A tail gas scrubber for semiconductor manufacturing equipment

Abstract

The present invention relates to the field of exhaust gas treatment technology, specifically to an exhaust gas washing tower for semiconductor manufacturing equipment, comprising a washing tower body; an air inlet is provided at the lower end of the washing tower body, an air outlet is provided at the upper end of the washing tower body, an observation window is provided on the outer surface of the washing tower body, a support seat is fixedly connected to the interior of the washing tower body, a protective seat is fixedly connected to the upper surface of the support seat, a first slide groove and a second slide groove are provided inside the protective seat, and a rotating support assembly is provided inside the first slide groove. In the present invention, the rotating support assembly can be used to drive the filler arranged on the upper surface of the grid plate to rotate, thereby adjusting the position of the filler. By continuously changing the position of the filler, it is ensured that the exhaust gas at any position in the tower can fully contact the fresh, non-overused filler part, thereby avoiding excessive or insufficient gas-liquid contact at a fixed position, thereby making the gas-liquid contact more uniform during the entire treatment process.

Description

Technical Field

[0001] The present invention relates to the technical field of tail gas treatment, in particular to a tail gas washing tower for semiconductor manufacturing equipment. Background Art

[0002] The semiconductor manufacturing process uses a variety of chemicals and process steps, which lead to the generation of exhaust gases. To reduce the concentration of harmful gases in the work environment, lower the risk of employee exposure to hazardous substances, and prevent harmful substances in exhaust gases from being released into the atmosphere, causing air pollution and harming ecosystems and human health, exhaust gases generated by semiconductor manufacturing equipment must be treated. After treatment, exhaust gases can only be discharged after meeting national emission standards. Common exhaust gas treatment methods include combustion, adsorption, absorption, catalytic conversion, and cryogenic condensation.

[0003] A scrubber is a new type of gas purification equipment, an improvement on the floating packing layer gas purifier. It is widely used in pre-treatment for industrial waste gas purification and dust removal, achieving excellent purification results. In the treatment of exhaust gases from semiconductor manufacturing equipment, scrubbers are primarily used to treat acidic gases (such as hydrogen chloride, hydrogen fluoride, and sulfuric acid mist), alkaline gases (such as ammonia), and organic waste gases (such as VOCs). The scrubber operates by utilizing contact between gas and liquid to transfer pollutants from the gas into the liquid, thereby purifying the exhaust.

[0004] Existing tail gas scrubbers are equipped with multiple levels of packing. These packings are solid materials with specific shapes and properties placed within the treatment equipment. Their function is to increase the gas-liquid contact area, provide surface reaction sites, and improve airflow distribution. In most prior art scrubber designs, the packing is typically fixed within the tower. Because fixed packing lacks flexibility and cannot be adjusted promptly to the dynamic changes in airflow and liquid distribution, it is difficult to ensure ideal gas-liquid contact and mass transfer under all operating conditions. This can also result in poor localized gas-liquid contact, leading to poor treatment in some areas and overtreatment in others. Summary of the Invention

[0005] The object of the present invention is to provide a tail gas scrubber for semiconductor manufacturing equipment to solve the problems raised in the above background technology.

[0006] To achieve the above-mentioned object, the present invention provides the following technical solution: a semiconductor manufacturing equipment tail gas scrubber, comprising a scrubber body; an air inlet is provided at the lower end of the scrubber body, an air outlet is provided at the upper end of the scrubber body, an observation window is provided on the outer surface of the scrubber body, a support seat is fixedly connected to the interior of the scrubber body, a protective seat is fixedly connected to the upper surface of the support seat, a first chute and a second chute are provided inside the protective seat, a rotating support assembly is provided inside the first chute, the rotating support assembly includes a chassis, a grid plate is provided above the chassis, a filler is provided on the upper surface of the grid plate, and the rotating support assembly is used to adjust the position of the filler;

[0007] A vibration component is provided inside the chassis, and the vibration component is used to drive the filler provided on the upper surface of the grid plate to vibrate.

