Grinding wheel scribing machine cooling structure and grinding wheel scribing machine

Abstract

The invention discloses a grinding wheel scribing machine cooling structure and a grinding wheel scribing machine, and relates to the technical field of scribing machines, the cooling structure designs a set of complete scheme of grinding wheel / grinding wheel cover hot gas demisting before cutting and grinding wheel / workpiece cold gas cooling during cutting on the basis of a turbine pipe as a core component, and compared with low-temperature refrigeration gas injection cooling, the use cost is greatly saved; in addition, cold air and hot air of the vortex tube are utilized at the same time, no energy waste is caused, other purposes can be achieved, and resource utilization is achieved to the maximum extent. And the dust collection structure matched with the cooling structure can adsorb chippings and dust generated in the cutting process of the grinding wheel scribing machine, the adsorption effect is good, and maintenance and cleaning are convenient.

Description

Technical Field

[0001] The present invention relates to the technical field of grinding wheel dicing machines, and in particular to a cooling structure of a grinding wheel dicing machine and a grinding wheel dicing machine. Background Art

[0002] Abrasive wheel dicing machines are core equipment in the fields of semiconductor packaging, precision ceramic processing, and cutting of hard and brittle materials. They use high-speed rotating diamond grinding wheels to perform high-precision cutting of workpieces. However, during the cutting process, the intense friction between the grinding wheel and the workpiece generates a large amount of heat (local temperatures can reach hundreds of degrees Celsius). This high temperature can easily soften the workpiece surface material, generate thermal stress, and may also cause material oxidation, microcracks, and even a decrease in machining accuracy. Furthermore, sustained high temperatures accelerate the oxidation and wear of the diamond abrasive grains on the grinding wheel, leading to edge blunting, reduced cutting efficiency, and shortened grinding wheel life. This increases the frequency of grinding wheel replacement and increases production costs.

[0003] Currently, the mainstream cooling method for grinding wheel dicing machines is water cooling. Cooling channels are designed inside or on the back of the grinding wheel to directly remove heat through high-pressure circulating deionized water. However, traditional water cooling methods struggle to balance chip removal efficiency and heat dissipation, and are prone to chip blockage or coolant residue contamination. To improve heat exchange efficiency and reduce water stain contamination, existing technologies use atomized cooling (water mist mixed with air). However, this solution has the following disadvantages: 1. The atomizing nozzle is easily clogged by impurities in the water (such as calcium and magnesium ions, particulate matter) or chemical additives, requiring frequent cleaning or replacement, increasing maintenance frequency; 2. The atomized water vapor may spread to other areas of the equipment (such as electrical control cabinets), causing moisture to short-circuit circuits on circuit boards or rust on metal parts; 3. The oxygen in the water mist may accelerate the oxidation of certain metals (such as aluminum and magnesium alloys), especially at high temperatures, forming an oxide layer, which affects subsequent processing accuracy.

[0004] Gas jet cooling uses low-temperature gas to rapidly absorb heat to achieve temperature control. This technology eliminates liquid residue and requires no subsequent cleaning, avoiding the efficiency loss associated with traditional water cooling due to rising water temperatures. While low-temperature gas jet cooling has been mentioned in existing technologies, it hasn't been systematically implemented. Summary of the Invention

[0005] In view of the technical defects of the existing cooling scheme of the grinding wheel dicing machine, the present invention proposes a grinding wheel dicing machine cooling structure and a grinding wheel dicing machine, which adopts a low-temperature refrigeration gas jet cooling method and cooperates with a dust collection structure to form a complete systematic cooling scheme.

[0006] The present invention protects a cooling structure of a grinding wheel dicing machine, including a vortex tube, an air intake assembly connected to the vortex tube nozzle, a cold air nozzle connected to the cold end of the vortex tube through a cold air release pipe, and a hot air nozzle connected to the hot end of the vortex tube through a hot air release pipe. The hot air release pipe and the cold air release pipe are respectively provided with a first valve and a second valve; the cold air nozzle is located above the workpiece to be cut, close to the cutting position; the hot air nozzle extends into the grinding wheel cover and is located above the grinding wheel.

[0007] Preferably, the vortex tube cold end is also connected with a condenser, and the vortex tube hot end is also connected with a hot gas converter.

