Silane gas production slag slurry treatment process
By using a heating flattening mechanism and auxiliary discharge parts in the vacuum drum filter, the problem of difficult slurry is solved, the dehydration efficiency of the slurry and the thoroughness of the discharge are improved, and the treatment cost is reduced.
Patent Information
- Application Number
- CN202510435720.9
- Authority / Receiving Office
- CN · China
- Patent Type
- Applications(China)
- Current Assignee / Owner
- Filing Date
- 2025-04-08
- Publication Date
- 2025-08-15
AI Technical Summary
When the existing vacuum drum filters treat slurry in silane gas production, the more viscous slurry is difficult to effectively scrape off, resulting in unsatisfactory liquid removal effect and increasing subsequent processing costs and time.
The slurry is flattened and heated by a hollow press roller. The slurry is cut and hot air treatment of the slurry cake by the hollow heating pipe, reducing the viscosity of the slurry, improving the liquid transmittance and scraping efficiency.
It improves the dehydration effect of the slurry, reduces the dependence of subsequent dehydration equipment, reduces the processing cost and time, and enhances the thoroughness of the slurry discharge.
Smart Images

Figure CN120479048A_ABST
Abstract
Description
Technical Field
[0001] The invention belongs to the technical field of slurry treatment equipment, in particular to a silane gas production slurry treatment process. Background Art
[0002] As a key electronic specialty gas, silane gas plays an indispensable role in many high-tech fields such as semiconductors, solar cells, and flat panel displays. At present, the main methods for industrially producing silane gas include the silicon-magnesium alloy method and the disproportionation method. However, no matter which production method is adopted, a certain amount of slurry will be generated. The slurry needs to be processed through some processing equipment. One of them is to filter it through a vacuum drum filter. The metal impurities are reduced from the original 100,000 ppbw to about 10,000 ppbw after treatment, which greatly reduces the metal impurities and then enters the next process for treatment.
[0003] In the prior art, vacuum drum filters use negative pressure as the driving force for filtration. During the filtration operation, a negative pressure environment is formed on one side of the filter surface through the vacuum system, resulting in a pressure difference on both sides of the filter cloth. Under the action of the pressure difference, the liquid of the suspension to be filtered passes through the filter cloth and is sucked into the drum and then discharged to the outside, while the solid particles are retained on the outer surface of the filter cloth, thereby achieving solid-liquid separation. After the slurry adheres to the outer wall of the filter cloth, the liquid is sucked into the drum by the negative pressure, so that the slurry attached to the outer surface of the filter cloth is dehydrated and then scraped off by a scraper. However, the adhesion between some more viscous slurries and the filter cloth increases when passing through the scraper, making it difficult to scrape them off, affecting the use of the equipment. Moreover, if the liquid in the slurry is only sucked away and removed under negative pressure, some thicker slurries on the outer surface of the filter cloth are prone to insufficient liquid suction, resulting in unsatisfactory liquid removal effect. In the subsequent process, dehydration equipment needs to be added to remove the liquid in the slurry again, which increases the use cost and time. For this reason, a silane gas production slurry treatment process is proposed. Summary of the Invention
[0004] The object of the present invention is to provide a silane gas production slurry treatment process to solve the technical problems raised in the above background technology.
[0005] To achieve the above object, the present invention provides the following technical solution: a silane gas production slurry treatment process, specifically comprising the following steps:
[0006] S1. Pour the wastewater into the wastewater tank of the vacuum drum filter and start the drive motor to drive the drum body and filter cloth to rotate;
[0007] S2. The vacuum device in the main body of the drum generates negative pressure on the inner wall of the filter cloth, causing the slurry in the wastewater in the wastewater tank to adhere to the outer surface of the filter cloth, and the liquid in the slurry passes through the filter cloth for filtration;
[0008] S3, the slurry attached to the outer surface of the filter cloth is flattened by the hollow pressing roller in the extrusion assembly, and at the same time, multiple groups of nozzles at the bottom of the hollow plate heat the hollow pressing roller and the slurry surface;
[0009] S4. The rotating hollow heating tube cuts the slurry cake flattened by the hollow pressing roller, and then the scraper scrapes the slurry and drops it onto the discharge plate below for unloading.
