Fluid device

Abstract

The invention provides a fluid device. A fixing mechanism (10) for fixing a fluid resistance element (2) to an internal flow path (R), the fixing mechanism (10) being capable of reducing positional displacement or vibration of the fluid resistance element in the flow path and fixing the fluid resistance element to the flow path, the fixing mechanism (10) being provided with: an element holder (3) for holding the fluid resistance element (2); a holder attachment part (4) which is formed in the flow path block (B) so as to communicate with the internal flow path (R) and to which the component holder (3) is attached; and a sealing member (5) that is interposed between the element holder (3) and the holder attachment section (4), and that is positioned and attached to the holder attachment section (4) in a state in which the sealing member (5) is flattened by a surface of the element holder (3) and the holder attachment section (4) facing the element holder (3).

Description

Technical Field

[0001] The present invention relates to a fluid device for controlling or measuring a physical quantity of a fluid. Background Art

[0002] As a conventional fluid control device, as described in Patent Document 1, a pressure-type fluid control device includes a fluid resistance element installed in an internal flow channel through which the fluid flows. In this fluid control device, the flow rate of the fluid flowing in the internal flow channel is measured based on the pressure difference between the upstream and downstream pressures of the fluid resistance element, and the flow rate is controlled by a fluid control valve. A ceramic fluid resistance element (hereinafter referred to as a ceramic flow restrictor) is used as the fluid resistance element.

[0003] Due to the nearly non-deformable nature of ceramics, securing the ceramic restrictor to the flow channel is difficult. Furthermore, in Patent Document 1, a cylindrical ceramic restrictor is embedded in a cylindrical metal cover, which is then embedded in the internal flow channel and secured. However, this fixing method is technically difficult and presents numerous challenges in practical implementation.

[0004] On the other hand, as a method of fixing the ceramic restrictor to the internal flow channel, e.g. Figure 8 As shown, a structure is considered in which the flow channel block with the internal flow channel is split into two to secure the ceramic flow restrictor. Specifically, the ceramic flow restrictor is inserted into the two split blocks, and an O-ring is sandwiched between the two split blocks. This way, the compressed O-ring seals the gap between the ceramic flow restrictor and the internal flow channel, securing the ceramic flow restrictor in place.

[0005] However, this fixing method causes positional deviation of the ceramic restrictor, which can be a major factor in responsiveness variations, particularly in fluid control devices. Furthermore, due to the internal volume variations between the ceramic restrictor and the fluid control valve, the time required to discharge gas from the internal volume (the response time of a decrease) can vary, leading to responsiveness variations. Furthermore, since the ceramic restrictor is fixed with an O-ring, the pressure exerted on it by the fluid causes it to vibrate, resulting in fluctuations in the measured flow rate.

[0006] Patent Document 1: International Publication No. WO2021 / 095492 Summary of the Invention

[0007] Therefore, the present invention has been made to solve the above-mentioned problems, and an object of the present invention is to reduce positional deviation or vibration of a fluid resistance element in an internal flow path and to fix the fluid resistance element to the internal flow path.

[0008] That is, the fluid device of the present invention controls or measures the physical quantity of the fluid, and comprises: a flow channel block, which forms an internal flow channel; a fluid resistance element, which is arranged in the internal flow channel and forms a resistance flow channel connected to the internal flow channel; and a fixing mechanism, which fixes the fluid resistance element to the internal flow channel, and the fixing mechanism comprises: an element bracket, which holds the fluid resistance element; a bracket mounting portion, which is formed in the flow channel block to be connected to the internal flow channel and to mount the element bracket; and a sealing component, which is located between the element bracket and the bracket mounting portion, and in a state in which the sealing component is flattened by the element bracket and the surface of the bracket mounting portion opposite to the element bracket, the element bracket is positioned and mounted on the bracket mounting portion.

[0009] In such a fluid device, the element holder is positioned and mounted to the holder mounting portion while the sealing member is compressed by the element holder holding the fluid resistance element and the surface of the holder mounting portion facing the element holder. This reduces positional deviation and vibration of the fluid resistance element in the internal flow path, and secures the fluid resistance element to the internal flow path. Consequently, variations in response performance associated with positional deviation of the fluid resistance element can be reduced, as can fluctuations in measured values ​​associated with vibration of the fluid resistance element.

