Vacuum pump pumping speed regulating valve of vacuum welding furnace

Abstract

The invention relates to the technical field of vacuum welding, and particularly discloses a vacuum pump pumping speed regulating valve of a vacuum welding furnace, which comprises a valve seat, a valve rod, a valve rod and a valve rod, the outer ring is fixed in the vacuum pipeline, and the outer surface of the outer ring abuts against the inner wall of the vacuum pipeline; a valve plate; a valve rod; and a telescopic member. According to the multi-stage gas extraction device, low-speed gas extraction is achieved by controlling the rotating angles of the two sets of inner circular plates, high-speed gas extraction is achieved by controlling the rotating angles of the two sets of inner circular plates and the rotating angles of the multiple sets of outer circular plates, and therefore multi-stage adjustment is achieved, the adjustment precision is improved, the gas extraction speed and the gas extraction time precision are improved, and then the welding quality is improved.

Description

Technical Field

[0001] The present invention relates to the technical field of vacuum welding, and in particular to a vacuum pump speed regulating valve of a vacuum welding furnace. Background Art

[0002] As electronic component packaging sizes continue to shrink and power levels increase, the demand for void-free soldering has emerged. Since soldering in a low-oxygen or oxygen-free environment can reduce voids during the soldering process and improve soldering quality, people are accordingly looking for ways to perform soldering in low-oxygen or oxygen-free environments. A vacuum soldering furnace is a device that enables soldering in low-oxygen or oxygen-free environments.

[0003] Vacuum welding furnaces are equipped with a vacuum pump to extract gas from the process chamber, reducing the internal pressure and achieving a vacuum state. The speed of gas extraction affects the weld quality and void ratio of the product. Different products require different gas extraction times (the time it takes to achieve vacuum) to meet the welding process requirements. Currently, a regulating valve, such as a butterfly valve, is typically installed on the vacuum pipeline. The extraction speed is controlled by adjusting the angle of the butterfly valve. However, the control base of the butterfly valve is large when the angle is rotated, and the control accuracy is poor. This leads to poor precision in controlling the extraction speed and gas extraction time, which in turn reduces welding quality. Summary of the Invention

[0004] The purpose of the present invention is to address the shortcomings of the existing technology and provide a vacuum pump speed regulating valve for a vacuum welding furnace to solve the technical problem that the current regulating valve has poor accuracy in adjusting the vacuum speed, resulting in reduced welding quality.

[0005] The purpose of the present invention can be achieved through the following technical solutions: A vacuum pump speed regulating valve for a vacuum welding furnace, the regulating valve comprising: A valve seat, the valve seat being mounted on a vacuum pipe connected to a vacuum welding furnace; an outer ring, wherein the outer ring is fixed in the vacuum pipe, and an outer surface of the outer ring abuts against an inner wall of the vacuum pipe; The valve plate has two rotating shafts arranged in parallel on the outer ring, and the valve plate is symmetrically mounted on the two rotating shafts. The valve plate is semicircular and includes an inner circular plate and a plurality of outer circular rings concentric with the inner circular plate from the inside to the outside; The valve stem is installed in the valve seat, and the valve stem passes through the valve seat, the vacuum pipe and the outer ring. The valve stem includes an inner rod and several outer sleeves coaxial with the inner rod from the inside to the outside. The inner rod moves up and down to drive the two sets of inner circular plates to rotate, and the several outer sleeves move up and down to respectively drive the several sets of symmetrical outer rings to rotate; Telescopic parts: a plurality of telescopic parts are installed in the valve seat, and the plurality of telescopic parts respectively drive the inner rod and the plurality of outer sleeves to move up and down.

[0006] As a preferred embodiment of the above technical solution, the vertical sections of the inner circular plate and the outer circular ring are provided with gears, the gears on the symmetrical inner circular plate and the symmetrical outer circular ring are meshed with each other, the inner rod and the outer sleeve are symmetrically provided with two sleeve rods, the vertical sections of the inner circular plate and several outer circular rings are provided with spiral grooves, and the two sleeve rods are respectively sleeved in two symmetrical sets of spiral grooves.

[0007] As a preferred embodiment of the above technical solution, a plurality of outer sleeves are provided with through holes on their peripheries, and the push plates installed on the telescopic members pass through the through holes and are connected to the inner rods or outer sleeves of the inner layer.

