Sample loading device

Abstract

The invention discloses a sample loading device. The sample loading device comprises a base, a connecting piece and an objective table which are connected in sequence, the upper surface of the objective table is provided with a first clamping groove and a second clamping groove which are arranged separately. One side wall of the first clamping groove is perpendicular to the upper surface of the objective table; one side wall of the second clamping groove is obliquely arranged relative to the upper surface of the objective table; and a sample platform which can be higher than the upper surface is vertically mounted on the objective table. According to the sample loading device, section samples are loaded through the first clamping groove to meet the requirement for independent analysis of sections, section samples are loaded through the second clamping groove to meet the requirement for simultaneous analysis of the sections and planes, plane samples are loaded through the sample platform to meet the requirement for independent analysis of the planes, and therefore synchronous loading of the plane samples and the section samples is compatible; and plane and cross section simultaneous observation is integrated, so that diversified requirements of semiconductor sample analysis can be met.

Description

Technical Field

[0001] The present invention relates to the technical field of semiconductor sample analysis, and in particular to a sample loading device. Background Art

[0002] During the development and manufacturing of integrated circuits, the performance of the chip depends closely on the perfect integration of various processes. Any change in process parameters will inevitably greatly affect the corresponding film structure. Therefore, during process development and production, it is necessary to closely monitor whether the structure of each film layer meets the design requirements. In particular, during the photolithography process, it is necessary to collect dimensional parameters such as the photoresist morphology and depth and width. For such easily deformed organic films, low-voltage SEM observation is used to minimize damage to the sample morphology while obtaining clear and measurable images. Therefore, it is widely used in the industry. Currently, there are many types of samples for SEM observation in laboratories, and the sample sizes vary. There is a need to observe the sample planar and cross-sectional morphology, as well as the need to observe the planar and cross-sectional morphology simultaneously.

[0003] In the prior art, both planar samples and cross-sectional samples are equipped with special brackets, which are either only suitable for SEM image observation of cross-sectional samples or only suitable for SEM image observation of planar samples. This can basically solve the problem of SEM image shooting for samples with single morphology observation. However, for samples that require simultaneous observation of cross-sectional morphology and planar structure, a single clamping cannot meet the requirements of simultaneous observation of cross-sections and planes due to limitations in the tilt angle range of the SEM sample platform, and requires multiple clamping of samples and replacement of brackets. However, the objects analyzed in the semiconductor field are often diverse. For a large number of samples with different analysis requirements, frequent replacement of brackets and multiple clamping will significantly reduce equipment utilization and easily damage the samples.

[0004] Therefore, there is an urgent need for a multifunctional sample loading device to meet the diverse needs of analyzing samples during image capture. Summary of the Invention

[0005] In view of this, an object of the present invention is to provide a sample loading device to solve the current problems of low sample loading efficiency and high probability of sample damage during the process of imaging semiconductor samples.

[0006] To achieve the above-mentioned objectives, the present invention provides a sample loading device, comprising a base, a connector and a stage connected in sequence; the upper surface of the stage is provided with a first card slot and a second card slot separately arranged; a side wall of the first card slot is perpendicular to the upper surface of the stage; a side wall of the second card slot is inclined relative to the upper surface of the stage; a sample platform that can be higher than the upper surface of the stage is vertically installed on the stage.

[0007] Optionally, at least one of the connecting member and the sample platform is a height-adjustable structure.

[0008] Optionally, when the connecting member is a height-adjustable structure, the connecting member is configured as a screw rod, and the screw rod is threadably connected to the stage.

[0009] Optionally, when the sample platform is a height-adjustable structure, the sample platform is provided with a screw, and the screw of the sample platform is threadedly connected to the stage.

[0010] Optionally, an opening is provided on the upper surface of the stage corresponding to the position of the sample platform, and a size of the opening allows the sample platform to enter and exit the stage.

[0011] Optionally, there are multiple first card slots.

[0012] Optionally, there are two first card slots, and the two first card slots are symmetrically arranged on the left and right.

[0013] Optionally, a lifting platform is provided in at least one of the first card slots, and the lifting platform is connected to the loading platform in a liftable manner.