[0008] Through the above technical solution, the rotating support component can be used to drive the filler arranged on the upper surface of the grid plate to rotate, thereby adjusting the position of the filler. By continuously changing the position of the filler, it is ensured that the exhaust gas can fully contact with the fresh, non-overused filler part at any position in the tower, thereby avoiding excessive or insufficient gas-liquid contact at a fixed position, so that the gas-liquid contact in the entire treatment process is more uniform, and the purification efficiency is improved. The vibration component can drive the filler arranged on the upper surface of the grid plate to vibrate. The vibration can make the liquid on the surface of the filler more frequently updated, increase the chance of gas-liquid contact, and help to shake off dirt, sediment and impurities attached to the surface of the filler, reduce the occurrence of blockage and scaling, and extend the service life of the filler.

[0009] Furthermore, the support seats are fixedly connected to the inner wall of the washing tower body, and the support seats are distributed at equal angles with respect to the center of the washing tower body.

[0010] Through the above technical solution, the support seat is firmly connected to the inner wall of the washing tower body, thereby stably supporting the rotating support assembly and the vibration assembly connected to the protective seat.

[0011] Furthermore, a fixing cylinder is fixedly connected to the upper surface of the chassis, an axial spring is connected inside the fixing cylinder, the other end of the axial spring is connected to a telescopic rod, the telescopic rod is fixedly connected to the grid plate, and the fixing cylinder is symmetrically distributed about the longitudinal center line of the chassis.

[0012] Through the above technical solution, the chassis supports the grid plate through the fixed tube, axial spring and telescopic rod, thereby supporting the filler arranged on the upper surface of the grid plate, and the chassis can drive the filler to move when rotating.

[0013] Furthermore, a gear ring is sleeved on the outer surface of the chassis, and the gear ring is fixedly connected to the chassis. A support block is fixedly connected to the inner wall of the washing tower body, and a motor is fixedly installed inside the support block. One side of the motor is transmission-connected to an output shaft, and one end of the output shaft is fixedly connected to a drive gear, which is meshed with the gear ring.

[0014] Through the above technical solution, when the output shaft connected to the motor drives the drive gear to rotate, the drive gear will drive the gear ring meshing with it to rotate, and then the gear ring drives the chassis fixedly connected to it to rotate, thereby causing the filler to move inside the washing tower body.

[0015] Furthermore, the chassis and the first chute are connected in a rotating manner, the chassis is in a circular ring structure, the protective seat is in a double-layer circular ring structure, and the inner diameter of the chassis is equal to the inner diameter of the lower half of the protective seat.

[0016] The above technical solution facilitates the stable fit between the chassis and the protective seat, thereby facilitating the sealing of the connection between the chassis and the protective seat to prevent the cleaning fluid from entering the interior of the protective seat.

[0017] Furthermore, longitudinal partitions are evenly distributed on the upper surface of the grid plate. The longitudinal partitions are circular in shape when viewed from above. The fillers are distributed at equal angles about the center of the longitudinal partitions. A transverse partition is provided between the upper and lower longitudinal partitions.

[0018] Through the above technical solution, the longitudinal partitions can separate the fillers longitudinally, and the transverse partitions can separate the fillers transversely, so that the fillers are neatly arranged and evenly distributed above the grid plates to ensure uniform flow of gas in the tower and avoid local short circuits or airflow concentration.

[0019] Furthermore, a protrusion is fixedly connected to the outer surface of the filler, and a limiting groove is provided inside the longitudinal partition. The cross-section of the limiting groove is an inverted "convex" shape, and one end of the protrusion is located inside the limiting groove.

[0020] Through the above technical solution, the inner half of the longitudinal partition is made of flexible material, and the outer half is made of hard material. When the filler is installed between two adjacent longitudinal partitions, since the open end of the limiting groove is a flexible structure, the protrusion connected to the filler can be stuck into the inside of the limiting groove. During the movement of the filler, the protrusion connected to the filler will slide inside the limiting groove. The movement of the filler can be limited by the limiting groove, so that the filler remains neatly arranged during the movement, thereby avoiding the filler from being randomly distributed above the grid after movement.

[0021] Furthermore, a storage block is fixedly connected to the lower surface of the chassis, and a driving component is provided inside the storage block. The driving component is used to drive the vibration component to operate, and the storage block is connected to the second slide groove in a sliding manner.

