Anode fixing type efficient shielding device with electroplating uniformity

Abstract

The invention discloses an anode fixing type efficient shielding device with electroplating uniformity, and relates to the technical field of electroplating processes, the anode fixing type efficient shielding device comprises an upper shielding plate frame and an anode plate, a magnetic combination groove is formed in the surface of an inner ring of the upper shielding plate frame, and under cooperation of a gear motor driving assembly, the magnetic combination groove is formed in the surface of an inner ring of the upper shielding plate frame through guiding operation of a displacement positioning sliding piece and a slotting sliding frame; through cooperation with a driving combination of a micro motor and a plastic gear, accurate adjustment of the radial position of the carbon brush shielding strip is realized, and the dynamic tracking requirement of anode surface defects is met, so that when temperature fluctuation, current sudden rise or anode surface defects occur in the electroplating process, the electroplating efficiency is improved. Through thermal compensation of a shape memory alloy driving rod, fine adjustment of a micro motor and micro motion of a vertical sliding column through a slotted sliding frame, the position of a carbon brush shielding strip is adjusted in real time, rigid collision with the surface of an anode is avoided, meanwhile, it is ensured that the density of an edge power line is stable, and the uniformity deviation of a plating layer is effectively reduced; and the electroplating production yield and efficiency are obviously improved.

Description

Technical Field

[0001] The invention relates to the technical field of electroplating technology, in particular to an anode-fixed high-efficiency shielding device for electroplating uniformity. Background Art

[0002] During the electroplating process, coating uniformity is a key indicator of product quality. In fields such as semiconductor packaging and testing and circuit board manufacturing, the "edge effect" of electric field lines at the anode edge can lead to uneven current density on the cathode (workpiece) surface. This can cause excessive electrodeposition at the edges and insufficient deposition in the center. This can cause coating thickness deviations exceeding ±5%, potentially impacting product performance.

[0003] At present, traditional electroplating equipment adopts movable shielding plates with edges and angles, and controls the electric line density at the edge of the anode by manually adjusting the position of the shielding plates. For example, in the vertical gantry single-tank electroplating, the movable shielding plates are fixed by screws, and the shielding width is adjusted according to the width of the workpiece. However, the screws of the movable shielding plates with angles are often loosened, and the shielding plates are loosened or fall off during operation and maintenance, which causes the shielding size to change and the uniformity effect to deteriorate, thereby resulting in low product yield. Alternatively, a fixed shielding plate solution is adopted. In order to solve the cumbersome adjustment problem of the movable shielding plates, some scenarios adopt fixed shielding plates, that is, a fixed structure is made according to the shielding size that has passed the test, and it is fixed to the anode bottom plate by screws to avoid loosening during use. However, since the traditional fixed shielding plate is an integral design, it cannot adapt to workpieces of different widths. When the workpiece size changes, it needs to be replaced as a whole, the changeover time is long, and the overall efficiency is low. Therefore, it is necessary to propose an anode fixed high-efficiency shielding device for electroplating uniformity. Summary of the Invention

[0004] The purpose of the present invention is to provide an anode-fixed, efficient shielding device for electroplating uniformity, so as to solve the problem proposed in the above-mentioned background technology that the screws of the movable angle shielding plate are often loose, the shielding plate is loose, and it falls off during operation and maintenance, thereby causing the shielding size to change and resulting in poor uniformity effect, thereby leading to low product yield, or being unable to adapt to workpieces of different widths, and needing to be replaced as a whole when the workpiece size changes, which is inefficient.

[0005] To achieve the above objectives, the present invention provides the following technical solutions: an anode-fixed high-efficiency shielding device for improving electroplating uniformity, comprising an upper shielding plate frame and an anode plate, wherein the inner ring surface of the upper shielding plate frame is provided with a magnetic coupling groove, the upper shielding plate frame is used to be mounted on the front surface of the anode plate, the interior of the magnetic coupling groove is magnetically connected to a fitting mounting edge, the inner ring surface of the fitting mounting edge is provided with a gear motor drive assembly, the upper shielding plate frame is divided into four independent units, and magnet nesting connection assemblies are connected between adjacent units; The gear motor drive assembly includes an insulating tooth edge, a carbon brush shielding strip 128, a plastic gear meshing with the insulating tooth edge, and a micro motor that drives the plastic gear to rotate, and is used to drive the connected carbon brush shielding strip to move and adjust along the inner circle track of the upper shielding plate frame; Thermal expansion compensation components are installed at the four corners of the bottom end of the upper shielding plate frame. The thermal expansion compensation components include four shape memory alloy drive rods, which are respectively installed at the four corners of the upper shielding plate frame. When the temperature exceeds a threshold, the four shape memory alloy drive rods automatically extend to compensate for the thermal expansion of the anode.

