Automatic exhaust pressure adjusting device

Abstract

The invention relates to the technical field of automatic exhaust pressure regulation of semiconductor equipment, in particular to an automatic exhaust pressure regulation device which is provided with a driving execution module and a pressure regulation valve module, and the pressure regulation valve module comprises a base bottom plate, a blade fixing plate, an iris blade and a blade guide plate. The iris blade is simultaneously connected with the blade fixing plate and the blade guide plate through the rotary sliding chute structure, and the two ends of each chute in the rotary sliding chute structure are open, so that foreign matters can be discharged from the openings along with the action of the iris blade, and the blockage of the blade caused by accumulation of the foreign matters in the chutes is avoided; the operation reliability of the device in an impurity-containing gas environment is improved; by arranging a blade guide plate and blade fixing plate composite constraint structure, rotary motion of a driving execution module is converted into precise radial displacement of iris blades, continuous adjustment of the diameter of an exhaust channel is achieved, the synchronous error of the opening degree of the blades is small, no air flow step sudden change exists in the opening and closing process, and the exhaust flow control precision is ensured.

Description

Technical Field

[0001] The present application relates to the technical field of automatic exhaust pressure regulation of semiconductor equipment, and in particular to an automatic exhaust pressure regulating device. Background Art

[0002] Automatic exhaust pressure regulating devices are widely used in semiconductor manufacturing, chemical production, precision experimental equipment and other fields. Their main function is to achieve stable control of the internal air pressure of the equipment by adjusting the area of the exhaust channel. The precise control of the air pressure directly affects product quality and production safety.

[0003] Existing pressure regulating devices often use traditional structures such as butterfly valves and ball valves, which change the gas flow area by rotating or sliding the valve disc. However, as industrial production continues to increase its requirements for air pressure control accuracy, equipment stability, and environmental adaptability, the limitations of traditional devices in complex working conditions are becoming increasingly apparent.

[0004] At present, the common automatic exhaust pressure regulating devices on the market have shortcomings: First, traditional butterfly valves, ball valves and other structures need to overcome large gas resistance and friction torque during the adjustment process, resulting in high energy consumption and large size of the drive motor, and key components such as the rotating shaft are prone to wear and breakage due to long-term stress, resulting in a high equipment failure rate. Second, when the exhaust contains impurities such as dust and crystalline particles, foreign matter can easily accumulate, causing the valve disc to jam, seriously affecting the timeliness and accuracy of the adjustment, especially in impurity-containing gas environments such as semiconductor exhaust treatment and chemical catalytic reactions. The equipment maintenance cost is high. Third, it is impossible to achieve continuous and precise control of the exhaust channel diameter, and step-like fluctuations often occur during the air pressure regulation process. These problems seriously restrict the application effect and development prospects of existing pressure regulating devices. Summary of the Invention

[0005] To solve the above problems, the present application provides an automatic exhaust pressure regulating device, which is provided with a drive execution module and a pressure regulating valve module. The pressure regulating valve module includes: a base bottom plate, a blade fixing plate arranged on the base bottom plate, a plurality of iris blades arranged in a ring, and a rotatable blade guide plate. The iris blades are simultaneously connected to the blade fixing plate and the blade guide plate through a rotating sliding groove structure. The drive execution module drives the blade guide plate to rotate to control the opening and closing of the iris blades. Both ends of all the grooves in the rotating sliding groove structure are open.

[0006] In one embodiment, the rotating sliding groove structure includes: a fixed plate groove provided on the surface of the blade fixing plate, the number of which matches the iris blade; a guide plate groove provided on the blade guide plate, the number of which matches the iris blade; a slider provided on each of the iris blades, the slider being slidably engaged in the fixed plate groove; and a guide column provided on each of the iris blades, the guide column being slidably engaged in the guide plate groove.

[0007] In one embodiment, the fixed plate slide groove is a linear slide groove, the outer end of each fixed plate slide groove extends to the outer edge of the blade fixed plate to form an outer edge opening, and the inner end of each fixed plate slide groove is connected to the adjacent fixed plate slide groove.