[0022] Through the above technical solution, after the rotating support assembly is in operation, the driving assembly can transmit power, thereby driving the vibration assembly to operate, so that the filler can vibrate while continuously moving.

[0023] Furthermore, the driving assembly includes a driven gear, one side of the driven gear is meshed with an annular rack, the annular rack is located inside the second slide groove, the annular rack is connected to the protective seat in a fixed manner, the upper end of the driven gear is fixedly connected to the first bevel gear, one side of the first bevel gear is meshed with the second bevel gear, and the second bevel gear is connected to the chassis in a rotating manner.

[0024] Through the above technical solution, when the storage block connected to the chassis drives the driven gear to move, since the driven gear is engaged with the annular rack, under the action of the annular rack, the driven gear will rotate on its own, and then the driven gear drives the second bevel gear to rotate through the first bevel gear, thereby achieving the purpose of power transmission.

[0025] Furthermore, the vibration component includes a connecting shaft and a cam, one end of the connecting shaft is fixedly connected to the second bevel gear, the other end of the connecting shaft is fixedly connected to the cam, one side of the cam is fixedly connected to the first fixed shaft, the outer surface of the first fixed shaft is sleeved with a driven plate, the connection method of the driven plate and the first fixed shaft is a rotational connection, the upper end of the driven plate is rotationally connected to the second fixed shaft, the two ends of the second fixed shaft are fixedly connected to push blocks, the lower surface of the grid plate is fixedly connected to a slide cylinder, and the connection method of the slide cylinder and the push block is a sliding connection.

[0026] Through the above technical solution, the second bevel gear drives the connecting shaft fixedly connected to it to rotate, and the connecting shaft drives the cam fixedly connected to it to rotate synchronously, and the cam is eccentrically connected to the first fixed shaft. In the process of the cam driving the first fixed shaft to rotate, the driven plate connected to the first fixed shaft drives the push block to rise and fall through the second fixed shaft, and the push block pushes the slide cylinder through continuous up and down movement, thereby causing the grid plate to move up and down continuously.

[0027] Compared with the prior art, the present invention has the following beneficial effects:

[0028] First, in the present invention, the rotating support assembly can drive the filler arranged on the upper surface of the grid plate to rotate, thereby adjusting the position of the filler. By continuously changing the position of the filler, it is ensured that the exhaust gas can fully contact with the fresh, non-overused filler part at any position in the tower, thereby avoiding excessive or insufficient gas-liquid contact at a fixed position, thereby making the gas-liquid contact more uniform throughout the entire treatment process.

[0029] Secondly, in the present invention, the separation effect of the longitudinal partition and the transverse partition can make the filler arranged neatly and evenly distributed above the grid plate to ensure uniform flow of gas in the tower and avoid local short circuit or airflow concentration. In addition, during the movement of the filler, the protrusions connected to the filler will slide inside the limiting groove, and the movement of the filler can be limited by the limiting groove, so that the filler remains neatly arranged during the movement, thereby avoiding the filler being randomly distributed above the grid plate after movement.

[0030] Third, in the present invention, when the chassis drives the filler to move continuously through rotation, the chassis will drive the storage block to rotate synchronously around the longitudinal center line of the protective seat, and the driving component arranged inside the storage block will transmit power, thereby driving the vibration component to operate, which is beneficial to the integrated movement of the device.

[0031] Fourthly, in the present invention, the vibrating assembly can drive the filler arranged on the upper surface of the grid plate to vibrate. The vibration can make the liquid on the surface of the filler updated more frequently, increase the chance of gas-liquid contact, and help to shake off dirt, sediment and impurities attached to the surface of the filler, reduce the occurrence of blockage and scaling, and extend the service life of the filler. BRIEF DESCRIPTION OF THE DRAWINGS

[0032] Figure 1 It is a schematic diagram of the overall structure of the present invention;

[0033] Figure 2 This is a schematic diagram of the connection structure between the support base and the washing tower body in the present invention;

[0034] Figure 3 Schematic diagram of the connection structure between the support seat and the protective seat in the present invention;

[0035] Figure 4 Schematic diagram of the connection structure of the longitudinal partition and the transverse partition in the present invention;

[0036] Figure 5 Schematic diagram of the cross-sectional structure of the longitudinal partition in the present invention;

[0037] Figure 6 For the present invention Figure 5 A in the middle is an enlarged structural diagram;

[0038] Figure 7 Schematic diagram of the cross-sectional structure of the protective seat in the present invention;

[0039] Figure 8 Schematic diagram of the connection structure between the driving gear and the protective seat in the present invention;

[0040] Figure 9 Schematic diagram of the cross-sectional structure of the chassis and the gear ring in the present invention;

[0041] Figure 10 Schematic diagram of the connection structure between the chassis and the storage block in the present invention.

