 20. It will be appreciated that since the plurality of first light sources 20 are all positioned at the first focal point, the light emitted by these first light sources 20 may be reflected by the first concentrating surface 11 of the ellipsoidal reflector and converged onto the second straight line at the second focal point. Furthermore, since the first light sources 20 are arranged linearly along the first straight line at the first focal point, the light converging at the second focal point also appears linearly along the second straight line. In this case, although the first light sources 20 are spaced apart, the light may be continuous along the second straight line. In some embodiments, the first light source may be a dark field linear light source.

[0042] In some embodiments, the light source device may further include a reflective device 30 , which may include a mirror reflector. The mirror reflector may be disposed in the first direction of the first concentrating device 10 , and the first concentrating device 10 may rest against the mirror reflector.

[0043] In some embodiments, the light source device may include one reflective device 30, in which case the reflective device 30 may be disposed on one side of the first concentrating device 10 in the first direction and abut against the first concentrating device 10. In other embodiments, the light source device may include two reflective devices 30, in which case the reflective devices 30 may be disposed on both sides of the first concentrating device 10 in the first direction and abut against the first concentrating device 10, that is, the first concentrating device 10 may be disposed between the two reflective devices 30.

[0044] In some embodiments, after the first light source 20 emits light, the light may be directly reflected by the first light-collecting surface 11 onto the second straight line where the second focal point is located. In other embodiments, after being reflected by the light-collecting surface 11, the light may propagate toward the reflective device 30, and then be further reflected by the reflective device 30 onto the straight line where the second focal point is located. In still other embodiments, after being reflected by the reflective device 30, the light may propagate toward the first light-collecting surface 11, and then be further reflected by the first light-collecting surface 11 onto the straight line where the second focal point is located.

[0045] It is understood that because the first concentrating device 10 is not infinitely extended in the first direction, that is, the first concentrating surface 11 is not infinitely extended in the first direction, when the reflector 30 is absent, some of the light emitted by the first light source 20 can diverge outward, while some of the light can also diverge outward after being reflected by the first concentrating surface 11. This reduces the amount of light propagating onto the second straight line and reduces the angle of illumination in some directions along the second straight line. By providing the reflector 30 in the first direction of the first concentrating device 10, the light that previously diverged outward can be reflected toward the second straight line after passing through the reflector 30. This increases the amount of light propagating toward the second straight line and the angle of illumination in some directions along the second straight line, thereby increasing the range of illumination angles for the object to be inspected and achieving dome illumination. It is understood that when a sample surface is relatively rough, the signal-to-noise ratio of the resulting image is poor when illuminated by a directional light source. Using a multi-angle light source to illuminate the sample, such as a dome light source, can improve the signal-to-noise ratio of the image.

[0046] Figure 3a Exemplary structural diagrams of light source devices for defect detection according to other embodiments of the present application are shown. Figure 3b The diagram shows the distribution of radiation intensity at different angles in different directions at any point on the object to be measured according to some embodiments of the present application. Figure 3c An exemplary structural diagram of a circuit board according to some embodiments of the present application is shown.

[0047] like Figure 3a As shown, in some embodiments, the light source device further includes a second condenser 40 and a plurality of second light sources 50; wherein the second condenser 40 has a plurality of third and fourth focal points, wherein the third focal points form a third straight line, and the fourth focal points form a fourth straight line, wherein the third straight line and the first straight line are symmetrical with respect to the second straight line, and the fourth straight line coincides with the second straight line; and the plurality of second light sources 50 are arranged on the third straight line. In some embodiments, the second light source can also be a dark-field linear light source.

[0048] In some embodiments, the light source device may include a first condensing device 10 , a plurality of first light sources 20 , and a reflecting device 30 .

[0049] In some embodiments, the second concentrating device can also be an ellipsoidal reflector, which can be used to converge light. It can have a second concentrating surface extending along the first direction. The second concentrating surface can have multiple third and fourth focuses. The longitudinal cross-section of the second concentrating surface can be elliptical. The second concentrating surface can have multiple continuous longitudinal cross-sections, each of which can be elliptical. It can be understood that each ellipse can have a third focus and a fourth focus. Further, the line connecting these multiple third foci can form a third straight line, and the third straight line can be parallel to the first direction. It can be understood that the second concentrating surface can be formed by extending the elliptical shape of its longitudinal cross-section along the first direction. It can be understood that the line connecting the fourth focus of each of the aforementioned ellipses can form a fourth straight line, and the fourth straight line can be set parallel to the third straight line.

