Silicon carbide multi-wire cutting water-based mortar liquid and preparation method thereof
Patent Information
- Application Number
- CN202510628946.0
- Authority / Receiving Office
- CN · China
- Patent Type
- Applications(China)
- Current Assignee / Owner
- Filing Date
- 2025-05-16
- Publication Date
- 2025-08-15
Smart Images
Figure CN120484869A_ABST
Abstract
Description
Technical Field
[0001] The present invention relates to the technical field of silicon carbide cutting, and in particular to a silicon carbide multi-wire cutting water-based mortar liquid and a preparation method thereof. Background Art
[0002] Silicon carbide wafer is a compound semiconductor single crystal material composed of two elements, carbon and silicon. It has the characteristics of large bandgap, high thermal conductivity, high critical breakdown field strength, and high electron saturation drift rate. It can effectively break through the physical limits of traditional silicon-based semiconductor devices and their materials, and develop a new generation of semiconductor devices that are more adaptable to high voltage, high temperature, high power, high frequency and other conditions.
[0003] Currently, the mainstream method for cutting silicon carbide is slurry wire cutting (free abrasive wire cutting). Slurry wire cutting involves a high-speed reciprocating cutting wire. Cutting fluid is sprayed between the crystal ingot and the cutting wire. The high-speed movement of the cutting wire carries the abrasive to the processing area, achieving the desired cut. The wire cutting fluid for slurry wire cutting primarily consists of an oil-based fluid and diamond powder. The fluid provides both powder dispersion and transport. After the diamond powder is dispersed in the fluid, it is evenly distributed across the steel wire as the fluid moves. The silicon carbide is cut through a rolling-indentation mechanism between the free abrasive particles in the cutting fluid and the workpiece.
[0004] However, the commonly used wire cutting fluid is oily mortar. Traditional oily mortar (using mineral oil or polyethylene glycol as solvent) has the following defects: it is difficult to clean and requires the use of organic solvents, which is costly and pollutes the environment; it has poor suspension stability, is easy to stratify, and requires frequent stirring, which affects cutting uniformity.
[0005] Therefore, the present application proposes a water-based mortar for silicon carbide multi-wire cutting that uses an aqueous solvent instead of an oily system and a preparation method thereof to reduce the cost of the mortar, and only requires clean water or low-concentration alkaline solution for cleaning, reducing wastewater treatment costs. Summary of the Invention
[0006] The purpose of the present invention is to solve the problems in the prior art and to propose a silicon carbide multi-wire cutting water-based mortar and a preparation method thereof.
[0007] In order to achieve the above object, the present invention adopts the following technical solutions: A water-based slurry for multi-wire cutting of silicon carbide comprises, by weight percentage, 3% to 9% of diamond micropowder, 10% to 15% of a suspending agent, 2% to 10% of a dispersant, 6% to 15% of a lubricant, and the balance being a solvent.
[0008] In some embodiments, the particle size requirements of the diamond powder are D50=6-8um, D10>4um, and D90<10um.
[0009] In some embodiments, the dispersant is polyethylene glycol, and the molecular weight of the polyethylene glycol is between 200 and 600.
[0010] In some embodiments, the solvent is deionized water.
[0011] The present invention also provides a method for preparing a water-based mortar for multi-wire cutting of silicon carbide, comprising the following steps: S1: Prepare a mortar using an automatic mixing device. Divide the deionized water into two parts at a ratio of 80% and 20%, add a lubricant and a dispersant to the 80% deionized water, and pour the mixture into a mixing barrel and stir at a speed of 300-400 rpm for 1-2 hours to form a uniform base liquid A. S2: adjusting the stirring speed of the uniform base liquid A to between 400 and 600 rpm, continuing to stir the uniform base liquid A, then adding the suspending agent, stirring for 1 to 2 hours to form a uniform base liquid B; S3: Add another 20% deionized water and the diamond powder into the transfer barrel at the same time, and stir with an ultrasonic stirrer for 15 to 30 minutes to form a uniform base liquid C; S4: adjusting the stirring speed of the uniform base liquid B to 400-800 rpm, continuing to stir the uniform base liquid B, pouring the uniform base liquid C into the uniform base liquid B, and continuing to stir for 1-2 hours to ensure that the particles are fully dispersed into the finished product.
[0012] In some embodiments, the automatic mixing device includes a mixing barrel and an ultrasonic agitator arranged on one side of the mixing barrel, the ultrasonic agitator is installed on the surface of the mounting frame through a lifting structure, the surface of the mounting frame is provided with a movable plate for driving the transfer barrel to move, and the side of the mixing barrel close to the ultrasonic agitator is provided with a flipping component for driving the transfer barrel to pour the uniform base liquid C into the mixing barrel.
