Side wall hanging hole type HTCC tube shell product and preparation method thereof

Abstract

The invention discloses a side wall hanging hole type HTCC tube shell product and a preparation method thereof. The method comprises the following steps: printing front and back conductors of first to sixth layers of green tapes, front and back conductors of a seventh layer of green tapes and printing cutting lines by using a screen printing machine; the seventh layer of green tape is subjected to side wall hanging hole hanging and laser forming of cutting line correction cavities, every two cutting line correction cavities form a group and are arranged along the printing cutting line, and the center line between the two cavities and the center of the side wall hanging hole hanging are located on the same straight line; laser forming is carried out on the side wall hanging holes from the first layer to the sixth layer and the chamfered cavities; hanging hole side wall printing, center cavity processing and lamination lamination are carried out on the green tape, thermal cutting is carried out on the laminated green body to obtain a unit product, and the cutting position is a center line between cavity bodies of two cutting line correction cavities in one group; and sintering the cut unit products. The problem that the center of the hanging hole deviates after hot cutting due to shrinkage of raw ceramic in production can be avoided.

Description

Technical Field

[0001] The present invention belongs to the technical field of tube shell product preparation, and in particular relates to a HTCC tube shell product with side wall hanging holes and a preparation method thereof. Background Art

[0002] High-temperature co-fired ceramic (HTCC) boasts high mechanical strength, high thermal conductivity, chemical stability, and high wiring density. It is primarily used in ceramic tube packages and ceramic package bases, supporting chip mounting, providing physical protection, and enabling interconnection with electronic devices. After encapsulation, HTCC tube packages are typically soldered to multilayer boards through metallized hanging holes in the sidewalls. Therefore, the quality of the sidewall metallized holes directly determines the reliability of the subsequent tube package assembly. However, existing HTCC tube package production methods suffer from the problem of post-hot cutting hanging hole center deviation due to shrinkage of the raw ceramic during production. Summary of the Invention

[0003] The purpose of the present invention is to address the problems existing in the prior art and provide a HTCC tube shell product with side wall hanging holes and a preparation method thereof, which can avoid the problem of center deviation of the hanging holes after cutting caused by green porcelain shrinkage during production, thereby improving the low product qualification rate.

[0004] To achieve the above objectives, one aspect of the present invention provides a method for preparing a HTCC tube shell product with a side wall hanging hole, comprising: Step S1, providing first to seventh layers of HTCC green tape, with a plurality of green ceramic sheets for forming unit products arranged on each layer of green tape, and performing micro-hole processing on each layer of green tape using a mechanical punching machine, wherein the micro-holes include electrical through-holes; Step S2, using a screen printer to fill the electrical through-holes with metal slurry; Step S3, using a screen printer to print the front and back conductors of the first to sixth layers of green porcelain tape, the front and back conductors of the seventh layer of green porcelain tape, and printed cutting lines, wherein the printed cutting lines are located on the back of the seventh layer of green porcelain tape; Step S4: Using a laser device to form side wall hanging holes, cutting line correction cavities, and chamfered cavities on the seventh layer of raw porcelain tape. The cutting line correction cavities are arranged in groups of two along the printed cutting line, with the same length as the printed cutting line and positioned farther from the product than the printed cutting line. The centerline between the two cutting line correction cavities is aligned with the center of the side wall hanging hole. Step S5, using a laser device to perform laser forming on the side wall hanging holes and chamfered cavities of the first to sixth layers; Step S6, using a screen printer to print the hanging holes on the side walls of the third to seventh layers of raw porcelain tape; Step S7, using a laser device to process the central cavities of the first to fourth layers of green porcelain tapes; Step S8, first laminating and stacking the fifth to seventh layers of green porcelain tapes, and then laminating the first to fourth layers of green porcelain tapes layer by layer onto the laminated green body for secondary lamination; Step S9, using a vacuum sealing machine to seal and laminating the sealed blank; Step S10, thermally cutting the laminated blank to obtain a unit product, wherein the cutting position is a group of two cutting lines to correct the center line between the cavities; Step S11 : placing the cut unit products in a HTCC sintering furnace for sintering.

