Vacuum valve, sorption system and test apparatus

Abstract

The application relates to a vacuum valve, an adsorption system and a testing device, comprising a valve core shaft, a valve sleeve, a control interface and a power mechanism. The valve core shaft is divided into N working zones arranged in sequence along the central axis of the valve core shaft. Each working zone is provided with a gas passing hole on the outer ring surface, and all the gas passing holes are arranged in sequence along the same spiral track arranged around the central axis. The valve core shaft is provided with a control gas channel communicated with each gas passing hole. The valve core shaft is rotatably arranged in the valve sleeve, the outer ring surface of each working zone is sealingly connected with the inner wall of the valve sleeve, and the valve sleeve is provided with N adsorption interfaces corresponding to the N working zones. The control interface is communicated with the control gas channel. The power mechanism is used for driving the valve core shaft to rotate in the same direction, so that each gas passing hole is sequentially connected with the corresponding adsorption interface in a butt joint mode, and when one of the gas passing holes is connected with the corresponding adsorption interface in the butt joint mode, the remaining gas passing holes are staggered with the corresponding adsorption interfaces. The scheme can reduce the number of pipelines, avoid pipeline complexity and reduce the cost.

Description

TECHNICAL FIELD

[0001] The present application relates to the technical field of vacuum valves, in particular to a vacuum valve, an adsorption system and a test equipment. BACKGROUND

[0002] Test equipment (such as test handlers) usually uses an adsorption disc to adsorb multiple materials. A conventional vacuum valve only has one control gas path. When the adsorption disc is connected to a vacuum generator, multiple vacuum valves are needed to connect the adsorption channels of the adsorption disc one by one, resulting in too many vacuum system components, high cost, and inconvenience in gas path layout due to space limitations. SUMMARY

[0003] Therefore, it is necessary to provide a vacuum valve, an adsorption system and a test equipment to solve the problems of too many vacuum system components and high cost of test equipment caused by the need to connect multiple vacuum valves to the adsorption disc to control the adsorption of multiple materials.

[0004] In a first aspect, the present application provides a vacuum valve, comprising:

[0005] A valve core shaft is divided into N working zones arranged in sequence along its central axis, and each working zone is provided with a gas passing hole on its outer ring surface, and all the gas passing holes are arranged in sequence along the same spiral track arranged around the central axis. The valve core shaft is provided with a control gas channel that communicates with each gas passing hole, and N≥2.

[0006] A valve sleeve is provided, and the valve core shaft is rotatably arranged in the valve sleeve around the central axis. The outer ring surface of each working zone is in sealing connection with the inner wall of the valve sleeve, and the valve sleeve is provided with N adsorption interfaces corresponding to the N working zones.

[0007] A control interface is in communication with the control gas channel.

[0008] A power mechanism is connected to the valve core shaft for driving the valve core shaft to rotate. When the valve core shaft rotates in the same direction, each gas passing hole can be in butt joint communication with the corresponding adsorption interface, and when one of the gas passing holes is in butt joint communication with the corresponding adsorption interface, the remaining gas passing holes are staggered with the corresponding adsorption interfaces.

[0009] In some embodiments, at least N-1 adjacent working zones of the N working zones are provided with a pressure maintaining part, the pressure maintaining part is longitudinally arranged around the central axis, and the gas passing holes and the pressure maintaining part of the same working zone are arranged in a staggered manner in the circumferential direction of the working zone. The gas passing holes and the pressure maintaining part of the same working zone are not simultaneously in butt joint with the corresponding adsorption interfaces.

[0010] In some embodiments, the pressure maintaining part comprises a pressure maintaining groove arranged on the outer surface of the working area, the pressure maintaining groove is arranged along the central axis; the valve core shaft is provided with a pressure maintaining air channel in communication with the pressure maintaining groove, and the vacuum valve further comprises a pressure maintaining interface in communication with the pressure maintaining air channel.

[0011] In some embodiments, all the pressure maintaining grooves are in communication with the same pressure maintaining air channel.

[0012] In some embodiments, the pressure maintaining interface is arranged on the valve sleeve, the outer surface of the valve core shaft is recessed to form a pressure maintaining ring groove arranged along the central axis, and the pressure maintaining ring groove is in communication with the pressure maintaining air channel and the pressure maintaining interface.

[0013] In some embodiments, the extension length of the pressure maintaining part of each working area is arranged in a decreasing order from the direction of the Nth working area;

[0014] In the direction pointing to the Nth working area, when the gas passing hole of the nth working area is in butt joint with the corresponding adsorption interface, the pressure maintaining part of the 1st to the n-1th working area is in butt joint with the corresponding adsorption interface, and the pressure maintaining part of the nth to the N-1th working area is staggered with the corresponding adsorption interface, 1

[0015] In some embodiments, in the projection plane perpendicular to the central axis, the included angle between the line connecting the projection center of each adjacent two gas passing holes and the projection center of the central axis is the step angle between the adjacent two gas passing holes, and the sum of all the step angles is less than °.

[0016] In some embodiments, at least adjacent N-1 working areas of the N working areas are provided with pressure maintaining parts arranged along the central axis;

[0017] Each pressure maintaining part has two ends in the longitudinal direction, which are proximal end and distal end respectively, the proximal end is adjacent to the gas passing hole, in the projection plane, the included angle between the line connecting the projection center of the proximal end of each pressure maintaining part and the projection center of the distal end and the projection center of the central axis is the pressure maintaining angle, and the included angle between the line connecting the projection center of the proximal end of the same working area and the projection center of the gas passing hole and the projection center of the central axis is the adjacent angle.

[0018] The difference between the pressure maintaining angles of the pressure maintaining parts of adjacent working areas is equal to the step angle between the gas passing holes of the adjacent working areas, in the direction pointing to the Nth working area, the adjacent angle of the jth working area is equal to the step angle between the gas passing hole of the jth working area and the gas passing hole of the j+1th working area, 1

[0019] In some embodiments, the step angle between every two adjacent through-holes is equal.

[0020] In some embodiments, all the suction interfaces are arranged on the same track parallel to the central axis.

[0021] In some embodiments, the centers of the distal ends of the pressure maintaining portions of all the working zones in the adjacent N-1 working zones are located on the same straight line parallel to the central axis.

[0022] In some embodiments, the pressure maintaining angle of the pressure maintaining portion of the first working zone is greater than the sum of the step angles between the through-holes of the second to Nth working zones on the projection surface.

[0023] In some embodiments, a plurality of sealing grooves are arranged on the inner recessed surface of the outer ring surface of the valve core shaft, and the sealing grooves are arranged on both sides of each working zone, and a sealing ring is arranged in each sealing groove, and the sealing ring is in sealing connection with the valve sleeve.

[0024] In some embodiments, the control interface is arranged on the valve sleeve, and the outer ring surface of the valve core shaft is recessed to form a control ring groove arranged around the central axis, and the bottom of the control ring groove is provided with a control gas hole, and the control gas hole communicates the control ring groove and the control gas channel, and the control interface communicates with the control ring groove.

[0025] In a second aspect, the present application provides a suction system, comprising:

[0026] a suction disc comprising a plurality of suction groups, each suction group comprising at least one suction hole for suctioning a workpiece;

[0027] The vacuum valve as described in the first aspect, each suction interface communicates with a suction group via a pipeline;

[0028] a vacuum generator communicating with the control interface via a pipeline;

[0029] When the vacuum generator transmits negative pressure to the control gas channel through the control interface, the power mechanism can control the valve core shaft to rotate step by step in a positive direction according to the step angle between every two adjacent through-holes, so that each through-hole sequentially communicates the suction interface with the control gas channel in a first direction parallel to the central axis, and controls the suction group connected with each suction interface to suck material.