[0013] In some embodiments, the flip assembly includes a flip plate hinged to the side of the mixing barrel and a second transmission assembly that drives the flip plate to rotate, and the upper end of the flip plate is hinged to the side of the mixing barrel.
[0014] In some embodiments, the transfer barrel is mounted on the surface of the flip plate via a positioning sleeve and a positioning rod.
[0015] In some embodiments, the transfer barrel is installed on the surface of the movable plate through two sets of limiting components, and the two sets of limiting components are symmetrically arranged on the front and back surfaces of the transfer barrel. The limiting components include a connecting ring fixed on the surface of the transfer barrel and a connecting rod fixed on the surface of the movable plate. The connecting rod limits the position of the connecting ring through a block and a limiting ring.
[0016] In some embodiments, a feed port is provided on the upper surface of the mixing barrel for pouring the base liquid C uniformly into the transfer barrel. A cover plate is hinged to the side of the feed port away from the transfer barrel through a rotating shaft. The cover plate is automatically separated from the feed port by a torsion spring. Two pull ropes are symmetrically fixed to the end of the cover plate away from the torsion spring for pulling the cover plate to close the feed port.
[0017] Compared with the prior art, the present invention provides a silicon carbide multi-wire cutting water-based mortar and a preparation method thereof, which have the following beneficial effects.
[0018] 1. In the present invention, the suspending agent and dispersant form a stable "suspension-dispersion" system to ensure long-term uniform distribution of diamond powder. The lubricant + aqueous solvent reduces friction while avoiding oily residue and simplifies the post-cleaning process.
[0019] 2. The present invention adopts a step-by-step mixing process to first disperse the lubricant and suspending agent to prevent the diamond powder from directly contacting the high-viscosity liquid and causing agglomeration. The diamond powder is then added and stirred at high speed to ensure that the particles are fully wetted and dispersed.
[0020] Other advantages, objects and features of the present invention will be described in part in the following description; and in part will be apparent to those skilled in the art based on an examination of the following; or may be taught from the practice of the invention. BRIEF DESCRIPTION OF THE DRAWINGS
[0021] Figure 1 It is a preparation flow chart of the present invention.
[0022] Figure 2 It is a schematic diagram of the positive axial structure of the present invention.
[0023] Figure 3 It is a schematic structural diagram of the transfer barrel in the present invention.
[0024] Figure 4 It is a structural schematic diagram of the first transmission assembly in the present invention.
[0025] Figure 5 This is a schematic structural diagram of the state in which the transfer barrel is installed on the turning assembly in the present invention.
[0026] Figure 6 This is a schematic structural diagram of the state of pouring mixed liquid C from the transfer barrel in the present invention.
[0027] Figure 7 For the present invention Figure 1 Schematic diagram of the structure enlarged at point A.
[0028] Figure 8 For the present invention Figure 4 Schematic diagram of the structure enlarged at point B.
[0029] Figure 9 This is a schematic cross-sectional view of the transfer barrel of the present invention when pouring the mixed liquid C.
[0030] Figure 10 Schematic diagram of the structure of the cover plate in the present invention.
[0031] Figure 11 It is a schematic diagram of the lateral axial structure of the present invention.
[0032] In the picture: 1. Mixing barrel; 101. Mixing rod; 2. Ultrasonic agitator; 201. Lifting mechanism; 3. Transfer barrel; 301. Baffle; 302. First guide plate; 4. Moving plate; 401. First transmission assembly; 5. Turning assembly; 501. Turning plate; 502. Second transmission assembly; 5021. Guide rod; 5022. Slider; 5023. Hydraulic rod; 5024. Support rod; 503. Support pad; 6. Positioning Sleeve; 7. Positioning rod; 8. Limiting assembly; 801. Connecting ring; 802. Connecting rod; 803. Stop block; 804. Push rod; 805. Limiting ring; 9. Feed inlet; 10. Cover plate; 1001. Torsion spring; 1002. Pull rope; 1003. Stop bar; 11. Second guide plate; 12. Dispersion plate; 13. Storage barrel; 1301. Weighing sensor; 1302. Discharge pipe; 14. Mounting bracket. DETAILED DESCRIPTION
[0033] The technical solutions in the embodiments of the present invention will be clearly and completely described below in conjunction with the drawings in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, rather than all the embodiments.
[0034] Reference Figure 1-11 A water-based slurry for multi-wire cutting of silicon carbide, comprising, by weight percentage, 3% to 9% of diamond powder, 10% to 15% of a suspending agent, 2% to 10% of a dispersant, 6% to 15% of a lubricant, and the balance being a solvent; Among them, the particle size requirements of diamond micropowder are D50=6~8um, D10>4um, and D90<10um.
