A vacuum device airtightness detection device

Abstract

The present invention relates to the field of air tightness detection, and discloses an air tightness detection device for vacuum devices, comprising: a detection table, wherein two support frames are provided in the detection table for placing vacuum valve devices; and two oil cylinders are provided in the detection table. This device can accurately realize micro-flow gas input and leakage monitoring in the order of nanoliters / second or microliters / second by providing a double-sided air path closed-loop detection structure of a micro-flow regulating valve and an air pressure sensor, thereby ensuring high detection sensitivity, excellent lower limit, and fast response speed. Through the support frame avoidance design, it can actively break away from the support state before knocking, significantly reducing the influence of the knocking reaction force on the detection result, and improving the detection purity and detection safety. The use of multiple knocking tables and a stepped impact loading structure can fully stimulate potential leakage paths under different states through graded and increasing knocking intensity, and is particularly suitable for dynamic intermittent micro-flow leakage detection scenarios.

Description

Technical Field

[0001] The present invention relates to the technical field of air tightness detection, and in particular to an air tightness detection device for a vacuum device. Background Art

[0002] Vacuum systems require extremely high airtightness. The airtightness of vacuum valves directly impacts the stability and operational safety of the vacuum system. A valve leak not only disrupts the vacuum environment but can also lead to product damage, equipment failure, and even accidents. Therefore, accurate testing of the airtightness of vacuum valves is of great engineering significance. Existing methods for testing vacuum valves for airtightness primarily include helium mass spectrometry, differential pressure testing, and bubble testing.

[0003] Existing detection methods typically rely on establishing a pressure differential or using tracer gas to determine if a valve is leaking. However, some vacuum valves have the potential for intermittent leakage. For example, a valve may appear airtight during static testing, but in actual operation, when subjected to external mechanical vibrations or impacts, hidden microcracks, loose components, or critical sealing points can easily open instantaneously, leading to gas leakage.

[0004] Existing detection technologies generally lack a dedicated excitation mechanism and are unable to apply effective mechanical knocking or dynamic interference to the valve being tested during the detection process, resulting in intermittent leaks being difficult to detect in a timely manner and posing a risk of missed detection. Summary of the Invention

[0005] In view of the deficiencies in the prior art, the present invention provides an airtightness detection device for a vacuum device, aiming to alleviate the above-mentioned problems at least to a certain extent.

[0006] The above technical objectives of the present invention are achieved through the following technical solutions:

[0007] A vacuum device airtightness detection device, comprising:

[0008] A testing platform, wherein two support frames are provided in the testing platform for placing vacuum valve components;

[0009] Two oil cylinders provided in the testing platform;

[0010] Two detection parts are provided in the detection platform, which are respectively connected to the corresponding oil cylinder telescopic shafts, and the detection parts are provided with a micro-flow regulating valve and an air pressure sensor;

[0011] The vacuum pump and the gas supply pump provided on the detection table are connected to the two detection parts respectively;

[0012] A bracket provided in the testing platform, wherein a plurality of knocking platforms are provided on the bracket;

[0013] The excitation component is arranged between the detection platform and the bracket, and is used to move the knocking platform to impact the vacuum device on the support frame.

[0014] Preferably, the detection part includes an air ring a and an air ring b, and an air port for connecting to the end of the vacuum valve is opened on one side of the air ring b. A hose a is connected between the air ring a and the air ring b, and a connecting pipe is connected to the air ring a. The micro-flow regulating valve is arranged in the connecting pipe, and the air pressure sensor is arranged in the air ring a. The vacuum pump and the gas supply pump are respectively connected with a hose b, the hose b on the vacuum pump is connected to one of the connecting pipes, and the hose b on the gas supply pump is connected to the other connecting pipe.

[0015] Preferably, a sealing gasket is connected to the side wall of the air ring b.

[0016] Preferably, the other side of the air ring b is connected to a sliding frame, the air ring a is fixed on the telescopic shaft of the oil cylinder, the sliding frame is slidably connected to the telescopic shaft of the oil cylinder, and a spring a is connected between the telescopic shafts of the oil cylinder.

[0017] Preferably, the knocking table includes a connecting rod a slidably connected to the bracket, a spring b is connected between the connecting rod a and the bracket, the top of the connecting rod a extends to the top of the bracket and is slidably connected to the connecting rod b, the top of the connecting rod b is connected to a rubber ball, a spring c is connected between the connecting rod b and the bracket, and a magnet is connected to the inside of the connecting rod b, which is magnetically attracted to the connecting rod a.

[0018] Preferably, the excitation component includes a screw rotatably connected to the bracket, a slider slidably connected to the bracket and cooperating with the screw thread, the screw is a reciprocating screw, a downward pressure channel is provided on the top of the slider, the bottom of the connecting rod a is connected to a boss, and the side wall of the boss is provided with an oblique opening corresponding to the downward pressure channel.

[0019] Preferably, the excitation component can move the position of the support frame when moving the knocking table, so that the support frame leaves the vacuum device;

[0020] An avoidance convex rod is connected between the two support frames, and the avoidance convex rod is located at the bottom of the slider. The protruding part of the avoidance convex rod is higher than the bottom height of the slider. A spring d is connected between the support frame and the detection platform.

[0021] Preferably, a motor is connected to the bracket, and a drive shaft of the motor is connected to the lead screw.