[0030] When the vacuum generator transmits positive pressure to the control gas channel through the control interface, the power mechanism can control the valve core shaft to rotate reversely step by step according to the step angle between every two adjacent gas holes, so that each gas hole communicates the adsorption interface with the control gas channel in the direction opposite to the first direction, and controls the adsorption group connected with each adsorption interface to discharge.

[0031] In a third aspect, the present application provides a test device comprising the adsorption system of the second aspect.

[0032] The vacuum valve, the adsorption system and the test device can realize that one vacuum generator communicates with multiple adsorption groups of the adsorption disc in sequence, which can not only reduce the number of valve bodies, simplify the pipeline layout, but also make the adsorption disc cooperate closely with the mechanical hand. When the mechanical hand discharges materials to each adsorption group of the adsorption disc in sequence, each adsorption group can sequentially adsorb materials, and when each adsorption group of the adsorption disc discharges materials in sequence, the mechanical hand can sequentially take materials from each adsorption group, thereby saving the time for taking and discharging materials and improving the working efficiency of the test device. In addition, the vacuum generator only needs to be connected with the control gas channel of the vacuum valve to communicate with all gas holes, which further reduces the number of pipelines, avoids complicated pipelines and reduces costs. BRIEF DESCRIPTION OF DRAWINGS

[0033] Various other advantages and benefits will become apparent to those of ordinary skill in the art upon reading the following detailed description of the preferred embodiments. The detailed description is made with reference to the accompanying drawings.

[0034] Figure 1 A perspective view of the vacuum valve of some embodiments.

[0035] Figure 2 A perspective view of the vacuum valve. Figure 1 A perspective view of the vacuum valve.

[0036] Figure 3 A perspective view of the vacuum valve. Figure 2 A perspective view of the vacuum valve.

[0037] Figure 4 A perspective view of the valve core shaft. Figure 3 A perspective view of the valve core shaft.

[0038] Figure 5 A perspective view of the valve core shaft. Figure 4 A perspective view of the valve core shaft.

[0039] Figure 6 A perspective view of the valve core shaft.

[0040] Figure 7 Projection of all through holes on the projection plane on the valve core shaft of some embodiments.

[0041] Figure 8 Projection of through holes and pressure maintaining grooves in the first working area in some embodiments on the projection plane.

[0042] Reference signs in the detailed description are as follows:

[0043] 100, vacuum valve; F, first direction; M, projection plane; α1, step angle; α2, pressure maintaining angle; α3, adjacent angle; α4, blanking angle; O1, projection center of the center axis; O2, projection center of the through hole; O3, projection center of the proximal end; O4, projection center of the distal end; 10, valve core shaft; Z, center axis; Q, working area; 11, through hole; 12, pressure maintaining part; 12a, pressure maintaining groove; a1, proximal end; a2, distal end; 13, control air channel; 14, pressure maintaining air channel; 15, sealing groove; 16, pressure maintaining ring groove; 17, control air hole; 18, control ring groove; m1, blanking surface; m2, transition surface; 20, valve sleeve; 21, adsorption interface; K1, control interface; K2, pressure maintaining interface; 24, transition hole; 30, power mechanism; 40, sealing ring. Detailed description

[0044] In order to make the above objects, features and advantages of the present application more obvious and easy to understand, the specific embodiments of the present application are described in detail below in combination with the drawings. In the following description, a lot of specific details are set forth in order to fully understand the present application. However, the present application can be implemented in many other ways different from those described herein, and those skilled in the art can make similar improvements without departing from the spirit of the present application, so the present application is not limited by the specific embodiments disclosed below.

[0045] In the description of the present application, it should be understood that if there is any appearance, the orientation or positional relationship indicated by the terms "center", "longitudinal", "transverse", "length", "width", "thickness", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", "clockwise", "counterclockwise", "axial", "radial", "circumferential" and the like is based on the orientation or positional relationship shown in the drawings, and is only for the purpose of facilitating the description of the present application and simplifying the description, and does not indicate or imply that the device or element referred to must have a particular orientation, be constructed and operated in a particular orientation, and therefore cannot be understood as a limitation on the present application.

[0046] In addition, the terms "first", "second", and the like, if any, are used merely for descriptive purposes and do not imply or imply a relative importance or an implicit indication of the number of indicated technical features. Thus, features defined with "first", "second" can explicitly or implicitly include at least one of the features. In the description of the present application, the meaning of "a plurality of" is at least two, such as two, three, etc., unless otherwise explicitly specified and limited.

[0047] In the present application, unless otherwise explicitly specified and limited, the terms "mounting", "connecting", "connecting", "fixing" and the like are broadly understood, for example, can be fixedly connected, or can be detachably connected, or can be integrated; can be mechanically connected, or can be electrically connected; can be directly connected, or can be indirectly connected through an intermediate medium, or can be the internal communication of two elements or the interaction relationship between two elements, unless otherwise explicitly limited. For those skilled in the art, the specific meaning of the above terms in the present application can be understood according to the specific circumstances.

[0048] In the present application, unless otherwise explicitly specified and limited, the first feature is "on" or "under" the second feature. The first and second features can be in direct contact, or the first and second features can be indirectly contacted through an intermediate medium. Moreover, the first feature "above", "above" and "above" the second feature can be the first feature directly above or obliquely above the second feature, or only indicates that the first feature is higher than the second feature in horizontal height. The first feature "below", "below" and "below" the second feature can be the first feature directly below or obliquely below the second feature, or only indicates that the first feature is lower than the second feature in horizontal height.

[0049] It should be noted that, if any, when an element is referred to as "fixed to" or "provided on" another element, it can be directly on another element or there can be a middle element. When an element is considered to be "connected" to another element, it can be directly connected to another element or there can be a middle element. The terms "vertical", "horizontal", "up", "down", "left", "right" and similar expressions used herein are for illustrative purposes only and are not the only embodiment.

[0050] In order to solve the problem that the adsorption disc needs to be connected to a plurality of vacuum valves to realize the adsorption control of a plurality of materials, resulting in too many vacuum system components, causing the cost of the test equipment to be high, a vacuum valve is first proposed.

[0051] Please combine Figure 1 , Figure 2 and Figure 3It is understood that the vacuum valve 100 in the embodiments of the present application comprises a valve core shaft 10, a valve sleeve 20, a control interface K1 and a power mechanism 30. The valve core shaft 10 is divided along its central axis Z into N working zones Q (N≥2) arranged in sequence, and each working zone Q is provided with a gas passing hole 11 on its outer annular surface, and all the gas passing holes 11 are arranged in sequence along the same spiral track arranged around the central axis Z. The valve core shaft 10 is provided with a control gas channel 13 in communication with each gas passing hole 11. The valve core shaft 10 is rotatably arranged in the valve sleeve 20, and the outer annular surface of each working zone Q is sealingly connected to the inner wall of the valve sleeve 20. The valve sleeve 20 is provided with N adsorption interfaces 21 corresponding to the N working zones Q. The control interface K1 is in communication with the control gas channel 13. The power mechanism 30 is connected to the valve core shaft 10 for driving the valve core shaft 10 to rotate. When the valve core shaft 10 rotates in the same direction, each gas passing hole 11 can be in communication with the corresponding adsorption interface 21 in sequence, and when one of the gas passing holes 11 is in communication with the corresponding adsorption interface 21, the remaining gas passing holes 11 are staggered with respect to the corresponding adsorption interfaces 21.

