Ultra-precision processing equipment and processing method for array optical elements and molds

Abstract

The present invention relates to the technical field of ultra-precision machining of optical elements. The technical problem to be solved by the present invention is that it is difficult to achieve efficient ultra-precision machining of a single optical array unit with a large vector height. In order to solve the above technical problems, the present invention provides ultra-precision machining equipment and a machining method for array-type optical elements and molds. The present invention includes a workpiece fixing module connected to a machine tool base; the workpiece fixing module is configured to drive the workpiece to move along the X-axis and the Y-axis and to drive the workpiece to rotate; the tool rotating spindle, the tool radial movement assembly and the tool angle adjustment assembly drive the machining tool to rotate along the axis of the tool rotating spindle, move radially along the plane of rotation, and adjust the angle of the machining tool. The tool rotating spindle, the tool radial movement assembly, the tool angle adjustment assembly and the linkage of movement along the Z-axis complete the machining of a single optical array unit with a large vector height. The present invention has high machining efficiency, machining accuracy and machining quality stability.

Description

Technical Field

[0001] The present invention relates to the technical field of ultra-precision processing of optical elements, and in particular to ultra-precision processing equipment and a processing method for array-type optical elements and molds. Background Art

[0002] Ultra-precision processing technology for optical components and molds is an important field in the machinery manufacturing industry. The research and development of ultra-precision processing equipment is of paramount importance and has a significant impact on the development of cutting-edge manufacturing technologies and processes.

[0003] With the rapid development of the optical industry, optical surface design is becoming more and more complex. It can generally be composed of asymmetric, irregular, and complex free-form surfaces, which puts higher demands on processing equipment. Chinese invention patent CN118342668A discloses an ultra-precision processing equipment and method for wafer-level array optical elements and molds. Compared with previous technologies, the processing efficiency is greatly improved, and the processing accuracy and stability are also significantly improved. However, in the process of processing large-elliptical height surfaces, in order to avoid interference between the tool and the processing surface (such as Figure 8 The interference problem (500) requires multi-axis interpolation, making tool path planning complex and discontinuous, leading to reduced machining efficiency and decreased surface quality. Therefore, it is difficult to achieve efficient ultra-precision machining with a single high-axis optical array unit in existing technologies. Summary of the Invention

[0004] Therefore, the technical problem to be solved by the present invention is that it is difficult to achieve efficient ultra-precision machining of a single large-axis optical array unit.

[0005] To solve the above technical problems, the present invention provides an ultra-precision processing equipment for arrayed optical elements and molds, comprising:

[0006] Machine tool base;

[0007] A workpiece fixing module is connected to the machine tool base; the workpiece fixing module is configured to drive the workpiece to move along the X-axis and the Y-axis and to drive the workpiece to rotate so as to switch different units of the workpiece array of the workpiece;

[0008] The tool drive module includes a tool rotating spindle, a tool radial movement component, a tool angle adjustment component and a processing tool connected in sequence; the tool rotating spindle is movably connected to the machine tool base; the tool rotating spindle rotates in the horizontal plane and moves along the Z axis, and the X axis, Y axis and Z axis constitute a three-dimensional coordinate system; the tool rotating spindle, the tool radial movement component and the tool angle adjustment component are respectively configured to drive the processing tool to rotate along the axis of the tool rotating spindle, move radially along the plane of rotation, and adjust the angle of the processing tool, so as to realize the processing tool to perform variable diameter rotation motion while changing the angle between the processing tool and the plane to be processed; the tool drive module also includes a dynamic balancing mechanism connected to the tool rotating spindle, and the tool radial movement component is located in the dynamic balancing mechanism.

[0009] In one embodiment of the present invention, the included angle between the machining tool and the position to be machined is 90°.

[0010] In one embodiment of the present invention, the tool angle adjustment assembly includes a rotary drive unit and a tool seat; the rotary drive unit is connected to the tool radial movement assembly, the output shaft of the rotary drive unit is connected to the tool seat, and the machining tool is installed on the tool seat; the rotary drive unit is configured to drive the machining tool to rotate so as to change the angle between the machining tool and the plane to be machined.