[0010] The vacuum drum filter in step S1 includes a wastewater tank and a drum body rotatably arranged on the wastewater tank, wherein the outer surface of the drum body is provided with a filter cloth and a heating and flattening mechanism, and the heating and flattening mechanism includes:
[0011] An extrusion assembly includes a hollow pressing roller and a hollow plate. The hollow pressing roller is used to flatten and heat the slurry attached to the outer surface of the filter cloth.
[0012] A plurality of nozzles are evenly arranged at the bottom of the hollow plate and along the length direction of the hollow plate, for auxiliary heating of the hollow pressing roller rotating below and heating the sticky slurry attached to the outer wall of the hollow pressing roller.
[0013] A right tube is fixedly provided at one end of the hollow pressure roller, a right connecting pipe is provided at the end of the right tube, and an upper fluid slip ring is provided between the right connecting pipe and the right tube;
[0014] A left column is fixedly provided at the other end of the hollow pressure roller. Upper bearings are sleeved on the outside of the left column and the right tube. Two sets of side frames are fixedly provided on the top of the wastewater tank.
[0015] The heating and flattening mechanism also includes an adjustment component for adjusting the height of the hollow plate and the hollow pressure roller. The adjustment component includes a top block fixed to the top of the side frame. Adjustment screws are fixedly provided on the tops of both ends of the hollow plate. The outside of the adjustment screw is connected to two groups of first spiral rings through threads.
[0016] An extrusion piece is provided between the hollow plate and the upper bearing, and the extrusion piece includes a stud fixed to the top of the upper bearing and a mounting block fixed to both ends of the hollow plate;
[0017] Two groups of movable plates are slidably arranged inside the installation block, and a spring is fixedly arranged between the top of the installation block and the bottom of the movable plate.
[0018] The movable plate is internally connected with a screw rod through a thread, a nut block is provided on the outside of the screw rod, a first fluid slip ring is provided on the outside of the right tube, and a return pipe is fixedly provided between the top of the first fluid slip ring and the hollow plate.
[0019] An auxiliary unloading part is also provided on the outside of the drum body. The auxiliary unloading part includes a hollow heating tube rotatably arranged on the outside of the filter cloth. A knife holder is provided on the outside of the hollow heating tube for cutting the slurry cake attached to the outer wall of the filter cloth into a suitable size.
[0020] The knife press is provided with multiple groups of blowing holes, and the two ends of the hollow heating tube are respectively provided with a left rod and a right connecting tube. The outside of the left rod and the right connecting tube are both provided with lower bearings, and an L-shaped plate is fixedly provided on the top of the lower bearing, and an arc-shaped back-blowing plate is fixedly provided between the two groups of the L-shaped plates.
[0021] A stud is slidably provided on the side frame, and two groups of second spiral rings are connected to the outside of the stud by threads. A first rotary joint is provided at the end of the right connecting pipe, and a telescopic tube is provided between the first rotary joint and the right connecting pipe.
[0022] A rotating pipe is provided inside the filter cloth, and a driving motor is fixedly provided on the waste water tank.
[0023] Compared with the prior art, the present invention has the following beneficial effects:
[0024] (1) The present invention is designed with a heating and flattening mechanism. During use, the slurry on the outer surface of the filter cloth is flattened by a hollow pressing roller, which compresses and thins the thick slurry layer, squeezes out the water, and keeps the thickness of the slurry on the outer surface of the filter cloth consistent. It can also increase the path efficiency of the liquid passing through the filter cloth, thereby improving the dehydration effect. At the same time, a heating medium is introduced into the hollow pressing roller, and the heat conduction of the hollow pressing roller is used to reduce the viscosity of the slurry, reduce the adhesion to the filter cloth, increase the degree of subsequent scraping by the scraper, and reduce the dependence on the subsequent use of other dehydration equipment.