[0006] Preferably, the top and bottom ends of the four shape memory alloy driving rods are respectively connected to a T-shaped plate and a ball joint, a fixing plate is installed at the bottom of the ball joint, the fixing plate is fixed to the bottom plate of the anode plate, and the T-shaped plate is connected to the upper shielding plate frame.

[0007] Preferably, a displacement positioning slide is installed at the side end of the micro motor, and the side end of the displacement positioning slide is fastened to a slotted slide frame, the interior of the slotted slide frame is slidably connected to a vertical slide column, the bottom of the vertical slide column is connected to the carbon brush shielding strip, and a connecting edge is installed at the bottom of the insulating tooth edge, and the connecting edge is installed with the fitting installation edge.

[0008] Preferably, both side wall surfaces of the upper shielding plate frames of the four independent units are provided with mounting grooves, and the magnet nesting connection components are installed inside the mounting grooves.

[0009] Preferably, the magnet nested connection assembly includes an embedded cross connection sleeve, a magnetic connection piece is installed inside the embedded cross connection sleeve, and the side end of the magnetic connection piece is magnetically connected to a magnetic connection rod.

[0010] Preferably, a stress spring is installed at the side end of the magnetic connecting rod, and the outer sleeve of the magnetic connecting rod and the stress spring is provided with a fixing kit, and the embedded cross connecting sleeve and the fixing kit are respectively installed in the installation grooves on both sides.

[0011] Preferably, a protective frame is installed on the outside of the upper shielding plate frame, the center end of the upper shielding plate frame is installed with the anode plate, a limiting slide groove is opened on the inner wall surface of the protective frame, and a sliding bar is installed on the outer wall surface of the upper shielding plate frame, and the limiting slide groove and the sliding bar are slidably connected.

[0012] Preferably, a lower shielding plate frame is installed at the bottom of the protection frame, and a shielding corner is installed on the inner edge of the lower shielding plate frame for shielding the four corners of the anode of different sizes. Fixing holes are opened on the surface of the lower shielding plate frame for fixing the shielding edge on the lower shielding plate frame.

[0013] Preferably, the upper shielding plate frame is embedded with an integrated sensor, which consists of an infrared temperature sensor and a visual sensor, and is used to monitor the surface temperature and defect position of the anode plate, and enables the external PLC controller to control the micro motor to drive the carbon brush shielding bar to move according to the monitoring feedback of the integrated sensor, so that the carbon brush shielding bar reaches the defect position to form a shield.

[0014] Preferably, the ball joint comprises a stainless steel sphere and a ball sleeve embedded in the bottom of the anode plate, and the ball joint is used to rotate the shape memory alloy drive rod within a range of ±15°.

[0015] Compared with the prior art, the present invention has the following beneficial effects: 1. In the present invention, with the cooperation of the gear motor drive assembly, the overall displacement positioning slide and the slotted slide frame are utilized for guiding operations, and the drive combination of the micro motor and the plastic gear is coordinated to realize the precise adjustment of the radial position of the carbon brush shielding strip, so as to meet the dynamic tracking requirements of the anode surface defects. When temperature fluctuations, current surges or anode surface defects occur during the electroplating process, the integrated sensor and the external PLC controller form a closed-loop control. Through the thermal compensation of the shape memory alloy drive rod, the fine adjustment of the micro motor and the slotted slide frame, the vertical slide column is finely moved to adjust the position of the carbon brush shielding strip in real time to avoid rigid collision with the anode surface. At the same time, the edge electric line density is ensured to be stable, the deviation of the coating uniformity is effectively reduced, and the yield and efficiency of the electroplating production are significantly improved.

[0016] 2. In the present invention, dynamic and precise shielding of the anode plate is achieved with the cooperation of the thermal expansion compensation component. The upper shielding plate frame is quickly fixed without screws through the magnetic connection between the magnetic groove and the fitting installation edge. Cooperating with the shape memory alloy drive rods at the four corners, it can automatically extend to compensate for the thermal expansion of the anode when the temperature rises, ensuring the stability of the shielding gap, responding to the surface defects of the anode and the current fluctuations in real time, and accurately adjusting the shielding position. The upper shielding plate frame is divided into four independent units by using the magnet nested connection component, supporting tool-free quick disassembly and assembly and wide-width changeover, thereby improving maintenance efficiency and effectively solving the problems of loose screws, rough adjustment and poor thermal stability in the prior art. BRIEF DESCRIPTION OF THE DRAWINGS

[0017] Figure 1 This is a schematic diagram of the main structure of an anode-fixed high-efficiency shielding device for electroplating uniformity according to the present invention; Figure 2 This is a schematic diagram of the separated structure of the main body in an anode-fixed high-efficiency shielding device for electroplating uniformity according to the present invention; Figure 3 The present invention is an anode fixed type high efficiency shielding device for electroplating uniformity Figure 2 A schematic diagram of the enlarged structure at point A; Figure 4The present invention is an anode fixed type high efficiency shielding device for electroplating uniformity Figure 2 A schematic diagram of the enlarged structure at point B; Figure 5 The present invention is an anode fixed type high efficiency shielding device for electroplating uniformity Figure 2 Schematic diagram of the enlarged structure at C; Figure 6 The present invention is an anode fixed type high efficiency shielding device for electroplating uniformity Figure 2 A schematic diagram of the enlarged structure at D; Figure 7 This is a schematic structural diagram of a magnet nested connection assembly in an anode-fixed high-efficiency shielding device for improving electroplating uniformity according to the present invention.