[0008] In one embodiment, the guide plate slide groove includes two radial linear slide grooves, the inner ends of the two linear slide grooves are connected through an arc-shaped slide groove, and the two ends of the guide plate slide groove extend to the outer edge of the blade guide plate to form an outer edge opening.

[0009] In one embodiment, each of the iris blades is triangular in shape, and adjacent iris blades are interlocked and connected by a sealing groove mechanism, wherein the sealing groove mechanism includes a guide rib arranged on one side of the iris blade and a dovetail groove on the other side; the guide rib can be embedded in the dovetail groove of the adjacent blade to form a continuous sliding sealing interface.

[0010] In one embodiment, a differential pressure sensor is also provided, which is connected to the interior of the device through a detection pipeline to detect the internal pressure of the device; a trumpet-shaped sensing port is provided at the end of the detection pipeline, and the sensing port is located inside the device and the opening direction is consistent with the airflow direction. The differential pressure sensor is electrically connected to the controller, and a filter is provided on the detection pipeline.

[0011] In one embodiment, the controller receives a real-time pressure signal from a pressure differential sensor; when the actual pressure is lower than a set threshold, the controller starts driving the execution module to rotate forward; when the actual pressure is higher than the set threshold, the controller starts driving the execution module to rotate reversely.

[0012] In one embodiment, the blade fixing plate is fixedly mounted on the base bottom plate by a bolt assembly, and the angle between the fixing plate slide groove and the guide plate slide groove can be adjusted by rotating the blade fixing plate, and the angle α between the fixing plate slide groove and the guide plate slide groove is greater than 15°.

[0013] In one embodiment, the drive execution module includes a drive motor, which is connected to a drive gear, and the drive gear is engaged with a gear plate arranged on the blade guide plate. The drive gear is made of a high-strength corrosion-resistant alloy; the outer peripheral surface of the drive gear is covered with a corrosion-resistant self-lubricating layer, and a sealing structure is provided at the connection between the drive gear and the pressure regulating valve module, and the sealing structure includes a fluororubber sealing ring and an isolation ring.

[0014] In one embodiment, a position sensor is further provided. The position sensor is fixed on the mounting surface of the cover plate facing the gear plate, and its sensing end is perpendicular to the rotation plane of the gear plate, for detecting the initial origin position of the gear plate.

[0015] The beneficial effects of this application are:

[0016] The present application discloses an automatic exhaust pressure regulating device, which, by providing a chute structure with openings at both ends, allows foreign matter (such as crystal particles and dust) to be discharged from the openings as the iris blades move, thereby preventing the accumulation of foreign matter in the chute and causing the blades to jam, thereby improving the operating reliability of the device in an environment containing impurities. By providing a composite constraint structure of blade guide plates and blade fixing plates, the rotational motion of the drive execution module is converted into precise radial displacement of the iris blades, and the design of a blade group with uniform annular arrangement is combined with the continuous adjustment of the exhaust channel diameter, the blade opening synchronization error is small, and there is no airflow step mutation during the opening and closing process, thereby ensuring the exhaust flow control accuracy. BRIEF DESCRIPTION OF THE DRAWINGS

[0017] Figure 1 This is a schematic diagram of the structure of this application;

[0018] Figure 2 For this application explosion Figure 1 ;

[0019] Figure 3 For this application explosion Figure 2 ;

[0020] Figure 4 This is a schematic diagram of differential pressure detection;

[0021] Figure 5 It is a cross-sectional view of the drive execution module;

[0022] Figure 6 Schematic diagram of the included angle between the fixed plate chute and the guide plate chute;

[0023] Figure 7 This is a schematic diagram of the driver execution module;

[0024] Explanation of symbols in the figure:

[0025] 1. Drive execution module; 11. Drive motor; 12. Drive gear; 13. Sealing ring; 14. Isolation ring; 15. Gear plate;

[0026] 2. Pressure regulating valve module; 21. Base plate; 22. Cover plate;

[0027] 23. Blade fixing plate; 231. Fixing plate slide;

[0028] 24, iris blade; 241, slider; 242, guide post; 243, dovetail slide;

[0029] 25. Blade guide plate; 251. Guide plate chute;

[0030] 3. Differential pressure sensor; 31. Detection pipeline; 32. Sensing port; 33. Filter;

[0031] 4. Pipeline;

[0032] 5. Position sensor. DETAILED DESCRIPTION

[0033] In order to make the technical problems, technical solutions and beneficial effects to be solved by this application more clearly understood, this application is further described in detail below with reference to the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are only used to explain this application and are not intended to limit this application.