[0005] Another aspect of the present invention provides a method for preparing a HTCC tube shell product with a side wall hanging hole, comprising: Step S21 , providing first to seventh layers of HTCC green tape, with a plurality of green ceramic sheets for forming unit products arranged on each layer of green tape, and performing micro-hole processing on each layer of green tape using a mechanical punching machine, wherein the micro-holes include electrical vias; Step S22, using a screen printer to fill the electrical through-holes with metal slurry; Step S23, using a screen printer to print the front and back conductors of the first to sixth layers of green porcelain tapes; Step S24: Using a laser device, laser forming the side wall hanging holes, cutting line correction cavities, and chamfered cavities on the seventh layer of raw porcelain tape. The cutting line correction cavities are arranged in groups of two along the printed cutting line, with the same length as the printed cutting line and positioned farther from the product than the printed cutting line. The centerline between the two cutting line correction cavities is aligned with the center of the side wall hanging holes. Step S25, using a laser device to perform laser forming on the side wall hanging holes and chamfered cavities of the first to sixth layers; Step S26, using a screen printer to first print the sidewalls of the hanging holes on the third to seventh layers of the green porcelain tape, and then printing the front and back conductors and printed cutting lines on the seventh layer of the green porcelain tape; Step S27, using a laser device to process the central cavities of the first to fourth layers of green porcelain tapes; Step S28, first laminating and stacking the fifth to seventh layers of green porcelain tapes, and then laminating the first to fourth layers of green porcelain tapes layer by layer onto the laminated green body for secondary lamination; Step S29, using a vacuum sealing machine to seal and laminating the sealed blank; Step S30, thermally cutting the laminated blank to obtain a unit product, wherein the cutting positions are a group of two cutting lines to correct the center line between the cavities; Step S31 : placing the cut unit products in a HTCC sintering furnace for sintering.

[0006] Another aspect of the present invention provides a HTCC tube shell product with side wall hanging holes, which is prepared by the above method.

[0007] The HTCC tube package product with side wall hanging holes and the preparation method thereof according to the above aspects of the present invention can avoid the problem of center deviation of the hanging holes after hot cutting caused by green porcelain shrinkage during production, thereby improving the product qualification rate. BRIEF DESCRIPTION OF THE DRAWINGS

[0008] In order to more clearly illustrate the technical solutions of the present invention, the following briefly introduces the drawings used in the description of the embodiments of the present invention. Obviously, the drawings described below are only some embodiments of the present invention. Those skilled in the art can also derive other drawings based on these drawings without inventive efforts. Figure 1 A top view of a HTCC tube package product with side wall hanging holes according to an embodiment of the present invention; Figure 2 for Figure 1 Cross-section of the middle AA; Figure 3 A schematic diagram of the layout of a tube and shell product according to an embodiment of the present invention; Figure 4 A schematic diagram of a printed cutting line position correction according to an embodiment of the present invention; Figure 5 FIG. 1 is a simplified flow chart of a method for preparing a HTCC tube package product with side wall hanging holes according to an embodiment of the present invention. DETAILED DESCRIPTION

[0009] To make the objectives, technical solutions, and advantages of the present invention more clear, the technical solutions of the present invention will be clearly and completely described below with reference to the accompanying drawings. Obviously, the embodiments described are only some embodiments of the present invention, not all embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without making creative efforts shall fall within the scope of protection of the present invention.

