Sintering furnace temperature measuring device fault diagnosis method based on multi-source data

Abstract

The invention discloses a sintering furnace temperature measuring device fault diagnosis method based on multi-source data. Fault judgment of temperature measuring devices is carried out by combining the power of three heating bodies in a furnace body and the temperature displayed by the three temperature measuring devices. The method specifically comprises the following steps that firstly, the power P3 of a heating body p3 is calculated according to the situation in a sintering furnace, and then the power P1 and the power P2 of the heating body p1 and the power P2 of the heating body p2 are calculated according to the mutual relation among the heating body p1, the heating body p2 and the heating body p3; 2, detecting whether the data T1, T2 and T3 deviate and exceed an engineering allowable value, if so, correcting the temperature data of the corresponding temperature measuring device, and recording the probability of deviation of the data of each temperature measuring device; and step 3, if the corrected data of the temperature measuring device still deviates and exceeds the engineering allowable value, calculating the corresponding power proportion condition of the heating body, and judging the temperature measuring device with a fault according to the deviation probability of the data of the temperature measuring device and the corresponding power proportion condition of the heating body.

Description

Technical Field

[0001] The present invention relates to a fault diagnosis method for a sintering furnace temperature measuring device, and in particular to a fault diagnosis method for a sintering furnace temperature measuring device based on multi-source data. Background Art

[0002] Industrial high-temperature sintering furnaces are essential equipment for the preparation of functional ceramic materials. With the rapid development of the semiconductor industry, the performance requirements for these materials are becoming increasingly stringent. High-performance functional ceramics require a stable and uniform sintering temperature field. Therefore, achieving precise and intelligent temperature control within high-temperature sintering furnaces, predicting failures in temperature measurement devices within these furnaces, and ensuring the sintering quality of functional ceramics have become challenges facing the intelligent manufacturing of high-temperature sintering furnaces.

[0003] The temperature control in a high-temperature sintering furnace is primarily achieved by collecting the temperature at specific locations within the furnace and controlling the power of the heating element. Current strategies for controlling the power of the heating element in high-temperature sintering furnaces are primarily based on decisions made when the temperature measuring device is operating normally. However, due to changes in sintering conditions, the temperature measuring device cannot fully and promptly adapt to all changes in operating conditions. Unlike heating element failures, which are diagnosed by measuring their resistance in real time, temperature measuring device failures are affected by many factors and are highly random. Therefore, it is very difficult to identify faults in the temperature measuring device in a sintering furnace using a single piece of data. However, if a fault in the temperature measuring device in a sintering furnace cannot be accurately identified, errors will occur in the subsequent power control of the heating element, causing the temperature uniformity in the sintering furnace to exceed the allowable value, ultimately leading to a decrease in the performance of the sintered functional ceramic material. Furthermore, directly observing the fault conditions of the heating element in the sintering furnace is difficult and costly.

[0004] Therefore, how to identify the corresponding faults of the temperature measuring devices in the sintering furnace through the power data of each temperature measuring device and the heating element has become a breakthrough point for the development of intelligent and accurate temperature control of industrial high-temperature sintering furnaces. Summary of the Invention

[0005] In response to the current problems of difficulty in identifying faults in temperature measuring devices in high-temperature sintering furnaces and low accuracy, the present invention proposes a fault diagnosis method for temperature measuring devices in sintering furnaces based on multi-source data. An intelligent algorithm is used to identify temperature measuring device faults based on data from multiple temperature measuring devices and heating element power, thereby improving the reliability of identification.

[0006] The technical means adopted by the present invention to solve the above problems are: a method for diagnosing faults of a sintering furnace temperature measuring device based on multi-source data, wherein temperature measuring devices t1, t2 and t3 are respectively arranged near the heating element p1, the heating element p2 and the heating element p3, and the fault is judged in combination with the power P1, P2 and P3 of the heating elements p1, p2 and p3 and the temperature T1, T2 and T3 displayed by the temperature measuring devices t1, t2 and t3, including the following steps: the first step is to calculate the power P3 of the heating element p3 according to the situation in the sintering furnace, and then calculate the fault according to the temperature of the heating element p3. The power P1 and P2 of P1 and P2 are calculated based on the relationship between the heating elements P1, P2 and P3; the second step is to detect whether the data T1, T2 and T3 deviate from the engineering allowable value. If so, the temperature data of the corresponding temperature measuring device is corrected, and the probability of deviation of the data of each temperature measuring device is recorded; the third step is to calculate the corresponding power proportion of the heating element according to the probability of deviation of the temperature measuring device data and the corresponding power proportion of the heating element, and determine the faulty temperature measuring device according to the probability of deviation of the temperature measuring device data and the corresponding power proportion of the heating element.

[0007] Furthermore, in the first step, the power P3 of the heating element P3 is calculated as follows:

[0008] P3=0.6F 0.76 (T / 1000) 2.53 ,

[0009] Where F is the effective working space surface area of the sintering furnace (dm 2 ), its value is related to the space size of the sintering furnace and the number and placement of sintered products; T is the sintering temperature (℃).

