Clamping mechanism and semiconductor equipment

Abstract

The invention relates to a clamping mechanism and a semiconductor device. A first movable frame is slidably arranged on a fixed seat and can slide in the height direction of the fixed seat to ascend and descend, and the first movable frame is arranged below a jig and connected with a first clamping piece; the second movable frame comprises a base and two stand columns arranged on the base, the first movable frame is arranged between the two stand columns and slidably connected with the two stand columns in the height direction, the two ends of the fixing plate are detachably connected to the tops of the two stand columns, and the lead frame is located between the first clamping piece and the second clamping piece; one end of the first elastic piece is connected with the first movable frame, the other end of the first elastic piece is connected with a base of the second movable frame, and the first movable frame and the second movable frame tend to be close to each other under the tension effect of the first elastic piece. The cam is connected between the base of the first movable frame and the base of the second movable frame in an abutting mode, can be driven by the driving shaft to rotate and drives the first movable frame and the second movable frame to be close to each other or away from each other in the height direction.

Description

Technical Field

[0001] The present invention relates to the technical field of semiconductor manufacturing, and in particular to a clamping mechanism and semiconductor equipment. Background Art

[0002] In the field of semiconductor packaging and power device manufacturing, the lead frame is the key carrier connecting the chip to the external circuit. Its processing accuracy directly affects the electrical performance and reliability of the device. In particular, during the bonding process, the lead frame needs to withstand the mechanical impact of high-power bonders, which places extremely high demands on the positioning accuracy, clamping force control, and movement coordination of the clamping device. However, the clamping device of traditional lead frames has low adaptability and a complex structure, which is not only bulky but also inefficient.

[0003] BACKGROUND OF THE INVENTION The above information disclosed is only for understanding the background of the concept of the application and may contain information that does not constitute the prior art. Summary of the Invention

[0004] Based on this, it is necessary to provide a clamping mechanism and semiconductor equipment to address the above problems.

[0005] A clamping mechanism for clamping and positioning a lead frame, characterized by comprising:

[0006] Fixed seat;

[0007] A fixture, comprising a first clamping member, a second clamping member, and a fixing plate connected to the second clamping member;

[0008] a first movable frame, the first movable frame being slidably disposed on the fixed seat and capable of sliding along the height direction of the fixed seat to be raised or lowered, the first movable frame being disposed below the jig and connected to the first clamping member;

[0009] a second movable frame, the second movable frame comprising a base and two columns provided on the base, the first movable frame being provided between the two columns and being slidably connected to the two columns along the height direction, the two ends of the fixing plate being detachably connected to the tops of the two columns, and the lead frame being located between the first clamping member and the second clamping member;

[0010] a first elastic member, one end of the first elastic member being connected to the first movable frame, and the other end being connected to the base of the second movable frame, wherein the first movable frame and the second movable frame tend to move closer to each other under the pulling force of the first elastic member;

[0011] a drive shaft and a cam disposed on the drive shaft, wherein the cam abuts between the bases of the first movable frame and the second movable frame, and the cam is capable of rotating under the drive shaft and driving the first movable frame and the second movable frame to move closer to or away from each other along the height direction;

[0012] When the first movable frame and the second movable frame move away from each other, the first movable frame rises and the second movable frame falls, so as to drive the first clamping member and the second clamping member to move closer to each other and clamp the lead frame;

[0013] When the first movable frame and the second movable frame approach each other, the first movable frame descends and the second movable frame ascends, so as to drive the first clamping member and the second clamping member to move away from each other and release the lead frame.

[0014] The above-described clamping mechanism achieves at least the following beneficial effects: Using a composite transmission structure combining a cam drive and an elastic member, the drive shaft drives the cam to rotate, achieving precise opening and closing of the first and second clamping members. This results in high mechanical transmission efficiency and a stable and reliable motion trajectory. The preload design of the first elastic member ensures stability in the initial clamping state while also providing an automatic reset function upon release. Combined with the optimized cam profile design, this shortens the clamping / release response time, thereby improving work efficiency. The modular fixture design (with a removable fixed plate) allows for quick replacement of clamping members of varying specifications without disassembling the drive components. It is important to note that the clamping mechanism's bidirectional linkage design (first movable frame ascends + second movable frame descends) and elastic preload compensation significantly reduce the overall travel required for the clamping action, thereby achieving a compact and miniaturized mechanism. When the cam rotates, the first movable frame (driving the first clamping member) ascends while the second movable frame (driving the second clamping member) descends, their movements moving in opposite directions, resulting in a superimposed clamping travel. For example, if a single movable frame moves 5mm, the actual clamping distance can change by up to 10mm (5mm up + 5mm down). This allows for a larger clamping range within a smaller mechanical stroke, reducing the overall size of the mechanism. Throughout this process, a first elastic member (such as a tension spring) provides a constant preload, maintaining a natural tendency for the first and second movable frames to approach each other in the unclamped state. When the cam is actuated, clamping is achieved by overcoming only the slightest deformation of the elastic member, eliminating the need for a long-travel cam or long guide rails, further reducing the size of the mechanism.