[0008] The present invention also protects a grinding wheel scribing machine, which includes the cooling structure of the above-mentioned grinding wheel scribing machine, and a vacuum suction structure is provided next to the grinding wheel cover; the vacuum suction structure includes a vacuum suction tube extending into the grinding wheel cover at the front end, a dust removal component connected to the rear end of the vacuum suction tube, and a negative pressure component communicating with the dust removal component; the vacuum suction port extending into the grinding wheel cover is flat, covering the cutting area laterally.

[0009] Preferably, the dust removal assembly includes a circular dust removal shell and a rotating seat relatively fixed in the dust removal shell. The rotating seat is provided with multiple electrostatic plates, and the electrostatic plates are radially arranged around the rotating seat; each electrostatic plate is provided with a scraper sleeve on a sliding sleeve, and a scraper sleeve driving member is provided inside the rotating seat near the scraper sleeve. One end of the scraper sleeve driving member is connected to the scraper sleeve, and the other end is fixed inside the rotating seat. The scraper sleeve driving member drives the scraper sleeve to slide along the electrostatic plate toward a direction away from the rotating seat.

[0010] More preferably, the scraper sleeve driving component is arranged in an installation groove opened inside the rotating seat, and is composed of a first electromagnet and a second electromagnet arranged opposite to each other, the first electromagnet is fixedly connected to the scraper sleeve, and the second electromagnet is fixed in the installation groove; a reset spring is fixed between the scraper sleeve and the rotating seat; the first electromagnet and the second electromagnet are energized so that the magnetic poles are the same, thereby generating a repulsive force, driving the scraper sleeve to slide along the electrostatic plate in the direction away from the rotating seat.

[0011] Preferably, a filter assembly is provided between the dust removal assembly and the negative pressure assembly, and the filter assembly includes a filter mounting seat fixed to the inner wall of the connecting tube and a filter mounting seat.

[0012] More preferably, a scraper is provided on the filter screen, and the scraper is arranged on the side facing the dust removal assembly, with the center point of the filter screen as the center, and the surface of the filter screen is fitted to make a circular motion.

[0013] More preferably, a dust collection assembly is connected below the dust collection assembly, and the dust collection assembly includes a dust collection case, a roller rotatingly installed in the dust collection case, and a dust collection box slidingly installed in the dust collection case; the dust collection case is in communication with the dust collection case, and after the dust enters the dust collection case from the dust collection case, the dust falls into the dust collection box through the roller.

[0014] The present invention has the following advantages:

[0015] 1. Based on the core component of the turbine tube, a complete solution has been designed for hot air demisting of the grinding wheel and wheel cover before cutting, and cold air cooling of the grinding wheel and workpiece during cutting. The main consumption is compressed air, which can be purchased directly or produced with a self-provided air compressor. This air cooling significantly reduces costs compared to cryogenic gas jet cooling (such as liquid nitrogen or dry ice jet cooling). Furthermore, by utilizing both the cold and hot air from the vortex tube, there is no energy waste and the system can be used for other purposes, maximizing resource utilization.

[0016] 2. The dust collection structure matched with the cooling structure can absorb the debris and dust generated during the cutting process, and the adsorption effect is good, which is convenient for maintenance and cleaning;

[0017] 3. The cooling structure and the dust collection structure cooperate with each other to form a complete systematic cooling solution, which solves the problem of debris blockage or coolant residual pollution caused by existing water cooling. At the same time, the use cost and maintenance cost are low, and it is easy to upgrade the structure of the existing grinding wheel dicing machine, with wide adaptability. BRIEF DESCRIPTION OF THE DRAWINGS

[0018] Figure 1 Schematic diagram of cooling structure;

[0019] Figure 2 A schematic diagram of the structure of a high-speed rotating mechanism provided inside the intake pipe of the intake assembly;

[0020] Figure 3 This is a schematic diagram of the internal structure of the air conditioning nozzle;

[0021] Figure 4 This is a schematic diagram of the positional relationship between the cooling structure and the dust collection structure in the grinding wheel dicing machine;

[0022] Figure 5 Schematic diagram of the dust collection structure;

[0023] Figure 6 It is a schematic diagram of the dust removal component structure;

[0024] Figure 7 It is a cross-sectional view and an enlarged schematic diagram of the interior of the dust removal component;

[0025] Figure 8 Schematic diagram of the dust collection component structure;

[0026] Figure 9 Schematic diagram of the filter assembly structure;

[0027] Figure 10 This is a schematic diagram of the main frame of the grinding wheel dicing machine and the grinding wheel drive mechanism;

[0028] Figure 11 This is a schematic diagram of the main frame of the grinding wheel scribing machine and the workpiece drive mechanism;

[0029] Figure 12 Schematic diagram of the fixed plate sliding mechanism.