[0010] Preferably, the element holder holds the end of the fluid resistance element in a state of extending outward, and the sealing component seals between a portion of the fluid resistance element extending outward from the element holder and a surface of the holder mounting portion opposite to the extending portion. With this structure, it is possible to prevent the fluid from leaking from the gap between the fluid resistance element and the element holder and the gap between the element holder and the holder mounting portion.

[0011] Preferably, the element holder or the holder mounting portion has a contact surface that comes into contact with an end surface of the fluid resistance element in a state where the fluid resistance element is held. This structure allows the fluid resistance element to be positioned during assembly of the fluid device. Furthermore, if the element holder or the holder mounting portion has a contact surface that contacts the downstream end surface of the fluid resistance element, the problem of the fluid resistance element being displaced downstream due to pressure from the fluid when the fluid flows through the fluid resistance element can be effectively resolved.

[0012] Preferably, an outflow port of the resistance flow path is formed on a downstream end surface of the fluid resistance element, and the contact surface is in contact with a portion of the downstream end surface where the outflow port is not formed. With this configuration, the fluid resistance element can be prevented from shifting to the downstream side without hindering the flow rate characteristics of the fluid resistance element.

[0013] As a specific embodiment of the fluid resistance element, the fluid resistance element may be cylindrical, with a plurality of resistance flow channels formed along the axial direction. In this structure, in order to avoid hindering the flow of fluid relative to the fluid resistance element, it is preferred that the element holder surrounds and maintains the outer peripheral surface of the fluid resistance element.

[0014] In order to hold the fluid resistance element by the element holder without hindering the flow of the fluid, the element holder preferably has a lead-out portion that leads the fluid flowing out of the resistance flow channel to the internal flow channel.

[0015] As a specific embodiment of the fluid resistance element, as described above, it is possible to consider the fluid resistance element to be cylindrical, with a plurality of resistance flow channels formed along the axial direction. In this configuration, the element holder preferably includes: a cylindrical member that surrounds and holds the outer circumference of the fluid resistance element and sandwiches the sealing member between the holder mounting portion; and a fixing member that is separate from the cylindrical member and positions and fixes the cylindrical member to the holder mounting portion while the cylindrical member compresses the sealing member. According to this structure, since the element holder is formed as a separate structure of the cylindrical member and the fixing member, each can be easily processed.

[0016] In the case where the element holder is made into a separate structure of a tubular part and a fixed part, in order to prevent the element holder from hindering the flow of the fluid, it is preferred that a lead-out portion is formed in the tubular part and / or the fixed part, and the lead-out portion leads the fluid flowing out of the resistance flow channel to the internal flow channel.

[0017] Preferably, the bracket mounting portion is formed on a planar side surface of the flow channel block, and the fluid resistance element is fixed substantially perpendicularly to the side surface by mounting the element bracket on the bracket mounting portion. With this structure, the bracket mounting portion and the like in the flow path block can be easily processed.

[0018] In the present invention, if the fluid resistance element is a ceramic flow restrictor, the effect can be more significant.

[0019] As a specific embodiment of the fluid device, it can be considered that a flow sensor and a fluid control valve are mounted on the block, or that a flow sensor or a pressure sensor is mounted on the block.

[0020] As described above, according to the present invention, it is possible to reduce positional deviation or vibration of the fluid resistance element in the flow channel and to fix the fluid resistance element to the flow channel. BRIEF DESCRIPTION OF THE DRAWINGS

[0021] Figure 1 This is a diagram schematically showing the structure of a fluid control device according to one embodiment of the present invention. Figure 2 It is a perspective view showing the structure of a fluid resistance element according to the same embodiment. Figure 3 It is a cross-sectional view schematically showing a fixing mechanism according to the same embodiment. Figure 4 It is a cross-sectional view schematically showing an exploded state of the fixing mechanism according to the same embodiment. Figure 5 This is a diagram schematically showing the tubular member and the second downstream flow path according to the same embodiment, as viewed from below. Figure 6 It is a cross-sectional view schematically showing a fixing mechanism according to a modified embodiment. Figure 7 It is a cross-sectional view schematically showing a fixing mechanism according to a modified embodiment. Figure 8 This is a cross-sectional view schematically showing a conventional method of fixing a ceramic current restrictor. DETAILED DESCRIPTION

[0022] Below, an embodiment of a fluid control device, as an example of a fluid device according to the present invention, will be described with reference to the accompanying drawings. For ease of understanding, any of the following figures are schematically depicted with appropriate omissions or exaggerations. Identical components are denoted by the same reference numerals, and descriptions thereof are omitted as appropriate.