[0015] In some embodiments, the cam comprises a first cam and a second cam fixedly mounted on the outer circumference of the drive shaft, with the flanges of the first cam and the second cam facing in opposite directions. The first and second cams act on the first and second movable frames, respectively. Because their flanges face in opposite directions, when the drive shaft rotates, the first and second movable frames move synchronously in opposite directions (one ascending, the other descending). This ensures symmetrical clamping and prevents lead frame displacement or deformation caused by uneven force on one side. The dual cams act on different movable frames, distributing the force applied by a single cam and reducing localized wear. Furthermore, the symmetrical motion ensures smoother operation, reduces vibration, and extends the service life of key components such as guide rails and elastic members. The dual cams are integrated on the same drive shaft, eliminating the need for an additional transmission mechanism and making the overall structure more compact. This also avoids motion interference issues associated with multi-axis drive and improves the stability of the mechanism. By adjusting the profiles of the dual cams, the speed and travel of the first and second movable frames can be precisely controlled, ensuring a smooth and impact-free clamping process, suitable for high-precision lead frame positioning requirements. The clamping stroke and clamping force can be changed by replacing different cams (such as adjusting the flange height or phase), so that the mechanism can flexibly adapt to lead frames of different sizes and improve versatility.

[0016] In some embodiments, the clamping mechanism further includes a first rotating wheel and a second rotating wheel, wherein the first rotating wheel is rotatably disposed below the first movable frame and abuts against the outer peripheral surface of the first cam, and the second rotating wheel is rotatably disposed on the base of the second movable frame and abuts against the outer peripheral surface of the second cam. The first rotating wheel and the second rotating wheel are in rolling contact with the first cam and the second cam respectively, converting traditional sliding friction into rolling friction, greatly reducing the wear between the cam and the movable frame, making the movement of the clamping mechanism more stable and smooth, and extending the service life. The friction coefficient of rolling contact is much lower than that of sliding friction, which reduces the torque required for the drive shaft and the motor load, thereby improving the dynamic response capability of the mechanism and making it suitable for high-speed, high-frequency clamping applications (such as fast loading and unloading in semiconductor packaging equipment). The rolling contact of the rotating wheel can evenly disperse the pressure applied by the cam, avoid local stress concentration, reduce vibration and noise during the operation of the mechanism, and improve overall stability, making it particularly suitable for high-precision processing environments. Because rolling friction has smaller resistance and is more stable, the motion trajectory of the movable frame is less affected by friction and can more accurately follow the cam profile, ensuring the repeatability of the clamping position and meeting precision assembly requirements, such as the extremely precise positioning and clamping of lead frames.

[0017] In some embodiments, the first cam and the second cam are integrally formed. This integral formation of the first and second cams eliminates alignment errors associated with separate cams during assembly, ensuring strict synchronization of the phases and profiles of the two cams. This allows for more coordinated movement of the first and second movable frames, improving the overall precision and stability of the clamping mechanism. The integrated cam avoids loosening or misalignment of the separate structure under high-speed operation or high loads, providing increased overall rigidity and the ability to withstand greater torque and impact loads, making it suitable for high-intensity, high-frequency clamping operations. It also reduces the number of parts and eliminates the assembly steps between the cam and the drive shaft (such as keyways and screw fixation), lowering processing and assembly costs while minimizing the risk of motion deviation or failure due to improper assembly.

[0018] In some embodiments, the clamping mechanism further includes a second elastic member, one end of which elastically abuts against the base below, and the other end of which elastically abuts against the fixed seat. Under the elastic force of the second elastic member, the second movable frame tends to rise toward the first movable frame. When the first and second movable frames approach each other, the elastic force of the second elastic member assists the second movable frame in ascending and returning to its original position. The second elastic member (such as a compression spring or elastic sheet) applies an elastic force between the base and the fixed seat, ensuring that the second movable frame always tends to return upward. When the cam drives the second movable frame downward (clamping action), the second elastic member is compressed and stores energy. When the cam releases pressure, the elastic potential energy is automatically released, assisting the second movable frame in ascending and returning to its original position, thereby reducing energy consumption of the drive motor. When the first and second movable frames separate (e.g., when the clamping action is completed), the elastic force of the second elastic member rapidly propels the second movable frame upward, reducing return time and improving continuous operation efficiency. During the return process, the second elastic member provides a flexible cushioning mechanism, preventing the second movable frame from rigidly colliding with the fixed seat, reducing vibration and noise, and preventing damage to precision components due to impact. The preload of the elastic element ensures that the second movable frame remains close to the first movable frame or maintains a preset gap when not in operation, preventing accidental displacement due to gravity or vibration and ensuring repeatable accuracy of the initial clamping position. The elastic force of the elastic element adaptively adjusts the clamping distance, ensuring clamping force while preventing overpressure damage to the lead frame.

[0019] In some embodiments, the number of second elastic members is set to multiple, and the multiple second elastic members are spaced apart and evenly distributed below the base. The even distribution of the multiple second elastic members below the base ensures symmetry in the points of elastic force application, preventing tilting or jamming of the second movable frame due to single-point force application, allowing it to maintain smooth linear motion during the upward reset process, thereby improving clamping accuracy. The multiple second elastic members share the reset load. Even if the elastic force of a single second elastic member decreases due to fatigue or failure, the remaining second elastic members can still maintain the overall function, improving the redundant reliability of the mechanism and making it suitable for high-frequency or high-load conditions.

[0020] In some embodiments, the first elastic members are provided in a plurality, spaced apart and evenly distributed around the periphery of the first movable frame. Multiple first elastic members (such as tension springs or elastic sheets) are evenly distributed around the periphery of the first movable frame. These evenly distributed first elastic members can offset eccentric torque caused by workpiece center of gravity offset or external vibration, preventing tilting of the first movable frame during clamping and ensuring clamping accuracy. The multiple first elastic members serve as backups. Even if a single first elastic member fails, the remaining first elastic members can still maintain basic clamping functionality, reducing the risk of sudden failure and making them suitable for industrial environments requiring high reliability.