[0008] As a preferred embodiment of the above technical solution, an auxiliary valve is installed on the top of the valve seat. The auxiliary valve has the same structure as the outer ring and valve plate in the vacuum pipe. The top of the valve stem is connected to the auxiliary valve, and the auxiliary valve is opened or closed synchronously with the valve plate.

[0009] As a preferred embodiment of the above technical solution, an arc-shaped plate is provided on the outer ring, and the arc-shaped plate blocks the front end of the valve plate, and the valve plate and the end face of the arc-shaped plate are abutted. A telescopic cover is also installed on the outer ring, and the telescopic cover blocks the rear end of the valve plate, and the valve plate and the end face of the telescopic cover are abutted. The telescopic cover is divided into several sections corresponding to the inner circular plate and several outer circular rings respectively.

[0010] As a preferred embodiment of the above technical solution, an arc-shaped groove is opened in the arc-shaped plate, a partition is fixed in the middle position of the arc-shaped groove, a sealing plate is symmetrically and movably installed in the arc-shaped groove, and an elastic member 2 is connected between the sealing plate and the partition, and the sealing plate is divided into several sections corresponding to the inner circular plate 11 and several outer circular rings respectively.

[0011] As a preferred embodiment of the above technical solution, sealing rings are installed through the peripheries of the inner circular plate and several outer circular rings, and pull plates are movably provided inside the inner circular plate and the outer circular rings, and the pull plates are connected to the sealing rings through connecting plates, and several elastic parts are connected between the pull plates and the inner walls of the inner circular plate or the outer circular rings. Movable plates are rotatably installed on the inner circular plate and the outer circular rings, and the movable plates on the two symmetrical groups of inner circular plates are hinged together, and the movable plates on the two symmetrical groups of outer circular rings are also hinged together. The inner circular plate and the outer circular rings are both provided with through holes, and the movable plates extend into the inner circular plate or the outer circular ring through the through holes, and the end of the movable plate is against the inner side of the pull plate, and the movable plate is located at the rear end of the valve plate.

[0012] As a preferred embodiment of the above technical solution, a filter is provided on the outer ring, the filter is located at the front end of the valve plate, a turbine is rotatably installed at the center of the filter, a cleaning brush is provided on the shaft of the turbine, and the cleaning brush is against the surface of the filter.

[0013] The beneficial effects of the present invention are: 1. In the present invention, low-rate gas extraction is achieved by controlling the rotation angle of the two groups of inner circular plates, and high-rate gas extraction is achieved by controlling the rotation angle of the two groups of inner circular plates and several groups of outer circular rings. In this way, multi-stage regulation is achieved, thereby improving the regulation accuracy, improving the accuracy of controlling the gas extraction speed and gas extraction time, and thus improving the welding quality; 2. In the present invention, the pumping speed is controlled by rotating the valve plates in opposite directions. In this way, the outer arc surface of the valve plates is oriented in the direction of gas flow after the valve plates rotate. Compared with the traditional butterfly valve, the problem of the outer arc surface of the rear end of the valve being unevenly stressed and causing shaking is less likely to occur. This improves the stability of the valve plates after adjustment, improves the adjustment accuracy, improves the accuracy of controlling the pumping speed and gas extraction time, and thus improves the welding quality. 3. In the present invention, the outer arc surface of the valve plate is oriented toward the gas flow direction after the valve plate rotates, so that the outer arc surface of the valve plate is not easily eroded during gas flow, thereby effectively avoiding damage to the outer arc surface of the valve plate, thereby ensuring the sealing of the valve plate. The cooperation between the inner circular plate and the plurality of outer circular rings sleeved on the outer surface of the inner circular plate further improves the adjustment accuracy, improves the accuracy of controlling the pumping speed and the gas extraction time, and thus improves the welding quality. 4. In the present invention, when the valve plate is closed, the sealing performance of the valve plate is improved by the sealing ring. When the valve plate is rotated to open, the two movable plates also rotate toward each other, which causes the end of the movable plate to slowly separate from the inner side of the pull plate. Through the rebound ability of a number of elastic parts, the pull plate pulls the sealing ring to retract into the valve plate, thereby reducing the risk of gas eroding the sealing ring, ensuring the sealing performance of the sealing ring, and thus ensuring the sealing performance of the valve plate. BRIEF DESCRIPTION OF THE DRAWINGS

[0014] Figure 1 It is a schematic diagram of the overall structure of the present invention; Figure 2 Schematic diagram of the regulating valve structure; Figure 3 It is a schematic diagram of the overall structure of the regulating valve; Figure 4 Schematic diagram of the connection structure between the valve stem and the telescopic member; Figure 5 Schematic diagram of the valve plate and outer ring structure; Figure 6 This is a schematic diagram of the structure after the valve stem and valve plate are separated; Figure 7 Schematic diagram of the outer ring structure; Figure 8 This is a schematic diagram of the outer ring cross-section structure; Figure 9 Schematic diagram of the movable plate structure; Figure 10Schematic diagram of the internal structure of the valve plate.