[0022] Preferably, after completing the cyclic movement of the plurality of knocking platforms, the excitation component can also push the telescopic shaft of the oil cylinder downward by a predetermined distance, so that the vacuum valve device gradually approaches the knocking platform;

[0023] The bracket is rotatably connected to a rotating shaft, the rotating shaft is connected to a guide cylinder, a spiral opening is provided on the guide cylinder, and both ends of the rotating shaft are respectively connected to a gear a, and the gear a is an incomplete gear. The detection platform is connected to a connecting shaft, and the connecting shaft is rotatably connected to a gear b adapted to the gear a, and the gear b is rotatably connected to a connecting rod a, and the oil cylinder is slidably connected to the detection platform, and the oil cylinder is connected to a connecting frame, and a connecting rod b rotatably connected to the connecting rod a is fixed at the bottom of the connecting frame, and a push rack is slidably connected to the bracket, and a spring e is connected between the push rack and the bracket, and a one-way rotation groove is provided at the bottom of the push rack, and a guide rod is rotatably connected in the one-way rotation groove.

[0024] Preferably, a spring f is connected between the oil cylinder and the detection platform, and a ratchet mechanism is connected between the gear b and the connecting shaft.

[0025] In summary, the present invention mainly has the following beneficial effects:

[0026] By setting up a double-sided gas path closed-loop detection structure with a micro-flow regulating valve and an air pressure sensor, this device can accurately achieve micro-flow gas input and leakage monitoring at the nanoliter / second or microliter / second level, ensuring high detection sensitivity, excellent lower limit and fast response speed.

[0027] Through the support frame avoidance design, it can actively break away from the support state before knocking, significantly reducing the impact of the knocking reaction force on the test results, and improving the purity and safety of the test.

[0028] The use of multiple knocking tables and a stepped impact loading structure can fully stimulate potential leakage paths under different conditions through graded and increasing knocking intensity. It is particularly suitable for detection scenarios of dynamic intermittent micro-flow leaks.

[0029] The overall structural detection process of this device is highly linked, the detection system has excellent air tightness and strong adaptability, and is particularly suitable for high-precision vacuum valve air tightness detection. It has significant technical advantages of wide detection range, accurate detection results and high detection efficiency. BRIEF DESCRIPTION OF THE DRAWINGS

[0030] Figure 1 It is a schematic diagram of the overall structure of the present invention;

[0031] Figure 2 is another schematic diagram of the overall structure of the present invention;

[0032] Figure 3It is a cross-sectional schematic diagram of the overall structure of the present invention;

[0033] Figure 4 It is a schematic structural diagram of the detection unit of the present invention;

[0034] Figure 5 It is a schematic diagram of the support frame structure of the present invention;

[0035] Figure 6 It is a schematic structural diagram of the knocking table of the present invention;

[0036] Figure 7 It is a schematic diagram of the slider structure of the present invention;

[0037] Figure 8 It is a schematic structural diagram of the guide cylinder of the present invention;

[0038] Figure 9 Schematic diagram of the structure of the connecting rod a and the connecting rod b of the present invention;

[0039] Figure 10 It is a schematic structural diagram of the ratchet mechanism of the present invention.

[0040] Reference numerals:

[0041] 100. Testing table; 101. Support frame; 102. Oil cylinder; 103. Testing unit; 104. Micro-flow regulating valve; 105. Air pressure sensor; 106. Vacuum pump; 107. Gas supply pump; 108. Bracket; 109. Striking table;

[0042] 200, gas ring a; 201, gas ring b; 202, gas port; 203, hose a; 204, connecting pipe; 205, hose b; 206, sealing gasket; 207, sliding frame; 208, spring a;

[0043] 300, connecting rod a; 301, spring b; 302, connecting rod b; 303, rubber ball; 304, spring c; 305, magnet; 306, lead screw; 307, slider; 308, downward pressure channel; 309, bevel; 310, avoidance cam; 311, spring d; 312, motor; 313, boss;

[0044] 400, rotating shaft; 401, guide cylinder; 402, spiral opening; 403, gear a; 404, connecting shaft; 405, gear b; 406, connecting rod a; 407, connecting frame; 408, connecting rod b; 409, pushing frame; 410, spring e; 411, one-way rotating groove; 412, guide rod; 413, spring f; 414, ratchet mechanism. DETAILED DESCRIPTION

[0045] The following will clearly and completely describe the technical solutions in the embodiments of the present invention in conjunction with the accompanying drawings. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without making creative efforts are within the scope of protection of the present invention.

[0046] refer to Figures 1-10 A vacuum device airtightness testing device includes a testing platform 100, which is equipped with two support frames 101 for supporting the vacuum valve device to be tested. Two oil cylinders 102 are installed within the testing platform 100, with their telescopic axes facing the support frames 101. These axes are used to drive a testing unit 103 into sealing contact with the vacuum valve device.

[0047] Two detection parts 103 are provided in the detection platform 100, each detection part 103 is connected to the telescopic shaft of the corresponding oil cylinder 102, and a micro-flow regulating valve 104 and an air pressure sensor 105 are provided on the detection part 103. The micro-flow regulating valve 104 is used to adjust the flow of detection gas entering and exiting the vacuum valve device, and the air pressure sensor 105 is used to detect the air pressure changes at both ends of the vacuum valve device in real time.

[0048] A vacuum pump 106 and a gas supply pump 107 are installed on the testing platform 100. The vacuum pump 106 and the gas supply pump 107 are respectively connected to the two detection parts 103, and are used to provide an exhaust path and an air intake path to the two sides of the vacuum valve device respectively. Through the coordinated control of the flow and air pressure on both sides, the actual operating conditions of the valve can be accurately simulated, and micro-flow level leakage detection can be achieved.

