Five-axis driven piezoelectric deflection table

Abstract

The invention relates to the technical field of precision positioning tables, and discloses a five-axis driven piezoelectric deflection table which comprises a table body, a fixed block, a movable table and a piezoelectric screw assembly. And the fixed block is movably arranged on the table body. And the movable table is arranged on the fixed block. The piezoelectric screw assembly comprises a first piezoelectric screw, a second piezoelectric screw, a third piezoelectric screw, a fourth piezoelectric screw and a fifth piezoelectric screw. The first piezoelectric screw pushes the fixing block to linearly move along the X axis. The second piezoelectric screw and the third piezoelectric screw push the fixing block to move linearly along the Y axis or deflect along the Z axis. The fourth piezoelectric screw and the fifth piezoelectric screw push the fixing block to move linearly along the Z axis or deflect along the Y axis. The linear motion of the X axis, the Y axis and the Z axis and the deflection of theta x and theta y are achieved. The five axes are subjected to multi-degree-of-freedom cooperative control, high-precision and high-resolution nanoscale positioning is realized, and the system has the characteristics of quick response and real-time adjustment, and meets the requirements of precision machining and optical alignment.

Description

Technical Field

[0001] The present invention belongs to the technical field of precision positioning platforms, and in particular relates to a five-axis driven piezoelectric deflection platform. Background Art

[0002] With the continuous advancement of science and technology, research in fields such as ultra-precision machining and precision operations continues to deepen, leading to a demand for further research in precision motion. In the field of micro- and nano-precision machining, piezoelectric ceramic actuators are increasingly being used. These devices can be applied to high-performance nanopositioning systems in semiconductor probe stations and microscope systems, as well as nano-positioning stages driven by piezoelectric ceramic motors. Existing precision positioning stages have a relatively limited adjustment direction. If multiple degrees of freedom (linear motion and angular deflection) are required, they often have complex structures and large sizes. This makes integration with other positioning systems difficult, and they also suffer from high kinematic coupling, low repeatability, and insufficient resolution and response speed.

[0003] Based on the above, the current problem to be solved is to provide a five-axis driven piezoelectric tilt table that can realize linear motion of X, Y and Z axes and deflection of θY and θZ axes, as well as high repeatability positioning accuracy, high resolution, fast response speed and small size. Summary of the Invention

[0004] The purpose of the present invention is to provide a five-axis driven piezoelectric deflection table, aiming to solve the problems in the prior art that the piezoelectric deflection table cannot simultaneously achieve high-precision, high-resolution positioning of the X-axis, Y-axis, and Z-axis linear motion and the θY and θZ two-axis deflection, and has a slow response speed, a complex structure, and a large size.

[0005] The present invention is achieved by a five-axis driven piezoelectric deflection table, comprising:

[0006] Taiwan body;

[0007] a fixed block movably disposed on the platform;

[0008] a moving platform, which is arranged on the fixed block;

[0009] a piezoelectric screw assembly comprising a first piezoelectric screw, a second piezoelectric screw, a third piezoelectric screw, a fourth piezoelectric screw, and a fifth piezoelectric screw;

[0010] The second piezoelectric screw and the third piezoelectric screw abut against the first side surface of the fixed block, and are used to push the fixed block to move linearly along the Y axis or deflect along the Z axis;

[0011] A first displacement adjustment component, a second displacement adjustment component, and a third displacement adjustment component are provided inside the platform. The first displacement adjustment component abuts against the second side surface of the fixed block, and the first piezoelectric screw abuts against the end of the first displacement adjustment component, so as to push the fixed block to move linearly along the X-axis. The second and third displacement adjustment components abut against the bottom surface of the fixed block, and the fourth and fifth piezoelectric screws abut against the ends of the second and third displacement adjustment components, respectively, so as to push the fixed block to move linearly along the Z-axis or deflect along the Y-axis.