[0011] In one embodiment of the present invention, the tool driving module further comprises a dynamic balancing mechanism movably connected to the tool rotating spindle; the dynamic balancing mechanism and the tool radial moving assembly move in opposite directions.

[0012] In one embodiment of the present invention, the dynamic balancing mechanism includes a balancing drive unit, a balancing slider and a balancing guide rail; the balancing drive unit is connected to the tool rotating spindle, and the output end of the balancing drive unit is connected to the balancing slider; the balancing slider is a frame structure, and the tool radial movement assembly is located in the balancing slider; the balancing guide rail is connected to the tool rotating spindle, and the balancing guide rail is slidably connected to the balancing slider.

[0013] In one embodiment of the present invention, the present application also includes a tool fine-tuning module, which is connected between the tool rotating spindle and the tool radial movement assembly; the tool fine-tuning module includes a flexible base and two adjustment components; both ends of the flexible base are connected to the tool rotating spindle, and the two adjustment components are symmetrically connected on both sides of the length direction of the flexible base; of the two adjustment components, one clamps the flexible base and the other applies force to the flexible base to deform the flexible base in the M direction.

[0014] In one embodiment of the present invention, an inclined wedge surface is provided on the flexible base at a position cooperating with the adjustment component; the adjustment component includes an adjustment limit block, an inclined wedge block, an adjustment screw and a locking nut; the adjustment limit block is provided on the outside of the flexible base and is connected to the tool rotation spindle; the inclined wedge block is connected to the inner side of the adjustment limit block, and the inclined wedge block cooperates with the inclined wedge surface; the adjustment screw is threadedly connected to the adjustment limit block and the inclined wedge block in turn.

[0015] In one embodiment of the present invention, the tool radial movement assembly includes a radial drive part, a radial movement guide rail and a sliding part; the radial drive part and the radial movement guide rail are respectively connected to the tool rotation spindle; the output end of the radial drive part is connected to the sliding part, and the sliding part is slidably connected to the radial movement guide rail; the radial drive part is configured to drive the sliding part to perform linear reciprocating sliding along the radial direction of the tool rotation spindle.

[0016] In one embodiment of the present invention, the tool radial movement assembly further includes a grating ruler, a ruler body of the grating ruler is connected to one side of the sliding portion, and a reading head of the grating ruler is connected to the tool rotation spindle.

[0017] The present invention also provides an ultra-precision processing method for an arrayed optical element and a mold, which is processed using the ultra-precision processing equipment for the arrayed optical element and the mold in any of the above embodiments, and the processing steps are as follows:

[0018] Initial tool setting, adjustment to make the axis of rotation of the workpiece coincide with the axis of rotation of the machining tool;

[0019] Perform ultra-precision turning on the surface of the workpiece;

[0020] Initial position adjustment: adjusting the tool radial movement assembly and the tool angle adjustment assembly so that the center of the machining tool coincides with the axis of the tool rotation spindle; adjusting so that the center of the array unit on the workpiece coincides with the rotation axis of the machining tool;

[0021] Processing, the tool rotation spindle, the tool radial movement component, the tool angle adjustment component and the linkage moving along the Z axis are used to complete the processing of a single large-axis optical array unit.

[0022] The above technical solution of the present invention has the following advantages over the prior art:

[0023] The ultra-precision processing equipment and processing method of the arrayed optical element and mold described in the present invention adopts the present application. When processing a large-ellipse surface, the processing tool is driven by the tool rotating spindle, the tool radial moving component, and the tool angle adjustment component to perform variable diameter rotation processing while adjusting the angle of the processing tool as the processing path changes, so that the angle between the center line of the processing tool and the processing surface changes. Thus, during ultra-precision processing, the interference between the processing tool and the workpiece can be effectively avoided, and the rotational motion of the workpiece and the multi-axis interpolation motion during the processing process can be avoided, thereby avoiding inertial impact, ensuring processing accuracy, improving the stability of the processing surface quality, and improving processing efficiency. In addition, the dynamic balancing mechanism of the present application is arranged around the tool radial moving component, so that when the tool radial moving component and the tool angle adjustment component cooperate in processing, the dynamic balance of the entire equipment can be ensured, thereby improving processing accuracy. Secondly, the present application always uses the tool tip part for cutting, which greatly improves processing efficiency, processing quality and stability of processing quality. The present application processes the workpiece by the variable diameter high-speed rotation of the processing tool, which can improve the processing efficiency of optical elements and molds and reduce manufacturing costs. It can be seen that the present application is ultra-precision machining equipment, which can achieve high-efficiency and high-quality ultra-precision machining of large-arrow-height surface shapes. BRIEF DESCRIPTION OF THE DRAWINGS