[0035] Wherein, the suspending agent is one or a combination of sodium alginate, hydroxymethyl propyl cellulose and fumed silica.
[0036] The dispersant is polyethylene glycol, and the molecular weight of the polyethylene glycol is between 200 and 600.
[0037] Wherein, the lubricant is one or a combination of glycerol, triethanolamine oleate, and polyether modified silicone oil.
[0038] Wherein, the solvent is deionized water.
[0039] It is understandable that diamond micropowder is used as the core cutting medium, and its ultra-high hardness is used to grind and cut silicon carbide crystal rods. Its median particle size is controlled at 6-8um, which can balance cutting efficiency and surface quality. Too coarse particles can easily lead to edge collapse, while too fine particles will lead to insufficient cutting force. 10% of the particles are controlled to have a size greater than 4um, and 90% of the particles are controlled to have a size less than 10um to avoid fine powder agglomeration or coarse particle sedimentation, thus ensuring the long-term stability of the cutting fluid. Suspending agents can prevent diamond particles from settling, maintain uniform dispersion in the slurry, and form a three-dimensional network through hydrogen bonds or van der Waals forces to lock diamond particles, resist centrifugal and shear forces during the cutting process, and reduce the risk of delamination. Dispersants can reduce particle agglomeration, promote the uniform distribution of diamond powder in the liquid phase, adsorb on the particle surface, reduce interfacial tension, and avoid aggregation caused by van der Waals forces; Lubricants can reduce cutting friction, protect the wafer surface and reduce edge collapse, form a lubricating film, reduce frictional heat between diamond and wafer, and prevent local high temperature from causing wafer damage; Deionized water is used as the solvent, replacing traditional oil-based solvents (mineral oil / polyethylene glycol). The aqueous system has low raw material costs, and only clean water or weak alkaline solution is required for cleaning, making waste liquid treatment simple. The mortar viscosity can be adjusted by adjusting the ratio of suspending agent to water to meet the process requirements of multi-wire cutting machines. Suspending agent and dispersing agent form a stable "suspension-dispersion" system to ensure long-term uniform distribution of diamond powder. Lubricant + aqueous solvent: reduce friction while avoiding oily residue and simplify the post-cleaning process.
[0040] The present invention also provides a method for preparing a water-based mortar for multi-wire cutting of silicon carbide, comprising the following steps: S1: Prepare mortar using an automatic mixing device. First, add a suspending agent to the storage barrel 13, then divide deionized water into two parts at a ratio of 80% and 20%. Add lubricant and dispersant to the 80% deionized water, and pour it into the mixing barrel 1 and stir at a speed of 300-400 rpm for 1-2 hours to form a uniform base liquid A. S2: Adjust the stirring speed of the uniform base liquid A to between 400 and 600 rpm, continue stirring the uniform base liquid A, and then slowly add the suspending agent through the discharge pipe 1302 of the storage barrel 13, stirring for 1 to 2 hours to form a uniform base liquid B; S3: Add another 20% deionized water and diamond powder into the transfer barrel 3 at the same time, and stir with the ultrasonic stirrer 2 for 15 to 30 minutes to form a uniform base liquid C; S4: Adjust the stirring speed of the uniform base liquid B to 400-800 rpm, continue stirring the uniform base liquid B, pour the uniform base liquid C into the uniform base liquid B through the flip component 5, and continue stirring for 1-2 hours to ensure that the particles are fully dispersed into the finished product.
[0041] It can be understood that by adopting a step-by-step mixing process, the lubricant and suspending agent are first dispersed to prevent the diamond micropowder from directly contacting the high-viscosity liquid and causing agglomeration, and then the diamond micropowder is added and stirred at high speed to ensure that the particles are fully wetted and dispersed.