[0018] In the figure: 100, protective frame; 200, upper shielding plate frame; 300, anode plate; 400, lower shielding plate frame; 500, fixing hole; 600, shielding angle; 700, magnet nesting connection assembly; 701, embedded cross connecting sleeve; 702, magnetic connecting piece; 703, magnetic connecting rod; 704, fixing kit; 705, stress spring; 800, limiting slide groove; 900, slide bar; 110, thermal expansion compensation assembly; 111. Ball joint; 112. Shape memory alloy drive rod; 113. T-shaped plate; 114. Fixed plate; 120. Gear motor drive assembly; 121. Insulated tooth edge; 122. Connecting edge; 123. Displacement positioning slide; 124. Plastic gear; 125. Micro motor; 126. Slotted slide frame; 127. Vertical slide column; 128. Carbon brush shielding strip; 130. Fitting installation edge; 140. Magnetic coupling groove; 150. Installation groove. DETAILED DESCRIPTION

[0019] The following will clearly and completely describe the technical solutions in the embodiments of the present invention in conjunction with the accompanying drawings. Obviously, the implementation regulations described are only part of the embodiments of the present invention, not all of the embodiments. All other embodiments obtained by ordinary technicians in this field based on the embodiments of the present invention without making any creative efforts shall fall within the scope of protection of the present invention.

[0020] In the embodiment of the present invention, referring to Figure 1 、 Figure 2 and Figure 5As shown: An anode-fixed high-efficiency shielding device for electroplating uniformity includes: an upper shielding plate frame 200 and an anode plate 300, the inner ring surface of the upper shielding plate frame 200 is provided with a magnetic coupling groove 140, the upper shielding plate frame 200 is used to be installed on the front of the anode plate 300, the internal magnetic connection of the magnetic coupling groove 140 is provided with a fitting installation edge 130, the inner ring surface of the fitting installation edge 130 is provided with a gear motor drive assembly 120, the upper shielding plate frame 200 is divided into four independent units, and the adjacent units are connected with a magnet nested connection assembly 700.

[0021] Specifically, the upper shielding plate frame 200 is split along the magnet nesting connection assembly 700 of the four independent units (no tools are required, and they can be separated by lightly pushing along the axial direction of the magnetic connecting rod 703), corresponding to the four sides of the anode plate 300 respectively. Then, the protective frame 100 is fixed to the edge of the electrolytic cell through the bottom bolts, ensuring that the limiting slide groove 800 is parallel to the front of the anode plate 300. After that, the fitting installation edge 130 of the single unit upper shielding plate frame 200 is aligned with the edge of the anode plate 300, so that the magnetic coupling groove 140 and the magnetic layer neodymium iron boron of the fitting installation edge 130 are automatically adsorbed to achieve rapid positioning without the need for screw fixation. Then, the four units of the upper shielding plate frame 200 are spliced through the magnet nesting connection assembly 700 to form a rigid whole. Finally, the thermal expansion compensation assembly 110 is installed.

[0022] In some embodiments, according to Figure 2 and Figure 6 As shown, the gear motor drive assembly 120 includes an insulating tooth edge 121, a carbon brush shielding strip 128, a plastic gear 124 meshing with the insulating tooth edge 121, and a micro motor 125 that drives the plastic gear 124 to rotate, and is used to drive the connected carbon brush shielding strip 128 to move and adjust along the inner ring track of the upper shielding plate frame 200.

[0023] A displacement positioning slide 123 is installed at the side end of the micro motor 125, and the side end of the displacement positioning slide 123 is fastened with a slotted slide frame 126. The interior of the slotted slide frame 126 is slidably connected to a vertical slide column 127. The bottom of the vertical slide column 127 is connected to the carbon brush shielding strip 128. A connecting edge 122 is installed at the bottom of the insulating tooth edge 121, and the connecting edge 122 is installed with the fitting installation edge 130.

[0024] In an embodiment of the present invention, specifically, the insulating tooth edge 121 is embedded in the card groove of the fitting installation edge 130 through the bottom connecting edge 122, ensuring that the tooth edge is parallel to the inner circle trajectory of the upper shielding plate frame 200, and then the connecting edge 122 and the fitting installation edge 130 are bonded by sealant, or connected by card engagement, and sealed by a sealing strip to prevent the electroplating liquid from seeping in. Then, the displacement positioning slide 123 and the slotted slide frame 126 are connected, and the vertical slide column 127 is inserted into the slide groove of the slotted slide frame 126, and the bottom is connected to the carbon brush shielding strip 128 through a thread.