[0030] Reference numerals: 10, cutting structure, 101, U-shaped frame, 102, first support plate, 103, second support plate, 104, grinding wheel drive motor, 105, lead screw motor, 106, base, 107, lead screw, 108, sliding frame, 109, workpiece, 110, slide rail, 111, grinding wheel, 112, fixed plate, 113, electric cylinder, 114, sensor, 115, vertical plate, 116, drag box;

[0031] 20. Cooling structure, 201. Air intake assembly, 202. Vortex tube, 203. Cold air collection pipe, 204. Hot air release pipe, 205. Hot air collection pipe, 206. First valve, 207. Second valve, 208. Hot gas converter, 209. Condenser, 210. Grinding wheel cover, 211. Cold air nozzle, 212. Hot air nozzle;

[0032] 30. Dust suction structure, 301. Dust suction pipe, 302. Dust removal component, 3021. Electrostatic plate, 3022. Scraper sleeve, 3023. First electromagnet, 3024. Second electromagnet, 3025. Rotating seat drive motor, 3026. Rotating seat; 303. Negative pressure component, 304. Dust collection component, 3041. Roller, 3042. Dust collection box, 3043. Roller drive motor, 305. Filter component, 3051. Filter, 3052. Scraper, 3053. Scraper drive motor, 3054. Filter mounting seat, 306. Connecting pipe. DETAILED DESCRIPTION

[0033] The technical solution of the present invention will be further specifically described below through examples and in conjunction with the accompanying drawings. In the following description, many specific details are set forth to facilitate a full understanding of the present invention. However, the present invention can be implemented in many other ways than those described herein, and those skilled in the art can make similar improvements without violating the scope of the present invention. Therefore, the present invention is not limited to the specific embodiments disclosed below.

[0034] In the description of the present invention, it should be noted that the terms "up", "down", "in", "out", "front", "back", etc. indicate directions or positional relationships based on the directions or positional relationships shown in the accompanying drawings, or are directions or positional relationships in which the product of the invention is usually placed when in use. They are only for the convenience of describing the present invention and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific direction, be constructed and operated in a specific direction. Therefore, they should not be understood as limiting the present invention.

[0035] Example 1

[0036] A grinding wheel dicing machine cooling structure 20, such as Figure 1 As shown, it includes a vortex tube 202 ( Figure 1 The two points 202 in the middle point to the hot and cold ends of the vortex tube, respectively, the air inlet assembly 201 connected to the nozzle of the vortex tube 202, the cold air nozzle 211 connected to the cold end of the vortex tube 202 via the cold air release pipe, and the hot air nozzle 212 connected to the hot end of the vortex tube 202 via the hot air release pipe. The hot air release pipe and the cold air release pipe can be respectively provided with a first valve 206 and a second valve 207 to control the discharge of cold air and hot air.

[0037] The vortex tube (also known as the Rank-Hilsch tube) described here is a device with no moving parts that can separate hot and cold airflows using only compressed air. Its core function is to convert the input compressed air into two airflows: a low-temperature cold airflow and a high-temperature hot airflow. Since it belongs to the existing technology, its specific structure will not be elaborated here.

[0038] In the vortex tube, the compressed air introduced from the nozzle needs to form a high-speed rotating vortex, so a high-speed rotating mechanism is provided inside the intake pipe of the intake assembly 201, including a rotating member 2011 and a driving member 2012 of a turbine structure, such as Figure 2 As shown, the compressed air introduced forms a high-speed rotating vortex.

[0039] Regarding the specific layout of the cold air nozzle and the hot air nozzle, in this embodiment, the cold air nozzle 211 is symmetrically arranged on both sides of the grinding wheel 111 and faces the cutting position of the workpiece 109; the hot air nozzle 212 extends into the grinding wheel cover 210, and is also symmetrically arranged on both sides of the grinding wheel 111 and faces the grinding wheel 111.