[0042] Specifically, the automatic mixing device includes a mixing barrel 1 and an ultrasonic agitator 2 arranged on one side of the mixing barrel 1, the ultrasonic agitator 2 is mounted on the surface of the mounting frame 14 through a lifting structure 201, and the end of the mounting frame 14 away from the ultrasonic agitator 2 is fixedly connected to the mixing barrel 1, the ultrasonic agitator 2 and the lifting structure 201 are both prior art, so they are not described in detail. A movable plate 4 is provided on the surface of the mounting frame 14 for driving the transfer barrel 3 to move, and the movable plate 4 slides horizontally on the surface of the mounting frame 14. The movable plate 4 is driven to move by a first transmission assembly 401. A flip assembly 5 is provided on the side of the mixing barrel 1 close to the ultrasonic agitator 2 for driving the transfer barrel 3 to pour the uniform base liquid C into the mixing barrel 1, and a storage barrel 13 for automatically adding a suspending agent to the mixing barrel 1 is provided on the surface of the mixing barrel 1; The top of the transfer barrel 3 is an open structure. A baffle 301 is fixed to the top of the transfer barrel 3. The baffle 301 divides the top of the transfer barrel 3 into a feeding port and a discharging port of different sizes. The discharging port is smaller than the feeding port and is located on the side close to the mixing barrel 1. A first guide plate 302 is fixed to the side of the discharging port close to the mixing barrel 1. The first transmission assembly 401 includes a threaded column rotating on the bottom of the mounting frame 14 and a moving block threadedly connected to the surface of the threaded column. The moving block is fixed to the lower surface of the moving plate 4. The surface of the mounting frame 14 is provided with a through groove for the moving block to slide. The threaded column is driven to rotate by a driving motor. The flipping assembly 5 includes a flip plate 501 hinged on the side of the mixing barrel 1 and a second transmission assembly 502 that drives the flip plate 501 to rotate. The upper end of the flip plate 501 is hinged on the side of the mixing barrel 1. Two support pads 503 for supporting the transfer barrel 3 are fixed on the side of the flip plate 501 close to the ultrasonic agitator 2. There are two groups of second transmission assemblies 502, which are symmetrically arranged on the side of the flip plate 501. The second transmission assembly 502 includes a guide rod 5021 vertically fixed on the surface of the mounting frame 14 and a slider 5022 sliding on the surface of the guide rod 5021. The slider 5022 is hinged to a support rod 5024 on the side close to the flip plate 501. The upper end of the support rod 5024 is hinged on the side of the flip plate 501. The support rod 5024 is tilted between the guide rail and the flip plate 501. The slider 5022 is driven to slide by a hydraulic rod 5023, and the hydraulic rod 5023 is fixed on the surface of the mounting frame 14.
[0043] It is understandable that since the preparation method of the mortar liquid requires multiple additions and multiple stirrings, and the stirring time is long, in order to reduce the steps of manual operation, an automatic mixing device is designed. By adding 80% of deionized water into the stirring barrel 1, and adding lubricant and dispersant, stirring is performed to obtain a uniform base liquid A, and at the same time, another 20% deionized water and diamond powder are added to the transfer barrel 3, and placed under the ultrasonic agitator 2 to wait for stirring; a suspending agent is added to the stirring barrel 1 through the storage barrel 13 and mixed with the uniform base liquid A, and stirred again to obtain a uniform base liquid B, and within 30 minutes before obtaining the uniform base liquid B, the ultrasonic agitator 2 is started to stir the diamond powder in the transfer barrel 3 to obtain a uniform base liquid C, so that the uniform The uniform base liquid B and the uniform base liquid C are completed synchronously, and then the ultrasonic agitator 2 is driven to rise by the lifting structure 201 and separated from the transfer barrel 3, and the moving block is driven to move by the threaded column, thereby driving the moving plate 4 and the transfer barrel 3 to move toward the mixing barrel 1. After the transfer barrel 3 hits the surface of the flip plate 501, the slider 5022 is driven to rise by the hydraulic rod 5023, so that the support rod 5024 automatically adjusts the angle, thereby driving the flip plate 501 and the transfer barrel 3 to rotate, so that the uniform base liquid C in the transfer barrel 3 is automatically poured into the mixing barrel 1 for stirring to obtain a finished water-based mortar liquid; by preparing each component in advance, after the mixing work begins, the steps of manual operation are reduced, thereby reducing manual labor intensity and improving mixing efficiency.
[0044] Specifically, the transfer barrel 3 is installed on the surface of the flip plate 501 through the positioning sleeve 6 and the positioning rod 7. Multiple positioning sleeves 6 are symmetrically fixed on the front and back surfaces of the transfer barrel 3, and multiple positioning rods 7 are symmetrically fixed on the side of the flip plate 501 close to the transfer barrel 3.
[0045] It can be understood that when the movable plate 4 drives the transfer barrel 3 to contact the surface of the flip plate 501, multiple positioning rods 7 are inserted into multiple positioning sleeves 6. When the flip plate 501 drives the transfer barrel 3 to flip, the transfer barrel 3 can be lifted and flipped by the multiple positioning rods 7. During the flipping process, the transfer barrel 3 is limited by the multiple positioning rods 7 and always contacts the surface of the flip plate 501, so as to achieve quick installation while preventing the transfer barrel 3 from being separated from the flip plate 501.
