Chip detection equipment for electronic information engineering
By introducing friction groove gear system and air cavity cleaning head into the chip detection equipment, the problem of dust affecting the detection of chip surface is solved, efficient cleaning and accurate detection are achieved, the error detection rate is reduced and the chip flow is ensured.
Patent Information
- Application Number
- CN202510749470.6
- Authority / Receiving Office
- CN · China
- Patent Type
- Applications(China)
- Current Assignee / Owner
- Filing Date
- 2025-06-06
- Publication Date
- 2025-08-15
- Estimated Expiration
- Not applicable · inactive patent
AI Technical Summary
In existing chip detection equipment, dust or hard particles may adhere to the surface of the chip that has not been cleaned, causing scratches on the chip and affecting yield determination. At the same time, dust blocks or reflected light during optical detection increases the false detection rate.
Using a chip detection device for electronic information engineering, the gear system is driven by setting a friction groove on the conveyor belt to push back and forth and downward, spray gas to clean the dust on the chip surface, and increase the air blowing range by swinging the cleaning head, and at the same time, the detection camera can be lifted and lowered to adjust the detection height.
Effectively clean the dust on the surface of the chip, improve the detection effect, reduce the error detection rate, ensure the chip is damaged and easy to discharge.
Smart Images

Figure CN120490137A_ABST
Abstract
Description
Technical Field
[0001] The present invention relates to the technical field of chip detection, and in particular to chip detection equipment for electronic information engineering. Background Art
[0002] The field of electronic information engineering has increasingly stringent requirements for the accuracy and efficiency of chip testing equipment. Its core background technology focuses on achieving large-scale, high-reliability automated testing. The automatic capture cage is a key module. Through the coordination of mechanical transmission and intelligent recognition systems, it can accurately locate and fix chips of different specifications, and cooperate with optical detection, electrical signal analysis and other technologies to complete multi-dimensional parameter verification. This technology breaks through the limitations of traditional manual operation and integrates pressure sensing and visual alignment algorithms to ensure the lossless flow of chips in the testing process. It also optimizes the detection strategy through real-time data feedback. As semiconductor processes evolve to the nanometer level, the equipment further integrates edge computing and machine learning to achieve dynamic defect prediction of complex chips, providing industrial intelligent solutions for chip quality control.
[0003] During actual use of existing devices, dust or hard particles may adhere to the uncleaned chip surface, which may scratch the chip when in contact with the equipment during the inspection process, resulting in surface defects that directly affect the yield determination. Moreover, during optical inspection, dust can also block or reflect light, causing image blur and increasing the false detection rate. Therefore, a chip inspection device for electronic information engineering is proposed. Summary of the Invention
[0004] The purpose of the present invention is to solve the shortcomings of the prior art, that is, dust or hard particles may adhere to the surface of the uncleaned chip, which may scratch the chip when in contact with the equipment during the inspection process, resulting in surface defects that directly affect the yield determination. Moreover, during optical inspection, dust will also block or reflect light, resulting in blurred images and increased false detection rates. A chip inspection device for electronic information engineering is proposed to solve the shortcomings of the prior art, that is, dust or hard particles may adhere to the surface of the chip, which may scratch the chip when in contact with the equipment during the inspection process, resulting in surface defects that directly affect the yield determination. Moreover, during optical inspection, dust will also block or reflect light, resulting in blurred images and increased false detection rates.
[0005] In order to achieve the above object, the present invention adopts the following technical solutions:
[0006] The transmission gear of the present invention is a gear which is engaged with the gear of the control gear and the gear of the control gear. The transmission gear of the present invention is connected with the gear of the control gear to the gear of the control gear. The transmission gear of the present invention is connected with the gear of the control gear to the gear of the control gear.