[0025] When operating, first, the power supply of the micro motor 125 is turned on, and an instruction is sent through the external PLC controller. The micro motor 125 drives the plastic gear 124 to rotate, so that the plastic gear 124 and the insulating tooth edge 121 engage, and then the displacement positioning slide 123 moves along the inner circle track of the upper shielding plate frame 200, so that the carbon brush shielding strip 128 reaches the preset position (such as from the edge of the anode). Then, with the cooperation of the integrated sensor, the displacement positioning slide 123 is used to feedback the position data in real time to ensure the positioning accuracy, that is, the surface of the anode plate 300 is detected by the integrated sensor infrared temperature sensor and the visual sensor. If the visual sensor recognizes a pit defect, the external PLC controller immediately sends a pulse signal to the micro motor 125, so that the micro motor 125 drives the plastic gear 124 to rotate a specified number of circles, driving the carbon brush shielding strip 128 to move toward the defect, and the displacement positioning slide 123 confirms the movement amount.

[0026] Afterwards, when the temperature of the plating solution rises to 50°C, the shape memory alloy drive rod 112 extends and pushes the upper shielding plate frame 200 to expand outward. At this time, the insulating tooth edge 121 moves with the frame, the plastic gear 124 rolls on the tooth edge, and the displacement positioning slide 123 synchronously adjusts the position of the slotted slide frame 126 to ensure that the distance between the carbon brush shielding strip 128 and the anode edge is always stable (wherein, the shape memory alloy drive rod 112 adopts NiTi50 shape memory alloy, and uses the TiO2 oxide film naturally formed on its surface to resist corrosion from the plating solution (such as the corrosion rate in the acidic copper sulfate system is <0.01mm / year), and the phase change temperature is adjustable in the range of 20-80°C, which is suitable for the conventional temperature range of 25-60°C of the plating solution).

[0027] If the electroplating current suddenly increases (such as exceeding the rated value by 15%), the external PLC controller calculates the change in edge power line density based on the external electric field sensor data, and drives the micro motor 125 to fine-tune the radial position of the carbon brush shielding strip 128. The compensation amount is accurately controlled by the displacement positioning slide 123, so that the vertical slide 127 drives the carbon brush shielding strip 128 to move slightly along the slotted slide frame 126 to avoid the carbon brush shielding strip 128 from colliding with the anode surface. The slot of the slotted slide frame 126 is a vertical long strip through slot, and the slot wall is precisely ground to ensure that the vertical slide 127 has uniform sliding resistance in the slot. A limiting boss is provided on the top of the slot to prevent the vertical slide 127 from sliding. 7 is dislodged. If there is a local protrusion on the surface of the anode plate 300, such as an accumulation of electroplating slag, the carbon brush shielding strip 128 generates an upward thrust when it contacts the protrusion, pushing the vertical slide 127 to move slightly upward in the slide groove to avoid rigid collision. At the same time, the displacement positioning slide 123 provides real-time feedback on the slide position, and the external PLC controller automatically adjusts the speed of the micro motor 125 to compensate for the displacement (i.e., the micro motor 125 drives the plastic gear 124 to rotate, which engages with the insulating tooth edge 121, driving the displacement positioning slide 123 to move along the inner ring track of the upper shielding plate frame 200). The side end of the displacement positioning slide 123 is fastened to the slotted slide frame 126, so that the two move synchronously.

[0028] When the external PLC controller needs to adjust the radial position of the carbon brush shielding strip 128 according to the integrated sensor data, it drives the micro motor 125 to rotate, and drives the slotted slide frame 126 to move through the displacement positioning slide 123, so that the vertical slide column 127 moves in the slotted slide frame 126, realizing active fine-tuning at the micron level.

[0029] When the carbon brush shielding strip 128 contacts the protrusion on the anode surface, the vertical slide column 127 can move slightly upward in the vertical groove of the slotted slide frame 126 (the groove wall is precisely ground and the sliding resistance is uniform) to avoid rigid collision. At the same time, the displacement positioning slide 123 provides real-time feedback on the slide column position, and the external PLC controller automatically adjusts the speed of the micro motor 125 to compensate for the displacement. A limiting boss is provided on the top of the slide groove of the slotted slide frame 126 to prevent the vertical slide column 127 from falling out, ensuring the safety of movement).