[0049] The testing platform 100 is provided with a support 108, on which are mounted a plurality of striking platforms 109 for mechanically impacting and stimulating the vacuum valve device clamped on the support frame 101. An excitation component is provided between the testing platform 100 and the support 108, and is used to drive the striking platforms 109 along a preset path, causing the striking platforms 109 to sequentially impact different parts of the vacuum valve device.

[0050] The excitation component is provided with an avoidance mechanism, which is used to control the support frame 101 to move to an avoidance position along the vertical track after completing the clamping positioning, so that the support frame 101 and the vacuum valve device maintain a non-contact state.

[0051] In addition, after completing the cyclic movement of multiple striking platforms 109, the excitation component can push the cylinder 102 downward by a predetermined distance, so that the vacuum valve device gradually approaches the striking platform 109, forming a multi-stage, graded loading stepped impact process.

[0052] With the above arrangement, during use, the vacuum valve device to be tested is first clamped and fixed between the two support frames 101 within the testing platform 100. The two support frames 101 provide stable support for both ends of the vacuum valve device. The telescopic shaft of the oil cylinder 102 drives the detection unit 103 to an airtight connection with both ends of the vacuum valve device, forming an independent and closed testing gas path structure. After clamping and fixing, the oil cylinder 102 shaft continues to push the detection unit 103 to ensure a tight seal with the valve interface, thereby ensuring a complete and stable gas flow path during the testing process.

[0053] Subsequently, a test gas is supplied to one of the detection sections 103 via a gas supply pump 107 on the test bench 100. The gas passes through a micro-flow control valve 104, precisely controlling its flow rate, and enters the interior of the vacuum valve device. Simultaneously, a vacuum pump 106 on the test bench 100 is activated to evacuate the detection section 103 at the other end of the vacuum valve device, thereby evacuating the other end of the vacuum valve device. During the test, the use of micro-flow control valve 104 ensures that the input gas flow rate remains stable at the nanoliter or microliter per second level, effectively simulating the ultra-small leaks that may occur in the valve under actual operating conditions, ensuring high sensitivity and adaptability of the test.

[0054] The air pressure sensor 105 monitors the air pressure changes at both ends of the vacuum valve device in real time and compares it with the input air flow in a micro-flow closed loop, which can accurately capture the leakage phenomenon of ultra-low leakage rate, especially suitable for detecting leakage below 10⁻ 9 The micro-flow detection design ensures that even the smallest gas leaks can be detected, greatly improving the detection limit and avoiding the misjudgment problem caused by the insufficient sensitivity of traditional detection devices.

[0055] After the clamping is stabilized and the air circuit is closed, the excitation component begins to operate, driving the multiple tapping platforms 109 on the test platform 100 to move sequentially along the preset path of the bracket 108, rhythmically and continuously tapping different positions of the vacuum valve device. Through mechanical impact excitation, the tapping platforms 109 effectively simulate the complex environmental conditions such as vibration and shock that vacuum valves may encounter during actual operation. This helps to stimulate potential intermittent leak paths or microcrack leak paths, further improving the coverage and depth of detection.

[0056] To prevent the reaction force from being transmitted to the support frame 101 during the striking process, the excitation component is equipped with a back-up mechanism. After clamping and positioning, the back-up mechanism actively drives the support frame 101 along the vertical track to a back-up position between the moving striking platform 109 and the striking platform 109. This mechanism temporarily disengages the support frame 101 from contact with the vacuum valve device, ensuring that the striking impact force is not fed back to the fixture body through the support frame 101. This back-up structure significantly reduces structural interference during the detection process, ensuring the purity and validity of the test data.

[0057] After completing multiple cycles of the striking platform 109, the excitation component further controls the oil cylinder 102 to push downward, thereby pushing the detection unit 103 and the vacuum valve device downward, gradually descending through a segmented, predetermined pitch. After each descent, the vacuum valve device held in the detection fixture moves closer to the striking platform 109 as a whole, and the contact gap between the striking platform 109 and the vacuum valve device gradually decreases. By gradually reducing the gap, the impact energy of the striking platform 109 on the valve device can be intentionally increased step by step.

[0058] Initially, the hydraulic cylinder 102 descends a short distance, causing the striking platform 109 to strike the vacuum valve component with a slight impact. This impact is relatively low, primarily used to detect potential leaks while the structure is relatively stable. Subsequently, the hydraulic cylinder 102 is gradually lowered by a predetermined distance, each controlled at the millimeter level. As the valve component approaches the striking platform 109, the impact intensity increases.

[0059] This graded loading process can be used to monitor the dynamic changes in the airtightness of vacuum valves under varying impact intensities. It is particularly suitable for detecting intermittent micro-flow leaks in boundary conditions, micro-cracks, or mechanical looseness. While low impact intensities may not trigger leakage, medium- to high-intensity shocks can briefly activate some potential leaks, opening the leak path and causing micro-flow variations in the leaked gas. At this point, the highly sensitive linkage detection of the micro-flow control valve 104 and the air pressure sensor 105 can quickly detect airflow anomalies indicating minor leaks.

[0060] This stepped impact loading process avoids the risk of structural damage associated with traditional single, high-intensity impacts. Compared to direct, high-intensity impacts, this device utilizes progressive impacts to fully stimulate all possible leakage channels without damaging the vacuum valve itself. This improves the depth and safety of leak detection and ensures dynamic traceability of leak signals throughout the entire process, from low to high intensities.

[0061] In this application, the entire detection process can realize multi-step linkage of bilateral air paths, micro-flow input, real-time air pressure monitoring, knocking excitation, support avoidance, and step loading. The overall detection system has strong air tightness, sensitive response, and high adaptability. It is particularly suitable for high-precision micro-flow vacuum valve air tightness detection, with accurate detection effect and comprehensive detection range.