[0014] Optionally, a plurality of independent lifting platforms are provided in at least one of the first slots, and / or the lifting platform is provided with a screw, and the screw of the lifting platform is threadedly connected to the loading platform.

[0015] Optionally, an angle between a side wall of the second slot and the upper surface of the loading platform is 40° to 55°.

[0016] Optionally, an angle between a side wall of the second slot and the upper surface of the loading platform is 45°.

[0017] Optionally, the sample loading device further has at least one of the following structures:

[0018] The surface of the sample platform is provided with conductive glue, and the conductive glue is used to bond and fix the planar sample;

[0019] A positioning hole is provided at the center of the upper surface of the loading platform;

[0020] The first slot is provided with a fixing screw for fixing the cross-section sample in the first slot;

[0021] The second slot is provided with a fixing screw for fixing the cross-section sample in the second slot;

[0022] The side surface of the base is provided with two through-hole-shaped matching holes, and the two matching holes are arranged in parallel;

[0023] Both ends of the first slot along the length direction pass through the loading platform.

[0024] Compared with the prior art, the sample loading device provided by the present invention has at least the following beneficial effects:

[0025] The sample loading device can load samples with three different analysis requirements through the stage: specifically, cross-sectional samples for cross-sectional analysis alone through the first slot, planar samples for plane analysis alone through the sample platform, and cross-sectional samples for both cross-sectional and planar analysis through the second slot. This allows for simultaneous observation of both planar and cross-sectional samples, as well as multi-angle and multi-directional observation of both the cross-sectional and planar surfaces. This meets the diverse needs of analyzing samples during image capture and improves sample analysis efficiency and accuracy. It also avoids the problem of frequent bracket replacement, significantly improving equipment / machine utilization. It also avoids contamination or damage to samples caused by repeated sampling, helping to improve product yield.

[0026] Furthermore, the sample loading device can adjust the distance between the stage and the lens by setting a height-adjustable connector, which facilitates the loading of samples of different sizes and enables the observation of samples of different sizes, while maintaining the optimal working distance between the sample and the lens, thereby improving the imaging quality.

[0027] Furthermore, the sample loading device not only optimizes the imaging quality by setting up a height-adjustable sample platform, but also enables the observation of planar samples of different sizes, facilitates the aggregation during planar analysis, and reduces the interference of nearby cross-sectional samples on the planar sample analysis. BRIEF DESCRIPTION OF THE DRAWINGS

[0028] Figure 1 A schematic diagram of the three-dimensional structure of a sample loading device in a preferred embodiment of the present invention;

[0029] Figure 2 This is a schematic diagram of the main structure of a sample loading device in a preferred embodiment of the present invention;

[0030] Figure 3 A schematic diagram of the three-dimensional structure of a stage in a preferred embodiment of the present invention;

[0031] Figure 4 Schematic diagram of the top view of the sample loading device in a preferred embodiment of the present invention.

[0032] [The accompanying drawings are described as follows]:

[0033] 1-base, 11-matching hole, 2-connecting part, 3-stage, 30-upper surface, 31-first slot, 311-side wall of the first slot, 4-fixing screw, 5-lifting platform, 51-screw of the lifting platform, 32-second slot, 321-side wall of the second slot, 33-opening, 34-positioning hole, 6-sample platform, α-angle between the side wall of the second slot and the upper surface of the stage. DETAILED DESCRIPTION

[0034] The present invention will be further described in detail below with reference to the accompanying drawings and specific embodiments. The advantages and features of the present invention will become more apparent from the following description. It should be noted that the drawings are greatly simplified and not to exact scale, and are only used to facilitate and clearly illustrate the embodiments of the present invention.

[0035] The terms "center", "longitudinal", "lateral", "length", "width", "thickness", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inside", "outside", "clockwise", "counterclockwise", "axial", "radial", "circumferential" and the like indicate orientations or positional relationships based on the orientations or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the present invention and simplifying the description, and do not indicate or imply that the referred mechanism or element must have a specific orientation, be constructed and operate in a specific orientation, and therefore should not be understood as limiting the present invention.