[0024] In order to make the content of the present invention more clearly understood, the present invention is further described in detail below based on specific embodiments of the present invention in conjunction with the accompanying drawings, wherein:

[0025] Figure 1 Schematic diagram of the structure of an ultra-precision processing equipment for an arrayed optical element and a mold in a preferred embodiment of the present invention;

[0026] Figure 2 yes Figure 1 A schematic diagram of the structure of the tool drive module in the structural diagram of the ultra-precision processing equipment for arrayed optical elements and molds;

[0027] Figure 3 yes Figure 2 Schematic diagram of the structure of the center turntable, tool fine-tuning module, tool radial movement assembly, tool angle adjustment assembly, dynamic balancing mechanism, and processing tool;

[0028] Figure 4 yes Figure 3 The main view;

[0029] Figure 5 yes Figure 3 Schematic diagram of the connection between the tool fine-tuning module and the turntable;

[0030] Figure 6 yes Figure 3Schematic diagram of the connection between the tool angle adjustment component and the processing tool;

[0031] Figure 7 It is a schematic diagram of the interference between the machining tool and the workpiece when the workpiece is machined using the existing technology;

[0032] Figure 8 yes Figure 7 Enlarged view of point E;

[0033] Figure 9 It is adopted Figure 1 Schematic diagram of the processing of a workpiece by the ultra-precision processing equipment of the arrayed optical element and mold;

[0034] Description of the accompanying drawings: 100, machine tool base;

[0035] 200, workpiece fixing module; 210, moving assembly; 220, workpiece rotating spindle;

[0036] 300, tool drive module; 310, tool rotation spindle; 320, tool radial movement assembly; 321, radial drive unit; 322, radial movement guide rail; 323, sliding unit; 324, guide rail base; 325, grating scale; 326, slip ring assembly; 330, tool angle adjustment assembly; 331, rotation drive unit; 332, tool seat; 333, fixed connection seat; 340, machining tool; 350, moving rotation assembly; 351, rotating platform; 352, moving table; 360, turntable; 370, dynamic balancing mechanism; 371, balancing drive unit; 372, balancing slider; 373, balancing guide rail; 380, tool fine-tuning module; 381, flexible base; 382, ​​adjustment limit block; 383, inclined wedge block; 384, adjustment screw; 385, locking nut; 390, spindle pressure plate;

[0037] 400, workpiece;

[0038] 500. Interference area. DETAILED DESCRIPTION

[0039] The present invention will be further described below with reference to the accompanying drawings and specific embodiments so that those skilled in the art can better understand the present invention and implement it. However, the embodiments are not intended to limit the present invention.

[0040] Reference Figures 1 to 9 As shown, an embodiment of the present invention provides an ultra-precision processing equipment for arrayed optical elements and molds, including:

[0041] A machine tool base 100 , a workpiece fixing module 200 and a tool driving module 300 .

[0042] The workpiece fixing module 200 is connected to the machine tool base 100; the workpiece fixing module 200 is configured to drive the workpiece 400 to move along the X-axis and the Y-axis and to drive the workpiece 400 to rotate, so as to switch different units of the workpiece array of the workpiece 400;