[0062] In this embodiment, the detection part 103 adopts a double air ring structure, specifically including an air ring a200 and an air ring b201. A sealing air port 202 facing the port of the vacuum valve device is provided on one side of the air ring b201. The air port 202 is in direct contact with the end face of the vacuum valve device to be detected, and a pre-tightening force is applied by the oil cylinder 102 to ensure that a stable airtight connection is formed between the air port 202 and the valve device.

[0063] The air ring a200 and the air ring b201 are connected through a plurality of flexible hoses a203, and the hoses a203 have a certain flexibility.

[0064] A connecting tube 204 is fixedly connected to the air ring a200, and a micro-flow regulating valve 104 is installed in the air path of the connecting tube 204. The micro-flow regulating valve 104 is a needle valve structure or a mass flow control valve, which can perform high-precision adjustment on the flow of the detection gas entering the air ring a200. The input flow is stable and controllable, and can achieve continuous flow adjustment from nanoliters / second to microliters / second, which is suitable for ultra-small leak detection scenarios.

[0065] A high-sensitivity air pressure sensor 105 is installed inside the air ring a200 to monitor the air pressure changes inside the air ring a200 in real time. Through the rapid response of the air pressure sensor 105, the instantaneous air pressure fluctuations caused by tiny gas leaks in the air path system can be captured.

[0066] The vacuum pump 106 and the gas supply pump 107 on the detection table 100 are respectively connected to the connecting pipes 204 of the two detection parts 103 through the hose b205. The hose b205 on the vacuum pump 106 side is connected to the connecting pipe 204 of one detection part 103, and the hose b205 on the gas supply pump 107 side is connected to the connecting pipe 204 of the other detection part 103, thereby constructing a dual-gas-path detection system for air intake and exhaust.

[0067] Through the above-mentioned arrangement, independent, closed air intake and exhaust circuits are established at both ends of the vacuum valve device. The air intake and exhaust paths are monitored in real time in both directions via the micro-flow regulating valve 104 and the air pressure sensor 105. The entire air path connection is highly flexible, tightly sealed, and has a fast response speed. The hose a203 and the hose b205 can be made of a polytetrafluoroethylene (PTFE)-lined stainless steel braided hose. This hose has excellent air tightness, corrosion resistance, and negative pressure resistance, effectively preventing gas penetration and ensuring stable air pressure and rapid flow response during micro-flow detection. Detection accuracy is not affected by hose deformation or gas entrapment. The hose has a smooth inner wall and low gas flow resistance, meeting the device's requirements for high-sensitivity, fast-response micro-flow air tightness detection. This ensures reliable air path connection and timely response during the detection process, making it suitable for long-term continuous micro-flow detection scenarios.

[0068] During the test process, a gas supply pump 107 supplies test gas to the test gas circuit. The micro-flow control valve 104 precisely controls the input flow rate, ensuring that the input gas flow rate is maintained within a stable micro-flow range. The output flow rate of the micro-flow control valve 104 can be adjusted to meet different test sensitivity requirements. Simultaneously, a vacuum pump 106 continuously pumps gas to create a pressure differential environment, and a pressure sensor 105 monitors changes in the gas circuit pressure in real time to detect leaks.

[0069] In this embodiment, a sealing gasket 206 is provided on the sidewall of the gas ring b201. This gasket 206 is designed to tightly fit the end face of the vacuum valve component being tested, ensuring the airtightness of the gas flow path during testing. A sliding bracket 207 is connected to the other side of the gas ring b201. The sliding bracket 207 is slidably mounted on the telescopic shaft of the oil cylinder 102, allowing the gas ring b201 to slide on the telescopic shaft.

[0070] The air ring a200 is fixedly connected to the telescopic shaft of the oil cylinder 102, and the air ring a200 and the air ring b201 are connected through a hose a203. A spring a208 is provided between the sliding frame 207 and the telescopic shaft of the oil cylinder 102. One end of the spring a208 is connected to the sliding frame 207, and the other end is connected to the telescopic shaft of the oil cylinder 102.

[0071] With this setup, during use, gasket 206 tightly mates with the end face of the vacuum valve component being tested, creating an airtight path for the test gas path. Gas ring b201 is mounted on the telescopic shaft of cylinder 102 via a sliding bracket 207. Sliding bracket 207 is vertically movable along the axis of cylinder 102. A spring a208 is provided between sliding bracket 207 and cylinder 102 to provide a flexible return.

[0072] During the clamping phase, the telescopic shaft of oil cylinder 102 pushes gas ring a200 and gas ring b201 forward as a whole, achieving an airtight connection between detection unit 103 and the vacuum valve device. At this point, gas ring a200 and gas ring b201 maintain air communication via hose a203. The gas supply pump 107 and vacuum pump 106, respectively, supply and exhaust air to the vacuum valve device through bilateral air passages, forming a complete micro-flow detection path.

[0073] During the knocking excitation stage, the knocking platform 109 periodically impacts the vacuum valve device, and the vibration force will be transmitted to the air ring b201. However, since the air ring b201 can slide vertically relative to the telescopic axis of the cylinder 102 under the guidance of the sliding frame 207 and is returned by the spring a208, the air ring b201 will produce a small displacement during knocking to adapt to the instantaneous movement of the valve device, thereby avoiding damage to the valve due to forced restraint of the clamp.

[0074] Furthermore, because air ring a200 is fixed to the telescopic shaft of oil cylinder 102 and connected to air ring b201 via flexible hose a203, vibrations from striking the ring are not directly transmitted to air ring a200, effectively isolating vibrations from interfering with micro-flow control valve 104 and air pressure sensor 105. This structure ensures stable micro-flow input and pure air pressure sensor signals during testing, preventing false signals or data fluctuations caused by vibration shock.