[0050] It can be understood that the ellipse of the longitudinal cross-section of the second focusing surface can be the same size as the ellipse of the longitudinal cross-section of the first focusing surface, and the third straight line and the first straight line are symmetrical with respect to the second straight line, and the fourth straight line and the second straight line coincide with each other. It can be understood that at this time, the second focusing surface and the first focusing surface can also be symmetrical with respect to the second straight line.

[0051] In some embodiments, the reflector 30 can also be disposed on one side of the second concentrator 40 in the first direction and can abut against the second concentrator 40. After the first light source 20 emits light, the light can be directly reflected by the second concentrating surface onto the fourth straight line where the fourth focal point is located. In other embodiments, after reflecting from the second concentrating surface, the light can propagate toward the reflector 30 and then be reflected by the reflector 30 onto the straight line where the fourth focal point is located. In yet other embodiments, after reflecting from the reflector 30, the light can propagate toward the second concentrating surface and then be reflected by the second concentrating surface onto the straight line where the fourth focal point is located. It will be appreciated that the fourth focal point and the second focal point coincide, i.e., the fourth straight line and the second straight line coincide, thereby increasing the light intensity and illumination angle on the fourth straight line (the second straight line), thereby increasing the contrast of a portion of the image captured by the camera, thereby improving detection accuracy.

[0052] In some embodiments, the reflecting device 30 includes a first reflecting device and a second reflecting device, respectively arranged on both sides of the first concentrating device 10 in the first direction, wherein the projection of the first concentrating device 10 and / or the first light source 20 in the first direction is located on the first reflecting device and / or the second reflecting device.

[0053] In some embodiments, a first reflector and a second reflector (not shown) can be respectively disposed on either side of the first concentrator 10 in the first direction. That is, the first concentrator 10 can be disposed between the first and second reflectors, and one end of the first concentrator 10 can abut against the first reflector, while the other end of the first concentrator 10 can abut against the second reflector. Furthermore, the projections of the first concentrator 10 and the first light source 20 in the first direction are located on the first and / or second reflectors.

[0054] In some embodiments, the reflector 30 may include a plane reflector. The first reflector and the second reflector may be parallel plane reflectors, and the plane reflectors may be perpendicular to the line in the first direction. In some embodiments, the projection of the first light source in the first direction may also be on the first reflector and / or the second reflector. Preferably, the projection of the first concentrating device 10 in the first direction may be on both the first reflector and the second reflector, and the projection of the first light source in the first direction may be on both the first reflector and the second reflector.

[0055] In some embodiments, the first reflector can be composed of three plane reflectors, which can be used to reflect the light emitted by the first light source, the light emitted by the second light source, and the light emitted by the third light source, respectively. Furthermore, the second reflector can also be composed of three plane reflectors, which can also be used to reflect the light emitted by the first light source, the light emitted by the second light source, and the light emitted by the third light source, respectively. It is understood that these plane reflectors can be fixed to the mechanical structure separately.

[0056] In some embodiments, as Figure 3c As shown, multiple first light sources 20 can be arranged on a circuit board 21, and the plane where the circuit board 21 is located can be parallel to the first direction. Furthermore, multiple first light sources 20 can be arranged along a "one" shape, and the connection line of the multiple first light sources 20 can also be parallel to the first direction. In some embodiments, the circuit board 21 can also be provided with mounting holes 22 for installing the circuit board 21. It is understandable that the second light source and the third light source can also be provided on the circuit board, and their structures are similar. Figure 3c The circuit board structure shown is similar and will not be described in detail in this application.

[0057] Furthermore, both ends of the circuit board may also respectively rest against the first reflective component and the second reflective component.

[0058] In some embodiments, the projection of the second concentrator in the first direction may also be on the first reflector and / or the second reflector. The projection of the second light source in the first direction may also be on the first reflector and / or the second reflector. Furthermore, the projection of the circuit board where the second light source is located in the first direction may also be on the first reflector and / or the second reflector. At this time, the light emitted by the second light source can be reflected to the fourth focus by the second concentrator; the light emitted by the second light source can also be reflected by the second concentrator and the first reflector and illuminate the fourth focus; the light emitted by the second light source can also be reflected by the second concentrator and the second reflector and illuminate the fourth focus.