[0052] The central axis Z is the central axis of the valve core shaft 10, and the power mechanism 30 drives the valve core shaft 10 to rotate around the central axis Z. Specifically, the valve sleeve 20 is provided with a mounting hole extending longitudinally along the central axis Z, and the valve core shaft 10 is mounted in the mounting hole. The outer annular surface of the valve core shaft 10 (i.e. the outer surface arranged around the central axis Z) is sealingly connected to the inner wall of the mounting hole to prevent gas leakage. One end of the valve core shaft 10 is connected to the power mechanism 30, and the other end is connected to the valve sleeve 20 through a bearing. The power mechanism 30 can be a stepper motor, which drives the valve core shaft 10 to rotate by a set angle each time, and switches one gas passing hole 11 to be in communication with the corresponding adsorption interface 21 each time. Of course, the power mechanism 30 can also adopt other conventional designs.

[0053] Each working zone Q is provided with one gas passing hole 11. The centers of the gas passing holes 11 on each working zone Q are arranged on a spiral track around the central axis Z. On the one hand, the gas passing holes 11 are arranged at intervals along the direction of the central axis Z, and on the other hand, the gas passing holes 11 are arranged at intervals in the circumferential direction of the valve core shaft 10. The interval distances of the gas passing holes 11 along the direction of the central axis Z can be equal or unequal. The interval angles of the gas passing holes 11 in the circumferential direction of the valve core shaft 10 can be equal or unequal.

[0054] The valve sleeve 20 is provided with a suction interface 21 corresponding to each working area Q. In actual application, the suction interface 21 is used to connect a suction disc, which comprises a plurality of suction groups, each of which comprises at least one suction hole, and the suction interface 21 is used to provide one suction gas path to one suction group of the suction disc. Specifically, a transition hole 24 is formed in the valve sleeve 20 to pass through the inside and outside of the valve sleeve 20, and one transition hole 24 is provided corresponding to each working area Q, and the suction interface 21 is installed at the corresponding transition hole 24. The suction interface 21 is connected and communicated with the gas passing hole 11 of the corresponding working area Q through the transition hole 24. The transition hole 24 is usually a straight hole extending in the radial direction of the valve sleeve 20.

[0055] The control gas channel 13 is connected to all the gas passing holes 11 of the working areas Q, and the control gas channel 13 is connected to the external vacuum generator through the connected control interface K1. The positive pressure or negative pressure generated by the vacuum generator is transmitted to the control gas channel 13 through the control interface K1, and then transmitted to each gas passing hole 11 through the control gas channel 13. When the suction interface 21 is connected and communicated with the corresponding gas passing hole 11, the suction group connected therewith can realize material suction or material release. By connecting one control gas channel 13 with all the gas passing holes 11, the amount of pipeline used can be reduced, and the pipeline layout can be simplified.

[0056] The control interface K1 can be arranged on the valve core shaft 10 or on the valve sleeve 20. In an optional embodiment, the control interface K1 is arranged on one end of the valve core shaft 10 away from the power mechanism 30, the control gas channel 13 is arranged along the central axis Z of the valve core shaft 10 and penetrates the one end, the control interface K1 is directly and sealingly installed on the end of the control gas channel 13, and the two can rotate relative to each other to realize connection with the control gas channel 13.

[0057] In another optional embodiment, in combination with Figure 2 and Figure 3 It is understood that the control interface K1 is arranged on the valve sleeve 20, and the outer annular surface of the valve core shaft 10 is recessed to form a control ring groove 18 arranged around the central axis Z. The bottom of the control ring groove 18 is provided with a control gas hole 17, the control gas hole 17 connects the control ring groove 18 and the control gas channel 13, and the control interface K1 is connected with the control ring groove 18. Specifically, the control interface K1 is connected with the control ring groove 18 through a transition hole 24 on the valve sleeve 20. During the rotation of the valve core shaft 10, the connection between the control interface K1 and the control gas channel 13 can be maintained through the control ring groove 18 and the control gas channel 13. Since the control interface K1 does not need to rotate with the valve core shaft 10, the connection between the control interface K1 and the valve sleeve 20 or the connection between the control interface K1 and the pipeline can be designed as fixed connection, and the interface position is not prone to air leakage.

[0058] In practical applications, the vacuum valve 100 can be applied to an adsorption system comprising an adsorption disc. A plurality of adsorption holes on the adsorption disc are divided into a plurality of adsorption groups, each adsorption group comprising at least one adsorption hole. Each adsorption port 21 is connected to each adsorption group through a pipeline, and the control port K1 is connected to the vacuum generator through a pipeline. When the power mechanism 30 controls the spool shaft 10 to rotate in the same direction, the air passing holes 11 of each working area Q can be sequentially connected to the corresponding adsorption port 21 in the first direction F (directional) along the parallel central axis Z, and only one air passing hole 11 can be connected to the corresponding adsorption port 21 at the same time.

[0059] When the adsorption disc adsorbs materials, the vacuum generator provides negative pressure, the spool shaft 10 rotates in the positive direction, each air passing hole 11 is sequentially connected to the corresponding adsorption port 21 in the first direction F, so that the adsorption groups connected to each adsorption port 21 sequentially adsorb materials. When the adsorption disc releases materials, the vacuum generator provides positive pressure, the spool shaft 10 rotates in the reverse direction, each air passing hole 11 is connected to the corresponding adsorption port 21 in the direction opposite to the first direction F, so that the adsorption groups connected to each adsorption port 21 sequentially release materials.

[0060] In this way, the vacuum valve 100 in the embodiment of the present application can realize that one vacuum generator sequentially connects the plurality of adsorption groups of the adsorption disc, which not only can reduce the number of valve bodies, reduce the cost, and simplify the pipeline layout, but also can make the adsorption disc cooperate closely with the mechanical hand. When the mechanical hand sequentially releases materials to each adsorption group of the adsorption disc, each adsorption group can sequentially adsorb materials, and when each adsorption group of the adsorption disc sequentially releases materials, the mechanical hand can sequentially take materials from each adsorption group, thereby saving the material taking and releasing time and improving the working efficiency of the test equipment. In addition, the vacuum generator only needs to be connected to the control air passage 13 of the vacuum valve 100 to connect all the air passing holes 11, which further reduces the number of pipelines, avoids complicated pipelines, and reduces the cost.

[0061] In some embodiments, in combination with Figure 4 and Figure 5 It is understood that among the N working areas Q, at least N-1 adjacent working areas Q are provided with pressure maintaining portions 12. The pressure maintaining portions 12 are longitudinally arranged around the central axis Z, and are arranged in the circumferential direction of the working area Q with the air passing holes 11 of the same working area Q. The air passing holes 11 and the pressure maintaining portions 12 of the same working area Q do not simultaneously face the corresponding adsorption port 21.

[0062] Specifically, as Figure 4 in the direction indicated by the first direction F, the first working area Q to the N-1 working area Q are provided with pressure maintaining portions 12, and the N working area Q is not provided with pressure maintaining portions 12. Specifically, all working areas Q can be provided with pressure maintaining portions 12.