[0043] The tool drive module 300 includes a tool spindle 310 (A-axis), a tool radial motion assembly 320 (U-axis), a tool angle adjustment assembly 330 (R-axis), and a machining tool 340, which are connected in sequence. The tool spindle 310 is movably connected to the machine tool base 100; the tool radial motion assembly 320 is connected to the end of the tool spindle 310; the tool angle adjustment assembly 330 is connected to the tool radial motion assembly 320; and the machining tool 340 is connected to the tool angle adjustment assembly 330. The tool rotation spindle 310 rotates in a horizontal plane (X & Z plane, the horizontal plane being perpendicular to the B axis) and moves along the Z axis. The X, Y, and Z axes form a three-dimensional coordinate system. The tool rotation spindle 310, the tool radial movement assembly 320, and the tool angle adjustment assembly 330 are respectively configured to drive the machining tool 340 to rotate along the axis of the tool rotation spindle 310, to move radially along the plane of rotation, and to adjust the angle of the machining tool 340. This allows the machining tool 340 to perform variable diameter rotational motion while simultaneously changing the angle between the machining tool 340 and the surface being machined (the angle of the machining tool 340 changes as the angle of the normal to the surface being machined changes).

[0044] The tool driving module 300 further includes a dynamic balancing mechanism 370 connected to the tool rotating spindle 310 , and the tool radial moving assembly 320 is located in the dynamic balancing mechanism 370 . The tool driving module 300 further includes a tool fine-tuning module 380 .

[0045] The above-mentioned array optical elements and molds are processed using ultra-precision processing equipment. The processing steps are as follows:

[0046] Initial tool setting: Adjust the workpiece spindle 220 (the axis of rotation of the workpiece 400) to align with the axis of rotation of the machining tool 340. Mount the workpiece 400 on the end of the workpiece spindle 220, and mount the machining tool 340 on the tool angle adjustment assembly 330. Adjust the moving assembly 210 (for X- and Y-axis movement of the workpiece 400), the moving table 352 (for Z-axis movement of the machining tool 340), the rotating platform 351 (for B-axis rotation of the machining tool 340), the workpiece spindle 220 (for C-axis rotation of the workpiece 400), and the tool drive module 300 to align the workpiece spindle 220 with the spindle of the machining tool 340, completing the initial tool setting.

[0047] Ultra-precision turning is performed on the surface of the workpiece 400. The workpiece 400 rotates along with the workpiece rotation spindle 220 and is fed by the moving assembly 210 (X-axis). The machining tool 340 moves in the cutting depth direction by the moving table 352 (Z-axis movement), completing the ultra-precision turning of the surface of the workpiece 400.

[0048] Initial position adjustment, adjust the tool radial movement component 320 and the tool angle adjustment component 330 so that the center of the processing tool 340 coincides with the axis of the tool rotation spindle 310, that is, the initial position; adjust so that the center of the array unit on the workpiece 400 coincides with the rotation axis of the processing tool 340; by adjusting the moving component 210 (X-axis and Y-axis movement of the workpiece 400), the moving table 352 (Z movement of the processing tool 340), the rotating platform 351 (B-axis rotation of the processing tool 340), and the workpiece rotation spindle 220 (C-axis rotation of the workpiece 400), the center of the array unit on the workpiece 400 coincides with the rotation axis of the processing tool 340.

[0049] During processing, the rotation speed of the tool rotation spindle 310, the feed speed of the tool radial movement component 320, and the moving table 352 (the cutting depth of the Z movement of the processing tool 340) are set; according to the surface parameters of the array unit, the trajectory of the processing tool 340 is planned, the processing program is compiled, and the tool rotation spindle 310, the tool radial movement component 320, the tool angle adjustment component 330, and the movement along the Z axis are linked to complete the processing of a single large vector height optical array unit.

[0050] This application combines the functions of conventional turning process applications based on single-point diamond lathes, and can achieve high-efficiency ultra-precision processing of complex free-form surfaces and large-vector high-profile optical components and molds, while effectively ensuring the stability of processing quality, and has broad application prospects.

[0051] The present invention improves processing efficiency, enhances processing accuracy and the stability of surface processing quality, and is suitable for processing more surface shapes.