[0007] After the chip is placed inside the installation groove, it is moved by the conveyor belt. During the movement, when the chip is pushed out of the friction groove set on one side of the shell and passes through the second gear, the friction can drive the second gear to rotate. The rotation of the second gear can drive the rotating rod to rotate, and the rotation of the rotating rod can drive the fifth gear and the eccentric shaft to rotate synchronously. The rotation of the eccentric shaft can drive the pressure plate inside the air cavity to press down reciprocatingly, so that the gas inside the air cavity can be continuously sent into the cleaning head and sprayed out. The sprayed gas can blow off the dust on the surface of the chip to achieve cleaning. In addition, the rotation of the fifth gear during the cleaning process can also drive the cleaning head to swing back and forth, thereby effectively increasing the blowing range of the cleaning head and improving the overall cleaning effect.
[0008] The above technical solution further includes:
[0009] A first motor is provided on one side of the device body, a transmission roller is provided at the output end of the first motor, and an upper portion of the transmission roller is transmission-connected with a pushing-out shell.
[0010] A third motor is provided on one side of the ejection housing, and an ejection component is provided at an output end of the third motor.
[0011] The ejection assembly includes a worm arranged at the output end of the third motor, the worm is meshedly connected with a worm wheel, and the worm wheel is rotationally connected to the ejection housing.
[0012] The worm gear is fixedly connected to a first gear, the first gear is meshedly connected to a transmission rack, the upper portion of the transmission rack is fixedly connected to a placement plate, and the placement plate is slidably connected to the mounting groove.
[0013] A lifting mechanism is provided on the upper part of the device body, and a detection camera is provided on the upper part of the lifting mechanism.
[0014] The lifting mechanism includes a lifting shell arranged on the upper part of the device body, a second motor is arranged on the upper part of the lifting shell, and a lifting component is arranged at the output end of the second motor.
[0015] The lifting assembly includes a threaded rod provided at the output end of the second motor, the threaded rod is threadedly connected to a transmission member, and a detection camera is provided at the lower part of the transmission member.
[0016] One end of the transmission member is rotatably connected to two rotating wheels, a limit plate is fixedly connected to the middle position of the two rotating wheels, and the limit plate is fixedly connected to the lifting shell.
[0017] The present invention has the following beneficial effects:
[0018] 1. In the present invention, after the chip is placed in the installation slot, the chip can be driven to move by the conveyor belt. During the movement, when the chip is pushed out of the friction groove provided on one side of the shell and passes through the second gear, the second gear can be driven to rotate due to the friction effect. The rotation of the second gear can drive the rotating rod to rotate, and the rotation of the rotating rod can drive the fifth gear and the eccentric shaft to rotate synchronously. The rotation of the eccentric shaft can drive the pressure plate inside the air cavity to press down reciprocally, so that the gas inside the air cavity can be continuously sent into the cleaning head and sprayed out. The sprayed gas can blow off the dust on the surface of the chip to achieve cleaning. In addition, during the cleaning process, the rotation of the fifth gear can also drive the cleaning head to swing back and forth, thereby effectively increasing the blowing range of the cleaning head and improving the overall cleaning effect.
[0019] 2. In the present invention, when the device is used, the second motor is started to drive the transmission member to move, thereby driving the detection camera to move up and down, and adjusting the detection height of the detection camera, so as to facilitate the adjustment of the detection camera to ensure that it can fully detect the chip surface, thereby improving the detection effect, and after the detection is completed, the third motor is started to drive the placement plate to move up, thereby pushing the chip out from the inside of the installation slot, which is convenient for unloading. BRIEF DESCRIPTION OF THE DRAWINGS
[0020] Figure 1 This is a schematic diagram of the structure of a chip detection device for electronic information engineering proposed by the present invention;
[0021] Figure 2 Schematic diagram of the internal structure of the device body in the present invention;
[0022] Figure 3 Schematic diagram of the lifting mechanism structure of the present invention;
[0023] Figure 4 Schematic diagram of the internal structure of the ejection shell in the present invention;
[0024] Figure 5 Schematic diagram of the connection relationship of the swing housing in the present invention;
[0025] Figure 6 Schematic diagram of the internal structure of the swing housing in the present invention;
[0026] Figure 7 Schematic diagram of the internal structure of the air cavity in the present invention.