[0030] The overall guidance operation of the displacement positioning slide 123 and the slotted slide frame 126 is utilized in conjunction with the drive combination of the micro motor 125 and the plastic gear 124 to achieve precise adjustment of the radial position of the carbon brush shielding strip 128 to meet the dynamic tracking requirements of the anode surface defects. When temperature fluctuations, current surges or anode surface defects occur during the electroplating process, the integrated sensor and the external PLC controller form a closed-loop control. Through the thermal compensation of the shape memory alloy drive rod 112, the fine adjustment of the micro motor 125 and the slotted slide frame 126, the vertical slide column 127 is slightly moved to adjust the position of the carbon brush shielding strip 128 in real time to avoid rigid collision with the anode surface. At the same time, the edge electric line density is ensured to be stable, effectively reducing the deviation of the coating uniformity, and significantly improving the yield and efficiency of electroplating production.

[0031] In some embodiments, according to Figure 2 and Figure 4 As shown, thermal expansion compensation components 110 are installed at the four corners of the bottom end of the upper shielding plate frame 200. The thermal expansion compensation component 110 includes four shape memory alloy drive rods 112, which are respectively installed at the four corners of the upper shielding plate frame 200. When the temperature exceeds a threshold, the four shape memory alloy drive rods 112 automatically extend to compensate for the thermal expansion of the anode.

[0032] The top and bottom ends of the four shape memory alloy driving rods 112 are respectively connected to a T-shaped plate 113 and a ball joint 111. A fixing plate 114 is installed at the bottom of the ball joint 111. The fixing plate 114 is fixed to the bottom plate of the anode plate 300. The T-shaped plate 113 is connected to the shielding plate frame 200.

[0033] The ball joint 111 includes a stainless steel ball and a ball sleeve embedded in the bottom of the anode plate 300. The ball joint 111 is used to rotate the shape memory alloy driving rod 112 within the range of ±15°.

[0034] In an embodiment of the present invention, specifically, the anode plate 300 is placed flat on a workbench, the flatness of the bottom plate is calibrated using a laser level, and the installation position of the fixing plate 114 is marked at the four corners of the bottom plate to ensure that the lines connecting the four corners form a rectangle. Then, the fixing plate 114 is fixed to the bottom plate of the anode plate 300 by countersunk screws, and thread locking glue is injected into the screw holes to prevent the electroplating solution from penetrating, so that the surface of the fixing plate 114 needs to be completely in contact with the bottom plate of the anode plate 300. After that, the stainless steel ball of the ball hinge 111 is inserted into the bottom plate. Insert the ball sleeve so that the ball joint 111 allows the shape memory alloy drive rod 112 to rotate freely within the range of ±15°, ensuring that there is no jamming during thermal expansion. Then, connect the bottom end of the shape memory alloy drive rod 112 to the top of the ball joint 111, and install a T-shaped plate 113 on the top of the shape memory alloy drive rod 112, so that the horizontal wing plate of the T-shaped plate 113 is fixed to the bottom screw hole of the upper shielding plate frame 200 by a countersunk screw, ensuring that the shape memory alloy drive rod 112 is perpendicular to the surface of the anode plate 300.

[0035] When the temperature of the plating solution gradually rises to the phase change temperature threshold of the shape memory alloy, such as 25°C, the shape memory alloy driving rod 112 begins to change due to heat, resulting in axial elongation. Then, the elongation of the shape memory alloy driving rod 112 increases linearly with temperature (such as 0.5mm at 50°C), and the upper shielding plate frame 200 is pushed to expand radially outward through the T-shaped plate 113 to compensate for the dimensional change of the anode plate 300 caused by thermal expansion.

[0036] Afterwards, when the upper shielding plate frame 200 expands outward, the insulating tooth edge 121 moves with the upper shielding plate frame 200, the plastic gear 124 rolls on the insulating tooth edge 121, and the displacement positioning slide 123 synchronously adjusts the position of the slotted slide frame 126 to ensure that the distance between the carbon brush shielding strip 128 and the anode edge is always stable. During this process, the ball joint 111 allows the shape memory alloy drive rod 112 to swing slightly to avoid damage to the shape memory alloy drive rod 112 due to lateral stress generated by the movement of the upper shielding plate frame 200.

[0037] Next, the integrated sensor monitors the temperature and displacement data of the upper shielding plate frame 200 in real time. If it is found that the elongation of the shape memory alloy drive rod 112 installed at a certain corner deviates from that of other corners, the external PLC controller automatically fine-tunes and moves the micro motor 125 and carbon brush shielding strip 128 to the corresponding corner to compensate for the difference and maintain the horizontality of the upper shielding plate frame 200.

[0038] However, if the temperature of the plating solution rises suddenly, for example, from 25°C to 50°C within 10 minutes, the rapid extension of the shape memory alloy drive rod 112 may cause the frame to expand outward instantly. At this time, the flexible rotation of the ball joint 111 is used to release the instantaneous stress to prevent the shape memory alloy drive rod 112 from bending. Then, the displacement positioning slide 123 provides real-time feedback on the displacement of the upper shielding plate frame 200, and the external PLC controller drives the micro motor 125 to make reverse fine adjustments to slow down the expansion speed of the upper shielding plate frame 200 and avoid the carbon brush shielding strip 128 from colliding with the anode. Afterwards, when the temperature stabilizes, the elongation of the shape memory alloy drive rod 112 tends to be stable, and the position of the upper shielding plate frame 200 is adjusted jointly by the shape memory alloy drive rod 112 and the micro motor 125.