[0063] The same work area Q, when the air hole 11 is connected with the adsorption interface 21, the pressure maintaining part 12 is staggered with the adsorption interface 21. When the pressure maintaining part 12 is connected with the adsorption interface 21, the air hole 11 is staggered with the adsorption interface 21. After the adsorption interface 21 is connected with the air hole 11, the pressure maintaining part 12 is used to maintain the air pressure of the adsorption air path where the adsorption interface 21 is located, realizes the pressure maintaining function of the adsorption group connected with the adsorption interface 21, so that the adsorption group can keep the material after the material is adsorbed, and avoids air leakage.

[0064] In actual application, when the air hole 11 of one work area Q is connected with the corresponding adsorption interface 21, so that the corresponding adsorption group adsorbs the material, when the valve core shaft 10 rotates to the air hole 11 of the next work area Q and the corresponding adsorption interface 21 is connected, the pressure maintaining part 12 of the previous work area Q is connected with the corresponding adsorption interface 21, and the adsorption group connected with the adsorption interface 21 keeps the material after the material is adsorbed. Thus, when the adsorption groups of the adsorption disc realize the material adsorption in sequence, the adsorption group after the material is adsorbed can keep the material after the material is adsorbed, so as to facilitate the detection, test and other operations of the other devices of the test equipment, such as the detection device, on the adsorbed material during the material adsorption process, or facilitate the transportation of the material, and improve the working efficiency of the test device.

[0065] The pressure maintaining part 12 extends in a circular arc shape around the ring direction of the work area Q, and after the pressure maintaining part 12 is connected with the adsorption interface 21, the adsorption group can keep the internal air pressure for a certain time to keep the material. The extension length of the pressure maintaining part 12 can be set according to the required pressure maintaining time. For example, if the required pressure maintaining time is the same after the adsorption group adsorbs the material, the extension lengths of the pressure maintaining parts 12 can be equal. If the pressure maintaining is not required after all the adsorption groups adsorb the material, and the adsorption group that absorbs the material first needs a longer pressure maintaining time, the extension lengths of the pressure maintaining parts 12 can be set to be different.

[0066] In a preferred embodiment, referring to Figures 3 to 5 , and combining Figure 6 , the pressure maintaining part 12 includes a pressure maintaining groove 12a arranged on the outer ring surface of the work area Q, and the pressure maintaining groove 12a is longitudinally arranged around the central axis Z. The valve core shaft 10 is provided with a pressure maintaining air channel 14 connected with the pressure maintaining groove 12a, and the vacuum valve 100 further includes a pressure maintaining interface K2 connected with the pressure maintaining air channel 14.

[0067] The pressure maintaining groove 12a is an arc-shaped groove, and the arc length thereof is the extension length thereof. Preferably, the pressure maintaining air channel 14 is a straight hole arranged in the valve core shaft 10 and parallel to the central axis Z, the pressure maintaining air channel 14 penetrates the groove wall of the connected pressure maintaining groove 12a, and the pressure maintaining air channel 14 is not connected with the control air channel 13 and the air hole 11.

[0068] In actual application, the pressure maintaining air passage 14 is in communication with another vacuum generator outside through the pressure maintaining interface K2, and the pressure in the pressure maintaining air passage 14 can be maintained at a required pressure by the vacuum generator, thereby avoiding the problem of air leakage of the adsorption interface 21 connected with the pressure maintaining groove 12a, and ensuring that the adsorption group can effectively maintain the adsorption material.

[0069] Preferably, all the pressure maintaining grooves 12a are in communication with the same pressure maintaining air passage 14. That is, one pressure maintaining air passage 14 is arranged on the valve core shaft 10, and one pressure maintaining interface K2 is arranged on the valve sleeve 20. At this time, all the pressure maintaining grooves 12a are in communication with the vacuum generator outside through one pressure maintaining air passage 14 and one pressure maintaining interface K2, which can further reduce the number of pipelines.

[0070] In other embodiments, a plurality of pressure maintaining air passages 14 can be arranged in the valve core shaft 10, and the pressure maintaining interfaces K2 corresponding to the pressure maintaining air passages 14 are independently arranged on the valve sleeve 20, and the pressure maintaining grooves 12a connected by different pressure maintaining air passages 14 are different.

[0071] In some embodiments, the pressure maintaining interface K2 can be arranged on the valve sleeve 20 or the valve core shaft 10, like the control interface K1. In other embodiments, in combination with the understanding that the pressure maintaining interface K2 is arranged on the valve sleeve 20, and the valve core shaft 10 is provided with a pressure maintaining ring groove 16, the pressure maintaining air passage 14 is in communication with the pressure maintaining ring groove 16, and the pressure maintaining interface K2 is in communication with the pressure maintaining ring groove 16 through a transition hole 24 on the valve sleeve 20. Figure 2 Figure 3 and Figure 6 In this way, the communication between the pressure maintaining interface K2 and the pressure maintaining air passage 14 can be maintained during the rotation of the valve core shaft 10, and the pressure maintaining interface K2 can be fixedly installed on the valve sleeve 20 without following the rotation of the valve core shaft 10, and the structure is simpler.

[0072] Further to the embodiments, the extension length of the pressure maintaining part 12 of each working area Q is arranged in a decreasing manner towards the direction of the Nth working area Q; in the direction pointing to the Nth working area Q, when the air passing hole 11 of the nth working area Q is in butt joint with the corresponding adsorption interface 21, the pressure maintaining part 12 of the 1st to the (n-1)th working area Q is in butt joint with the corresponding adsorption interface 21, and the pressure maintaining part 12 of the nth to the (N-1)th working area Q is staggered with the corresponding adsorption interface 21, 1 < n < N-1.

[0073] Among all the working areas Q, the working area Q other than the adjacent N-1 working areas Q is the Nth working area Q, and the direction of the Nth working area Q is the first direction F shown in the figure. Referring to Figure 4 , the working areas Q are arranged in an increasing order according to the first direction F, and the length of the pressure maintaining part 12 of the 1st to the (N-1)th working area Q decreases in turn.

[0074] ​In actual application, the pressure maintaining part 12 is taken as an example of the pressure maintaining groove 12a. When the suction disc is sucking materials, one vacuum generator provides negative pressure to each air passage hole 11 through the control air path, and another vacuum generator maintains the air pressure of each pressure maintaining groove 12a through the pressure maintaining air path. The valve core shaft 10 rotates in the positive direction and sequentially causes the air passage hole 11 of each working area Q to be in butt joint with the corresponding suction interface 21 in the first direction F. The suction interfaces 21 are arranged according to the order of the working areas Q. When the valve core shaft 10 rotates from the position where the air passage hole 11 of the nth working area Q is in butt joint with the nth suction interface 21 to the position where the air passage hole 11 of the (n+1)th working area Q is in butt joint with the (n+1)th suction interface 21, the pressure maintaining groove 12a of the nth working area Q is in butt joint with the corresponding nth suction interface 21, so that the suction group in communication with the nth suction interface 21 maintains the state of sucking materials.

[0075] When the air passage hole 11 of the nth working area Q is in butt joint with the corresponding suction interface 21, the pressure maintaining grooves 12a of the 1st to (n-1)th working areas Q can be in butt joint with the corresponding suction interfaces 21, and the pressure maintaining grooves 12a of the nth to (N-1)th working areas Q are staggered with the corresponding suction interfaces 21.

[0076] In combination Figure 5 It is understood that, in an example, 17 working areas Q are arranged on the valve core shaft 10, the 1st to 16th working areas Q are provided with pressure maintaining grooves 12a, and the extension lengths of the pressure maintaining grooves 12a are sequentially decreased, and the extension length of the 1st pressure maintaining groove 12a is the largest.