[0015] In the picture: 1. Vacuum pipe; 2. Valve seat; 3. Valve plate; 31. Gear; 32. Spiral groove; 33. Perforation; 34. Sealing ring; 35. Pull plate; 351. Connecting plate; 36. Elastic part 1; 4. Valve stem; 41. Sleeve rod; 42. Through hole; 5. Outer ring; 51. Arc plate; 511. Arc groove; 512. Partition; 513. Sealing plate; 514. Elastic part 2; 52. Telescopic cover; 53. Rotating shaft; 6. Telescopic part; 61. Push plate; 7. Movable plate; 8. Filter; 9. Turbine; 91. Cleaning brush; 10. Auxiliary valve; 11. Inner plate; 12. Outer ring; 13. Inner rod; 14. Outer sleeve. DETAILED DESCRIPTION

[0016] The following will clearly and completely describe the technical solutions in the embodiments of the present invention in conjunction with the accompanying drawings. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without making any creative efforts shall fall within the scope of protection of the present invention.

[0017] like Figures 1-6 As shown, a vacuum pump speed regulating valve for a vacuum welding furnace, the regulating valve comprises: The valve seat 2 is installed on the vacuum pipe 1 connected to the vacuum welding furnace; The outer ring 5 is fixed in the vacuum pipe 1, and the outer surface of the outer ring 5 abuts against the inner wall of the vacuum pipe 1; The valve plate 3 and the outer ring 5 are provided with two rotating shafts 53 in parallel. The valve plate 3 is symmetrically mounted on the two rotating shafts 53. The valve plate 3 is semicircular and includes, from the inside to the outside, an inner circular plate 11 and a plurality of outer circular rings 12 concentric with the inner circular plate 11. The valve stem 4 is installed in the valve seat 2. The valve stem 4 passes through the valve seat 2, the vacuum pipe 1 and the outer ring 5. The valve stem 4 includes an inner rod 13 and a plurality of outer sleeves 14 coaxial with the inner rod 13 from the inside to the outside. The inner rod 13 moves up and down to drive the two groups of inner circular plates 11 to rotate, and the plurality of outer sleeves 14 move up and down to respectively drive the plurality of symmetrical outer rings 12 to rotate. Telescopic parts 6: Several telescopic parts 6 are installed in the valve seat 2, and the several telescopic parts 6 respectively drive the inner rod 13 and the several outer sleeves 14 to move up and down.

[0018] Furthermore, the vertical sections of the inner circular plate 11 and the outer circular ring 12 are provided with gears 31, and the gears 31 on the symmetrical inner circular plate 11 and the symmetrical outer circular ring 12 are engaged with each other. Two sleeve rods 41 are symmetrically provided on the periphery of the inner rod 13 and the outer sleeve 14. The vertical sections of the inner circular plate 11 and several outer circular rings 12 are provided with spiral grooves 32, and the two sleeve rods 41 are respectively sleeved in two symmetrical sets of spiral grooves 32.

[0019] Furthermore, a through hole 42 is formed on the periphery of each of the outer sleeves 14 , and the push plate 61 installed on the telescopic member 6 passes through the through hole 42 and is connected to the inner rod 13 or the outer sleeve 14 of the inner layer.