[0036] In the present invention, unless otherwise specified or limited, the terms "installed," "connected," "fixed," and the like should be understood broadly. For example, they may refer to fixed connections, detachable connections, or integration; mechanical connections, electrical connections, or communication between them; direct connections or connections through an intermediate medium; and internal communication between two components or interaction between two components, unless otherwise specified. Those skilled in the art will understand the specific meanings of the above terms in the present invention based on specific circumstances.

[0037] As used in this specification, the terms "first," "second," etc. are used for descriptive purposes only and should not be understood to indicate or imply relative importance or implicitly specify the quantity of the technical features indicated. Therefore, a feature specified as "first," "second," etc. may explicitly or implicitly include one or more of the features.

[0038] like Figures 1 to 4 As shown, an embodiment of the present invention provides a sample loading device, which includes a base 1, a connector 2 and a stage 3 connected in sequence.

[0039] The base 1 is capable of stably supporting the entire sample loading device, ensuring its stability, safety, and reliability during use. The base 1 is also used to cooperate with equipment / machines to transport, install, and secure the sample loading device. The base 1 can cooperate with the equipment / machine in any manner, which is not limited by the present invention.

[0040] refer to Figure 1 and Figure 2 In one exemplary embodiment, the side surface of the base 1 is provided with two through-hole mating holes 11, which are arranged in parallel. During use, each mating hole 11 can be inserted into a flexible rod on a robotic arm, thereby retrieving and transporting the sample loading device. Optionally, each mating hole 11 is a circular hole.

[0041] Those skilled in the art will understand that, generally, the equipment / machine is equipped with an observation chamber. Before analyzing the sample, the sample loading device needs to be sent into the observation chamber. A lens capable of performing micro-nano analysis of the sample is placed in the observation chamber, for example, a lens based on FIB (Focused Ion Beam, FIB for short) or SEM (Scanning Electron Microscope, SEM for short) or other imaging analysis technology. In this way, before entering the observation chamber, the sample to be observed is first placed on the sample loading device, and then the sample loading device loaded with the sample is sent into the observation chamber by the robotic arm, and then the robotic arm is released, the sample loading device is placed on the sample stage, and the image analysis program is started. After completion, the robotic arm re-grasps the base 1 and sends the sample loading device loaded with the sample out of the observation chamber.

[0042] It should be noted that the above scheme of conveying the sample loading device through the matching hole 11 is only an example and does not constitute a limitation on the technical solution of the present invention. Those skilled in the art can obtain other matching methods based on their common sense.

[0043] The connector 2 is primarily used to support the loading platform 3 and can be integrally or separately designed with the base 1. In some cases, the height of the connector 2 is not adjustable, and the connector 2 and base 1 can be integrally or separately designed. In this embodiment, the connector 2 is a height-adjustable structure, indirectly adjusting the height of the loading platform 3.

[0044] By adjusting the height of stage 3, samples of varying sizes can be loaded and observed without impacting the lens. Furthermore, an optimal working distance between the sample and the lens is maintained to improve imaging quality. The working distance, defined as the distance from the sample surface to the lens, needs to be adjusted based on the sample's characteristics. Too close may result in lens impact, while too far may reduce signal collection efficiency.

[0045] When the height of the connector 2 is adjustable, the adjustment method can be manual or automatic, preferably manual adjustment to reduce complexity and cost. When manually adjusting, a lifting knob can be set, or the lifting knob can be eliminated and the connector 2 can be directly rotated.

[0046] Furthermore, there are multiple ways to achieve height adjustment of the connecting member 2, and at least one of them can be selected, such as telescopic adjustment, screw and thread adjustment, pulley bevel adjustment, worm gear, linear guide slider, etc. Therefore, those skilled in the art should be able to know how to achieve height adjustment of the connecting member 2 based on their knowledge.