[0023] <1. Basic Structure of Fluid Control Device 100> The fluid control device 100 of this embodiment is a so-called mass flow controller used in a semiconductor manufacturing process. The fluid control device 100 can be used not only in a semiconductor manufacturing process but also in other processes.

[0024] like Figure 1 As shown, the fluid control device 100 is a pressure-type fluid control device. Specifically, the fluid control device 100 includes: a flow channel block B having a flow channel R (hereinafter referred to as the internal flow channel R) disposed therein; a fluid control valve V disposed in the flow channel block B; a pair of pressure sensors PS1 and PS2 serving as fluid sensors, disposed upstream and downstream of the fluid control valve V in the flow channel block B; and a valve control unit CTL that performs feedback control on the fluid control valve V so that the flow rate in the internal flow channel R, calculated based on the pressure values ​​measured by the pair of pressure sensors PS1 and PS2, approaches a predetermined target value.

[0025] The flow channel block B is, for example, in the shape of a rectangular parallelepiped, with a predetermined surface ( Figure 1A fluid control valve V and a pair of pressure sensors PS1 and PS2 are installed on the upper surface (in the center). Furthermore, a concave housing B1 for the fluid control valve V is provided on a predetermined surface of the flow channel block B. This housing B1 divides the internal flow channel R into an upstream flow channel R1 and a downstream flow channel R2. One end of the upstream flow channel R1 opens at the bottom of the housing B1, while one end of the downstream flow channel R2 opens at the side of the housing B1.

[0026] A pair of pressure sensors PS1 and PS2 are connected to the upstream and downstream sides of the fluid resistance element 2 provided in the internal flow passage R, respectively, and are both connected to a flow rate calculation unit S2 that calculates the flow rate based on the outputs of the pair of pressure sensors PS1 and PS2. The pair of pressure sensors PS1 and PS2 are mounted in a row together with the fluid control valve V on a predetermined surface of the flow passage block B (at the Figure 1 The middle is the upper surface).

[0027] The valve control unit CTL comprises a so-called computer equipped with a CPU, memory, A / D converters, and other components. The valve control unit CTL executes programs stored in the memory and collaborates with various devices to achieve various functions. Specifically, the valve opening of the fluid control valve V is feedback-controlled so that the flow rate calculated by the flow rate calculation unit S2 approaches the target value pre-stored in the memory.

[0028] <2. Fluid resistance element 2 and fixing mechanism 10 of fluid resistance element 2> The fluid resistance element 2 of this embodiment becomes a resistance member when the fluid flows. Figure 2 As shown, a flow path 21 (hereinafter referred to as resistance flow path 21 ) is formed to communicate with the internal flow path R and to serve as a resistance element. The fluid resistance element 2 of this embodiment is an element made of ceramics such as quartz, alumina, zirconia, or silicon nitride (ceramic restrictor).

[0029] The fluid resistance element 2 is, for example, cylindrical and has one or more (e.g., several hundred) resistance flow channels 21 formed along the axial direction. The fluid resistance element 2 has an outer diameter (outer diameter) of approximately several millimeters (e.g., 1.5 mm) and a length (axial dimension) of approximately several to several tens of millimeters (e.g., 7 mm). These dimensions may be varied as appropriate.

[0030] The resistance flow channel 21 is formed to axially penetrate the fluid resistance element 2. Specifically, an inlet for the resistance flow channel 21 is formed on one axial end face 2a (the upstream end face 2a) of the fluid resistance element 2, and an outlet for the resistance flow channel 21 is formed on the other axial end face 2b (the downstream end face 2b) of the fluid resistance element 2. The resistance flow channel 21 in this embodiment is a linear resistance flow channel with a circular cross-section. The diameter (inner diameter) of the resistance flow channel 21 is less than 1 mm and is approximately tens of μm (e.g., 30 μm). Its length (axial dimension) is the same as that of the fluid resistance element 2, ranging from several to tens of mm (e.g., 7 mm). However, these dimensions can be modified as appropriate.