[0020] In actual application of this embodiment, the valve stem 4 is driven downward by the telescopic member 6, so that the sleeve rod 41 is moved downward, thereby rotating the valve plate 3, and cooperating with the mutually meshing gears 31 on the symmetrical valve plates 3, so that the two groups of valve plates 3 rotate toward each other, and the exhaust speed is controlled by controlling the rotation angle of the two groups of valve plates 3. Specifically, low-rate exhaust is achieved by controlling the rotation angle of the two groups of inner circular plates 11, and high-rate exhaust is achieved by controlling the rotation angle of the two groups of inner circular plates 11 and the plurality of groups of outer circular rings 12. In this way, multi-stage regulation is achieved, thereby improving the regulation accuracy, improving the accuracy of controlling the exhaust speed and gas extraction time, and thus improving the welding quality. By rotating the valve plates 3 in opposite directions to control the pumping speed, the outer arc surface of the valve plates 3 is oriented toward the gas flow direction after the valve plates 3 rotate. Compared with the traditional butterfly valve, the problem of uneven force on the outer arc surface of the rear end of the valve and shaking is less likely to occur, thereby improving the stability of the valve plates 3 after adjustment, improving the adjustment accuracy, and improving the accuracy of controlling the pumping speed and gas extraction time, thereby improving the welding quality. By making the outer arc surface of the valve plate 3 face the direction of gas flow after the valve plate 3 is rotated, it is not easy to erode the outer arc surface of the valve plate 3 when the gas flows, thereby effectively avoiding damage to the outer arc surface of the valve plate 3, thereby ensuring the sealing of the valve plate 3, and through the cooperation of the inner circular plate 11 and the multiple outer circular rings 12 sleeved on its outer surface, the adjustment accuracy is further improved, and the accuracy of controlling the exhaust speed and gas extraction time is improved, thereby improving the welding quality.

[0021] Furthermore, an auxiliary valve 10 is installed on the top of the valve seat 2. The auxiliary valve 10 has the same structure as the outer ring 5 and the valve plate 3 in the vacuum pipe 1. The top of the valve stem 4 is connected to the auxiliary valve 10. The auxiliary valve 10 and the valve plate 3 are opened or closed synchronously.

[0022] In actual application of this embodiment, when the telescopic member 6 drives the valve stem 4 to move downward and causes the symmetrical valve plates 3 to rotate toward each other, the valve stem 4 will also open the auxiliary valve 10, and the opening angle is the same as the rotation angle of the valve plate 3. In this way, the rotation angle of the valve plate 3 can be seen intuitively, thereby further improving the adjustment accuracy, improving the accuracy of controlling the exhaust speed and gas extraction time, and thus improving the welding quality.

[0023] like Figure 7 and Figure 8 As shown, an arc-shaped plate 51 is provided on the outer ring 5, and the arc-shaped plate 51 blocks the front end of the valve plate 3, and the end surface of the valve plate 3 and the arc-shaped plate 51 are against each other. A telescopic cover 52 is also installed on the outer ring 5, and the telescopic cover 52 blocks the rear end of the valve plate 3, and the end surface of the valve plate 3 and the telescopic cover 52 are against each other. The telescopic cover 52 is divided into several sections corresponding to the inner circular plate 11 and several outer circular rings 12 respectively.

[0024] Furthermore, an arc-shaped groove 511 is opened in the arc-shaped plate 51, a partition 512 is fixed in the middle position of the arc-shaped groove 511, a sealing plate 513 is symmetrically and movably installed in the arc-shaped groove 511, and an elastic member 514 is connected between the sealing plate 513 and the partition 512. The sealing plate 513 is divided into several sections corresponding to the inner circular plate 11 and several outer circular rings 12 respectively.

[0025] In actual application of this embodiment, when the two sets of valve plates 3 are closed, the arcuate plate 51 blocks the gap between the two sets of valve plates 3, thereby ensuring the sealing of the two sets of valve plates 3 when closed. When the two sets of valve plates 3 are rotated to open, the sealing plate 513 in the arcuate groove 511 extends out from the arcuate groove 511, so that when the valve plates 3 rotate, the gap between the two sets of valve plates 3 is also blocked by the arcuate plate 51 and the two sealing plates 513, thereby ensuring the sealing of the two sets of valve plates 3 when they are opened, preventing gas leakage, thereby improving the adjustment accuracy, improving the accuracy of controlling the gas extraction speed and gas extraction time, and thus improving the welding quality; When the valve plate 3 rotates, the telescopic cover 52 contracts, and the telescopic cover 52, the sealing plate 513 and the arc plate 51 completely block the gap between the two sets of valve plates 3. This not only improves the sealing performance of the valve plates 3 when opening and closing, but also effectively prevents gas from entering between the two sets of valve plates 3 and causing gas corrosion of components such as the gear 31, the spiral groove 32, and the sleeve rod 41, thereby ensuring that the valve plates 3 can be opened and closed normally.