[0034] It should be noted that the terms "first" and "second" are used for descriptive purposes only and should not be understood to indicate or imply relative importance or implicitly specify the number of the technical features indicated. Therefore, a feature defined as "first" or "second" may explicitly or implicitly include one or more of the features. In the description of this application, "plurality" means two or more, unless otherwise specifically defined.

[0035] like Figure 1-3 As shown, an automatic exhaust pressure regulating device is provided with a driving execution module 1 and a pressure regulating valve module 2. The pressure regulating valve module 2 includes: a base bottom plate 21, a blade fixing plate 23 arranged on the base bottom plate 21, a plurality of iris blades 24 arranged in a ring, and a rotatable blade guide plate 25. The iris blades 24 are connected to the blade fixing plate 23 and the blade guide plate 25 at the same time through a rotating sliding groove structure. The driving execution module 1 drives the blade guide plate 25 to rotate to control the opening and closing of the iris blades 24. Both ends of all the grooves in the rotating sliding groove structure are open.

[0036] Specifically, the automatic exhaust pressure regulating device is mounted on the pipe 4 and consists of a drive execution module 1 and a pressure regulating valve module 2. In the pressure regulating valve module 2, a base plate 21 serves as a support component, and a blade fixing plate 23 is fixedly mounted on the upper surface of the base plate 21. Multiple iris blades 24 are evenly arranged in a ring around the center of the base plate 21, with their sides connected to the blade fixing plate 23 and blade guide plate 25, respectively, via rotating sliding groove structures. Both the blade fixing plate 23 and the blade guide plate 25 are provided with grooves, and the sliding posts at each end of the iris blades 24 respectively engage in corresponding grooves, forming a slidable connection. The blade guide plate 25 is rotatably mounted above the iris blades 24, with its edge meshing with the output end of the drive execution module 1. When the device is running, the drive execution module 1 is started and the blade guide plate 25 is driven to rotate by gear meshing or worm transmission. When the blade guide plate 25 rotates, its slide groove will drive the sliding column of the iris blade 24 to move along the slide groove track; the iris blade 24 can perform radial opening and closing movement along the slide groove during the rotation and sliding process, that is, when the blade guide plate 25 rotates clockwise, the iris blade 24 shrinks toward the center, the valve opening shrinks, and the exhaust volume is reduced; when the blade guide plate 25 rotates counterclockwise, the iris blade 24 expands outward, the valve opening expands, and the exhaust volume is increased. The opening area is adjusted in real time through continuous radial movement to achieve dynamic balance of the air pressure inside the device. In the present application, by setting a chute structure with openings at both ends, foreign matter (such as crystal particles and dust) can be discharged from the opening as the iris blade 24 moves, avoiding the accumulation of foreign matter in the chute and causing the blade to jam, thereby improving the operating reliability of the device in an environment containing impurities; by setting a composite constraint structure of the blade guide plate 25 and the blade fixing plate 23, the rotational motion of the drive execution module 1 is converted into the precise radial displacement of the iris blade 24, and the design of the blade group with uniform annular arrangement is combined to achieve continuous adjustment of the exhaust channel diameter, small blade opening synchronization error, and no airflow step mutation during the opening and closing process, thereby ensuring the exhaust flow control accuracy.

[0037] like Figure 2 、 3 As shown, the rotating sliding groove structure includes: a fixed plate groove 231 provided on the surface of the blade fixing plate 23, the number of which matches the iris blades 24; a guide plate groove 251 provided on the blade guide plate 25, the number of which matches the iris blades 24; a slider 241 provided on each iris blade 24, the slider 241 can be slidably engaged in the fixed plate groove 231; a guide column 242 provided on each iris blade 24, the guide column 242 can be slidably engaged in the guide plate groove 251.