[0039] The anode plate 300 is dynamically and precisely shielded as a whole. The upper shielding plate frame 200 is fast fixed without screws through the magnetic connection between the magnetic coupling groove 140 and the fitting installation edge 130. Cooperating with the shape memory alloy driving rods 112 at the four corners, it can automatically extend to compensate for the thermal expansion of the anode when the temperature rises, ensuring the stability of the shielding gap, responding to the surface defects of the anode and the current fluctuation in real time, and accurately adjusting the shielding position. The upper shielding plate frame 200 is divided into four independent units by using the magnet nested connection component 700, supporting tool-free quick disassembly and assembly and wide-width changeover, thereby improving maintenance efficiency and effectively solving the problems of loose screws, rough adjustment and poor thermal stability in the prior art.

[0040] In some embodiments, according to Figure 2 、 Figure 5 and Figure 7 As shown, both side wall surfaces of the shielding plate frames 200 of the four independent units are provided with mounting grooves 150 , and the magnet nesting connection components 700 are installed inside the mounting grooves 150 .

[0041] The magnet nested connection assembly 700 includes an embedded cross connection sleeve 701 , a magnetic connection piece 702 is installed inside the embedded cross connection sleeve 701 , and a magnetic connection rod 703 is magnetically connected to the side end of the magnetic connection piece 702 .

[0042] A stress spring 705 is installed at the side end of the magnetic connecting rod 703, and a fixing kit 704 is provided on the outside of the magnetic connecting rod 703 and the stress spring 705. The embedded cross connecting sleeve 701 and the fixing kit 704 are respectively installed in the installation grooves 150 on both sides.

[0043] In an embodiment of the present invention, specifically, during the installation operation, the four independent units of the upper shielding plate frame 200 are placed flat on the workbench, and then the embedded cross connecting sleeve 701 is embedded in the installation groove 150 of one of the units, ensuring that the sleeve body is completely fitted with the bottom of the groove, and reserving a gap for the installation of the magnetic connecting piece 702, and then the magnetic connecting piece 702 is inserted into the center hole of the embedded cross connecting sleeve 701, ensuring that the magnetic pole direction is consistent (the N pole is uniformly facing outward), and at the same time, the magnetic connecting rod 703 is passed through the fixing kit 704, and the stress spring 705 is put on to form a pre-tightening assembly, and then the formed pre-tightening assembly is aligned with the installation groove 150 of the adjacent unit, so that the end face of the magnetic connecting rod 703 and the magnetic connecting piece 702 are automatically adsorbed and docked by magnetic attraction, and the stress spring 705 is compressed to generate a pre-tightening force to eliminate the connection gap, and finally, the adjacent units are pushed to complete the splicing, and a "click" sound is heard indicating that the magnetic connecting rod 703 is completely embedded in the embedded cross connecting sleeve 701.

[0044] Later, when the plating solution temperature rises from 25°C to 50°C, if the different units of the upper shielding plate frame 200 produce slight radial displacement due to thermal expansion, the stress spring 705 will automatically stretch to compensate, and the magnetic connecting rod 703 moves with the units of the upper shielding plate frame 200, so that the magnetic connection gap is maintained to avoid connection failure due to thermal deformation. Then, when the temperature drops, the magnetic connecting rod 703 moves back to drive the stress spring 705 to reset, and the magnetic adsorption force is used to assist the units of the upper shielding plate frame 200 to return to their positions accurately without the need for manual calibration.

[0045] In some embodiments, according to Figure 1-Figure 3 As shown, a protective frame 100 is installed on the outside of the upper shielding plate frame 200, the center end of the upper shielding plate frame 200 is installed with the anode plate 300, a limiting slide groove 800 is provided on the inner wall surface of the protective frame 100, and a sliding bar 900 is installed on the outer wall surface of the upper shielding plate frame 200, and the limiting slide groove 800 and the sliding bar 900 are slidably connected.

[0046] A lower shielding plate frame 400 is installed at the bottom of the protective frame 100, and a shielding corner 600 is installed on the inner edge of the lower shielding plate frame 400 for shielding the four corners of the anode of different sizes. A fixing hole 500 is opened on the surface of the lower shielding plate frame 400 for fixing the shielding edge on the lower shielding plate frame 400.

[0047] The upper shielding plate frame 200 is embedded with an integrated sensor, which consists of an infrared temperature sensor and a visual sensor, and is used to monitor the surface temperature and defect position of the anode plate 300, and enable the external PLC controller to control the micro motor 125 to drive the carbon brush shielding strip 128 to move according to the monitoring feedback of the integrated sensor, so that the carbon brush shielding strip 128 reaches the defect position to form a shield.