[0021] In some embodiments, the clamping mechanism further includes a first guide rail and a first guide block slidably disposed on the first guide rail, either one of the first guide rail and the first guide block is disposed on the first movable frame, the other of the first guide rail and the first guide block is disposed on the fixed seat, and the length extension direction of the first guide rail extends along the height direction of the fixed seat. The first guide rail extends along the height direction of the fixed seat and cooperates with the sliding of the first guide block to limit the movement trajectory of the first movable frame so that it is strictly lifted and lowered in the vertical direction, avoiding horizontal deviation or tilting, and improving the clamping positioning accuracy. The sliding cooperation between the first guide rail and the first guide block can reduce the friction of the contact surface, ensuring that the first movable frame maintains low resistance and high response speed during frequent lifting and lowering, and is suitable for high-speed automated production lines. The rigid connection between the first guide rail and the fixed seat can share the lateral force generated during the clamping process (such as workpiece overload or mechanical vibration), prevent the first movable frame from shaking, and improve the clamping stability.

[0022] In some embodiments, the clamping mechanism further includes a second guide rail and a second guide block slidably disposed on the second guide rail, wherein one of the second guide rail and the second guide block is disposed on the first movable frame, and the other of the second guide rail and the second guide block is disposed on the column of the second movable frame, and the length of the second guide rail extends along the height direction of the fixed seat. The first guide rail and the second guide rail form a dual guide system, ensuring that both the first movable frame and the second movable frame move precisely in the vertical direction, avoiding deflection or jamming caused by a single guide structure, further improving movement accuracy, and thereby improving the positioning and clamping accuracy of the lead frame.

[0023] In some embodiments, the clamping mechanism also includes a driving device, which includes a servo motor, a bracket, a belt, a first transmission wheel, and a second transmission wheel. The bracket is arranged on the fixed seat, and the drive shaft is drivably passed through the fixed seat and fixed to the center of the first transmission wheel. The servo motor is arranged on the bracket and the output shaft of the servo motor is fixed to the center of the second transmission wheel and is used to drive the second transmission wheel to rotate. The first transmission wheel and the second transmission wheel are parallel and spaced apart, and the belt is wrapped around the outer circumference of the first transmission wheel and the outer circumference of the second transmission wheel.

[0024] In some embodiments, the radius of the first transmission wheel is greater than that of the second transmission wheel. This drive device utilizes a servo motor combined with a belt drive. Leveraging the servo motor's high-precision control capabilities and the belt drive's flexibility, it achieves precise and stable movement of the clamping mechanism. The servo motor adjusts the output shaft's speed and position in real time via a closed-loop control system, ensuring repeatable positioning accuracy during the clamping action. This design is suitable for applications requiring high position control. The belt is wound around the outer circumference of the first and second parallel transmission wheels, creating a reliable power transmission path while effectively absorbing and cushioning vibration and shock during movement, reducing operating noise and mechanical wear. The bracket is fixed to the fixed base, enhancing overall rigidity and ensuring long-term stability of the transmission system. This solution ensures precise movement while balancing ease of maintenance and cost-effectiveness. Belt wear allows for quick replacement without complex commissioning. Furthermore, the parallel arrangement of the transmission wheels and the compact bracket layout optimize space utilization, making it suitable for installation in space-constrained automation equipment. The overall design balances precision, reliability, maintenance costs, and space requirements, meeting the requirements for high-precision clamping under medium-load conditions.

[0025] The present application also provides a semiconductor device, which includes a bonding mechanism, a moving mechanism and a clamping mechanism as described in any of the above embodiments. When the lead frame is clamped, the bonding mechanism is used to bond the chip to the lead frame. When the lead frame is not clamped, the moving mechanism is used to drive the lead frame to move between the first clamping member and the second clamping member.

[0026] Since the semiconductor device includes the clamping mechanism described in any of the above embodiments, the semiconductor device also includes at least the following beneficial effects: when the lead frame is clamped, the bonding mechanism is used to bond the chip to the lead frame; when the lead frame is not clamped, the moving mechanism is used to drive the lead frame to move between the first clamping member and the second clamping member. The clamping mechanism adopts a composite transmission structure in which a cam drive is linked to an elastic member. The precise opening and closing of the first clamping member and the second clamping member can be achieved by rotating the cam driven by the drive shaft. The mechanical transmission efficiency is high and the motion trajectory is stable and reliable. The preload design of the first elastic member not only ensures the stability of the initial clamping state, but also provides an automatic reset function when released. Combined with the optimized design of the cam profile, the response time of the clamping / release action is shortened, thereby improving work efficiency. The modular fixture design (detachable fixed plate) supports the rapid replacement of clamps of different specifications, and the replacement process does not require the removal of the drive components. It's important to emphasize that this clamping mechanism utilizes a bidirectional linkage design (the first movable frame ascends, the second movable frame descends) and elastic preload compensation to significantly reduce the overall travel required for clamping, thereby achieving a compact and compact design. When the cam rotates, the first movable frame (driving the first clamping member) ascends while the second movable frame (driving the second clamping member) descends, moving in opposite directions. This allows for a superposition of the clamping travels. For example, if a single movable frame moves 5mm, the actual clamping distance can change by up to 10mm (5mm ascending + 5mm descending). This allows for a wide clamping range within a relatively short mechanical travel, reducing the overall size of the mechanism. Throughout this process, a first elastic member (e.g., a tension spring) provides a constant preload, maintaining a natural approach between the first and second movable frames in the unclamped state. When the cam is actuated, clamping is achieved by overcoming only the slightest deformation of the elastic member. This eliminates the need for a long-travel cam or long guide rails, further miniaturizing the mechanism. BRIEF DESCRIPTION OF THE DRAWINGS

[0027] In order to more clearly illustrate the embodiments of the present application or the technical solutions in the conventional technology, the following briefly introduces the drawings required for use in the embodiments or the conventional technology descriptions. Obviously, the drawings described below are only some embodiments of the present application. For ordinary technicians in this field, other drawings can be obtained based on these drawings without creative work.