[0010] One embodiment of the present invention provides a method for preparing a side wall hanging hole type HTCC tube shell product, wherein the raw materials are HTCC green ceramic sheets and matching conductor paste, such as Figure 1As shown, the shell and tube product manufactured using the method of the embodiment of the present invention has side wall hanging hole structures and chamfer structures on all sides, and the hanging hole size is greater than 150μm. The method of the embodiment of the present invention adds a cutting line correction cavity during the product manufacturing process, and realizes automatic alignment cutting according to the corrected cutting line, so that the product hanging hole can be divided into two from the center position. The method of manufacturing the HTCC shell and tube product with side wall hanging holes of the embodiment of the present invention includes steps S1 to S11, and the following reference is made to Figures 2 to 5 Provide detailed descriptions of each step.

[0011] Step S1, micro-hole processing: Provide the first to seventh layers of HTCC green tape 1, and use a mechanical punching machine to process micro-holes such as electrical vias, hanging hole forming alignment holes, printing alignment holes, and cavity forming alignment holes on each layer of green tape 1. Among them, the product layout adopts an all-in-one method, with multiple green tiles arranged on each layer of green tape 1. Each green tile will form a unit product. Each green tile is 196um thick and 8 inches in size (203mm*203mm). For example, the electrical vias Figure 2 Interconnect metal vias 6 are shown.

[0012] Step S2, micropore filling: Use a screen printer to fill the electrical through-holes with metal slurries such as W and Mo. The drying temperature after filling is 55° C. and the temperature is kept for 15 minutes. After drying, the filled holes are leveled.

[0013] Step S3, conductor printing: Print the front and back conductors, solder resist patterns of the first to sixth layers of green porcelain tape and the front conductor of the seventh layer of green porcelain tape using a screen printer. The conductors and solder resist are dried at 55°C for 20 minutes. Figure 2 The metal conductor pattern 5 is shown.

[0014] The same process is followed for printing the conductor and printed cutting line 8 on the back side of the seventh layer of green tape. In this embodiment, the printed cutting line 8 is located on the back side of the seventh layer of green tape and is printed simultaneously with the back side conductor pattern. During layout, the width of the printed cutting line 8 can be designed to be 0.8-1.5 mm and the length to be 4-6 mm. During layout, the center of the cutting line should be aligned with the edge of the product pattern.

[0015] In step S4, an LPKF UV laser machine is used to machine the side wall hanging holes 3, the cutting line correction cavity 9, and the chamfered cavity 7 on the seventh layer of green tape. These three processes are set in the same laser processing program. After the green tape is aligned and recognized, all three are laser-formed simultaneously. The laser parameters are: power of 4.5-5.5W, pulse frequency of 45-60Hz, cutting speed of 500-700mm / s, inward machining, and path width of 15-25μm.

[0016] like Figure 4 As shown, the cutting line correction cavity 9 is designed in groups of two along the cutting line. Each printed cutting line requires a pair of correction cavities. The length of a single cutting line correction cavity 9 is the same as the length of the printed cutting line 8. The width of a single correction cavity is 0.3-0.4mm. The two cavities should be designed to be the same size. The position of the cutting line correction cavity 9 is farther away from the product than the printed cutting line 8. The side of the cutting line correction cavity 9 close to the product is, for example, 1mm outward from the position of the printed cutting line 8 close to the product. The center distance between each pair of cutting line correction cavities 9 is 350-550um, and a gap is formed between the two cavities. Figure 3 In the corrected printed cutting line 10 shown, the center line between the two cavities and the center of the hanging hole on the side wall of the tube shell are in a straight line.

[0017] Step S5, laser forming the side wall hanging holes and chamfered cavities of the first to sixth layers, with the laser parameters and processing method being the same as those of step S4.