[0047] In this embodiment, a height adjustment method with the relatively simplest structure and lowest cost is adopted. Specifically, the connecting member 2 is configured as a screw, which is directly threadedly connected to the stage 3. More specifically, the stage 3 itself is provided with a threaded hole (not marked), so that it is sleeved on the connecting member 2 with an external thread through the threaded hole, and threadedly engaged with the connecting member 2 through the threaded hole. The height of the stage 3 can be adjusted by simply rotating the connecting member 2; when the connecting member 2 is rotated to the desired height, the stage 3 and the connecting member 2 can also be locked with each other. In practice, the connecting member 2 can be designed with a ball screw or a trapezoidal thread, and the stage 3 is driven to move linearly by the rotation of the screw to achieve high-precision displacement control.

[0048] The connecting member 2 can be a solid or hollow rod. There are no special requirements for the shape and size of the connecting member 2. Optionally, the connecting member 2 is a round rod.

[0049] The stage 3 is mainly used to place the sample to be analyzed. It should be noted that the samples involved in the present invention include but are not limited to chip samples, and can also be other various semiconductor samples.

[0050] In particular, the stage 3 can simultaneously load planar and cross-sectional samples, and can also analyze both the planar and cross-sectional surfaces of a cross-sectional sample. In other words, the stage 3 can load samples with three different analytical requirements: cross-sectional samples for analysis of the cross-sectional surface alone, planar samples for analysis of the planar surface alone, and cross-sectional samples for simultaneous analysis of the planar and cross-sectional surfaces, thus meeting the diverse needs of semiconductor sample analysis.

[0051] Specifically, the upper surface 30 of the loading platform 3 is provided with a first card slot 31 and a second card slot 32 which are separately provided.

[0052] like Figure 2 As shown, a side wall 311 of the first slot 31 is perpendicular to the upper surface 30 of the stage 3. In this way, the plane of the cross-section sample can be aligned with the side wall 311 of the first slot 31 to observe the cross-section morphology of the cross-section sample.

[0053] It is easy to understand that the first card slot 31 is used to place the cross-sectional sample, and the cross-sectional sample is placed vertically in the first card slot 31, so that the cross-sectional sample to be observed (the cross-sectional area in the depth direction) is placed upward, generally facing the lens, so that the lens can scan the entire cross-sectional area and obtain an image of the entire cross-sectional area.

[0054] As can be seen, the first slot 31 is a blind slot, extending from the upper surface 30 of the stage 3 toward the bottom of the stage 3, without penetrating the bottom surface of the stage 3. This allows a cross-sectional sample to be placed vertically into the first slot 31, with the plane of the cross-sectional sample aligned with the sidewall 311 of the first slot 31. The cross-sectional sample can then be secured using any optional fixing method, facilitating scanning and imaging of the cross section by equipment / machines, allowing observation of the cross-sectional morphology.

[0055] The side wall 311 of the first card slot 31 can be a plane that can fit tightly with the plane of the cross-sectional sample. However, the first card slot 31 can be a rectangular slot or other shapes, which is not limited by the present invention. In addition, the two ends of the first card slot 31 along the length direction may pass through the stage 3 or may not pass through the stage 3. In this embodiment, the two ends of the first card slot 31 along the length direction pass through the stage 3, so that the first card slot 31 is long enough to load more or larger cross-sectional samples, increase the loading capacity, and improve the analysis efficiency.

[0056] There are one or more first slots 31. More preferably, there are two or more first slots 31, which can accommodate more samples and significantly improve analysis efficiency. In this embodiment, there are two first slots 31, which are symmetrically or asymmetrically arranged, preferably bilaterally symmetrically arranged, to achieve a more compact structure and a more stable device.

[0057] Preferably, at least one of the plurality of first slots 31 is used to hold a large cross-sectional sample, and at least one of the remaining slots is used to hold a small cross-sectional sample. This allows the same sample loading device to support observation of samples of varying sizes, covering a wide range of samples, significantly improving sample analysis efficiency, and increasing equipment / machine utilization.

[0058] It should be noted that one or more cross-sectional samples can be placed in the same first card slot 31 , and the sizes of the multiple cross-sectional samples may be the same or different.