[0059] In some embodiments, as Figure 3b As shown in the figure, the first coordinate graph can display the distribution of the radiation intensity of the object under test at different angles, the second coordinate graph can display the distribution of the radiation intensity of any point on the object under test at different angles in a certain direction, and the third coordinate graph can display the distribution of the radiation intensity of any point on the object under test at different angles in another direction. It can be understood that the illumination intensity of the light gradually decreases in the order of red, yellow, green, and blue.

[0060] Understandably, compared Figure 1 as well as Figure 3b , you can see Figure 1 In some areas, the light intensity is low. However, by setting the first reflector and the second reflector, the light intensity in the above areas is greatly improved. Figure 3b The first and second coordinate graphs show that the object under test receives light at an angle of -70 to +70 degrees in one direction. The first and third coordinate graphs show that the object under test receives light at an angle of -70 to +70 degrees in another direction. Therefore, by providing a reflective device, the range of angles of illumination received by the object under test can be increased, thereby achieving dome lighting. It is understood that dome lighting can include a range of illumination close to -70 to +70 degrees in all directions.

[0061] According to the solution of the present application, the two sides of the first concentrator 10 can respectively abut against the first reflector and the second reflector, and the two ends of the circuit board can also abut against the first reflector and the second reflector. In this case, light emitted by the first light source disposed on the circuit board can be reflected by the first concentrator to the second focus. Light emitted by the first light source can also be reflected by the first concentrator and the first reflector and then irradiated to the second focus. Light emitted by the first light source can also be reflected by the first concentrator and the second reflector and then irradiated to the second focus. Light emitted by the second light source disposed on the circuit board can also be reflected by the second concentrator to the fourth focus (i.e., the second focus). Light emitted by the second light source can also be reflected by the second concentrator and the first reflector and then irradiated to the fourth focus (i.e., the second focus). Light emitted by the second light source can also be reflected by the second concentrator and the second reflector and then irradiated to the fourth focus (i.e., the second focus). This increases the amount of light irradiating the second focus, thereby increasing the angle of illumination in the partial direction along the second straight line. The range of the illumination angle of the object to be detected can be increased, thereby achieving dome lighting.

[0062] In some embodiments, the light source device also includes a third focusing device 60, multiple third light sources 70 and a spectrometer 80; wherein the third focusing device 60 has multiple fifth focal points, wherein the multiple fifth focal points form a fifth straight line parallel to the first straight line; the multiple third light sources 70 are arranged on the fifth straight line; the spectrometer 80 is used to reflect the light emitted by the third light source 70; wherein the light emitted by the third light source 70 passes through the third focusing device 60 and the spectrometer 80 and is irradiated onto the second straight line.

[0063] In some embodiments, the third concentrating device 60 may also have a third concentrating surface extending along the first direction, with the third concentrating surface having multiple fifth and sixth focal points. Specifically, the longitudinal cross-section of the third concentrating surface may be elliptical. The third concentrating surface may have multiple continuous longitudinal cross-sections, each of which may be elliptical. It is understood that each ellipse may have a fifth and sixth focal points. Furthermore, the line connecting these multiple fifth focal points may form a fifth straight line, which may be parallel to the first direction. It is understood that the third concentrating surface may be formed by extending the elliptical shape of its longitudinal cross-section along the first direction. It is understood that the line connecting the sixth focal points of each of the aforementioned ellipses may form a sixth straight line, which may be arranged parallel to the fifth straight line. It is understood that after the third light source emits light from the location of the fifth focal point, it may converge at the sixth focal point. As the light converges toward the sixth focal point, it may be reflected by the spectrometer 80, thereby converging at the second focal point.

[0064] In some embodiments, multiple third light sources 70 can be disposed on a circuit board. Furthermore, the projections of the circuit board on which the third light sources 70 are located, the circuit board on which the first light source is located, the circuit board on which the second light source is located, and the first, second, and third light concentrators in the first direction can all be projected onto the first and second reflectors. Furthermore, the third light sources 70 can provide brightfield lighting.