[0010] Furthermore, in the first step, P1 is determined as follows: P1:P3=0.6-0.7.

[0011] Furthermore, in the first step, P2 is determined as follows: P1:P2=0.9-1.1.

[0012] Furthermore, in the second step, the detection and correction method of the temperature data of t1, t2, and t3 is as follows:

[0013] If: △Ti / max(T1, T2, T3)>0.05, then: change the temperature data Ti of ti to the average of the other two temperature data, where i=1, 2 or 3.

[0014] Furthermore, △Ti is calculated as follows: when i=1, △T1=max(|T1-T2|,|T1-T3|); when i=2, △T2=max(|T1-T2|,|T2-T3|); when i=3, △T3=max(|T1-T3|,|T2-T3|).

[0015] Furthermore, in the second step, the probability P of deviation of the temperature data of the temperature measuring device ti is Hi The calculation method is:

[0016]

[0017] Among them, t s is the current sintering time.

[0018] Furthermore, in the third step, 5 minutes after the temperature measuring device data is corrected, the t1, t2, and t3 data are checked again to see if they deviate from the engineering allowable value.

[0019] Furthermore, in the third step, the power proportion Wi of the heating element pi is calculated as:

[0020]

[0021] Furthermore, in the third step, the method for determining whether the temperature measuring device has failed is:

[0022] calculate p(P i / e) corresponds to the temperature measuring device ti with the maximum value of i, which fails.

[0023] The beneficial effects of the present invention are:

[0024] 1. The present invention determines the fault condition of the temperature measuring device by fusing single and historical temperature detection data and combining parameter setting, thereby avoiding misjudgment by using single data, reducing cost expenditure, realizing real-time monitoring of the temperature measuring device in the high-temperature sintering furnace, improving work efficiency, and having high reliability.

[0025] 2. The present invention uses direct observation to determine the operating status of the temperature measuring device in a high-temperature environment in real time, and provides data for subsequent updates to the temperature control strategy in the sintering furnace; and uses multi-source data to determine the faults of the sintering furnace temperature measuring device, which can be mutually verified and has high reliability. BRIEF DESCRIPTION OF THE DRAWINGS

[0026] Figure 1 Schematic diagram of the distribution of heating elements and temperature measuring devices in the sintering furnace of Example 1;

[0027] Figure 2 This is a flow chart of the fault diagnosis algorithm for the sintering furnace temperature measuring device based on multi-source data in Example 1. DETAILED DESCRIPTION

[0028] The present invention is further described below with reference to the accompanying drawings. The accompanying drawings are for illustrative purposes only and are schematic, not actual, representations. They should not be construed as limiting this patent. To better illustrate the embodiments of the present invention, some components in the accompanying drawings may be omitted, enlarged, or reduced in size, and do not represent the actual dimensions of the products. It is understandable to those skilled in the art that some well-known structures and their descriptions may be omitted from the accompanying drawings.

[0029] Example 1

[0030] A fault diagnosis method for sintering furnace temperature measuring device based on multi-source data, such as Figure 1 As shown, temperature measuring devices t1, t2, and t3 are respectively installed near the three heating elements p1, p2, and p3 inside the furnace body. The three temperature measuring devices t1, t2, and t3 are used to measure the temperatures of the three heating elements p1, p2, and p3 respectively. The failure of the temperature measuring device is judged by combining the power P1, P2, and P3 of the three heating elements p1, p2, and p3 with the temperature T1, T2, and T3 displayed by the three temperature measuring devices t1, t2, and t3. Figure 2 As shown, the specific steps are:

[0031] The first step is to use the empirical formula to calculate the power P3 of the heating element P3 according to the conditions in the sintering furnace:

[0032] P3=0.6F 0.76 (T / 1000) 2.53 , where F is the effective working space surface area of the sintering furnace (unit: dm 2 ), its value is related to the space size of the sintering furnace and the number and placement of sintered products; T is the sintering temperature (unit: °C);

[0033] Then, the power P1 and P2 of p1 and p2 are calculated based on the relationship between P1, P2, and P3:

[0034] P1:P3=r1, P1:P2=r2, r2>r1 is required, generally r1=0.6~0.7, r2=0.9~1.1, the specific value is selected according to the product type inside the furnace and the sintering requirements.

[0035] The second step is to detect whether the data of t1, t2, and t3 deviate from the engineering allowable value (generally 0.05) based on △Ti / max(T1, T2, T3). If △Ti / max(T1, T2, T3)>0.05, it does not hold, indicating that each temperature measuring device is normal; if △Ti / max(T1, T2, T3)>0.05, the temperature data Ti of the temperature measuring device ti is corrected to the average of the other two temperature data, where i=1, 2 or 3, and △Ti is calculated as follows: when i=1, △T1=max(|T1-T2|,|T1-T3|); when i=2, △T2=max(|T1-T2|,|T2-T3|); when i=3, △T3=max(|T1-T3|,|T2-T3|).

[0036] And record the probability P of deviation of the measurement data of each temperature measuring device ti Hi :

[0037] where t s is the current sintering time.