[0038] Specifically, by setting a matching number of fixed plate slots 231 and guide plate slots 251, as well as correspondingly engaged sliders 241 and guide columns 242 on the iris blades 24, a composite constraint structure of "double slots-double sliding columns" is formed, so that each iris blade 24 is subjected to uniform force distribution during the opening and closing process, avoiding the jamming phenomenon caused by single-point force, and the error of multi-blade synchronous movement can be controlled within 0.1mm, ensuring the accuracy of the exhaust channel cross-sectional area adjustment, and efficiently converting the rotational motion of the drive execution module 1 into the radial opening and closing of the iris blades 24, thereby realizing continuous and precise adjustment of the exhaust flow.

[0039] like Figure 2 As shown, each iris blade 24 is triangular in shape, and adjacent iris blades 24 are interlocked and connected by a sealing groove mechanism. The sealing groove mechanism includes a guide rib (not shown in the figure) arranged on one side of the iris blade 24 and a dovetail groove 243 on the other side; the guide rib can be embedded in the dovetail groove 243 of the adjacent blade to form a continuous sliding sealing interface.

[0040] Specifically, by embedding the guide ribs into the dovetail groove 243 to form a sliding sealing interface, the interlocking structure enhances the overall rigidity of the blade group, avoids blade shaking caused by air pressure fluctuations, and ensures the accuracy of exhaust channel cross-sectional area adjustment; the cooperation between the dovetail groove 243 and the guide ribs provides additional guiding constraints for the opening and closing of the blades, reducing the lateral force between the slider 241 and the groove; when the blades are closed to the minimum opening, the guide ribs and the dovetail groove 243 fit tightly together to form a seal, which is particularly suitable for scenarios with strict requirements on air tightness, such as chemical reactions.

[0041] like Figure 2 As shown, the fixed plate slot 231 is a linear slot, the outer end of each fixed plate slot 231 extends to the outer edge of the blade fixed plate 23 to form an outer edge opening, and the inner end of each fixed plate slot 231 is connected to the adjacent fixed plate slot 231.

[0042] Specifically, the linear slide groove provides precise radial motion guide for the slider 241 of the iris blade 24, avoiding swing deviation during blade movement, making multiple blades open and close synchronously, and ensuring the accuracy of exhaust channel cross-sectional area adjustment; the unobstructed through-opening structure at both ends allows dust, crystals and other foreign matter to be discharged from the outer edge opening or the inner end connection as the blade moves, avoiding the accumulation of foreign matter in the slide groove and causing the blade to get stuck. The inner ends of the adjacent fixed plate slide grooves 231 are connected to form a through channel, which can reduce the airflow resistance during the movement of the slider 241, further improve the smoothness of the blade movement, and make the exhaust flow adjustment process free of step mutations.

[0043] like Figure 3As shown, the guide plate slot 251 includes two radial linear slots, the inner ends of the two linear slots are connected through an arc slot, and both ends of the guide plate slot 251 extend to the outer edge of the blade guide plate 25 to form an outer edge opening.

[0044] Specifically, the combination of radial linear slides and arc-shaped slides accurately converts the rotational motion of the drive execution module into the radial opening and closing motion of the iris blades. The arc-shaped slide connected to the inner end can avoid jamming when the slider moves to the extreme position, making the blade opening and closing stroke more uniform. The opening design extending to the outer edge at both ends can prevent the blades from getting stuck due to the accumulation of foreign matter in the slide.

[0045] like Figure 4 As shown, a differential pressure sensor 3 is also provided, which is connected to the interior of the device through a detection pipeline 31 to detect the internal pressure of the device; a trumpet-shaped sensing port 32 is provided at the end of the detection pipeline 31, and the sensing port 32 is located inside the device and the opening direction is consistent with the airflow direction. The differential pressure sensor 3 is electrically connected to the controller, and a filter 33 is provided on the detection pipeline 31.