[0075] In this embodiment, the knocking platform 109 includes a connecting rod a300 slidably connected to the bracket 108, and the connecting rod a300 can slide up and down vertically along the bracket 108. A spring b301 is connected between the connecting rod a300 and the bracket 108. One end of the spring b301 is connected to the bracket 108, and the other end is connected to the connecting rod a300, which is used to generate tensile potential energy when the connecting rod a300 moves downward.

[0076] The top of connecting rod a300 extends to the top of bracket 108 and is slidably connected to connecting rod b302. Connecting rod b302 is configured to slide up and down. A rubber ball 303 is fixed to the top of connecting rod b302. Rubber ball 303 provides a soft impact when in contact with the vacuum valve component, preventing damage to the valve surface. A spring c304 is installed between connecting rod b302 and bracket 108 to provide a quick rebound force after connecting rod b302 is compressed.

[0077] A magnet 305 is embedded in the interior of the connecting rod b302, which is attracted to the connecting rod a300, and the connecting rod b302 and the connecting rod a300 are synchronously locked into one through the magnetic attraction force.

[0078] Through the above settings, in the detection preparation stage, the connecting rod a300 and the connecting rod b302 are locked by the magnet 305, and an initial gap is maintained between the rubber ball 303 and the vacuum valve device, which facilitates the placement and support of the vacuum valve device and avoids interference caused by normal contact.

[0079] The excitation components sequentially drive the connecting rod a300 to move downward in the vertical direction. During the downward movement of the connecting rod a300, the spring b301 is gradually stretched to store energy. The presence of the spring b301 ensures the rapid return ability of the connecting rod a300 after being released.

[0080] When the connecting rod a300 moves downward, the connecting rod a300 is connected to the connecting rod b302 through magnetic attraction, and the connecting rod b302 is driven downward synchronously, while the spring c304 is continuously compressed to store energy.

[0081] As the connecting rod a300 and the connecting rod b302 move down to the set release position synchronously, the spring c304 is compressed to the design limit, and its reaction elastic force exceeds the magnetic locking force, the magnet 305 disengages, and the connecting rod b302 is instantly separated from the connecting rod a300.

[0082] At this time, the spring c304 releases the stored potential energy, quickly driving the connecting rod b302 to recoil upward, and the rubber ball 303 on the top of the connecting rod b302 bounces upward, passing through the initial gap between the rubber ball 303 and the vacuum valve device, completing an effective flexible impact.

[0083] This application makes full use of the principles of spring graded energy storage, magnetic synchronous transmission and flexible impact to ensure that the mechanical rhythm of the knocking process is accurate, the impact path is stable, and the impact intensity is controllable. It is particularly suitable for the dynamic excitation process during micro-flow air tightness testing of vacuum valve devices. At the same time, it ensures that the micro-flow detection path is away from the mechanical vibration source, ensuring the purity of the detection data and sensitive response to small leaks.

[0084] In this embodiment, the bracket 108 is rotatably connected to a lead screw 306, which is threadedly engaged with a slider 307 on the bracket 108. The slider 307 can slide smoothly on the bracket 108 along the axial direction of the lead screw 306. The lead screw 306 is a reciprocating lead screw 306 structure, and the slider 307 can be repeatedly moved back and forth by continuous rotation.

[0085] A downward pressing channel 308 is provided on the top of the slider 307 for temporarily contacting the connecting rod b302 during the movement of the slider 307 .

[0086] The bottom of the connecting rod a300 is provided with a boss 313. The sidewall of the boss 313 is provided with an oblique opening 309 corresponding to the downward pressure channel 308. The oblique opening 309 cooperates with the guide structure of the downward pressure channel 308. As the slider 307 moves along the lead screw 306, the downward pressure channel 308 gradually contacts the oblique opening 309 of the boss 313, and this structural cooperation generates a downward pressing force on the connecting rod a300.

[0087] With the above arrangement, when in use, the lead screw 306 can be rotated to drive the slider 307 to slide back and forth smoothly along the axial direction of the lead screw 306. When the slider 307 continues to move axially along the lead screw 306, the downward pressure channel 308 continues to cooperate with the bevel 309 on the side wall of the bottom boss 313 of the connecting rod a300. By transmitting force through the inclined surface, the slider 307 gradually pushes the connecting rod a300 downward in a controlled and stable manner. During the downward movement of the connecting rod a300, the connecting rod a300 and the connecting rod b302 are in a locked state due to the magnetic attraction of the magnet 305. Therefore, the downward movement of the connecting rod a300 will simultaneously drive the connecting rod b302 to move downward as a whole, and the spring b301 between the connecting rod a300 and the bracket 108 is stretched and stored energy at the same time.

[0088] As slider 307 continues to push forward, connecting rod a300 and connecting rod b302 move downward as a whole, gradually compressing spring c304. When connecting rod a300 and connecting rod b302 move downward as a whole to the preset release position, the reaction force generated by the compression of spring c304 gradually exceeds the magnetic attraction between connecting rods a300 and b302, causing magnet 305 to disengage and connecting rod b302 to instantly separate from connecting rod a300. Spring c304 quickly releases its stored energy, pushing connecting rod b302 and driving rubber ball 303 upward, completing the flexible impact on the vacuum valve device.