[0052] Specifically, when the present application is used to process a large-elevation surface, the machining tool 340 is driven by the tool rotation spindle 310, the tool radial movement component 320, and the tool angle adjustment component 330 to perform variable diameter rotation processing while adjusting the angle of the machining tool 340 as the machining path changes, so that the angle between the center line of the machining tool 340 and the machining surface changes, thereby effectively avoiding interference between the machining tool 340 and the workpiece 400 during ultra-precision machining, avoiding the rotational motion of the workpiece 400 and the multi-axis interpolation motion during the machining process, thereby avoiding inertial impact, ensuring machining accuracy, improving the stability of the machining surface quality, and improving machining efficiency; in addition, the dynamic balancing mechanism 370 of the present application is arranged around the tool radial movement component 320, so that when the tool radial movement component 320 and the tool angle adjustment component 330 cooperate in machining, the dynamic balance of the entire equipment can be guaranteed, thereby improving machining accuracy. Secondly, the present application always uses the tip part for cutting, which greatly improves machining efficiency, machining quality and the stability of machining quality. This application utilizes a tool 340 with a variable diameter and high-speed rotation to process a workpiece 400, thereby improving the processing efficiency of optical components and molds and reducing manufacturing costs. Thus, this application provides ultra-precision machining equipment capable of achieving high-efficiency, high-quality ultra-precision machining of large-swoosh surfaces.

[0053] In some embodiments, the workpiece securing module 200 includes a moving assembly 210 connected to the machine tool base 100 and a workpiece rotation spindle 220 (C-axis) connected to the moving assembly 210. The axis of the workpiece rotation spindle 220 is parallel to the Z-axis. The moving assembly 210 drives the workpiece 400 to move along the X- and Y-axes to align the axis of the workpiece rotation spindle 220 with the axis of the tool rotation spindle 310 (described below). The workpiece rotation spindle 220 drives the workpiece 400 to rotate along the axis of the workpiece rotation spindle 220. In some possible embodiments, the moving assembly 210 is a two-axis moving structure, which is conventional and will not be described in detail here. In some embodiments, the workpiece 400 is secured to the end of the workpiece rotation spindle 220 via a vacuum chuck, facilitating quick attachment and detachment of the workpiece 400 to and from the workpiece rotation spindle 220 while maintaining a secure connection between the workpiece 400 and the workpiece rotation spindle 220 during machining.

[0054] In some embodiments, the tool drive module 300 also includes a mobile rotation assembly 350 configured to drive the machining tool 340 to rotate in the horizontal plane (X & Z plane) and move along the Z axis. In some possible implementations, the mobile rotation assembly 350 includes a rotating platform 351 and a moving table 352. The moving table 352 is connected to the machine tool base 100 to drive the machining tool 340 along the Z axis, thereby driving the machining tool 340 to feed depthwise along the curved surface of the workpiece 400. The tool rotation spindle 310 is fixedly connected to the rotating platform 351 via a spindle pressure plate 390. The rotating platform 351 (B-axis) is connected to the movable portion of the moving table 352 to drive the machining tool 340 to rotate in the horizontal plane (X & Z plane), thereby adjusting the initial relative angle between the machining tool 340 and the machining plane of the workpiece 400.

[0055] The free end of the tool rotation spindle 310 is connected to a turntable 360 ​​, and the tool radial movement assembly 320 , the tool angle adjustment assembly 330 and the processing tool 340 are connected to the turntable 360 ​​.

[0056] Furthermore, the included angle between the machining tool 340 and the position to be machined is 90°. Specifically, this embodiment ensures that the center line of the machining tool 340 always coincides with the surface normal of the position to be machined in the workpiece 400, thereby improving machining accuracy.

[0057] Furthermore, the tool angle adjustment assembly 330 includes a rotary drive unit 331 and a tool holder 332. The rotary drive unit 331 is connected to the sliding portion 323 (described below) of the tool radial movement assembly 320 via a fixed connection seat 333. The output shaft of the rotary drive unit 331 is connected to the tool holder 332, on which the machining tool 340 is mounted. The rotary drive unit 331 is configured to rotate the machining tool 340 to change the angle between the machining tool 340 and the surface being machined. In some embodiments, the rotary drive unit 331 utilizes an ultra-precision rotary piezoelectric motor. In some embodiments, the machining tool 340 is made of natural single-point diamond crystal.