[0077] When the valve core shaft 10 rotates in the positive direction, when the air passage hole 11 of the 1st working area Q is in butt joint with the 1st suction interface 21, the pressure maintaining groove 12a of the 1st working area Q is staggered with the 1st suction interface 21, and the air passage holes 11 and pressure maintaining grooves 12a of the remaining working areas Q are staggered with the corresponding suction interfaces 21; when the air passage hole 11 of the 2nd working area Q is in butt joint with the 2nd suction interface 21, the pressure maintaining groove 12a of the 1st working area Q is in butt joint with the 1st suction interface 21, the pressure maintaining groove 12a of the 2nd working area Q is staggered with the 2nd suction interface 21, and the air passage holes 11 and pressure maintaining grooves 12a of the remaining working areas Q are staggered with the suction interfaces 21; and so on, when the air passage hole 11 of the 17th working area Q is in butt joint with the 17th suction interface 21, the pressure maintaining grooves 12a of the 1st to 16th working areas Q are in butt joint with the corresponding suction interfaces 21.

[0078] Therefore, the pressure maintaining part 12 (such as the pressure maintaining groove 12a) of the working area Q where the air passing hole 11 first interfaces with the suction interface 21 has the longest pressure maintaining time. At this time, the length of the pressure maintaining part 12 is set to decrease along the first direction F, so that when the air passing hole 11 interfaces with the corresponding suction interface 21 in sequence, the pressure maintaining part 12 (such as the pressure maintaining groove 12a) can maintain the pressure of the suction interface 21 connected with the suction group that has already sucked the material, so that the suction group that has finished sucking the material can continue to suck the material when the multiple suction groups connected with the vacuum valve 100 suck the material in sequence.

[0079] In actual application, when the suction disc releases the material, the vacuum generator connected with the control gas path provides positive pressure to the air passing hole 11, and the vacuum generator connected with the pressure maintaining gas path can work or stop working. The valve core shaft 10 rotates reversely, and each air passing hole 11 provides positive pressure to the corresponding suction interface 21 in the direction opposite to the first direction F, so that each suction group releases the material in sequence by breaking the vacuum.

[0080] In some embodiments, referring to Figure 7 In the projection plane M perpendicular to the central axis Z, the included angle between the projection center O2 of each adjacent two air passing holes 11 and the projection center O1 of the central axis Z is the step angle a1 between the adjacent two air passing holes 11, and the sum of all the step angles a1 is less than 360°.

[0081] In actual application, the power mechanism 30 controls the rotation of the valve core shaft 10 according to the step angle a1 between each adjacent air passing hole 11. For example, the step angle a1 between the first air passing hole 11, the second air passing hole 11 and the third air passing hole 11 is 20°, the valve core shaft 10 rotates 20° from the position where the air passing hole 11 of the first working area Q interfaces with the suction interface 21, reaches the position where the air passing hole 11 of the second working area Q interfaces with the suction interface 21, and continues to rotate 20° to reach the position where the third air passing hole 11 interfaces with the suction interface 21.

[0082] The number of the step angles a1 is N-1. The sum of all the step angles a1 is the angle rotated by the valve core shaft 10 from the position where the air passing hole 11 of the first working area Q interfaces with the suction interface 21 to the position where the air passing hole 11 of the Nth working area Q interfaces with the suction interface 21. All the step angles a1 are less than 360°, so the valve core shaft 10 does not need to rotate a full circle to realize the interface of each air passing hole 11 with the suction interface 21, so that each suction group can quickly suck and release the material.

[0083] In some embodiments, at least N-1 adjacent working zones Q are provided with pressure maintaining portions 12 arranged along the central axis Z. Each pressure maintaining portion 12 has a proximal end a1 and a distal end a2, and the proximal end a1 is arranged adjacent to the gas passage hole 11. In the projection plane M, the angle between the line connecting the projection center O3 of the proximal end a1 of each pressure maintaining portion 12 and the projection center O4 of the distal end a2 and the projection center O1 of the central axis Z is the pressure maintaining angle a2, and the angle between the line connecting the projection center O3 of the proximal end a1 of the same working zone Q and the projection center O2 of the gas passage hole 11 and the projection center O1 of the central axis Z is the adjacent angle a3.

[0084] Figure 8 A schematic diagram of the projection of the gas passage hole 11 and the pressure maintaining groove 12a in the first working zone Q on the projection plane M is shown. As shown, in the circumferential direction of the working zone Q, the proximal end a1 of the pressure maintaining portion 12 is arranged closer to the gas passage hole 11 than the distal end a2. Figure 8

[0085] Specifically, in the order of the direction pointing to the Nth working zone Q other than the adjacent N-1 working zones Q, the adjacent angle a3 of the jth working zone Q is equal to the step angle a1 between the gas passage hole 11 of the jth working zone Q and the gas passage hole 11 of the j+1th working zone Q, 1≤j

[0086] Specifically, the difference between the pressure maintaining angles a2 of the pressure maintaining portions 12 of the adjacent working zones Q is equal to the step angle a1 between the gas passage holes 11 of the adjacent working zones Q. In this way, the time when the corresponding adsorption interface 21 of each adjacent working zone Q ends the docking with the pressure maintaining portion 12 can be made consistent. In actual application, when the valve core shaft 10 is rotated forward to the position where the gas passage hole 11 of the Nth working zone Q corresponds to the adsorption interface 21, if the valve core shaft 10 is continuously rotated, the adsorption interfaces 21 corresponding to the other working zones Q can end the docking with the pressure maintaining portions 12 synchronously, which facilitates the design of the length of the pressure maintaining portions 12.

[0087] ​It should be noted that, based on the difference between the pressure-keeping angles a2 of the adjacent pressure-keeping portions 12 being equal to the corresponding step angles a1, if the pressure-keeping angle a2 of the pressure-keeping portion 12 of the first working zone Q is equal to the sum of the step angles a1 of the second working zone Q to the Nth working zone Q, when the valve core shaft 10 is positively rotated to the position where the through hole 11 of the Nth working zone Q corresponds to the corresponding adsorption interface 21, the distal end a2 of the pressure-keeping portion 12 of the first working zone Q to the N-1th working zone Q all correspond to the corresponding adsorption interface 21. In this way, the extension length of each pressure-keeping portion 12 is just suitable for the pressure-keeping requirement, and there is no length redundancy.

[0088] In this case, the working process of the vacuum valve 100 is as follows: when the valve core shaft 10 is positively rotated by an adjacent angle a3 at the position where the through hole 11 of the first working zone Q corresponds to the corresponding adsorption interface 21, the valve core shaft 10 reaches the position where the proximal end a1 of the pressure-keeping portion 12 of the first working zone Q corresponds to the corresponding adsorption interface 21, and since the adjacent angle a3 is equal to the step angle a1 between the through hole 11 of the first working zone Q and the through hole 11 of the second working zone Q, at this time, the valve core shaft 10 is also at the position where the through hole 11 of the second working zone Q corresponds to the corresponding adsorption interface 21.

[0089] With the continuous rotation of the valve core shaft 10, the adsorption interface 21 corresponding to the first working zone Q gradually moves along the circumferential direction relative to the proximal end a1 of the pressure-keeping portion 12 and towards the distal end a2 of the pressure-keeping portion 12, and when the valve core shaft 10 is positively rotated by the pressure-keeping angle a2 of the first working zone Q (i.e., the adsorption interface 21 corresponding to the first working zone Q reaches the position corresponding to the distal end a2 of the pressure-keeping portion 12), the distal end a2 of the pressure-keeping portion 12 of the second working zone Q to the N-1th working zone Q is also at the position corresponding to the adsorption interface 21, and meanwhile, the through hole 11 of the Nth working zone Q is at the position corresponding to the adsorption interface 21.