[0027] In the figure: 1. device body; 2. first motor; 3. conveyor belt; 4. mounting slot; 5. friction slot; 6. ejection shell; 7. transmission roller; 8. detection camera; 9. threaded rod; 10. cleaning head; 11. swing shell; 12. lifting shell; 13. second motor; 14. transmission member; 15. rotating wheel; 16. limit plate; 17. third motor; 18. worm; 19. worm wheel; 20. placement plate; 21. first gear; 22. transmission rack; 23. second gear; 24. third gear; 25. fourth gear; 26. rotating rod; 27. gear slot; 28. air cavity; 29. fifth gear; 30. sixth gear; 31. eccentric shaft; 32. connecting member; 33. pressure plate. DETAILED DESCRIPTION
[0028] The following will clearly and completely describe the technical solutions in the embodiments of the present invention in conjunction with the accompanying drawings. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without making creative efforts are within the scope of protection of the present invention.
[0029] Example 1
[0030] like Figure 1-Figure 7 As shown, a chip detection device for electronic information engineering includes a device body 1, a conveyor belt 3 is provided inside the device body 1, the upper part of the conveyor belt 3 is fixedly connected to a push-out shell 6, the upper part of the push-out shell 6 is fixedly connected to a mounting groove 4, and one side of the push-out shell 6 is fixedly connected to a friction groove 5. The lower part of the device body 1 is rotatably connected to a second gear 23, the upper part of the second gear 23 is fixedly connected to a third gear 24, the third gear 24 is meshed with a fourth gear 25, and one side of the fourth gear 25 is fixedly connected to a rotating rod 26, which rotates between the rotating rod 26 and the swinging shell 11. Dynamic connection, the rotating rod 26 is fixedly connected to the fifth gear 29 on the side close to the swing housing 11, the fifth gear 29 is meshed with the gear slot 27, the gear slot 27 is meshed with the sixth gear 30, the sixth gear 30 is fixedly connected to the cleaning head 10, the upper part of the cleaning head 10 is connected to the air cavity 28, the air cavity 28 is fixedly connected to the upper part of the swing housing 11, and the inside of the air cavity 28 is slidably connected to the pressure plate 33, the upper part of the pressure plate 33 is rotatably connected to the connecting member 32, the upper part of the connecting member 32 is rotatably connected to the eccentric shaft 31, and the eccentric shaft 31 is fixedly connected to the rotating rod 26.
[0031] After the chip is placed inside the mounting groove 4, it is moved by the conveyor belt 3. During the movement, the friction groove 5 set on one side of the shell 6 is pushed out and passes through the second gear 23, and the friction drives the second gear 23 to rotate. The rotation of the second gear 23 drives the rotating rod 26 to rotate, and the rotation of the rotating rod 26 drives the fifth gear 29 and the eccentric shaft 31 to rotate synchronously. The rotation of the eccentric shaft 31 drives the pressure plate 33 to press down reciprocatingly, and the downward pressure of the pressure plate 33 drives the gas in the air cavity 28 to be ejected through the cleaning head 10, thereby cleaning the dust on the surface of the chip. The rotation of the fifth gear 29 drives the cleaning head 10 to swing back and forth to achieve swing cleaning. Air grooves for ventilation are provided on both sides of the air cavity 28, and a hose is provided at the lower part of the air cavity 28, which can be connected to the cleaning head 10 through the hose. The fifth gear 29 is a half gear. When the fifth gear 29 rotates, it can drive the meshing gear groove 27 to move back and forth. A first motor 2 is provided on one side of the device body 1, and a transmission roller 7 is provided at the output end of the first motor 2. The upper part of the transmission roller 7 is connected to the conveyor belt 3.