[0026] like Figure 4 、 Figure 9 and Figure 10As shown, sealing rings 34 are installed through the periphery of the inner circular plate 11 and the plurality of outer circular rings 12, and pull plates 35 are movably provided in the inner circular plate 11 and the outer circular ring 12. The pull plates 35 are connected to the sealing ring 34 through connecting plates 351, and a plurality of elastic members 36 are connected between the pull plates 35 and the inner walls of the inner circular plate 11 or the outer circular ring 12. A movable plate 7 is rotatably installed on the inner circular plate 11 and the outer circular ring 12. The movable plates 7 on the two symmetrical groups of inner circular plates 11 are hinged together, and the movable plates 7 on the two symmetrical groups of outer circular rings 12 are also hinged together. A through hole 33 is provided on the inner circular plate 11 and the outer circular ring 12, and the movable plate 7 extends through the through hole 33 into the inner circular plate 11 or the outer circular ring 12. The end of the movable plate 7 is against the inner side of the pull plate 35, and the movable plate 7 is located at the rear end of the valve plate 3.

[0027] In actual application, although the outer arc surface of the valve plate 3 is oriented towards the gas flow direction after the valve plate 3 is rotated, the gas is not easy to flush the outer arc surface of the valve plate 3 when flowing, but the gas may still flush the outer arc surface of the valve plate 3, which still reduces the sealing performance of the valve plate 3; when the valve plate 3 is closed, the sealing performance of the valve plate 3 is improved by the sealing ring 34, and when the valve plate 3 is rotated to open, the two movable plates 7 also rotate towards each other, which causes the end of the movable plate 7 to slowly separate from the inner side of the pull plate 35, and the rebound ability of the plurality of elastic members 36 is used to make the pull plate 35 pull the sealing ring 34 to retract into the valve plate 3, thereby reducing the risk of gas flushing the sealing ring 34, ensuring the sealing performance of the sealing ring 34, and thus ensuring the sealing performance of the valve plate 3.

[0028] like Figure 2 and Figure 3 As shown, a filter screen 8 is provided on the outer ring 5, and the filter screen 8 is located at the front end of the valve plate 3. A turbine 9 is rotatably installed at the center of the filter screen 8. A cleaning brush 91 is provided on the shaft of the turbine 9, and the cleaning brush 91 is against the surface of the filter screen 8.

[0029] In actual application of this embodiment, some welding impurities will be generated during vacuum welding. These welding impurities will flow to the valve plate 3 along with the extracted gas, thereby causing the outer arc surface of the valve plate 3 to be eroded and damaged; by setting the filter 8, these welding impurities can be filtered out, effectively preventing these welding impurities from damaging the outer arc surface of the valve plate 3, thereby ensuring the sealing of the valve plate 3; the flowing airflow will drive the turbine 9 to rotate, and the rotation of the turbine 9 will cause the cleaning brush 91 to rotate to clean the filter 8, thus avoiding clogging of the filter 8, thereby ensuring the gas flow, improving the accuracy of controlling the exhaust speed and gas extraction time, and thus improving the welding quality.

[0030] The basic principles, main features, and advantages of the present invention are shown and described above. Those skilled in the art should understand that the present invention is not limited to the above embodiments. The above embodiments and descriptions are merely illustrative of the principles of the present invention. Various changes and modifications may be made to the present invention without departing from the spirit and scope of the present invention, and such changes and modifications fall within the scope of the invention as claimed.

Claims

1. A vacuum pump speed regulating valve for a vacuum welding furnace, characterized in that: The regulating valve comprises: A valve seat (2), the valve seat (2) being mounted on a vacuum pipe (1) connected to a vacuum welding furnace; An outer ring (5), the outer ring (5) being fixed in the vacuum pipe (1), the outer surface of the outer ring (5) being in contact with the inner wall of the vacuum pipe (1); A valve plate (3), wherein two rotating shafts (53) are arranged in parallel on the outer ring (5), and the valve plate (3) is symmetrically mounted on the two rotating shafts (53), and the valve plate (3) is semicircular, and the valve plate (3) includes, from the inside to the outside, an inner circular plate (11) and a plurality of outer circular rings (12) concentric with the inner circular plate (11); A valve stem (4), wherein the valve seat (2) is provided with a valve stem (4), the valve stem (4) passes through the valve seat (2), the vacuum pipe (1) and the outer ring (5), and the valve stem (4) comprises, from the inside to the outside, an inner rod (13) and a plurality of outer sleeves (14) coaxial with the inner rod (13), wherein the inner rod (13) moves up and down to drive the two groups of inner circular plates (11) to rotate, and the plurality of outer sleeves (14) move up and down to respectively drive the plurality of symmetrical outer circular rings (12) to rotate; Telescopic parts (6), a plurality of telescopic parts (6) are installed in the valve seat (2), and the plurality of telescopic parts (6) respectively drive the inner rod (13) and the plurality of outer sleeves (14) to move up and down.