[0048] In an embodiment of the present invention, specifically, the lower shielding plate frame 400 is connected to the bottom bolt of the protective frame 100 through the fixing hole 500, the shielding angle 600 is aligned with the four corners of the anode, the shielding width is adjusted by adjusting the bolt height, and sealant is applied around the fixing hole 500 to prevent the electroplating solution from penetrating into the interlayer of the lower shielding plate frame 400, that is, after the adjustment test uniformity is qualified, a fixed lower shielding plate frame 400 is formulated according to the shielding plate size of the partitioned block, and the fixed lower shielding plate frame 400 is fixed to the bottom plate of the anode plate 300 through the fixing screw hole, so that the corresponding sizes of the anode and cathode are fixed, and the electric field The power lines are also fixed, so the thickness of the coating that is displayed can ensure that the uniformity effect is stable and unchanged, and will not be reduced during use due to the loosening of the lower shielding plate frame 400, which will cause the uniformity to deteriorate. This ensures the yield of the product and makes subsequent disassembly and maintenance very convenient. There is no need to fix every edge and every corner, thereby reducing the input cost of manpower and man-hours, and also improving the equipment utilization rate (the displacement of the upper shielding plate frame 200 is monitored in real time through integrated sensors (infrared temperature sensor and visual sensor). When the temperature rises and causes the frame to expand outward, the integrated sensor transmits the data to the external PLC controller.

[0049] At this time, the external PLC controller calculates the expansion speed that needs to be slowed down, sends a reverse control signal to the micro motor 125, drives the plastic gear 124 to rotate in the opposite direction along the insulating tooth edge 121, and drives the slotted slide frame 126 to move in the opposite direction through the displacement positioning slide 123, that is, through the engagement with the insulating tooth edge 121, the displacement positioning slide 123 is pushed to move radially inward along the inner circle track of the upper shielding plate frame 200, and the side end of the displacement positioning slide 123 is fastened to the slotted slide frame 126, so the slotted slide frame 126 It moves radially inward synchronously, driving the vertical sliding column 127 and the carbon brush shielding bar 128 to move slightly toward the center of the anode plate 300. When the carbon brush shielding bar 128 moves radially inward, it generates reverse resistance to the outward expansion of the upper shielding plate frame 200. For example, when the outward expansion speed of the upper shielding plate frame 200 is 0.1mm / s, the reverse rotation of the micro motor 125 can drive the carbon brush shielding bar 128 to move inward at a speed of 0.05mm / s, and partially offset the outward displacement of the upper shielding plate frame 200 through mechanical limiting.

[0050] The integrated sensor provides real-time feedback of displacement data, and the external PLC dynamically adjusts the rotation speed of the micro motor 125 to ensure that the offset amount and the outward expansion amount are precisely matched to offset the outward expansion of the upper shielding plate frame 200 of some units. For example, when the outward expansion speed of the frame is 0.1 mm / s, the reverse rotation of the micro motor 125 can reduce the speed. The elongation of the shape memory alloy drive rod 112 and the reverse fine-tuning of the micro motor 125 work together. The former actively compensates for the outward expansion of the frame through thermal expansion, while the latter passively adjusts the electric field distribution by precisely controlling the position of the carbon brush shielding strip 128, ensuring the stability of the edge electric field line density. The reverse movement of the slotted slide frame 126 not only offsets the outward expansion of the upper shielding plate frame 200, but also compensates for the change in the edge electric field line density caused by the outward expansion of the upper shielding plate frame 200 by adjusting the position of the carbon brush shielding strip 128, ensuring the uniformity of the electric field.

[0051] The surfaces of the upper shielding plate frame 200 and the lower shielding plate frame 400 are engraved with coding numbers for marking different slots and different sides, and direction marks are etched on the surfaces for clarifying the installation direction.

[0052] The wiring diagram of the infrared temperature sensor, visual sensor and micro motor 125 in the present invention is common knowledge in the field, and its working principle is a well-known technology. The model is selected according to the actual use, so the control method and wiring layout of the infrared temperature sensor, visual sensor and micro motor 125 will not be explained in detail.

[0053] Although the present invention has been described in detail with reference to the aforementioned embodiments, it is still possible for those skilled in the art to modify the technical solutions described in the aforementioned embodiments, or to make equivalent substitutions for some of the technical features therein. Any modifications, equivalent substitutions, improvements, etc. made within the spirit and principles of the present invention should be included in the scope of protection of the present invention.