[0042] In the accompanying drawings, the components represented by the reference numerals are as follows:

[0043] 1. Scrubbing tower body; 2. Air inlet; 3. Air outlet; 4. Observation window; 5. Support seat; 6. Protective seat; 7. First slide; 8. Second slide; 9. Chassis; 10. Gear ring; 11. Drive gear; 12. Support block; 13. Motor; 14. Output shaft; 15. Fixed cylinder; 16. Axial spring; 17. Telescopic rod; 18. Grid plate; 19. Filler; 20. Longitudinal partition; 21. Bump; 22. Limiting groove; 23. Transverse partition; 24. Annular rack; 25. Storage block; 26. Driven gear; 27. First bevel gear; 28. Second bevel gear; 29. ​​Connecting shaft; 30. Cam; 31. First fixed shaft; 32. Driven plate; 33. Second fixed shaft; 34. Push block; 35. Slide. DETAILED DESCRIPTION

[0044] The following will clearly and completely describe the technical solutions in the embodiments of the present invention in conjunction with the accompanying drawings. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without making creative efforts are within the scope of protection of the present invention.

[0045] The present invention provides a technical solution: Figure 1 - Figure 10 The exhaust gas washing tower of a semiconductor manufacturing equipment shown in the figure includes a washing tower body 1; an air inlet 2 is provided at the lower end of the washing tower body 1, an air outlet 3 is provided at the upper end of the washing tower body 1, an observation window 4 is provided on the outer surface of the washing tower body 1, a support seat 5 is fixedly connected to the inside of the washing tower body 1, a protective seat 6 is fixedly connected to the upper surface of the support seat 5, a first chute 7 and a second chute 8 are provided inside the protective seat 6, a rotating support assembly is provided inside the first chute 7, the rotating support assembly includes a chassis 9, a grid plate 18 is provided above the chassis 9, a filler 19 is provided on the upper surface of the grid plate 18, the rotating support assembly is used to adjust the position of the filler 19, and a vibration assembly is provided inside the chassis 9, the vibration assembly is used to drive the filler 19 provided on the upper surface of the grid plate 18 to vibrate.

[0046] It is worth mentioning that the rotating support assembly can drive the filler 19 set on the upper surface of the grid plate 18 to rotate, thereby adjusting the position of the filler 19. By constantly changing the position of the filler 19, it is ensured that the exhaust gas can fully contact with the fresh, non-overused part of the filler 19 at any position in the tower, thereby avoiding excessive or insufficient gas-liquid contact at a fixed position, so that the gas-liquid contact in the entire treatment process is more uniform, and the purification efficiency is improved. The vibration assembly can drive the filler 19 set on the upper surface of the grid plate 18 to vibrate. The vibration can make the liquid on the surface of the filler 19 more frequently updated, increase the chance of gas-liquid contact, and help to shake off dirt, sediment and impurities attached to the surface of the filler 19, reduce the occurrence of blockage and scaling, and extend the service life of the filler 19.

[0047] See also Figure 1-Figure 3 The support base 5 is fixedly connected to the inner wall of the washing tower body 1 , and the support base 5 is distributed at equal angles with respect to the center of the washing tower body 1 .

[0048] The function of the support seat 5 is to firmly connect the support seat 5 to the inner wall of the washing tower body 1 , thereby stably supporting the rotating support assembly and the vibration assembly connected to the protective seat 6 .