2. The vacuum pump speed regulating valve for a vacuum welding furnace according to claim 1, characterized in that: The vertical sections of the inner circular plate (11) and the outer circular ring (12) are both provided with gears (31), and the gears (31) on the symmetrical inner circular plates (11) and the symmetrical outer circular rings (12) are meshed with each other. Two sleeve rods (41) are symmetrically provided on the periphery of the inner rod (13) and the outer sleeve (14). The vertical sections of the inner circular plate (11) and the plurality of outer circular rings (12) are both provided with spiral grooves (32), and the two sleeve rods (41) are respectively sleeved in the two symmetrical sets of spiral grooves (32).

3. The vacuum pump speed regulating valve for a vacuum welding furnace according to claim 2, characterized in that: A through hole (42) is provided on the periphery of the plurality of outer sleeves (14), and a push plate (61) mounted on the telescopic member (6) passes through the through hole (42) and is connected to the inner rod (13) or the outer sleeve (14) of the inner layer.

4. The vacuum pump speed regulating valve for a vacuum welding furnace according to claim 3, characterized in that: An auxiliary valve (10) is installed on the top of the valve seat (2). The auxiliary valve (10) has the same structure as the outer ring (5) and the valve plate (3) in the vacuum pipe (1). The top end of the valve stem (4) is connected to the auxiliary valve (10). The auxiliary valve (10) and the valve plate (3) are opened or closed synchronously.

5. The vacuum pump speed regulating valve for a vacuum welding furnace according to claim 3, characterized in that: The outer ring (5) is provided with an arc plate (51), the arc plate (51) blocks the front end of the valve plate (3), and the end faces of the valve plate (3) and the arc plate (51) abut against each other. The outer ring (5) is also provided with a telescopic cover (52), the telescopic cover (52) blocks the rear end of the valve plate (3), and the end faces of the valve plate (3) and the telescopic cover (52) abut against each other. The telescopic cover (52) is divided into a plurality of sections corresponding to the inner circular plate (11) and a plurality of outer circular rings (12).

6. The vacuum pump speed regulating valve for a vacuum welding furnace according to claim 5, characterized in that: An arc-shaped groove (511) is provided in the arc-shaped plate (51), a partition (512) is fixed in the middle of the arc-shaped groove (511), a sealing plate (513) is symmetrically and movably installed in the arc-shaped groove (511), and a second elastic member (514) is connected between the sealing plate (513) and the partition (512), and the sealing plate (513) is divided into several sections corresponding to the inner circular plate (11) and several outer circular rings (12).

7. The vacuum pump speed regulating valve for a vacuum welding furnace according to claim 3, characterized in that: The outer peripheries of the inner circular plate (11) and the plurality of outer circular rings (12) are penetrated by sealing rings (34), and the inner circular plate (11) and the outer circular rings (12) are movably provided with pull plates (35), and the pull plates (35) are connected to the sealing rings (34) through connecting plates (351), and a plurality of elastic members (36) are connected between the pull plates (35) and the inner walls of the inner circular plate (11) or the outer circular rings (12), and movable plates are rotatably installed on the inner circular plate (11) and the outer circular rings (12). (7), the movable plates (7) on the two symmetrical groups of inner circular plates (11) are hinged together, and the movable plates (7) on the two symmetrical groups of outer circular rings (12) are also hinged together, and the inner circular plates (11) and the outer circular rings (12) are both provided with through holes (33), and the movable plates (7) pass through the through holes (33) and extend into the inner circular plates (11) or the outer circular rings (12), and the end of the movable plate (7) abuts against the inner side of the pull plate (35), and the movable plate (7) is located at the rear end of the valve plate (3).

8. The vacuum pump speed regulating valve for a vacuum welding furnace according to claim 3, characterized in that: A filter (8) is provided on the outer ring (5), and the filter (8) is located at the front end of the valve plate (3). A turbine (9) is rotatably mounted at the center of the filter (8), and a cleaning brush (91) is provided on the shaft of the turbine (9), and the cleaning brush (91) is in contact with the surface of the filter (8).

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