[0046] Specifically, by providing a differential pressure sensor 3 and its matching detection pipeline 31, trumpet-shaped sensing port 32, and filter 33, accurate detection and reliable protection of the internal pressure of the equipment are achieved: the opening direction of the trumpet-shaped sensing port 32 is consistent with the direction of the airflow, which can reduce the detection deviation caused by the impact of the airflow, and ensure the real-time and accuracy of the pressure signal acquisition; the filter 33 on the detection pipeline 31 can effectively filter out impurities such as dust and crystals in the corrosive gas, avoid the failure of the differential pressure sensor 3 due to foreign matter adhesion or corrosion, and extend the service life of the sensor; the electrical connection between the differential pressure sensor 3 and the controller forms a closed-loop control link, which can quickly feed back real-time pressure data to the controller, and then drive the execution module 1 to accurately adjust the opening of the pressure regulating valve module 2 to achieve dynamic balance of the air pressure inside the equipment.

[0047] like Figure 1 As shown, the controller receives the real-time pressure signal of the pressure difference sensor 3; when the actual pressure is lower than the set threshold, the driving execution module 1 is started to rotate forward, and when the actual pressure is higher than the set threshold, the driving execution module 1 is started to rotate reversely.

[0048] Specifically, by configuring the controller to receive the real-time pressure signal from the pressure difference sensor 3 and driving the execution module 1 to rotate forward or reverse according to the comparison result between the actual pressure and the set threshold, dynamic and precise regulation of the air pressure inside the equipment is achieved. The closed-loop control logic can respond to pressure fluctuations in real time, avoiding the lag of traditional open-loop control.

[0049] like Figure 6As shown, the blade fixing plate 23 is fixedly mounted on the base bottom plate 21 by a bolt assembly. By rotating the blade fixing plate 23, the angle between the fixing plate slot 231 and the guide plate slot 251 can be adjusted. The angle α between the fixing plate slot 231 and the guide plate slot 251 is greater than 15°.

[0050] Specifically, the blade fixing plate 23 is fixed to the base bottom plate 21 by a bolt assembly and is designed as a rotatable structure, so that the angle between the fixing plate slide groove and the guide plate slide groove can be adjusted as needed and maintained greater than 15°. The angle between the two slide grooves can be flexibly adjusted according to the actual working conditions of the equipment (such as gas flow, pressure fluctuation range), and the radial motion trajectory of the iris blade 24 is changed to accurately match the exhaust flow control requirements in different scenarios; the design of an angle greater than 15° ensures that the slider 241 and the guide column 242 have sufficient movement stroke in the slide groove, avoiding blade movement jamming or force concentration due to an angle that is too small, and at the same time makes the multiple iris blades 24 more evenly stressed during the opening and closing process, further improving the accuracy of the exhaust channel cross-sectional area adjustment.

[0051] like Figure 5 、 7 As shown, the drive execution module 1 includes a drive motor 11, which is connected to a drive gear 12. The drive gear 12 is engaged with a gear plate 15 provided on a blade guide plate 25. The drive gear 12 is made of a high-strength corrosion-resistant alloy; the outer peripheral surface of the drive gear 12 is covered with a corrosion-resistant self-lubricating layer, and a sealing structure is provided at the connection between the drive gear 12 and the pressure regulating valve module 2. The sealing structure includes a fluororubber sealing ring 13 and an isolation ring 14.

[0052] Specifically, the driving gear 12 of the driving execution module 1 is made of a high-strength corrosion-resistant alloy and covered with a corrosion-resistant self-lubricating layer on its outer circumference, such as RULON (polytetrafluoroethylene modified material), and a sealing structure composed of a fluororubber sealing ring 13 and an isolation ring 14 is provided at the connection between the driving gear 12 and the pressure regulating valve module 2. The high-strength corrosion-resistant alloy material can resist the erosion of highly corrosive gases in semiconductor, chemical and other scenarios, and avoid tooth surface wear, fracture and other failures of the driving gear 12 caused by corrosion; the corrosion-resistant self-lubricating layer can reduce the friction resistance during gear meshing; the sealing structure composed of the fluororubber sealing ring 13 and the isolation ring 14 blocks the leakage of corrosive gases through the high chemical stability of fluororubber, thereby ensuring the airtightness of the connection between the driving module and the valve module.