[0059] There is no limitation on the method for fixing the cross-sectional sample placed in the first slot 31. For example, in the present embodiment, a plurality of fixing screws 4 are provided at the first slot 31 for fixing the cross-sectional sample in the first slot 31. Specifically, the fixing screws 4 are locked to the stage 3, and the cross-sectional sample is pressed at the same time, so that the cross-sectional sample is fastened to the side wall 311 of the first slot 31 to prevent the cross-sectional sample from drifting. However, in addition to this, those skilled in the art should know that the cross-sectional sample in the first slot 31 can also be fixed by a spring pressing piece or other means. Compared with other fixing methods, the use of fixing screws 4 in the present embodiment is the simplest and most convenient.

[0060] See Figure 3 and Figure 4 In one embodiment, a plurality of fixing screws 4 are provided at each of the two first slots 31. The fixing screws 4 are spaced apart along the length of the corresponding first slot 31. Each cross-sectional sample can be fastened by one or more fixing screws 4. Each fixing screw 4 can be permanently mounted on the stage 3 or locked to the stage 3 only when in use.

[0061] refer to Figure 2 In a preferred embodiment, at least one first slot 31 is provided with a lifting platform 5, which is escalably connected to the stage 3. The lifting platform 5 can replace the bottom of the first slot 31 to support the cross-sectional sample, thereby enabling the height of the cross-sectional sample to be adjusted. In other words, the cross-sectional sample is directly placed on the lifting platform 5, which defines the height of the cross-sectional sample.

[0062] It can be seen that the height of the cross-sectional sample can be adjusted to a suitable position through the lifting platform 5, which is conducive to observation and improves observation accuracy. Especially for cross-sectional samples of different sizes, the best working distance between the cross-sectional sample and the lens is maintained to optimize the imaging quality.

[0063] One or more independent lifting platforms 5 are provided in at least one first slot 31. When multiple lifting platforms 5 are provided, the multiple lifting platforms 5 are spaced apart along the length direction of the first slot 31. They are independent of each other and more convenient to use.

[0064] The lifting method of the lifting platform 5 is also easy to implement according to common sense by those skilled in the art, so it is not limited thereto.

[0065] In this embodiment, the lifting platform 5 is provided with a screw 51, which is directly threadedly connected to the loading platform 3. By rotating the screw 51 of the lifting platform 5, the lifting platform 5 can be driven to move up and down.

[0066] like Figure 3 and Figure 4As shown, one side wall 321 of the second slot 32 is tilted relative to the upper surface 30 of the stage 3. In this way, the surface of the cross-sectional sample can fit with the side wall 321 of the second slot 32, and the plane and cross section of the cross-sectional sample can be observed at the same time. It can be understood that the cross-sectional sample is placed in the second slot 32 at an angle, and one of the surfaces of the cross-sectional sample fits with the side wall 321 of the second slot 32, then the exposed plane and cross section of the cross-sectional sample can be scanned and observed by the lens. After placing the cross-sectional sample in the second slot 32, the cross-sectional sample is fixed in the second slot 32 by a suitable method, which facilitates the equipment / machine to scan and shoot the cross-sectional sample, and observe the plane and cross-sectional morphology from multiple angles and directions.

[0067] The sidewall 321 of the second slot 32 is generally flat, allowing it to fit snugly against a surface of a cross-sectional sample. However, the shape of the second slot 32 is not limited, as long as it can accommodate a cross-sectional sample, especially samples of varying sizes. Therefore, the second slot 32 allows for simultaneous observation of both the planar and cross-sectional views of a sample, enabling multi-angle and multi-directional analysis of sample morphology.

[0068] There are one or more second slots 32. In this embodiment, there is one second slot 32, with a first slot 31 on either side, which generally meets practical requirements. It should be noted that the second slot 32 is provided on the upper surface 30 of the loading platform 3 and extends a certain depth toward the bottom surface of the loading platform 3, but does not penetrate the bottom surface of the loading platform 3.

[0069] The angle α between the side wall 321 of the second slot 32 and the upper surface 30 of the loading platform 3 cannot be too small or too large. If it is too small or too large, the plane and the cross section cannot be fully observed. Preferably, the angle α between the side wall 321 of the second slot 32 and the upper surface 30 of the loading platform 3 is greater than 5°. More preferably, the angle α between the side wall 321 of the second slot 32 and the upper surface 30 of the loading platform 3 is 40° to 55°, such as 40°, 45°, 50° or 55°. In this embodiment, the angle α of the second slot 32 is 45°.