[0025] (2) The present invention is designed with auxiliary unloading parts. When in use, the knife holder outside the hollow heating tube cuts the continuous slurry cake into suitable small pieces, avoiding the unloading of large pieces of slurry due to their own weight or viscosity, and reducing the resistance of the scraper to scraping. In addition, the heat is transferred to the surface of the slurry cake through the hollow heating tube and the knife holder outside it, which can further soften the sticky slurry cake and reduce its viscosity. Hot air is blown into the interior of the slurry cake through multiple groups of blowing holes on the knife holder, which can not only soften the interior of the slurry cake by hot air and reduce the viscosity, but also loosen the interior of the slurry cake by hot air, reduce the adhesion between the slurry cake and the filter cloth, and improve the thoroughness of subsequent unloading by the scraper. BRIEF DESCRIPTION OF THE DRAWINGS
[0026] Figure 1 It is a structural schematic diagram of the present invention;
[0027] Figure 2 It is a right side structural schematic diagram of the present invention;
[0028] Figure 3 This is a schematic diagram of the main structure of the wastewater tank and the drum of the present invention;
[0029] Figure 4 Schematic diagram of the filter cloth structure of the present invention;
[0030] Figure 5 It is a schematic structural diagram of the hollow pressure roller and the arc-shaped back-blowing plate of the present invention;
[0031] Figure 6 This is a schematic structural diagram of the hollow heating tube and the knife holder of the present invention;
[0032] Figure 7 This is a bottom view of the hollow pressure roller structure of the present invention;
[0033] Figure 8 This is a schematic diagram of the mounting block structure of the present invention;
[0034] Figure 9 It is a schematic diagram of the structure of the extrusion part of the present invention;
[0035] In the figure: 100, waste water tank; 101, drive motor; 102, drum body; 103, filter cloth; 104, scraper; 105, discharge plate; 200, hollow plate; 201, hollow pressure roller; 202, side frame; 203, top block; 204, mounting motor; 205, nozzle; 206, adjusting screw; 207, right connecting pipe; 208, upper bearing; 209, first fluid slip ring; 210, right pipe; 211, movable plate; 212, return pipe; 213, mounting block; 214, screw rod; 215, spring; 216, nut block; 300, arc back-blowing plate; 301, hollow heating pipe; 302, stud; 303, lower bearing; 304, knife holder; 305, telescopic tube; 306, first rotary joint; 307, blowing hole. DETAILED DESCRIPTION
[0036] The technical solutions of the present invention will be clearly and completely described below in conjunction with the embodiments. Obviously, the embodiments described are only some embodiments of the present invention, not all embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without making creative efforts are within the scope of protection of the present invention.
[0037] See also Figures 1-9 The present invention provides a technical solution: a silane gas production slurry treatment process, specifically comprising the following steps:
[0038] S1. Pour wastewater into the wastewater tank 100 in the vacuum drum filter, start the drive motor 101 to drive the drum body 102 and filter cloth 103 to rotate;
[0039] S2. A vacuum device in the drum body 102 generates negative pressure on the inner wall of the filter cloth 103, causing the slurry in the wastewater in the wastewater tank 100 to adhere to the outer surface of the filter cloth 103, and the liquid in the slurry passes through the filter cloth 103 for filtration;
[0040] S3, the slurry attached to the outer surface of the filter cloth 103 is flattened by the hollow pressing roller 201 in the extrusion assembly, and at the same time, the multiple groups of nozzles 205 at the bottom of the hollow plate 200 heat the hollow pressing roller 201 and the slurry surface;
[0041] S4, the rotating hollow heating tube 301 cuts the slurry cake flattened by the hollow pressing roller 201 into a suitable size, and then the scraper 104 scrapes the slurry and drops it onto the discharge plate 105 below for unloading;
[0042] The vacuum drum filter in step S1 includes a wastewater tank 100 and a drum body 102 rotatably disposed on the wastewater tank 100. The drum body 102 is externally covered with a filter cloth 103 and a heating and flattening mechanism. The heating and flattening mechanism includes:
[0043] Extrusion assembly, the extrusion assembly includes a hollow pressure roller 201 and a hollow plate 200, the hollow pressure roller 201 is used to flatten and heat the slurry attached to the outer surface of the filter cloth 103;
[0044] Multiple groups of nozzles 205 are evenly arranged at the bottom of the hollow plate 200 and along the length of the hollow plate 200, which are used to provide auxiliary heating to the rotating hollow roller 201 below and to heat the sticky slurry attached to the outer wall of the hollow roller 201;
[0045] A right tube 210 is fixedly provided at one end of the hollow pressure roller 201. A right connecting pipe 207 is provided at the end of the right tube 210. The right connecting pipe 207 is connected to an external hot air blower to provide hot air. An upper fluid slip ring is provided between the right connecting pipe 207 and the right tube 210. Through the upper fluid slip ring, the static end of the upper fluid slip ring is connected to the left end of the right connecting pipe 207, and the rotating end is connected to the right end of the right tube 210.