[0046] Specifically, the transfer barrel 3 is installed on the surface of the movable plate 4 through two sets of limit assemblies 8, and the two sets of limit assemblies 8 are symmetrically arranged on the front and back surfaces of the transfer barrel 3. The limit assemblies 8 include a connecting ring 801 fixed on the surface of the transfer barrel 3 and a connecting rod 802 fixed on the surface of the movable plate 4. The connecting rod 802 is L-shaped, and a stopper 803 is vertically slid inside the connecting rod 802. A limit ring 805 is fixed on the surface of the connecting rod 802. When the connecting ring 801 is inserted into the surface of the connecting rod 802, the connecting ring 801 is located between the stopper 803 and the limit ring 805. A spring for pushing the stopper 803 upward is fixed at the bottom of the stopper 803. The stopper 803 is U-shaped, and the stopper 803 is retracted inside the connecting rod 802 by the push rod 804 and disengaged from the connecting ring 801. The push rod 804 is fixed to the lower surface of the positioning rod 7 located at a low position.
[0047] It can be understood that when the transfer barrel 3 is placed on the surface of the movable plate 4, the transfer barrel 3 is pushed to move, so that the connecting ring 801 is inserted into the surface of the connecting rod 802, so that the connecting ring 801 is located between the stop block 803 and the limiting ring 805, and the connecting ring 801 and the transfer barrel 3 are limited by the stop block 803 and the limiting ring 805, so as to avoid the transfer barrel 3 from being displaced on the surface of the movable plate 4 due to inertia when the movable plate 4 drives the transfer barrel 3 to move, causing the position of the transfer barrel 3 to deviate and affect its use; when the movable plate 4 drives the transfer barrel 3 to contact the flip plate 501 When the transfer barrel 3 is on the surface, the push rod 804 hits the top of the stop block 803, pressing the stop block 803 into the inside of the connecting rod 802. At this time, the movable plate 4 continues to slide toward the direction of the mixing barrel 1 for a distance, so that the connecting rod 802 is disengaged from the connecting ring 801, avoiding it affecting the flipping of the transfer barrel 3; and when the transfer barrel 3 is flipped and reset, the movable plate 4 moves toward the direction of the ultrasonic agitator 2, so that the connecting rod 802 is inserted into the connecting ring 801 again, and the transfer barrel 3 is pushed to move through the limit ring 805, and the transfer barrel 3 is removed from the surface of the positioning rod 7.
[0048] Specifically, a feeding port 9 for pouring the uniform base liquid C from the transfer barrel 3 is provided on the upper surface of the mixing barrel 1. A cover plate 10 is hingedly connected to the side of the feeding port 9 away from the transfer barrel 3 through a rotating shaft. The cover plate 10 cooperates with the feeding port 9. A torsion spring 1001 is sleeved on the surface of the rotating shaft for driving the cover plate 10 to automatically separate from the feeding port 9. Two pull ropes 1002 are symmetrically fixed to one end of the cover plate 10 away from the torsion spring 1001. The other ends of the two pull ropes 1002 are respectively fixed to the surfaces of two positioning rods 7 located at a high position. A baffle 1003 is provided on the side of the cover plate 10 facing the feeding port 9. The baffle 1003 is used to block the end of the cover plate 10 close to the rotating shaft and both sides of the cover plate 10, so as to facilitate the uniform base liquid C splashed onto the surface of the cover plate 10 to flow into the mixing barrel 1 again; A stirring rod 101 is provided in the middle of the mixing barrel 1, and the stirring rod 101 is driven to rotate by a driving motor. A second guide plate 11 is fixed to the inner wall of the mixing barrel 1. The second guide plate 11 is located below the feed port 9 and is tilted. The downwardly tilted end of the second guide plate 11 is arranged toward the stirring rod 101. A dispersion disk 12 is fixed on the surface of the stirring rod 101. The dispersion disk 12 is conical and is located below the second guide plate 11. The second guide plate 11 is used to guide the uniform base liquid C poured from the transfer barrel 3 to the surface of the dispersion disk 12.
[0049] It can be understood that by providing the cover plate 10, when the mixing barrel 1 is stirring, the cover plate 10 closes the feed port 9 to prevent the liquid from splashing out of the mixing barrel 1 during stirring, or foreign matter from falling into the mixing barrel 1 through the feed port 9. When the flip plate 501 drives the transfer barrel 3 to flip upward, the positioning rod 7 flips upward and approaches the feed port 9, so that the pull rope 1002 is relaxed, and the cover plate 10 is automatically opened under the action of the torsion spring 1001. The transfer barrel 3 pours the uniform base liquid C into the mixing barrel 1 through the discharge port. Under the action of the baffle 301, the discharge speed of the uniform base liquid C is controlled. Under the action of the second guide plate 11, it is diverted to the surface of the dispersion disk 12. The uniform base liquid C is dispersed into the interior of the mixing barrel 1 through the rotation of the dispersion disk 12, so that it is quickly mixed with the uniform base liquid B. When the flip plate 501 is reset, the positioning rod 7 is away from the feed port 9, and the pull rope 1002 drives the cover plate 10 to close the feed port 9.