[0031] Moreover, if Figure 1 、 Figure 3 and Figure 4 As shown in FIG. 1 , the fluid control device 100 of the present embodiment further includes a fixing mechanism 10 for fixing the fluid resistance element 2 to the internal flow path R of the flow path block B.

[0032] like Figure 1 、 Figures 3 to 5 As shown, the fixing mechanism 10 includes an element holder 3 that holds the fluid resistance element 2; a holder mounting portion 4 formed in the flow channel block B and mounted with the element holder 3; and a sealing member 5 interposed between the opposing surfaces of the element holder 3 and the holder mounting portion 4. The fixing mechanism 10 positions and secures the element holder 3, which holds the fluid resistance element 2, to the holder mounting portion 4, with the sealing member 5 pressed against the opposing surfaces of the element holder 3 and the holder mounting portion 4.

[0033] Specifically, if Figures 3 to 5 As shown, the element holder 3 includes a cylindrical member 31 that surrounds and holds the outer peripheral surface of the fluid resistance element 2 , and a fixing member 32 that is separate from the cylindrical member 31 and fixes the cylindrical member 31 to the holder mounting portion 4 .

[0034] The tubular component 31 is a cylindrical metal component that accommodates and holds the fluid resistance element 2 inside. In addition, the tubular component 31 clamps the sealing component 5 between the bracket mounting portion 4. The tubular component 31 has a contact surface 31x that contacts the downstream end face 2b of the fluid resistance element 2 while holding the fluid resistance element 2. The contact surface 31x is composed of a protrusion 311 that protrudes radially inward from the inner circumference of the tubular component 31. The protrusion 311 is formed on the lower end side of the inner circumference of the tubular component 31. In addition, the contact surface 31x contacts the portion of the downstream end face 2b of the fluid resistance element 2 where the outflow port is not formed, and in the present embodiment, contacts the peripheral portion of the downstream end face 2b of the fluid resistance element 2.

[0035] The tubular member 31 of this embodiment is configured such that, in a state where the fluid resistance element 2 is housed and held, the upper end portion 2c of the fluid resistance element 2 protrudes outward from the upper end opening of the tubular member 31. Furthermore, an O-ring serving as a sealing member 5 is attached to the outer peripheral surface of the upper end portion 2c of the fluid resistance element 2 that protrudes from the tubular member 31 (see FIG. 2 ). Figure 4 Thus, when the cylindrical member 31 is mounted on the bracket mounting portion 4 , the O-ring 5 is sandwiched between the upper end surface of the cylindrical member 31 and the inner surface of the bracket mounting portion 4 (the surface facing the upper end surface of the cylindrical member 31 ) and is crushed.

[0036] With the cylindrical member 31 squeezing the sealing member 5, the fixing member 32 positions and fixes the cylindrical member 31 to the bracket mounting portion 4. The fixing member 32 in this embodiment is, for example, a metal member having a rectangular flat plate shape when viewed from above. The fixing member 32 is fixed to the lower surface of the flow channel block B, for example, with screws.

[0037] The bracket mounting portion 4 is formed on the flat side surface of the flow channel block B (at Figure 1 The concave part of the lower surface is shown in the figure. Figure 3 and Figure 4 As shown, the bracket mounting portion 4 of this embodiment has a first recess 41 for accommodating the tubular member 31 and a second recess 42 for accommodating the fixing member 32. Alternatively, the bracket mounting portion 4 may not have the second recess 42. Furthermore, the downstream flow path R2 is divided by the bracket mounting portion 4 into a first downstream flow path R2a and a second downstream flow path R2b.

[0038] The first recess 41 is formed approximately perpendicularly to the lower surface of the flow channel block B and accommodates the tubular component 31. This first recess 41 has a shape roughly identical to the outer shape of the tubular component 31, and in this embodiment, has a circular cross-section. Furthermore, one end of the first downstream flow channel R2a opens into the bottom surface of the first recess 41. Furthermore, the periphery of the opening of the first downstream flow channel R2a in the bottom surface of the first recess 41 forms the inner surface of the bracket mounting portion 4, which sandwiches the O-ring 5 between the bracket mounting portion 4 and the upper end surface of the tubular component 31.