Claims

1. An anode-fixed high-efficiency shielding device for electroplating uniformity, characterized in that: include: An upper shielding plate frame (200) and an anode plate (300), wherein the inner ring surface of the upper shielding plate frame (200) is provided with a magnetic coupling groove (140), the upper shielding plate frame (200) is used to be mounted on the front surface of the anode plate (300), the interior of the magnetic coupling groove (140) is magnetically connected to a fitting mounting edge (130), the inner ring surface of the fitting mounting edge (130) is provided with a gear motor drive assembly (120), and the upper shielding plate frame (200) is divided into four independent units, and magnet nesting connection assemblies (700) are connected between adjacent units; The gear motor drive assembly (120) comprises an insulating tooth edge (121), a carbon brush shielding strip (128), a plastic gear (124) meshing with the insulating tooth edge (121), and a micro motor (125) driving the plastic gear (124) to rotate, and is used to drive the connected carbon brush shielding strip (128) to move and adjust along the inner circle track of the upper shielding plate frame (200); Thermal expansion compensation components (110) are installed at the four corners of the bottom end of the upper shielding plate frame (200). The thermal expansion compensation component (110) includes four shape memory alloy drive rods (112) which are respectively installed at the four corners of the upper shielding plate frame (200) and are used for automatically extending the four shape memory alloy drive rods (112) to compensate for the thermal expansion of the anode when the temperature exceeds a threshold.

2. The anode-fixed high-efficiency shielding device for improving electroplating uniformity according to claim 1, characterized in that: The top and bottom ends of the four shape memory alloy driving rods (112) are respectively connected to a T-shaped plate (113) and a ball joint (111); a fixing plate (114) is installed at the bottom of the ball joint (111); the fixing plate (114) is fixed to the bottom plate of the anode plate (300); and the T-shaped plate (113) is connected to the upper shielding plate frame (200).

3. The anode-fixed high-efficiency shielding device for improving electroplating uniformity according to claim 1, characterized in that: A displacement positioning slide (123) is installed at the side end of the micro motor (125), and the side end of the displacement positioning slide (123) is fastened to a slotted slide frame (126). The interior of the slotted slide frame (126) is slidably connected to a vertical slide column (127). The bottom of the vertical slide column (127) is connected to a carbon brush shielding strip (128). A connecting edge (122) is installed at the bottom of the insulating tooth edge (121), and the connecting edge (122) is installed with a fitting installation edge (130).

4. The anode-fixed high-efficiency shielding device for improving electroplating uniformity according to claim 1, characterized in that: Both side wall surfaces of the upper shielding plate frames (200) of the four independent units are provided with mounting grooves (150), and the magnet nesting connection components (700) are arranged inside the mounting grooves (150).

5. The anode-fixed high-efficiency shielding device for improving electroplating uniformity according to claim 1, characterized in that: The magnet nested connection assembly (700) comprises an embedded cross connection sleeve (701), a magnetic connection piece (702) is arranged inside the embedded cross connection sleeve (701), and a magnetic connection rod (703) is magnetically connected to the side end of the magnetic connection piece (702).

6. The anode-fixed high-efficiency shielding device for improving electroplating uniformity according to claim 5, characterized in that: A stress spring (705) is installed at the side end of the magnetic connecting rod (703), and a fixing kit (704) is provided on the outside of the magnetic connecting rod (703) and the stress spring (705). The embedded cross connecting sleeve (701) and the fixing kit (704) are respectively installed inside the installation grooves (150) on both sides.

7. The anode-fixed high-efficiency shielding device for improving electroplating uniformity according to claim 1, characterized in that: A protective frame (100) is installed on the outside of the upper shielding plate frame (200), the central end of the upper shielding plate frame (200) and the anode plate (300) are installed, a limiting sliding groove (800) is provided on the inner side wall surface of the protective frame (100), and a sliding bar (900) is installed on the outer side wall surface of the upper shielding plate frame (200), and the limiting sliding groove (800) and the sliding bar (900) are slidably connected.

8. The anode-fixed high-efficiency shielding device for improving electroplating uniformity according to claim 7, characterized in that: A lower shielding plate frame (400) is installed at the bottom of the protection frame (100), and shielding corners (600) are installed on the inner edge of the lower shielding plate frame (400) for shielding the four corners of the anode of different sizes. Fixing holes (500) are opened on the surface of the lower shielding plate frame (400) for fixing the shielding edges on the lower shielding plate frame (400).

9. The anode-fixed high-efficiency shielding device for improving electroplating uniformity according to claim 1, characterized in that: An integrated sensor is embedded in the upper shielding plate frame (200), and the integrated sensor is composed of an infrared temperature sensor and a visual sensor, and is used to monitor the surface temperature and defect position of the anode plate (300), and enables an external PLC controller to control the micro motor (125) to drive the carbon brush shielding strip (128) to move according to the monitoring feedback of the integrated sensor, so that the carbon brush shielding strip (128) reaches the defect position to form a shield.

10. The anode-fixed high-efficiency shielding device for improving electroplating uniformity according to claim 2, characterized in that: The ball joint (111) comprises a stainless steel ball and a ball sleeve embedded in the bottom of the anode plate (300). The ball joint (111) is used for the shape memory alloy driving rod (112) to rotate within a range of ±15°.

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