[0028] Figure 1 A schematic structural diagram of a clamping mechanism and a lead frame provided in one embodiment of the present invention.

[0029] Figure 2 A schematic structural diagram of a fixture provided in one embodiment of the present invention.

[0030] Figure 3 A schematic diagram of a partial structure of a clamping mechanism provided in one embodiment of the present invention.

[0031] Figure 4 A three-dimensional cross-sectional view of a clamping mechanism provided in one embodiment of the present invention.

[0032] Figure 5 A three-dimensional cross-sectional view of a clamping mechanism provided in one embodiment of the present invention.

[0033] Figure 6 An exploded schematic diagram of a clamping mechanism provided by one embodiment of the present invention.

[0034] Reference numerals:

[0035] 10. Clamping mechanism; 20. Lead frame; 100. Fixed seat; 200. Jig; 210. First clamping member; 220. Second clamping member; 230. Fixed plate; 310. First movable frame; 320. Second movable frame; 321. Base; 322. Column; 410. First elastic member; 420. Second elastic member; 500. Drive shaft; 600. Cam; 610. First cam; 620. Second cam; 710. First rotating wheel; 720. Second rotating wheel; 811. First guide rail; 812. First guide block; 821. Second guide rail; 822. Second guide block; 900. Drive device; 910. Servo motor; 920. Bracket; 930. Belt; 941. First transmission wheel; 942. Second transmission wheel; 950. Bearing. DETAILED DESCRIPTION

[0036] To make the above-mentioned objects, features, and advantages of the present invention more readily apparent, specific embodiments of the present invention are described in detail below with reference to the accompanying drawings. The following description sets forth numerous specific details to facilitate a full understanding of the present invention. However, the present invention can be implemented in many other ways than those described herein, and those skilled in the art may make similar modifications without departing from the scope of the present invention. Therefore, the present invention is not limited to the specific embodiments disclosed below.

[0037] See also Figures 1 to 6In some embodiments, the present application provides a clamping mechanism 10 for clamping and positioning a lead frame 20, wherein the clamping mechanism 10 includes a fixing seat 100, a fixture 200, a first movable frame 310, a second movable frame 320, a first elastic member 410, a driving shaft 500, and a cam 600 provided on the driving shaft 500. The jig 200 includes a first clamping member 210, a second clamping member 220 and a fixed plate 230 connected to the second clamping member 220; the first movable frame 310 is slidably arranged on the fixed seat 100 and can slide along the height direction of the fixed seat 100 to rise and fall, the first movable frame 310 is arranged below the jig 200 and connected to the first clamping member 210; the second movable frame 320 includes a base 321 and two columns 322 arranged on the base 321, the first movable frame 310 is arranged between the two columns 322 and is slidably connected to the two columns 322 along the height direction, and the two ends of the fixed plate 230 are detachably connected to the two columns 322 , the lead frame 20 is located between the first clamping member 210 and the second clamping member 220; one end of the first elastic member 410 is connected to the first movable frame 310, and the other end is connected to the base 321 of the second movable frame 320. The first movable frame 310 and the second movable frame 320 tend to approach each other under the pulling force of the first elastic member 410; the cam 600 abuts between the first movable frame 310 and the base 321 of the second movable frame 320. The cam 600 can rotate under the drive of the drive shaft 500 and drive the first movable frame 310 and the second movable frame 320 to approach or move away from each other along the height direction. When the first movable frame 310 and the second movable frame 320 move away from each other, the first movable frame 310 rises and the second movable frame 320 descends, so as to drive the first clamping member 210 and the second clamping member 220 to approach each other and clamp the lead frame 20; when the first movable frame 310 and the second movable frame 320 move toward each other, the first movable frame 310 descends and the second movable frame 320 rises, so as to drive the first clamping member 210 and the second clamping member 220 to move away from each other and release the lead frame 20.

[0038] The clamping mechanism 10 described above can achieve at least the following beneficial effects: Using a composite transmission structure driven by a cam 600 and linked to an elastic member, the first clamping member 210 and the second clamping member 220 can be precisely opened and closed by rotating the cam 600 driven by the drive shaft 500. This results in high mechanical transmission efficiency and a stable and reliable motion trajectory. The preload design of the first elastic member 410 ensures the stability of the initial clamping state while providing an automatic reset function upon release. Combined with the optimized profile design of the cam 600, this shortens the response time of the clamping / release action, thereby improving work efficiency. The modular design of the fixture 200 (with a detachably connected fixing plate 230) supports the rapid replacement of clamping members of different specifications without disassembling the drive components. It is important to emphasize that the clamping mechanism 10, through its bidirectional linkage design (first movable frame 310 rises + second movable frame 320 descends) and elastic preload compensation, significantly reduces the overall motion required for the clamping action, thereby achieving a compact and miniaturized mechanism. When the cam 600 rotates, the first movable frame 310 (driving the first clamping member 210) rises, while the second movable frame 320 (driving the second clamping member 220) descends. These two movements occur in opposite directions, resulting in an overlapping clamping stroke. For example, if a single movable frame moves 5mm, the actual clamping distance can change by up to 10mm (5mm rise + 5mm descent). This allows for a larger clamping range within a smaller mechanical stroke, reducing the overall size of the mechanism. Throughout this process, the first elastic member 410 (e.g., a tension spring) provides a constant preload, maintaining a natural tendency for the first and second movable frames 310 and 320 to approach each other in the unclamped state. When the cam 600 is actuated, the clamping action is achieved by overcoming only slight deformation of the elastic member. This eliminates the need for a large-stroke cam 600 or long guide rails, further reducing the size of the mechanism.