[0012] The X-axis, Y-axis, and Z-axis are spatial rectangular coordinate axes, the first side surface is parallel to the plane where the X-axis and Z-axis are located; the second side surface is parallel to the plane where the Y-axis and Z-axis are located, and the bottom surface of the fixed block is parallel to the plane where the X-axis and Y-axis are located.

[0013] Furthermore, the piezoelectric screw assembly is also provided with a screw base, which is connected to the platform, and the first piezoelectric screw, the second piezoelectric screw, the third piezoelectric screw, the fourth piezoelectric screw and the fifth piezoelectric screw are arranged on the screw base.

[0014] Furthermore, an elastic component for applying a pre-tightening force in the Y-axis direction is provided between the screw base and the fixing block.

[0015] Furthermore, the piezoelectric screw assembly is also provided with a screw housing, which is arranged opposite to the screw base and forms a cavity structure; the first piezoelectric screw, the second piezoelectric screw, the third piezoelectric screw, the fourth piezoelectric screw and the fifth piezoelectric screw respectively include a piezoelectric drive unit and a screw rod, the piezoelectric drive unit is arranged in the cavity structure, and the screw rod passes through the screw base and the screw housing for outputting displacement.

[0016] Furthermore, an elastic component is provided between the platform and the fixed block, and the elastic component is used to apply pre-tightening force to the platform and the fixed block in the Z-axis and X-axis directions.

[0017] Furthermore, the elastic component includes a tension spring and a pull rod connected to both ends of the tension spring.

[0018] Furthermore, the first displacement adjustment component, the second displacement adjustment component and the third displacement adjustment component respectively include: an adjustment rod, a ball, a compression spring and a gasket, at least one second groove with a slope is provided on the adjustment rod, the ball is arranged in the second groove and rolls along the slope under the action of the first piezoelectric screw or the fourth piezoelectric screw or the fifth piezoelectric screw; the platform is provided with a through hole corresponding to the ball, part of the ball passes through the through hole and abuts against the fixed block through the gasket; the two ends of the compression spring respectively abut against the adjustment rod and the platform.

[0019] Furthermore, the second displacement adjustment component is provided with one set of second grooves and balls, the third displacement adjustment component is provided with two sets of second grooves and balls, and the connecting line of the balls of the second displacement adjustment component and the third displacement adjustment component forms an isosceles triangle or an approximate isosceles triangle.

[0020] The five-axis driven piezoelectric tilting stage provided by the present invention has the following beneficial effects:

[0021] The present invention employs five piezoelectric screws (first, second, third, fourth, and fifth) to enable the tilt and yaw table to achieve linear motion along the X, Y, and Z axes, as well as deflection along the θx and θy axes. By collaboratively controlling multiple degrees of freedom across five axes, the present invention achieves highly precise and high-resolution nanometer-scale positioning. The present invention utilizes a high-performance piezoelectric screw drive and a tandem structural design, resulting in minimal kinematic coupling, rapid response, and real-time adjustment, meeting the requirements of precision machining and optical alignment.

[0022] The platform, fixed block, movable platform and piezoelectric screw assembly of the present invention are arranged reasonably and compactly, saving space while maintaining high precision and stability, and are suitable for optical equipment requiring a compact layout.

[0023] The elastic components apply preload to the entire structure along the X, Y, and Z axes, ensuring the effectiveness of the overall structural design, resulting in a fast response and more stable operation. The simple, rational, and compact design of the first, second, and third displacement adjustment components further promotes miniaturization of the entire structure. BRIEF DESCRIPTION OF THE DRAWINGS

[0024] Figure 1 A schematic diagram of the three-dimensional structure of the five-axis driven piezoelectric tilt table provided by the present invention;

[0025] Figure 2 A partial exploded view of the five-axis driven piezoelectric tilt table provided by the present invention;

[0026] Figure 3 Another partial exploded view of the five-axis driven piezoelectric tilt table provided by the present invention;