[0018] Step S6, printing the side walls of the hanging holes: Use a screen printer to print the hanging holes on the third to seventh layers of the raw porcelain tape, and then remove the slurry outside the side walls of the hanging holes. The thickness of the stencil used in the process is 50um. The raw porcelain tape is fixed on the printing table by vacuum adsorption for 30 seconds. The drying temperature after printing is 55℃ for 10 minutes. In this embodiment, the metallized part is not through from the bottom to the top layer, but is as follows. Figure 2 As shown, two layers of non-sidewall metallized hanging holes 2 are designed on the first and second layers, and sidewall metallized hanging holes 3 are designed on the third to seventh layers. Step S7, cavity forming: Use LPKF laser equipment to process the central cavity of the first to fourth layers of green porcelain tape, with processing parameters of power 4.5-5.5W, pulse frequency 45-60Hz, laser cutting speed 500-700mm / s, processing mode selected as inward processing, and path width set to 15-25um. In this embodiment, Figure 2 As shown, the first to fourth layers of green porcelain tape are designed with a central cavity 4, while the fifth to seventh layers have no cavity.

[0019] Step S8, Lamination: First, the fifth to seventh layers of green tape are laminated using two aluminum laminating plates. The isostatic lamination process parameters are set at 60°C, 700 psi, preheating for 4 minutes, and holding the press for 8 minutes. Next, the first to fourth layers of green tape are laminated layer by layer onto the laminated green body for a secondary lamination process at 60°C and 1400 psi.

[0020] In step S9, after lamination, a film, steel sheet, and cavity rubber mold with the same cavity are placed on the surface of the first layer of green tape. An aluminum lamination plate is placed on the back of the seventh layer of green tape to support the tape. Finally, a vacuum sealer is used to double-seal the tape. The sealed green body is then subjected to static pressure lamination at 60°C and 1400 psi for 8 minutes. The pressurization is then maintained for 10 minutes. After lamination, the rubber mold is removed.

[0021] In step S10, the laminated body in step S9 is thermally cut. The back of the seventh layer is placed upward during cutting. The cutting temperature is 60°C. The cutting position is set so that the corrected cutting line is away from the center line of one side of the product (the center line between the cavities of a group of two corrected cutting lines). The reserved cutting depth is 100-200 μm smaller than the cushion film under the body.

[0022] In step S11, the unit products cut in step S10 are placed one by one on a setter plate, and then placed in a HTCC sintering furnace for debinding and sintering at a sintering temperature of 1550°C.

[0023] In the above embodiment, if Figure 5 As shown in the scheme 2 on the right, the seventh layer of green porcelain tape back conductor printing (step S3) is before the side wall hanging hole and cutting line correction cavity processing (step S4), which can also be done as follows Figure 5 Scheme 1 on the left follows this.

[0024] In another embodiment, the seventh layer of conductors on the back of the green porcelain tape is printed after the side wall hanging holes and the cutting line correction cavity are processed. That is, the method of this embodiment includes the following steps S21 to S31, wherein steps S21, S22, and S27 to S31 are the same as steps S1, S2, and S7 to S11 of the previous embodiment, and steps S23 to S26 are different from steps S3 to S6 of the previous embodiment: Step S21 , providing first to seventh layers of HTCC green tape, with a plurality of green ceramic sheets for forming unit products arranged on each layer of green tape, and performing micro-hole processing on each layer of green tape using a mechanical punching machine, wherein the micro-holes include electrical vias; Step S22, using a screen printer to fill the electrical through-holes with metal slurry; Step S23, using a screen printer to print the front and back conductors of the first to sixth layers of green porcelain tapes; Step S24: Using a laser device, laser forming the side wall hanging holes, cutting line correction cavities, and chamfered cavities on the seventh layer of raw porcelain tape. The cutting line correction cavities are arranged in groups of two along the printed cutting line, with the same length as the printed cutting line and positioned farther from the product than the printed cutting line. The centerline between the two cutting line correction cavities is aligned with the center of the side wall hanging holes. Step S25, using a laser device to perform laser forming on the side wall hanging holes and chamfered cavities of the first to sixth layers; Step S26: Use a screen printer to first print the hanging hole sidewalls of the third to seventh layers of green porcelain tape. Then, print the conductors and printed cutting lines on the front and back of the seventh layer of green porcelain tape. During printing, place a 50 μm thick transparent blotting paper under the green porcelain tape. After the conductors are printed, extend the vacuum adsorption time of the printing table for 15 seconds. After the green porcelain tape is removed from the table, replace the transparent blotting paper to remove the conductor slurry in the cutting line correction cavity. Then dry the green porcelain tape at a temperature of 55°C for 20 minutes to complete the position correction of the cutting line. Step S27, using a laser device to process the central cavities of the first to fourth layers of green porcelain tapes; Step S28, first laminating and stacking the fifth to seventh layers of green porcelain tapes, and then laminating the first to fourth layers of green porcelain tapes layer by layer onto the laminated green body for secondary lamination; Step S29, using a vacuum sealing machine to seal and laminating the sealed blank; Step S30, thermally cutting the laminated blank to obtain a unit product, wherein the cutting positions are a group of two cutting lines to correct the center line between the cavities; Step S31 : placing the cut unit products in a HTCC sintering furnace for sintering.