[0040] The grinding wheel cover 210 is a core protective component of the grinding wheel scribing machine, isolating the grinding wheel from the grinding wheel cutting process, separating it from the high-temperature areas and the grinding wheel slag generated by the cutting process, while also protecting the operator. The intense friction between the grinding wheel and the workpiece generates a significant amount of heat (local temperatures can reach hundreds of degrees Celsius), causing the grinding wheel and the inner wall of the grinding wheel cover near the cutting area to rise significantly in temperature (possibly exceeding 80 degrees Celsius). In workshops with high humidity (such as during the rainy season in southern China or in workshops without temperature control), water vapor in the ambient air, upon contact with the high-temperature grinding wheel and the inner wall of the grinding wheel cover, experiences a sudden drop in temperature, reaching the dew point and condensing into tiny water droplets (i.e., fogging).

[0041] The mist (condensed water) on the grinding wheel and the inner wall of the grinding wheel cover may seem small, but it will have many negative effects on the processing quality of the dicing machine and the operation of the equipment: for example, when condensed water drips onto the surface of the workpiece, it may mix with the grinding chips to form a "mud film", resulting in burrs, chipping or dimensional deviation on the cutting surface (especially in the processing of precision materials such as silicon wafers and ceramics); after moisture adheres to the surface of the grinding wheel, the binder between its abrasive grains (such as resin, metal) will be softened, resulting in a decrease in the hardness of the grinding wheel, deterioration of self-sharpening, reduced cutting efficiency and increased surface roughness; if condensed water stays on the inner wall of the grinding wheel cover for a long time, it will react with carbon dioxide and acidic gases in the air (such as metal oxide vapor produced by cutting) to generate weak acid (such as carbonic acid), which will corrode the metal cover or coating, causing rust and coating shedding.

[0042] The hot air nozzle 212 in this embodiment is used to heat and de-mist the grinding wheel cover before workpiece cutting begins. When compressed air is introduced into the vortex tube nozzle, the first valve 206 is opened, connecting the hot end of the vortex tube to the hot air release pipe 204. Hot air is then ejected through the hot air nozzle 212, heating and de-misting the grinding wheel 111 and the grinding wheel cover 210.

[0043] At this time, the workpiece cutting has not yet begun. If the cold air generated by the cold end of the vortex tube is not utilized, it will be wasted. Therefore, in this embodiment, the cold end of the vortex tube 202 is connected to the condenser 209, and the cold end of the vortex tube 202 is connected to the cold air collection pipe 203. The cold air is collected into the condenser 209 through the cold air collection pipe 203 for air condensation and used for other purposes, such as cooling other equipment or cooling staff.

[0044] The cold air nozzle 211 starts with the start of workpiece cutting, opens the second valve 207, and the cold end of the vortex tube is connected to the cold air release pipe ( Figure 1 It is not marked in the figure, but it can be seen that it is part of the pipeline connecting the cold end of the vortex tube, and a second valve 207 is set on it to connect the cold air. The cold air is ejected through the cold air nozzle 211 to cool the grinding wheel 111 and the workpiece 109.

[0045] Similarly, if the hot air generated at the hot end of the vortex tube is not utilized, it will be wasted. Therefore, in this embodiment, the hot end of the vortex tube 202 is connected to the hot gas converter 208, and the hot end of the vortex tube 202 is connected to the hot gas collection pipe 205. The hot air is collected in the hot gas converter 208 through the hot gas collection pipe 205 for other uses, such as power generation.

[0046] In order to improve the cooling effect of the cold air nozzle 211, its structure is set to be circular, the nozzles are dispersedly arranged on its edge, and each nozzle is connected to a spiral air flow channel set inside it, see Figure 3 , thereby forming a rotating vortex near the cold air nozzle 211, thereby achieving the purpose of improving the cooling effect.

[0047] In summary, this embodiment, based on the core component of the turbine tube, provides a complete solution for hot gas demisting of the grinding wheel and wheel cover before cutting, and cold air cooling of the grinding wheel and workpiece during cutting. The primary consumption is compressed air, which can be purchased directly or produced with a self-provided air compressor. Similarly, air cooling significantly reduces costs compared to cryogenic gas jet cooling (such as liquid nitrogen or dry ice jet cooling). Furthermore, by utilizing both the cold and hot air from the vortex tube, there is no energy waste and the system can be used for other purposes, maximizing resource utilization.