[0027] Figure 4 A front view of the five-axis driven piezoelectric tilt stage provided by the present invention;

[0028] Figure 5 The present invention provides Figure 3 The cross-sectional view in the AA direction;

[0029] Figure 6 The present invention provides Figure 3BB direction cross-sectional view;

[0030] Figure 7 The present invention provides Figure 3 The cross-sectional view in CC direction;

[0031] Figure 8 The present invention provides Figure 3 DD direction cross-sectional view;

[0032] Figure 9 A schematic diagram of the three-dimensional structure of the first displacement adjustment assembly provided by the present invention;

[0033] Figure 10 A schematic diagram of the three-dimensional structure of the elastic component provided by the present invention;

[0034] In the figure: 1-platform; 11-first displacement adjustment component; 110-adjusting rod; 1101-second groove; 111-ball; 112-compression spring; 113-gasket; 12-second displacement adjustment component; 13-third displacement adjustment component; 14-cylindrical protrusion; 2-fixed block; 21-first groove; 22-first side; 23-second side; 3-moving platform; 4-piezoelectric screw assembly; 41-first piezoelectric screw; 410-piezoelectric drive unit; 411-screw; 42-second piezoelectric screw; 43-third piezoelectric screw; 44-fourth piezoelectric screw; 45-fifth piezoelectric screw; 46-screw base; 47-screw housing; 48-copper sheath; 5-elastic component; 51-tension spring; 52-pull rod. DETAILED DESCRIPTION

[0035] In order to make the purpose, technical solutions and advantages of the present invention more clearly understood, the present invention will be further described in detail below with reference to the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are only used to explain the present invention and are not intended to limit the present invention.

[0036] The implementation of the present invention is described in detail below with reference to specific embodiments.

[0037] The same or similar numbers in the drawings of this embodiment correspond to the same or similar parts; in the description of the present invention, it should be understood that if the terms "up", "down", "left", "right", etc. indicate directions or positional relationships, they are based on the directions or positional relationships shown in the drawings. This is only for the convenience of describing the present invention and simplifying the description, and does not indicate or imply that the device or element referred to must have a specific direction, be constructed and operated in a specific direction. Therefore, the terms describing the positional relationship in the drawings are only used for illustrative purposes and cannot be understood as limiting the present invention. For ordinary technicians in this field, the specific meanings of the above terms can be understood according to specific circumstances.

[0038] Reference Figure 1-10The figure shows a preferred embodiment of the present invention.

[0039] The five-axis driven piezoelectric tilt table includes a table body 1, a fixed block 2, a moving table 3 and a piezoelectric screw assembly 4. Figure 1 The platform 1 is set as an L-shaped structure, refer to Figure 2 The fixed block 2 is movably mounted within the L-shaped groove of the platform 1, i.e., the fixed block 2 can move on the platform 1. The fixed block 2 is provided with a first groove 21. The movable platform 3 is configured as a rectangular structure and is disposed within the first groove 21 of the fixed block 2. The movable platform 3 is fixedly connected to the fixed block 2 and moves under the drive of the fixed block 2.

[0040] Piezoelectric screw assembly 4 is used to drive fixed block 2 to move movable platform 3 above platform 1 for linear motion along the X, Y, and Z axes, as well as for deflection along the Y and Z axes. Piezoelectric screw assembly 4 includes a first piezoelectric screw 41 for driving X-axis linear motion; a second piezoelectric screw 42 and a third piezoelectric screw 43 for driving Y-axis linear motion and Z-axis deflection; and fourth and fifth piezoelectric screws 44 and 45 for driving Z-axis linear motion and Y-axis deflection.