[0025] In summary, the method for preparing a HTCC tube package with a sidewall hanging hole according to the above-mentioned embodiment of the present invention adds a cutting line correction cavity during product preparation, and simultaneously adjusts the printing and lamination of the cutting line of the product. Ultimately, the correction cavity is used to correct the center of the printed cutting line and the center of the hanging hole to be aligned on the same straight line. After the cutting equipment recognizes the corrected cutting line, the tube package can be accurately separated at the center of the hanging hole, thereby greatly improving the production qualification rate of the tube package with a sidewall hanging hole, thereby improving the tube package quality and meeting the high assembly consistency requirements of current HTCC tube package products at the component level and in high-density integration. The following beneficial effects are achieved: a) No new steps or equipment are added to the overall process flow, while cutting step deviation is reduced, equipment recognition time is shortened, and efficiency is improved; b) the quality of the sidewall hanging holes of the tube package product and the overall product qualification rate are significantly improved, thereby ensuring the assembly efficiency and quality of the tube package product in subsequent automated assembly.

[0026] The above description is merely illustrative of certain exemplary embodiments of the present invention. It goes without saying that those skilled in the art will be able to modify the described embodiments in various ways without departing from the spirit and scope of the present invention. Therefore, the above drawings and description are illustrative in nature and should not be construed as limiting the scope of protection of the claims.

Claims

1. A method for preparing a HTCC tube shell product with side wall hanging holes, characterized in that: include: Step S1, providing first to seventh layers of HTCC green tape, with a plurality of green ceramic sheets for forming unit products arranged on each layer of green tape, and performing micro-hole processing on each layer of green tape using a mechanical punching machine, wherein the micro-holes include electrical through-holes; Step S2, using a screen printer to fill the electrical through-holes with metal slurry; Step S3, using a screen printer to print the front and back conductors of the first to sixth layers of green porcelain tape, the front and back conductors of the seventh layer of green porcelain tape, and printed cutting lines, wherein the printed cutting lines are located on the back of the seventh layer of green porcelain tape; Step S4: Using a laser device to form side wall hanging holes, cutting line correction cavities, and chamfered cavities on the seventh layer of raw porcelain tape. The cutting line correction cavities are arranged in groups of two along the printed cutting line, with the same length as the printed cutting line and positioned farther from the product than the printed cutting line. The centerline between the two cutting line correction cavities is aligned with the center of the side wall hanging hole. Step S5, using a laser device to perform laser forming on the side wall hanging holes and chamfered cavities of the first to sixth layers; Step S6, using a screen printer to print the hanging holes on the side walls of the third to seventh layers of raw porcelain tape; Step S7, using a laser device to process the central cavities of the first to fourth layers of green porcelain tapes; Step S8, first laminating and stacking the fifth to seventh layers of green porcelain tapes, and then laminating the first to fourth layers of green porcelain tapes layer by layer onto the laminated green body for secondary lamination; Step S9, using a vacuum sealing machine to seal and laminating the sealed blank; Step S10, thermally cutting the laminated blank to obtain a unit product, wherein the cutting position is a group of two cutting lines to correct the center line between the cavities; Step S11 : placing the cut unit products in a HTCC sintering furnace for sintering.