[0058] Furthermore, the tool drive module 300 includes a dynamic balancing mechanism 370 movably connected to the tool spindle 310. The dynamic balancing mechanism 370 and the tool radial motion assembly 320 move in opposite directions, at the same frequency but with different strides. Specifically, the movement of the dynamic balancing mechanism 370 in this embodiment balances the centrifugal force acting on the tool spindle 310, generated by the movement of the sliding portion 323 and the tool angle adjustment assembly 330 connected thereto, thereby further ensuring machining accuracy.

[0059] Furthermore, the dynamic balancing mechanism 370 includes a balancing drive unit 371, a balancing slider 372, and a balancing guide rail 373. The balancing drive unit 371 is connected to the turntable 360 ​​on the tool rotation spindle 310. Specifically, the balancing drive unit 371 is connected to the tool rotation spindle 310 via a guide rail base 324. The output end of the balancing drive unit 371 is connected to the balancing slider 372; the balancing slider 372 is a frame structure, and the tool radial movement assembly 320 is located in the balancing slider 372; the balancing guide rail 373 is connected to the turntable 360 ​​of the tool rotation spindle 310, and the balancing guide rail 373 is slidably connected to the balancing slider 372. In some embodiments, the balancing drive unit 371 can be an ultra-precision piezoelectric motor, an ultra-precision compact servo cylinder, or the like. The balancing guide rail 373 can be a cross roller guide or a linear guide.

[0060] Specifically, the dynamic balancing mechanism 370 of this embodiment utilizes a frame structure, allowing it to be positioned around the tool radial motion assembly 320. This results in a more compact structural design, and the symmetrical arrangement facilitates the overall dynamic balance of the tool spindle 310. This ensures that the center of gravity of the entire tool drive module 300 is on the axis of the tool spindle 310, thereby maintaining the dynamic balance of the tool spindle 310 during high-speed rotation. This also prevents the movement of the machining tool 340 from affecting the dynamic balance of the tool spindle 310's rotational motion, ensuring that the selected high-precision air-bearing spindle (i.e., the tool spindle 310) can achieve its intended level of precision, thereby guaranteeing machining accuracy.

[0061] Furthermore, the tool radial movement assembly 320 includes a radial drive unit 321, a radial movement guide rail 322, and a sliding unit 323. The radial drive unit 321 and the radial movement guide rail 322 are respectively connected to the tool fine-tuning module 380 on the tool rotation spindle 310; the tool radial movement assembly 320 is connected to the tool fine-tuning module 380. The output end of the radial drive unit 321 is connected to the sliding unit 323, which is slidably connected to the radial movement guide rail 322. The radial drive unit 321 is configured to drive the sliding unit 323 to slide back and forth in a straight line along the radial direction of the tool rotation spindle 310. In some embodiments, the tool radial movement assembly 320 also includes a guide rail base 324 connected to the tool fine-tuning module 380. The radial movement guide rail 322 and a balancing guide rail 373 are disposed on either side of the guide rail base 324. The balancing guide rail 373 is disposed near the turntable 360. Specifically, this embodiment has a simple structure and can achieve high-precision variable diameter rotation of the machining tool 340.

[0062] Furthermore, the present application also includes a tool fine-tuning module 380, which is connected between the tool rotation spindle 310 and the tool radial movement assembly 320; the tool fine-tuning module 380 includes a flexible base 381 and two adjustment components; both ends of the flexible base 381 are connected to the tool rotation spindle 310, and the two adjustment components are symmetrically connected on both sides of the length direction of the flexible base 381; of the two adjustment components, one clamps the flexible base 381 and the other applies force to the flexible base 381 to deform the flexible base 381 in the M direction.

[0063] When adjustment is required, one of the adjustment components (referred to as the first adjustment component) is first loosened to move it away from the flexible base 381. The other adjustment component (referred to as the second adjustment component) is then adjusted to apply force to the flexible base 381 until the target position is reached. The first adjustment component is then adjusted again to clamp the flexible base 381. Specifically, this embodiment allows for fine adjustments to the initial position of the machining tool 340.