[0039] like Figure 4 and Figure 5As shown, in some embodiments, the cam 600 includes a first cam 610 and a second cam 620 fixedly mounted on the outer circumference of the drive shaft 500. The flanges of the first cam 610 and the second cam 620 face opposite directions. The first cam 610 and the second cam 620 act on the first movable frame 310 and the second movable frame 320, respectively. Because their flanges face opposite directions, when the drive shaft 500 rotates, the first movable frame 310 and the second movable frame 320 move synchronously in opposite directions (one ascending, the other descending). This ensures symmetry in the clamping action and prevents deviation or deformation of the lead frame 20 caused by uneven force on one side. The dual cams 600 act on different movable frames, sharing the force of a single cam 600 and reducing local wear. Furthermore, due to the symmetry of the movement, the mechanism operates more smoothly, reduces vibration, and extends the service life of key components (such as guide rails and elastic members). The dual cams 600 are integrated into the same drive shaft 500, eliminating the need for an additional transmission mechanism. This makes the overall structure more compact, avoids motion interference issues associated with multi-axis drive, and improves the stability of the mechanism. By adjusting the profile of the dual cams 600, the speed and travel of the first and second movable frames 310, 320 can be precisely controlled, ensuring a smooth and impact-free clamping process, ideal for high-precision lead frame 20 positioning. The clamping travel and clamping force can be varied by replacing different cams 600 (for example, by adjusting the flange height or phase), making the mechanism flexible and adaptable to lead frames 20 of varying sizes, enhancing versatility.

[0040] like Figure 4 and Figure 5As shown, in some embodiments, the clamping mechanism 10 further includes a first rotating wheel 710 and a second rotating wheel 720. The first rotating wheel 710 is rotatably disposed below the first movable frame 310 and abuts the outer circumference of the first cam 610. The second rotating wheel 720 is rotatably disposed on the base 321 of the second movable frame 320 and abuts the outer circumference of the second cam 620. The first rotating wheel 710 and the second rotating wheel 720 are in rolling contact with the first cam 610 and the second cam 620, respectively, converting traditional sliding friction into rolling friction. This significantly reduces wear between the cam 600 and the movable frame, making the movement of the clamping mechanism 10 smoother and more stable, and extending its service life. The friction coefficient of rolling contact is much lower than that of sliding friction, reducing the torque required by the drive shaft 500 and the motor load, thereby improving the dynamic response capability of the mechanism and making it suitable for high-speed, high-frequency clamping applications (such as rapid loading and unloading in semiconductor packaging equipment). The rolling contact of the rotating wheel evenly distributes the pressure applied by cam 600, avoiding localized stress concentration, reducing vibration and noise during operation, and improving overall stability, making it particularly suitable for high-precision machining environments. Because rolling friction provides lower and more stable resistance, the movable frame's trajectory is less affected by friction, allowing it to more accurately follow the contour of cam 600, ensuring repeatable clamping accuracy and meeting the requirements of precision assembly, such as the extremely precise positioning and clamping of lead frame 20.

[0041] like Figure 4 and Figure 5 As shown, in some embodiments, the first cam 610 and the second cam 620 are integrally formed. The integral formation of the first cam 610 and the second cam 620 eliminates the alignment error of the split cam 600 during assembly, ensures that the phases and profiles of the two cams 600 are strictly synchronized, and makes the movement of the first movable frame 310 and the second movable frame 320 more coordinated, thereby improving the overall accuracy and stability of the clamping mechanism 10. The integrated cam 600 avoids the problem of loosening or misalignment of the split structure under high-speed operation or high load. The overall rigidity is higher and can withstand greater torque and impact loads. It is suitable for high-intensity and high-frequency clamping operations. It also reduces the number of parts and eliminates the assembly steps (such as keyways, screw fixation, etc.) between the cam 600 and the drive shaft 500, reducing processing and assembly costs, while reducing the risk of motion deviation or failure due to improper assembly.

[0042] like Figure 4 and Figure 5As shown, in some embodiments, the clamping mechanism 10 further includes a second elastic member 420. One end of the second elastic member 420 elastically abuts against the base 321, and the other end of the second elastic member 420 elastically abuts against the fixed base 100. Under the elastic force of the second elastic member 420, the second movable frame 320 tends to rise toward the first movable frame 310. When the first movable frame 310 and the second movable frame 320 approach each other, the elastic force of the second elastic member 420 assists the second movable frame 320 in ascending and returning to its original position. The second elastic member 420 (such as a compression spring or elastic sheet) exerts an elastic force between the base 321 and the fixed base 100, ensuring that the second movable frame 320 always tends to return upward. When the cam 600 drives the second movable frame 320 downward (clamping action), the second elastic member 420 is compressed and stores energy. When the cam 600 releases pressure, the elastic potential energy is automatically released, assisting the second movable frame 320 in ascending and returning to its original position, thereby reducing energy consumption of the drive motor. When the first movable frame 310 and the second movable frame 320 separate (e.g., when the clamping action is complete), the elastic force of the second elastic member 420 can quickly push the second movable frame 320 upward, reducing reset time and improving continuous operation efficiency. The second elastic member 420 provides a flexible buffer during the reset process, preventing the second movable frame 320 from rigidly colliding with the fixed base 100, reducing vibration and noise, and preventing damage to precision components due to impact. The preload force of the elastic member ensures that the second movable frame 320 is tightly attached to the first movable frame 310 or maintains a preset gap when not in operation, avoiding accidental displacement due to gravity or vibration and ensuring the repeatability of the initial clamping position. The elastic force of the elastic member can adaptively adjust the clamping spacing, ensuring the clamping force while avoiding overpressure damage to the lead frame 20.