[0090] It should be noted that, based on the difference between the pressure-keeping angles a2 of the adjacent pressure-keeping portions 12 being equal to the corresponding step angles a1, if the pressure-keeping angle a2 of the pressure-keeping portion 12 of the first working zone Q exceeds the sum of the step angles a1 of the second working zone Q to the Nth working zone Q, when the valve core shaft 10 is rotated to the position where the through hole 11 of the Nth working zone Q corresponds to the corresponding adsorption interface 21, the position corresponding to the adsorption interface 21 of the pressure-keeping portion 12 of the first working zone Q to the N-1th working zone Q has not reached the distal end a2 of the pressure-keeping portion 12, which indicates that the length of the pressure-keeping portion 12 is designed with a certain redundancy. In actual application, the pressure-keeping air channel 14 can be communicated with the pressure-keeping groove 12a through the distal end a2 part of the redundant length, and meanwhile, the setting of the redundant length can reduce the driving precision of the power mechanism 30.

[0091] On the projection surface M, the angle between the projection center O4 of the distal end a2 of the pressure maintaining portion 12 and the line connecting the projection center O2 of the air hole 11 and the center axis Z is defined as the blanking angle a4 (as shown in Figure 8 The sum of the blanking angle a4, the adjacent angle a3 and the pressure maintaining angle a2 is 360°. The area between the distal end a2 of the pressure maintaining portion 12 and the air hole 11 is the blanking surface m1. The area between the proximal end a1 of the pressure maintaining portion 12 and the air hole 11 is the transition surface m2.

[0092] In actual application, as the working area Q increases, the length of the blanking surface m1 increases, and the length of the transition surface m2 remains unchanged. The transition surface m2 and the blanking surface m1 are used to correspond to the adsorption interface 21 when neither the pressure maintaining portion 12 nor the air hole 11 of the working area Q is connected to the adsorption interface 21. The blanking surface m1 and the transition surface m2 are in sealing connection with the inner wall of the valve sleeve 20, and have a certain sealing effect.

[0093] In some embodiments, the step angle a1 between each adjacent two air holes 11 is equal. In this way, the valve core shaft 10 has the same step angle each time, simplifying the structural design of the vacuum valve 100 and the control of the power mechanism 30.

[0094] Further, as shown in Figure 1 and Figure 2 , all the adsorption interfaces 21 are arranged on the same track arranged by the parallel center axis Z. That is, all the adsorption interfaces 21 are arranged in sequence along a straight line. In this way, the structural design of the vacuum valve 100 is simplified. In the case where the step angle a1 between each adjacent air hole 11 is equal, the power mechanism 30 can control the rotation of the valve core shaft 10 according to the step angle a1 between the air holes 11, so that each air hole 11 can be smoothly connected to the adsorption interface 21, simplifying the control. In other embodiments, when the step angle a1 between each air hole 11 is not equal, all the adsorption interfaces 21 can also be arranged according to other tracks, as long as each adsorption interface 21 can be sequentially connected to each air hole 11 with the rotation of the valve core shaft 10.

[0095] Further, as shown in Figure 4 , the center of the distal end a2 of the pressure maintaining portion 12 of all the working areas Q in the adjacent N-1 working areas Q is located on the same straight line parallel to the center axis Z.

[0096] Designing the distal end a2 of each pressure maintaining portion 12 on the same straight line, and using the distal end a2 of each pressure maintaining portion 12 to adapt to the straight-line extending pressure maintaining air passage 14, can simplify the processing design of the pressure maintaining air passage 14 and reduce the cost.

[0097] In some embodiments, the pressure maintaining angle a2 of the pressure maintaining portion 12 of the first working zone Q is greater than the sum of the step angles a1 between the air holes 11 of the second to Nth working zones Q on the projection surface M. As described above, in this case, the extension length of the pressure maintaining portion 12 has a certain redundancy.

[0098] Preferably, the pressure maintaining angle a2 of the pressure maintaining portion 12 of the first working zone Q is equal to the sum of all step angles a1. For example, when there are 17 working zones Q on the valve core shaft 10, and the step angle a1 between the air holes 11 of every two adjacent working zones Q is Δ, then the pressure maintaining angle a2 of the pressure maintaining portion 12 of the first pressure maintaining zone is 16*Δ, which can simplify the design of the pressure maintaining portion 12.

[0099] In some embodiments, a plurality of sealing grooves 15 are arranged on the inner recess of the outer ring surface of the valve core shaft 10, and the sealing grooves 15 are arranged on both sides of each working zone Q. A sealing ring 40 is arranged in each sealing groove 15, and the sealing ring 40 is sealingly connected to the valve sleeve 20. Specifically, the sealing ring 40 is compressed between the inner wall of the valve sleeve 20 and the groove bottom of the sealing groove 15, and is used to seal and isolate the air holes 11 of each working zone Q.

[0100] As can be understood, when the suction interface 21 is misaligned with the air holes 11 and the pressure maintaining portion 12 of the corresponding working zone Q, it is in abutment with the blank surface m1 or the transition surface m2 of the corresponding working zone Q. The outer ring size of the sealing ring 40 should be designed to meet the isolation between the working zones Q, and should not hinder the sealing contact between the blank surface m1 and the transition surface m2 of each working zone Q and the inner wall of the valve sleeve 20, so as to avoid the communication between the pressure maintaining groove 12a and the air hole 11 in the same working zone Q. For example, the outer ring size of the sealing ring 40 is basically the same as the outer diameter size of the outer ring surface of the working zone Q. For another example, an annular groove is arranged on the inner wall of the valve sleeve 20, and part of the sealing ring 40 is embedded in the annular groove, without interfering with the sealing contact between the blank surface m1 and the transition surface m2 and the inner wall of the valve sleeve 20.

[0101] In a specific embodiment of the present application, the power mechanism 30 comprises a stepping motor, the valve core shaft 10 is provided with N working zones Q arranged in sequence, each working zone Q is provided with a sealing groove 15 on both sides, and a sealing ring 40 is arranged in the sealing groove 15. Each working zone Q is provided with a gas passing hole 11, and N-1 adjacent working zones Q are provided with a pressure maintaining groove 12a, the gas passing hole 11 and the pressure maintaining groove 12a are arranged along the circumferential direction of the working zone Q. The valve core shaft 10 is provided with a pressure maintaining air channel 14 and a control air channel 13, both of which extend along the central axis Z of the valve core shaft 10, the pressure maintaining air channel 14 is connected to all the pressure maintaining grooves 12a, and the control air channel 13 is connected to all the gas passing holes 11. Each gas passing hole 11 is arranged on a spiral track around the central axis Z, and the step angle α1 between each adjacent two gas passing holes 11 is Δ, and the sum of all the step angles α1 is less than 360°. In the direction pointing to the Nth working zone Q, the length of each pressure maintaining groove 12a increases in sequence, and the difference between the pressure maintaining angles α2 of each adjacent two pressure maintaining grooves 12a is Δ. The adjacent angle α3 between the pressure maintaining groove 12a and the gas passing hole 11 of the same working zone Q is Δ. The pressure maintaining angle α2 of the first pressure maintaining groove 12a is (N-1)*Δ.