[0064] Furthermore, a beveled wedge surface is provided on the flexible base 381 at a position that mates with the adjustment component; the adjustment component includes an adjustment limit block 382, ​​a beveled wedge block 383, an adjustment screw 384, and a locking nut 385. The adjustment limit block 382 is provided on the outside of the flexible base 381 and is connected to the turntable 360 ​​of the tool rotation spindle 310. The flexible base 381 is connected to the center of the turntable 360. The beveled wedge block 383 is connected to the inside of the adjustment limit block 382 and mates with the beveled wedge surface. The adjustment screw 384 is threadedly connected to the adjustment limit block 382 and the beveled wedge block 383 in sequence. In some possible embodiments, the adjustment screw 384 is threadedly connected to the adjustment limit block 382 and the beveled wedge block 383 via two sections of threads with different pitches. The locking nut 385 is connected to the turntable 360 ​​and is located at one end of the adjustment limit block 382 , and the locking nut 385 is connected to the adjustment screw 384 to lock the adjustment screw 384 .

[0065] Specifically, in this embodiment, by adjusting the adjustment screw 384, the flexible base 381 is squeezed by the inclined wedge block 383, which can produce nanometer-level deformation displacement in its width direction (i.e., perpendicular to the extension direction of the guide rail, for example, perpendicular to the extension direction of the radial movement guide rail 322), thereby driving the tool radial movement assembly 320, the tool angle adjustment assembly 330 and the processing tool 340 fixed on the flexible base 381 to make fine adjustments in the direction perpendicular to the guide rail, thereby realizing the centering function of the processing tool 340. In addition, the present application first connects the tool fine-tuning module 380 to the turntable 360, and then connects the tool radial movement assembly 320, the tool angle adjustment assembly 330 and the processing tool 340 to the tool fine-tuning module 380. This not only realizes the centering function of the tool radial movement assembly 320 and the tool angle adjustment assembly 330 in the direction perpendicular to the guide rail, but also greatly reduces the weight of the sliding part 323. In this way, the centrifugal force acting on the sliding part 323 can be greatly reduced, and the power and performance requirements of the driving part (for example, the motor) are reduced, while improving the motion performance.

[0066] Furthermore, the tool radial motion assembly 320 also includes a grating ruler 325. The scale body of the grating ruler 325 is connected to one side of the sliding portion 323, and the reading head of the grating ruler 325 is connected to the turntable 360 ​​of the tool rotation spindle 310 via a bracket. Specifically, this embodiment uses the grating ruler 325 to monitor the radial distance of the sliding portion 323 in real time. In some embodiments, the grating ruler 325 is an ultra-precision picometer-level grating ruler 325. Driven by a closed-loop controlled piezoelectric ceramic motor, it can achieve ultra-high-precision motion with a minimum resolution of picometers and a measured nanometer-level step size.

[0067] In some embodiments, the tool radial movement assembly 320 further includes a slip ring assembly 326 , which is coaxially connected to the tool rotation spindle 310 ; the slip ring assembly 326 is used for transmitting electrical signals between the drive unit and the grating scale 325 .

[0068] Obviously, the above embodiments are merely examples for clarity of explanation and are not intended to limit the implementation methods. Those skilled in the art will appreciate that other variations or modifications can be made based on the above description. It is not necessary and impossible to enumerate all implementation methods here. Obvious variations or modifications arising therefrom remain within the scope of protection of the present invention.