[0043] In some embodiments, the number of second elastic members 420 is set to multiple, and the multiple second elastic members 420 are spaced apart and evenly distributed below the base 321. The uniform distribution of the multiple second elastic members 420 below the base 321 ensures symmetry in the points of elastic force application, preventing tilting or jamming of the second movable frame 320 due to single-point force application, allowing it to maintain smooth linear motion during the upward reset process, thereby improving clamping accuracy. The multiple second elastic members 420 share the reset load. Even if the elastic force of a single second elastic member 420 decreases due to fatigue or failure, the remaining second elastic members 420 can still maintain their overall function, improving the redundant reliability of the mechanism and making it suitable for high-frequency or high-load conditions.

[0044] In some embodiments, the number of first elastic members 410 is set to multiple, and the multiple first elastic members 410 are spaced apart and evenly distributed around the periphery of the first movable frame 310. Multiple first elastic members 410 (such as tension springs or elastic sheets) are evenly distributed around the periphery of the first movable frame 310. These evenly distributed first elastic members 410 can offset eccentric torque caused by workpiece center of gravity offset or external vibration, preventing tilting of the first movable frame 310 during clamping and ensuring clamping accuracy. The multiple first elastic members 410 serve as backup for each other. Even if a single first elastic member 410 fails, the remaining first elastic members 410 can still maintain basic clamping functionality, reducing the risk of sudden failure and making them suitable for industrial environments with high reliability requirements.

[0045] like Figure 4 and Figure 5 As shown, in some embodiments, the clamping mechanism 10 further includes a first guide rail 811 and a first guide block 812 slidably disposed on the first guide rail 811, either the first guide rail 811 or the first guide block 812 being disposed on the first movable frame 310, and the other of the first guide rail 811 and the first guide block 812 being disposed on the fixed seat 100, with the length of the first guide rail 811 extending in the height direction of the fixed seat 100. The first guide rail 811 extends in the height direction of the fixed seat 100, and cooperates with the sliding of the first guide block 812 to limit the movement trajectory of the first movable frame 310, so that it is strictly lifted and lowered in the vertical direction, avoiding horizontal deviation or tilting, and improving the clamping positioning accuracy. The sliding cooperation between the first guide rail 811 and the first guide block 812 can reduce contact surface friction, ensuring that the first movable frame 310 maintains low resistance and high response speed during frequent lifting and lowering, and is suitable for high-speed automated production lines. The rigid connection between the first guide rail 811 and the fixing base 100 can share the lateral force generated during the clamping process (such as workpiece overload or mechanical vibration), prevent the first movable frame 310 from shaking, and improve the clamping stability.

[0046] like Figure 4 and Figure 5As shown, in some embodiments, the clamping mechanism 10 further includes a second guide rail 821 and a second guide block 822 slidably disposed on the second guide rail 821. Either the second guide rail 821 or the second guide block 822 is disposed on the first movable frame 310, and the other of the second guide rail 821 or the second guide block 822 is disposed on the column 322 on the second movable frame 320. The length of the second guide rail 821 extends along the height direction of the fixed base 100. The first guide rail 811 and the second guide rail 821 form a dual-guide system, ensuring that both the first movable frame 310 and the second movable frame 320 move precisely in the vertical direction, avoiding deflection or jamming caused by a single guide structure, further improving movement accuracy, and thereby improving the positioning and clamping accuracy of the lead frame 20.

[0047] like Figure 1 、 Figure 3 and Figure 6 As shown, in some embodiments, the clamping mechanism 10 further includes a driving device 900, which includes a servo motor 910, a bracket 920, a belt 930, a first transmission wheel 941, a second transmission wheel 942 and a bearing 950. The outer ring of the bearing 950 is provided on the fixed seat 100, and the number of the bearings 950 is set to multiple. Both ends of the drive shaft 500 are drivably passed through the inner ring of the bearing 950 and fixed. The bracket 920 is provided on the fixed seat 100, and the drive shaft 500 is drivably passed through the fixed seat 100 and fixed to the center of the first transmission wheel. The servo motor 910 is provided on the bracket 920 and the output shaft of the servo motor 910 is fixed to the center of the second transmission wheel 942 and is used to drive the second transmission wheel 942 to rotate. The first transmission wheel 941 and the second transmission wheel 942 are parallel and spaced apart. The belt 930 is wound around the outer circumference of the first transmission wheel 941 and the outer circumference of the second transmission wheel 942.

[0048] In some embodiments, the radius of the first transmission wheel 941 is greater than the radius of the second transmission wheel 942. The drive device 900 utilizes a servo motor 910 coupled with a belt 930 drive system. The high-precision control capabilities of the servo motor 910 and the flexibility of the belt 930 drive system enable precise and stable movement of the clamping mechanism 10. The servo motor 910 regulates the speed and position of the output shaft in real time via a closed-loop control system, ensuring repeatable positioning accuracy during the clamping action. This approach is suitable for applications requiring high position control. The belt 930 is wound around the outer circumference of the first and second transmission wheels 941, 942, which are arranged in parallel and spaced relation. This creates a reliable power transmission path while effectively absorbing and cushioning vibration and shock during movement, reducing operating noise and mechanical wear. The structural design of the bracket 920 fixed to the fixed base 100 enhances overall rigidity, ensuring the stability of the transmission system during long-term operation. This solution balances maintenance convenience and cost-effectiveness while ensuring motion accuracy. The belt 930 can be quickly replaced when worn, eliminating the need for complex debugging. Furthermore, the parallel arrangement of the drive wheels and the compact 920-degree bracket layout optimize space utilization, making it suitable for installation in space-constrained automation equipment. The overall design balances accuracy, reliability, maintenance costs, and space requirements, meeting the requirements of high-precision clamping under medium-load conditions.