[0050] Specifically, the storage barrel 13 is installed on the surface of the mixing barrel 1 through a fixing frame, and multiple weighing sensors 1301 are arranged between the storage barrel 13 and the fixing frame. A discharge pipe 1302 is arranged at the bottom of the storage barrel 13, and the other end of the discharge pipe 1302 is connected to the mixing barrel 1, and an electromagnetic valve is arranged on the surface of the discharge pipe 1302.
[0051] It can be understood that when it is necessary to add suspending agent, the solenoid valve is opened, so that the suspending agent is added into the mixing barrel 1 through the discharge pipe 1302, and the remaining weight of the storage barrel 13 is detected by the weighing sensor 1301. When the weight of the storage barrel 13 is reduced by the preset value, it indicates that enough suspending agent has been added, and the solenoid valve is closed. Since the specific gravity of the added suspending agent is relatively small, after adding the suspending agent to the storage barrel 13, it can be used multiple times, avoiding the need to add suspending agent to the storage barrel 13 every time the mortar liquid is prepared.
[0052] Example 1: This embodiment provides a water-based slurry for multi-wire cutting of silicon carbide. Unlike the above embodiment, the slurry comprises, by weight percentage, 5% diamond powder, 10% suspending agent, 5% dispersant, 6% lubricant, and the balance deionized water. Wherein, the suspending agent is sodium alginate.
[0053] The dispersant is polyethylene glycol, and the molecular weight of the polyethylene glycol is 400.
[0054] Wherein, the lubricant is glycerin.
[0055] This embodiment also provides a method for preparing a water-based mortar for multi-wire cutting of silicon carbide, comprising the following steps: S1: Prepare mortar using an automatic mixing device. First, add a suspending agent to the storage barrel 13, then divide deionized water into two parts at a ratio of 80% and 20%. Add lubricant and dispersant to the 80% deionized water, pour it into the mixing barrel 1, and stir at 300 rpm for 1 hour to form a uniform base liquid A. S2: Adjust the stirring speed of the uniform base liquid A to 500 rpm, continue stirring the uniform base liquid A, and then slowly add the suspending agent through the discharge pipe 1302 of the storage barrel 13, and stir for 1.5 hours to form a uniform base liquid B; S3: Add another 20% of deionized water and diamond powder into the transfer barrel 3 at the same time, and stir with the ultrasonic stirrer 2 for 20 minutes to form a uniform base liquid C; S4: Adjust the stirring speed of the uniform base liquid B to 600 rpm, continue stirring the uniform base liquid B, pour the uniform base liquid C into the uniform base liquid B through the flip component 5, and continue stirring for 2 hours to ensure that the particles are fully dispersed into the finished product.
[0056] Example 2: This embodiment provides a water-based slurry for multi-wire cutting of silicon carbide. Unlike the above embodiment, the slurry comprises, by weight percentage, 7% diamond powder, 15% suspending agent, 8% dispersant, 10% lubricant, and the balance deionized water. Among them, the suspending agent is hydroxymethylpropyl cellulose.
[0057] The dispersant is polyethylene glycol, and the molecular weight of the polyethylene glycol is 600.
[0058] Wherein, the lubricant is triethanolamine oleate.
[0059] This embodiment also provides a method for preparing a water-based mortar for multi-wire cutting of silicon carbide, comprising the following steps: S1: Prepare mortar using an automatic mixing device. First, add a suspending agent to the storage barrel 13, then divide deionized water into two parts at a ratio of 80% and 20%. Add lubricant and dispersant to the 80% deionized water, pour it into the mixing barrel 1, and stir at 400 rpm for 1.2 hours to form a uniform base liquid A. S2: Adjust the stirring speed of the uniform base liquid A to 550 rpm, continue stirring the uniform base liquid A, and then slowly add the suspending agent through the discharge pipe 1302 of the storage barrel 13, stirring for 2 hours to form a uniform base liquid B; S3: Add another 20% of deionized water and diamond powder into the transfer barrel 3 at the same time, and stir with the ultrasonic stirrer 2 for 20 minutes to form a uniform base liquid C; S4: Adjust the stirring speed of the uniform base liquid B to 700 rpm, continue stirring the uniform base liquid B, pour the uniform base liquid C into the uniform base liquid B by turning the component 5, and continue stirring for 1.5 hours to ensure that the particles are fully dispersed into the finished product.