[0041] The second piezoelectric screw 42 and the third piezoelectric screw 43 are perpendicular to the first side surface 22 of the fixing block 2. Figure 4 、 Figure 5 、 Figure 7 The second and third piezoelectric screws 42, 43 move synchronously under the condition of applied voltage, pushing the fixed block 2 to move linearly along the Y-axis, and the fixed block 2 drives the movable stage 3 to move synchronously along the Y-axis. The second piezoelectric screw 42 is stationary while the third piezoelectric screw 43 moves. Alternatively, the second piezoelectric screw 42 moves while the third piezoelectric screw 43 is stationary, pushing the fixed block 2 to deflect in the positive or negative direction along the Z-axis, and the fixed block 2 drives the movable stage 3 to deflect in the positive or negative direction along the Z-axis synchronously.

[0042] The interior of the platform 1 is provided with a first displacement adjustment component 11, a second displacement adjustment component 12 and a third displacement adjustment component 13. The first displacement adjustment component 11 is provided corresponding to the second side surface 23 of the fixed block 2, and the first displacement adjustment component 11 abuts against the second side surface 23 along the X-axis direction. Figure 7-8 The first piezoelectric screw 41 abuts against the end of the first displacement adjustment component 11 and is used to push the fixed block 2 to move linearly along the X-axis, and the fixed block 2 drives the movable platform 3 to move linearly along the X-axis synchronously.

[0043] The second displacement adjustment assembly 12 and the third displacement adjustment assembly 13 are arranged parallel to the bottom surface of the corresponding fixed block 2. The second displacement adjustment assembly 12 and the third displacement adjustment assembly 13 are pressed against the bottom surface of the fixed block 2 along the Z-axis direction. The fourth piezoelectric screw 44 and the fifth piezoelectric screw 45 are respectively pressed against the ends of the second displacement adjustment assembly 12 and the third displacement adjustment assembly 13. Figure 6 、 Figure 8 The synchronous movement of the fourth and fifth piezoelectric screws 44, 45 can push the fixed block 2 to move linearly along the Z-axis, and the fixed block 2 can drive the movable stage 3 to move linearly along the Z-axis synchronously. The fourth piezoelectric screw 44 can be stationary while the fifth piezoelectric screw 45 moves, or the fourth piezoelectric screw 44 can move while the fifth piezoelectric screw 45 is stationary, which can push the fixed block 2 to deflect in the positive or negative direction along the Y-axis, and the fixed block 2 can drive the movable stage 3 to deflect in the positive or negative direction along the Y-axis synchronously.

[0044] The X axis, Y axis, and Z axis are the spatial rectangular coordinate axes. The first side surface 22 is parallel to the plane where the X axis and Z axis are located. The second side surface 23 is parallel to the plane where the Y axis and Z axis are located. The bottom surface of the fixed block 2 is parallel to the plane where the X axis and Y axis are located, refer to Figure 1-2 .

[0045] The first piezoelectric screw 41, the second piezoelectric screw 42, the third piezoelectric screw 43, the fourth piezoelectric screw 44 and the fifth piezoelectric screw 45 are fixed by setting a screw base 46. The screw base 46 is connected to the table 1. An elastic component 5 for adding a pre-tightening force in the Y-axis direction is provided between the screw base 46 and the fixed block 2. The elastic component 5 is provided between the second piezoelectric screw 42 and the third piezoelectric screw 43. Furthermore, an elastic component 5 is also provided between the table 1 and the fixed block 2. In order to enable the elastic component 5 to add a pre-tightening force in the Z-axis and X-axis directions between the table 1 and the fixed block 2, the elastic component 5 is provided at a certain tilt angle to the table 1 and the fixed block 2, with reference to FIG. Figure 3 The elastic component 5 includes a tension spring 51 and a pull rod 52 connected to both ends of the tension spring 51. The fixed platform 2 or the movable platform 3 or the screw base 46 is provided with a through hole or a blind hole corresponding to the pull rod 52, and the pull rod 52 is fixed in the through hole or the blind hole. Figure 10 .