[0049] See also Figures 1-9 The upper surface of the chassis 9 is fixedly connected with a fixed cylinder 15, and an axial spring 16 is connected to the inside of the fixed cylinder 15. The other end of the axial spring 16 is connected to a telescopic rod 17, and the telescopic rod 17 is fixedly connected to the grid 18. The fixed cylinder 15 is symmetrically distributed about the longitudinal center line of the chassis 9. The outer surface of the chassis 9 is sleeved with a gear ring 10, and the gear ring 10 is fixedly connected to the chassis 9. The inner wall of the washing tower body 1 is fixedly connected with a support block 12, and a motor 13 is fixedly installed inside the support block 12. One side of the motor 13 is transmission-connected with an output shaft 14, and one end of the output shaft 14 is fixedly connected with a drive gear 11, which is meshed with the gear ring 10.

[0050] The principle of driving the filler 19 to move is: after the motor 13 is running, the output shaft 14 connected to the motor 13 will drive the drive gear 11 to rotate, and the drive gear 11 will drive the gear ring 10 meshing with it to rotate, and then the gear ring 10 drives the chassis 9 fixed to it to rotate, so that the chassis 9 and the gear ring 10 rotate inside the protective seat 6, and the chassis 9 supports the grid 18 through the fixed cylinder 15, the axial spring 16 and the telescopic rod 17, thereby supporting the filler 19 set on the upper surface of the grid 18. Therefore, the chassis 9 can drive the filler 19 to move when rotating, so that the filler 19 moves inside the washing tower body 1. During the operation of the washing tower, the distribution of airflow and liquid does not always remain constant. When the distribution of airflow and liquid changes, the moving filler 19 can actively adjust its position to adapt to this change, which is beneficial to ensure that the filler 19 is fully infiltrated and improve the mass transfer effect.

[0051] See also Figure 2-Figure 9 The connection between the chassis 9 and the first chute 7 is a rotating connection. The chassis 9 is a circular ring structure, and the protective seat 6 is a double-layer circular ring structure. The inner diameter of the chassis 9 is equal to the inner diameter of the lower half of the protective seat 6.

[0052] It should be noted that: since the inner diameter of the chassis 9 is equal to the inner diameter of the lower half of the protective seat 6, it is easy to ensure that the chassis 9 and the protective seat 6 fit stably, so that a sealing strip can be added to the connection between the chassis 9 and the protective seat 6 to seal it, which is beneficial to prevent the cleaning liquid from entering the interior of the protective seat 6.

[0053] See also Figure 2-Figure 4 The upper surface of the grid plate 18 is evenly distributed with longitudinal partitions 20, and the longitudinal partitions 20 are in a circular ring structure when viewed from above. The fillers 19 are distributed at equal angles about the center of the longitudinal partitions 20. A transverse partition 23 is provided between the upper and lower longitudinal partitions 20. A protrusion 21 is fixedly connected to the outer surface of the filler 19, and a limiting groove 22 is provided inside the longitudinal partition 20. The cross-section of the limiting groove 22 is in an inverted "convex" shape, and one end of the protrusion 21 is located inside the limiting groove 22.

[0054] The function of the longitudinal partition 20 is that the longitudinal partition 20 can separate the packing 19 longitudinally, and the transverse partition 23 can separate the packing 19 transversely. The inner half of the longitudinal partition 20 is made of flexible material, and the outer half is made of hard material. When the packing 19 is installed between two adjacent longitudinal partitions 20, since the open end of the limiting groove 22 is a flexible structure, the protrusion 21 connected to the packing 19 can be stuck into the limiting groove 22. Through the separation effect of the longitudinal partition 20 and the transverse partition 23, the packing 19 can be neatly arranged and evenly distributed above the grid 18 to ensure uniform flow of gas in the tower and avoid local short circuit or air flow concentration. In addition, during the movement of the packing 19, the protrusion 21 connected to the packing 19 will slide inside the limiting groove 22. The movement of the packing 19 can be limited by the limiting groove 22, so that the packing 19 remains neatly arranged during the movement, thereby avoiding the packing 19 from being randomly distributed above the grid 18 after movement.