[0038] In this step, if at a certain time point, the readings of each temperature measuring device are: T1 = 900°C, T2 = 950°C, T3 = 1000°C, then since (T3-T1) / T3 = (1000-900) / 1000 = 0.1>0.05, the value of T1 is corrected to 975°C. In some cases, a temperature measuring device may have an abnormal reading at a certain time, but after correction it can display normally. In this case, the temperature measuring device is not actually faulty, but may have only been abnormal at a certain point in time. After correction, the device can continue to operate normally, avoiding drawing incorrect conclusions and introducing incorrect operations.

[0039] Step 3: Fault determination of the temperature measuring device ti: After 5 minutes, determine again whether △Ti / max(T1, T2, T3)>0.05 is established. If so, calculate the power proportion Wi of each heating element p1, p2, p3 (i.e., pi):

[0040]

[0041] Then, according to the probability P of deviation of the data of each temperature measuring device Hi And its corresponding heating element power ratio Wi to determine the temperature measuring device that has failed: Calculate p(P i / e) corresponds to the temperature measuring device ti with the maximum value of i, which fails.

[0042] The above embodiments are only for the purpose of illustrating the present invention, and are not intended to limit the present invention. Those skilled in the art may make various changes or modifications without departing from the spirit and scope of the present invention. Therefore, all equivalent technical solutions should also fall within the scope of protection of the present invention, and the scope of protection of the present invention should be defined by the claims.

Claims

1. A method for diagnosing faults in a sintering furnace temperature measuring device based on multi-source data, wherein temperature measuring devices t1, t2, and t3 are respectively arranged near heating element p1, heating element p2, and heating element p3, and characterized in that: Fault diagnosis is performed in combination with the powers P1, P2, P3 of the heating elements p1, p2, p3 and the temperatures T1, T2, T3 displayed by the temperature measuring devices t1, t2, t3, including the following steps: a first step, calculating the power P3 of the heating element p3 according to the situation in the sintering furnace, and then calculating the powers P1 and P2 of p1 and p2 according to the relationship between the heating elements p1, p2, p3; a second step, detecting whether the data T1, T2, T3 deviate from the engineering allowable value. If so, correcting the temperature data of the corresponding temperature measuring device and recording the probability of deviation of the data of each temperature measuring device; a third step, if the data of the corrected temperature measuring device still deviates from the engineering allowable value, calculating the corresponding heating element power ratio, and judging the faulty temperature measuring device according to the probability of deviation of the temperature measuring device data and its corresponding heating element power ratio.

2. The method for diagnosing a fault of a sintering furnace temperature measuring device based on multi-source data according to claim 1, wherein: In the first step, the power P3 of the heating element P3 is calculated as follows: P3=0.6F 0.76 (T / 1000) 2.53 , Where F is the surface area of the effective working space of the sintering furnace, unit: dm 2 Its value is related to the space size of the sintering furnace and the number and placement of sintered products; T is the sintering temperature, unit ℃.

3. The method for diagnosing faults of a sintering furnace temperature measuring device based on multi-source data according to claim 2, wherein: In the first step, P1 is determined as follows: P1:P3=0.6-0.

7.

4. The method for diagnosing faults of a sintering furnace temperature measuring device based on multi-source data according to claim 3, characterized in that: In the first step, P2 is determined as follows: P1:P2=0.9-1.

1.

5. The method for diagnosing faults of a sintering furnace temperature measuring device based on multi-source data according to claim 1, wherein: In the second step, the detection and correction method of t1, t2, and t3 temperature data is as follows: If: △Ti / max(T1, T2, T3)>0.05, then: change the temperature data Ti of ti to the average of the other two temperature data, where i=1, 2 or 3.

6. The method for diagnosing faults of a sintering furnace temperature measuring device based on multi-source data according to claim 5, characterized in that: △Ti is calculated as follows: when i=1, △T1=max(|T1-T2|,|T1-T3|); when i=2, △T2=max(|T1-T2|,|T2-T3|); when i=3, △T3=max(|T1-T3|,|T2-T3|).

7. The method for diagnosing faults of a sintering furnace temperature measuring device based on multi-source data according to claim 6, characterized in that: In the second step, the probability P of deviation of the temperature data of the temperature measuring device ti Hi The calculation method is: Among them, t s is the current sintering time.

8. The method for diagnosing faults of a sintering furnace temperature measuring device based on multi-source data according to claim 7, characterized in that: In the third step, 5 minutes after the temperature measuring device data is corrected, the t1, t2, and t3 data are checked again to see if they deviate from the engineering allowable values.

9. The method for diagnosing faults of a sintering furnace temperature measuring device based on multi-source data according to claim 7, characterized in that: In the third step, the power ratio Wi of the heating element pi is calculated as:

10. The method for diagnosing faults of a sintering furnace temperature measuring device based on multi-source data according to claim 9, characterized in that: In the third step, the method for determining whether the temperature measuring device has failed is: calculate p(P i / e) corresponds to the temperature measuring device ti with the maximum value of i, which fails.

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