[0032] In this embodiment, after the chip is placed in the installation slot 4, the first motor 2 is started to drive the transmission roller 7 to rotate. The rotation of the transmission roller 7 can drive the transmission connected conveyor belt 3 to rotate, thereby driving the chip to move. During the movement, when the friction groove 5 set on one side of the shell 6 is pushed out and passes through the second gear 23, the second gear 23 can be driven to rotate due to the friction effect. The rotation of the second gear 23 can drive the third gear 24 to rotate. The rotation of the third gear 24 drives the meshing fourth gear 25 to rotate. The rotation of the fourth gear 25 can drive the fixedly connected rotating rod 26 to rotate. The rotation of the rotating rod 26 can drive the fifth gear 29 and the eccentric shaft 31 to rotate synchronously. The rotation of 31 can drive the rotatably connected connecting member 32 to rotate, and the rotation of the connecting member 32 drives the rotatably connected pressure plate 33 to move back and forth. By controlling the pressure plate 33 inside the air cavity 28 to press down reciprocally, the gas inside the air cavity 28 can be continuously sent into the cleaning head 10 and sprayed out, so as to blow off the dust on the surface of the chip to achieve cleaning. In addition, during the cleaning process, the rotation of the fifth gear 29 can also drive the meshing gear slot 27 to move back and forth, and the movement of the gear slot 27 can drive the meshing sixth gear 30 to rotate back and forth, thereby driving the fixedly connected cleaning head 10 to swing back and forth, thereby effectively increasing the blowing range of the cleaning head 10 and improving the overall cleaning effect.
[0033] Example 2
[0034] like Figure 1-Figure 7As shown, a third motor 17 is provided on one side of the ejection shell 6, and an ejection assembly is provided at the output end of the third motor 17. The ejection assembly includes a worm 18 provided at the output end of the third motor 17. The worm 18 is meshed with a worm gear 19. The worm gear 19 is rotationally connected to the ejection shell 6. The worm gear 19 is fixedly connected to a first gear 21. The first gear 21 is meshed with a transmission rack 22. The upper part of the transmission rack 22 is fixedly connected to a placement plate 20, and the placement plate 20 is slidingly connected to the mounting groove 4.
[0035] A lifting mechanism is provided on the upper part of the device body 1, and a detection camera 8 is provided on the upper part of the lifting mechanism. The lifting mechanism includes a lifting shell 12 provided on the upper part of the device body 1, and a second motor 13 is provided on the upper part of the lifting shell 12. A lifting assembly is provided at the output end of the second motor 13, and the lifting assembly includes a threaded rod 9 provided at the output end of the second motor 13. The threaded rod 9 is threadedly connected to a transmission member 14, and a detection camera 8 is provided at the lower part of the transmission member 14. One end of the transmission member 14 is rotatably connected to two wheels 15, and a limit plate 16 is fixedly connected to the middle position of the two wheels 15, and the limit plate 16 is fixedly connected to the lifting shell 12.
[0036] In this embodiment, when the device is in use, the second motor 13 is started to drive the threaded rod 9 to rotate, and the rotation of the threaded rod 9 drives the threaded transmission member 14 to move. During the movement of the transmission member 14, the rotatably connected turntable 15 can be synchronously transmitted along the limit plate 16, thereby effectively ensuring the stability of the transmission member 14 during movement. The movement of the transmission member 14 can drive the detection camera 8 to rise and fall, thereby adjusting the detection height of the detection camera 8, and conveniently adjusting the detection camera 8 so that it can ensure that it can fully detect the chip surface, thereby improving the detection effect. After the detection is completed, the third motor 17 can also be started to drive the worm 18 to rotate. The rotation of the worm 18 drives the meshing worm gear 19 to rotate. The rotation of the worm gear 19 drives the fixedly connected first gear 21 to rotate. The rotation of the first gear 21 can drive the meshing transmission rack 22 to move, and the movement of the transmission rack 22 can drive the fixedly connected placement plate 20 to move upward, thereby pushing the chip out from the inside of the mounting groove 4, which is convenient for unloading.
[0037] While embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that various changes, modifications, substitutions, and variations may be made to these embodiments without departing from the principles and spirit of the invention, and that the scope of the invention is defined by the appended claims and their equivalents.