[0046] The piezoelectric screw assembly 4 is also provided with a screw housing 47. The screw housing 47 is arranged opposite to the screw base 46 and forms a cavity structure. The first piezoelectric screw 41, the second piezoelectric screw 42, the third piezoelectric screw 43, the fourth piezoelectric screw 44 and the fifth piezoelectric screw 45 each include a piezoelectric drive unit 410 and a screw rod 411. The piezoelectric drive unit 410 is arranged in the cavity structure. The screw rod 411 passes through the screw base 46 and the screw housing 47 and abuts against the fixed block 2 or the first displacement adjustment component 11 or the second displacement adjustment component 12 or the third displacement adjustment component 13, and is used to push the fixed block 2 to achieve multi-degree-of-freedom movement. Copper sheaths 48 are also provided on both sides of the screw base 46. The copper sheaths 48 are configured as hollow tubular structures for wiring. The copper sheaths 48 electrically connect the first piezoelectric screw 41, the second piezoelectric screw 42, the third piezoelectric screw 43, the fourth piezoelectric screw 44 and the fifth piezoelectric screw 45 to an external power supply device.

[0047] The first displacement adjustment assembly 11, the second displacement adjustment assembly 12 and the third displacement adjustment assembly 13 respectively include an adjustment rod 110, a ball 111, a compression spring 112 and a gasket 113. Figure 9 . At least one second groove 1101 with a slope is provided on the adjusting rod 110. The ball 111 is provided in the second groove 1101 and rolls along the slope under the action of the first piezoelectric screw 41 or the fourth piezoelectric screw 44 or the fifth piezoelectric screw 45. The platform 1 is provided with a through hole that matches the size of the ball 111. Part of the sphere of the ball 111 extends to the outside of the through hole and abuts against the fixed block 2 through the gasket 113. The gasket 113 can reduce the friction loss between the ball 111 and the fixed platform 2. One side of the compression spring 112 is pressed against the inside of the adjusting rod 110, and the other side of the compression spring 112 is pressed against the inside of the platform 1. The platform 1 is provided with a cylindrical protrusion 14 corresponding to the compression spring 112. The compression spring 112 is sleeved on the outside of the cylindrical protrusion 14 for a firm connection. The first, fourth, and fifth piezoelectric screws 41, 44, and 45 respectively push the first, second, and third displacement adjustment assemblies 11, 12, and 13, causing the balls 111 to roll along the slope of the second grooves 1101, thereby displacing the abutting fixed block 2. The displacement direction of the fixed block 2 is perpendicular or approximately perpendicular to the displacement directions of the first, second, and third displacement adjustment assemblies 11, 12, and 13, respectively.

[0048] Preferably, the second displacement adjustment assembly 12 is provided with one set of second grooves 1101 and balls 111. The third displacement adjustment assembly 13 is provided with two sets of second grooves 1101 and balls 111. The line connecting the balls 111 of the second and third displacement adjustment assemblies 12, 13 forms an isosceles triangle or a nearly isosceles triangle, which makes the support more stable.

[0049] This does not limit the present invention. Any modifications, equivalent substitutions, and improvements made within the spirit and principles of the present invention should be included in the scope of protection of the present invention.