[0065] In some embodiments, the beam splitter 80 may include a beam splitter prism. The bottom of the beam splitter prism may face the second focal point (fourth focal point), and the first side of the beam splitter prism may face the third focusing device. In some embodiments, after light is emitted by the third light source 70, it may be reflected by the third focusing device 60 and propagate toward the first side of the beam splitter prism. When light enters the beam splitter prism from the first side, it may be reflected 90 degrees by the interface of the beam splitter film within the beam splitter prism and then propagate outward from the bottom of the beam splitter prism.

[0066] Through the solution of the present application, the projections of the circuit board where the third light source 70 is located, the circuit board where the first light source is located, the circuit board where the second light source is located, the first concentrator, the second concentrator, and the third concentrator in the first direction can all be on the first reflector and the second reflector, thereby increasing the light irradiated at the second focal point and, in turn, increasing the illumination angle in the partial direction propagating along the second straight line. This can increase the range of illumination angles for the object to be inspected, thereby achieving dome lighting.

[0067] In some embodiments, the light source device further includes a cylindrical mirror 801 , which is disposed on a side of the spectrometer 80 facing the third condenser 60 to compensate for aberrations generated when light emitted by the third light source 70 passes through the spectrometer 80 .

[0068] In some embodiments, the cylindrical mirror 801 can be arranged on the first side of the dichroic prism. It is understandable that due to the wide width of the dichroic prism, when the light propagates in the dichroic prism, there will be a deviation between the actual imaging and the ideal imaging, resulting in problems such as image blur, deformation, color distortion, etc., which directly affect the detection accuracy of the AOI system. After the third light source 70 emits light, the light can be reflected by the third focusing device 60 and propagate toward the first side of the dichroic prism. When the light enters the dichroic prism from the first side of the dichroic prism through the cylindrical mirror 801, the aberration caused by the dichroic prism can be reduced. The light is reflected 90 degrees by the dichroic film interface in the dichroic prism, and can then propagate outward from the bottom of the dichroic prism.

[0069] By setting up the cylindrical mirror, it can compensate for the aberration of light propagating in the beam splitter prism, thereby ensuring the detection accuracy of the AOI system.

[0070] Figure 4 Schematic diagram of the light path of the light source device of some embodiments of the present application is shown in FIG. Figure 4 As shown, a gap is provided between the first concentrator 10 and the second concentrator 40 to allow light to pass through the gap. In some embodiments, the spectrometer 80 may include a spectrometer prism. Light emitted by the first light source may be reflected by the first concentrator. Light emitted by the first light source may also be reflected by the first concentrator and a reflector (e.g., the first reflector or the second reflector), thereby irradiating the second focal point. Light emitted by the second light source may also be reflected by the second concentrator. Light emitted by the second light source may also be reflected by the second concentrator and a reflector (e.g., the first reflector or the second reflector), thereby irradiating the fourth focal point (i.e., the second focal point). Light emitted by the third light source may be reflected by the third concentrator. Light emitted by the third light source may also be reflected by the third concentrator and a reflector (e.g., the first reflector or the second reflector), and propagate toward the first side of the spectrometer prism. When light enters the beam splitter prism from the first side portion 803 of the beam splitter prism, it can be reflected 90 degrees by the interface of the beam splitter film in the beam splitter prism and then propagate outward from the bottom portion 802 of the beam splitter prism.

[0071] It is understood that when light propagates from the bottom 802 of the beam splitter prism toward the second focal point, it can pass through the gap between the first concentrating element 10 and the second concentrating element 40, thereby propagating to the second focal point. Furthermore, when light is incident on the second straight line, it can be reflected, and the reflected light can also propagate outward through the gap (for example, to the interior of an imaging lens or a camera).

[0072] Figure 5 An exemplary structural diagram of a system for defect detection according to some embodiments of the present application is shown. The present application also provides a system for defect detection, comprising: any of the light source devices described above; and a component to be detected 910, wherein the component to be detected 910 at least partially coincides with the second straight line.

[0073] In some embodiments, the system further includes an imaging lens assembly 920 and a camera assembly 930; wherein the imaging lens assembly 920 is used to receive light reflected from the component to be inspected 910 and transmit it to the camera assembly 930; the camera assembly 930 is used to photograph the component to be inspected 910.

[0074] In some embodiments, the component to be inspected 910 may include a solar silicon wafer, a battery cell, a PCB board, an IC carrier board, a glass substrate, an integrated circuit board, etc.