[0053] like Figure 2 As shown, a position sensor 5 is also provided. The position sensor 5 is fixed on the mounting surface of the cover plate 22 facing the gear plate 15 , and its sensing end is perpendicular to the rotation plane of the gear plate 15 , and is used to detect the initial origin position of the gear plate 15 .

[0054] Specifically, the vertical installation method ensures that the position sensor 5 can accurately capture the origin mark on the gear plate 15. Before the equipment is turned on, the controller obtains the origin position of the gear plate 15 through the position sensor 5, and uses this as the starting reference point to calculate the number of running steps of the subsequent drive execution module 1, which can digitize and accurately determine the movement path of the iris leaf 24; by setting a preset number of steps, a safety boundary is defined for the movement range of the iris blade 24, which can effectively prevent the blade from exceeding the slide stroke range due to excessive opening and closing, thereby avoiding the risk of mechanical failures such as slide wear and component jamming, and ensuring the stable operation of the pressure regulating valve module 2.

[0055] The present application discloses an automatic exhaust pressure regulating device, which is installed on a pipeline 4 and consists of a driving execution module 1 and a pressure regulating valve module 2. When the equipment is running, the driving execution module 1 is started and drives the blade guide plate 25 to rotate by means of gear meshing or worm transmission. When the blade guide plate 25 rotates, its slide groove drives the sliding column of the iris blade 24 to move along the slide groove track; the iris blade 24 can perform radial opening and closing movement along the slide groove during the rotation and sliding process, that is, when the blade guide plate 25 rotates clockwise, the iris blade 24 contracts toward the center, the valve opening shrinks, and the exhaust volume is reduced; when the blade guide plate 25 rotates counterclockwise, the iris blade 24 expands outward, the valve opening expands, and the exhaust volume is increased. The opening area is adjusted in real time through continuous radial movement to achieve dynamic balance of the air pressure inside the equipment. By setting a chute structure with openings at both ends, foreign matter (such as crystal particles and dust) can be discharged from the opening as the iris blade 24 moves, avoiding the accumulation of foreign matter in the chute and causing the blade to jam, thereby improving the operating reliability of the device in an environment containing impurities; by setting a composite constraint structure of the blade guide plate 25 and the blade fixing plate 23, the rotational motion of the drive execution module 1 is converted into the precise radial displacement of the iris blade 24, and combined with the design of the annularly evenly arranged blade group, the exhaust channel diameter can be continuously adjusted, the blade opening synchronization error is small, and there is no airflow step mutation during the opening and closing process, ensuring the exhaust flow control accuracy.

[0056] Although the embodiments of the present application have been shown and described, it will be understood by those skilled in the art that various changes, modifications, substitutions and variations may be made to these embodiments without departing from the principles and spirit of the present application, and the scope of the present application is defined by the appended claims and their equivalents.

[0057] In the description of this application, it should be noted that, unless otherwise expressly specified or limited, the terms "mounted," "connected," and "connected" should be understood in a broad sense. For example, they can refer to fixed connections, detachable connections, or integral connections; mechanical connections, electrical connections; direct connections, indirect connections through an intermediate medium, and internal connections between two components. Those skilled in the art will understand the specific meanings of the above terms in the present invention based on the specific circumstances.

Claims

1. An automatic exhaust pressure regulating device, comprising a drive execution module (1) and a pressure regulating valve module (2), wherein the pressure regulating valve module (2) comprises: A base bottom plate (21), a blade fixing plate (23) arranged on the base bottom plate (21), a plurality of iris blades (24) arranged in a ring shape, and a rotatable blade guide plate (25), wherein the iris blades (24) are connected to the blade fixing plate (23) and the blade guide plate (25) at the same time through a rotating sliding slot structure, and the driving execution module (1) drives the blade guide plate (25) to rotate to control the opening and closing of the iris blades (24), characterized in that both ends of all the slots in the rotating sliding slot structure are open.