[0089] Slider 307 continues to move rightward along lead screw 306, engaging with the beveled opening 309 of boss 313 of the next connecting rod a300. Following the same process, the next connecting rod a300 is moved downward, triggering the impact of each connecting rod a300 and connecting rod b302 in sequence. Because springs b301 are installed between each connecting rod a300 and bracket 108, after slider 307 leaves, the springs b301 provide a tensile force, quickly returning the connecting rod a300 to its original position, ready for the next round of impact.

[0090] During the movement of the slider 307 from the left end to the right end of the bracket 108, the slider 307 can sequentially press down the multiple connecting rods a300, so that each connecting rod a300 can complete the complete actions of downward movement, energy storage, release, recoil, and return in a rhythmic order.

[0091] After slider 307 reaches the rightmost end of bracket 108, the reciprocating mechanism of lead screw 306 allows slider 307 to reverse axially along lead screw 306, returning to the leftmost position of bracket 108, completing a complete cycle. As slider 307 returns from the right to the left, it triggers connecting rod a300 to move downward, allowing the impact to continue. When slider 307 returns to the leftmost end of bracket 108, it lowers cylinder 102. Once cylinder 102 is positioned correctly, slider 307 resumes its rightward movement along lead screw 306, entering the next impact cycle.

[0092] In this embodiment, a relief protrusion 310 is connected between the two, and the relief protrusion 310 is arranged horizontally between the support frames 101. The relief protrusion 310 is located below the moving path of the slider 307, and the protrusion height of the relief protrusion 310 is higher than the bottom height of the slider 307. Due to this height difference design, the bottom of the slider 307 will first contact the relief protrusion 310 during movement.

[0093] A spring d311 is arranged between the support frame 101 and the detection platform 100. One end of the spring d311 is connected to the support frame 101, and the other end is connected to the detection platform 100. It is used to drive the support frame 101 to perform an avoidance action after the slider 307 contacts the avoidance protrusion 310, and reset the support frame 101 through the elastic restoring force of the spring d311 after the slider 307 leaves.

[0094] With this arrangement, during the inspection process, the slider 307 moves laterally along the lead screw 306. When the slider 307 reaches the position of the avoidance protrusion 310, the bottom of the slider 307 contacts the protruding portion of the avoidance protrusion 310. Because the protruding portion of the avoidance protrusion 310 is higher than the bottom of the slider 307, the slider 307 continues to apply thrust to the avoidance protrusion 310 as it continues to move forward.

[0095] The avoidance protrusion 310 is fixed as a whole between the two support frames 101, so the continuous thrust of the slider 307 will be transmitted to the support frame 101 through the avoidance protrusion 310, forcing the support frame 101 to displace along a preset direction, forming an active avoidance action of the support frame 101.

[0096] The spring d311 connecting the support frame 101 and the detection platform 100 is compressed during this process. When the slider 307 moves through the avoidance protrusion 310, the spring d311 automatically drives the support frame 101 back to its original clamping position under the action of elastic recovery. After the support frame 101 is reset, it can continue to provide stable support and prepare for the next round of clamping or adjustment operations.

[0097] In this embodiment, a motor 312 is mounted on the bracket 108. The drive shaft of the motor 312 is connected to the lead screw 306, and the motor 312 directly drives the rotation of the lead screw 306. The motor 312 can be a stepper motor 312 or a servo motor 312, which supports precise position control and programmable speed adjustment to adapt to the detection rhythm requirements of the continuous movement of the slider 307.

[0098] With this arrangement, during use, motor 312 drives screw 306 via the drive shaft, and the speed and direction of motor 312 can be adjusted in real time by the control system. As screw 306 rotates, slider 307 engages with the threaded connection, allowing slider 307 to move smoothly along the axis of screw 306. Motor 312 precisely controls the speed, stroke length, and rhythm of slider 307 according to a pre-set program, ensuring that slider 307 accurately completes the downward movement when it moves below each connecting rod a300.

[0099] In this embodiment, a rotating shaft 400 is rotatably connected to the bracket 108 . A guide cylinder 401 is sleeved on the rotating shaft 400 . A spiral opening 402 is formed on the side wall of the guide cylinder 401 .

[0100] Both ends of the rotating shaft 400 are connected to gears a403 respectively. The gear a403 is an incomplete gear structure. A connecting shaft 404 is rotatably connected to the testing platform 100. The connecting shaft 404 is equipped with a gear b405 adapted to the gear a403.

[0101] A connecting rod a406 is rotatably connected to the gear b405, and the connecting rod a406 is connected to the connecting frame 407 on the oil cylinder 102. The other end of the connecting rod a406 is connected to the connecting rod b408 through the rotating shaft 400, and the other end of the connecting rod b408 is fixed to the bottom of the connecting frame 407.

[0102] Cylinder 102 is slidably mounted on test bench 100 and can move vertically up and down. A pusher 409 is slidably connected to bracket 108. A spring 410 is connected between pusher 409 and bracket 108 to provide an elastic reset force. A one-way rotation slot 411 is defined at the bottom of pusher 409, within which a guide rod 412 is rotatably mounted.

[0103] With this setup, during the test, slider 307 reciprocates axially along lead screw 306, each time it moves from left to right and back to the left, completing a complete percussion cycle. During rightward movement, slider 307 primarily presses down on connecting rod a300, activating each percussion unit individually and completing the flexible percussion excitation of the vacuum valve device. While slider 307 is moving right, it does not participate in the displacement adjustment of cylinder 102, ensuring the continuity and rhythmic stability of the percussion action.