Claims

1. An ultra-precision processing equipment for array optical elements and molds, characterized by: include: Machine tool base; A workpiece fixing module connected to the machine tool base; The workpiece fixing module is configured to drive the workpiece to move along the X-axis and the Y-axis and to drive the workpiece to rotate, so as to switch different units of the workpiece array of the workpiece; The tool drive module includes a tool rotation spindle, a tool radial movement component, a tool angle adjustment component and a processing tool connected in sequence; the tool rotation spindle is movably connected to the machine tool base; the tool rotation spindle rotates in a horizontal plane and moves along the Z axis, and the X axis, the Y axis and the Z axis constitute a three-dimensional coordinate system; the tool rotation spindle, the tool radial movement component and the tool angle adjustment component are respectively configured to drive the processing tool to rotate along the axis of the tool rotation spindle, move radially along the plane of rotation, and adjust the angle of the processing tool, so as to realize the processing tool to perform a rotational motion with a variable diameter while changing the angle between the processing tool and the plane to be processed; the tool drive module also includes a dynamic balancing mechanism connected to the tool rotation spindle, and the tool radial movement component is located in the dynamic balancing mechanism; A tool fine-tuning module, which is connected between the tool rotating spindle and the tool radial movement assembly; the tool fine-tuning module includes a flexible base and two adjustment components; both ends of the flexible base are connected to the tool rotating spindle, and the two adjustment components are symmetrically connected on both sides of the length direction of the flexible base; one of the two adjustment components clamps the flexible base and the other applies force to the flexible base to deform the flexible base in the M direction; an inclined wedge surface is provided at the position on the flexible base that cooperates with the adjustment component; the adjustment component includes an adjustment limit block, an inclined wedge block, an adjustment screw and a locking nut; the adjustment limit block is provided on the outside of the flexible base and is connected to the tool rotating spindle; the inclined wedge block is connected to the inside of the adjustment limit block, and the inclined wedge block cooperates with the inclined wedge surface; the adjustment screw is threadedly connected to the adjustment limit block and the inclined wedge block in turn.

2. The ultra-precision processing equipment for arrayed optical elements and molds according to claim 1, characterized in that: The included angle between the machining tool and the position to be machined is 90°.

3. The ultra-precision processing equipment for arrayed optical elements and molds according to claim 1, characterized in that: The tool angle adjustment assembly includes a rotary drive unit and a tool seat; the rotary drive unit is connected to the tool radial movement assembly, the output shaft of the rotary drive unit is connected to the tool seat, and the machining tool is installed on the tool seat; the rotary drive unit is configured to drive the machining tool to rotate so as to change the angle between the machining tool and the plane to be machined.

4. The ultra-precision processing equipment for arrayed optical elements and molds according to claim 1, characterized in that: The tool driving module further comprises a dynamic balancing mechanism movably connected to the tool rotation spindle; the dynamic balancing mechanism and the tool radial movement assembly move in opposite directions.

5. The ultra-precision processing equipment for arrayed optical elements and molds according to claim 4, characterized in that: The dynamic balancing mechanism includes a balancing drive unit, a balancing slider and a balancing guide rail; the balancing drive unit is connected to the tool rotating spindle, and the output end of the balancing drive unit is connected to the balancing slider; the balancing slider is a frame structure, and the tool radial movement assembly is located in the balancing slider; the balancing guide rail is connected to the tool rotating spindle, and the balancing guide rail is slidably connected to the balancing slider.

6. The ultra-precision processing equipment for arrayed optical elements and molds according to claim 1, characterized in that: The tool radial movement assembly includes a radial drive part, a radial movement guide rail and a sliding part; the radial drive part and the radial movement guide rail are respectively connected to the tool rotation spindle; the output end of the radial drive part is connected to the sliding part, and the sliding part is slidably connected to the radial movement guide rail; the radial drive part is configured to drive the sliding part to perform linear reciprocating sliding along the radial direction of the tool rotation spindle.

7. The ultra-precision processing equipment for arrayed optical elements and molds according to claim 6, characterized in that: The tool radial movement assembly further includes a grating ruler, a ruler body of the grating ruler is connected to one side of the sliding portion, and a reading head of the grating ruler is connected to the tool rotation spindle.

8. An ultra-precision processing method for arrayed optical elements and molds, characterized by: The arrayed optical element and mold are processed using the ultra-precision processing equipment according to any one of claims 1 to 7, and the processing steps are as follows: Initial tool setting, adjustment to make the axis of rotation of the workpiece coincide with the axis of rotation of the machining tool; Perform ultra-precision turning on the surface of the workpiece; Initial position adjustment: adjusting the tool radial movement assembly and the tool angle adjustment assembly so that the center of the machining tool coincides with the axis of the tool rotation spindle; adjusting so that the center of the array unit on the workpiece coincides with the rotation axis of the machining tool; Processing, the tool rotation spindle, the tool radial movement component, the tool angle adjustment component and the linkage moving along the Z axis are used to complete the processing of a single large-axis optical array unit.

Images