[0055] See also Figure 2-Figure 10 The lower surface of the chassis 9 is fixedly connected with a storage block 25, and a driving assembly is provided inside the storage block 25. The driving assembly is used to drive the vibration assembly to operate. The storage block 25 is connected to the second slide 8 in a sliding manner. The driving assembly includes a driven gear 26, and one side of the driven gear 26 is meshed with an annular rack 24. The annular rack 24 is located inside the second slide 8. The annular rack 24 is connected to the protective seat 6 in a fixed manner. The upper end of the driven gear 26 is fixedly connected with a first bevel gear 27, and one side of the first bevel gear 27 is meshed with a second bevel gear 28. The second bevel gear 28 is connected to the chassis 9 in a rotational manner.

[0056] The principle by which the driving assembly can transmit power is as follows: while the chassis 9 drives the filler 19 to move continuously by rotating, the chassis 9 will drive the storage block 25 to rotate synchronously around the longitudinal center line of the protective seat 6. Since the annular rack 24 is fixed inside the second slide groove 8, the driven gear 26 inside the storage block 25 will rotate around the longitudinal center line of the protective seat 6. Since the driven gear 26 is meshed with the annular rack 24, under the action of the annular rack 24, the driven gear 26 will rotate on its own, and then the driven gear 26 drives the second bevel gear 28 to rotate through the first bevel gear 27, thereby achieving the purpose of transmitting power.

[0057] See also Figure 2-Figure 10The vibration assembly includes a connecting shaft 29 and a cam 30. One end of the connecting shaft 29 is fixedly connected to the second bevel gear 28, and the other end of the connecting shaft 29 is fixedly connected to the cam 30. One side of the cam 30 is fixedly connected to a first fixed shaft 31. The outer surface of the first fixed shaft 31 is sleeved with a driven plate 32. The driven plate 32 is connected to the first fixed shaft 31 in a rotating manner. The upper end of the driven plate 32 is rotatably connected to the second fixed shaft 33. Both ends of the second fixed shaft 33 are fixedly connected to push blocks 34. The lower surface of the grid plate 18 is fixedly connected to a slide cylinder 35. The slide cylinder 35 and the push block 34 are connected in a sliding manner.

[0058] The principle that can make the packing 19 vibrate is: after the driving assembly transmits power, the second bevel gear 28 will drive the connecting shaft 29 fixedly connected to it to rotate, and the connecting shaft 29 drives the cam 30 fixedly connected to it to rotate synchronously, and the cam 30 is eccentrically connected to the first fixed shaft 31. In the process of the cam 30 driving the first fixed shaft 31 to rotate, the driven plate 32 connected to the first fixed shaft 31 drives the push block 34 to move through the second fixed shaft 33, so that the push block 34 slides inside the slide cylinder 35, and the push block 34 and the slide cylinder 35 never fall off. Since the telescopic rod 17 fixedly connected to the lower surface of the grid plate 18 forms a telescopic structure inside the fixed cylinder 15 through the axial spring 16, when the push block 34 pushes the slide cylinder 35 through continuous up and down movement, the grid plate 18 connected to the slide cylinder 35 will vibrate under the action of the axial spring 16, thereby driving the packing 19 set above the grid plate 18 to vibrate.

[0059] It should be noted that, in this document, relational terms such as first and second, etc., are used only to distinguish one entity or operation from another entity or operation, and do not necessarily require or imply any actual relationship or order between these entities or operations. Moreover, the terms "comprises," "comprising," or any other variations thereof are intended to cover non-exclusive inclusion, such that a process, method, article, or apparatus that includes a list of elements includes not only those elements but also other elements not explicitly listed, or elements inherent to such process, method, article, or apparatus.

[0060] While embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that various changes, modifications, substitutions, and variations may be made to these embodiments without departing from the principles and spirit of the invention, and that the scope of the invention is defined by the appended claims and their equivalents.