[0104] When the slider 307 completes all strokes and moves in the reverse direction along the lead screw 306 (i.e., during the left return), the structure of the slider 307 actively compresses the pusher 409 mounted on the bracket 108. The pusher 409 slides along the guide slot under the thrust of the slider 307. The one-way rotation slot 411 at the bottom of the pusher 409 cooperates with the guide rod 412 rotatably mounted inside to ensure that the pusher 409 can effectively transmit the driving force during the return stroke of the slider 307, while preventing reverse interference when the slider 307 moves to the right.

[0105] When the slider 307 returns to its original position, it presses against the pusher 409, which drives the attached stopper rod to slide along the spiral opening 402 in the guide cylinder 401. The curved structure of the spiral opening 402 converts the linear sliding path of the stopper rod into angular displacement of the guide cylinder 401 and the rotating shaft 400. With the motion constraint of the spiral opening 402, the slider 307 can drive the guide cylinder 401 and the rotating shaft 400 to rotate one set rotation per each reciprocating cycle.

[0106] As shaft 400 rotates, the incomplete gears a403 at both ends rotate synchronously. The effective tooth segments of the incomplete gears mesh with gear b405 on test platform 100, causing gear b405 to rotate. The incomplete gear structure, with its tooth gaps, ensures that during the movement of slider 307, gear b405 only completes a predetermined rotation angle during the return phase.

[0107] Gear b405 drives connecting rod b408 to move through connecting rod a406. Connecting rod b408 is rotationally connected to connecting frame 407 installed on cylinder 102. Each step rotation of gear b405 pulls connecting frame 407 through the connecting rod mechanism, thereby driving cylinder 102 to move downward a predetermined distance along the slide rail of testing platform 100.

[0108] As described above, each time slider 307 completes a reciprocating tapping cycle, it synchronously lowers cylinder 102, achieving the purpose of gradually lowering the height of the vacuum valve device. After adjusting the positions of cylinder 102 and the vacuum device, the downward stroke of slider 307 on connecting rod a300 remains unchanged. However, due to the downward position of cylinder 102, the static position of rubber ball 303 is closer to the vacuum valve device. In the next round of tapping cycles, although the elastic potential energy stored and released by spring c304 does not change with each round, the initial gap between the vacuum valve device and rubber ball 303 gradually shortens, and the bounce stroke required by connecting rod b302 for each round of recoil is significantly reduced. The shorter recoil stroke allows rubber ball 303 to impact the surface of the vacuum valve device at a higher speed and in a shorter time.

[0109] With the same spring release potential energy, a shorter bounce stroke reduces energy loss during movement, increases instantaneous impact velocity, and gradually increases the peak impact force. This design effectively improves the impact effect by lowering the position of the vacuum valve device, achieving a step-by-step increase in impact energy and significantly enhancing the detection strength of dynamic excitation.

[0110] In this embodiment, a spring f413 is connected between the oil cylinder 102 and the testing platform 100 to provide a return force when the oil cylinder 102 is driven downward.

[0111] A ratchet mechanism 414 is disposed between gear b405 and connecting shaft 404. This mechanism controls the unidirectional rotation of gear b405, allowing it to rotate only in a predetermined direction and preventing it from retracting during lulls in movement. Ratchet mechanism 414 can employ a pawl-type structure to ensure that gear b405 maintains its completed step angle when the slider 307 releases its transmission path, preventing rebound of cylinder 102 and ensuring reliable locking of the cylinder's stepwise downward movement.

[0112] With this arrangement, during use, each time the slider 307 reciprocates, the pusher 409 drives the rotating shaft 400, the spiral opening 402, and the stop lever in a coordinated manner during the return stroke, gradually driving the rotating shaft 400 to rotate in a rhythmic manner. The rotating shaft 400 is unidirectionally meshed with the gear b 405 via the incomplete gear a 403, driving the gear b 405 to achieve segmented stepwise rotation.

[0113] The rotation of gear b405 is linked through connecting rods a406 and b408, driving the oil cylinder 102 to gradually move downward along the slide rail of the testing platform 100, forming a movement path in which the oil cylinder 102 and the vacuum valve device approach each other step by step.

[0114] A ratchet mechanism 414, installed between gear b405 and connecting shaft 404, ensures that gear b405 can only rotate in a predetermined direction. When the return driving force of slider 307 is removed, ratchet mechanism 414 automatically locks gear b405, preventing cylinder 102 from returning to its original position due to the elastic recovery of spring f413. This ensures that the staged downward movement of cylinder 102 remains stable and irreversible, preventing cylinder 102 from rebounding during the impact and interfering with detection accuracy.

[0115] Furthermore, gear b405 gradually pulls cylinder 102 downward. Ratchet mechanism 414 ensures that each step of cylinder 102's movement remains unidirectional, preventing rebound. After slider 307 moves continuously for several steps, gear b405's cumulative rotation reaches the set angle (180°). At this point, connecting rod a406 moves downward to the preset end of travel, entering the homing trigger position.

[0116] In this state, the cylinder 102 has completed its entire descending stroke. After the slider 307 moves to complete the last knocking cycle operation, when the slider 307 returns to its original position, the spring f413 continues to be stretched and stores elastic potential energy during the downward movement of the cylinder 102. Since the connecting rod a406 moves down to the lowest point, the connecting rod system is in a tensioned state.

[0117] Because the one-way restriction formed by ratchet mechanism 414 on gear b405 doesn't prevent clockwise rotation, the tension of spring f413 smoothly drives gear b405 to continue rotating clockwise, ensuring that cylinder 102 smoothly moves upward along the return track of test platform 100 until cylinder 102 and the vacuum valve device return to their initial test position. This ensures that after completing the full-process inspection of the vacuum device, cylinder 102 and the vacuum device can be automatically reset immediately, quickly preparing for the next round of testing, avoiding additional reset steps, and improving test cycle efficiency.