[0046] A left column is fixedly provided at the other end of the hollow pressure roller 201. An upper bearing 208 is sleeved on the outside of the left column and the right tube 210. The upper bearing 208 facilitates the rotation of the hollow pressure roller 201. In addition, during use, the limit rod can also slide up and down inside the mounting block 213 to enhance the limiting effect. Two sets of side frames 202 are fixedly provided on the top of the wastewater tank 100.
[0047] A hose is fixedly provided between the right connecting pipe 207 and the hollow plate 200 , and a mounting motor 204 is fixedly provided at the end of the left pipe.
[0048] Example 2
[0049] Based on Example 1, please refer to Figure 1 、 Figure 2 、 Figure 4 、 Figure 5 、 Figure 6 、 Figure 7 、 Figure 8 and Figure 9 The heating and flattening mechanism also includes an adjustment component for adjusting the height of the hollow plate 200 and the hollow pressing roller 201. The adjustment component includes a top block 203 fixed to the top of the side frame 202. Adjustment screws 206 are fixedly provided on the top of both ends of the hollow plate 200. The top of the adjustment screw 206 passes through the interior of the top block 203, and the outside of the adjustment screw 206 is connected to two sets of first spiral rings by threads.
[0050] An extrusion piece is provided between the hollow plate 200 and the upper bearing 208. The extrusion piece includes a stud 302 fixed to the top of the upper bearing 208 and a mounting block 213 fixed to both ends of the hollow plate 200. The top of the limit rod passes through the interior of the mounting block 213.
[0051] Two sets of movable plates 211 are slidably provided inside the mounting block 213. The bottom of the movable plates 211 is fixedly connected to the upper bearing 208. A limit rod is fixed to the outer wall of the upper bearing 208, and the top of the limit rod passes through the interior of the mounting block 213. A spring 215 is fixedly provided between the top of the mounting block 213 and the bottom of the movable plates 211.
[0052] The interior of the movable plate 211 is connected to a screw rod 214 through a thread, and the top of the screw rod 214 extends to the outside of the top of the mounting block 213. A nut block 216 is provided on the outside of the screw rod 214. A limit plate is fixedly provided on the side of the nut block 216. A sliding groove for the limit plate to move up and down is provided on the side of the movable plate 211. A first fluid slip ring 209 is provided on the outside of the right tube 210. A return pipe 212 is fixedly provided between the top of the first fluid slip ring 209 and the hollow plate 200. After the hot air enters the interior of the hollow pressure roller 201, it will be discharged into the first fluid slip ring 209, and then The hot air also enters the hollow plate 200 through the return pipe 212, so that the exhausted hot air can be fully utilized without waste. When the spring 215 becomes insufficient in elasticity after being used for a long time, the bottom of the screw rod 214 is rotated. At this time, the rotating screw rod 214 drives the external nut block 216 to move upward, and the nut block 216 squeezes the spring 215, which can increase the elasticity of the spring 215. The elasticity of the spring 215 can be adjusted to avoid affecting the contact effect between the hollow pressure roller 201 and the slurry below. In addition, by adjusting the elasticity, the frequency of replacing the spring 215 can be reduced, thereby reducing the replacement cost.
[0053] The present invention uses a designed heating and flattening mechanism to flatten the slurry on the outer surface of the filter cloth 103 through the hollow pressing roller 201 during use, compressing and thinning the thicker slurry layer, squeezing out water, and keeping the slurry thickness on the outer surface of the filter cloth 103 consistent. It can also increase the path efficiency of the liquid passing through the filter cloth 103, thereby improving the dehydration effect. At the same time, a heating medium is introduced into the hollow pressing roller 201, and the heat conduction of the hollow pressing roller 201 is used to reduce the viscosity of the slurry, reduce the adhesion to the filter cloth 103, increase the degree of subsequent scraping by the scraper 104, and reduce the dependence on the subsequent use of other dehydration equipment.