Claims

1. A semiconductor manufacturing equipment tail gas scrubber, comprising a scrubber body (1); characterized in that: The lower end of the washing tower body (1) is provided with an air inlet (2), the upper end of the washing tower body (1) is provided with an air outlet (3), the outer surface of the washing tower body (1) is provided with an observation window (4), the interior of the washing tower body (1) is fixedly connected with a support seat (5), the upper surface of the support seat (5) is fixedly connected with a protective seat (6), the interior of the protective seat (6) is provided with a first chute (7) and a second chute (8), the interior of the first chute (7) is provided with a rotating support assembly, the rotating support assembly includes a chassis (9), a grid plate (18) is provided above the chassis (9), a filler (19) is provided on the upper surface of the grid plate (18), the rotating support assembly is used to adjust the position of the filler (19), the upper surface of the chassis (9) is fixedly connected with a fixed cylinder (15), the interior of the fixed cylinder (15) is connected with an axial spring (16), the other end of the axial spring (16) is connected with an extension spring (16), and the other end of the axial spring (16) is connected with an extension spring (16). The telescopic rod (17) is fixedly connected to the grid plate (18), the fixed cylinder (15) is symmetrically distributed about the longitudinal center line of the chassis (9), the outer surface of the chassis (9) is sleeved with a gear ring (10), one end of the output shaft (14) is fixedly connected to a driving gear (11), the driving gear (11) is meshed with the gear ring (10), and longitudinal partitions (20) are equidistantly distributed on the upper surface of the grid plate (18), and the longitudinal partitions (20) The structure is annular when viewed from above, the filler (19) is distributed at equal angles with respect to the center of the longitudinal partition (20), a transverse partition (23) is provided between the upper and lower longitudinal partitions (20), a protrusion (21) is fixedly connected to the outer surface of the filler (19), a limiting groove (22) is provided inside the longitudinal partition (20), and the limiting groove (22) is in an inverted "convex" shape when viewed from above, and one end of the protrusion (21) is located inside the limiting groove (22); A vibration component is provided inside the chassis (9), and the vibration component is used to drive the filler (19) provided on the upper surface of the grid plate (18) to vibrate.

2. A semiconductor manufacturing equipment tail gas scrubber according to claim 1, characterized in that: The support seats (5) are fixedly connected to the inner wall of the washing tower body (1), and the support seats (5) are distributed at equal angles with respect to the center of the washing tower body (1).

3. The tail gas scrubber for semiconductor manufacturing equipment according to claim 1, wherein: The gear ring (10) is connected to the chassis (9) in a fixed manner. A support block (12) is fixedly connected to the inner wall of the washing tower body (1). A motor (13) is fixedly installed inside the support block (12). An output shaft (14) is transmission-connected to one side of the motor (13).

4. A semiconductor manufacturing equipment tail gas scrubber according to claim 1, characterized in that: The chassis (9) and the first chute (7) are connected in a rotating manner. The chassis (9) is in a circular ring structure, and the protective seat (6) is in a double-layer circular ring structure. The inner diameter of the chassis (9) is equal to the inner diameter of the lower half of the protective seat (6).

5. The semiconductor manufacturing equipment tail gas scrubber according to claim 1, characterized in that: A receiving block (25) is fixedly connected to the lower surface of the chassis (9), and a driving component is provided inside the receiving block (25). The driving component is used to drive the vibration component to operate, and the receiving block (25) is connected to the second slide groove (8) in a sliding manner.

6. A semiconductor manufacturing equipment tail gas scrubber according to claim 5, characterized in that: The driving assembly includes a driven gear (26), one side of the driven gear (26) is meshedly connected to an annular rack (24), the annular rack (24) is located inside the second slide groove (8), the annular rack (24) is connected to the protective seat (6) in a fixed manner, the upper end of the driven gear (26) is fixedly connected to a first bevel gear (27), one side of the first bevel gear (27) is meshedly connected to a second bevel gear (28), and the second bevel gear (28) is connected to the chassis (9) in a rotational manner.

7. The semiconductor manufacturing equipment tail gas scrubber according to claim 1, characterized in that: The vibration assembly includes a connecting shaft (29) and a cam (30), one end of the connecting shaft (29) is fixedly connected to the second bevel gear (28), and the other end of the connecting shaft (29) is fixedly connected to the cam (30), one side of the cam (30) is fixedly connected to a first fixed shaft (31), the outer surface of the first fixed shaft (31) is sleeved with a driven plate (32), the connection mode of the driven plate (32) and the first fixed shaft (31) is a rotational connection, the upper end of the driven plate (32) is rotationally connected to the second fixed shaft (33), the two ends of the second fixed shaft (33) are fixedly connected to push blocks (34), the lower surface of the grid plate (18) is fixedly connected to a slide cylinder (35), and the connection mode of the slide cylinder (35) and the push block (34) is a sliding connection.

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