Claims

1. A five-axis driven piezoelectric tilt table, characterized in that: include: Platform (1); A fixed block (2) movably disposed on the platform (1); A movable platform (3) is provided on the fixed block (2); A piezoelectric screw assembly (4), comprising a first piezoelectric screw (41), a second piezoelectric screw (42), a third piezoelectric screw (43), a fourth piezoelectric screw (44) and a fifth piezoelectric screw (45); The second piezoelectric screw (42) and the third piezoelectric screw (43) abut against the first side surface (22) of the fixed block (2) and are used to push the fixed block (2) to move linearly along the Y axis or deflect along the Z axis; The platform (1) is provided with a first displacement adjustment component (11), a second displacement adjustment component (12) and a third displacement adjustment component (13) inside. The first displacement adjustment component (11) is in contact with the second side surface (23) of the fixed block (2). The first piezoelectric screw (41) is in contact with the end of the first displacement adjustment component (11) and is used to push the fixed block (2) to move linearly along the X-axis. The second displacement adjustment component (12) and the third displacement adjustment component (13) are in contact with the bottom surface of the fixed block (2). The fourth piezoelectric screw (44) and the fifth piezoelectric screw (45) are respectively in contact with the ends of the second displacement adjustment component (12) and the third displacement adjustment component (13) and are used to push the fixed block (2) to move linearly along the Z-axis or deflect along the Y-axis. The X-axis, Y-axis, and Z-axis are spatial rectangular coordinate axes; the first side surface (22) is parallel to the plane where the X-axis and Z-axis are located; the second side surface (23) is parallel to the plane where the Y-axis and Z-axis are located; and the bottom surface of the fixed block (2) is parallel to the plane where the X-axis and Y-axis are located.

2. The five-axis driven piezoelectric tilt table according to claim 1, characterized in that: The piezoelectric screw assembly (4) is further provided with a screw base (46), the screw base (46) being connected to the platform (1), and the first piezoelectric screw (41), the second piezoelectric screw (42), the third piezoelectric screw (43), the fourth piezoelectric screw (44) and the fifth piezoelectric screw (45) being provided on the screw base (46).

3. The five-axis driven piezoelectric tilting stage according to claim 2, characterized in that: An elastic component (5) for applying a pre-tightening force in the Y-axis direction is provided between the screw base (46) and the fixing block (2).

4. The five-axis driven piezoelectric tilting stage according to claim 2, characterized in that: The piezoelectric screw assembly (4) is further provided with a screw housing (47), and the screw housing (47) is arranged opposite to the screw base (46) and forms a cavity structure; the first piezoelectric screw (41), the second piezoelectric screw (42), the third piezoelectric screw (43), the fourth piezoelectric screw (44) and the fifth piezoelectric screw (45) respectively include a piezoelectric drive unit (410) and a screw rod (411), the piezoelectric drive unit (410) is arranged in the cavity structure, and the screw rod (411) passes through the screw base (46) and the screw housing (47) for outputting displacement.

5. The five-axis driven piezoelectric tilt table according to claim 1, characterized in that: An elastic component (5) is provided between the platform (1) and the fixed block (2), and the elastic component (5) is used to apply pre-tightening force to the platform (1) and the fixed block (2) in the Z-axis and X-axis directions.

6. The five-axis driven piezoelectric tilt table according to any one of claims 3 or 5, characterized in that: The elastic component (5) comprises a tension spring (51) and a pull rod (52) connected to both ends of the tension spring (51).

7. The five-axis driven piezoelectric tilt stage according to claim 1, characterized in that: The first displacement adjustment component (11), the second displacement adjustment component (12) and the third displacement adjustment component (13) respectively comprise: an adjustment rod (110), a ball (111), a compression spring (112) and a gasket (113); the adjustment rod (110) is provided with at least one second groove (1101) with a slope; the ball (111) is arranged in the second groove (1101) and rolls along the slope under the action of the first piezoelectric screw (41) or the fourth piezoelectric screw (44) or the fifth piezoelectric screw (45); the platform (1) is provided with a through hole corresponding to the ball (111); a portion of the ball (111) passes through the through hole and abuts against the fixed block (2) through the gasket (113); and the two ends of the compression spring (112) abut against the adjustment rod (110) and the platform (1), respectively.

8. The five-axis driven piezoelectric tilt table according to claim 7, characterized in that: The second displacement adjustment component (12) is provided with one set of second grooves (1101) and balls (111), and the third displacement adjustment component (13) is provided with two sets of second grooves (1101) and balls (111), and the connecting line of the balls (111) of the second displacement adjustment component (12) and the third displacement adjustment component (13) forms an isosceles triangle or an approximately isosceles triangle.

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