2. A method for preparing a HTCC tube shell product with side wall hanging holes, characterized in that: include: Step S21 , providing first to seventh layers of HTCC green tape, with a plurality of green ceramic sheets for forming unit products arranged on each layer of green tape, and performing micro-hole processing on each layer of green tape using a mechanical punching machine, wherein the micro-holes include electrical vias; Step S22, using a screen printer to fill the electrical through-holes with metal slurry; Step S23, using a screen printer to print the front and back conductors of the first to sixth layers of green porcelain tapes; Step S24: Using a laser device, laser forming the side wall hanging holes, cutting line correction cavities, and chamfered cavities on the seventh layer of raw porcelain tape. The cutting line correction cavities are arranged in groups of two along the printed cutting line, with the same length as the printed cutting line and positioned farther from the product than the printed cutting line. The centerline between the two cutting line correction cavities is aligned with the center of the side wall hanging holes. Step S25, using a laser device to perform laser forming on the side wall hanging holes and chamfered cavities of the first to sixth layers; Step S26, using a screen printer to first print the sidewalls of the hanging holes on the third to seventh layers of the green porcelain tape, and then printing the front and back conductors and printed cutting lines on the seventh layer of the green porcelain tape; Step S27, using a laser device to process the central cavities of the first to fourth layers of green porcelain tapes; Step S28, first laminating and stacking the fifth to seventh layers of green porcelain tapes, and then laminating the first to fourth layers of green porcelain tapes layer by layer onto the laminated green body for secondary lamination; Step S29, using a vacuum sealing machine to seal and laminating the sealed blank; Step S30, thermally cutting the laminated blank to obtain a unit product, wherein the cutting positions are a group of two cutting lines to correct the center line between the cavities; Step S31 : placing the cut unit products in a HTCC sintering furnace for sintering.

3. The method according to claim 1 or 2, wherein: The width of the printed cutting line is 0.8-1.5 mm, the length is 4-6 mm, the center spacing of the cavities of each group of cutting line correction cavities is 350-550 um, and the width of a single cutting line correction cavity is 0.3-0.4 mm.

4. The method according to claim 1 or 2, wherein: The micro holes also include hanging hole forming alignment holes, printed cutting line alignment holes and cavity forming alignment holes.

5. The method according to claim 1 or 2, wherein: The laser parameters during laser forming are power 4.5-5.5W, pulse frequency 45-60Hz, laser cutting speed 500-700mm / s, inward processing, and path width 15-25um.

6. The method according to claim 2, wherein In step S26, when printing the front and back conductors of the seventh layer of green porcelain tape, blotting paper is placed under the seventh layer of green porcelain tape. After printing, the blotting paper is replaced to remove the conductor paste in the cutting line correction cavity.

7. The method according to claim 1 or 2, characterized in that In the processing of the cutting line correction cavity, side wall hanging hole and chamfered cavity of the seventh layer of raw porcelain tape, the three are set in the same laser processing program. After the raw porcelain tape is aligned and identified, the laser forming of the three is completed at one time.

8. The method according to claim 1 or 2, characterized in that, during the lamination process, the temperature of the first lamination is 60°C and the pressure is 700 psi, and the temperature of the second lamination is 60°C and the pressure is 1400 psi.

9. The method according to claim 1 or 2, characterized in that, when preparing the thermal cutting program of the product, the center line of the side of the corrected cutting line away from the product is used as the cutting position of the product, and the cutting temperature is 60°C.

10. A HTCC tube shell product with side wall hanging holes, characterized in that: It is prepared by the method according to any one of claims 1 to 9.

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