[0048] Example 2

[0049] Considering the collection and treatment of the debris and dust generated by cutting, this embodiment is based on the embodiment 1, and a dust collection structure 30 is set beside the grinding wheel cover 210. Figure 4 The dust collection structure may adopt an existing structure, but this embodiment designs a dust collection structure different from the previous one.

[0050] The dust collecting structure 30 disclosed in this embodiment is as follows: Figure 5 As shown, it includes a dust collection tube 301 extending into the grinding wheel cover 210, a dust removal assembly 302 connected to the rear end of the dust collection tube 301, and a negative pressure assembly 303 connected to the dust removal assembly 302. The dust collection port of the dust collection tube 301 extending into the grinding wheel cover 210 is preferably flat, horizontally covering the cutting area; at the same time, the rotating vortex of the cold air nozzle 211 passes through the dust collection port, so that some debris and dust caught in the vortex can also be collected.

[0051] During the cutting operation, the negative pressure component 303 is activated to generate negative pressure in the dust suction pipe 301, and the debris and dust are sucked into the dust suction pipe 301, and the dust is adsorbed by the dust removal device 302. The dust removal component 302 here is the core component of the dust suction structure 30 and is also the main optimized part. Figure 6 、 Figure 7 As shown, it includes a circular dust removal shell and a rotating seat 3026 relatively fixed in the dust removal shell. The rotating seat 3026 is provided with 6 electrostatic plates 3021, and the electrostatic plates 3021 are radially arranged around the rotating seat 3026. The "relatively fixed" here is intended to be distinguished from "absolutely fixed". The rotating seat 3026 can rotate in the dust removal shell. Figure 6 The rotating seat driving motor 3025 shown in FIG is its driving source.

[0052] As the name suggests, electrostatic plates are charged with static electricity, allowing them to absorb dust. However, excessive dust absorption can affect the absorption effect. Therefore, in this embodiment, a scraper sleeve 3022 is slidably mounted on each electrostatic plate 3021. A scraper sleeve driver is positioned within the rotating base 3026, near the scraper sleeve 3022. One end of the scraper sleeve driver is connected to the scraper sleeve 3022, while the other end is fixed within the rotating base 3026. The scraper sleeve driver drives the scraper sleeve 3022 to slide along the electrostatic plate 3021, away from the rotating base 3026, thereby scraping dust off the electrostatic plate 3021.

[0053] The scraper sleeve driver can be disposed in a mounting groove provided inside the rotating base 3026. Regarding the scraper sleeve driver, the specific structure provided in this embodiment is as follows: it is composed of a first electromagnet 3023 and a second electromagnet 3024 disposed opposite each other, wherein the first electromagnet 3023 is fixedly connected to the scraper sleeve 3022, and the second electromagnet 3024 is fixed in the mounting groove.

[0054] When the first electromagnet 3023 and the second electromagnet 3024 are energized so that the magnetic polarities are the same, a repulsive force is generated, thereby driving the scraper sleeve 3022 to slide along the electrostatic plate 3021 in the direction away from the rotating seat 3026; when the first electromagnet 3023 and the second electromagnet 3024 are de-energized, the scraper sleeve 3022 needs to return to its position, so this embodiment fixes a reset spring between the scraper sleeve 3022 and the rotating seat 3026.

[0055] The dust scraped off by the scraper sleeve 3022 will gather at the bottom of the dust removal shell. In order to facilitate the disposal of the gathered dust,

[0056] In this embodiment, a dust collecting assembly 304 is connected below the dust removing assembly 302. Figure 5 . Dust collection assembly 304, such as Figure 8 As shown, the dust collecting system includes a dust collecting housing, a roller 3041 rotatably mounted within the dust collecting housing, and a dust collecting box 3042 slidably mounted within the dust collecting housing. The dust collecting housing is connected to the dust removal housing. After dust enters the dust collecting housing from the dust removal housing, it passes through the roller 3041 and falls into the dust collecting box 304. The rollers 3041 are arranged in pairs and move relative to each other under the drive of their respective roller drive motors 3043, facilitating the dust to fall into the dust collecting box 3042.

[0057] Of course, even though the dust removal component is provided, a small amount of dust may still overflow the dust removal component. To prevent dust from entering the negative pressure component 303, the present embodiment provides a filter component 305 between the dust removal component 302 and the negative pressure component 303. Figure 1 . Filter component 305, such as Figure 9As shown, it includes a filter mounting base 3054 fixed on the inner wall of the connecting pipe 306 and a filter 3051 arranged on the filter mounting base 3054. When a small amount of dust overflows the dust removal component, the filter component 305 can also block it to prevent it from entering the negative pressure component 303.