Claims
1. A chip detection device for electronic information engineering, the device body (1), characterized in that: A conveyor belt (3) is provided inside the device body (1), the upper portion of the conveyor belt (3) is fixedly connected to a push-out housing (6), the upper portion of the push-out housing (6) is fixedly connected to a mounting groove (4), one side of the push-out housing (6) is fixedly connected to a friction groove (5), the lower portion of the device body (1) is rotatably connected to a second gear (23), the upper portion of the second gear (23) is fixedly connected to a third gear (24), the third gear (24) is meshedly connected to a fourth gear (25), one side of the fourth gear (25) is fixedly connected to a rotating rod (26), the rotating rod (26) is rotatably connected to the swing housing (11), and the rotating rod (26) is close to the swing housing. A fifth gear (29) is fixedly connected to one side of the body (11), the fifth gear (29) is meshedly connected to a gear slot (27), the gear slot (27) is meshedly connected to a sixth gear (30), the sixth gear (30) is fixedly connected to a cleaning head (10), the upper part of the cleaning head (10) is connected to an air cavity (28), the air cavity (28) is fixedly connected to the upper part of the swing housing (11), a pressure plate (33) is slidably connected inside the air cavity (28), the upper part of the pressure plate (33) is rotatably connected to a connecting member (32), the upper part of the connecting member (32) is rotatably connected to an eccentric shaft (31), and the eccentric shaft (31) is fixedly connected to the rotating rod (26); After the chip is placed inside the mounting groove (4), it is moved by the conveyor belt (3). During the movement, the friction groove (5) set on one side of the shell (6) is pushed out and passes through the second gear (23), which drives the second gear (23) to rotate due to friction. The rotation of the second gear (23) drives the rotating rod (26) to rotate, and the rotation of the rotating rod (26) drives the fifth gear (29) and the eccentric shaft (31) to rotate synchronously. The rotation of the eccentric shaft (31) drives the pressure plate (33) to press down reciprocatingly, and the downward pressure of the pressure plate (33) drives the gas in the air cavity (28) to be ejected through the cleaning head (10), thereby cleaning the dust on the surface of the chip. The rotation of the fifth gear (29) drives the cleaning head (10) to swing back and forth, thereby realizing swing cleaning.
2. The chip testing equipment for electronic information engineering according to claim 1, characterized in that: A first motor (2) is provided on one side of the device body (1); a transmission roller (7) is provided at the output end of the first motor (2); and an upper portion of the transmission roller (7) is transmission-connected to a push-out housing (6).
3. The chip testing equipment for electronic information engineering according to claim 1, characterized in that: A third motor (17) is provided on one side of the ejection housing (6), and an ejection assembly is provided at the output end of the third motor (17).
4. The chip testing equipment for electronic information engineering according to claim 1, characterized in that: The ejection assembly comprises a worm (18) provided at the output end of a third motor (17); the worm (18) is meshedly connected with a worm wheel (19); and the worm wheel (19) is rotationally connected to the ejection housing (6).
5. The chip testing equipment for electronic information engineering according to claim 4, characterized in that: The worm gear (19) is fixedly connected to a first gear (21), the first gear (21) is meshedly connected to a transmission rack (22), the upper portion of the transmission rack (22) is fixedly connected to a placement plate (20), and the placement plate (20) is slidably connected to the mounting groove (4).
6. The chip testing equipment for electronic information engineering according to claim 1, characterized in that: A lifting mechanism is provided on the upper portion of the device body (1), and a detection camera (8) is provided on the upper portion of the lifting mechanism.
7. The chip testing equipment for electronic information engineering according to claim 6, characterized in that: The lifting mechanism comprises a lifting shell (12) arranged on the upper part of the device body (1); a second motor (13) is arranged on the upper part of the lifting shell (12); and a lifting component is arranged at the output end of the second motor (13).
8. The chip testing equipment for electronic information engineering according to claim 7, characterized in that: The lifting assembly comprises a threaded rod (9) provided at the output end of a second motor (13); the threaded rod (9) is threadedly connected to a transmission member (14); and a detection camera (8) is provided at the lower portion of the transmission member (14).
9. The chip testing equipment for electronic information engineering according to claim 8, characterized in that: One end of the transmission member (14) is rotatably connected to two rotating wheels (15), a limit plate (16) is fixedly connected between the two rotating wheels (15), and the limit plate (16) is fixedly connected to the lifting shell (12).
Citation Information
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