[0049] In addition, the present application also provides a semiconductor device, which includes a bonding mechanism, a moving mechanism and a clamping mechanism 10 as described in any of the above embodiments. When the lead frame 20 is clamped, the bonding mechanism is used to bond the chip to the lead frame 20. When the lead frame 20 is not clamped, the moving mechanism is used to drive the lead frame 20 to move between the first clamping member 210 and the second clamping member 220.

[0050] Because the semiconductor device includes the clamping mechanism 10 described in any of the above embodiments, it also has at least the following beneficial effects: when the lead frame 20 is clamped, the bonding mechanism is used to bond the chip to the lead frame 20; when the lead frame 20 is not clamped, the moving mechanism is used to drive the lead frame 20 to move between the first clamping member 210 and the second clamping member 220. The clamping mechanism 10 adopts a composite transmission structure driven by a cam 600 and linked to an elastic member. The cam 600 is driven by the drive shaft 500 to rotate to achieve precise opening and closing of the first clamping member 210 and the second clamping member 220. The mechanical transmission efficiency is high and the motion trajectory is stable and reliable. The preload design of the first elastic member 410 not only ensures the stability of the initial clamping state, but also provides an automatic reset function when released. Combined with the optimized design of the cam 600 profile, the response time of the clamping / release action is shortened, thereby improving work efficiency. The modular design of the fixture 200 (with a removable fixed plate 230) allows for quick replacement of clamps of varying sizes without disassembling the drive components. It's important to note that the clamping mechanism 10 utilizes a bidirectional linkage design (the first movable frame 310 ascends, the second movable frame 320 descends) and elastic preload compensation to significantly reduce the overall travel required for the clamping action, thereby achieving a compact and compact design. When the cam 600 rotates, the first movable frame 310 (driving the first clamp 210) ascends while the second movable frame 320 (driving the second clamp 220) descends. These two movements occur in opposite directions, resulting in an additive clamping travel. For example, if a single movable frame moves 5mm, the actual clamping distance can change by up to 10mm (5mm ascending + 5mm descending). This allows for a larger clamping range within a relatively small mechanical travel, reducing the overall size of the mechanism. Throughout this process, the first elastic member 410 (e.g., a tension spring) provides a constant preload, ensuring that the first and second movable frames 310 and 320 maintain a natural tendency to approach each other in the unclamped state. When the cam 600 is driven, the clamping action can be completed by only overcoming the slight deformation of the elastic member, so there is no need for a long-stroke cam 600 or a long guide rail, further reducing the size of the mechanism.

[0051] The technical features of the above-mentioned embodiments can be combined arbitrarily. In order to make the description concise, not all possible combinations of the technical features in the above-mentioned embodiments are described. However, as long as there is no contradiction in the combination of these technical features, they should be considered to be within the scope of this specification.

[0052] The above-described embodiments merely represent several implementation methods of the present application. While the descriptions are relatively specific and detailed, they should not be construed as limiting the scope of the patent application. It should be noted that a person of ordinary skill in the art may make various modifications and improvements without departing from the spirit of the present application, and these modifications and improvements fall within the scope of protection of the present application. Therefore, the scope of protection of the present patent application shall be determined by the appended claims.

[0053] In the description of this application, it should be understood that if the terms "center", "longitudinal", "lateral", "length", "width", "thickness", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inside", "outside", "clockwise", "counterclockwise", "axial", "radial", "circumferential", etc. appear, the orientation or position relationship indicated by these terms is based on the orientation or position relationship shown in the accompanying drawings, which is only for the convenience of describing this application and simplifying the description, and does not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation on this application.

[0054] In addition, if the terms "first" or "second" appear, these terms are used for descriptive purposes only and should not be understood to indicate or imply relative importance or implicitly specify the number of technical features indicated. Therefore, a feature specified as "first" or "second" may explicitly or implicitly include at least one of such features. In the description of this application, if the term "plurality" appears, "plurality" means at least two, for example, two, three, etc., unless otherwise specifically defined.

[0055] In this application, unless otherwise specified or limited, the terms "mounted," "connected," "connected," "fixed," etc., should be interpreted broadly. For example, these terms may refer to fixed connections, removable connections, or integration; mechanical connections or electrical connections; direct connections or indirect connections through an intermediary; and internal communication between two components or interaction between two components, unless otherwise specified. Those skilled in the art will understand the specific meanings of these terms in this application based on the specific circumstances.

[0056] In this application, unless otherwise expressly specified or limited, if a first feature is described as being "above" or "below" a second feature, or similar descriptions, this may mean that the first and second features are in direct contact, or that the first and second features are in indirect contact through an intermediate medium. Furthermore, when a first feature is described as being "above," "above," or "above" a second feature, it may mean that the first feature is directly above or diagonally above the second feature, or simply means that the first feature is at a higher level than the second feature. When a first feature is described as being "below," "below," or "below" a second feature, it may mean that the first feature is directly below or diagonally below the second feature, or simply means that the first feature is at a lower level than the second feature.