[0054] In summary, wastewater enters the wastewater tank 100, and then the drive motor 101 is started. The working end of the drive motor 101 rotates to indirectly drive the drum body 102 and the filter cloth 103 outside it to rotate, and then the slurry in the wastewater tank 100 is attached to the outer surface of the filter cloth 103. At the same time, the installation motor 204 and the hot air blower located outside the equipment are turned on. The working end of the installation motor 204 rotates to indirectly drive the hollow pressing roller 201 to rotate, flattening the slurry on the outer surface of the filter cloth 103 into a slurry cake, so that the slurry on the outer surface of the filter cloth 103 is evenly distributed. As the filter cloth 103 rotates, the slurry enters the position above the drum body 102, and the hot air generated by the hot air blower enters the hollow roller through the right pipe 207 and the right pipe 210. Inside the pressing roller 201, the hot air heats the hollow pressing roller 201, and then the outer wall of the hollow pressing roller 201 with a certain amount of heat contacts the slurry cake, and conducts the heat into the slurry cake, heating and softening the sticky slurry cake, thereby reducing the viscosity of the slurry cake. At the same time, the hot air entering the right connecting pipe 207 can also enter the hollow plate 200 through the hose, and then the hot air is ejected downward from the multiple groups of nozzles 205 at the bottom. The hot air can not only blow away some broken slurry attached to the outer edge of the rotating hollow pressing roller 201, but also heat and soften the slurry below by the hot air, thereby reducing the viscosity of the slurry. It can not only flatten the slurry to make it evenly distributed, but also heat and soften the sticky slurry to reduce its viscosity.
[0055] Before the slurry is flattened by the hollow pressure roller 201, the distance between the hollow pressure roller 201 and the slurry is adjusted so that the thickness of the slurry flattened is as consistent as possible. When adjusting, the two sets of first spiral rings on the outside of the adjusting screw 206 are rotated in opposite directions to loosen them, and then the adjusting screw 206 is moved upward or downward as needed, driving the hollow plate 200 below and the hollow pressure roller 201 to move accordingly. When the adjustment is completed, the two sets of first spiral rings are rotated in opposite directions and tightened to adjust the distance between the hollow pressure roller 201 and the slurry. Then, when the hollow pressure roller 201 is flattening the slurry, the two sets of springs 215 on the mounting block 213 cause the movable plate 211 to generate a downward squeezing force, so that the movable plate 211, the upper bearing 208 and the hollow pressure roller 201 all have a downward squeezing force, thereby increasing the flattening effect of the hollow pressure roller 201 on the slurry.
[0056] Example 3
[0057] Based on Example 2, please refer to Figure 1 、 Figure 2 、 Figure 4 、 Figure 5 、 Figure 6 and Figure 7 The outside of the drum body 102 is also provided with an auxiliary unloading member, which includes a hollow heating tube 301 rotatably arranged on the outside of the filter cloth 103. A knife holder 304 is provided on the outside of the hollow heating tube 301 for cutting the slurry cake attached to the outer wall of the filter cloth 103 into a suitable size.
[0058] The knife pressing frame 304 is provided with a plurality of blowing holes 307. The two ends of the hollow heating tube 301 are respectively provided with a left rod and a right connecting tube. The outer sides of the left rod and the right connecting tube are both sleeved with a lower bearing 303. An L-shaped plate is fixedly provided on the top of the lower bearing 303. An arc-shaped back-blowing plate 300 is fixedly provided between the two groups of L-shaped plates. The arc-shaped back-blowing plate 300 is fixed on the outer wall of the lower bearing 303. When the plurality of blowing holes 307 on the knife pressing frame 304 blow hot air into the bottom slurry cake through the arc-shaped back-blowing plate 300, the plurality of blowing holes 307 on the top of the knife pressing frame 304 will also blow hot air outwards, causing waves. The hot air blown back through the arc-shaped back-blowing plate 300 is blown into the upper arc-shaped back-blowing plate 300, and the arc-shaped structure causes the hot air to be reversed and blown downward. At this time, the reverse-blown hot air is blown back to the surface of the slurry cake and the outer wall of the hollow heating tube 301 and the press knife holder 304, which can blow out even small slurry attached to the outer wall of the hollow heating tube 301 and the press knife holder 304. At the same time, the hot air blown to the surface of the slurry cake can also heat the slurry cake and reduce its viscosity. The hot air blown out through the blowing hole 307 above the press knife holder 304 can be effectively and fully utilized to avoid waste of production.