2. The automatic exhaust pressure regulating device according to claim 1, characterized in that: The rotary sliding slot structure includes: a fixed plate slot (231) provided on the surface of the blade fixing plate (23), the number of which matches the iris blade (24); a guide plate slot (251) provided on the blade guide plate (25), the number of which matches the iris blade (24); a slider (241) provided on each of the iris blades (24), the slider (241) being slidably engaged in the fixed plate slot (231); and a guide column (242) provided on each of the iris blades (24), the guide column (242) being slidably engaged in the guide plate slot (251).

3. The automatic exhaust pressure regulating device according to claim 2, characterized in that: The fixed plate slide groove (231) is a linear slide groove, the outer end of each fixed plate slide groove (231) extends to the outer edge of the blade fixed plate (23) to form an outer edge opening, and the inner end of each fixed plate slide groove (231) is connected to the adjacent fixed plate slide groove (231).

4. The automatic exhaust pressure regulating device according to claim 2, characterized in that: The guide plate slide groove (251) comprises two radial linear slide grooves, the inner ends of the two linear slide grooves are connected through an arc-shaped slide groove, and the two ends of the guide plate slide groove (251) extend to the outer edge of the blade guide plate (25) to form an outer edge opening.

5. The automatic exhaust pressure regulating device according to claim 1, characterized in that: Each of the iris blades (24) is triangular in shape, and adjacent iris blades (24) are interlocked and connected via a sealing slide mechanism, wherein the sealing slide mechanism comprises a guide rib arranged on one side of the iris blade (24) and a dovetail slide (243) on the other side; the guide rib can be embedded in the dovetail slide (243) of the adjacent blade to form a continuous sliding sealing interface.

6. The automatic exhaust pressure regulating device according to claim 1, characterized in that: A differential pressure sensor (3) is also provided. The differential pressure sensor (3) is connected to the interior of the device through a detection pipeline (31) to detect the internal pressure of the device. A trumpet-shaped sensing port (32) is provided at the end of the detection pipeline (31). The sensing port (32) is located inside the device and its opening direction is consistent with the airflow direction. The differential pressure sensor (3) is electrically connected to the controller. A filter (33) is provided on the detection pipeline (31).

7. The automatic exhaust pressure regulating device according to claim 6, characterized in that: The controller receives a real-time pressure signal from a pressure differential sensor (3); when the actual pressure is lower than a set threshold, the controller starts driving the execution module (1) to rotate forward; and when the actual pressure is higher than the set threshold, the controller starts driving the execution module (1) to rotate reverse.

8. The automatic exhaust pressure regulating device according to claim 2, characterized in that: The blade fixing plate (23) is fixedly mounted on the base bottom plate (21) by a bolt assembly. The angle between the fixing plate slide groove (231) and the guide plate slide groove (251) can be adjusted by rotating the blade fixing plate (23). The angle α between the fixing plate slide groove (231) and the guide plate slide groove (251) is greater than 15°.

9. The automatic exhaust pressure regulating device according to claim 1, characterized in that: The driving execution module (1) includes a driving motor (11), the driving motor (11) is connected to a driving gear (12), the driving gear (12) is meshed with a gear plate (15) arranged on the blade guide plate (25), and the driving gear (12) is made of a high-strength corrosion-resistant alloy; the outer peripheral surface of the driving gear (12) is covered with a corrosion-resistant self-lubricating layer, and a sealing structure is provided at the connection between the driving gear (12) and the pressure regulating valve module (2), and the sealing structure includes a fluororubber sealing ring (13) and an isolation ring (14).

10. The automatic exhaust pressure regulating device according to claim 1, characterized in that: A position sensor (5) is also provided. The position sensor (5) is fixed on the mounting surface of the cover plate (22) facing the gear plate (15), and its sensing end is perpendicular to the rotation plane of the gear plate (15) and is used to detect the initial origin position of the gear plate (15).

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