[0075] In some embodiments, the imaging lens assembly 920 may be provided with a plurality of optical lenses, which may be used to focus light, optimize image quality, and adjust focal length.

[0076] In some embodiments, the camera assembly 930 may include a line scan camera, an area array camera, or the like. Preferably, the camera assembly 930 may be a line scan camera, which can image a moving object by scanning it line by line. Line scan cameras offer both high resolution and a wide field of view, and their imaging is relatively uniform from edge to center.

[0077] In some embodiments, the component to be detected 910 may at least partially coincide with the second straight line. Further, the component to be detected 910 may be linearly moved so that different regions of the component to be detected 910 coincide with the second straight line, respectively, to complete the scan.

[0078] In some embodiments, the light emitted by the first light source can be reflected to the second focus by the first concentrating device; the light emitted by the first light source can also be reflected by the first concentrating device and the first reflecting device and then irradiated to the second focus; the light emitted by the first light source can also be reflected by the first concentrating device and the second reflecting device and then irradiated to the second focus; the light emitted by the second light source can also be reflected to the fourth focus (i.e., the second focus) by the second concentrating device; the light emitted by the second light source can also be reflected by the second concentrating device and the first reflecting device and then irradiated to the fourth focus (i.e., the second focus); the light emitted by the second light source can also be reflected by the second concentrating device and the second reflecting device and then irradiated to the fourth focus (i.e., the second focus). The light emitted by the third light source can be reflected by a third condensing device and / or a reflecting device (e.g., a first reflecting device or a second reflecting device) and propagate toward the first side portion of the beam splitter prism. After entering the beam splitter prism from the first side portion, the light can be reflected 90 degrees by the interface of the beam splitter film within the beam splitter prism, and can then propagate from the bottom of the beam splitter prism toward the component to be inspected 910, and then propagate to the second focal point. It is understood that the position of the second focal point coincides with the inspection area of ​​the object to be inspected.

[0079] Furthermore, after the light is reflected by the component to be detected 910 , it can be transmitted to the imaging lens component 920 through the dichroic prism, and then finally to the camera component 930 to achieve imaging.

[0080] The solution of this application can increase the amount of light propagating toward the object to be inspected, thereby increasing the angle of illumination in certain directions of the object to be inspected. This can in turn increase the contrast of the image captured by the camera in these areas, thereby improving detection accuracy.

[0081] Figure 6 An exemplary block diagram of a method 600 for defect detection of the present invention is shown. The method 600 can be applied to any of the systems described above, such as Figure 6 As shown, the method includes: S601 turning on the light source device so that the light emitted by the light source device is irradiated on the component to be inspected; S602 collecting image information of the component to be inspected based on the camera component; S603 determining defect information of the inspection component based on the image information.

[0082] In some embodiments, the light source device may include a first focusing device, multiple first light sources, a second focusing device, a reflecting device, multiple second light sources, a third focusing device, multiple third light sources, a spectrometer, an imaging lens assembly, and a camera assembly, etc.

[0083] After the light source device is turned on, the light emitted by the first light source can be reflected by the first concentrator. The light emitted by the first light source can also be reflected by the first concentrator and the reflector (e.g., the first reflector or the second reflector), thereby irradiating the second focal point. The light emitted by the second light source can also be reflected by the second concentrator. The light emitted by the second light source can also be reflected by the second concentrator and the reflector (e.g., the first reflector or the second reflector), thereby irradiating the fourth focal point (i.e., the second focal point). The light emitted by the third light source can be reflected by the third concentrator. The light emitted by the third light source can also be reflected by the third concentrator and the reflector (e.g., the first reflector or the second reflector), and propagate toward the first side portion of the beam splitter prism. When the light enters the beam splitter prism from the first side portion 803 of the beam splitter prism, it can be reflected by the interface of the beam splitter film within the beam splitter prism, and then can propagate from the bottom 802 of the beam splitter prism toward the component to be inspected, thereby propagating to the second focal point. It can be understood that at this time, the position of the second focus coincides with the inspected area of ​​the object to be inspected, so that the light emitted by the light source device can illuminate the component to be inspected.

[0084] In some embodiments, after the light emitted by the light source device irradiates the component to be inspected, it may be reflected and then propagated to the camera component, thereby obtaining image information of the component to be inspected.