[0060] Example 3: This embodiment provides a water-based slurry for multi-wire cutting of silicon carbide. Unlike the above embodiment, the slurry comprises, by weight percentage, 4% diamond powder, 12% suspending agent, 3% dispersant, 15% lubricant, and the balance deionized water. Wherein, the suspending agent is fumed silica.
[0061] The dispersant is polyethylene glycol, and the molecular weight of the polyethylene glycol is 200.
[0062] Wherein, the lubricant is polyether modified silicone oil.
[0063] This embodiment also provides a method for preparing a water-based mortar for multi-wire cutting of silicon carbide, comprising the following steps: S1: Prepare mortar using an automatic mixing device. First, add a suspending agent to the storage barrel 13, then divide deionized water into two parts at a ratio of 80% and 20%. Add lubricant and dispersant to the 80% deionized water, pour it into the mixing barrel 1, and stir at 350 rpm for 1 hour to form a uniform base liquid A. S2: Adjust the stirring speed of the uniform base liquid A to 450 rpm, continue stirring the uniform base liquid A, and then slowly add the suspending agent through the discharge pipe 1302 of the storage barrel 13, and stir for 2 hours to form a uniform base liquid B; S3: Add another 20% deionized water and diamond powder into the transfer barrel 3 at the same time, and stir with the ultrasonic stirrer 2 for 25 minutes to form a uniform base liquid C; S4: Adjust the stirring speed of the uniform base liquid B to 700 rpm, continue stirring the uniform base liquid B, pour the uniform base liquid C into the uniform base liquid B through the flip component 5, and continue stirring for 2 hours to ensure that the particles are fully dispersed into the finished product.
[0064] Comparative Example: This comparative example provides a water-based slurry for multi-wire cutting of silicon carbide. Different from the above embodiment, it comprises, by weight percentage, 3% diamond powder, 10% suspending agent, 10% lubricant, and the balance is deionized water. Wherein, the suspending agent is fumed silica.
[0065] Wherein, the lubricant is polyether modified silicone oil.
[0066] This comparative example also provides a method for preparing a water-based mortar for multi-wire cutting of silicon carbide, comprising the following steps: S1: Prepare mortar using an automatic mixing device. First, add a suspending agent to the storage barrel 13, then divide deionized water into two parts at a ratio of 80% and 20%. Add lubricant to the 80% deionized water, pour it into the mixing barrel 1, and stir at 300 rpm for 1 hour to form a uniform base liquid A. S2: Adjust the stirring speed of the uniform base liquid A to 500 rpm, continue stirring the uniform base liquid A, and then slowly add the suspending agent through the discharge pipe 1302 of the storage barrel 13, and stir for 2 hours to form a uniform base liquid B; S3: Add another 20% of deionized water and diamond powder into the transfer barrel 3 at the same time, and stir with the ultrasonic stirrer 2 for 20 minutes to form a uniform base liquid C; S4: Adjust the stirring speed of the uniform base liquid B to 600 rpm, continue stirring the uniform base liquid B, pour the uniform base liquid C into the uniform base liquid B through the flip component 5, and continue stirring for 2 hours to ensure that the particles are fully dispersed into the finished product.
[0067] The comparison results of the embodiment and the comparative example are shown in the following table: The results show that replacing the oily system with an aqueous solvent reduces the cost of the liquid, and only clean water or low-concentration alkali solution is required for cleaning, which reduces the cost of wastewater treatment. Among them, Example 1 has the best suspension, while Example 2 has the best cutting uniformity and edge chipping rate. After the dispersant is removed, the thickness uniformity and suspension performance of the cut wafers are significantly reduced.
[0068] The above description is only a preferred specific embodiment of the present invention, but the scope of protection of the present invention is not limited thereto. Any technician familiar with the technical field, within the technical scope disclosed by the present invention, who makes equivalent replacements or changes based on the technical solution and inventive concept of the present invention, should be covered by the scope of protection of the present invention.
[0069] In the description of this specification, the reference terms "one embodiment", "some embodiments", "example", "specific example", or "some examples" mean that the specific features, structures, materials or characteristics described in conjunction with the embodiment or example are included in at least one embodiment or example of the present invention. In this specification, the schematic representations of the above terms do not necessarily refer to the same embodiment or example. Moreover, the specific features, structures, materials or characteristics described can be combined in any one or more embodiments or examples in a suitable manner. In addition, those skilled in the art can combine and combine different embodiments or examples described in this specification and features of different embodiments or examples without contradiction.