[0059] A stud 302 is slidably provided on the side frame 202. Two sets of second spiral rings are threadedly connected to the outside of the stud 302. The top of the stud 302 is fixedly connected to the bottom of the lower bearing 303. A first rotary joint 306 is provided at the end of the right connecting pipe. A telescopic tube 305 is provided between the first rotary joint 306 and the right connecting pipe 207.
[0060] The present invention is designed with auxiliary unloading parts. When in use, the pressure knife holder 304 outside the hollow heating tube 301 cuts the continuous slurry cake into suitable small pieces, avoiding the unloading of large pieces of slurry due to their own weight or viscosity, and reducing the resistance of the scraper 104 to scraping. In addition, the heat is transferred to the surface of the slurry cake through the hollow heating tube 301 and the pressure knife holder 304 outside it, which can further soften the sticky slurry cake and reduce its viscosity. Hot air is blown into the interior of the slurry cake through the multiple groups of blowing holes 307 on the pressure knife holder 304, which can not only soften the interior of the slurry cake by hot air and reduce the viscosity of the slurry cake, but also loosen the interior of the slurry cake by hot air, reduce the adhesion between the slurry cake and the filter cloth 103, and improve the thoroughness of subsequent unloading by the scraper 104.
[0061] In summary, during the flattening process, the hot air in the right connecting pipe 207 can also be transported to the hollow heating pipe 301 through the telescopic pipe 305, heating the hollow heating pipe 301 and the external pressure knife rack 304. At this time, the continuous and integral slurry cake on the outside of the filter cloth 103 can be cut into a suitable size by the pressure knife rack 304. At the same time, the heat of the hollow heating pipe 301 and the pressure knife rack 304 with a certain amount of heat is transferred to the contact surface with the slurry cake to further heat the slurry cake, further reducing the viscosity of the slurry cake. Moreover, the outer side of the pressure knife rack 304 can be pressed into the interior of the slurry cake, and the multiple groups of blowing holes 307 located in the pressure knife rack 304 can enter the hollow heating pipe. The hot air in 301 is blown to the inside of the slurry cake. The hot air can not only heat and soften the sticky slurry cake to reduce its viscosity, but also make the inside loose, which is convenient for subsequent scraping and unloading by the scraper 104. In addition, the distance between the hollow heating tube 301, the knife holder 304 and the slurry cake can be adjusted during or before use. When adjusting, the two sets of second spiral rings outside the stud 302 are rotated outward to loosen them, and then the stud 302 is moved upward or downward to drive the hollow heating tube 301 to move upward or downward. After the movement is completed, the two sets of second spiral rings are rotated in opposite directions and tightened to adjust.
[0062] In this embodiment, a rotating tube is provided inside the filter cloth 103, a driving motor 101 is fixedly provided on the wastewater tank 100, the working end of the driving motor 101 extends to one end of the rotating tube, a drain pipe is provided at the other end of the rotating tube, and a water inlet is provided on the back of the wastewater tank 100.
[0063] The above embodiments are only used to illustrate the technical method of the present invention and are not intended to limit the present invention. Although the present invention has been described in detail with reference to the preferred embodiments, those skilled in the art should understand that the technical method of the present invention may be modified or replaced by equivalents without departing from the spirit and scope of the technical method of the present invention.
Claims
1. A silane gas production slurry treatment process, characterized in that: The specific steps include: S1, pouring wastewater into the wastewater tank (100) in the vacuum drum filter, starting the drive motor (101) to drive the drum body (102) and the filter cloth (103) to rotate; S2. A vacuum device in the drum body (102) generates negative pressure on the inner wall of the filter cloth (103), causing the slurry in the wastewater in the wastewater tank (100) to adhere to the outer surface of the filter cloth (103), and the liquid in the slurry passes through the filter cloth (103) for filtration; S3, flattening the slurry attached to the outer surface of the filter cloth (103) by the hollow pressing roller (201) in the extrusion assembly, and simultaneously heating the hollow pressing roller (201) and the slurry surface by multiple groups of nozzles (205) at the bottom of the hollow plate (200); S4. The rotating hollow heating tube (301) cuts the slurry cake flattened by the hollow pressing roller (201), and then the scraper (104) scrapes the slurry and drops it onto the discharge plate (105) below for discharge.