[0085] In some embodiments, after obtaining image information of the component to be inspected, defect information of the inspected component can be determined through image preprocessing, feature extraction, defect detection algorithm detection, and defect classification.

[0086] Through the solution of the present application, when the object to be detected receives light at different angles, the illumination angle in the partial direction propagating to the second straight line can be increased, thereby increasing the range of the illumination angle of the object to be detected and realizing dome lighting.

[0087] Although multiple embodiments of the present application have been shown and described herein, it will be apparent to those skilled in the art that such embodiments are provided by way of example only. Those skilled in the art can conceive of many changes, modifications, and alternatives without departing from the thought and spirit of the present application. It should be understood that in the process of practicing the present application, various alternatives to the embodiments of the present application described herein can be adopted. The accompanying claims are intended to define the scope of protection of the present application and therefore cover equivalents or alternatives within the scope of these claims.

Claims

1. A light source device for defect detection, characterized in that: The light source device comprises a first condensing device (10), a plurality of first light sources (20) and a reflecting device (30); wherein, The first light concentrating device (10) is used to converge light, and has a first light concentrating surface (11) extending along a first direction, the first light concentrating surface (11) having a plurality of first focal points and a plurality of second focal points, wherein the plurality of first focal points form a first straight line parallel to the first direction, and the plurality of second focal points form a second straight line parallel to the first direction; The plurality of first light sources (20) are used to emit light and are arranged on the first straight line; The reflecting device (30) is used for reflecting light, and is arranged on one side of the first concentrating device (10) in the first direction; The light emitted by the first light source (20) can pass through the light-collecting surface (11) and / or the reflective device (30) and illuminate the second straight line; Wherein, the light source device further comprises a second light concentrating device (40) and a plurality of second light sources (50); wherein, The second focusing device (40) has a plurality of third focal points and a fourth focal point, wherein the third focal points form a third straight line, and the fourth focal points form a fourth straight line, wherein the third straight line and the first straight line are symmetrical with respect to the second straight line, and the fourth straight line and the second straight line coincide with each other; The plurality of second light sources (50) are arranged on the third straight line; A gap is provided between the first light concentrating device (10) and the second light concentrating device (40) so that light can pass through the gap.

2. The light source device according to claim 1, wherein The first light-collecting surface (11) comprises an ellipsoidal surface.

3. The light source device according to claim 1, wherein The reflecting device (30) comprises a first reflecting device and a second reflecting device respectively arranged on both sides of the first focusing device (10) in the first direction, wherein the projection of the first focusing device (10) and / or the first light source (20) in the first direction is located on the first reflecting device.

4. The light source device according to any one of claims 1 to 3, characterized in that: The light source device further comprises a third light concentrating device (60), a plurality of third light sources (70) and a light splitting device (80); wherein, The third focusing device (60) has a plurality of fifth focal points, wherein the plurality of fifth focal points form a fifth straight line parallel to the first straight line; The plurality of third light sources (70) are arranged on the fifth straight line; The light splitting device (80) is used to reflect the light emitted by the third light source (70); The light emitted by the third light source (70) passes through the third light concentrating device (60) and the light splitting device (80) and is then irradiated onto the second straight line.

5. The light source device according to claim 4, wherein: The light source device further comprises a cylindrical mirror (801), which is arranged on a side of the light splitting device (80) facing the third light concentrating device (60) and is used to compensate for aberrations generated when light emitted by the third light source (70) passes through the light splitting device (80).

6. A system for defect detection, characterized in that: include: The light source device according to any one of claims 1 to 5; A component to be detected (910), wherein the component to be detected (910) at least partially coincides with the second straight line.

7. The system according to claim 6, characterized in that The system also includes an imaging lens assembly (920) and a camera assembly (930); The imaging lens assembly (920) is used to receive light reflected from the component to be detected (910) and transmit the light to the camera assembly (930); The camera component (930) is used to photograph the component to be inspected (910).

8. A method for defect detection, characterized in that: Applied to the system according to any one of claims 6-7, the method comprises: Turning on the light source device so that the light emitted by the light source device is irradiated on the component to be inspected; Collecting image information of the component to be inspected based on a camera component; Defect information of the inspection component is determined based on the image information.

Images