[0070] Although the embodiments of the present invention have been shown and described above, it will be understood that the above embodiments are illustrative and are not to be construed as limitations on the present invention. A person skilled in the art may change, modify, replace and modify the above embodiments within the scope of the present invention.
Claims
1. A water-based mortar for silicon carbide multi-wire cutting, characterized in that: The composition comprises, by weight percentage, 3% to 9% of diamond micropowder, 10% to 15% of suspending agent, 2% to 10% of dispersing agent, 6% to 15% of lubricant, and the balance being solvent.
2. The water-based mortar for silicon carbide multi-wire cutting according to claim 1, characterized in that: The particle size requirements of the diamond micropowder are D50=6~8um, D10>4um, and D90<10um.
3. The water-based mortar for silicon carbide multi-wire cutting according to claim 1, characterized in that: The dispersant is polyethylene glycol, and the molecular weight of the polyethylene glycol is between 200 and 600.
4. The water-based mortar for silicon carbide multi-wire cutting according to claim 1, characterized in that: The solvent is deionized water.
5. The method for preparing a water-based mortar for multi-wire cutting of silicon carbide according to any one of claims 1 to 3, characterized in that: The following steps are involved: S1: Prepare mortar using an automatic mixing device, divide the deionized water into two parts according to the ratio of 80% and 20%, add lubricant and dispersant to the deionized water in the ratio of 80%, pour into the mixing barrel (1) and stir at a speed of 300-400 rpm for 1-2 hours to form a uniform base liquid A; S2: adjusting the stirring speed of the uniform base liquid A to between 400 and 600 rpm, continuing to stir the uniform base liquid A, then adding the suspending agent, stirring for 1 to 2 hours to form a uniform base liquid B; S3: Add another 20% of deionized water and the diamond powder into the transfer barrel (3) at the same time, and stir with an ultrasonic stirrer (2) for 15 to 30 minutes to form a uniform base liquid C; S4: adjusting the stirring speed of the uniform base liquid B to 400-800 rpm, continuing to stir the uniform base liquid B, pouring the uniform base liquid C into the uniform base liquid B, and continuing to stir for 1-2 hours to ensure that the particles are fully dispersed into the finished product.
6. The method for preparing a water-based mortar for multi-wire cutting of silicon carbide according to claim 5, characterized in that: The automatic mixing device comprises a mixing barrel (1) and an ultrasonic stirrer (2) arranged on one side of the mixing barrel (1); the ultrasonic stirrer (2) is mounted on the surface of a mounting frame (14) via a lifting structure (201); a movable plate (4) for driving the transfer barrel (3) to move is provided on the surface of the mounting frame (14); and a flip assembly (5) for driving the transfer barrel (3) to pour a uniform base liquid C into the mixing barrel (1) is provided on the side of the mixing barrel (1) close to the ultrasonic stirrer (2).
7. The method for preparing a water-based mortar for multi-wire cutting of silicon carbide according to claim 6, characterized in that: The flip assembly (5) comprises a flip plate (501) hinged to the side of the mixing barrel (1) and a second transmission assembly (502) for driving the flip plate (501) to rotate. The upper end of the flip plate (501) is hinged to the side of the mixing barrel (1).
8. The method for preparing a water-based mortar for multi-wire cutting of silicon carbide according to claim 6, characterized in that: The transfer barrel (3) is mounted on the surface of the flip plate (501) via a positioning sleeve (6) and a positioning rod (7).
9. The method for preparing a water-based mortar for multi-wire cutting of silicon carbide according to claim 6, characterized in that: The transfer barrel (3) is mounted on the surface of the movable plate (4) via two sets of position-limiting assemblies (8), the two sets of position-limiting assemblies (8) being symmetrically arranged on the front and back surfaces of the transfer barrel (3), the position-limiting assemblies (8) comprising a connecting ring (801) fixed on the surface of the transfer barrel (3) and a connecting rod (802) fixed on the surface of the movable plate (4), the connecting rod (802) limiting the position of the connecting ring (801) via a stopper (803) and a position-limiting ring (805).
10. The method for preparing a water-based mortar for multi-wire cutting of silicon carbide according to claim 6, characterized in that: The upper surface of the mixing barrel (1) is provided with a feed port (9) for pouring a uniform base liquid C from the transfer barrel (3). A cover plate (10) is hingedly connected to the feed port (9) on a side away from the transfer barrel (3) via a rotating shaft. The cover plate (10) is automatically separated from the feed port (9) via a torsion spring (1001). Two pull ropes (1002) for pulling the cover plate (10) to close the feed port (9) are symmetrically fixed to one end of the cover plate (10) away from the torsion spring (1001).