[0058] In order to facilitate the cleaning of dust on the filter 3051, a scraper 3052 is rotatably provided on the filter 3051 in this embodiment. The scraper 3052 is provided on the side facing the dust removal assembly 302 and moves in a circular motion along the surface of the filter 3051 with the center point of the filter 3051 as the center of the circle. The driving mechanism of the scraper 3052 is Figure 8 The scraper drive motor 3053 is shown.

[0059] Example 3

[0060] A grinding wheel dicing machine includes a cutting structure 10 and the grinding wheel dicing machine cooling structure 20 disclosed in Example 1 and / or Example 2.

[0061] The cutting structure 10, such as Figure 10 、 Figure 11 As shown, the grinding wheel 111 and the grinding wheel drive motor 104 are mounted on a U-shaped frame 101 for vertical sliding movement. The electric cylinder 113 is used to drive the mounting bracket of the grinding wheel drive motor to slide up and down within the U-shaped frame 101, thereby generating vertical movement of the grinding wheel 111. The grinding wheel 111 is positioned directly above the workpiece 109. The grinding wheel drive motor 104 drives the grinding wheel 111 to rotate, thereby achieving cutting of the workpiece 109 on the fixed plate 112. A first support plate 102 and a second support plate 103 are provided on the sides of the U-shaped frame 101, respectively used to accommodate the heat conversion unit 208 and the condenser 209.

[0062] In this embodiment, the horizontal position of the grinding wheel is fixed and only its vertical height is adjusted. The workpiece cutting position is achieved by horizontally adjusting the workpiece position. The solution for achieving horizontal adjustment of the workpiece is also relatively basic. This embodiment is briefly described as follows.

[0063] The workpiece 109 is placed on the fixed plate 112, and the position of the workpiece 109 is adjusted by the front-back, left-right and right-left horizontal movement of the fixed plate 112. The front-back, left-right and right-left horizontal movement is decomposed into front-back movement and left-right movement.

[0064] The forward and backward movement is achieved by a sliding frame 108 provided on the base 106 , and the fixed plate 112 is provided in the sliding frame 108 . The sliding frame 108 slides along the lead screw 107 under the drive of the lead screw motor 105 , thereby moving forward and backward relative to the base 106 .

[0065] The left and right movement is achieved by the fixed plate 112 sliding on the sliding frame 108 along the slide rail 110, see Figure 12A sensor 114 is provided beside the fixed disk 112 for monitoring the position of the fixed disk 112. Figure 12 In the specific structure shown in the figure, the sensor 114 is arranged on the vertical plate 115 next to the fixed plate 112. The bottom of the vertical plate 115 is fixedly connected to the drag box 116. Sliders 117 cooperating with the slide rails 110 are provided on both sides of the drag box. The fixed plate 112 is fixed on the drag box 116.

[0066] The grinding wheel dicing machine naturally also includes a control system, which includes a main controller, a human-computer interface, a storage module, a power module, etc. The human-computer interface is used to start and stop the equipment, open and close valves, and set some automated motion parameters, such as the horizontal position adjustment of the fixed plate 112, the up and down sliding distance of the grinding wheel 111, etc. The main controller is used to control the linkage operation of the entire equipment according to the set automation parameters. For example, after pressing the start button in the human-computer interface, the first valve 206 is automatically controlled to open, so that the hot air nozzle 212 heats and defogs the grinding wheel and the grinding wheel cover. After the heating and defog process is completed, the first valve 206 is closed, the second valve 207 is opened, and the grinding wheel drive motor 104 is started at the same time.

[0067] The control system is not shown in the figure, but can be optionally arranged on the U-shaped frame 101. The base 106 and the U-shaped frame 101 in this embodiment are based on Figure 9 The present invention is described in detail, and those skilled in the art can transform it into any other form, which is also within the meaning of this embodiment.

[0068] In addition, this embodiment can also be applied to a wafer dicing machine, wherein the workpiece 109 mounted on the fixed plate 112 is a wafer, the cutting part 10 is a wafer dicing machine, and the grinding wheel 111 is a wafer cutting blade.