[0102] The plurality of adsorption interfaces 21 on the valve sleeve 20 are arranged in sequence along the direction parallel to the central axis Z. Each adsorption interface 21 is connected to a group of adsorption groups, the valve sleeve 20 is provided with a pressure maintaining interface K2 and a control interface K1, the outer ring surface of the valve core shaft 10 is provided with a pressure maintaining ring groove 16 and a control ring groove 18, the pressure maintaining ring groove 16 is connected to the pressure maintaining interface K2 and the pressure maintaining air channel 14, the control ring groove 18 is connected to the control air channel 13 through the control air hole 17 on the valve core shaft 10, and the control ring groove 18 is connected to the control interface K1.

[0103] In addition, the embodiment of the present application also provides an adsorption system, which comprises an adsorption disc, the vacuum valve 100 in the above embodiment, and a vacuum generator. The adsorption disc comprises a plurality of adsorption groups, each adsorption group comprises at least one adsorption hole for adsorbing a workpiece, and each adsorption interface 21 on the vacuum valve 100 is connected to an adsorption group through a pipeline. The vacuum generator is connected to the control interface K1 through a pipeline.

[0104] When the vacuum generator transmits negative pressure to the control air channel 13 through the control interface K1, the power mechanism 30 controls the valve core shaft 10 to rotate forward step by step according to the step angle α1 of each adjacent two gas passing holes 11, so that each gas passing hole 11 sequentially connects the adsorption interface 21 and the control air channel 13 in the first direction F parallel to the central axis Z, and controls the adsorption group connected to each adsorption interface 21 to adsorb material;

[0105] When the vacuum generator transmits positive pressure to the control air channel 13 through the control interface K1, the power mechanism 30 can control the valve core shaft 10 to rotate reversely step by step according to the step angle a1 between every two adjacent air holes 11, so that the air holes 11 sequentially communicate the adsorption interface 21 with the control air channel 13 in the direction opposite to the first direction F, and the adsorption groups connected with the adsorption interface 21 are controlled to discharge.

[0106] When the vacuum generator provides negative pressure to the control air channel 13, the negative pressure is transmitted to the adsorption group through the air hole 11 and the adsorption interface 21, so that the adsorption group absorbs material. When the vacuum generator provides positive pressure to the control air channel 13, the positive pressure is transmitted to the adsorption group through the air hole 11 and the adsorption interface 21, so that the adsorption group breaks the vacuum to discharge material.

[0107] The adsorption system contains all the beneficial effects in the above-mentioned embodiments, which will not be repeated here.

[0108] In further embodiments, the vacuum valve 100 includes the above-mentioned pressure maintaining interface K2 and the above-mentioned pressure maintaining groove 12a, the pressure maintaining interface K2 is connected with the second vacuum generator, and the control interface K1 of the vacuum valve 100 is connected with the first vacuum generator. In specific applications, one working process of the adsorption system is as follows:

[0109] 1) The first vacuum generator provides negative pressure, and the second vacuum generator works; the step motor drives the valve core shaft 10 to rotate forward step by step with a step angle a1 of D, so that the air holes 11 of the first to Nth working areas Q are sequentially butted against the corresponding adsorption interfaces 21 in the direction pointing to the Nth working area Q (i.e. the first direction F), so that the adsorption groups connected with each adsorption interface 21 sequentially adsorb the material placed on the adsorption group by the external mechanical hand, realizing that the mechanical hand discharges material while the adsorption disc adsorbs material;

[0110] In this process, after the valve core shaft 10 rotates to the butting of the air hole 11 of the first working area Q with the corresponding adsorption interface 21, with each rotation of the valve core shaft 10 by an angle of D, the pressure maintaining grooves 12a of the first to N-1th working areas Q are sequentially butted against the corresponding adsorption interfaces 21, so that the adsorption groups connected with each pressure maintaining groove 12a continuously maintain the adsorption of material while being unaffected by the vacuum leakage of the adsorption interface 21 connected with the adsorption group which has not adsorbed material (at this time, the adsorption interface 21 connected with the adsorption group which has not adsorbed material is butted against the blanking surface m1, and due to the influence of machining precision and other factors, the sealing degree of the blanking surface m1 with the valve sleeve 20 often cannot meet the pressure maintaining requirement and there is a certain degree of air leakage);

[0111] When the air hole 11 of the Nth working area Q is butted against the corresponding adsorption interface 21, the pressure maintaining grooves 12a of the first to N-1th working areas Q are all butted against the corresponding adsorption interfaces 21, and the valve core shaft 10 is stopped from rotating forward;

[0112] Thus, all the adsorption groups on the adsorption disc that are in communication with the vacuum valve 100 complete the adsorption of materials;

[0113] 2) The second vacuum generator provides positive pressure, and the second vacuum generator stops working; the stepper motor drives the valve core shaft 10 to rotate reversely step by step with a step distance of Δ and an angle of a1, so that the air holes 11 of the Nth to 1st working zones Q are sequentially docked with the corresponding adsorption interfaces 21 in the direction opposite to the first direction F, so that the adsorption groups on the adsorption disc connected with the adsorption interfaces 21 release the adsorbed materials in sequence, and the external mechanical arm can take the materials from the adsorption groups in sequence, realizing the taking of materials while the adsorption disc is discharging materials.

[0114] It should be noted that "forward rotation" and "reverse rotation" mentioned in the embodiments of the present application are two opposite concepts and are not limited to specific directions. The specific directions of forward rotation and reverse rotation are determined according to the rotation direction of the spiral track, the arrangement position of the power mechanism 30, etc., as long as the adsorption groups connected with the vacuum valve 100 can sequentially adsorb materials when the valve core shaft 10 rotates forward, and the adsorption groups connected with the vacuum valve 100 can sequentially release materials when the valve core shaft 10 rotates reversely.

[0115] It can be understood that the number of adsorption groups on the adsorption disc can exceed the number of adsorption interfaces 21 in the vacuum valve 100. When the number exceeds, the adsorption disc can be connected with multiple vacuum valves 100, which can also achieve the purpose of reducing the number of valve components and simplifying the structure of the adsorption system.

[0116] In addition, the embodiments of the present application also provide a test device comprising the adsorption system in the above embodiments. The test device can be a sorting test device, a probe station device, an aging test device, etc., and is used for performance testing of semiconductor devices such as chips or wafers. The application scenarios of the adsorption system in the test device are various. For example, the adsorption disc of the adsorption system is arranged on a test platform, and the adsorption disc is used to adsorb materials for testing. For another example, the adsorption disc of the adsorption system is arranged on a material conveying mechanism, and the material conveying mechanism can adsorb multiple materials at a time through the adsorption disc, so as to realize the synchronous conveying of multiple materials.

[0117] The technical features of the above-described embodiments can be combined in any manner. To make the description concise, not all possible combinations of the technical features in the above-described embodiments are described, but as long as the combinations of the technical features do not exist contradictions, they should be considered as the scope of the present disclosure.

[0118] The above-described embodiments are merely illustrative of several embodiments of the present application, which are described in more detail and in a specific and detailed manner, but should not be construed as limiting the scope of the patent of the present application. It should be noted that, for those of ordinary skill in the art, several modifications and improvements can be made without departing from the concept of the present application, and these all belong to the protection scope of the present application. Therefore, the protection scope of the patent of the present application should be subject to the appended claims.