[0070] The method for securing the cross-sectional sample placed in the second slot 32 is not limited. For example, in this embodiment, a fixing screw 4 is provided in the second slot 32. This fixing screw 4 is tightened perpendicularly to the sidewall 321 of the second slot 32 and secures the cross-sectional sample to the sidewall 321 of the second slot 32, preventing the cross-sectional sample from drifting. Alternatively, those skilled in the art may employ a spring-loaded plate or other methods to secure the cross-sectional sample in the second slot 32.

[0071] It should also be noted that the side wall 321 of the second slot 32 can be tilted forward, backward, left or right, without any requirement.

[0072] On the other hand, reference Figures 1 to 4 A sample platform 6 is vertically mounted on the stage 3, extending above the upper surface 30 of the stage 3. The sample platform 6 is used to place a planar sample so that the entire planar topography can be observed. It is understood that the planar sample is placed with the surface to be observed facing upwards to facilitate lens scanning.

[0073] In some embodiments, the height of the sample platform 6 is not adjustable. In this case, the sample platform 6 is fixed on the stage 3 and is always higher than the upper surface 30 of the stage 3. In this case, the sample platform 6 and the stage 3 are designed as one or two separate parts.

[0074] In this embodiment, the sample platform 6 is a height-adjustable structure, and in this case, the sample platform 6 can selectively extend out of the upper surface 30 of the stage 3. It should be noted that all the liftable structures in the sample loading process are independent of each other and do not interfere with each other.

[0075] Therefore, by adjusting the height of the sample platform 6, not only is imaging quality optimized, but it also enables observation of planar samples of varying sizes, facilitates focus during planar analysis, and reduces interference from nearby cross-sectional samples on planar sample analysis. It should be understood that during scanning, the sample platform 6 needs to be elevated above the upper surface 30 of the stage 3 to minimize interference from cross-sectional samples in the first slot 31 and the second slot 32 on the scanning of planar samples.

[0076] The sample platform 6 can be stored in the stage 3 when not in use, or it can be stored in the stage 3. Preferably, the sample platform 6 is stored in the stage 3 when not in use to avoid interference with nearby cross-section samples and samples at special angles.

[0077] In this embodiment, a relatively large opening 33 is provided on the upper surface 30 of the stage 3, corresponding to the position of the sample platform 6. The size of the opening 33 allows the sample platform 6 to enter and exit the stage 3. Specifically, when not in use, the sample platform 6 is stored in the stage 3 through the opening 33, and when in use, the sample platform 6 is removed from the stage 3.

[0078] There is no particular requirement for the lifting method of the sample platform 6. In this embodiment, the sample platform 6 is provided with a screw 51, which is threadedly connected to the stage 3. By rotating the screw 51 of the sample platform 6, the sample platform 6 can be driven to rise and fall.

[0079] The sample platform 6 can be secured to the planar sample using any suitable method. Regardless of the method, a conductive securing method is preferred. Preferably, a conductive adhesive is applied to the surface of the sample platform 6 to secure the planar sample. The conductive adhesive can be, for example, carbon adhesive, silver adhesive, copper adhesive, or other commonly used conductive materials.

[0080] Optionally, a positioning hole 34 is provided at the center of the upper surface 30 of the stage 3. This positioning hole 34 is a small hole, typically ≤1 mm in diameter. This positioning hole 34 serves as a physical marker for locating the center of the sample stage of the device / machine, enabling optical or mechanical positioning to ensure that the sample stage is reset to its initial reference point (home position).

[0081] Those skilled in the art will appreciate that the home position serves as the reference point for the mechanical movement of the sample stage. Calibration of the sample stage ensures that the field of view in image scanning mode is accurately reset to the home position. For example, in SEM high-resolution mode, the field of view only covers a micron-scale area. Positioning hole 34 serves as a precise positioning center, preventing loss of field of view due to sample stage deviation in the equipment / machine.