2. A silane gas production slurry treatment process according to claim 1, characterized in that: The vacuum drum filter in step S1 includes a wastewater tank (100) and a drum body (102) rotatably arranged on the wastewater tank (100), wherein the outer surface of the drum body (102) is provided with a filter cloth (103) and a heating and flattening mechanism, wherein the heating and flattening mechanism includes: An extrusion assembly, the extrusion assembly comprising a hollow pressing roller (201) and a hollow plate (200), wherein the hollow pressing roller (201) is used to flatten and heat the slurry attached to the outer surface of the filter cloth (103); A plurality of nozzles (205) are evenly arranged at the bottom of the hollow plate (200) and along the length direction of the hollow plate (200), for auxiliary heating of the hollow pressing roller (201) rotating below and heating the sticky slurry attached to the outer wall of the hollow pressing roller (201).
3. A silane gas production slurry treatment process according to claim 2, characterized in that: A right tube (210) is fixedly provided at one end of the hollow pressure roller (201), a right connecting pipe (207) is provided at the end of the right tube (210), and an upper fluid slip ring is provided between the right connecting pipe (207) and the right tube (210); A left column is fixedly provided at the other end of the hollow pressure roller (201), and upper bearings (208) are sleeved on the outside of the left column and the right tube (210). Two sets of side frames (202) are fixedly provided on the top of the wastewater tank (100).
4. A silane gas production slurry treatment process according to claim 3, characterized in that: The heating and flattening mechanism further comprises an adjustment component for adjusting the height of the hollow plate (200) and the hollow pressing roller (201), wherein the adjustment component comprises a top block (203) fixed to the top of the side frame (202), and an adjustment screw (206) is fixedly provided at the top of both ends of the hollow plate (200), and the outside of the adjustment screw (206) is connected to two groups of first spiral rings through threads.
5. The silane gas production slurry treatment process according to claim 3, characterized in that: An extrusion piece is provided between the hollow plate (200) and the upper bearing (208), and the extrusion piece includes a stud (302) fixed on the top of the upper bearing (208) and mounting blocks (213) fixed on both ends of the hollow plate (200); Two groups of movable plates (211) are slidably arranged inside the installation block (213), and a spring (215) is fixedly arranged between the top of the installation block (213) and the bottom of the movable plate (211).
6. A silane gas production slurry treatment process according to claim 5, characterized in that: The interior of the movable plate (211) is connected to a screw rod (214) through a thread, the exterior of the screw rod (214) is provided with a nut block (216), the exterior of the right tube (210) is provided with a first fluid slip ring (209), and a return pipe (212) is fixedly provided between the top of the first fluid slip ring (209) and the hollow plate (200).
7. The silane gas production slurry treatment process according to claim 3, characterized in that: An auxiliary unloading member is further provided on the outside of the drum body (102), and the auxiliary unloading member comprises a hollow heating tube (301) rotatably provided on the outside of the filter cloth (103). A knife holder (304) is provided on the outside of the hollow heating tube (301) for cutting the slurry cake attached to the outer wall of the filter cloth (103) into a suitable size.
8. A silane gas production slurry treatment process according to claim 7, characterized in that: The knife press (304) is provided with a plurality of blowing holes (307), and the two ends of the hollow heating tube (301) are respectively provided with a left rod and a right connecting tube, and the outer parts of the left rod and the right connecting tube are both provided with a lower bearing (303), and an L-shaped plate is fixedly provided on the top of the lower bearing (303), and an arc-shaped back-blowing plate (300) is fixedly provided between the two groups of the L-shaped plates.
9. A silane gas production slurry treatment process according to claim 8, characterized in that: A stud (302) is slidably provided on the side frame (202), and the exterior of the stud (302) is connected to two sets of second spiral rings via threads. A first rotary joint (306) is provided at the end of the right connecting pipe, and a telescopic pipe (305) is provided between the first rotary joint (306) and the right connecting pipe (207).
10. The silane gas production slurry treatment process according to claim 1, characterized in that: A rotating pipe is provided inside the filter cloth (103), and a driving motor (101) is fixedly provided on the wastewater tank (100).