[0039] The second recess 42 is formed approximately perpendicularly to the lower surface of the flow channel block B in the same manner as the first recess 41, and accommodates the fixing component 32. The second recess 42 has a shape corresponding to the outer shape of the fixing component 32, and in the present embodiment, the cross section is rectangular. Moreover, one end of the second downstream side flow channel R2b opens at the bottom surface of the second recess 42. In addition, the second downstream side flow channel R2b may also be a structure in which one end opens at the inner surface of the first recess 41. In addition, a flow channel portion 421 may also be formed at the bottom surface of the second recess 42, and the flow channel portion 421 is used to guide the fluid flowing out of the fluid resistance element 2 to the second downstream side flow channel R2b.

[0040] By attaching the element holder 3 to the holder mounting portion 4 thus constructed, the fluid resistance element 2 is fixed approximately perpendicularly to the lower surface. Specifically, the cylindrical member 31 holding the fluid resistance element 2 and the O-ring 5 are housed in the first recess 41 of the holder mounting portion 4. In this state, the fixing member 32 is housed and fixed in the second recess 42. This compresses the O-ring 5 between the upper end surface of the cylindrical member 31 and the bottom surface of the first recess 41 (the surface facing the upper end surface of the cylindrical member 31). This compression of the O-ring 5 ensures a tight seal between the inner surface of the first recess 41 and the upper end surface of the cylindrical member 31. Furthermore, the O-ring 5 is in close contact with the outer circumference of the upper end 2c of the fluid resistance element 2, which extends outward from the element holder 3, and the inner surface of the first recess (the surface facing the outer circumference of the upper end 2c). In this fixing mechanism 10, by fixing the fixing member 32 to the second recess 42, the fixing member 32 is positioned relative to the flow channel block B (internal flow channel R). The element holder 3, which is fixed by contact with the fixing member 32, is also positioned relative to the flow channel block B (internal flow channel R). As a result, the fluid resistance element 2 held by the element holder 3 is positioned relative to the flow channel block B (internal flow channel R).

[0041] Here, if Figure 4 As shown, the fixing member 32 has a mounting surface 32a, which is mounted in the second recess 42, and a pressing surface 32b, which is configured to compress the O-ring 5 with the cylindrical member 31 when the mounting surface 32a is mounted in the second recess 42. In this embodiment, the mounting surface 32a and the pressing surface 32b are formed on the same flat surface. Therefore, when the fixing member 32 is mounted in the second recess 42, the sum of the axial length of the cylindrical member 31 and the natural axial thickness of the O-ring 5 is greater than the distance between the upper surface (pressing surface 32a) of the fixing member 32 and the bottom surface of the first recess 41. Furthermore, the axial length of the cylindrical member 31 is less than the distance between the upper surface (pressing surface 32a) of the fixing member 32 and the bottom surface of the first recess 41. With this configuration, when the fixing member 32 is mounted in the second recess 42, the O-ring 5 secures the cylindrical member 31 and the fluid resistance element 2 in the vertical (axial) position. Furthermore, the O-ring 5 contacts the outer circumferential surface of the fluid resistance element 2 and the inner surface of the bracket mounting portion 4, positioning the tubular member 31 and the fluid resistance element 2 in the left-right direction (a direction perpendicular to the axial direction). Thus, the O-ring 5 fills the gap formed by the outer circumferential surface of the upper end portion 2c of the fluid resistance element 2, the upper end surface of the element holder 3 (tubular member 31), and the opposing surface of the bracket mounting portion 4. As a result, the O-ring 5 positions the fluid resistance element 2 and tubular member 31 relative to the bracket mounting portion 4.

[0042] When the element holder 3 is mounted on the holder mounting portion 4, a gap may be provided between the upstream end face 2a of the fluid resistance element 2 held in the tubular member 31 and the bottom surface of the first recess 41, thereby preventing stress from being applied to the fluid resistance element 2. Alternatively, a configuration may be employed in which, when the element holder 3 is mounted on the holder mounting portion 4, the upstream end face 2a of the fluid resistance element 2 held in the tubular member 31 contacts the bottom surface of the first recess 41.