Claims

1. A vacuum valve (100), characterized in that: include: The valve core shaft (10) is divided into N working areas (Q) arranged in sequence along its own central axis (Z), and an air hole (11) is provided on the outer ring surface of each working area (Q), and all the air holes (11) are arranged in sequence along the same spiral track arranged around the central axis (Z); a control air channel (13) is provided in the valve core shaft (10) and is connected to each of the air holes (11), and N is greater than or equal to 2; A valve sleeve (20), wherein the valve core shaft (10) is rotatably disposed in the valve sleeve (20) around the central axis (Z), the outer annular surface of each working area (Q) is sealedly connected to the inner wall of the valve sleeve (20), and the valve sleeve (20) is provided with N adsorption interfaces (21) corresponding to the N working areas (Q); A control interface (K1) communicates with the control airway (13); A power mechanism (30) is connected to the valve core shaft (10) and is used to drive the valve core shaft (10) to rotate. When the valve core shaft (10) rotates in the same direction, each of the air holes (11) can be connected to the corresponding adsorption interface (21) in sequence, and when one of the air holes (11) is connected to the corresponding adsorption interface (21), the remaining air holes (11) are staggered from the corresponding adsorption interface (21). Among the N working areas (Q), at least N-1 adjacent working areas (Q) are provided with a pressure-maintaining portion (12), the pressure-maintaining portion (12) is arranged longitudinally around the central axis (Z), and is spaced apart from the air holes (11) of the same working area (Q) in the circumferential direction of the working area (Q); the air holes (11) and the pressure-maintaining portion (12) of the same working area (Q) are not connected to the corresponding adsorption interface (21) at the same time.

2. The vacuum valve (100) according to claim 1, characterized in that The pressure-maintaining portion (12) includes a pressure-maintaining groove (12a) provided on the outer annular surface of the working area (Q), and the pressure-maintaining groove (12a) is longitudinally arranged around the central axis (Z); a pressure-maintaining air channel (14) in communication with the pressure-maintaining groove (12a) is provided in the valve core shaft (10), and the vacuum valve (100) further includes a pressure-maintaining interface (K2) in communication with the pressure-maintaining air channel (14); All the pressure-maintaining grooves (12a) are connected to the same pressure-maintaining air channel (14); The pressure-maintaining interface (K2) is arranged on the valve sleeve (20), and the outer ring surface of the valve core shaft (10) is recessed with a pressure-maintaining ring groove (16) arranged around the central axis (Z), and the pressure-maintaining ring groove (16) connects the pressure-maintaining air channel (14) and the pressure-maintaining interface (K2).

3. The vacuum valve (100) according to claim 1, characterized in that The extension length of the pressure-maintaining portion (12) of each working area (Q) is arranged to decrease in sequence in the direction of the Nth working area (Q); Arranged in a direction pointing toward the Nth working area (Q), when the air hole (11) of the nth working area (Q) is docked with the corresponding adsorption interface (21), the pressure-maintaining parts (12) of the 1st to n-1th working areas (Q) are docked with the corresponding adsorption interface (21), and the pressure-maintaining parts (12) of the nth to N-1th working areas (Q) are staggered with the corresponding adsorption interface (21), 1<n<N-1.

4. The vacuum valve (100) according to any one of claims 1 to 3, characterized in that: On a projection plane (M) perpendicular to the central axis (Z), the angle between the line connecting the projection centers (O2) of each two adjacent air holes (11) and the projection center (O1) of the central axis (Z) is the step angle (α1) between the two adjacent air holes (11), and the sum of all the step angles (α1) is less than 360°.

5. The vacuum valve (100) according to claim 4, characterized in that Among the N working areas (Q), at least N-1 adjacent working areas (Q) are provided with a pressure-maintaining portion (12) longitudinally arranged around the central axis (Z); The two ends of each pressure-maintaining portion (12) in the longitudinal direction are respectively a proximal end (a1) and a distal end (a2), the proximal end (a1) being arranged adjacent to the air hole (11), and on the projection surface (M), the angle between the line connecting the projection center (O3) of the proximal end (a1) and the projection center (O4) of the distal end (a2) of each pressure-maintaining portion (12) and the projection center (O1) of the central axis (Z) is a pressure-maintaining angle (α2); the angle between the line connecting the projection center (O3) of the proximal end (a1) of the same working area (Q) and the projection center (O2) of the air hole (11) and the projection center (O1) of the central axis (Z) is an adjacent angle (α3); The difference between the holding angles (α2) of the holding portions (12) of adjacent working areas (Q) is equal to the step angle (α1) between the air holes (11) of the adjacent working areas (Q); when arranged in a direction pointing toward the Nth working area (Q), the adjacent angle (α3) of the jth working area (Q) is equal to the step angle (α1) between the air hole (11) of the jth working area (Q) and the air hole (11) of the j+1th working area (Q), and 1≤j<N.

6. The vacuum valve (100) according to claim 5, characterized in that The step angles (α1) between every two adjacent air holes (11) are equal; All the adsorption interfaces (21) are arranged on the same track parallel to the central axis (Z); In the adjacent N-1 working areas (Q), the centers of the distal ends (a2) of the pressure-maintaining portions (12) of all the working areas (Q) are located on the same straight line parallel to the central axis (Z); On the projection surface (M), the pressure holding angle (α2) of the pressure holding portion (12) of the first working area (Q) is greater than the sum of the step angles (α1) between the air holes (11) of the second to Nth working areas (Q).

7. The vacuum valve (100) according to any one of claims 1 to 3, characterized in that: A plurality of sealing grooves (15) are concavely provided on the outer ring surface of the valve core shaft (10), and the sealing grooves (15) are arranged on both sides of each working area (Q). A sealing ring (40) is provided in the sealing groove (15), and the sealing ring (40) is sealed and connected to the valve sleeve (20).

8. The vacuum valve (100) according to any one of claims 1 to 3, characterized in that: The control interface (K1) is arranged on the valve sleeve (20), the outer ring surface of the valve core shaft (10) is recessed with a control ring groove (18) arranged around the central axis (Z), the bottom of the control ring groove (18) is provided with a control air hole (17), the control air hole (17) connects the control ring groove (18) and the control air channel (13), and the control interface (K1) is connected to the control ring groove (18).

9. An adsorption system, characterized in that: include: The adsorption plate includes a plurality of adsorption groups, each adsorption group includes at least one adsorption hole for adsorbing a workpiece; The vacuum valve (100) according to any one of claims 1 to 8, wherein each of the adsorption interfaces (21) is connected to one of the adsorption groups via a pipeline; a vacuum generator, connected to the control interface (K1) via a pipeline; When the vacuum generator transmits negative pressure to the control air channel (13) via the control interface (K1), the power mechanism (30) can control the valve core shaft (10) to rotate in a stepwise positive direction according to the step angle (α1) between each two adjacent air holes (11), so that each air hole (11) sequentially connects the adsorption interface (21) with the control air channel (13) along a first direction (F) parallel to the central axis (Z), thereby controlling the adsorption group connected to each adsorption interface (21) to absorb material; When the vacuum generator transmits positive pressure to the control air channel (13) via the control interface (K1), the power mechanism (30) can control the valve core shaft (10) to rotate in the opposite direction step by step according to the step angle (α1) between each two adjacent air holes (11), so that each air hole (11) connects the adsorption interface (21) with the control air channel (13) in sequence along the direction opposite to the first direction (F), thereby controlling the discharge of the adsorption group connected to each adsorption interface (21).

10. A testing device, characterized in that: Comprising the adsorption system of claim 9.

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