Claims

1. A cooling structure (20) for a grinding wheel dicing machine, characterized in that: It comprises a vortex tube (202), an air intake assembly (201) connected to a nozzle of the vortex tube (202), a cold air nozzle (211) connected to the cold end of the vortex tube (202) via a cold air release pipe, and a hot air nozzle (212) connected to the hot end of the vortex tube (202) via a hot air release pipe, wherein the hot air release pipe and the cold air release pipe are respectively provided with a first valve (206) and a second valve (207); The cold air nozzle (211) is located above the workpiece (109) to be cut, close to the cutting position; the hot air nozzle (212) extends into the grinding wheel cover (210) and is located above the grinding wheel (111).

2. The cooling structure of the grinding wheel dicing machine according to claim 1, characterized in that: The cold air nozzle (211) is circular, with nozzles dispersedly arranged on its edge, and each nozzle is connected to a spiral air flow channel arranged inside it.

3. The cooling structure of the grinding wheel dicing machine according to claim 2, characterized in that: The cold end of the vortex tube (202) is further connected to a condenser (209), and the hot end of the vortex tube (202) is further connected to a heat converter (208).

4. A grinding wheel dicing machine, characterized in that: The cooling structure of the grinding wheel dicing machine according to claim 2 or 3 is included, and a dust collecting structure (30) is provided beside the grinding wheel cover (210); The dust suction structure (30) comprises a dust suction pipe (301) whose front end extends into the grinding wheel cover (210), a dust removal component (302) connected to the rear end of the dust suction pipe (301), and a negative pressure component (303) in communication with the dust removal component (302).

5. The grinding wheel dicing machine according to claim 4, characterized in that: The dust suction pipe (301) extends into the dust suction port of the grinding wheel cover (210) and is flat, covering the cutting area laterally.

6. The grinding wheel dicing machine according to claim 5, characterized in that: The dust removal assembly (302) comprises a circular dust removal shell, a rotating seat (3026) relatively fixed in the dust removal shell, the rotating seat (3026) being provided with a plurality of electrostatic plates (3021), and the electrostatic plates (3021) being radially arranged around the rotating seat (3026); Each electrostatic plate (3021) is provided with a scraping sleeve (3022) on a sliding sleeve, and a scraping sleeve driving member is provided inside the rotating seat (3026) near the scraping sleeve (3022). One end of the scraping sleeve driving member is connected to the scraping sleeve (3022), and the other end is fixed inside the rotating seat (3026). The scraping sleeve driving member drives the scraping sleeve (3022) to slide along the electrostatic plate (3021) in a direction away from the rotating seat (3026).

7. The grinding wheel dicing machine according to claim 6, characterized in that: The scraper sleeve driving member is arranged in a mounting groove provided inside the rotating seat (3026), and is composed of a first electromagnet (3023) and a second electromagnet (3024) arranged opposite to each other. The first electromagnet (3023) is fixedly connected to the scraper sleeve (3022), and the second electromagnet (3024) is fixed in the mounting groove. A return spring is fixed between the scraper sleeve (3022) and the rotating seat (3026). The first electromagnet (3023) and the second electromagnet (3024) are energized so that their magnetic polarities are the same, thereby generating a repulsive force, driving the scraper sleeve (3022) to slide along the electrostatic plate (3021) in a direction away from the rotating seat (3026).

8. The grinding wheel dicing machine according to claim 7, characterized in that: A filter assembly (305) is provided between the dust removal assembly (302) and the negative pressure assembly (303). The filter assembly (305) comprises a filter screen mounting seat (3054) fixed on the inner wall of the connecting pipe (306) and a filter screen (3051) provided on the filter screen mounting seat (3054).

9. The grinding wheel dicing machine according to claim 8, characterized in that: A scraper (3052) is rotatably provided on the filter (3051). The scraper (3052) is provided on a side facing the dust removal component (302) and moves in a circular motion along the surface of the filter (3051) with the center point of the filter (3051) as the center of the circle.

10. The grinding wheel dicing machine according to any one of claims 6 to 9, characterized in that: A dust collecting assembly (304) is connected below the dust removing assembly (302), and the dust collecting assembly (304) comprises a dust collecting shell, a roller (3041) rotatably mounted in the dust collecting shell, and a dust collecting box (3042) slidably mounted in the dust collecting shell; The dust collecting housing is connected to the dust removal housing. After the dust enters the dust collecting housing from the dust removal housing, it passes through the roller (3041) and falls into the dust collecting box (3042).

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