[0082] The above sample loading device is not only applicable to SEM sample analysis, but also applicable to analysis of FIB samples or other samples.

[0083] In existing technologies, the holders must be repeatedly replaced and moved in and out of the equipment / machine multiple times, which is time-consuming and reduces equipment efficiency. Furthermore, because the samples need to be taken repeatedly (especially manually using tweezers), the handling process can introduce dirt, disrupt the original sample morphology, and easily damage the sample.

[0084] The sample loading device provided by the present invention can be matched with existing equipment / machines through the base 1, making it convenient to transport, fix and install; at the same time, through the first card slot 31, the sample platform 6 and the second card slot 32, the sample loading device can analyze different samples independently of each other, which not only improves the sample loading efficiency and reduces damage to the sample, but also significantly improves the utilization rate of the equipment / machine and improves the sample analysis efficiency.

[0085] This not only solves the problem of SEM samples requiring simultaneous observation of both planes and cross-sections, but also enables more accurate acquisition of morphological information of the observed samples, avoiding contamination or damage to the samples caused by repeated sampling. It also solves the problem of frequent sample replacement and waste of a large amount of equipment usage time during the use of SEM equipment in semiconductor factory laboratories, thereby greatly improving equipment utilization efficiency, increasing the number of observed samples, contributing to chip process development and advancement, and improving product yield.

[0086] The above description is only a description of the preferred embodiments of the present invention and does not limit the scope of the present invention. Any changes and modifications made by ordinary technicians in the field of the present invention based on the above disclosure are within the scope of protection of the present invention.

Claims

1. A sample loading device, characterized in that: It includes a base, a connector and a stage connected in sequence; the upper surface of the stage is provided with a first card slot and a second card slot which are separately arranged; a side wall of the first card slot is perpendicular to the upper surface of the stage; a side wall of the second card slot is inclined relative to the upper surface of the stage; a sample platform which can be higher than the upper surface of the stage is vertically installed on the stage.

2. The sample loading device according to claim 1, wherein At least one of the connecting member and the sample platform is a height-adjustable structure.

3. The sample loading device according to claim 2, wherein: When the connecting member is a height-adjustable structure, the connecting member is configured as a screw rod, and the screw rod is threadably connected to the stage.

4. The sample loading device according to claim 2, wherein: When the sample platform is a height-adjustable structure, the sample platform is provided with a screw rod, and the screw rod of the sample platform is threadedly connected to the stage.

5. The sample loading device according to claim 4, wherein: An opening is provided on the upper surface of the object carrier at a position corresponding to the sample platform, and a size of the opening allows the sample platform to enter and exit the object carrier.

6. The sample loading device according to claim 1, wherein: There are multiple first card slots.

7. The sample loading device according to claim 6, wherein: There are two first card slots, and the two first card slots are symmetrically arranged on the left and right.

8. The sample loading device according to claim 6 or 7, characterized in that: A lifting platform is provided in at least one of the first slots, and the lifting platform is connected to the loading platform in a liftable manner.

9. The sample loading device according to claim 8, wherein: A plurality of independent lifting platforms are provided in at least one of the first slots, and / or the lifting platform is provided with a screw rod, and the screw rod of the lifting platform is threadedly connected to the loading platform.

10. The sample loading device according to claim 1, wherein: An included angle between a side wall of the second slot and the upper surface of the loading platform is 40° to 55°.

11. The sample loading device according to claim 10, wherein: An included angle between a side wall of the second slot and the upper surface of the loading platform is 45°.

12. The sample loading device according to claim 1, wherein The sample loading device also has at least one of the following structures: The surface of the sample platform is provided with conductive glue, and the conductive glue is used to bond and fix the planar sample; A positioning hole is provided at the center of the upper surface of the loading platform; The first slot is provided with a fixing screw for fixing the cross-section sample in the first slot; The second slot is provided with a fixing screw for fixing the cross-section sample in the second slot; The side surface of the base is provided with two through-hole-shaped matching holes, and the two matching holes are arranged in parallel; Both ends of the first slot along the length direction pass through the loading platform.

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