[0057] It should be noted that if an element is referred to as being "fixed to" or "disposed on" another element, it may be directly on the other element or there may be an intermediate element. If an element is considered to be "connected to" another element, it may be directly connected to the other element or there may be an intermediate element. If any, the terms "vertical", "horizontal", "upper", "lower", "left", "right" and similar expressions used in this application are for illustrative purposes only and do not represent the only embodiment.

[0058] In the description of this specification, the description with reference to the terms "one embodiment", "other implementation methods", etc. means that the specific features, structures, materials or features described in conjunction with the embodiment or example are included in at least one embodiment or example of the present application. In this specification, the schematic descriptions of the above terms do not necessarily refer to the same embodiment or example. Unless otherwise defined, all technical and scientific terms used herein have the same meaning as commonly understood by those skilled in the art to which this application belongs. The terms used herein in the specification of this application are only for the purpose of describing specific embodiments and are not intended to limit this application.

Claims

1. A clamping mechanism for clamping and positioning a lead frame, characterized in that: include: Fixed seat; A fixture, comprising a first clamping member, a second clamping member, and a fixing plate connected to the second clamping member; a first movable frame, the first movable frame being slidably disposed on the fixed seat and capable of sliding along the height direction of the fixed seat to be raised or lowered, the first movable frame being disposed below the jig and connected to the first clamping member; a second movable frame, the second movable frame comprising a base and two columns provided on the base, the first movable frame being provided between the two columns and being slidably connected to the two columns along the height direction, the two ends of the fixing plate being detachably connected to the tops of the two columns, and the lead frame being located between the first clamping member and the second clamping member; a first elastic member, one end of the first elastic member being connected to the first movable frame, and the other end being connected to the base of the second movable frame, wherein the first movable frame and the second movable frame tend to move closer to each other under the pulling force of the first elastic member; a drive shaft and a cam disposed on the drive shaft, wherein the cam abuts between the bases of the first movable frame and the second movable frame, and the cam is capable of rotating under the drive shaft and driving the first movable frame and the second movable frame to move closer to or away from each other along the height direction; When the first movable frame and the second movable frame move away from each other, the first movable frame rises and the second movable frame falls, so as to drive the first clamping member and the second clamping member to move closer to each other and clamp the lead frame; When the first movable frame and the second movable frame approach each other, the first movable frame descends and the second movable frame ascends, so as to drive the first clamping member and the second clamping member to move away from each other and release the lead frame.

2. The clamping mechanism according to claim 1, characterized in that: The cam includes a first cam and a second cam fixedly sleeved on the outer peripheral surface of the driving shaft, and the flange of the first cam and the flange of the second cam face opposite directions.

3. The clamping mechanism according to claim 2, characterized in that: The clamping mechanism further includes a first rotating wheel and a second rotating wheel, wherein the first rotating wheel is rotatably disposed below the first movable frame and abuts against the outer peripheral surface of the first cam, and the second rotating wheel is rotatably disposed on the base of the second movable frame and abuts against the outer peripheral surface of the second cam; And / or, the first cam and the second cam are integrally formed.

4. The clamping mechanism according to any one of claims 1 to 3, characterized in that: The clamping mechanism also includes a second elastic member, one end of the second elastic member is elastically pressed against the bottom of the base, and the other end of the second elastic member is elastically pressed against the fixed seat. The second movable frame can have a tendency to rise and approach the first movable frame under the elastic force of the second elastic member. When the first movable frame and the second movable frame approach each other, the elastic force of the second elastic member can assist the second movable frame to rise and reset.

5. The clamping mechanism according to claim 4, characterized in that: The number of the second elastic members is set to be multiple, and the multiple second elastic members are spaced apart from each other and evenly distributed below the base.

6. The clamping mechanism according to claim 1, wherein: The number of the first elastic members is set to be multiple, and the multiple first elastic members are spaced apart from each other and evenly distributed on the periphery of the first movable frame.

7. The clamping mechanism according to claim 1, wherein: The clamping mechanism further includes a first guide rail and a first guide block slidably disposed on the first guide rail, wherein one of the first guide rail and the first guide block is disposed on the first movable frame, and the other of the first guide rail and the first guide block is disposed on the fixed seat, and a lengthwise extension direction of the first guide rail is disposed along a height direction of the fixed seat; And / or, the clamping mechanism also includes a second guide rail and a second guide block slidably arranged on the second guide rail, either the second guide rail and the second guide block is arranged on the first movable frame, the other of the second guide rail and the second guide block is arranged on the column on the second movable frame, and the length extension direction of the second guide rail is extended along the height direction of the fixed seat.

8. The clamping mechanism according to claim 1, wherein: The clamping mechanism also includes a driving device, which includes a servo motor, a bracket, a belt, a first transmission wheel, and a second transmission wheel. The bracket is arranged on the fixed seat, and the drive shaft is drivably passed through the fixed seat and fixed to the center of the first transmission wheel. The servo motor is arranged on the bracket and the output shaft of the servo motor is fixed to the center of the second transmission wheel and is used to drive the second transmission wheel to rotate. The first transmission wheel and the second transmission wheel are parallel and spaced apart. The belt is wound around the outer circumference of the first transmission wheel and the outer circumference of the second transmission wheel.

9. The clamping mechanism according to claim 8, characterized in that: The radius of the first transmission wheel is greater than the radius of the second transmission wheel.

10. A semiconductor device, characterized in that: The lead frame comprises a bonding mechanism, a moving mechanism, and a clamping mechanism as described in any one of claims 1 to 9, wherein when the lead frame is clamped, the bonding mechanism is used to bond the chip to the lead frame, and when the lead frame is not clamped, the moving mechanism is used to drive the lead frame to move between the first clamping member and the second clamping member.

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