[0118] While embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that various changes, modifications, substitutions, and variations may be made to these embodiments without departing from the principles and spirit of the invention, and that the scope of the invention is defined by the appended claims and their equivalents.

Claims

1. A vacuum device airtightness detection device, comprising a detection platform (100), wherein the detection platform (100) is provided with two support frames (101) for placing vacuum valve devices; Two oil cylinders (102) provided in the testing platform (100); It is characterized by: Also includes: Two detection parts (103) provided in the detection platform (100) are respectively connected to the telescopic shafts of the corresponding oil cylinders (102), and the detection parts (103) are provided with a micro-flow regulating valve (104) and an air pressure sensor (105); A vacuum pump (106) and a gas supply pump (107) provided on the detection platform (100) are respectively connected to the two detection parts (103); A bracket (108) is provided in the detection platform (100), and a plurality of knocking platforms (109) are provided on the bracket (108); An excitation component provided between the detection platform (100) and the bracket (108), used for moving the striking platform (109) to impact the vacuum device on the supporting frame (101); The detection part (103) includes an air ring a (200) and an air ring b (201), one side of the air ring b (201) is provided with an air port (202) for connecting to the end of the vacuum valve, a hose a (203) is connected between the air ring a (200) and the air ring b (201), a connecting pipe (204) is connected to the air ring a (200), the micro-flow regulating valve (104) is arranged in the connecting pipe (204), the air pressure sensor (105) is arranged in the air ring a (200), the vacuum pump (106) and the gas supply pump (107) are respectively connected with a hose b (205), the hose b (205) on the vacuum pump (106) is connected to one of the connecting pipes (204), and the hose b (205) on the gas supply pump (107) is connected to the other connecting pipe (204).

2. The airtightness detection device for a vacuum device according to claim 1, characterized in that: The side wall of the air ring b (201) is connected to a sealing gasket (206).

3. The airtightness detection device for a vacuum device according to claim 1, characterized in that: The other side of the air ring b (201) is connected to a sliding frame (207), the air ring a (200) is fixed on the telescopic shaft of the oil cylinder (102), the sliding frame (207) is slidably connected to the telescopic shaft of the oil cylinder (102), and a spring a (208) is connected between the telescopic shafts of the oil cylinder (102).

4. The airtightness detection device for a vacuum device according to claim 1, characterized in that: The knocking table (109) includes a connecting rod a (300) slidably connected to the bracket (108), a spring b (301) is connected between the connecting rod a (300) and the bracket (108), the top of the connecting rod a (300) extends to the top of the bracket (108) and is slidably connected to the connecting rod b (302), the top of the connecting rod b (302) is connected to a rubber ball (303), a spring c (304) is connected between the connecting rod b (302) and the bracket (108), and a magnet (305) is connected inside the connecting rod b (302) and is magnetically attracted to the connecting rod a (300).

5. The airtightness detection device for a vacuum device according to claim 4, characterized in that: The excitation component includes a lead screw (306) rotatably connected to the bracket (108), a slider (307) threadedly engaged with the lead screw (306) is slidably connected to the bracket (108), the lead screw (306) is a reciprocating lead screw (306), a downward pressure channel (308) is provided on the top of the slider (307), the bottom of the connecting rod a (300) is connected to a boss (313), and the side wall of the boss (313) is provided with an oblique opening (309) corresponding to the downward pressure channel (308).

6. The airtightness detection device for a vacuum device according to claim 5, characterized in that: The excitation component is capable of moving the position of the support frame (101) while moving the striking platform (109), so that the support frame (101) leaves the vacuum device; An avoidance convex rod (310) is connected between the two support frames (101), the avoidance convex rod (310) is located at the bottom of the slider (307), and the protruding portion of the avoidance convex rod (310) is higher than the bottom height of the slider (307). A spring d (311) is connected between the support frame (101) and the detection platform (100).

7. The airtightness detection device for a vacuum device according to claim 5, characterized in that: A motor (312) is connected to the bracket (108), and a drive shaft of the motor (312) is connected to the lead screw (306).

8. The airtightness detection device for a vacuum device according to claim 1, characterized in that: After completing the cyclic movement of the plurality of striking platforms (109), the excitation component can also push the telescopic shaft of the oil cylinder (102) downward by a predetermined distance, so that the vacuum valve device gradually approaches the striking platform (109); The bracket (108) is rotatably connected to a rotating shaft (400), the rotating shaft (400) is connected to a guide cylinder (401), the guide cylinder (401) is provided with a spiral opening (402), both ends of the rotating shaft (400) are connected to gears a (403), the gear a (403) is an incomplete gear, the detection platform (100) is connected to a connecting shaft (404), the connecting shaft (404) is rotatably connected to a gear b (405) adapted to the gear a (403), the gear b (405) is rotatably connected to a connecting rod a (406), The oil cylinder (102) is slidably connected to the inspection platform (100), and a connecting frame (407) is connected to the oil cylinder (102). A connecting rod b (408) rotatably connected to the connecting rod a (406) is fixed to the bottom of the connecting frame (407). A push frame (409) is slidably connected to the bracket (108), and a spring e (410) is connected between the push frame (409) and the bracket (108). A one-way rotation groove (411) is provided at the bottom of the push frame (409), and a guide rod (412) is rotatably connected in the one-way rotation groove (411).

9. The airtightness detection device for a vacuum device according to claim 8, characterized in that: A spring f (413) is connected between the oil cylinder (102) and the detection platform (100), and a ratchet mechanism (414) is connected between the gear b (405) and the connecting shaft (404).

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