[0043] Furthermore, in this embodiment, if Figures 3 to 5 As shown, the element holder 3 has a lead-out portion 33 for leading the fluid flowing out of the resistance flow channel 21 to the downstream side flow channel R2 (the second downstream side flow channel R2b). Specifically, the lead-out portion 33 for leading the fluid flowing out of the resistance flow channel 21 to the downstream side flow channel R2 (the second downstream side flow channel R2b) is formed in the tubular component 31 and / or the fixed component 32. In the present embodiment, a groove 31M is formed at the lower end portion of the tubular component 31, which serves as a lead-out portion for leading the fluid flowing out of the resistance flow channel 21 to the second downstream side flow channel R2b. The groove 31M connects the downstream side end face 2b of the fluid resistance element 2 and the opening of the second downstream side flow channel R2b. In addition, the groove 31M is a cutout formed at the lower end portion of the tubular component 31, as shown in FIG. Figure 5 As shown, the groove 31M extends from the center of the fluid resistance element 2 to the second downstream flow passage R2b. The groove 31M (notch) can be variously modified in form; for example, it can be formed to extend across the entire radial direction of the tubular member 31. Through the thus configured outlet portion 33, the fluid flows directly or via the flow passage portion 421 formed in the second recess 42 to the downstream flow passage R2 (second downstream flow passage R2b).

[0044] <3. Effects of this embodiment> Thus, according to the fluid control device 100 of this embodiment, the element holder 3 is positioned and mounted on the holder mounting portion 4 while the sealing member 5 is compressed by the element holder 3 holding the fluid resistance element 2 and the holder mounting portion 4. This reduces positional deviation or vibration of the fluid resistance element 2 in the internal flow passage R, and allows the fluid resistance element 2 to be fixed to the internal flow passage R. As a result, it is possible to reduce variations in response performance associated with positional deviation of the fluid resistance element 2, or to reduce fluctuations in measured values ​​associated with vibration of the fluid resistance element 2.

[0045] <4. Other Implementation Methods> For example, in the above embodiment, the contact surface 31x that contacts the downstream end surface 2b of the fluid resistance element 2 is provided in the cylindrical member 31, but Figure 6 and Figure 7As shown, the upper surface of the fixing member 32 may also have a contact surface 32x that contacts the downstream end surface 2b of the fluid resistance element 2. Since the protrusion 311 is not required on the tubular member 31, the tubular member 31 can be formed into a cylindrical shape with a uniform cross-section along the axial direction. Furthermore, the bracket mounting portion 4 may also have a contact surface that contacts the end surface of the fluid resistance element 2.

[0046] In this case, it is conceivable to provide a guide portion 33 for guiding the fluid flowing out of the resistance flow channel 21 to the second downstream flow channel R2b in the fixed component 32. Specifically, Figure 6 As shown, a recess 321 may be formed on the upper surface of the fixing member 32 to constitute the outlet portion 33. The recess 321 communicates with the downstream end face 2b of the fluid resistance element 2 and the opening of the second downstream flow passage R2b. Figure 7 As shown, a convex portion 322 may be formed on the upper surface of the fixing member 32 to constitute the outlet portion 33. The upper surface of the convex portion 322 contacts both the lower end surface of the tubular member 31 and the downstream end surface 2b of the fluid resistance element 2. Thus, the gap formed between the upper surface of the fixing member 32 and the fluid resistance element 2 serves as the outlet portion 33.

[0047] Furthermore, in the above-described embodiment, the element holder 3 is structured to be separated into the cylindrical member 31 and the fixing member 32 . However, the cylindrical member 31 and the fixing member 32 may be formed integrally.

[0048] The embodiment described is a structure in which the fluid resistance element 2 is fixed approximately vertically relative to the planar side surface (lower surface) of the flow channel block B, but the fluid resistance element 2 can also be a structure in which it is fixed at an angle relative to the planar side surface (lower surface) of the flow channel block B, or it can be a structure in which it is fixed horizontally.

[0049] In the above embodiment, a single sealing member 5 (O-ring) is provided at the upper end portion 2 c of the fluid resistance element 2 as the extension portion. However, a plurality of sealing members 5 (O-rings) may be provided at the upper end portion 2 c of the fluid resistance element 2 along the vertical direction (axial direction).

[0050] While the fluid control device 100 is described as a pressure-type fluid control device in the above embodiment, a thermal-type fluid control device is also possible. The thermal-type fluid control device 100 includes a thermal sensor with a temperature-measuring resistor installed in a bypass channel that branches off from and then merges into the internal flow channel R of the flow channel block B. Furthermore, in this configuration, the fluid resistance element 2 in the internal flow channel R serves as a laminar flow element and is secured between the branching and converging points of the bypass channel using the securing mechanism described in the above embodiment.

[0051] In the above-described embodiment, as the actuator of the fluid control valve V, an actuator using a piezoelectric element (piezoelectric stack) or an actuator using a solenoid can be adopted.

[0052] The fluid device of the present invention is not limited to the fluid control device as in the above embodiment, and may be a flow meter having a flow rate sensor mounted on a block, or a pressure gauge having a pressure sensor mounted on a block.

[0053] In addition, various embodiments may be modified or combined without departing from the spirit of the present invention. Description of Reference Numerals

[0054] 100 Fluid control devices (fluid devices) V Fluid Control Valve R Internal flow channel B runner block PS1, PS2 pressure sensor (flow sensor) 2 Fluid resistance element 21 resistance flow channel 2b Downstream end face 10 Fixing mechanism 3 component brackets 31 cylindrical parts 31x contact surfaces 32 fixed parts 33 Export 4 Bracket mounting part 5 Sealing parts.

Claims

1. A fluid device for controlling or measuring a physical quantity of a fluid, characterized in that: have: A flow channel block is formed with an internal flow channel; a fluid resistance element, disposed in the internal flow channel, forming a resistance flow channel communicating with the internal flow channel; and A fixing mechanism fixes the fluid resistance element to the internal flow channel, The fixing mechanism has: an element support for holding the fluid resistance element; a bracket mounting portion formed in the flow channel block to communicate with the internal flow channel and to mount the element bracket; as well as a sealing member interposed between the element holder and a surface of the holder mounting portion that faces the element holder, The element holder is positioned and mounted on the holder mounting portion in a state in which the sealing member is compressed by the element holder and the holder mounting portion.

2. The fluid device according to claim 1, wherein: The element holder holds the end of the fluid resistance element in a state of extending outward. The sealing member seals between a portion of the fluid resistance element that protrudes outward from the element holder and a surface of the holder mounting portion that faces the protruding portion.

3. The fluid device according to claim 1 or 2, characterized in that The element holder or the holder mounting portion has a contact surface that comes into contact with an end surface of the fluid resistance element in a state where the fluid resistance element is held.

4. The fluid device according to claim 3, characterized in that The downstream end surface of the fluid resistance element is formed with an outflow port of the resistance flow channel. The contact surface contacts a portion of the downstream end surface where the outflow port is not formed.

5. The fluid device according to any one of claims 1 to 4, characterized in that The fluid resistance element is columnar and has a plurality of resistance flow channels formed along the axial direction. The element holder surrounds and holds the outer peripheral surface of the fluid resistance element.

6. The fluid device according to any one of claims 1 to 5, characterized in that The element holder includes a lead-out portion configured to lead the fluid flowing out of the resistance flow channel to the internal flow channel.

7. The fluid device according to any one of claims 1 to 4, characterized in that The fluid resistance element is columnar and has a plurality of resistance flow channels formed along the axial direction. The component support has: a cylindrical member, surrounding and holding the outer peripheral surface of the fluid resistance element, and sandwiching the sealing member between the cylindrical member and the bracket mounting portion; as well as The fixing member is a separate body from the cylindrical member, and positions and fixes the cylindrical member to the bracket mounting portion in a state where the cylindrical member has crushed the sealing member.

8. The fluid device according to claim 7, characterized in that A lead-out portion for leading the fluid flowing out of the resistance flow channel to the internal flow channel is formed in the tubular member and / or the fixed member.

9. The fluid device according to any one of claims 5 to 8, characterized in that The bracket mounting portion is formed on a planar side surface of the flow channel block. By mounting the element holder on the holder mounting portion, the fluid resistance element is fixed substantially perpendicularly to the side surface.

10. The fluid device according to any one of claims 1 to 9, characterized in that The fluid resistance element is a ceramic flow restrictor.

11. The fluid device according to any one of claims 1 to 10, characterized in that: The fluid device includes a flow sensor and a fluid control valve mounted on the block.

12. The fluid device according to any one of claims 1 to 10, characterized in that The fluid device includes a flow sensor or a pressure sensor mounted on the block.

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